阅读说明：本技术 微通道板制备用的压屏模具的变形程度测量装置与方法 (Deformation degree measuring device and method of screen pressing die for preparing microchannel plate ) 是由 丛晓庆 刘建强 张正君 刘文伟 李婧雯 乔芳建 张珈玮 钱琳 徐伟 郭燕 于 2020-05-19 设计创作，主要内容包括：本发明提供一种微通道板制备用的压屏模具的变形程度测量装置与方法,包括底座；多个滑块,可滑动地设置在底座上,多个滑块环抱分布并在中心形成一正六边形空间,用于放置微通道板屏段或者标准块；压圈,套在多个滑块的斜面上,具有使得多个滑块具有朝向中心聚拢收紧的趋势。还包括多个不同尺寸的塞尺,在检测时在所述中心以标准块替换屏段,通过压圈对滑块进行压紧后,以多个塞尺其中任意之一塞入标准块-滑块、滑块-滑块、滑块-压圈三类接触界面,根据能塞进的塞尺的最大尺寸测量出缝隙的大小。本发明可直接通过组合精度的测量值表征压屏模具的变形程度,解决压屏模具的变形程度的量化表征的问题。(The invention provides a device and a method for measuring the deformation degree of a screen pressing mould for preparing a microchannel plate, which comprises a base; the sliding blocks are arranged on the base in a sliding mode, distributed in an encircling mode, and form a regular hexagonal space in the center, and used for placing the microchannel plate screen section or the standard block; and the pressing ring is sleeved on the inclined surfaces of the sliding blocks and has a tendency that the sliding blocks are gathered and tightened towards the center. The clearance gauge comprises a plurality of clearance gauges, a screen section is replaced by a standard block at the center during detection, after a pressing ring presses a sliding block, any one of the plurality of clearance gauges is plugged into three contact interfaces of the standard block-sliding block, the sliding block-sliding block and the sliding block-pressing ring, and the size of a gap is measured according to the maximum size of the clearance gauge capable of being plugged in. The method can directly represent the deformation degree of the screen pressing die through the measured value of the combination precision, and solve the problem of quantitative representation of the deformation degree of the screen pressing die.)

1. A deformation degree measuring device of a screen pressing mold for preparing a microchannel plate is characterized by comprising:

a base configured to rest on a horizontal platform;

the sliding blocks are arranged on the base in a sliding mode, are distributed in an encircling mode, form a regular hexagonal space in the center and are used for placing the microchannel plate screen section or the standard block, the direction of each sliding block towards the center is a vertical plane, and the direction of each sliding block departing from the center is an inclined plane;

the pressing ring is sleeved on the inclined surfaces of the sliding blocks and has a tendency that the sliding blocks are gathered and tightened towards the center;

wherein the plurality of sliders have the same structure; the pressing ring is constructed into an annular frame with a vertical outer side and an inclined inner side, and the bottom surface of the pressing ring is abutted to the surface of the base after the pressing ring is sleeved on the sliding block;

the device for measuring the deformation degree further comprises a plurality of feelers with different sizes, the screen section is replaced by the standard block at the center during detection, after the sliding block is pressed by the pressing ring, any one of the feelers is plugged into three contact interfaces of the standard block-sliding block, the sliding block-sliding block and the sliding block-pressing ring, and the size of a gap is measured according to the maximum size of the feeler capable of being plugged in.

2. The apparatus of claim 1, wherein the base, the slide block, and the clamping ring are all made of steel.

3. The apparatus of claim 1, wherein the plurality of feelers have a thickness dimension of between 0 and 1 mm.

4. The apparatus of claim 1, wherein the standard block has a size matching the diameter of the microchannel plate section and is shaped as a regular hexagon.

5. The apparatus for measuring the deformation degree of a platen die for microchannel plate production according to claim 1, wherein the pedestal is provided with a level bubble for indicating the horizontal state of the pedestal.

6. A method for measuring a degree of deformation of a platen die according to the apparatus for measuring a degree of deformation of a platen die for microchannel plate production of claim 1, comprising:

step 1, placing a base on a platform in a horizontal state, enabling the base to be in the horizontal state integrally, sleeving a pressing ring on a sliding block, and then placing the pressing ring on the base;

step 2, placing the customized standard block in the middle of the sliding block instead of the microchannel plate screen section, pressing the sliding block by using a pressing ring, extruding the sliding block under the action of gravity of the pressing ring, and further extruding the standard block to keep the sliding block and the standard block in a close fit trend;

step 3, sequentially plugging feelers with different thicknesses into three contact interfaces of a standard block-a slide block, a slide block-a slide block and a slide block-a pressing ring according to the sequence, and measuring the sizes of three gaps according to the maximum size of the feelers capable of being plugged into the contact interfaces, so as to obtain the deformation degree of the screen pressing mold;

and 4, measuring the deformation degree of the base by using the level ruler, namely, tightly attaching the level ruler to the base placing surface, and then measuring the gap size between the level ruler and the base placing surface by using the feeler gauge.

7. The method for measuring the deformation degree of the screen pressing mold according to claim 6, wherein the measuring sequence is unchanged when three gaps of a standard block-slide block, a slide block-slide block and a slide block-pressing ring are measured by using different feelers.

Technical Field

The invention relates to the technical field of semiconductor photoelectric technology, in particular to the technical field of preparation of a microchannel plate (MCP), and particularly relates to a device and a method for measuring the deformation degree of a screen pressing mold for preparing a microchannel plate.

Background

In the field of electron multiplication, microchannel plates are a common type of vacuum electronic device. The electrons may grow exponentially in the microchannel plate to a threshold value. In the preparation process of the microchannel plate, a microchannel plate screen section formed by arranging a piece of optical glass needs to be fused and pressed under the action of high pressure and high temperature, so that dispersed optical glass fibers form a whole microchannel plate screen section. And in the process of melt-pressing, a screen pressing mold is required to fix the microchannel plate screen section. In the fixing process, the screen pressing die can generate strain due to long-term high pressure and high temperature, and further the performance of the microchannel plate can be influenced.

Disclosure of Invention

The invention aims to provide a device and a method for measuring the deformation degree of a screen pressing mold for preparing a microchannel plate, which are used for measuring the deformation degree of the screen pressing mold used in the production process of the microchannel plate, and further improve the fusion pressing qualification rate of a microchannel plate screen section by maintaining or replacing the screen pressing mold according to the measurement result.

In order to achieve the above object, the present invention provides a device for measuring a deformation degree of a platen for producing a microchannel plate, comprising:

a base configured to rest on a horizontal platform;

the sliding blocks are arranged on the base in a sliding mode, are distributed in an encircling mode, form a regular hexagonal space in the center and are used for placing the microchannel plate screen section or the standard block, the direction of each sliding block towards the center is a vertical plane, and the direction of each sliding block departing from the center is an inclined plane;

the pressing ring is sleeved on the inclined surfaces of the sliding blocks and has a tendency that the sliding blocks are gathered and tightened towards the center;

wherein the plurality of sliders have the same structure; the pressing ring is constructed into an annular frame with a vertical outer side and an inclined inner side, and the bottom surface of the pressing ring is abutted to the surface of the base after the pressing ring is sleeved on the sliding block;

the device for measuring the deformation degree further comprises a plurality of feelers with different sizes, the screen section is replaced by the standard block at the center during detection, after the sliding block is pressed by the pressing ring, any one of the feelers is plugged into three contact interfaces of the standard block-sliding block, the sliding block-sliding block and the sliding block-pressing ring, and the size of a gap is measured according to the maximum size of the feeler capable of being plugged in.

Preferably, the base, the sliding block and the pressing ring are all made of steel.

Preferably, the plurality of feelers have a thickness dimension comprised between 0 and 1 mm.

Preferably, the standard block is matched with the diameter of the microchannel plate screen section in size and shape of a regular hexagon.

Preferably, a level bubble for indicating the horizontal state of the base is arranged on the base.

According to the improvement of the invention, the invention also provides a deformation degree measuring method of the screen pressing die, which comprises the following steps:

step 1, placing a base on a platform in a horizontal state, enabling the base to be in the horizontal state integrally, sleeving a pressing ring on a sliding block, and then placing the pressing ring on the base;

step 2, placing the customized standard block in the middle of the sliding block instead of the microchannel plate screen section, pressing the sliding block by using a pressing ring, extruding the sliding block under the action of gravity of the pressing ring, and further extruding the standard block to keep the sliding block and the standard block in a close fit trend;

step 3, sequentially plugging feelers with different thicknesses into three contact interfaces of a standard block-a slide block, a slide block-a slide block and a slide block-a pressing ring according to the sequence, and measuring the sizes of three gaps according to the maximum size of the feelers capable of being plugged into the contact interfaces, so as to obtain the deformation degree of the screen pressing mold;

and 4, measuring the deformation degree of the base by using the level ruler, namely, tightly attaching the level ruler to the base placing surface, and then measuring the gap size between the level ruler and the base placing surface by using the feeler gauge.

Preferably, when different feelers are used for measuring three gaps of a standard block-slide block, a slide block-slide block and a slide block-pressing ring, the measuring sequence is not changed.

It should be understood that all combinations of the foregoing concepts and additional concepts described in greater detail below can be considered as part of the inventive subject matter of this disclosure unless such concepts are mutually inconsistent. In addition, all combinations of claimed subject matter are considered a part of the presently disclosed subject matter.

The foregoing and other aspects, embodiments and features of the present teachings can be more fully understood from the following description taken in conjunction with the accompanying drawings. Additional aspects of the present invention, such as features and/or advantages of exemplary embodiments, will be apparent from the description which follows, or may be learned by practice of specific embodiments in accordance with the teachings of the present invention.

Drawings

The drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component that is illustrated in various figures may be represented by a like numeral. For purposes of clarity, not every component may be labeled in every drawing. Embodiments of various aspects of the present invention will now be described, by way of example, with reference to the accompanying drawings, in which:

fig. 1 is a schematic view of a deformation degree measuring apparatus of a platen die of the present invention.

Fig. 2 is a side sectional view of a deformation degree measuring device of the platen die of fig. 1.

Detailed Description

In order to better understand the technical content of the present invention, specific embodiments are described below with reference to the accompanying drawings.

In this disclosure, aspects of the present invention are described with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. Embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in greater detail below, may be implemented in any of numerous ways, as the disclosed concepts and embodiments are not limited to any one implementation. In addition, some aspects of the present disclosure may be used alone, or in any suitable combination with other aspects of the present disclosure.

The deformation degree measuring device of the pressing screen mold for preparing the microchannel plate in combination with the exemplary embodiment shown in fig. 1 and 2 comprises a base 1, a pressing ring 2, a sliding block 3 and a standard block 4.

A base 1 arranged to rest on a horizontal platform.

And the sliding blocks 3 are arranged on the base in a sliding manner to form a screen pressing die. Wherein a plurality of sliders encircle and distribute and form a regular hexagon space at the center for place microchannel plate screen section or standard block, wherein every slider is the vertical plane towards the direction at center, and the direction that deviates from the center is the inclined plane.

And the pressing ring 2 is sleeved on the inclined surfaces of the plurality of sliding blocks and has a tendency that the plurality of sliding blocks are gathered and tightened towards the center.

Wherein the plurality of sliders have the same structure; the clamping ring 2 is constructed as an annular frame with the outer side vertical and the inner side inclined, and the bottom surface of the clamping ring abuts against the surface of the base after the clamping ring is sleeved on the sliding block.

The deformation degree measuring device also comprises a plurality of feelers with different sizes, and the thickness of each feeler is 0-1 mm. Therefore, during detection, the screen section is replaced by the standard block at the center, the sliding block is pressed by the pressing ring, any one of the plurality of feelers is plugged into three contact interfaces of the standard block-sliding block, the sliding block-sliding block and the sliding block-pressing ring, and the size of the gap is measured according to the maximum size of the feeler which can be plugged in.

Preferably, the base, the slider and the clamping ring are all made of steel.

The standard block 4 can be made by customization, and has a size matched with the diameter of the microchannel plate screen section and a shape of a regular hexagon.

Preferably, the base is provided with a level bubble for indicating a horizontal state of the base.

With reference to fig. 1 and 2, in the process of detecting the deformation degree of the screen pressing mold by using the deformation degree measuring device, the following processes and operations are included:

step 1, placing a base on a platform in a horizontal state, enabling the base to be in the horizontal state integrally, sleeving a pressing ring on a sliding block, and then placing the pressing ring on the base;

step 2, placing the customized standard block in the middle of the sliding block instead of the microchannel plate screen section, pressing the sliding block by using a pressing ring, extruding the sliding block under the action of gravity of the pressing ring, and further extruding the standard block to keep the sliding block and the standard block in a close fit trend;

step 3, sequentially plugging feelers with different thicknesses into three contact interfaces of a standard block-a slide block, a slide block-a slide block and a slide block-a pressing ring according to the sequence, and measuring the sizes of three gaps according to the maximum size of the feelers capable of being plugged into the contact interfaces, so as to obtain the deformation degree of the screen pressing mold;

and 4, measuring the deformation degree of the base by using the level ruler, namely, tightly attaching the level ruler to the base placing surface, and then measuring the gap size between the level ruler and the base placing surface by using the feeler gauge.

When three gaps of a standard block-sliding block, a sliding block-sliding block and a sliding block-pressing ring are measured by using different feelers, the measurement sequence is unchanged.

So, when measuring, can fill in according to the clearance gauge and press the gap of pressing the screen mould base to measure the combination precision that the biggest size, the level bar that press the screen mould were pressed in, and then use the combination precision to press the deformation degree of screen mould to characterize. The measuring method can directly represent the deformation degree of the screen pressing die through the measured value of the combination precision, and solves the problem of quantitative representation of the deformation degree of the screen pressing die.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention should be determined by the appended claims.