阅读说明：本技术 一种晶圆旋转涂覆废液收集装置 (Wafer spin coating waste liquid collection device ) 是由 许志雄 于 2020-06-23 设计创作，主要内容包括：本发明公开了一种晶圆旋转涂覆废液收集装置,其结构包括顶板、收集箱、辅助压紧装置、放置座、放置槽和风道,本发明通过将辅助压紧装置设置于顶板顶部左右两端,便可通过旋钮带动转动盘进行转动,使得转动盘前端通过卡柱与连接板上的横槽进行卡位滑动,转动盘后端通过拨动件与压紧件上的弧形槽进行卡位滑动,并且压紧件通过限位件进行固定滑动,从而通过压紧件沿着安装板上的滑槽进行伸缩滑动,实现对晶圆进行调节压紧固定,保证废液收集操作的稳定性。同时,通过将压紧件下端内中部贯穿有竖槽,并且竖槽内径表面与限位件卡位滑动,便于进行正常的滑动,保证滑动的稳定性。(The invention discloses a wafer rotating coating waste liquid collecting device which structurally comprises a top plate, a collecting box, an auxiliary pressing device, a placing seat, a placing groove and an air channel. Simultaneously, it has perpendicular groove to run through the middle part in will compressing tightly a lower extreme to perpendicular inslot footpath surface slides with the locating part screens, is convenient for carry out normal slip, guarantees gliding stability.)

1. The wafer rotary coating waste liquid collecting device comprises a top plate (1), a collecting box (2) and a placing seat (4), wherein the middle part of the bottom end of the top plate (1) is tightly fixed with the collecting box (2);

the method is characterized in that: still include supplementary closing device (3), supplementary closing device (3) set up both ends about roof (1) top, supplementary closing device (3) include box (31), knob (32) and slide mechanism (33), box (31) right side middle part fixed mounting has knob (32), the middle part is provided with slide mechanism (33) in box (31), box (31) fixed mounting is at both ends about roof (1) top.

2. The wafer spin coating waste liquid collecting device of claim 1, characterized in that: roof (1) top middle part fixed mounting has places seat (4), it has standing groove (5) to place seat (4) top middle part embedding, standing groove (5) inboard bottom runs through there is wind channel (6).

3. The wafer spin coating waste liquid collecting device of claim 1, characterized in that: slide mechanism (33) are including rolling disc (331), transverse groove (332), connecting plate (333), dial piece (334), arc wall (335), compress tightly piece (336), locating part (337), spout (338) and mounting panel (339), the outer fringe of rolling disc (331) front end face passes through the card post and slides with transverse groove (332) screens, middle part in connecting plate (333) is worn to locate in transverse groove (332), rolling disc (331) rear end middle part is fixed each other with dial piece (334), dial piece (334) and arc wall (335) inner diameter surface screens and slide.

4. The wafer spin coating waste liquid collecting device of claim 3, characterized in that: the arc-shaped groove (335) penetrates through the middle part in the pressing piece (336), and the pressing piece (336) is locked and fixed with four corners of the rear end face of the connecting plate (333).

5. The wafer spin coating waste liquid collecting device of claim 4, characterized in that: the middle part slides with locating part (337) screens in compressing tightly piece (336) lower extreme, compress tightly piece (336) along spout (338) sliding fit, middle part in mounting panel (339) is worn to locate in spout (338), rolling disc (331) rear end middle part is connected with knob (32) through the connecting axle.

6. The wafer spin coating waste liquid collecting device of claim 1, characterized in that: the outside of the knob (32) is provided with a rubber sleeve, and the surface of the rubber sleeve is provided with anti-skid lines.

7. The wafer spin coating waste liquid collecting device of claim 1, characterized in that: the lower end of the outer side of the box body (31) is provided with four screw holes, and the diameter of each screw hole is 8 MM.

8. The wafer spin coating waste liquid collecting device of claim 5, characterized in that: the outer edge of the front end face of the rotating disc (331) is provided with a clamping column, and the clamping column slides in a clamping manner with the inner diameter surface of the transverse groove (332).

9. The wafer spin coating waste liquid collecting device of claim 5, characterized in that: the middle part runs through in compressing tightly piece (336) lower extreme has erect the groove to erect inslot footpath surface and stopper (337) screens and slide.

10. The wafer spin coating waste liquid collecting device of claim 5, characterized in that: the upper end of the inner side of the pressing piece (336) is provided with a lower pressing rod, and the lower pressing rod is in sliding fit with the inner diameter surface of the sliding groove (338).

Technical Field

The invention relates to the technical field of wafer spin coating processes, in particular to a wafer spin coating waste liquid collecting device.

Background

The requirement of new technology and market on the productivity of equipment is continuously improved, more process modules are required to be configured for realizing more productivity under the same floor area, the integration level of the process modules is continuously improved, a novel rotary coating module with a plurality of spin coating units arranged in one process cavity is generated, and therefore a waste liquid collecting device is required for collecting waste liquid during processing.

Under the condition that needs use the rotatory coating waste liquid collection device of wafer, because current waste liquid collection device structure is comparatively simple, be the embedding and place and carry out the waste liquid and collect, rotatory coating rocks the skew appears easily to the dynamics is overweight and is compressed tightly when fixed and cause the wafer to warp the damage easily, influences the homogeneity and the waste liquid collection effect of coating.

Disclosure of Invention

Technical problem to be solved

In order to overcome prior art not enough, a rotatory coating waste liquid collection device of wafer has now been proposed, has solved under the condition that needs use the rotatory coating waste liquid collection device of wafer, because current waste liquid collection device structure is comparatively simple, is the embedding and places and carry out the waste liquid and collect, appears rotatory coating easily and rocks the skew to the dynamics is overweight and is compressed tightly and cause the wafer to warp the damage easily when fixed, influences the homogeneity of coating and the problem of waste liquid collection effect.

(II) technical scheme

The invention is realized by the following technical scheme: the invention provides a wafer rotating coating waste liquid collecting device which comprises a top plate, a collecting box, an auxiliary pressing device and a placing seat, wherein the middle part of the bottom end of the top plate is tightly fixed with the collecting box, the auxiliary pressing device is arranged at the left end and the right end of the top plate, the auxiliary pressing device comprises a box body, a knob and a sliding mechanism, the knob is fixedly arranged in the middle of the right side of the box body, the sliding mechanism is arranged in the middle of the box body, and the box body is fixedly arranged at the left end and the right.

Further, a placing seat is fixedly installed in the middle of the top end of the top plate, a placing groove is embedded in the middle of the top end of the placing seat, and an air channel penetrates through the bottom of the inner side of the placing groove.

Further, slide mechanism includes rolling disc, cross slot, connecting plate, dials piece, arc wall, compresses tightly piece, locating part, spout and mounting panel, the outer fringe of terminal surface slides through calorie post and cross slot screens before the rolling disc, the cross slot is worn to locate middle part in the connecting plate, rolling disc rear end middle part with dial piece reciprocal anchorage, dial piece and arc wall internal diameter surface screens slip, the arc wall runs through middle part in compressing tightly the piece to it is fixed with connecting plate rear end face four corners locking to compress tightly the piece, it slides with the locating part screens to compress tightly middle part in the piece lower extreme, compress tightly along spout sliding fit, the spout is worn to locate middle part in the mounting panel, rolling disc rear end middle part is connected with the knob through the connecting axle.

Further, the knob outside is provided with the rubber sleeve to the rubber sleeve surface is provided with anti-skidding line.

Furthermore, the lower end of the outer side of the box body is provided with four screw holes, and the diameter of each screw hole is 8 MM.

Furthermore, the outer edge of the front end face of the rotating disc is provided with a clamping column, and the clamping column slides in a clamping manner with the inner diameter surface of the transverse groove.

Furthermore, a vertical groove penetrates through the middle part in the lower end of the pressing part, and the inner diameter surface of the vertical groove slides in a clamping manner with the limiting part.

Furthermore, a lower pressing rod is arranged at the upper end of the inner side of the pressing piece and is in sliding fit with the inner diameter surface of the sliding groove.

Furthermore, the mounting plate is made of PVC plastic.

Furthermore, the poking piece is made of stainless steel.

(III) advantageous effects

Compared with the prior art, the invention provides a wafer spin coating waste liquid collecting device, which has the following beneficial effects:

the method has the advantages that: through setting up supplementary closing device in both ends about the roof top, alright drive the rolling disc through the knob and rotate, make the rolling disc front end carry out the screens through the cross slot on card post and the connecting plate and slide, the rolling disc rear end carries out the screens through stirring the piece and compressing tightly the arc wall on the piece and slide, and compress tightly the piece and carry out fixed slip through the locating part, thereby slide through compressing tightly the spout on along the mounting panel that stretches out and draws back, the realization is adjusted the wafer and is compressed tightly fixedly, prevent the loss of pressure wafer, guarantee the stability of waste liquid collection operation.

The advantages are two: through will compressing tightly middle part run through in the piece lower extreme and have erect the groove to erect inslot footpath surface and locating part screens and slide, be convenient for carry out normal slip, guarantee gliding stability.

Drawings

FIG. 1 is a schematic view of a wafer spin coating waste liquid collecting device according to the present invention;

FIG. 2 is a schematic structural diagram of an auxiliary pressing device according to the present invention;

FIG. 3 is a schematic structural view of the sliding mechanism of the present invention;

FIG. 4 is a schematic structural view of the toggle member of the present invention;

fig. 5 is a schematic structural view of the rotating disk of the present invention.

In the figure: the device comprises a top plate-1, a collecting box-2, an auxiliary pressing device-3, a placing seat-4, a placing groove-5, an air duct-6, a box body-31, a knob-32, a sliding mechanism-33, a rotating disc-331, a transverse groove-332, a connecting plate-333, a stirring piece-334, an arc-shaped groove-335, a pressing piece-336, a limiting piece-337, a sliding groove-338 and a mounting plate-339.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Referring to fig. 1, the present invention provides a wafer spin coating waste liquid collecting device: comprises a top plate 1, a collecting box 2, an auxiliary pressing device 3, a placing seat 4, a placing groove 5 and an air channel 6. 1 bottom middle part of roof closely fixed with collecting box 2, 1 top middle part fixed mounting of roof has place seat 4, and 4 top middle parts of placing seat imbeds and has a standing groove 5, are convenient for assist the placing, and 5 inboard bottoms of standing groove run through there is wind channel 6, and supplementary closing device 3 sets up both ends about 1 top of roof.

The placing seat 4 is integrally cylindrical, the side surface is a cylindrical side surface, and the upper part is of a multilayer structure. Such a cylindrical lateral surface allows the auxiliary pressing device 3 to be arranged on a diameter of the circular section of the cylinder during the setting, so that the wafer on the placing base 4 is prevented from being pulled out of the lateral surface during the pressing process.

Referring to fig. 2, a part of the auxiliary pressing device 3 is shown (the auxiliary pressing device 3 includes two substantially symmetrical parts). The auxiliary pressing device 3 comprises a box body 31, a knob 32 and a sliding mechanism 33, wherein the knob 32 is fixedly installed in the middle of the right side of the box body 31, so that the box body is convenient to rotate under stress, and corresponding pressing and releasing actions are realized by the knob 32. The middle part in the box 31 is provided with a sliding mechanism 33, and the box 31 is fixedly installed at the left and right ends of the top plate 1, with reference to fig. 1.

Referring to fig. 3, the sliding mechanism 33 includes a rotating disc 331, a transverse slot 332, a connecting plate 333, a toggle member 334, an arc-shaped slot 335, a pressing member 336, a limiting member 337, a sliding slot 338, and a mounting plate 339, and an outer edge of a front end surface of the rotating disc 331 slides in a locking manner with the transverse slot 332 through a locking column, so as to facilitate locking transmission.

Referring to fig. 3, the transverse slot 332 penetrates through the middle portion of the connecting plate 333, the middle portion of the rear end of the rotating disc 331 is fixed to the toggle element 334, the toggle element 334 slides in a clamping manner with the inner diameter surface of the arc-shaped slot 335, the arc-shaped slot 335 penetrates through the middle portion of the compressing element 336, and the compressing element 336 is fixed to four corners of the rear end surface of the connecting plate 333 in a locking manner.

Referring to fig. 3, the middle portion of the lower end of the pressing member 336 is clamped and slid by the limiting member 337 to facilitate fixed sliding, the pressing member 336 is slidably fitted along the sliding groove 338, the sliding groove 338 is inserted into the middle portion of the mounting plate 339 to facilitate connection and fixation, and the middle portion of the rear end of the rotating disc 331 is connected to the knob 32 through a connecting shaft.

Wherein, as shown in fig. 2, the outside of the knob 32 is provided with a rubber sleeve, and the surface of the rubber sleeve is provided with anti-slip lines, so as to avoid the slipping of hands when in use, thereby better realizing the pressing operation of the placing seat 4.

Wherein, the lower end of the outer side of the box body 31 is provided with four screw holes (not shown), and the diameter of the screw holes is 8MM, which is convenient for locking and fixing.

Referring to fig. 4 and 5, a locking column (not labeled, as shown in fig. 5, located on the left side in the transverse groove 332) is disposed on an outer edge of the front end surface of the rotating disc 331, and the locking column slides in a locking manner with an inner diameter surface of the transverse groove 332 to ensure normal locking transmission.

Referring to fig. 3, fig. 4 and fig. 5, a vertical groove (not labeled, as shown in fig. 5, the groove body at the bottom of the pressing member 336 is inserted through the middle portion of the lower end of the pressing member 336, and the inner diameter surface of the vertical groove is locked with the limiting member 337 for sliding, so as to facilitate normal sliding.

With continued reference to fig. 3, 4 and 5, a pressing rod (not labeled, as shown in fig. 3, a portion of which extends into the sliding groove 338) is disposed at an inner upper end of the pressing member 336, and the pressing rod is slidably engaged along an inner diameter surface of the sliding groove 338 for facilitating auxiliary fixing.

The toggle piece 334 can be made of stainless steel, and has the advantages of strong corrosion resistance, low cost and high cost performance.

In the invention, the mounting plate 339 is made of PVC plastic, and has the advantages of firmness, durability, high cost performance, corrosion resistance and good quality. The chemical field of PVC plastics refers to the compound PVC, which has nonflammability, high strength, weather resistance and excellent geometric stability, and has strong resistance to oxidant, reductant and strong acid, but can be corroded by concentrated oxidizing acid such as concentrated sulfuric acid and nitric acid and is not suitable for occasions where aromatic hydrocarbon and chlorinated hydrocarbon contact.

The working principle of the wafer rotary coating waste liquid collecting device provided by the invention is as follows:

firstly, a wafer rotary coating waste liquid collecting device is arranged at a proper position, a placing seat 4 is arranged in the middle of an auxiliary pressing device 3, and an air duct 6 (shown in figure 1) is connected with an external air outlet;

secondly, when the wafer is required to be subjected to circular rotation coating waste liquid collection, the wafer to be processed is placed in the placing groove 5 in the placing seat 4, and the wafer is subjected to processing operation through external rotation coating equipment;

thirdly, when the processing waste liquid generated after the spin coating is collected (the existing waste liquid collecting device has a simple structure, and is embedded for waste liquid collection, the spin coating is prone to shaking and shifting, and when the wafer is pressed and fixed with too heavy force, the wafer is prone to deformation and damage, which affects the uniformity of coating and the waste liquid collecting effect), the auxiliary pressing device 3 is arranged at the left end and the right end of the top plate 1, and then the knob 32 (as shown in fig. 2) is applied with force to rotate clockwise, so that the rotary disc 331 (as shown in fig. 3 to fig. 5) can be driven by the knob 32 to rotate, the front end of the rotary disc 331 can slide in a clamping manner through the clamping column and the transverse groove 332 on the connecting plate 333, and the rear end of the rotary disc 331 can slide in a clamping manner through the stirring piece 334 and the arc groove 335 on the pressing piece 336, and then the pressing, thereby slide through compressing tightly 336 along spout 338 on the mounting panel 339 that stretches out and draws back, it is provided with the depression bar to compress tightly 336 inboard upper end, and the depression bar is along spout 338 internal diameter surface sliding fit, be convenient for assist fixed, the realization compresses tightly fixedly to the regulation that the wafer carries out the moderate degree, and corresponding compress tightly fixedly can adjust the suitable degree, prevent the loss of pressure wafer, guarantee the stability of operation, then can carry out the stable collection of spin coating waste liquid.

The basic principles and main features of the present invention and the advantages of the present invention have been shown and described, and the standard parts used in the present invention are all available on the market, the special-shaped parts can be customized according to the description and the accompanying drawings, the specific connection mode of each part adopts the conventional means of bolt and rivet, welding and the like mature in the prior art, the machinery, parts and equipment adopt the conventional type in the prior art, and the circuit connection adopts the conventional connection mode in the prior art, and the details are not described herein.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.