阅读说明：本技术 光学部件及激光加工机 (Optical component and laser processing machine ) 是由 福永圭佑 增田晓雄 于 2019-01-17 设计创作，主要内容包括：光学部件具有：包括主面及在主面的背面侧形成的第二面的基板、和在主面及第二面中的至少主面形成的多层膜,基板至少含有Ge而形成,多层膜包含从接近基板的一侧起依次将氧化物膜、氟化物无定形膜、Ge膜和DLC膜的至少4层层叠而成的膜。由此,能够提供使耐热性提高、不因热的影响而使光学特性恶化、发挥稳定的光学性能的光学部件。(The optical component includes: the multilayer film includes a substrate including a main surface and a second surface formed on a back surface side of the main surface, and a multilayer film formed on at least one of the main surface and the second surface, the substrate including at least Ge, and the multilayer film including at least 4 layers of an oxide film, a fluoride amorphous film, a Ge film, and a DLC film laminated in this order from a side close to the substrate. Thus, an optical component having improved heat resistance, exhibiting stable optical performance without deteriorating optical characteristics due to the influence of heat, and a method for manufacturing the optical component are provided.)

1. An optical component, comprising:

a substrate including a main surface and a second surface formed on a back surface side of the main surface; and

a multilayer film formed on at least the main surface of the main surface and the second surface,

the substrate is formed to contain Ge and is,

the multilayer film comprises: and a film in which at least 4 layers of an oxide film, a fluoride amorphous film, a Ge film, and a DLC film are laminated in this order from the side close to the substrate.

2. The optical component of claim 1,

the oxide film contains Y₂O₃、HfO₂And ZrO₂Any of the above-mentioned materials may be used,

the fluoride amorphous film comprises YF₃、YbF₃And MgF₂Any of the above.

3. The optical component of claim 2,

the thickness of the oxide film is 5 to 150nm,

the thickness of the fluoride amorphous film is 500 to 950nm,

the thickness of the Ge film is 50-150 nm,

the DLC film has a thickness of 50 to 300 nm.

4. The optical component of claim 3,

a 2 nd oxide film between the fluoride amorphous film and the Ge film,

the 2 nd oxide film contains Y₂O₃、HfO₂And ZrO₂Any of the above.

5. The optical member according to claim 4, wherein the thickness of the 2 nd oxide film is 5 to 150 nm.

6. A laser beam machine having a laser oscillator and an optical system of laser beam irradiated from the laser oscillator,

the optical system having an optical component as claimed in claim 3 or claim 5,

the optical member is disposed so that the main surface faces a processing space side.

Technical Field

The present invention relates to an optical component that can exhibit stable optical performance even in a high-temperature environment, and a laser processing machine equipped with the optical component.

Background

Conventionally, a laser processing machine has been used for drilling holes in a printed wiring board stored in a smartphone or an electronic device such as a tablet PC, for example. The laser used for the laser processing machine is mainly CO of infrared light with oscillation wavelength of 9-11 μm₂And (4) laser. CO 2₂The laser can oscillate with high output power and has high absorptivity in the resin.

In a laser beam machine for drilling, a condenser lens is disposed above a machining area. Therefore, the condenser lens may be damaged or deteriorated by dust and spatter generated during the hole forming process. Therefore, by disposing an optical member called a protection window between the object and the condenser lens, damage and deterioration of the condenser lens are prevented.

Dust and spatter generated during the hole forming process are likely to adhere to the protective window. In addition, it is in CO₂Dust and sputtered material adhering to the optical path of the laser light absorb CO₂The temperature rises due to the laser light, and therefore the protection window becomes high in temperature. Therefore, for the protection window, CO as infrared light is required₂Laser light transmittance and environmental resistance. The environmental resistance means abrasion resistance that causes no damage to the surface even if the resin sputter or copper sputter is adhered and heat resistance that exhibits stable optical performance even when exposed to a high-temperature environment.

For example, as an optical component used in an infrared sensor or the like and excellent in wear resistance of coating and transmittance of infrared rays, it is known to form a ZnS (zinc sulfide) substrate on the front surface side of the substrate in the order from the substrate surface₂O₃(YF) layer, YF₃(Yttrium fluoride) layer, second Y₂O₃An optical component having a multilayer film in which an (yttrium oxide) layer, a Ge (germanium) layer, and a DLC (diamond-like carbon) layer are laminated. The DLC layer forming the multilayer film has a compressive stress, and therefore a load is applied to the entire multilayer film, and the DLC layer in the multilayer film has a compressive stressAt the interface with low adhesion, the film may be peeled off. Therefore, in this optical member, the Ge layer is formed as an adhesion layer of the DLC layer, and further, the YF layer is formed as the YF₃Adhesion layer of layer, Y formed by oxide₂O₃And a layer for securing adhesion of the multilayer film (see, for example, patent document 1).

Disclosure of Invention

Problems to be solved by the invention

However, the optical member described in patent document 1 does not consider heat resistance. Thus, YF in a multilayer film due to the influence of heat₃Layer and Y₂O₃The layers undergo atomic interdiffusion at the interface and the film is deteriorated. Therefore, when the optical member described in patent document 1 is used as a protective window of a laser processing machine exposed to a high-temperature environment, there is a problem that stable optical characteristics cannot be obtained.

The present invention has been made to solve the above problems, and an object of the present invention is to: an optical component capable of stably exhibiting optical performance even in a high-temperature environment is obtained.

Means for solving the problems

The optical member according to the present invention includes: a substrate having a main surface and a second surface formed on a back surface side of the main surface; and a multilayer film formed on at least the main surface of the main surface and the second surface, the substrate containing Ge (germanium), the multilayer film including: a film is formed by laminating an oxide film, a fluoride amorphous film, a Ge film and a DLC film in this order from the side close to the substrate.

ADVANTAGEOUS EFFECTS OF INVENTION

In the present invention, the heat resistance of the optical member can be improved by providing a layer in which an oxide film, a fluoride amorphous film, a Ge film, and a DLC film are laminated in this order from the side close to the substrate on the surface of the substrate containing Ge. Thus, an optical component which exhibits stable optical performance without deteriorating optical characteristics due to the influence of heat can be provided.

Drawings

Fig. 1 is a schematic view of a laser processing machine mounted with an optical component according to embodiment 1 of the present invention.

Fig. 2 is a schematic diagram showing a cross section of an optical member according to embodiment 1.

Fig. 3 is a diagram showing a modification of the optical member according to embodiment 1.

Fig. 4 is a schematic diagram showing a cross section of an optical member according to embodiment 2 of the present invention.

Detailed Description

Hereinafter, preferred embodiments of the optical member of the present invention will be described with reference to the drawings.