阅读说明：本技术 一种对称式柔性支撑机构 (Symmetrical flexible supporting mechanism ) 是由 李思远 田飞飞 张宏建 赵强 柯善良 于 2020-04-16 设计创作，主要内容包括：为克服传统动镜支撑机构寿命短、耦合位移大、位移输出端面易倾斜、运动行程小的缺点,本发明提供了一种对称式柔性支撑机构,包括四个动臂、两个固定体和一个运动体。四个动臂结构尺寸相同,均通过其中部的两个连接体与运动体相连,通过其两端部的补偿体与两个固定体相连,并且四个动臂在空间内关于运动体中心对称设置,且相邻两个动臂之间相隔90度；单个动臂上的连接体和补偿体均为柔性铰链,利用柔性铰链实现运动传递,具有无隙传动、无摩擦等优点,有效保证了机构的运动精度；单个动臂内形成双平行四边形嵌套,能有效增大动镜运动的行程且具有补偿功能,有利于提高成像光谱仪的光谱分辨率；本发明还具有结构简单紧凑、成本低、寿命长的优点。(In order to overcome the defects of short service life, large coupling displacement, easy inclination of a displacement output end surface and small movement stroke of the traditional movable mirror supporting mechanism, the invention provides a symmetrical flexible supporting mechanism which comprises four movable arms, two fixed bodies and a moving body. The four movable arms are identical in structural size, are connected with the moving body through two connecting bodies in the middle of the four movable arms, are connected with the two fixed bodies through compensation bodies at two end parts of the four movable arms, are symmetrically arranged in space relative to the center of the moving body, and are separated by 90 degrees; the connecting body and the compensating body on the single movable arm are both flexible hinges, and the flexible hinges are utilized to realize motion transmission, so that the mechanism has the advantages of zero-clearance transmission, zero friction and the like, and the motion precision of the mechanism is effectively ensured; double parallelogram nesting is formed in a single movable arm, so that the moving stroke of the movable mirror can be effectively increased, the compensation function is realized, and the spectral resolution of the imaging spectrometer is favorably improved; the invention also has the advantages of simple and compact structure, low cost and long service life.)

1. The utility model provides a flexible supporting mechanism of symmetry formula which characterized in that: comprises a first movable arm (21), a second movable arm (22), a third movable arm (23), a fourth movable arm (24), a first fixed body (25), a second fixed body (26) and a moving body (27);

the first fixed body (25), the moving body (27) and the second fixed body (26) are distributed in sequence along an optical axis, and the geometric centers of the first fixed body, the moving body and the second fixed body are all positioned on the optical axis; the first fixed body (25) and the second fixed body (26) are symmetrical with respect to the moving body (27);

the first movable arm (21), the second movable arm (22), the third movable arm (23) and the fourth movable arm (24) are identical in structure and size;

the first movable arm (21) comprises a first intermediate body (215), and a first compensation body (213), a first connecting body (211), a second connecting body (212) and a second compensation body (214) which are arranged on the first intermediate body (215) in sequence and are parallel to each other; the first movable arm (21) is connected with the moving body (27) through the first connecting body (211) and the second connecting body (212), is connected with the first fixed body (25) through the first compensating body (213), and is connected with the second fixed body (25) through the second compensating body (214);

in an initial state, the first compensation body (213), the first connecting body (211), the second connecting body (212) and the second compensation body (214) are all vertical to the first middle body (215);

the distance between the first compensation body (213) and the first connecting body (211) is equal to the distance between the second connecting body (212) and the second compensation body (214); the first compensation body (213) and the second compensation body (214) are equal in length; the first connecting body (211) and the second connecting body (212) are equal in length;

the second movable arm (22) comprises a second intermediate body (225), and a third compensation body (223), a third connecting body (221), a fourth connecting body (222) and a fourth compensation body (224) which are arranged on the second intermediate body (225) in sequence and are parallel to each other; the second movable arm (22) is connected with the moving body (27) through the third connecting body (221) and the fourth connecting body (222), is connected with the first fixed body (25) through the third compensating body (223), and is connected with the second fixed body (25) through the fourth compensating body (224);

the third movable arm (23) comprises a third intermediate body (235), and a fifth compensation body (233), a fifth connecting body (231), a sixth connecting body (232) and a sixth compensation body (234) which are arranged on the third intermediate body (235) in sequence and are parallel to each other; the third movable arm (23) is connected with the moving body (27) through the fifth connecting body (231) and the sixth connecting body (232), is connected with the first fixed body (25) through the fifth compensating body (233), and is connected with the second fixed body (25) through the sixth compensating body (234);

the fourth movable arm (24) comprises a fourth intermediate body (245), and a seventh compensation body (243), a seventh connecting body (241), an eighth connecting body (242) and an eighth compensation body (244) which are arranged on the fourth intermediate body (245) in sequence and are parallel to each other; the fourth movable arm (24) is connected with the movable body (27) through the seventh connecting body (241) and the eighth connecting body (242), is connected with the first fixed body (25) through the seventh compensating body (243), and is connected with the second fixed body (25) through the eighth compensating body (244);

the first movable arm (21), the second movable arm (22), the third movable arm (23) and the fourth movable arm (24) are in central symmetry in space relative to the moving body (27), wherein the first movable arm (21) and the third movable arm (23) are distributed at 180 degrees, and the second movable arm (22) and the fourth movable arm (24) are distributed at 180 degrees;

all the connecting bodies and the compensating bodies are flexible hinges.

2. The symmetric flexible support mechanism of claim 1, wherein: the flexible hinge is a fillet straight beam type flexible hinge.

3. The symmetric flexible support mechanism according to claim 1 or 2, wherein: the symmetrical flexible supporting mechanism is of an integral structure and is formed by processing a whole piece of metal material with good elastic property; the non-flexible hinge part is processed by adopting a mechanical milling process, and stress is removed after the processing is finished; the flexible hinge part is processed by adopting an electric spark cutting process or a slow-running wire cutting process.

4. The symmetric flexible support mechanism of claim 3, wherein: the metal material is beryllium bronze, tin bronze, silicon bronze or carbon spring steel.

Technical Field

The invention relates to the technical field of spectral imaging, in particular to a symmetrical flexible supporting mechanism.

Background

The spectral imaging technology is a novel detection technology integrating optics, precision mechanics, electronic technology, computer technology and spectroscopy, and can acquire the target spectral information while acquiring the target geometric shape information. The interference spectrum imaging technology is based on the principle of light wave interference, an interference pattern of a target is measured, and the spectrum information of the target is restored by performing inverse Fourier transform on the interference pattern by utilizing the Fourier transform corresponding relation between the target spectrum information and the interference pattern. The interference spectrum imaging technology has obvious advantages in the aspect of quantitative and qualitative substances, and is widely applied to the fields of environmental monitoring, medical analysis, space detection, meteorological detection and the like.

The time modulation type interference spectrometer is realized based on a michelson interferometer, and the specific working principle is as follows (refer to fig. 1): the target radiation is imaged on the object plane of the interferometer through the front lens group and reaches the beam splitter after being collimated; the incident beam is divided into a transmission part and a reflection part by the beam splitter, the transmission part reaches the movable mirror of the interferometer, and the reflection part reaches the fixed mirror of the interferometer; the two parts of beams return in the original path after being reflected, the reflected beam from the automatic mirror and the transmitted beam from the fixed mirror are imaged on a focal plane through the converging mirror, an interference signal is generated at the same time, and the detector records the interference signal. The time modulation type interference spectrometer generates a time sequence interference pattern of object plane pixel radiation through the movement of a movable mirror in the system, and a spectrogram of the corresponding object plane pixel radiation can be obtained through Fourier transform of the time sequence interference pattern.

The core of the time modulation type interference spectrometer is a high-precision moving mirror scanning system. The main technical indexes of the moving mirror scanning system are as follows: direction accuracy, speed uniformity and maximum motion travel. If the movable mirror tilts or moves transversely in the moving process, the interference efficiency is degraded, even the interference can not occur, and the requirement on the direction accuracy in the visible light wave band is severe; if the speed of the movable mirror is not uniform in the moving process, ghost lines can appear in the spectrum, and the later data processing is seriously influenced; the maximum motion stroke of the movable mirror determines the maximum optical path difference which can be achieved by the spectrometer, and the maximum optical path difference is closely related to the spectral resolution of the interference spectrometer.

The movable mirror supporting mechanism is a key part for scanning the movable mirror, and the performance of the movable mirror supporting mechanism directly influences the scanning precision of the movable mirror and further influences the performance of the interference spectrometer.

The traditional moving mirror supporting mode has three types: in particular to a linear bearing supporting mode, a surface spring supporting mode and a magnetic suspension supporting mode.

The key parts of the linear bearing supporting mode are high in linear bearing processing precision requirement and difficult to maintain, and along with the increase of abrasion, the bearing precision is reduced, the scanning precision of a moving mirror scanning system is also reduced, and the measurement precision of an interference spectrometer is directly influenced.

The surface spring supporting mode generally adopts a parallelogram structure to ensure that the movable mirror is perpendicular to an optical axis, the coupling displacement of the movable mirror can be increased along with the increase of the movement stroke of the movable mirror, and the degradation of the interference efficiency can be caused by the overlarge coupling displacement.

The magnetic suspension supporting mode has the advantages of no friction, no abrasion and high reliability, but has the defects of complex magnetic suspension technical route, high development cost and large system mass and volume.

Disclosure of Invention

Based on the background, the invention provides a symmetrical flexible supporting mechanism in order to overcome the defects of short service life, large coupling displacement, easy inclination of a displacement output end surface and small movement stroke of the traditional movable mirror supporting mechanism.

The technical scheme of the invention is as follows:

a symmetrical flexible supporting mechanism is characterized in that: the movable arm mechanism comprises a first movable arm, a second movable arm, a third movable arm, a fourth movable arm, a first fixed body, a second fixed body and a movable body;

the first fixing body, the moving body and the second fixing body are distributed along an optical axis in sequence, and the geometric centers of the first fixing body, the moving body and the second fixing body are all positioned on the optical axis; the first fixed body and the second fixed body are symmetrical about the moving body;

the first movable arm, the second movable arm, the third movable arm and the fourth movable arm are identical in structure and size;

the first movable arm comprises a first intermediate body, and a first compensation body, a first connecting body, a second connecting body and a second compensation body which are arranged on the first intermediate body in sequence and are parallel to each other; the first movable arm is connected with the moving body through the first connecting body and the second connecting body, is connected with the first fixed body through the first compensating body, and is connected with the second fixed body through the second compensating body;

in an initial state, the first compensation body, the first connecting body, the second connecting body and the second compensation body are all vertical to the first middle body;

the distance between the first compensation body and the first connecting body is equal to the distance between the second connecting body and the second compensation body; the lengths of the first compensation body and the second compensation body are equal; the first connecting body and the second connecting body are equal in length;

the second movable arm comprises a second intermediate body, and a third compensating body, a third connecting body, a fourth connecting body and a fourth compensating body which are arranged on the second intermediate body in sequence and are parallel to each other; the second movable arm is connected with the moving body through the third connecting body and the fourth connecting body, is connected with the first fixed body through the third compensating body, and is connected with the second fixed body through the fourth compensating body;

the third movable arm comprises a third intermediate body, and a fifth compensating body, a fifth connecting body, a sixth connecting body and a sixth compensating body which are arranged on the third intermediate body in sequence and are parallel to each other; the third movable arm is connected with the moving body through the fifth connecting body and the sixth connecting body, is connected with the first fixed body through the fifth compensating body, and is connected with the second fixed body through the sixth compensating body;

the fourth movable arm comprises a fourth intermediate body, and a seventh compensating body, a seventh connecting body, an eighth connecting body and an eighth compensating body which are arranged on the fourth intermediate body in sequence and are parallel to each other; the fourth movable arm is connected with the moving body through the seventh connecting body and the eighth connecting body, is connected with the first fixed body through the seventh compensating body, and is connected with the second fixed body through the eighth compensating body;

the first movable arm, the second movable arm, the third movable arm and the fourth movable arm are symmetrical in space relative to the center of the moving body, wherein the first movable arm and the third movable arm are distributed at 180 degrees, and the second movable arm and the fourth movable arm are distributed at 180 degrees;

all the connecting bodies and the compensating bodies are flexible hinges.

Further, the flexible hinge is a rounded straight beam type flexible hinge.

Furthermore, the symmetrical flexible supporting mechanism is of an integral structure and is formed by processing a whole block of metal material with good elastic property; the non-flexible hinge part is processed by adopting a mechanical milling process, and stress is removed after the processing is finished; the flexible hinge part is processed by adopting an electric spark cutting process or a slow-running wire cutting process.

Further, the metal material is beryllium bronze, tin bronze, silicon bronze or carbon spring steel.

The invention has the beneficial effects that:

1. the invention is suitable for a moving mirror scanning system of a time modulation type interference spectrometer, realizes motion transmission by adopting the flexible hinge, has the advantages of zero-gap transmission, no friction and the like, and effectively ensures the motion precision of the mechanism.

2. According to the invention, a double-parallelogram nested structure is formed in a single movable arm, so that the moving stroke of the movable mirror can be effectively increased, and the compensation function is realized, thereby being beneficial to improving the spectral resolution of the imaging spectrometer.

3. The invention adopts a symmetrical design, comprises the symmetry of each parallelogram and each unit, increases the reliability of the movement and can ensure the accuracy of the moving direction of the movable mirror.

4. According to the invention, the first movable arm, the second movable arm, the third movable arm and the fourth movable arm are in central symmetry in space relative to the moving body, so that the inclination and the transverse displacement of the mirror surface of the movable mirror can be greatly reduced, the modulation efficiency of an imaging spectrometer is improved, and the interference area is increased.

5. The invention has the advantages of accurate movement direction, uniform movement speed and large movement stroke, and is suitable for fine spectrum detection.

6. The invention has an integral structure, and avoids errors caused by assembly.

7. The invention has simple and compact structure, low cost and long service life.

Drawings

FIG. 1 is a schematic diagram of the operation of a time-modulated interference spectrometer.

Fig. 2 is a schematic structural diagram of the symmetrical flexible supporting mechanism of the present invention.

Fig. 2a to 2d are schematic structural diagrams of a first boom, a second boom, a third boom and a fourth boom, respectively, according to the present invention.

Fig. 3 is a schematic structural view of a rounded straight beam type flexible hinge according to the present invention.

FIG. 4 is a general schematic diagram of a system of an interference spectrometer moving mirror scanning system based on the symmetrical flexible support mechanism of the invention.

FIG. 5 is a general schematic diagram of the structure of the scanning system of the movable mirror of the interference spectrometer based on the symmetrical flexible supporting mechanism of the invention.

FIG. 6 is a schematic structural diagram of a scanning system base in a movable mirror scanning system of an interference spectrometer based on a symmetrical flexible supporting mechanism of the invention.

FIG. 7 is a schematic structural diagram of a movable mirror driving unit in a movable mirror scanning system of an interference spectrometer based on a symmetrical flexible supporting mechanism of the present invention.

Fig. 8 is a schematic diagram of the movement principle of the symmetrical flexible supporting mechanism of the invention.

Description of reference numerals:

1-moving mirror;

2-a symmetrical flexible support mechanism;

21-a first boom; 211-a first linker; 212-a second connector; 213-a first compensation body; 214-a second compensation body; 215-first intermediate;

22-a second boom; 221-a third linker; 222-a fourth connector; 223-a third compensation body; 224-a fourth compensator; 225-a second intermediate;

23-a third boom; 231-a fifth linker; 232-a sixth linker; 233-a fifth compensator; 234-a sixth compensator; 235-a third intermediate;

24-a fourth boom; 241-a seventh linker; 242 — an eighth linker; 243-seventh compensation body; 244-eighth compensator; 245-a fourth intermediate;

25-a first fixation; 26-a second fixation body; 27-a motile;

3-a linear motor base;

4-scanning system base; 41-connecting hole; 42-connecting hole;

5-a linear motor; 51-a stator; 52-mover.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

As shown in fig. 2, the symmetrical flexible supporting mechanism provided by the present invention comprises a first movable arm 21, a second movable arm 22, a third movable arm 23, a fourth movable arm 24, a first fixed body 25, a second fixed body 26 and a moving body 27;

the first fixed body 25, the moving body 27 and the second fixed body 26 are distributed in sequence along an optical axis, and the geometric centers of the three are all positioned on the optical axis; the first fixed body 25 and the second fixed body 26 are symmetrical with respect to the moving body 27;

the first boom 21, the second boom 22, the third boom 23, and the fourth boom 24 are arranged in a space in a central symmetry manner with respect to the moving body 27, wherein the first boom 21 and the third boom 23 are distributed at 180 degrees, and the second boom 22 and the fourth boom 24 are distributed at 180 degrees;

the first boom 21, the second boom 22, the third boom 23, and the fourth boom 24 are identical in structure and size.

As shown in fig. 2a, the first boom 21 includes a first connecting body 211, a second connecting body 212, a first compensating body 213, a second compensating body 214, and a first intermediate body 215; the first middle body 215 is long, the first connecting body 211 and the second connecting body 212 are symmetrically arranged in the middle of the first middle body 215, and the first compensating body 213 and the second compensating body 214 are symmetrically arranged at two ends of the first middle body 215; the distance between the first compensation body 213 and the first connection body 211 is equal to the distance between the second connection body 212 and the second compensation body 214, and the specific distance can be designed according to actual requirements; the lengths of the first compensation body 213 and the second compensation body 214 are equal, and the specific distance can be designed according to actual requirements; the first connecting body 211 and the second connecting body 212 have the same length, and the specific distance can be designed according to actual requirements.

As shown in fig. 2b, the second boom 22 includes a third connection body 221, a fourth connection body 222, a third compensation body 223, a fourth compensation body 224 and a second middle body 225; the second middle body 225 is elongated, the third connecting body 221 and the fourth connecting body 222 are symmetrically disposed at the middle portion of the second middle body 225, and the third compensating body 223 and the fourth compensating body 224 are symmetrically disposed at both end portions of the second middle body 225.

As shown in fig. 2c, the third boom 23 includes a fifth connecting body 231, a sixth connecting body 232, a fifth compensating body 233, a sixth compensating body 234, and a third intermediate body 235; the third middle body 235 is elongated, the fifth connecting body 231 and the sixth connecting body 232 are symmetrically disposed at the middle of the third middle body 235, and the fifth compensating body 233 and the sixth compensating body 234 are symmetrically disposed at both ends of the third middle body 235.

As shown in fig. 2d, the fourth boom 24 includes a seventh connecting body 241, an eighth connecting body 242, a seventh compensating body 243, an eighth compensating body 244 and a fourth intermediate body 245; the fourth intermediate body 245 is long, the seventh connecting body 241 and the eighth connecting body 242 are symmetrically disposed at the middle portion of the fourth intermediate body 245, and the seventh compensating body 243 and the eighth compensating body 244 are symmetrically disposed at the two end portions of the fourth intermediate body 245.

The moving body 27 is connected to the first boom 21, the second boom 22, the third boom 23, and the fourth boom 24 through the first connecting body 211, the second connecting body 212, the third connecting body 221, the fourth connecting body 222, the fifth connecting body 231, the sixth connecting body 232, the seventh connecting body 241, and the eighth connecting body 242, respectively;

the first fixed body 25 is connected with the first movable arm 21, the second movable arm 22, the third movable arm 23 and the fourth movable arm 24 through the first compensating body 213, the third compensating body 223, the fifth compensating body 233 and the seventh compensating body 243;

the second fixed body 25 is connected to the first movable arm 21, the second movable arm 22, the third movable arm 23 and the fourth movable arm 24 through the second compensator 214, the fourth compensator 224, the sixth compensator 234 and the eighth compensator 244, respectively;

the first connecting body 211, the second connecting body 212, and the first intermediate body 215 of the first boom 21 form a first parallelogram, and the first compensating body 213, the second compensating body 214, and the first intermediate body 215 form a second parallelogram; the first parallelogram and the second parallelogram are nested with each other. The second boom 22-the fourth boom 24 have the same structure as the first boom 21, and are not described in detail herein.

All the connecting bodies and the compensating bodies on the first movable arm 21, the second movable arm 22, the third movable arm 23 and the fourth movable arm 24 are flexible hinges, and the first connecting body 211, the second connecting body 212, the first compensating body 213 and the second compensating body 214 included in the first movable arm 21 all adopt a rounded straight beam type flexible hinge. All the connecting bodies and compensating bodies included in the second movable arm 22, the third movable arm 23 and the fourth movable arm 24 adopt fillet straight beam type flexible hinges, as shown in fig. 3.

The symmetrical flexible supporting mechanism 2 is an integral structure, and the whole mechanism including the flexible hinge is processed by a whole block of metal material with better elasticity (such as beryllium bronze, tin bronze, silicon bronze or carbon spring steel). The non-flexible hinge part is processed by adopting the traditional mechanical milling process, so that the processing cost is saved, and the influence of residual stress on the structure precision can be effectively reduced by removing stress after the processing is finished; the flexible hinge part is processed by adopting an electric spark cutting process or other high-precision processing processes (such as a slow wire cutting process), and the flexible hinges are all fillet straight beam type flexible hinges; under the condition that driving force is the same, the fillet straight beam type flexible hinge is easier to produce bigger corner offset, and simultaneously stress concentration can be better improved, and the service life of the mechanism is prolonged.

As shown in fig. 4-6, the interference spectrometer moving mirror scanning system based on the symmetric flexible supporting mechanism provided by the present invention comprises a moving mirror 1, a fixed mirror, a laser, a beam splitter, a moving mirror motion feedback unit, a moving mirror motion control unit, the symmetric flexible supporting mechanism 2 provided by the present invention, a moving mirror motion driving unit, and a scanning system base 4.

The laser is used for providing a stable light source and generating a position detection interference signal for the scanning system. Laser output by the laser is divided into two beams of light by a beam splitter, the two beams of light respectively reach a movable mirror and a fixed mirror, the two beams of light are reflected by the movable mirror and the fixed mirror to return to the original path, and the two beams of light interfere with each other after passing through the beam splitter to obtain a position detection interference signal;

the moving mirror motion feedback unit comprises a sensor and a sensing circuit; the sensor is used for detecting and collecting position detection interference signals; the sensing circuit is used for carrying out photoelectric conversion and signal processing on position detection interference signals detected and collected by the sensor to generate interference pulses, and the interference pulses are used as position feedback signals of the movable mirror;

the moving mirror motion control unit comprises a feedback signal capturing module and a feedback signal calculating module. The feedback signal capturing module is used for capturing a movable mirror position feedback signal generated by the movable mirror motion feedback unit, the feedback signal calculating module utilizes the upper computer to control and process the movable mirror position feedback signal (traditional PID control, robust control, self-adaptive control or latest intelligent control and the like can be adopted), closed-loop control of the movable mirror 1 is realized, and a control signal used for controlling the magnitude and the direction of the driving force generated by the movable mirror driving unit is generated so as to ensure the speed stability of the movable mirror.

The symmetrical flexible supporting mechanism 2 provided by the invention is used for supporting the movable mirror 1, and the symmetrical flexible supporting mechanism 2 is arranged on the scanning system base 4 through a connecting hole 41.

The moving mirror motion driving unit comprises a linear motor 5 and a linear motor base 3. The linear motor base 3 is used for supporting a linear motor 5, and the linear motor 5 drives the movable mirror 1 to reciprocate along the light path direction according to a control signal output by the movable mirror motion control unit; the scanning system base 4 is used for fixing the whole interference spectrometer moving mirror scanning system on an interferometer bottom plate, and is used for fixedly supporting the symmetrical flexible supporting mechanism 2 and the moving mirror driving unit; the upper part of the scanning system base 4 is provided with a first connecting hole 41, and the lower part is provided with a second connecting hole 42; the first connection hole 41 is used for connecting and fixing the symmetrical flexible supporting mechanism 2 and the movable mirror driving unit; the second connection hole 42 is used to enable connection with the interferometer.

As shown in fig. 5-7, the linear motor 5 in the moving mirror driving unit is fixedly installed at the connection hole 41 of the scanning system base 4 through the linear motor base 3; the linear motor 5 includes a stator 51 and a mover 52. The stator 51 consists of an outer yoke and a coil, and the stator 51 is fixed on the linear motor base 3; the mover 52 is composed of a permanent magnet and an inner yoke iron, the permanent magnet is connected with the displacement input end of the moving body 27 in the symmetrical flexible supporting mechanism 2; the moving mirror 1 is connected with the displacement output end of the support mechanism moving body 27. Applying a driving voltage to the coils of the stator 51 generates a magnetic field whose direction changes according to the direction of the current flowing through the coils, whose magnetic field strength changes according to the magnitude of the current flowing through the coils, and which interacts with the magnetic field (attraction or repulsion) generated by the permanent magnets of the mover 52. When the permanent magnet of the mover 52 and the coil of the stator 51 generate a magnetic force, the mover 1 is pushed to reciprocate in the optical path direction.

As shown in fig. 8, the 1/4 part of the symmetrical flexible supporting mechanism 2 is taken as an example to illustrate the operation principle of the symmetrical flexible supporting mechanism 2.

In an initial state, the compensation body and the connecting body on each movable arm are vertical to the corresponding intermediate body;

the linear motor 5 of the moving mirror driving unit in the interference spectrometer moving mirror scanning system drives the moving body 27 of the symmetrical flexible supporting mechanism 2 to move according to the output instruction of the moving mirror motion control unit, the motion of the moving body 27 is transmitted to the first connecting body 211 and the second connecting body 212 of the first movable arm 21, and the first connecting body 211 and the second connecting body 212 of the first movable arm 21 both generate rotation with an angle beta;

then, the movement of the first connecting body 211 and the second connecting body 212 of the first arm 21 is transmitted to the intermediate body 215 of the first arm 21, and at this time, the intermediate body 215 of the first arm 21 generates a displacement dz along the direction parallel to the optical axis, and simultaneously moves to the moving body 27 side to generate a side displacement dx;

the movement of the intermediate body 215 of the first boom 21 is transmitted to the first compensation body 213 and the second compensation body 214 of the first boom 21, the first compensation body 213 and the second compensation body 214 of the first boom 1 both rotate by an angle α, and the moving mirror 1 moves by a distance L along the optical path direction during the movement.

With regard to the overall structure of the symmetrical flexible support mechanism 2, since the first boom 21, the second boom 22, the third boom 23 and the fourth boom 24 have consistency in structure and the first boom 21, the second boom 22, the third boom 23 and the fourth boom 24 have symmetry in spatial position, the accuracy of the moving direction of the movable mirror 1 can be effectively ensured.