阅读说明：本技术 半导体器件测试用分选机及其信息处理方法 (Sorting machine for testing semiconductor device and information processing method thereof ) 是由 宋熙康 李泰敏 于 2016-10-31 设计创作，主要内容包括：本发明涉及半导体器件测试用分选机及其信息处理方法。本发明的半导体器件测试用分选机包括：条形码识别器,在从借助上述加载部分的加载的位置移动至借助上述卸载部分的卸载的位置的多个半导体器件的移动路径上的一位置,识别对多个半导体器件赋予的条形码；以及控制部分,控制条形码识别器,读取借助上述条形码识别器识别的条形码,以管理各个半导体器件的信息。根据本发明,不是对批次,而是对各个半导体器件进行信息管理,因此可提高与测试结果有关的可靠性及与各个半导体器件有关的管理能力,可管理履历。(The invention relates to a sorter for testing a semiconductor device and an information processing method thereof. The invention provides a sorter for testing a semiconductor device, comprising: a bar code recognizer for recognizing bar codes given to the plurality of semiconductor devices at one position on a moving path of the plurality of semiconductor devices moving from a position loaded by the loading part to a position unloaded by the unloading part; and a control section controlling the bar code recognizer to read the bar code recognized by the bar code recognizer to manage information of the respective semiconductor devices. According to the present invention, since information management is performed not for a lot but for each semiconductor device, reliability regarding test results and management capability regarding each semiconductor device can be improved, and histories can be managed.)

1. A handler for testing semiconductor devices, comprising:

a loading plate capable of loading a semiconductor device to be tested;

a unloading plate capable of loading the semiconductor device after the test;

a first conveyor for conveying the load plate to selectively position the load plate at a loading position and a testing position;

the second conveyer is used for conveying the unloading plate so that the unloading plate can be selectively positioned at a testing position and an unloading position;

a loading part for loading the semiconductor device to be tested to the loading plate located at the loading position;

a test section for testing the semiconductor device loaded to the loading plate by the loading section;

an unloading section for unloading the semiconductor device which has been tested in the testing section from the unloading plate located at an unloading position;

a bar code recognition section including a bar code recognizer for recognizing bar codes given to the plurality of semiconductor devices at a position on a moving path of the plurality of semiconductor devices moved from a position loaded by the loading section to a position unloaded by the unloading section; and

a control part for controlling the first conveyor, the second conveyor, the loading part, the testing part, the unloading part and the bar code identification part, reading the bar code identified by the bar code identification part, and managing the information of each semiconductor device,

wherein a moving distance of the loading plate by the first conveyor is different from a moving distance of the unloading plate by the second conveyor,

the loading plate, the first conveyor and the second conveyor are provided in plural numbers so that the semiconductor devices are moved in plural paths,

the loading plates are arranged to move alternately.

2. The handler for testing semiconductor devices according to claim 1, further comprising:

and a mover for moving the bar code recognizer to selectively position the bar code recognizer above the plurality of paths.

3. The handler of claim 2, wherein the bar code recognition part further comprises:

an illuminator for illuminating the surface of the semiconductor device with illumination for allowing the bar code recognizer to recognize the bar code,

the bar code recognizer and the illuminator are coupled to each other by a coupling member, and the bar code recognizer and the illuminator are simultaneously moved by the operation of the mover.

4. The handler for testing semiconductor devices according to claim 1,

the bar code recognizer is used as a camera for recognizing the bar code of the semiconductor device loaded on the loading plate,

the loading plate is continuously moved without being stopped while the bar code recognizer scans the bar code of the semiconductor device loaded on the loading plate.

5. The handler for testing semiconductor devices according to claim 4,

the camera includes a line scan camera.

6. The handler for testing semiconductor devices according to claim 3,

the illuminator is arranged between the bar code recognizer and the loading plate,

the illuminator has an identification window for allowing the bar code recognizer to identify the bar code of the semiconductor device located below the illuminator.

7. The handler of claim 6, wherein the illuminator comprises:

an installation member having a semi-cylindrical surface protruding upward below the installation member; and

at least one radiation source disposed on the semi-cylindrical surface of the installation member,

the identification window is provided to the installation member.

Technical Field

The present invention relates to a handler (handler) for supplying semiconductor devices to a tester.

Background

Semiconductor devices need to be tested after production and before shipment. To this end, testers and sorters are required, and the present invention relates to sorters.

The handler is used to electrically connect a plurality of semiconductor devices with a tester, and enable the tester to test the semiconductor devices. At this time, the handler electrically connects the semiconductor device to the tester after stimulating the semiconductor device in an environment according to the required test conditions. The sorting machine can be fabricated in various forms according to the test conditions, the type of semiconductor device to be tested, or the requirements of customers, for example, korean laid-open patent nos. 10-2011-0136440, 10-2012-0106320, and 10-2014-0121909.

Generally, a handler has a loading element for simultaneously moving a plurality of semiconductor devices or simultaneously testing them at one time. Depending on the type of the handler, the semiconductor device may be electrically connected to the tester in a state of being mounted on the mounting element or may be electrically connected to the tester after being drawn out from the mounting element. The loading element has various structures and names such as a test tray, a shuttle (shuttle), a loading plate and the like according to the type of the sorting machine.

On the other hand, as in korean laid-open patent No. 10-2009-. The reason for this is that semiconductor devices produced under the same conditions are tested under the same conditions, thereby enabling tracking of when and under what conditions defective products are produced. Since semiconductor devices are tested in a lot unit, the handler loads or unloads the semiconductor devices to or from the loading element in a first-in first-out manner in order to prevent mixing of the semiconductor devices.

However, a phenomenon in which the semiconductor devices are detached or mixed occurs in the flow of the material flow during the test, and there is a case in which 100% first-in first-out cannot be achieved due to a mistake (error) of a sorter or a worker. Therefore, it is necessary to confirm whether or not the management is performed in units of lots (lot). In particular, recently, the production of semiconductor devices in units of lots tends to be reduced due to the subdivision of production conditions, and thus, attention is required.

In addition, in order to optimize the production conditions for the subdivision, the necessity of comparing what characteristics appear in the semiconductor device tested under what production conditions and what environmental conditions is also rising.

The existing manner of managing in units of batches does not solve or satisfy the above-mentioned problems.

It is predicted that individual management of semiconductor devices will be required in the near future. The present invention relates to a handler in which a large number of semiconductor devices are supplied at once and a plurality of semiconductor devices are simultaneously tested at once, and it is necessary to individually manage the semiconductor devices.

Disclosure of Invention

Technical problem

The invention provides a technology of a sorting machine capable of managing individual history of semiconductor devices.

Means for solving the problems

In order to achieve the above object, the handler for testing a semiconductor device of the present invention comprises: a loading element capable of loading a semiconductor device to be tested; a conveyor for conveying the loading elements; a loading part for loading the semiconductor device to be tested to the loading element positioned at the loading position; a test section for testing the semiconductor device loaded to the loading element by the loading section; an unloading section for unloading the semiconductor device whose test is completed in the test section from the loading element located at an unloading position; a bar code recognition section for recognizing bar codes given to the plurality of semiconductor devices at a position on a moving path of the semiconductor devices which moves from a position of loading by the loading section to a position of unloading by the unloading section; and a control part for controlling the conveyor, the loading part, the testing part, the unloading part and the bar code identification part, reading the bar code identified by the bar code identification part and respectively managing the information of each semiconductor device.

The control unit controls the conveyor to repeat one or more movements and stops of the loading element so that the barcode recognition unit sequentially recognizes barcodes given to the plurality of semiconductor devices loaded on the loading element when the loading element passes below the barcode recognition unit.

The barcode recognition section includes: a bar code recognizer for recognizing a bar code; and an illuminator for illuminating the surface of the semiconductor device with illumination by allowing the bar code recognizer to recognize the bar code.

The illuminator is disposed between the bar code recognizer and the mounting element, and has an identification window for allowing the bar code recognizer to recognize a bar code of a semiconductor device located below the illuminator.

The above illuminator includes: an installation member having a semi-cylindrical surface protruding upward below the installation member; and at least one radiation source provided on the semi-cylindrical surface of the installation member, the identification window being provided on the installation member.

The above illuminator includes: a reflection plate having a dome shape protruding upward; and at least one radiation source disposed below the reflector, for indirectly illuminating the semiconductor device through the reflector, wherein the identification window is disposed on the reflector.

The loading element and the conveyor are provided in plural numbers so as to move the semiconductor device in plural paths, and the barcode recognition section includes: a bar code recognizer for recognizing a bar code; and a mover for moving the bar code recognizer to selectively position the bar code recognizer above the plurality of paths.

The bar code recognition part further includes an illuminator for illuminating the surface of the semiconductor device by recognizing the bar code using the bar code recognizer, the bar code recognizer and the illuminator are combined with each other by a combining member, and the bar code recognizer and the illuminator are moved simultaneously by the operation of the mover.

In order to achieve the above object, an information processing method of a handler for testing a semiconductor device according to the present invention includes a recognition step of recognizing a bar code given to the semiconductor device on a path along which the semiconductor device moves; a confirmation step of analyzing the bar code recognized in the recognition step and confirming an identifier of each semiconductor device and information related to the semiconductor device; a storage step of storing the identifier and information of each semiconductor device confirmed in the confirmation step; and a transfer step of transferring the identifier and the information stored in the storage step to a tester side, storing a test result of the semiconductor device in the tester side so as to be associated with the identifier of the semiconductor device, and performing the identification step and the transfer step before or after the test of the semiconductor device.

The semiconductor device test handler described above further includes a recording step of recording a test result related to the semiconductor device received from the side in association with the identifier of the semiconductor device.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present invention, in a handler that simultaneously tests a plurality of semiconductor devices at a time after supplying a large number of semiconductor devices, individual history relating to the semiconductor devices is managed by using a bar code, and therefore, the following effects are obtained.

First, even if semiconductor devices are mixed during a test process, information of the respective semiconductor devices can be confirmed.

Second, it is possible to confirm what quality of the semiconductor device is completed by what test conditions under what production conditions.

Third, the development direction of the semiconductor device can be established more precisely.

Fourth, since all the histories can be stored and managed, the histories can be confirmed even at the time of retest.

Fifth, the role of a manager for preventing problems such as mixing of semiconductor devices can be reduced, thereby improving the utilization rate of manpower.

Drawings

Fig. 1 and 2 are conceptual top views of a semiconductor device test handler according to an embodiment of the present invention.

Fig. 3 is a block diagram of a control section applied to the sorter of fig. 1.

Fig. 4 is a configuration diagram of a first example of a barcode recognition portion applicable to the sorting machine of fig. 1.

Fig. 5 is a configuration diagram of a second example of a barcode recognition portion applicable to the sorter of fig. 1.

Fig. 6 is a modification of the bar code identification portion of fig. 5.

Fig. 7 is a block diagram of a third example of a bar code identification portion applicable to the sorter of fig. 1.

Fig. 8 is a flow chart of an information processing method implemented in the sorter of fig. 1.

Description of the attached drawings

100: sorting machine

111. 112, 112: loading plate

121. 122: first conveyor

150: loading section

160: test section

170: unloading section

180: bar code identification part

181a, 182, 181b, 181 c: bar code recognizer

183b, 183 c: lighting device

RP: reflecting plate

IE: setting component

IS: radiation source

RW: identification window

184a, 184b, 184 c: moving device

190: control section

Detailed Description

Hereinafter, for the sake of simplicity of explanation, the repetitive description explains the preferred embodiments of the present invention as much as possible in an omitted or simplified manner.

Description of the basic Structure of the sorter

Fig. 1 and 2 are conceptual top views of a semiconductor device test handler 100 (hereinafter, referred to as a handler) according to an embodiment of the present invention.

As shown in fig. 1, a sorter 100 according to an embodiment of the present invention includes: two loading plates 111, 112, two first conveyors 121, 122, two unloading plates 131, 132, two second conveyors 141, 142, a loading part 150, a testing part 160, an unloading part 170, a barcode recognition part 180, and a control part 190.

The loading plates 111, 112 are in the loading position LP by means of the first conveyors 121, 122₁、LP₂And a loading slot LS. which moves between the test positions TP and has eight semiconductor devices loaded therein, wherein eight loading slots LS are arranged in a 2 × 4 matrix, and therefore, two semiconductor devices are arranged side by side in the front-rear direction, and four semiconductor devices are arranged side by side in the left-right direction along which the loading plates 111, 112 move, that is, the loading plates 111, 112 function as loading elements for loading the semiconductor devices.

The first conveyors 121, 122 convey the load plates 111, 112 such that the load plates 111, 112 are selectively located at the load positions LP₁、LP₂And a test position TP.

The unloading plates 131, 132 are in the test position TP and the unloading position UP by means of the second conveyors 141, 142₁、UP₂And a loading slot LS for loading eight semiconductor devices.

The second conveyors 141, 142 convey the unloading plates 131, 132 such that the unloading plates 131, 132 are selectively located at the testing positions TPAnd an unloading position UP₁、UP₂。

The loading part 150 loads the semiconductor device to be tested from the user tray to the loading position LP₁、LP₂Loading plates 111, 112.

The test part 160 electrically connects the eight semiconductor devices loaded to the loading plates 111, 112 by the loading part 150 with the tester. In order to maintain the stimulus state of the semiconductor device, the test part 160 as described above may have a test chamber 161 that blocks the external environment to some extent. In addition, referring to korean patent laid-open No. 10-2014-0121909, the test part 160 draws the semiconductor device from the loading plates 111, 112 and electrically connects it with the tester. Of course, the test part 160 electrically connects the semiconductor device in a state where the load plates 111, 112 are loaded with the tester according to an embodiment.

The unloading section 170 unloads the semiconductor device whose test is ended from the position at the unloading position UP₁、UP₂The unloading plates 131, 132 unload to empty user trays.

The barcode recognition part 180 is disposed above a path along which the load plates 111 and 112 move, at which the load plates 111 and 112 are moved from the load position LP₁、LP₂In the process of moving to the test position TP, the bar codes of the semiconductor devices loaded in the loading plates 111, 112 passing under the bar code recognition part 180 are recognized. The barcode recognition part 180 of the present embodiment is disposed at the loading position LP₁、LP₂And test position TP. However, according to the embodiment, the barcode recognition part 180 may be provided at any position on the moving path of the semiconductor device as long as the barcode given to the semiconductor device can be recognized on the moving path of the moving semiconductor device to identify the semiconductor device, which is implemented at the handler 100.

In this embodiment, the barcode recognition portion 180 is disposed at the loading position LP₁、LP₂And the test position TP, the moving distance of the loading plates 111, 112 and the moving distance of the unloading plates 131, 132 are different. Thus, as described above, the first conveyors 121, 122 for moving the load plates 111, 112 and the second conveyorsThe second conveyors 141 and 142 for moving the unloading plates 131 and 132 are provided separately. But in the loading position LP where the barcode identification portion 180 is located₁、LP₂And between test position TP or test position TP and unload position UP₁、UP₂And other positions than in between, the loading plates 111, 112 and the unloading plates 131, 132 are moved simultaneously by only two conveyors.

According to the sorter 100 of the present embodiment, as shown in fig. 2, since the loading plates 111, 112 and the unloading plates 131, 132 are provided in pair, the moving path C of the semiconductor device₁、C₂Also 2. Therefore, the barcode recognition portion 180 needs to recognize both the barcode of the semiconductor device loaded in the front loading plate 111 and the barcode of the semiconductor device loaded in the rear loading plate 112.

The bar code identification 180 described above is the most important feature of the present invention and is therefore illustrated in an exploded manner according to the embodiment in a single pass.

The control section 190 controls the first conveyors 121, 122, the second conveyors 141, 142, the loading section 150, the testing section 160, the unloading section 170, and the barcode recognition section 180, and reads the barcode recognized by the barcode recognition section 180 to manage information of each semiconductor device, respectively. As in the structure of fig. 3, the control section 190 includes: a confirmation unit 191, a storage unit 192, and a communication unit 193.

The confirmation section 191 analyzes the barcode recognized by the barcode recognition section 180, and confirms the identifier of each semiconductor device and information related to the semiconductor device.

The storage unit 192 stores the identifier and information of each semiconductor device confirmed in the confirmation unit 191 or stores information from the tester side.

The communication section 193 transmits to the tester side the identifier and information of each semiconductor device stored in the storage section 192 or to be stored or receives information from the tester side.

On the other hand, in the present embodiment, a barcode is used as a medium for individual management of semiconductor devices. The bar code includes an identifier related to the semiconductor device and information related to production conditions and the like at the time of producing the semiconductor device, and is given by a manufacturer that produces the semiconductor device. Therefore, any form of medium may be understood as the barcode in the present specification and claims as long as it contains information such as an identifier relating to the semiconductor device and production conditions under which the semiconductor device is produced.

The operation of the sorter 100 having the above-described structure is explained below.

The loading part 150 moves the semiconductor devices loaded on the customer tray to the loading position LP₁、LP₂ Upper load plates 111, 112. Then, the first conveyors 121, 122 are driven to move the loading plates 111, 112 from the loading positions LP₁、LP₂And moves to the test position TP. At this time, the loading plates 111, 112 are in the slave loading position LP₁、LP₂In the process of moving to the test position TP, the barcode recognition part 180 recognizes the barcode of the semiconductor device loaded on the loading plates 111, 112. The control section 190 reads the recognized bar code to confirm the identifier and the information, stores the identifier and the information, and transmits them to the tester side. At this time, if the identification of the barcode by the barcode identification part 180 is required, the two loading plates 111 and 112 may be reciprocally moved from the loading position LP₁、LP₂And moves to the test position TP.

Next, after the test section 160 has drawn the semiconductor devices from the loading plates 111 and 112 located at the test position TP and electrically connected to the tester side, the drawn semiconductor devices are loaded on the unloading plates 131 and 132 waiting at the test position TP when the test is finished. The unloading plates 131, 132 loaded with the semiconductor devices for which the test is finished are moved from the test position TP to the unloading position UP₁、UP₂And (4) moving. Finally, the unloading section 170 is moved from being in the unloading position UP₁、UP₂The unloading plates 131, 132 unload the semiconductor devices to empty customer trays.

Description relating to the identification part of bar codes

1. Case of applying to a bar code reader

As shown in the block diagram of fig. 4, the barcode recognition section 180 includes two barcode recognizers 181a, 182a and a mover 184 a.

The barcode readers 181a and 182a serve as barcode readers for recognizing the barcodes of the semiconductor devices loaded on the load plates 111 and 112. In this example, since the speed of reading the barcode by the barcode reader is slow and only one barcode can be recognized, it is necessary to pause the loading plates 111 and 112 in order to recognize the barcode. Accordingly, the control part 190 controls the first conveyors 121, 122 to repeatedly move and stop the load plates 111, 112 four times as the load plates 111, 112 pass under the barcode identifiers 181a, 182 a. Of course, the front barcode recognizer 181a recognizes the barcodes of the semiconductor devices positioned at the front row of the load plates 111 and 112, and the rear barcode recognizer 182a recognizes the barcodes of the semiconductor devices positioned at the rear row of the load plates 111 and 112.

The mover 184a moves the two barcode identifiers 181a, 182a in the front-rear direction, and may be provided in the form of a cylinder. Therefore, the barcode identifiers 181a and 182a may be disposed above the front load plate 111 or above the rear load plate 112. According to the structure of the mover 184a as described above, the barcodes of the plurality of semiconductor devices loaded on the front and rear load plates 111 and 112 can be read by only two barcode identifiers 181a and 182 a. Of course, when the moving path of the semiconductor device is three or more, the bar codes of all the semiconductor devices moving through the three or more paths can be read by the two bar code discriminators 181a and 182a by the control of the shifter 184 a.

Further, since the distance between the front and rear load plates 111 and 112 can be reduced regardless of the front and rear widths of the barcode identifiers 181a and 182a, there is an advantage in that the front and rear widths of the apparatus can be reduced.

2. Case of applicable area camera

As shown in the block diagram of fig. 5, the barcode recognition part 180 according to the present embodiment includes: a bar code identifier 181b, an illuminator 183b, and a mover 184 b.

The barcode reader 181b is provided with an area camera, and images barcodes of four semiconductor devices arranged in a 2 × 2 matrix loaded on the load plates 111 and 112 at a time. Therefore, the control section 190 stops the loading plates 111, 112 only twice to obtain the bar codes of the eight semiconductor devices. When an area camera having a large imaging area is provided, the loading plates 111 and 112 are stopped only once to obtain the bar codes of eight semiconductor devices. Of course, the photographed barcode is read by the control section 190, thereby obtaining the identifier and information related to the semiconductor device.

The illuminator 183b IS disposed at a lower portion of the barcode recognizer 181b between the barcode recognizer 181b and the loading plates 111 and 112, and includes a reflection plate RP and an illumination source IS.

The reflection plate RP has a dome shape protruding upward, and reflects light irradiated by the irradiation source IS toward the surface of the semiconductor device located downward. The reflection plate RP as described above has the recognition window RW penetrated in a circular disk shape to open the surface of the semiconductor device to the area camera so as not to obstruct the photographing of the barcode recognizer 181 b.

The irradiation source IS irradiates light to the reflection plate RP side. That IS, in this example, an indirect illumination system IS applied, and light irradiated from the irradiation source IS reflected by the reflection plate RP and then enters the surface of the semiconductor device. Preferably, the illumination sources IS as described above are arranged in a ring shape at the lower portion of the reflection plate RP for the purpose of uniform illumination. Preferably, the illumination source IS arranged in such a way that it IS capable of illuminating light of a plurality of colors. Because, by the identification condition such as the color or the ground color of the barcode, the barcode identifier 181b can perform the optimal identification of the illumination of the specific color. For example, in the case of having 100 illumination sources IS, it IS preferable to divide and appropriately arrange illumination sources IS that emit blue light, red light, green light, and transparent light in units of 25.

The mover 184b moves the barcode recognizer 181b in the front-rear direction. Therefore, the illuminator 183b placed on the barcode recognizer 181b is also moved simultaneously by the mover 184 b.

On the other hand, according to a modification, as shown in the block diagram of fig. 6, the illuminator 184 b' may be constituted by two mirrors RM and an illumination source IS.

3. The case of line scan camera

As shown in the block diagram of fig. 7, the barcode recognition part 180 according to the present embodiment may include a barcode recognizer 181c, an illuminator 183c, and a mover 184 c.

The barcode reader 181c is provided as a line camera and recognizes barcodes of semiconductor devices mounted on the load plates 111 and 112. Therefore, the control section 190 can move the load plates 111, 112 continuously without stopping, obtaining the bar codes of eight semiconductor devices.

The illuminator 183c IS disposed at a lower portion of the barcode identifier 181c and includes a setting unit IE and an illumination source IS.

The installation member IE has a lower semi-cylindrical surface projecting upward. The setting part IE has an identification window RW which is perpendicular to the direction in which the loading plates 111, 112 move and penetrates in a long manner in the front-rear direction so that the surface of the semiconductor device is opened to the line camera so as not to interfere with the scanning of the barcode identifier 181 c. In addition, the setting part IE is combined with the barcode identifier 181c by the combining part JE so as to be movable simultaneously with the barcode identifier 181 c.

The irradiation source IS provided on the semi-cylindrical surface of the setting member IE to irradiate light to the surface of the semiconductor device. Preferably, the illumination source IS arranged in such a way that it IS capable of illuminating light of a plurality of colors.

The shifter 184c moves the barcode reader 181a in the front-rear direction.

Description relating to information processing method

Next, an information processing method performed by the sorter 100 having the above-described configuration will be described with reference to the flowchart of fig. 8.

1. Identification step S801

Loading plates 111, 112 from loading position LP₁、LP₂The barcode recognition part 180 recognizes the barcode of the semiconductor device loaded on the loading plates 111, 112 while moving to the test position TP.

2. Confirmation step S802

The confirmation section 191 of the control section 190 analyzes the barcode recognized in step S801 to confirm the identifier of each semiconductor device and the semiconductor device-related information. Therefore, it is possible to confirm, by the confirmation section 191, under which production conditions and the like the semiconductor device is produced.

3. Storage step S803

The storage section 192 stores the identifier and information of each semiconductor device confirmed in step S802.

4. Transmitting step S804

The communication part 193 of the control section 190 transmits the identification coincidence information stored in step S803 to the tester side. Therefore, the tester side can store the test result of the specific semiconductor device in connection with the identifier of the specific semiconductor device.

Of course, step S803 and step S084 may be performed simultaneously or sequentially according to embodiments.

5. Receiving step S805

The communication section 193 receives information on a test result of a specific semiconductor device from the slave tester side.

6. Recording step S806

The storage section 192 records and stores information on the test result received in the storage step S805 in association with the identifier of the specific semiconductor device.

According to the present embodiment, since step S804 is performed before the test, the tester can know the identifier and information of the semiconductor device to be tested. However, the barcode recognition part 180 may be disposed at the test position TP and the unloading position UP according to embodiments₁、UP₂In this case, the tester can know the identifier and information of the tested semiconductor device. Of course, the tester can in any case exactly specify the semiconductor devices to be tested or tested.

On the other hand, the information transmitted to the tester side in step S804 includes information on the test conditions of the current handler 100 and is transmitted at the same time. In addition, information on the test conditions of the current handler 100 is also recorded and stored in step S806.

The information recorded and stored in step S806 is used later in the retest of the semiconductor device, and the retest result is also stored in the storage unit 192 when the retest is performed.

On the other hand, the above-described embodiments are merely examples of the sorting machine illustrating various forms, and the present invention is not limited to the above-described sorting machine. That is, the present invention is applicable to any type of sorting machine.

Therefore, the present invention has been described in detail with reference to the embodiments shown in the drawings, but the above embodiments are only illustrative of the preferred embodiments of the present invention and thus it should not be understood that the present invention is limited to the above embodiments, and the scope of the present invention as claimed should be understood from the scope of the present invention and the equivalent scope thereof.