阅读说明：本技术 一种片材承载装置及晶圆检测设备 (Sheet bearing device and wafer detection equipment ) 是由 赵赫 于 2020-06-10 设计创作，主要内容包括：本发明属于晶圆检测技术领域,公开了一种片材承载装置及晶圆检测设备。该片材承载装置包括用于承载片材的载台、用于驱动载台旋转的转台,以及分别用于在载台及转台之间转接气路和电路的配气机构和配电机构,转台包括可转动的转子以及套置于转子外的定子；配气机构包括分别设置于载台和转子的第一配气组件和第二配气组件；配电机构包括分别设置于载台和转子的第一配电组件和第二配电组件；转子与载台可拆卸连接,当转子与载台相连接时,第一配气组件和第二配气组件插接相连并形成转接气路、第一配电组件和第二配电组件插接相连并形成转接电路。该片材承载装置的转台及载台之间气路及电路转接结构简单、可靠。(The invention belongs to the technical field of wafer detection, and discloses a sheet bearing device and wafer detection equipment. The sheet bearing device comprises a carrying platform for bearing the sheet, a rotary table for driving the carrying platform to rotate, and a gas distribution mechanism and a power distribution mechanism which are respectively used for switching a gas circuit and a circuit between the carrying platform and the rotary table, wherein the rotary table comprises a rotatable rotor and a stator sleeved outside the rotor; the valve actuating mechanism comprises a first valve actuating assembly and a second valve actuating assembly which are respectively arranged on the carrying platform and the rotor; the power distribution mechanism comprises a first power distribution assembly and a second power distribution assembly which are respectively arranged on the carrying platform and the rotor; the rotor is detachably connected with the carrying platform, and when the rotor is connected with the carrying platform, the first air distribution assembly and the second air distribution assembly are connected in an inserting mode to form a switching air path, and the first power distribution assembly and the second power distribution assembly are connected in an inserting mode to form a switching circuit. The air path and circuit switching structure between the turntable and the carrying platform of the sheet bearing device is simple and reliable.)

1. The sheet bearing device comprises a carrying platform (1) for bearing sheets, a rotary table (2) for driving the carrying platform (1) to rotate, a gas distribution mechanism (3) and a power distribution mechanism (4) which are respectively used for switching gas circuits and electric circuits between the carrying platform (1) and the rotary table (2), wherein the rotary table (2) comprises a rotatable rotor (21) and a stator (22) arranged outside the rotor (21) in a sleeved mode, and the sheet bearing device is characterized in that:

the valve actuating mechanism (3) comprises a first valve actuating assembly (31) and a second valve actuating assembly (32) which are respectively arranged on the carrier (1) and the rotor (21);

the power distribution mechanism (4) comprises a first power distribution assembly (41) and a second power distribution assembly (42) which are respectively arranged on the carrier (1) and the rotor (21);

the rotor (21) is detachably connected with the carrier (1), when the rotor (21) is connected with the carrier (1), the first air distribution assembly (31) is connected with the second air distribution assembly (32) in an inserting mode to form a switching air path, and the first power distribution assembly (41) is connected with the second power distribution assembly (42) in an inserting mode to form a switching circuit.

2. The sheet carrying apparatus according to claim 1, wherein:

the first air distribution assembly (31) comprises an air pipe (311), and one end of the air pipe (311) extends out of the carrying platform (1);

the second air distribution assembly (32) comprises a first air passage (321) and an elastic plunger (322), the first air passage (321) is formed in the rotor (21) and the tail end of the first air passage is communicated to a bearing surface of the rotor (21) opposite to the carrying platform (1), and the elastic plunger (322) can seal the tail end of the first air passage (321) when in diastole;

when the rotor (21) is connected with the carrier (1), the air pipe (311) presses the elastic plunger (322) and is inserted into the first air passage (321) so as to be communicated with the first air passage (321) to form the switching air passage.

3. The sheet carrier device according to claim 2, wherein an air slide ring (6) is arranged between the stator (22) and the rotor (21), the air slide ring (6) being in communication with the first air channel (321) and a second air channel (221) formed in the stator (22), respectively.

4. The sheet carrying device according to claim 3, wherein the air slip ring (6) comprises a plurality of sealing members (61) arranged between the stator (22) and the rotor (21) at intervals, the sealing members (61) are annular, two adjacent sealing members (61) surround the stator (22) and the rotor (21) to form an annular air cavity (62), and the air cavities (62) are respectively communicated with the first air passage (321) and the second air passage (221);

the roughness of the outer wall of the rotor (21) in contact with the seal (61) is less than Ra0.8.

5. A sheet carrying arrangement according to claim 4, wherein the seal (61) comprises:

a flexible first ring member (611);

a rigid second ring member (612) fitted and connected to the outside of the first ring member (611); and

and the elastic third ring piece (613) is arranged between the second ring piece (612) and the inner wall of the stator (22) in an elastic deformation mode so as to continuously press the second ring piece (612) and enable the first ring piece (611) to be attached to the outer wall of the rotor (21).

6. A sheet carrying arrangement according to claim 5, wherein the inner wall of the stator (22) has a position-limiting portion (222) defining the spatial position of the seal (61);

the first annular element (611) is made of PTFE;

the second ring (612) is made of copper;

the third annular member (613) is made of rubber.

7. The sheet carrying apparatus according to claim 1, wherein:

the first power distribution assembly (41) comprises a terminal (411), and the terminal (411) extends out of the carrier (1);

the second power distribution assembly (42) comprises a wiring groove (421), an elastic element (422) and a connecting piece (423), wherein the elastic element (422) and the connecting piece (423) are accommodated in the wiring groove (421), one end of the elastic element (422) is connected with or abutted against the inner wall of the wiring groove (421), and the other end of the elastic element (422) is connected with the connecting piece (423);

when the rotor (21) is connected with the carrying platform (1), the wiring terminal (411) is inserted into the wiring groove (421), and the elastic element (422) presses the connecting sheet (423) so that the connecting sheet (423) is connected with the wiring terminal (411) to form the switching circuit.

8. The sheet carrying apparatus according to claim 7, wherein: the elastic element (422) can press the connecting piece (423) when being stretched, so that the connecting piece (423) blocks the wiring groove (421); the connecting sheet (423) can be deformed when being pressed by the binding post (411) and is attached to the binding post (411).

9. The sheet carrying apparatus according to claim 7, wherein: an electric slip ring (8) is arranged between the stator (22) and the rotor (21), and the electric slip ring (8) is electrically connected with the connecting sheet (423) and a circuit on the stator (22) respectively;

the electrical slip ring (8) comprises:

a stationary ring (81) provided to the stator (22);

and a rotor contact piece (82) which is directly or indirectly electrically connected to the connection piece (423) and one end of which protrudes from the rotor (21) and abuts against the stator ring (81).

10. A wafer inspection apparatus, comprising:

the sheet carrying apparatus (100) according to any one of claims 1 to 9, wherein the stage (1) is formed with a suction portion communicating with the air passage, the suction portion being capable of sucking a wafer;

a transfer device (200) with a movable end connected with the sheet carrying device (100) so as to adjust the space position of the sheet carrying device (100); and

the detection device (300) is used for detecting the wafers carried on the sheet carrying device (100).

Technical Field

The invention relates to the technical field of wafer detection, in particular to a sheet bearing device and wafer detection equipment.

Background

Wafers are the most basic materials for manufacturing various circuit elements and semiconductor chips, and the structural integrity and lattice uniformity of the wafer material itself directly affect the quality and yield of the chips. Therefore, optical automated inspection (AOI) is typically required after wafer production to ensure the quality and yield of wafers and wafer processed chip products.

Wafer optical automatic detection equipment generally takes a motion table system as a main body unit for detection, rapidly moves and accurately positions a wafer in the detection process through actions such as stepping, scanning and rapid compensation of each axis of the motion table, and simultaneously, the stability of focal length required by optical detection and the continuity of a view field are ensured by matching with an optical detection system, so that the comprehensive detection of a wafer film layer, a surface type, defects and the like is realized.

In view of the above, the motion performance and the positioning performance of the motion stage system become the key points that affect the detection quality of the wafer detection equipment, and because strict requirements are imposed on the position and the posture of the wafer in the detection process, the turntable and the stage (Chuck) for adsorbing the wafer in the motion stage subsystem need to have the functions of continuous rotation, fast response, accurate positioning, and the like, which makes the arrangement of the air path and the circuit inside the turntable and the stage complicated, thereby causing the phenomena of crowded internal structure, overlarge overall size, and the like. Meanwhile, the air circuit and the circuit are required to realize the rotating and transmitting of the shaft, so that the use of the electric slip ring and the air slip ring in the equipment becomes a basic requirement.

In the existing equipment in the market, a large number of air channel interfaces and cable interfaces are required for electrical transmission among the rotary table, the carrier module, the electric slip ring and the air slip ring, so that the difficulty of operations such as disassembly and assembly and maintenance of the equipment is improved, the phenomena of interface looseness or unfirm connection and the like are easily caused by repeated plugging of the air channel interfaces and the cable interfaces, and the stability and reliability of the operation of the detection equipment are influenced.

In addition, the structural size of the electric slip ring and the gas slip ring is limited, so that the integration level of the rotary table and the carrier is low, and the whole height of the optical automatic detection equipment is too large due to the stacking of the rotary table and the carrier, so that the phenomena that the motion load of the motion table is large, the mass center of the material is high, the dynamic stability is poor, the detection result is inaccurate and the like are caused, and the overall performance index of the detection equipment and the accuracy of the detection result are influenced to a great extent.

Disclosure of Invention

The invention aims to provide a sheet bearing device and wafer detection equipment, wherein an air passage and a circuit switching structure between a rotary table and a carrying table of the sheet bearing device are simple and reliable.

In order to achieve the purpose, the invention adopts the following technical scheme:

a sheet bearing device comprises a carrying platform for bearing sheets, a rotary table for driving the carrying platform to rotate, and a gas distribution mechanism and a power distribution mechanism which are respectively used for switching a gas circuit and a circuit between the carrying platform and the rotary table, wherein the rotary table comprises a rotatable rotor and a stator sleeved outside the rotor; the gas distribution mechanism comprises a first gas distribution assembly and a second gas distribution assembly which are respectively arranged on the carrying platform and the rotor; the power distribution mechanism comprises a first power distribution assembly and a second power distribution assembly which are respectively arranged on the carrying platform and the rotor; the rotor is detachably connected with the carrying platform, when the rotor is connected with the carrying platform, the first air distribution assembly and the second air distribution assembly are connected in an inserting mode to form a switching air path, and the first power distribution assembly and the second power distribution assembly are connected in an inserting mode to form a switching circuit.

Preferably, the first air distribution assembly comprises an air pipe, and one end of the air pipe extends out of the carrying platform; the second air distribution assembly comprises a first air passage and an elastic plunger, the first air passage is formed in the rotor, the tail end of the first air passage is communicated to a bearing surface of the rotor opposite to the carrying platform, and the elastic plunger can block the tail end of the first air passage in diastole; when the rotor is connected with the carrying platform, the air pipe presses the elastic plunger and is inserted in the first air passage to be communicated with the first air passage to form the switching air passage.

Preferably, an air slip ring is arranged between the stator and the rotor, and the air slip ring is respectively communicated with the first air passage and a second air passage formed on the stator.

Preferably, the air slip ring comprises a plurality of sealing elements arranged between the stator and the rotor at intervals, the sealing elements are annular, two adjacent sealing elements, the stator and the rotor surround to form an annular air cavity, and the air cavity is respectively communicated with the first air passage and the second air passage; the roughness of the outer wall of the rotor in contact with the seal is less than Ra0.8.

Preferably, the sealing member includes:

a flexible first ring member;

the rigid second annular piece is embedded and connected with the outer side of the first annular piece; and

and the elastic third annular piece is arranged between the second annular piece and the inner wall of the stator in an elastic deformation mode so as to continuously press the second annular piece and enable the first annular piece to be attached to the outer wall of the rotor.

Preferably, the inner wall of the stator is provided with a limit part for limiting the space position of the sealing element; the first ring member is made of PTFE; the second ring member is made of copper; the third annular member is made of rubber. .

Preferably, the first power distribution assembly comprises a terminal, and the terminal extends out of the carrying platform; the second power distribution assembly comprises a wiring groove, an elastic element and a connecting piece, wherein the elastic element and the connecting piece are accommodated in the wiring groove; when the rotor is connected with the carrying platform, the wiring terminal is inserted in the wiring groove, and the elastic element abuts against the connecting sheet so that the connecting sheet is connected with the wiring terminal to form the switching circuit.

Preferably, the elastic element can press the connecting sheet when being stretched, so that the connecting sheet blocks the wiring groove; the connecting sheet can be deformed when being pressed by the wiring terminal and is attached to the wiring terminal.

Preferably, an electric slip ring is arranged between the stator and the rotor, and the electric slip ring is electrically connected with the connecting sheet and a circuit on the stator respectively;

the electrical slip ring comprises:

a stationary ring disposed on the stator;

and the rotor connecting piece is directly or indirectly electrically connected with the connecting piece, and one end of the rotor connecting piece extends out of the rotor and is abutted with the fixed ring.

The invention adopts the following technical scheme:

a wafer inspection apparatus comprising:

in the sheet material carrying device, the carrying platform is provided with the adsorption part communicated with the air path, and the adsorption part can adsorb the wafer;

the movable end of the transfer device is connected with the sheet bearing device so as to adjust the spatial position of the sheet bearing device; and

and the detection device is used for detecting the wafer carried on the sheet carrying device.

The invention has the beneficial effects that:

according to the sheet bearing device, the plug-in type gas distribution mechanism and the power distribution mechanism are free of cable and gas pipe restraint, so that a gas path and circuit switching structure between the rotary table and the carrying table of the sheet bearing device is simple and reliable.

The wafer detection equipment provided by the invention adopts the sheet bearing device, so that the internal space of the rotary table is greatly saved, the thickness of the rotary table is effectively reduced, the load of the transfer device and the installation height of the detection device are reduced, the overall height size of the device is greatly reduced, and the movement and detection precision of the transfer device and the wafer detection equipment are improved.

Drawings

FIG. 1 is a schematic structural diagram of a wafer inspection apparatus according to an embodiment of the present invention;

fig. 2 is a schematic perspective view of a disassembled state of a carrier of the sheet carrying device in the embodiment of the present invention;

FIG. 3 is a schematic structural view showing a mounting state of a stage of the sheet carrying apparatus in the embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a state in which a carrier of the sheet carrying device is detached according to an embodiment of the present invention;

FIG. 5 is a schematic structural diagram illustrating the installation states of the first and second air distribution assemblies in an embodiment of the present invention;

fig. 6 is a schematic structural diagram illustrating a first air distribution assembly and a second air distribution assembly in a split state according to an embodiment of the present invention;

fig. 7 is a schematic structural diagram of an installation state of a first power distribution assembly and a second power distribution assembly in the embodiment of the present invention;

fig. 8 is a schematic structural diagram of a state in which the first power distribution assembly and the second power distribution assembly are separated in the embodiment of the present invention.

In the figure:

100. a sheet carrying device; 101. an adsorption part; 200. a transfer device; 300. a detection device;

1. a stage; 11. a through hole; 12. an air tank;

2. a turntable; 21. a rotor; 22. a stator; 221. a second air passage; 222. a limiting part; 223. fixing the cable; 23. a bearing; 24. a motor;

3. a valve train; 31. a first gas distribution assembly; 311. an air tube; 312. a seal ring; 32. a second gas distribution assembly; 321. a first air passage; 322. an elastic plunger; 3221. a plunger body; 3222. a first spring;

4. a power distribution mechanism; 41. a first power distribution assembly; 411. a binding post; 42. a second power distribution assembly; 421. a wiring slot; 422. an elastic element; 423. connecting sheets;

5. a wafer supporting mechanism;

6. an air slip ring; 61. a seal member; 611. a first annular member; 612. a second ring-shaped member; 613. a third ring-shaped member; 62. an air cavity;

7. controlling a board card;

8. an electrical slip ring; 81. fixing a ring; 82. and a mover tab.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

Referring to fig. 1 and fig. 2, the present embodiment provides a wafer inspecting apparatus, which includes a sheet carrying device 100, a transferring device 200, and an inspecting device 300. The sheet carrier 100 has an adsorption portion 101 communicating with the vacuum negative pressure air path, and the adsorption portion 101 can hold the wafer. The movable end of the transfer device 200 is connected to the sheet carrying device 100, so that the spatial position of the sheet carrying device 100 can be adjusted. The inspection apparatus 300 is used for inspecting the wafers carried on the sheet carrying apparatus 100.

In operation, the transferring device 200 first drives the sheet carrying device 100 to receive the wafer conveyed by the external conveying mechanism (not shown), and then drives the sheet carrying device 100 again, and cooperates with the rotation of the sheet carrying device 100 to make the wafer carried on the sheet carrying device 100 correspond to the detecting device 300, so that the detecting device 300 can obtain a complete and clear optical image of the wafer, thereby realizing the overall detection of the characteristics of the wafer, such as film layer, surface type, and defect.

Referring to fig. 2 in conjunction with fig. 3, in order to complete the operations of receiving, adsorbing the wafer, and rotating itself during the above-mentioned operation, the sheet material loading apparatus 100 includes a stage 1 for loading the sheet material and a turntable 2 for driving the stage 1 to rotate.

Specifically, a plurality of through holes 11 penetrating through the carrier 1 in the vertical direction are formed on the carrier 1, and a wafer ejecting mechanism (EPIN)5 located below the carrier 1 can eject air needles (not shown in the figure) out of the working surface of the carrier 1 through the through holes 11, so that when the sheet carrying device 100 is transferred to the position below the external transport mechanism by the transfer device 200, the air needles can eject wafers carried on the external transport mechanism, and the air needles are communicated with an air passage in the carrier 1, so that the wafers can be adsorbed when the air passage is connected to a vacuum air source. After the transfer device 200 drives the sheet carrier 100 away from the external transport mechanism, the wafer lift mechanism 5 retracts the air pin, so that the wafer is placed on the work surface of the stage 1.

An air groove 12 is formed on the working surface of the carrier 1, and the air groove 12 is communicated with an air path in the carrier 1 to form the adsorption part 101, so that a wafer carried on the carrier 1 can be adsorbed when the air path is connected to a vacuum air source, and detection operation is facilitated.

The turntable 2 includes a rotatable rotor 21 and a stator 22 sleeved outside the rotor 21, the rotor 21 is axially matched with the stator 22, and a bearing 23 is disposed between the rotor 21 and the stator 22, so that the rotor 21 can rotate in the stator 22 under the driving of a motor 24, so as to adjust the angle of the stage 1 relative to the detection device 300.

In order to realize the detection operation of adsorbing, jacking and extending the wafer, the carrying platform 1 further comprises a gas distribution mechanism 3 and a power distribution mechanism 4 for switching gas circuits and circuits between the carrying platform 1 and the rotary table 2, so as to realize switching transmission of the gas circuits and the circuits between the carrying platform 1 and the rotary table 2.

Referring to fig. 3 in conjunction with fig. 4, the valve train 3 includes a first valve actuating assembly 31 and a second valve actuating assembly 32 respectively disposed on the carrier 1 and the rotor 21. The power distribution mechanism 4 includes a first power distribution unit 41 and a second power distribution unit 42 provided to the stage 1 and the rotor 21, respectively. The rotor 21 is detachably connected with the carrier 1, when the rotor 21 is connected with the carrier 1, the first air distribution assembly 31 and the second air distribution assembly 32 are connected in an inserting mode to form a switching air path, and the first power distribution assembly 41 and the second power distribution assembly 42 are connected in an inserting mode to form a switching circuit.

By means of the structure, the air distribution mechanism 3 and the power distribution mechanism 4 are both in a plug-in structure arranged between the rotor 21 and the carrier 1, so that circuits and air path switching parts such as cables and air pipes 311 are omitted, the structure is simple, the space between the rotor 21 and the carrier 1 can be fully utilized, and extra space occupation is not needed. The sheet bearing device 100 has the advantages that the workload of the sheet bearing device 100 in the installation, disassembly and replacement configuration processes is reduced, the risk caused by replacement of parts is reduced, the practical problems in the aspects of quick maintenance, quick disassembly and assembly, configuration compatibility and the like in the practical application process are fully solved, the problem that the overall height of the sheet transfer device 200 is too large due to the fact that the turntable 2 and the carrying platform 1 are stacked can be solved, the moving load of the transfer device 200 is reduced, the center of mass of a wafer material is lowered, the dynamic stability of the wafer detection equipment is improved, and the accuracy of a detection result is ensured.

Meanwhile, the turntable 2 is used as a key component connected with the transfer device 200, and when each component configured in the sheet bearing mechanism 100, such as the carrier 1, the gas distribution mechanism 3, the power distribution mechanism 4, the wafer jacking mechanism 5 and the like, needs to be replaced and configured, only the carrier 1 can be disassembled without disassembling and assembling the turntable 2, so that each component configured in the sheet transfer mechanism can be freely, independently and quickly disassembled and assembled, and the transfer device is suitable for quickly and selectively configuring each component under different configuration requirements.

The valve train 3 and the distribution mechanism 4 will be further explained below.

In this embodiment, the first air distribution assembly 31 of the air distribution mechanism 3 includes an air pipe 311, and one end of the air pipe 311 extends out of the stage 1. The second valve train assembly 32 of the valve train 3 includes a first air passage 321 and an elastic plunger 322, the first air passage 321 is formed in the rotor 21 and has a distal end communicated to a bearing surface of the rotor 21 opposite to the stage 1, and the elastic plunger 322 can block the distal end of the first air passage 321 when expanding. When the rotor 21 is connected to the stage 1, the air tube 311 presses the elastic plunger 322 and is inserted into the first air channel 321 to communicate with the first air channel 321 to form a switching air channel.

It can be understood that the air tube 311 is made of rigid material such as metal to press the elastic plunger 322 without deformation, and the ends of the air tube 311 and the first air channel 321 are respectively disposed on the surfaces of the stage 1 and the rotor 21 that can be correspondingly attached, when the stage 1 and the turntable 2 are correspondingly mounted, a plurality of air tubes 311 extending out of the stage 1 are correspondingly inserted into the first air channels 321 whose ends extend to the surface of the rotor 21.

Illustratively, as shown in fig. 5 and 6, the elastic plunger 322 may include a plunger body 3221 slidably mounted in a concave groove formed in the rotor 21, an opening of the groove meeting an end of the first air passage 321, and a first spring 3222 disposed between the plunger body 3221 and a bottom of the groove.

When the carrier 1 and the turntable 2 are installed correspondingly, the air tube 311 presses the plunger body 3221 and compresses the first spring 3222, and an air path opening of the air tube 311 is in butt communication with the first air path 321 to form a switching air path. A sealing ring 312 is preferably disposed on the mounting surface of the carrier 1 around the air tube 311 to ensure the sealing of the switching air channel. Thus, positive pressure gas or vacuum negative pressure from an external gas source can be transmitted to the stage 1 through the turntable 2, and used by the stage 1 and the wafer holding mechanism 5 therein.

Referring to fig. 6, preferably, the length and the stretching force of the first spring 3222 may be configured to be capable of expanding and extending to the opening of the plunger body 3221 to block the containing groove when the carrier 1 is separated from the turntable 2, that is, the end of the first air passage 321 is blocked to block the air passage in the turntable 2. This design can effectively avoid the foreign matter to inhale outside air supply through first air flue 321, has guaranteed the cleanliness factor of outside air supply when split microscope carrier 1 and revolving stage 2, simultaneously, when needs maintain microscope carrier 1 alone, need not to switch outside air supply repeatedly, has guaranteed dismouting, the work efficiency of maintaining.

Therefore, the connecting and detaching process of the carrier 1 and the turntable 2 can be a process of synchronously forming and synchronously removing the switching gas circuit, and the gas transmission pipeline does not need to be plugged or pulled out, and the quick butt joint and communication are realized only through the mechanical installation of the two modules of the carrier 1 and the turntable 2.

In order to realize the axial transmission of the gas path between the stator 22 and the rotor 21 of the turntable 2, in this embodiment, an air slip ring 6 is disposed between the stator 22 and the rotor 21, and the air slip ring 6 is respectively communicated with the first gas channel 321 and the second gas channel 221 formed on the stator 22.

Specifically, the air slip ring 6 includes a plurality of sealing members 61 disposed between the stator 22 and the rotor 21 at intervals, the sealing members 61 are annular, two adjacent sealing members 61 surround the stator 22 and the rotor 21 to form an annular air cavity 62, and the air cavity 62 is respectively communicated with the first air passage 321 and the second air passage 221.

By means of the structure, the air slip ring 6 can be effectively integrated with the rotary structure of the rotary table 2, the axial size space of the rotary table 2 is saved, and air path switching is achieved.

Illustratively, the seal 61 includes a flexible first ring 611, a rigid second ring 612, and a resilient third ring 613. The first annular member 611 is sleeved on the outer wall of the rotor 21, the second annular member 612 is embedded and connected to the outer side of the first annular member 611, and the third annular member 613 is elastically deformed between the second annular member 612 and the inner wall of the stator 22 so as to continuously press the second annular member 612 and attach the first annular member 611 to the outer wall of the rotor 21, i.e., the two adjacent sealing members 61, the stator 22 and the rotor 21 can surround to form the annular air cavity 62. The inner wall of the stator 22 preferably has a position-limiting portion 222 for limiting the spatial position of the sealing member 61, and the position-limiting portion 222 may be a groove or the like recessed in the inner wall of the stator 22.

As shown in fig. 5, the direction of the arrow in the figure is the direction of the air path, and the air path can always keep the air path of the stage 1 in a state of being communicated with an external air source in the process of relative rotation of the rotor 21 and the stator 22 through the annular air chamber 62 formed by the sealing member 61.

In particular, the number of the sealing members 61 between the rotor 21 and the stator 22 can be increased by the practitioner according to different air path requirements to form different numbers of air chambers 62, and a plurality of first air channels 321, air tubes 311, and the like are adapted to be disposed on the rotor 21 and the stage 1, thereby completing independent/expanded switching of multiple air paths.

It should be noted that, in order to seal the air cavity 62, the thickness of the sealing element 61 should be larger than the clearance between the rotor 21 and the stator 22 to form an interference fit, that is, the third annular element 613 needs to continuously press the second annular element 612 and the first annular element 611 in an elastically deformed manner. Therefore, the friction torque between the rotor 21 and the stator 22 caused by the sealing ring 312 when the rotor 21 rotates is greatly increased, and if the rotation friction of the sealing ring 312 cannot be reduced as much as possible, an extra motion load is caused to the motor of the turntable 2, and the power consumption and the heat dissipation of the motor are increased. Meanwhile, since wafer production needs to be performed in a dust-free environment, the friction process between the sealing member 61 and the rotor 21 needs to be gentle and soft, and friction scraps cannot be generated so as not to contaminate the working environment.

For this purpose, on the one hand, the friction between the seal 61 and the rotor 21 can be reduced by a suitable choice of the material of the seal 61. Illustratively, the first annular member 611 may be made of flexible PTFE (Poly Tetra Fluoroethylene polytetrafluoroethylene), the first annular member 611 is made of copper, and the third annular member 613 is made of rubber.

The friction coefficient between the PTFE and the copper is small, the first annular member 611 and the first annular member 611 can be connected in a nested manner through a tooth-shaped structure to ensure reliable connection, and because the PTFE is a flexible material, the friction coefficient between the PTFE and the outer wall of the rotor 21 and the friction coefficient between the PTFE and the second annular member 612, which are made of a metal material, are small. The third annular piece 613 made of rubber can be deformed by extrusion force during installation, and after the sealing element 61 is installed, the first annular piece 611 made of PTFE is always pressed to the outer wall of the rotor 21, so that the first annular piece 611 and the outer wall of the rotor 21 are tightly contacted, a sealing effect is achieved, and the requirements of continuous rotation and rapid rotation of the turntable 2 are met.

On the other hand, the outer wall of the rotor 21 may be machined so that the roughness of the outer wall of the rotor 21 in contact with the seal 61 is less than ra0.8, thereby further reducing the friction force between the seal 61 and the rotor 21. Further, the outer wall of the rotor 21 may be further surface-treated to prevent surface defects due to oxidation, for the air cavity 62 having different characteristics of use of positive pressure and vacuum negative pressure.

Illustratively, the outer wall of the rotor 21 may be made of an aluminum alloy and surface-treated specifically by the following machining processes performed in this order:

hard anodizing, semi-finish turning of the outer wall of a diamond lathe, low-temperature tempering, warning turning of the outer wall of the diamond lathe and roughness detection.

Therefore, the friction coefficient between the sealing element 61 and the outer wall of the rotor 21 is smaller than 0.01 by combining the material and the structure of the sealing element 61 and the surface process treatment of the outer wall of the rotor 21, friction scraps are not generated, and stable and reliable long-term service is ensured.

The structure enables the air slip ring 6 and the turntable 2 to form an integrated structure, so that the volume of the sheet bearing device 100 and even the volume of the wafer detection equipment are effectively reduced, the occupied space is reduced, and the moving load of the transfer device 200 is reduced. The turret housing disposed outside the stator 22 can be used not only as a socket attachment that is an external member of the turret 2 but also as a structural member in the air passage.

In the same way, the rotor 21 can be used as a connecting and guiding member between the turntable 2 and the carrier 1, and can also be used as a structural member of an air passage, so that the effective utilization rate of a single part is greatly improved, the structural arrangement of the sheet bearing device 100 is more efficient and compact to the maximum extent, and meanwhile, the air passage switching part of the sheet bearing device 100 is configured at the outer wall of the turntable 2 to which the second air passage 221 is communicated, so that the air passage maintenance, expansion and the like of the wafer detection equipment are more convenient and efficient.

Referring to fig. 7 and 8, in the present embodiment, the first power distribution assembly 41 of the power distribution mechanism 4 includes a terminal 411, and the terminal 411 extends out of the carrier 1. The second power distribution assembly 42 of the power distribution mechanism 4 includes a wire connection groove 421, and an elastic element 422 and a connecting piece 423 which are accommodated in the wire connection groove 421, wherein one end of the elastic element 422 is connected or abutted with the inner wall of the wire connection groove 421, and the other end of the elastic element 422 is connected with the connecting piece 423. When the rotor 21 is connected to the carrier 1, the terminal 411 is inserted into the connection slot 421, and the elastic element 422 presses the connection piece 423, so that the connection piece 423 is connected to the terminal 411 to form a switching circuit.

It is understood that the terminals 411 may be disposed in a power distribution module such as the control board 7 disposed in the carrier 1 to supply power and feed back electrical signals to components such as the wafer supporting mechanism 5. For this, the post 411, the connection piece 423, and the like may be made of a conductive material, and the wiring groove 421 may be made of an insulating material. The turntable 2 is provided therein with a connection member electrically connected to the connection piece 423 and an external circuit, respectively.

Illustratively, the elastic element 422 may be a second spring installed in the wire connection groove 421, the upper and lower ends of the wire connection groove 421 are provided with semi-closed limiting structures, the limiting structure at the lower end of the wire connection groove 421 abuts against the second spring to prevent the second spring from falling off, and the limiting structure at the upper end of the wire connection groove 421 abuts against the connecting piece 423 connected to the top end of the second spring to prevent the connecting piece 423 from falling off.

As shown in fig. 7, when the carrier 1 is connected to the turntable 2, a plurality of terminals 411 protruding from the lower portion of the control board 7 are just inserted into the wiring slot 421 via the upper end of the wiring slot 421, and press the connecting piece 423 and the second spring, and under the action of the elastic force of the second spring, the connecting piece 423 is tightly connected to the wiring slot 421 to form an adapter circuit.

Referring to fig. 8, preferably, the length and the extension tension of the second spring may be configured to be able to extend and jack the connecting piece 423 when the carrier 1 is separated from the turntable 2, so that the connecting piece 423 moves to close the opening of the limiting portion 222 at the upper end of the wire connecting groove 421, i.e., the upper end of the wire connecting groove 421 is closed, thereby preventing a foreign object from falling off or an operator from touching an internal circuit device during maintenance, and playing a role in power-off protection.

Similar to the valve actuating mechanism 3, the power distribution mechanism 4 enables the process of connecting and detaching the carrier 1 and the turntable 2 to be the process of synchronously forming and synchronously removing the switching circuit, and the quick butt joint and communication can be realized only through the mechanical installation of two modules of the carrier 1 and the turntable 2 without plugging and unplugging cables.

Alternatively, the connecting piece 423 may be made of a flexible material so as to be deformed when pressed against the post 411 and attached to the post 411. Taking the binding post 411 with a spherical arc-shaped contact end face as an example, when the carrier 1 is connected and installed with the rotary table 2, the binding post 411 pushes the flexible connecting piece 423 to a low position, the second spring is stressed and compressed, and the flexible connecting piece 423 is changed into a spherical arc shape along with the shape of the contact end face of the binding post 411 under the pressure action of the binding post 411, so that the full contact between the connecting piece 423 and the binding post 411 is ensured.

In order to realize the axial transmission of the gas path between the stator 22 and the rotor 21 of the turntable 2, in the present embodiment, preferably, an electrical slip ring 8 is provided between the stator 22 and the rotor 21, and the electrical slip ring 8 is electrically connected to the connecting piece 423 and the circuit on the stator 22, respectively.

Specifically, the electrical slip ring 8 includes a stationary ring 81 and a moving contact 82. The stator ring 81 is provided on the stator 22, and the rotor contact piece 82 is electrically connected to the connection piece 423 directly or indirectly, and one end thereof extends out of the rotor 21 and abuts against the stator ring 81. By means of the structure, the electric slip ring can be effectively integrated with the rotary structure of the rotary table 2, the axial size space of the rotary table 2 is saved, and circuit switching is achieved.

In connection with the power distribution mechanism 4, the upper end of the rotor contact piece 82 can be inserted into the opening of the lower end limiting structure of the wiring groove 421, and the shape of the upper end of the rotor contact piece can be similar to the shape of the contact end face of the terminal 411, that is, when the carrier 1 is connected and mounted with the turntable 2, the flexible connecting piece 423 and the terminal 411 are pressed and deformed, so that one side of the flexible connecting piece is attached to the contact end face of the terminal 411, and the other end of the flexible connecting piece 423 is attached to the upper end of the rotor contact piece 82, thereby ensuring the.

In this embodiment, the control board 7 is specifically fixed at the bottom of the carrier 1, and the electrical signal or the electrical path thereof is connected to the rotor contact 82 of the electrical slip ring 8 through the switching function of the power distribution mechanism 4, that is, the electrical slip ring 8 transmits the electrical signal to the stator 22 of the turntable 2, and is connected to the external circuit of the turntable 2 through the fixed cable 223 and the like arranged in the stator 22, or conversely, the external power can be input to the carrier 1 through the electrical path, so as to complete the power supply and control functions of the components such as the control board 7 and the wafer supporting mechanism 5.

Compare with traditional electric sliding ring, all switching links of the 8 structure of electric sliding ring and the distribution mechanism 4 that this embodiment provided are the wireless cable design, have avoided the risk such as cable short circuit, fusing, virtual connecing appearing in the connection process, have increased the succinct nature and the reliability of this wafer check out test set internal circuit, and the stationary ring 81 and the active cell splicing 82 two parts of electric sliding ring 8 are equallyd divide and are do not integrated on the corresponding part of revolving stage 2 simultaneously, have avoided the switching risk that installation error brought.

The rotor splicing 82 and the second power distribution assembly 42 which are easy to break down are integrated on the surface of the rotor 21 and are independent unit assemblies which can be independently disassembled or replaced, so that the later-period overhauling or maintaining efficiency is greatly improved, and the practical use problem that the complete machine dismantling of the rotary table 2 is forced due to the structural failure is avoided.

It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Numerous obvious variations, adaptations and substitutions will occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.