阅读说明：本技术 一种基于对称式柔性支撑机构的干涉光谱仪动镜扫描系统 (Interference spectrometer moving mirror scanning system based on symmetrical flexible supporting mechanism ) 是由 李思远 田飞飞 张宏建 赵强 柯善良 于 2020-04-16 设计创作，主要内容包括：为克服传统动镜扫描系统精度低、成本高、质量体积大的缺点,本发明提供了一种基于对称式柔性支撑机构的干涉光谱仪动镜扫描系统,包括动镜、定镜、激光器、分束器、动镜运动驱动单元、动镜运动控制单元、动镜运动反馈单元、用于支撑动镜的支撑机构；支撑机构为对称式柔性支撑机构,包括四个动臂、两个固定体和一个运动体；四个动臂结构尺寸相同,均通过其上两个连接体和补偿体分别与运动体和两个固定体相连；单个动臂上的连接体和补偿体均为柔性铰链,利用柔性铰链实现运动传递,无隙传动、无摩擦,保证了机构的运动精度；单个动臂内形成双平行四边形嵌套结构,有效增大动镜运动的行程。(In order to overcome the defects of low precision, high cost and large mass and volume of the traditional moving mirror scanning system, the invention provides a moving mirror scanning system of an interference spectrometer based on a symmetrical flexible supporting mechanism, which comprises a moving mirror, a fixed mirror, a laser, a beam splitter, a moving mirror motion driving unit, a moving mirror motion control unit, a moving mirror motion feedback unit and a supporting mechanism for supporting the moving mirror, wherein the movable mirror is arranged on the movable mirror; the supporting mechanism is a symmetrical flexible supporting mechanism and comprises four movable arms, two fixed bodies and a moving body; the four movable arm structures have the same size and are respectively connected with the moving body and the two fixed bodies through the two connecting bodies and the compensating body on the four movable arm structures; the connecting body and the compensating body on the single movable arm are both flexible hinges, and the flexible hinges are utilized to realize motion transmission, so that zero-clearance transmission and zero friction are realized, and the motion precision of the mechanism is ensured; a double-parallelogram nested structure is formed in a single movable arm, so that the moving stroke of the movable mirror is effectively increased.)

1. A movable mirror scanning system of an interference spectrometer based on a symmetrical flexible supporting mechanism comprises a movable mirror (1), a fixed mirror, a laser, a beam splitter, a movable mirror motion driving unit, a movable mirror motion control unit, a movable mirror motion feedback unit, a supporting mechanism for supporting the movable mirror (1) and a scanning system base (4);

the method is characterized in that:

the supporting mechanism is a symmetrical flexible supporting mechanism (2) and is arranged on the scanning system base (4); the symmetrical flexible supporting mechanism (2) comprises a first movable arm (21), a second movable arm (22), a third movable arm (23), a fourth movable arm (24), a first fixed body (25), a second fixed body (26) and a moving body (27);

the first fixed body (25), the moving body (27) and the second fixed body (26) are distributed in sequence along an optical axis, and the geometric centers of the first fixed body, the moving body and the second fixed body are all positioned on the optical axis; the first fixed body (25) and the second fixed body (26) are symmetrical with respect to the moving body (27);

the first movable arm (21), the second movable arm (22), the third movable arm (23) and the fourth movable arm (24) are identical in structure and size;

the first movable arm (21) comprises a first intermediate body (215), and a first compensation body (213), a first connecting body (211), a second connecting body (212) and a second compensation body (214) which are arranged on the first intermediate body (215) in sequence and are parallel to each other; the first movable arm (21) is connected with the moving body (27) through the first connecting body (211) and the second connecting body (212), is connected with the first fixed body (25) through the first compensating body (213), and is connected with the second fixed body (25) through the second compensating body (214);

in an initial state, the first compensation body (213), the first connecting body (211), the second connecting body (212) and the second compensation body (214) are all vertical to the first middle body (215);

the distance between the first compensation body (213) and the first connecting body (211) is equal to the distance between the second connecting body (212) and the second compensation body (214); the first compensation body (213) and the second compensation body (214) are equal in length; the first connecting body (211) and the second connecting body (212) are equal in length;

the second movable arm (22) comprises a second intermediate body (225), and a third compensation body (223), a third connecting body (221), a fourth connecting body (222) and a fourth compensation body (224) which are arranged on the second intermediate body (225) in sequence and are parallel to each other; the second movable arm (22) is connected with the moving body (27) through the third connecting body (221) and the fourth connecting body (222), is connected with the first fixed body (25) through the third compensating body (223), and is connected with the second fixed body (25) through the fourth compensating body (224);

the third movable arm (23) comprises a third intermediate body (235), and a fifth compensation body (233), a fifth connecting body (231), a sixth connecting body (232) and a sixth compensation body (234) which are arranged on the third intermediate body (235) in sequence and are parallel to each other; the third movable arm (23) is connected with the moving body (27) through the fifth connecting body (231) and the sixth connecting body (232), is connected with the first fixed body (25) through the fifth compensating body (233), and is connected with the second fixed body (25) through the sixth compensating body (234);

the fourth movable arm (24) comprises a fourth intermediate body (245), and a seventh compensation body (243), a seventh connecting body (241), an eighth connecting body (242) and an eighth compensation body (244) which are arranged on the fourth intermediate body (245) in sequence and are parallel to each other; the fourth movable arm (24) is connected with the movable body (27) through the seventh connecting body (241) and the eighth connecting body (242), is connected with the first fixed body (25) through the seventh compensating body (243), and is connected with the second fixed body (25) through the eighth compensating body (244);

the first movable arm (21), the second movable arm (22), the third movable arm (23) and the fourth movable arm (24) are in central symmetry in space relative to the moving body (27), wherein the first movable arm (21) and the third movable arm (23) are distributed at 180 degrees, and the second movable arm (22) and the fourth movable arm (24) are distributed at 180 degrees;

all the connecting bodies and the compensating bodies are flexible hinges;

the movable mirror (1) is connected with the displacement output end of a moving body (27) in the symmetrical flexible supporting mechanism (2);

the output end of the movable mirror motion driving unit is connected with the displacement input end of the moving body (27).

2. The interference spectrometer moving mirror scanning system based on the symmetric flexible supporting mechanism according to claim 1, characterized in that: the flexible hinge is a fillet straight beam type flexible hinge.

3. The interference spectrometer moving mirror scanning system based on the symmetric flexible supporting mechanism according to claim 1 or 2, characterized in that: the symmetrical flexible supporting mechanism is of an integral structure and is formed by processing a whole piece of metal material with good elastic property; the non-flexible hinge part is processed by adopting a mechanical milling process, and stress is removed after the processing is finished; the flexible hinge part is processed by adopting an electric spark cutting process or a slow-running wire cutting process.

4. The interference spectrometer moving mirror scanning system based on the symmetric flexible supporting mechanism as claimed in claim 3, wherein: the metal material is beryllium bronze, tin bronze, silicon bronze or carbon spring steel.

5. The interference spectrometer moving mirror scanning system based on the symmetric flexible supporting mechanism as claimed in claim 4, wherein: laser output by the laser is divided into two beams of light by the beam splitter, the two beams of light respectively reach the movable mirror (1) and the fixed mirror, the two beams of light are reflected by the movable mirror (1) and the fixed mirror and return to the original path, and the two beams of light interfere with each other after passing through the beam splitter to obtain a detection interference signal;

the moving mirror motion feedback unit comprises a sensor and a sensing circuit; the sensor is used for detecting and collecting the detection interference signal, carrying out photoelectric conversion on the detection interference signal and outputting an electric signal; the sensing circuit generates interference pulses after processing the electric signals, and the interference pulses are input to the moving mirror operation control unit as moving mirror position feedback signals;

the moving mirror motion control unit comprises a feedback signal capturing module and a feedback signal calculating module; the feedback signal capturing module is used for capturing a movable mirror position feedback signal generated by the movable mirror motion feedback unit; the feedback signal calculation module is used for controlling and processing the position feedback signal of the movable mirror, generating a control signal for controlling the magnitude and the direction of the driving force generated by the movable mirror motion driving unit and realizing the closed-loop control of the movable mirror (1);

the moving mirror motion driving unit drives the moving body (27) to reciprocate along the optical path direction according to the control signal.

6. The interference spectrometer moving mirror scanning system based on the symmetric flexible supporting mechanism as claimed in claim 5, wherein: the moving mirror motion driving unit comprises a linear motor (5) and a linear motor base (3), and the linear motor (5) is fixedly arranged on the upper part of the scanning system base (4) through the linear motor base (3); the linear motor (5) comprises a stator (51) and a rotor (52); the stator (51) is fixed on the linear motor base (3); the permanent magnet of the rotor (52) is connected with the displacement input end of the moving body (27) in the symmetrical flexible supporting mechanism (2).

Technical Field

The invention relates to the technical field of spectral imaging, in particular to a movable mirror scanning system of an interference spectrometer based on a symmetrical flexible supporting mechanism.

Background

The spectral imaging technology is a novel detection technology integrating optics, precision mechanics, electronic technology, computer technology and spectroscopy, and can acquire the target spectral information while acquiring the target geometric shape information. The interference spectrum imaging technology is based on the principle of light wave interference, an interference pattern of a target is measured, and the spectrum information of the target is restored by performing inverse Fourier transform on the interference pattern by utilizing the Fourier transform corresponding relation between the target spectrum information and the interference pattern. The interference spectrum imaging technology has obvious advantages in the aspect of quantitative and qualitative substances, and is widely applied to the fields of environmental monitoring, medical analysis, space detection, meteorological detection and the like.

The time modulation type interference spectrometer is realized based on a michelson interferometer, and the specific working principle is as follows (refer to fig. 1): the target radiation is imaged on the object plane of the interferometer through the front lens group and reaches the beam splitter after being collimated; the incident beam is divided into a transmission part and a reflection part by the beam splitter, the transmission part reaches the movable mirror of the interferometer, and the reflection part reaches the fixed mirror of the interferometer; the two parts of beams return in the original path after being reflected, the reflected beam from the automatic mirror and the transmitted beam from the fixed mirror are imaged on a focal plane through the converging mirror, an interference signal is generated at the same time, and the detector records the interference signal. The time modulation type interference spectrometer generates a time sequence interference pattern of object plane pixel radiation through the movement of a movable mirror in the system, and a spectrogram of the corresponding object plane pixel radiation can be obtained through Fourier transform of the time sequence interference pattern.

The core of the time modulation type interference spectrometer is a high-precision moving mirror scanning system. The main technical indexes of the moving mirror scanning system are as follows: direction accuracy, speed uniformity and maximum motion travel. If the movable mirror tilts or moves transversely in the moving process, the interference efficiency is degraded, even the interference can not occur, and the requirement on the direction accuracy in the visible light wave band is severe; if the speed of the movable mirror is not uniform in the moving process, ghost lines can appear in the spectrum, and the later data processing is seriously influenced; the maximum motion stroke of the movable mirror determines the maximum optical path difference which can be achieved by the spectrometer, and the maximum optical path difference is closely related to the spectral resolution of the interference spectrometer.

The traditional moving mirror scanning system mainly comprises three types, specifically a moving mirror scanning system based on linear bearing support, a moving mirror scanning system based on surface spring support and a moving mirror scanning system based on magnetic suspension support.

The linear bearing of the key component of the movable mirror scanning system based on the linear bearing support has high processing precision requirement and difficult maintenance, and along with the increase of abrasion, the bearing precision is reduced, the scanning precision of the movable mirror scanning system is also reduced, and the measurement precision of the interference spectrometer is directly influenced.

A movable mirror scanning system based on surface spring support generally adopts a parallelogram structure to ensure that a movable mirror is perpendicular to an optical axis, the coupling displacement of the movable mirror can be increased along with the increase of the movement stroke of the movable mirror, and the degradation of interference efficiency can be caused by the overlarge coupling displacement.

The moving mirror scanning system based on magnetic suspension support has the advantages of no friction, no abrasion and high reliability, but has the defects of complex magnetic suspension technical route, high development cost and large system mass and volume.

Disclosure of Invention

Based on the background, the invention provides a movable mirror scanning system of an interference spectrometer based on a symmetrical flexible supporting mechanism, aiming at overcoming the defects of low precision, high cost and large mass and volume of the traditional movable mirror scanning system.

The technical scheme of the invention is as follows:

the utility model provides an interference spectrometer moving mirror scanning system based on flexible supporting mechanism of symmetry formula which characterized in that: the laser scanning system comprises a movable mirror, a fixed mirror, a laser, a beam splitter, a movable mirror motion driving unit, a movable mirror motion control unit, a movable mirror motion feedback unit, a supporting mechanism for supporting the movable mirror and a scanning system base;

the supporting mechanism is a symmetrical flexible supporting mechanism and is arranged on the scanning system base; the symmetrical flexible supporting mechanism comprises a first movable arm, a second movable arm, a third movable arm, a fourth movable arm, a first fixed body, a second fixed body and a moving body;

the first fixing body, the moving body and the second fixing body are distributed along an optical axis in sequence, and the geometric centers of the first fixing body, the moving body and the second fixing body are all positioned on the optical axis; the first fixed body and the second fixed body are symmetrical about the moving body;

the first movable arm, the second movable arm, the third movable arm and the fourth movable arm are identical in structure and size;

the first movable arm comprises a first intermediate body, and a first compensation body, a first connecting body, a second connecting body and a second compensation body which are arranged on the first intermediate body in sequence and are parallel to each other; the first movable arm is connected with the moving body through the first connecting body and the second connecting body, is connected with the first fixed body through the first compensating body, and is connected with the second fixed body through the second compensating body;

in an initial state, the first compensation body, the first connecting body, the second connecting body and the second compensation body are all vertical to the first middle body;

the distance between the first compensation body and the first connecting body is equal to the distance between the second connecting body and the second compensation body; the lengths of the first compensation body and the second compensation body are equal; the first connecting body and the second connecting body are equal in length;

the second movable arm comprises a second intermediate body, and a third compensating body, a third connecting body, a fourth connecting body and a fourth compensating body which are arranged on the second intermediate body in sequence and are parallel to each other; the second movable arm is connected with the moving body through the third connecting body and the fourth connecting body, is connected with the first fixed body through the third compensating body, and is connected with the second fixed body through the fourth compensating body;

the third movable arm comprises a third intermediate body, and a fifth compensating body, a fifth connecting body, a sixth connecting body and a sixth compensating body which are arranged on the third intermediate body in sequence and are parallel to each other; the third movable arm is connected with the moving body through the fifth connecting body and the sixth connecting body, is connected with the first fixed body through the fifth compensating body, and is connected with the second fixed body through the sixth compensating body;

the fourth movable arm comprises a fourth intermediate body, and a seventh compensating body, a seventh connecting body, an eighth connecting body and an eighth compensating body which are arranged on the fourth intermediate body in sequence and are parallel to each other; the fourth movable arm is connected with the moving body through the seventh connecting body and the eighth connecting body, is connected with the first fixed body through the seventh compensating body, and is connected with the second fixed body through the eighth compensating body;

the first movable arm, the second movable arm, the third movable arm and the fourth movable arm are symmetrical in space relative to the center of the moving body, wherein the first movable arm and the third movable arm are distributed at 180 degrees, and the second movable arm and the fourth movable arm are distributed at 180 degrees;

all the connecting bodies and the compensating bodies are flexible hinges;

the movable mirror is connected with the displacement output end of the moving body in the symmetrical flexible supporting mechanism;

the output end of the movable mirror motion driving unit is connected with the displacement input end of the moving body in the symmetrical flexible supporting mechanism;

and the output end of the movable mirror motion driving unit is connected with the displacement input end of the moving body in the symmetrical flexible supporting mechanism.

Further, the flexible hinge is a rounded straight beam type flexible hinge.

Furthermore, the symmetrical flexible supporting mechanism is of an integral structure and is formed by processing a whole block of metal material with good elastic property; the non-flexible hinge part is processed by adopting a mechanical milling process, and stress is removed after the processing is finished; the flexible hinge part is processed by adopting an electric spark cutting process or a slow-running wire cutting process.

Further, the metal material is beryllium bronze, tin bronze, silicon bronze or carbon spring steel.

Furthermore, laser output by the laser is divided into two beams of light by the beam splitter, the two beams of light respectively reach the movable mirror and the fixed mirror, the two beams of light are reflected by the movable mirror and the fixed mirror to return to the original path, and the two beams of light are interfered by the beam splitter to obtain a detection interference signal;

the moving mirror motion feedback unit comprises a sensor and a sensing circuit; the sensor is used for detecting and collecting the detection interference signal, carrying out photoelectric conversion on the detection interference signal and outputting an electric signal; the sensing circuit generates interference pulses after processing the electric signals, and the interference pulses are input to the moving mirror operation control unit as moving mirror position feedback signals;

the moving mirror motion control unit comprises a feedback signal capturing module and a feedback signal calculating module; the feedback signal capturing module is used for capturing a movable mirror position feedback signal generated by the movable mirror motion feedback unit; the feedback signal calculation module is used for controlling and processing the position feedback signal of the movable mirror, generating a control signal for controlling the magnitude and the direction of the driving force generated by the movable mirror motion driving unit and realizing the closed-loop control of the movable mirror;

and the moving mirror motion driving unit drives the moving body to reciprocate along the direction of the light path according to the control signal.

Furthermore, the moving mirror motion driving unit comprises a linear motor and a linear motor base, and the linear motor is fixedly arranged on the upper part of the scanning system base through the linear motor base; the linear motor comprises a stator and a rotor; the stator is fixed on the linear motor base; the permanent magnet of the rotor is connected with the displacement input end of the moving body in the symmetrical flexible supporting mechanism.

The invention has the beneficial effects that:

1. the invention is suitable for a time modulation type interference spectrometer, realizes motion transmission by designing a symmetrical flexible supporting mechanism with a special structure for a movable mirror in a movable mirror scanning system and adopting a flexible hinge, has the advantages of zero-clearance transmission, no friction and the like, and effectively ensures the motion precision of the mechanism.

2. The symmetrical flexible supporting mechanism of the invention forms a double-parallelogram nested structure in a single movable arm, can effectively increase the moving stroke of the movable mirror, has a compensation function and is beneficial to improving the spectral resolution of the imaging spectrometer.

3. The symmetrical flexible supporting mechanism adopts a symmetrical design, comprises each parallelogram and each unit, increases the reliability of movement, and can ensure the accuracy of the moving direction of the movable mirror.

4. According to the invention, the first movable arm, the second movable arm, the third movable arm and the fourth movable arm of the symmetrical flexible supporting mechanism are in central symmetry with respect to the moving body in space, so that the inclination and the transverse displacement of the mirror surface of the movable mirror can be greatly reduced, the modulation efficiency of an imaging spectrometer is improved, and the interference area is increased.

5. The movable mirror driving unit adopts a driving mode of the fixed coil and the movable magnet, thereby avoiding the lead fracture fault caused by frequent pulling of the lead of the coil and ensuring the motion reliability of the whole system.

6. The invention carries out closed-loop control on the moving mirror, and ensures the speed uniformity of the moving mirror.

7. The invention has the advantages of accurate movement direction, uniform movement speed and large movement stroke, and is suitable for fine spectrum detection.

8. The symmetrical flexible supporting mechanism is of an integral structure, and errors caused by assembly are avoided.

9. The invention has simple and compact structure, low cost and long service life.

Drawings

FIG. 1 is a schematic diagram of the operation of a time-modulated interference spectrometer.

FIG. 2 is a schematic diagram of the system of the scanning system of the interferometer of the present invention.

FIG. 3 is a schematic diagram of the scanning system of the interference spectrometer.

Fig. 4 is a schematic structural diagram of the symmetrical flexible supporting mechanism of the present invention.

Fig. 5 is a schematic structural diagram of a scanning system base in the present invention.

Fig. 6a to 6d are schematic structural diagrams of a first boom, a second boom, a third boom and a fourth boom, respectively, according to the present invention.

Fig. 7 is a schematic view of the structure of a rounded straight beam type flexible hinge according to the present invention.

Fig. 8 is a schematic structural view of the moving mirror driving unit of the present invention.

Fig. 9 is a schematic diagram of the movement principle of the symmetrical flexible supporting mechanism in the invention.

Description of reference numerals:

1-moving mirror;

2-a symmetrical flexible support mechanism;

21-a first boom; 211-a first linker; 212-a second connector; 213-a first compensation body; 214-a second compensation body; 215-first intermediate;

22-a second boom; 221-a third linker; 222-a fourth connector; 223-a third compensation body; 224-a fourth compensator; 225-a second intermediate;

23-a third boom; 231-a fifth linker; 232-a sixth linker; 233-a fifth compensator; 234-a sixth compensator; 235-a third intermediate;

24-a fourth boom; 241-a seventh linker; 242 — an eighth linker; 243-seventh compensation body; 244-eighth compensator; 245-a fourth intermediate;

25-a first fixation; 26-a second fixation body; 27-a motile;

3-a linear motor base;

4-scanning system base; 41-connecting hole; 42-connecting hole;

5-a linear motor; 51-a stator; 52-mover.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

As shown in fig. 2 and 3, the movable mirror scanning system of the interference spectrometer provided by the invention comprises a movable mirror 1, a fixed mirror, a laser, a beam splitter, a movable mirror motion feedback unit, a movable mirror motion control unit, a symmetrical flexible supporting mechanism, a movable mirror motion driving unit and a scanning system base 4.

The laser is used for providing a stable light source and generating a position detection interference signal for the scanning system. Laser output by the laser is divided into two beams of light by a beam splitter, the two beams of light respectively reach a movable mirror and a fixed mirror, the two beams of light are reflected by the movable mirror and the fixed mirror to return to the original path, and the two beams of light interfere with each other after passing through the beam splitter to obtain a position detection interference signal;

the moving mirror motion feedback unit comprises a sensor and a sensing circuit; the sensor is used for detecting and collecting position detection interference signals; the sensing circuit is used for carrying out photoelectric conversion and signal processing on position detection interference signals detected and collected by the sensor to generate interference pulses, and the interference pulses are used as position feedback signals of the movable mirror;

the moving mirror motion control unit comprises a feedback signal capturing module and a feedback signal calculating module. The feedback signal capturing module is used for capturing a movable mirror position feedback signal generated by the movable mirror motion feedback unit, the feedback signal calculating module utilizes the upper computer to control and process the movable mirror position feedback signal (traditional PID control, robust control, self-adaptive control or latest intelligent control and the like can be adopted), closed-loop control of the movable mirror 1 is realized, and a control signal used for controlling the magnitude and the direction of the driving force generated by the movable mirror driving unit is generated so as to ensure the speed stability of the movable mirror.

The symmetrical flexible supporting mechanism 2 is used for supporting the movable mirror 1.

The moving mirror motion driving unit comprises a linear motor 5 and a linear motor base 3. The linear motor base 3 is used for supporting a linear motor 5, and the linear motor 5 drives the movable mirror 1 to reciprocate along the light path direction according to a control signal output by the movable mirror motion control unit; the scanning system base 4 is used for fixing the whole interference spectrometer moving mirror scanning system on an interferometer bottom plate, and is used for fixedly supporting the symmetrical flexible supporting mechanism 2 and the moving mirror driving unit; the upper part of the scanning system base 4 is provided with a first connecting hole 41, and the lower part is provided with a second connecting hole 42; the first connection hole 41 is used for connecting and fixing the symmetrical flexible supporting mechanism 2 and the movable mirror driving unit; the second connection hole 42 is used to enable connection with the interferometer.

As shown in fig. 3, 4 and 5, the symmetrical flexible supporting mechanism 2 is mounted on the scanning system base 4 through a connecting hole 41, and the symmetrical flexible supporting mechanism 2 includes a first movable arm 21, a second movable arm 22, a third movable arm 23, a fourth movable arm 24, a first fixed body 25, a second fixed body 26 and a moving body 27;

the first fixed body 25, the moving body 27 and the second fixed body 26 are distributed in sequence along an optical axis, and the geometric centers of the three are all positioned on the optical axis; the first fixed body 25 and the second fixed body 26 are symmetrical with respect to the moving body 27;

the first boom 21, the second boom 22, the third boom 23, and the fourth boom 24 are arranged in a space in a central symmetry manner with respect to the moving body 27, wherein the first boom 21 and the third boom 23 are distributed at 180 degrees, and the second boom 22 and the fourth boom 24 are distributed at 180 degrees;

the first boom 21, the second boom 22, the third boom 23, and the fourth boom 24 are identical in structure and size.

As shown in fig. 6a, the first boom 21 includes a first connecting body 211, a second connecting body 212, a first compensating body 213, a second compensating body 214, and a first intermediate body 215; the first middle body 215 is long, the first connecting body 211 and the second connecting body 212 are symmetrically arranged in the middle of the first middle body 215, and the first compensating body 213 and the second compensating body 214 are symmetrically arranged at two ends of the first middle body 215; the distance between the first compensation body (213) and the first connecting body (211) is equal to the distance between the second connecting body (212) and the second compensation body (214), and the specific distance can be designed according to actual requirements; the lengths of the first compensation body (213) and the second compensation body (214) are equal, and the specific distance can be designed according to actual requirements; the first connecting body (211) and the second connecting body (212) are equal in length, and the specific distance can be designed according to actual requirements.

As shown in fig. 6b, the second boom 22 includes a third connection body 221, a fourth connection body 222, a third compensation body 223, a fourth compensation body 224 and a second middle body 225; the second middle body 225 is elongated, the third connecting body 221 and the fourth connecting body 222 are symmetrically disposed at the middle portion of the second middle body 225, and the third compensating body 223 and the fourth compensating body 224 are symmetrically disposed at both end portions of the second middle body 225.

As shown in fig. 6c, the third boom 23 includes a fifth connecting body 231, a sixth connecting body 232, a fifth compensating body 233, a sixth compensating body 234, and a third intermediate body 235; the third middle body 235 is elongated, the fifth connecting body 231 and the sixth connecting body 232 are symmetrically disposed at the middle of the third middle body 235, and the fifth compensating body 233 and the sixth compensating body 234 are symmetrically disposed at both ends of the third middle body 235.

As shown in fig. 6d, the fourth boom 24 includes a seventh connecting body 241, an eighth connecting body 242, a seventh compensating body 243, an eighth compensating body 244 and a fourth intermediate body 245; the fourth intermediate body 245 is long, the seventh connecting body 241 and the eighth connecting body 242 are symmetrically disposed at the middle portion of the fourth intermediate body 245, and the seventh compensating body 243 and the eighth compensating body 244 are symmetrically disposed at the two end portions of the fourth intermediate body 245.

The moving body 27 is connected to the first boom 21, the second boom 22, the third boom 23, and the fourth boom 24 through the first connecting body 211, the second connecting body 212, the third connecting body 221, the fourth connecting body 222, the fifth connecting body 231, the sixth connecting body 232, the seventh connecting body 241, and the eighth connecting body 242, respectively;

the first fixed body 25 is connected with the first movable arm 21, the second movable arm 22, the third movable arm 23 and the fourth movable arm 24 through the first compensating body 213, the third compensating body 223, the fifth compensating body 233 and the seventh compensating body 243;

the second fixed body 25 is connected to the first movable arm 21, the second movable arm 22, the third movable arm 23 and the fourth movable arm 24 through the second compensator 214, the fourth compensator 224, the sixth compensator 234 and the eighth compensator 244, respectively;

the first connecting body 211, the second connecting body 212, and the first intermediate body 215 of the first boom 21 form a first parallelogram, and the first compensating body 213, the second compensating body 214, and the first intermediate body 215 form a second parallelogram; the first parallelogram and the second parallelogram are nested with each other. The second boom 22-the fourth boom 24 have the same structure as the first boom 21, and are not described in detail herein.

All the connecting bodies and the compensating bodies on the first movable arm 21, the second movable arm 22, the third movable arm 23 and the fourth movable arm 24 are flexible hinges, and as shown in fig. 7, the first connecting body 211, the second connecting body 212, the first compensating body 213 and the second compensating body 214 included in the first movable arm 21 all adopt a rounded straight beam type flexible hinge. All connecting bodies and compensating bodies contained in the second movable arm 22, the third movable arm 23 and the fourth movable arm 24 adopt fillet straight beam type flexible hinges.

The symmetrical flexible supporting mechanism 2 is an integral structure, and the whole mechanism including the flexible hinge is processed by a whole block of metal material with better elasticity (such as beryllium bronze, tin bronze, silicon bronze or carbon spring steel). The non-flexible hinge part is processed by adopting the traditional mechanical milling process, so that the processing cost is saved, and the influence of residual stress on the structure precision can be effectively reduced by removing stress after the processing is finished; the flexible hinge part is processed by adopting an electric spark cutting process or other high-precision processing processes (such as a slow wire cutting process), and the flexible hinges are all fillet straight beam type flexible hinges; under the condition that driving force is the same, the fillet straight beam type flexible hinge is easier to produce bigger corner offset, and simultaneously stress concentration can be better improved, and the service life of the mechanism is prolonged.

As shown in fig. 8, the moving mirror driving unit includes a linear motor 5 and a linear motor base 3, the linear motor 5 is fixedly installed at a connection hole 41 of the scanning system base 4 through the linear motor base 3; the linear motor 5 includes a stator 51 and a mover 52. The stator 51 consists of an outer yoke and a coil, and the stator 51 is fixed on the linear motor base 3; the mover 52 is composed of a permanent magnet and an inner yoke iron, the permanent magnet is connected with the displacement input end of the moving body 27 in the symmetrical flexible supporting mechanism 2; the moving mirror 1 is connected with the displacement output end of the support mechanism moving body 27. Applying a driving voltage to the coils of the stator 51 generates a magnetic field whose direction changes according to the direction of the current flowing through the coils, whose magnetic field strength changes according to the magnitude of the current flowing through the coils, and which interacts with the magnetic field (attraction or repulsion) generated by the permanent magnets of the mover 52. When the permanent magnet of the mover 52 and the coil of the stator 51 generate a magnetic force, the mover 1 is pushed to reciprocate in the optical path direction.

As shown in fig. 9, the 1/4 part of the symmetrical flexible supporting mechanism 2 is taken as an example to illustrate the operation principle of the symmetrical flexible supporting mechanism 2.

In an initial state, the compensation body and the connecting body on each movable arm are vertical to the corresponding intermediate body;

the linear motor 5 of the moving mirror driving unit in the interference spectrometer moving mirror scanning system drives the moving body 27 of the symmetrical flexible supporting mechanism 2 to move according to the output instruction of the moving mirror motion control unit, the motion of the moving body 27 is transmitted to the first connecting body 211 and the second connecting body 212 of the first movable arm 21, and the first connecting body 211 and the second connecting body 212 of the first movable arm 21 both generate rotation with an angle beta;

then, the movement of the first connecting body 211 and the second connecting body 212 of the first arm 21 is transmitted to the intermediate body 215 of the first arm 21, and at this time, the intermediate body 215 of the first arm 21 generates a displacement dz along the direction parallel to the optical axis, and simultaneously moves to the moving body 27 side to generate a side displacement dx;

the movement of the intermediate body 215 of the first boom 21 is transmitted to the first compensation body 213 and the second compensation body 214 of the first boom 21, the first compensation body 213 and the second compensation body 214 of the first boom 1 both rotate by an angle α, and the moving mirror 1 moves by a distance L along the optical path direction during the movement.

With regard to the overall structure of the symmetrical flexible support mechanism 2, since the first boom 21, the second boom 22, the third boom 23 and the fourth boom 24 have consistency in structure and the first boom 21, the second boom 22, the third boom 23 and the fourth boom 24 have symmetry in spatial position, the accuracy of the moving direction of the movable mirror 1 can be effectively ensured.