阅读说明：本技术 具备传感信号调平功能的二维快速偏转调节装置及方法 (Two-dimensional rapid deflection adjusting device and method with sensing signal leveling function ) 是由 韩文文 徐明龙 田征 于 2020-04-22 设计创作，主要内容包括：具备传感信号调平功能的二维快速偏转调节装置及方法,该装置由底座,安装在底座碟簧安装槽内的碟簧,安装在底座传感信号调平电路板安装槽内的传感信号调平电路板,安装在底座上端驱动单元安装槽上的四个具备自传感功能的驱动单元,安装在底座下端的底座后盖,安装在底座侧面的格兰头,与底座通过限位销和顶丝相连接的外壳,安装在外壳钢珠限位槽的钢珠以及穿过碟簧内孔和底座螺杆安装孔且安装在外壳镜托上的螺杆所组成；对调节装置X(或Y)方向的一对驱动单元上的压电堆施加差分电压,可实现镜托X(或Y)轴转动,同时驱动单元自传感模块组全桥产生传感信号,经过传感信号调平电路板调平输出用以调节装置闭环控制。该调节装置驱动传感一体化设计,结构紧凑,可实现负载高精度二维快速偏转调节。(The device comprises a base, a disc spring arranged in a disc spring mounting groove of the base, a sensing signal leveling circuit board arranged in a sensing signal leveling circuit board mounting groove of the base, four driving units with self-sensing function arranged on a driving unit mounting groove at the upper end of the base, a base rear cover arranged at the lower end of the base, a Glan head arranged at the side surface of the base, a shell connected with the base through a limiting pin and a jackscrew, a steel ball arranged in a steel ball limiting groove of the shell and a screw passing through an inner hole of the disc spring and a base screw mounting hole and arranged on a mirror support of the shell; the piezoelectric stacks on a pair of driving units in the X (or Y) direction of the adjusting device are applied with differential voltage, the rotation of the X (or Y) axis of the mirror support can be realized, meanwhile, the driving units generate sensing signals from the full bridge of the sensing module group, and the sensing signals are output by the leveling circuit board for the closed-loop control of the adjusting device. The adjusting device has the advantages of integrated driving and sensing design, compact structure and capability of realizing high-precision two-dimensional rapid deflection adjustment of the load.)

1. The two-dimensional rapid deflection adjusting device with the sensing signal leveling function is characterized by comprising a base (1), a disc spring (2) arranged in a disc spring mounting groove (1-1) of the base, a sensing signal leveling circuit board (3) arranged in the sensing signal leveling circuit board mounting groove (1-2) of the base, a first driving unit (4) arranged on a first driving unit mounting groove (1-3) at the upper end of the base (1), a second driving unit (5) arranged on a second driving unit mounting groove (1-4) at the upper end of the base (1), a third driving unit (6) arranged on a third driving unit mounting groove (1-5) at the upper end of the base (1), a fourth driving unit (7) arranged on a fourth driving unit mounting groove (1-6) at the upper end of the base (1), and a base rear cover (8) arranged at the lower end of the base (1), a Glan head (9) arranged in a threaded hole (1-7) on the side surface of the base, a shell (12) which is connected with the base (1) through a limit pin (10) and a jackscrew (11) and consists of a shell mirror support (12-5) on the upper part and a shell cover (12-7) on the lower part, a first steel ball (13) which is arranged in a shell steel ball first limit groove (12-1) on the inner side of the shell mirror support (12-5) and is in point contact with the upper end of a first driving unit (4), a second steel ball (14) which is arranged in a shell steel ball second limit groove (12-2) on the inner side of the shell mirror support (12-5) and is in point contact with the upper end of a second driving unit (5), and a third steel ball (15) which is arranged in a shell steel ball third limit groove (12-3) on the inner side of the shell mirror support (12-5) and is in point contact with the upper end of, a fourth steel ball (16) which is arranged in a fourth limiting groove (12-4) of the shell steel ball at the inner side of the shell mirror support (12-5) and is in point contact with the upper end of the fourth driving unit (7), and a screw (17) which passes through the inner hole (2-1) of the disc spring and the mounting hole (1-8) of the base screw and is arranged on the shell mirror support (12-5);

the base screw mounting hole (1-8) is a through hole which is arranged in the center of the top of the base (1) and penetrates through the base (1); the base disc spring mounting groove (1-1) is a counter bore which is arranged at the center of the inner part of the base (1), has a diameter larger than that of the base screw mounting hole (1-8) and is connected with the lower end of the base screw mounting hole (1-8); the base sensing signal leveling circuit board mounting groove (1-2) is a counter bore which is arranged in the center of the interior of the base (1), has a diameter larger than that of the base disc spring mounting groove (1-1) and is connected with the lower end of the base disc spring mounting groove (1-1);

the first driving unit mounting groove (1-3), the second driving unit mounting groove (1-4), the third driving unit mounting groove (1-5), the fourth driving unit mounting groove (1-6) is arranged at the upper end of the base (1) in a square vertex form in the center, the first driving unit mounting groove (1-3) and the second driving unit mounting groove (1-4) are adjacent, and the first driving unit mounting groove (1-3) and the third driving unit mounting groove (1-5) are opposite;

the first driving unit (4) consists of a piezoelectric stack (4-1), a gasket (4-2) adhered to one end of the piezoelectric stack, a first strain gauge (4-3) adhered to the left side of the piezoelectric stack and a second strain gauge (4-4) adhered to the right side of the piezoelectric stack, and one end, to which the gasket (4-2) is adhered, is defined as the upper end of the first driving unit (4); the second driving unit (5), the third driving unit (6) and the fourth driving unit (7) are the same in structure as the first driving unit (4).

2. The two-dimensional rapid yaw adjustment device with sensor signal leveling function according to claim 1, characterized in that: the shell mirror support (12-5) of the shell (12) is integrally connected with the shell cover (12-7) through a curved beam flexible hinge (12-6); the first shell steel ball limiting groove (12-1), the second shell steel ball limiting groove (12-2), the third shell steel ball limiting groove (12-3) and the fourth shell steel ball limiting groove (12-4) are in a square peak form and are arranged on the inner side of the mirror support (12-5) in the middle, the first shell steel ball limiting groove (12-1) and the second shell steel ball limiting groove (12-2) are in adjacent positions, and the first shell steel ball limiting groove (12-1) and the third shell steel ball limiting groove (12-3) are in relative positions.

3. The two-dimensional rapid yaw adjustment device with sensor signal leveling function according to claim 1, characterized in that: the sensing signal leveling circuit board (3) is provided with an X-axis strain full-bridge circuit (3-1) and a Y-axis strain full-bridge circuit (3-2) with sensing signal leveling functions;

the X-axis strain full-bridge circuit (3-1) with the sensing signal leveling function welds the lead wires at two ends of a first strain gauge (4-3) on the X-axis corresponding to the first driving unit (4) at a first resistance position (3-3) of the X-axis strain full-bridge circuit (3-1), leads at two ends of a second strain gauge (4-4) on the first driving unit (4) are welded at a third resistance position (3-5) of the X-axis strain full-bridge circuit (3-1), leads at two ends of a third strain gauge (6-3) on the third driving unit (6) are welded at the second resistance position (3-4) of the X-axis strain full-bridge circuit (3-1), and leads at two ends of a fourth strain gauge (6-4) on the third driving unit (6) are welded at a fourth resistance position (3-6) of the X-axis strain full-bridge circuit (3-1); the first resistance bit (3-3) and the second resistance bit (3-4) are arranged in an adjacent bridge, and the first resistance bit (3-3) and the third resistance bit (3-5) are arranged in a pair bridge; the first resistor (3-3) is connected with a first leveling resistor (3-7) of a bridge circuit in parallel, and the fourth resistor (3-6) is connected with a second leveling resistor (3-8) of the bridge circuit in parallel; defining the joint of the first resistor bit (3-3) and the second resistor bit (3-4) as the positive end of the output of a bridge circuit, defining the joint of the third resistor bit (3-5) and the fourth resistor bit (3-6) as the negative end of the output of the bridge circuit, defining the joint of the second resistor bit (3-4) and the third resistor bit (3-5) as the power supply of the bridge circuit, and defining the joint of the first resistor bit (3-3) and the fourth resistor bit (3-6) as the ground of the bridge circuit; the arrangement of a Y-axis strain full-bridge circuit (3-2) with a sensing signal leveling function is the same as that of an X-axis;

the leveling method of the X-axis strain full-bridge circuit (3-1) with the sensing signal leveling function comprises the following steps: when the bridge initial state is defined as a state when the two-dimensional fast deflection adjusting device with sensing signal leveling function of claim 1 does not apply a driving voltage, the bridge power supply is defined as E, the output of the positive initial end of the bridge is defined as U1, the output of the negative initial end of the bridge is defined as U2, the total output of the initial outputs of the bridge is defined as U1-U2, the ideal resistances of the first strain gauge (4-3), the second strain gauge (4-4), the third strain gauge (6-3) and the fourth strain gauge (6-4) are defined as R, and then the bridge leveling resistance is expressed as: Δ R ═ ((2 · Δ U + E)/4 · Δ U-1) · R; when the calculated value delta R is less than 0, selecting a leveling resistor with the resistance value of-delta R to be welded on a second leveling resistor position (3-8) of the bridge circuit, and when the calculated value delta R is greater than 0, selecting a leveling resistor with the resistance value of delta R to be welded on a first leveling resistor position (3-7); the leveling method of the Y-axis strain full-bridge circuit (3-2) with the sensing signal leveling function is the same as the leveling method of the X-axis strain full-bridge circuit (3-1).

4. The two-dimensional rapid yaw adjustment device with sensor signal leveling function according to claim 1, characterized in that: the shell mirror support (12-5) is connected with the screw rod (17), and the base (1) is connected with the base rear cover (8) in a threaded connection mode.

5. The adjusting method of the two-dimensional rapid deflection adjusting device with the sensing signal leveling function according to any one of claims 1 to 4, characterized in that: differential voltage is applied to a pair of piezoelectric stacks corresponding to a first driving unit (4) and a third driving unit (6) which are arranged at the relative installation positions of the adjusting device, and based on the inverse piezoelectric effect of a piezoelectric material, the first driving unit (4) and the third driving unit (6) output opposite displacements to perform 'push-pull' action on the mirror support (12-5) so as to realize X-axis deflection of the mirror support (12-5); meanwhile, four strain gauge groups on the first driving unit (4) and the third driving unit (6) output differential signals in a strain full bridge manner, and an X-axis sensing signal is output through leveling of the sensing signal leveling circuit board (3); applying differential voltage to a pair of piezoelectric stacks corresponding to a second driving unit (5) and a fourth driving unit (7) which are arranged at the relative installation positions of the adjusting device, and based on the inverse piezoelectric effect of a piezoelectric material, outputting opposite displacements by the second driving unit (5) and the fourth driving unit (7) to perform 'push-pull' action on the mirror holder (12-5) so as to realize Y-axis deflection of the mirror holder (12-5); meanwhile, four strain gauge groups on the second driving unit (5) and the fourth driving unit (7) output differential signals in a strain full-bridge mode, and Y-axis sensing signals are output through leveling of the sensing signal leveling circuit board (3).

Technical Field

The invention belongs to the technical field of precision instruments, and particularly relates to a two-dimensional rapid deflection adjusting device with a sensing signal leveling function and a method thereof.

Technical Field

With the rapid development of the disciplines of aerospace engineering and the like, the high-precision rapid two-dimensional deflection adjusting mechanism is widely applied to the aspects of rapid capture and accurate tracking of laser communication beams, stability control of astronomical telescopes, images and the like, and plays an increasingly important role.

Electromagnetic actuating devices using voice coil motors as core devices often have the disadvantages of large size, electromagnetic leakage during operation, large power consumption during position holding, serious heat generation and the like.

The existing two-dimensional deflection adjusting mechanism has large sensor volume and weak sensing signal, and is not beneficial to aerospace lightweight application.

The traditional two-dimensional deflection adjusting mechanism with a simple flexible hinge has small structural rigidity and low fundamental frequency, and can not meet the application requirements of high-frequency tracking control of laser communication optical pointing of the aerospace department and the like.

The piezoelectric actuator has the characteristics of small size, light weight, low power consumption, quick response, high actuation precision, large output force, small heat generation and the like, and is widely applied to high-precision adjustment and actuation mechanisms.

The indirect sensing mode that the strain gauge is adhered to the side of the piezoelectric stack to form a full bridge can realize the light design of the two-dimensional deflection adjusting device on the premise of ensuring the sensing precision. The bridge circuit is trimmed by adding a signal leveling circuit, and the sensing signal offset phenomenon caused by initial unbalance of the bridge circuit is eliminated.

The disc spring has the characteristics of small volume, light weight, high rigidity and the like, and the rotational rigidity of the two-dimensional deflection adjusting device can be improved by matching the disc spring with a flexible interaction mode, so that the fundamental frequency of the adjusting device is improved.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention aims to provide a two-dimensional rapid deflection adjusting device with a sensing signal leveling function and a method thereof, which can realize high-precision two-dimensional rapid deflection adjustment, drive and sensing integration and light design; the device has the characteristics of light weight, high fundamental frequency, high sensing precision, sensing signal leveling and quick response.

In order to achieve the purpose, the technical scheme adopted by the invention is as follows:

a two-dimensional rapid deflection adjusting device with sensing signal leveling function comprises a base 1, a disc spring 2 arranged in a disc spring mounting groove 1-1 of the base, a sensing signal leveling circuit board 3 arranged in a sensing signal leveling circuit board mounting groove 1-2 of the base, a first driving unit 4 arranged on a first driving unit mounting groove 1-3 at the upper end of the base 1, a second driving unit 5 arranged on a second driving unit mounting groove 1-4 at the upper end of the base 1, a third driving unit 6 arranged on a third driving unit mounting groove 1-5 at the upper end of the base 1, a fourth driving unit 7 arranged on a fourth driving unit mounting groove 1-6 at the upper end of the base 1, a base rear cover 8 arranged at the lower end of the base 1, a flange head 9 arranged on a threaded hole 1-7 at the side surface of the base, an outer shell mirror support 12-5 at the upper part and an outer shell cover 12-5 at the lower part, which are connected with the base 1 through a limiting pin 10 and a housing 12 composed of-7, a first steel ball (13) installed in a first housing steel ball retaining groove 12-1 inside a housing mirror holder 12-5 and making point contact with the upper end of the first driving unit 4, a second steel ball 14 installed in a second housing steel ball retaining groove 12-2 inside the housing mirror holder 12-5 and making point contact with the upper end of the second driving unit 5, a third steel ball 15 installed in a third housing steel ball retaining groove 12-3 inside the housing mirror holder 12-5 and making point contact with the upper end of the third driving unit 6, a fourth steel ball 16 installed in a fourth housing steel ball retaining groove 12-4 inside the housing mirror holder 12-5 and making point contact with the upper end of the fourth driving unit 7, and a screw 17 passing through the inner hole 2-1 of the disc spring and the mounting hole 1-8 of the base screw and mounted on the mirror support 12-5 of the shell;

the base screw mounting holes 1-8 are through holes which are arranged in the center of the top of the base 1 and penetrate through the base 1; the base disc spring mounting groove 1-1 is a counter bore which is arranged at the center of the inner part of the base 1, has a diameter larger than that of the base screw mounting hole 1-8 and is connected with the lower end of the base screw mounting hole 1-8; the base sensing signal leveling circuit board installation groove 1-2 is a counter bore which is arranged in the center of the inside of the base 1, has a diameter larger than that of the base disc spring installation groove 1-1 and is connected with the lower end of the base disc spring installation groove 1-1;

the first driving unit mounting groove 1-3, the second driving unit mounting groove 1-4, the third driving unit mounting groove 1-5, the fourth driving unit mounting groove 1-6 is in a square vertex form and is centrally arranged at the upper end of the base 1, the first driving unit mounting groove 1-3 and the second driving unit mounting groove 1-4 are in adjacent positions, and the first driving unit mounting groove 1-3 and the third driving unit mounting groove 1-5 are in relative positions;

the first driving unit 4 consists of a piezoelectric stack 4-1, a gasket 4-2 adhered to one end of the piezoelectric stack, a first strain gauge 4-3 adhered to the left side of the piezoelectric stack and a second strain gauge 4-4 adhered to the right side of the piezoelectric stack, and the end adhered with the gasket 4-2 is defined as the upper end of the first driving unit 4; the second driving unit 5, the third driving unit 6 and the fourth driving unit 7 have the same structure as the first driving unit 4.

In the two-dimensional rapid deflection adjusting device with the sensing signal leveling function, a shell mirror support 12-5 of a shell 12 is integrally connected with a shell cover 12-7 through a curved beam flexible hinge 12-6; the first limiting groove 12-1 for the shell steel balls, the second limiting groove 12-2 for the shell steel balls, the third limiting groove 12-3 for the shell steel balls and the fourth limiting groove 12-4 for the shell steel balls are arranged on the inner side of the mirror support 12-5 in a square peak mode, the first limiting groove 12-1 for the shell steel balls and the second limiting groove 12-2 for the shell steel balls are in adjacent positions, and the first limiting groove 12-1 for the shell steel balls and the third limiting groove 12-3 for the shell steel balls are in relative positions.

According to the two-dimensional rapid deflection adjusting device with the sensing signal leveling function, the sensing signal leveling circuit board 3 is provided with an X-axis strain full-bridge circuit 3-1 and a Y-axis strain full-bridge circuit 3-2 with the sensing signal leveling function;

the X-axis strain full-bridge circuit 3-1 with the sensing signal leveling function enables leads at two ends of a first strain gauge 4-3 on an X-axis corresponding to a first driving unit 4 to be welded at a first resistance position 3-3 of the X-axis strain full-bridge circuit 3-1, leads at two ends of a second strain gauge 4-4 on the first driving unit 4 are welded at a third resistance position 3-5 of the X-axis strain full-bridge circuit 3-1, leads at two ends of a third strain gauge 6-3 on a third driving unit 6 are welded at a second resistance position 3-4 of the X-axis strain full-bridge circuit 3-1, and leads at two ends of a fourth strain gauge 6-4 on the third driving unit 6 are welded at a fourth resistance position 3-6 of the X-axis strain full-bridge circuit 3-1; the first resistance position 3-3 and the second resistance position 3-4 are arranged in an adjacent bridge, and the first resistance position 3-3 and the third resistance position 3-5 are arranged in a pair bridge; the first resistor position 3-3 is connected with a first leveling resistor position 3-7 of a bridge circuit in parallel, and the fourth resistor position 3-6 is connected with a second leveling resistor position 3-8 of the bridge circuit in parallel; defining the joint of the first resistor bit 3-3 and the second resistor bit 3-4 as the positive end of the output of the bridge circuit, defining the joint of the third resistor bit 3-5 and the fourth resistor bit 3-6 as the negative end of the output of the bridge circuit, defining the joint of the second resistor bit 3-4 and the third resistor bit 3-5 as the power supply of the bridge circuit, and defining the joint of the first resistor bit 3-3 and the fourth resistor bit 3-6 as the ground of the bridge circuit; the arrangement of a Y-axis strain full-bridge circuit 3-2 with a sensing signal leveling function is the same as that of an X-axis;

the X-axis strain full-bridge circuit 3-1 leveling method with the sensing signal leveling function comprises the following steps: defining the initial state of the bridge circuit as the state when the two-dimensional fast deflection adjusting device with sensing signal leveling function does not apply driving voltage, defining the power supply of the bridge circuit as E, defining the initial positive end output of the bridge circuit as U1, defining the initial negative end output of the bridge circuit as U2, defining the initial total output of the bridge circuit as delta U as U1-U2, defining the ideal resistance values of the first strain gauge 4-3, the second strain gauge 4-4, the third strain gauge 6-3 and the fourth strain gauge 6-4 as R, and then representing the bridge circuit leveling resistance as: Δ R ═ ((2 · Δ U + E)/4 · Δ U-1) · R; when the calculated value delta R is less than 0, selecting a leveling resistor with the resistance value of-delta R to be welded on a second leveling resistor position 3-8 of the bridge circuit, and when the calculated value delta R is greater than 0, selecting a leveling resistor with the resistance value of delta R to be welded on a first leveling resistor position 3-7; the leveling method of the Y-axis strain full-bridge circuit 3-2 with the sensing signal leveling function is the same as the leveling method of the X-axis strain full-bridge circuit 3-1.

The shell mirror support 12-5 is connected with the screw rod 17, and the base 1 is connected with the base rear cover 8 in a threaded connection mode.

The adjusting method of the two-dimensional rapid deflection adjusting device with the sensing signal leveling function comprises the following steps: applying differential voltage to a pair of piezoelectric stacks corresponding to the first driving unit 4 and the third driving unit 6 at the relative installation positions of the adjusting device, wherein the first driving unit 4 and the third driving unit 6 output opposite displacements to perform push-pull actions on the mirror support 12-5 based on the inverse piezoelectric effect of the piezoelectric material, so that the mirror support 12-5X-axis deflection is realized; meanwhile, four strain gauge groups on the first driving unit 4 and the third driving unit 6 output differential signals in a strain full-bridge manner, and an X-axis sensing signal is output by leveling the sensing signal leveling circuit board 3; applying differential voltage to a pair of piezoelectric stacks corresponding to a second driving unit 5 and a fourth driving unit 7 which are arranged at the relative installation positions of the adjusting device, wherein the second driving unit 5 and the fourth driving unit 7 output opposite displacements to perform push-pull action on the mirror holder 12-5 based on the inverse piezoelectric effect of the piezoelectric material, so that the Y-axis deflection of the mirror holder 12-5 is realized; meanwhile, the four strain gauge groups on the second driving unit 5 and the fourth driving unit 7 output differential signals in a strain full-bridge manner, and the sensing signal leveling circuit board 3 levels and outputs Y-axis sensing signals.

Compared with the prior art, the invention has the following advantages:

1) the integrated driving and sensing design is realized, the structure is compact, and the weight is light.

2) The rotation rigidity of the two-dimensional deflection adjusting device is improved by adopting a disc spring matched flexible interaction mode, and the base frequency of the adjusting device is improved.

3) The function of leveling the sensing signal of the two-dimensional deflection adjusting device is realized.

4) And the ceramic piezoelectric drive is adopted, so that the power consumption is low and the response is fast.

Drawings

Fig. 1a is a cross-sectional view of an adjustment device of the invention, and fig. 1b is a perspective view of the adjustment device of the invention with the housing removed.

Fig. 2a is a sectional view of the adjusting device base, and fig. 2b is a perspective view of the adjusting mechanism base.

Fig. 3a is a perspective view and fig. 3b is a front view of the first drive unit of the adjustment device.

Fig. 4a is a bottom view of the housing mirror holder of the housing, fig. 4b is a cross-sectional view of the housing, and fig. 4c is a perspective view of the housing.

Fig. 5 is a schematic view of a disc spring.

Fig. 6 is a schematic layout diagram of an X-axis strain full bridge circuit and a Y-axis strain full bridge circuit with a sensing signal leveling function on a sensing signal leveling function circuit board.

Fig. 7 is a schematic diagram of an X-axis strained full bridge circuit with sensing signal leveling function.

FIG. 8 is a schematic diagram of an operation method of the adjusting device.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

As shown in fig. 1a and 1 b. The invention discloses a two-dimensional rapid deflection adjusting device with sensing signal leveling function, which comprises a base 1, a disc spring 2 arranged in a disc spring mounting groove 1-1 of the base, a sensing signal leveling circuit board 3 arranged in the sensing signal leveling circuit board mounting groove 1-2 of the base, a first driving unit 4 arranged on a first driving unit mounting groove 1-3 at the upper end of the base 1, a second driving unit 5 arranged on a second driving unit mounting groove 1-4 at the upper end of the base 1, a third driving unit 6 arranged on a third driving unit mounting groove 1-5 at the upper end of the base 1, a fourth driving unit 7 arranged on a fourth driving unit mounting groove 1-6 at the upper end of the base 1, a base rear cover 8 arranged at the lower end of the base 1, a Glan head 9 arranged on a side threaded hole 1-7 of the base, an upper shell mirror support 12-5 connected with the base 1 through a limiting pin 10 and a top thread 11 and an outer shell mirror support 12-5 at the upper A shell 12 consisting of a shell cover 12-7, a first steel ball 13 which is arranged in a first limit groove 12-1 of shell steel balls at the inner side of a shell mirror support 12-5 and is in point contact with the upper end of the first driving unit 4, a second steel ball 14 which is arranged in a second limit groove 12-2 of shell steel balls at the inner side of the shell mirror support 12-5 and is in point contact with the upper end of the second driving unit 5, a third steel ball 15 which is arranged in a third limit groove 12-3 of shell steel balls at the inner side of the shell mirror support 12-5 and is in point contact with the upper end of the third driving unit 6, a fourth steel ball 16 which is arranged in a fourth limit groove 12-4 of shell steel balls at the inner side of the shell mirror support 12-5 and is in point contact with the upper end of the fourth driving unit 7, and a screw 17 which passes through the inner hole 2-1 of the disc spring and the mounting hole 1-8 of the base screw and is arranged on the mirror support 12-5 of the shell.

As shown in fig. 2a, the base screw mounting hole 1-8 is a through hole arranged in the center of the top of the base 1 and penetrating through the base 1; the base disc spring mounting groove 1-1 is a counter bore which is arranged at the center of the inner part of the base 1, has a diameter larger than that of the base screw mounting hole 1-8 and is connected with the lower end of the base screw mounting hole 1-8; the base sensing signal leveling circuit board installation groove 1-2 is a counter bore which is arranged in the center of the inside of the base 1, has a diameter larger than that of the base disc spring installation groove 1-1 and is connected with the lower end of the base disc spring installation groove 1-1.

As shown in fig. 2b, the first driving unit mounting groove 1-3, the second driving unit mounting groove 1-4, the third driving unit mounting groove 1-5, and the fourth driving unit mounting groove 1-6 are disposed centrally on the upper end of the base 1 in the form of a square vertex, the first driving unit mounting groove 1-3 and the second driving unit mounting groove 1-4 are disposed at adjacent positions, and the first driving unit mounting groove 1-3 and the third driving unit mounting groove 1-5 are disposed at opposite positions.

As shown in fig. 3a and 3b, the first driving unit 4 is composed of a piezoelectric stack 4-1, a pad 4-2 adhered to one end of the piezoelectric stack, a first strain gauge 4-3 adhered to the left side of the piezoelectric stack and a second strain gauge 4-4 adhered to the right side of the piezoelectric stack, and the end adhered with the pad 4-2 is defined as the upper end of the first driving unit 4; the second driving unit 5, the third driving unit 6 and the fourth driving unit 7 have the same structure as the first driving unit 4.

As shown in fig. 4a, 4b and 4c, the housing mirror support 12-5 of the two-dimensional fast deflection adjusting device housing 12 with sensing signal leveling function is integrally connected with the housing cover 12-7 through a curved beam flexible hinge 12-6; the first limiting groove 12-1 for the shell steel balls, the second limiting groove 12-2 for the shell steel balls, the third limiting groove 12-3 for the shell steel balls and the fourth limiting groove 12-4 for the shell steel balls are arranged on the inner side of the mirror support 12-5 in a square peak mode, the first limiting groove 12-1 for the shell steel balls and the second limiting groove 12-2 for the shell steel balls are in adjacent positions, and the first limiting groove 12-1 for the shell steel balls and the third limiting groove 12-3 for the shell steel balls are in relative positions.

Fig. 5 is a schematic view of the disc spring 2.

As shown in fig. 6, in the two-dimensional fast deflection adjusting device with the sensing signal leveling function, the sensing signal leveling circuit board 3 is provided with an X-axis strain full bridge circuit 3-1 and a Y-axis strain full bridge circuit 3-2 with the sensing signal leveling function.

As shown in fig. 7, in the X-axis strain full bridge circuit 3-1 with the sensing signal leveling function, leads at two ends of a first strain gauge 4-3 on an X-axis corresponding to a first driving unit 4 are welded at a first resistance position 3-3 of the X-axis strain full bridge circuit 3-1, leads at two ends of a second strain gauge 4-4 on the first driving unit 4 are welded at a third resistance position 3-5 of the X-axis strain full bridge circuit 3-1, leads at two ends of a third strain gauge 6-3 on a third driving unit 6 are welded at a second resistance position 3-4 of the X-axis strain full bridge circuit 3-1, and leads at two ends of a fourth strain gauge 6-4 on the third driving unit 6 are welded at a fourth resistance position 3-6 of the X-axis strain full bridge circuit 3-1; the first resistance position 3-3 and the second resistance position 3-4 are arranged in an adjacent bridge, and the first resistance position 3-3 and the third resistance position 3-5 are arranged in a pair bridge; the first resistor position 3-3 is connected with a first leveling resistor position 3-7 of a bridge circuit in parallel, and the fourth resistor position 3-6 is connected with a second leveling resistor position 3-8 of the bridge circuit in parallel; defining the joint of the first resistor bit 3-3 and the second resistor bit 3-4 as the positive end of the output of the bridge circuit, defining the joint of the third resistor bit 3-5 and the fourth resistor bit 3-6 as the negative end of the output of the bridge circuit, defining the joint of the second resistor bit 3-4 and the third resistor bit 3-5 as the power supply of the bridge circuit, and defining the joint of the first resistor bit 3-3 and the fourth resistor bit 3-6 as the ground of the bridge circuit; the arrangement of a Y-axis strain full-bridge circuit 3-2 with a sensing signal leveling function is the same as that of an X-axis;

the X-axis strain full-bridge circuit 3-1 leveling method with the sensing signal leveling function comprises the following steps: defining the initial state of the bridge circuit as the state when the two-dimensional fast deflection adjusting device with sensing signal leveling function does not apply driving voltage, defining the power supply of the bridge circuit as E, defining the initial positive end output of the bridge circuit as U1, defining the initial negative end output of the bridge circuit as U2, defining the initial total output of the bridge circuit as delta U as U1-U2, defining the ideal resistance values of the first strain gauge 4-3, the second strain gauge 4-4, the third strain gauge 6-3 and the fourth strain gauge 6-4 as R, and then representing the bridge circuit leveling resistance as: Δ R ═ ((2 · Δ U + E)/4 · Δ U-1) · R; when the calculated value delta R is less than 0, selecting a leveling resistor with the resistance value of-delta R to be welded on a second leveling resistor position 3-8 of the bridge circuit, and when the calculated value delta R is greater than 0, selecting a leveling resistor with the resistance value of delta R to be welded on a first leveling resistor position 3-7; the leveling method of the Y-axis strain full-bridge circuit 3-2 with the sensing signal leveling function is the same as the leveling method of the X-axis strain full-bridge circuit 3-1.

As the preferred embodiment of the invention, the shell mirror support 12-5 and the screw 17, and the base 1 and the base rear cover 8 are connected in a threaded connection mode.

As shown in FIG. 8, the adjusting method of the two-dimensional fast deflection adjusting device with the sensing signal conditioning function comprises the steps of applying differential voltage to a pair of piezoelectric stacks corresponding to a first driving unit 4 and a third driving unit 6 at the relative installation positions of the adjusting device, enabling the first driving unit 4 and the third driving unit 6 to output opposite displacements to carry out push-pull actuation on a mirror support 12-5 based on the inverse piezoelectric effect of a piezoelectric material, and achieving α -degree X-axis deflection of the mirror support 12-5, meanwhile, four strain gauge groups on the first driving unit 4 and the third driving unit 6 respond to full-bridge strain output differential signals, and output X-axis sensing signals through signal leveling circuit boards in a leveling mode.

The two-dimensional rapid deflection adjusting device with the sensing signal conditioning function is in driving and sensing integrated design, is compact in structure, and can achieve load high-bandwidth two-dimensional rapid deflection adjustment and high-precision feedback control.