阅读说明：本技术 一种光学转移装置及多层微纳器件加工方法 (Optical transfer device and multilayer micro-nano device processing method ) 是由 史刚 吴超 陈千雪 张立源 于 2021-07-30 设计创作，主要内容包括：本发明涉及微纳加工技术领域,公开了一种光学转移装置及多层微纳器件加工方法,光学转移装置包括第一调节机构、第二调节机构和显微成像系统。第一调节机构中,第一位移平台能够对第一载物台进行可控、可量化的移动。第二调节机构中,第二位移平台能够对第二载物台进行可控、可量化的移动。因此,在第一调节机构和第二调节机构的作用下,第一样品和第二样品能够相互对齐,并且,在驱使第一载物台和第二载物台移动的过程中,通过显微成像系统实时显示第一样品的形貌,从而可视化地实现微区贴装,克服了当前转移装置参数无法量化和精细控制的缺点,减少人为因素的影响,从而提高效率和质量。(The invention relates to the technical field of micro-nano processing, and discloses an optical transfer device and a multilayer micro-nano device processing method. In the first adjusting mechanism, the first displacement platform can carry out controllable and quantifiable movement on the first object stage. In the second adjusting mechanism, the second displacement platform can carry out controllable and quantifiable movement on the second object stage. Therefore, under the action of the first adjusting mechanism and the second adjusting mechanism, the first sample and the second sample can be aligned with each other, and in the process of driving the first objective table and the second objective table to move, the appearance of the first sample is displayed in real time through the microscopic imaging system, so that micro-area mounting is visually realized, the defect that parameters of the current transfer device cannot be quantized and finely controlled is overcome, the influence of human factors is reduced, and the efficiency and the quality are improved.)

1. An optical transfer device, comprising:

the first adjusting mechanism comprises a first objective table and a first optical displacement platform, wherein the first objective table is used for fixing a first sample to be pasted, and the first optical displacement platform is connected to the first objective table and used for moving the first objective table so as to adjust the position of the first sample;

a microscopic imaging system comprising a microscope alignable with the first sample on the first stage and an imaging module for imaging visualization of the microscope;

the second adjusting mechanism comprises a second objective table and a second optical displacement platform, the second objective table comprises a piezoelectric ceramic displacement table and a fixing component, and the fixing component is connected to the piezoelectric ceramic displacement table and used for fixing a second sample to be pasted; the piezoceramic displacement stage is connected to the second optical displacement stage, and the second optical displacement is used for moving the piezoceramic displacement stage so that a second sample is positioned between the microscope and the first object stage.

2. The optical transfer device of claim 1, wherein the first stage comprises a heat block coupled to the first optical translation stage, the heat block having a work surface thereon for carrying the first sample, the heat block for heating the first sample on the work surface.

3. The optical transfer device of claim 2, wherein the first stage further comprises a rotary stage, the heating stage being coupled to the rotary stage, the rotary stage being coupled to the first optical displacement stage for rotating the heating stage.

4. The optical transfer device of claim 2, further comprising a thermostat, wherein a heating element is disposed within the heating stage, the heating element being electrically connected to the thermostat.

5. The optical transfer device of claim 1 wherein the first optical displacement stage is a three-axis displacement stage capable of moving the first stage in three directions X, Y, Z.

6. The optical transfer device of claim 1 wherein the second optical displacement stage is a three-axis displacement stage capable of moving the second stage in three directions X, Y, Z.

7. The optical transfer device of claim 1, wherein the fixing assembly comprises a connecting member, a fastening member, and a transparent carrier, the connecting member is connected to the piezo-ceramic displacement stage through the fastening member, one portion of the transparent carrier is clamped between the connecting member and the piezo-ceramic displacement stage, and the other portion is suspended outside the piezo-ceramic displacement stage.

8. The optical transfer device of any one of claims 1-7, further comprising a control system, the control system comprising:

a computer configured to: generating a first instruction for instructing the first optical displacement platform to move the first object stage in a first set mode, generating a second instruction for instructing the second optical displacement platform to move the second object stage in a second set mode, generating a third instruction for instructing the piezoelectric ceramic displacement platform to step in a third set mode, and receiving a signal of the imaging module and displaying the imaging visualization of the microscope;

a first motion controller coupled to the first optical displacement platform and configured to communicate with the computer and control operation of the first optical displacement platform to move the first stage in response to the first command;

the second motion controller is connected to the second optical displacement platform; the second optical displacement platform is configured to be in communication connection with the computer and control the second object stage to move in response to the second instruction;

the piezoelectric ceramic controller is connected to the piezoelectric ceramic displacement table; the piezoelectric ceramic displacement table is configured to be in communication connection with the computer and control stepping operation of the piezoelectric ceramic displacement table in response to the third instruction.

9. A multilayer micro-nano device processing method is applied to the optical transfer device of any one of claims 1 to 8 and is used for processing multilayer micro-nano devices, and the method comprises the following steps:

fixing a first sample on the first object stage, and fixing a second sample on the side, away from the microscope, of the fixing piece;

controlling the first optical displacement stage to drive the first stage to move to align the first sample with the microscope, and controlling the second optical displacement stage to drive the second stage to move to align the second sample with the first sample;

controlling the second optical displacement platform to drive the second object stage to drive the second sample to move to a set position towards the first sample on the first object stage, and controlling the piezoelectric ceramic displacement platform to drive the second sample to step towards the first sample in a set range so as to transfer the second sample to the first sample;

displaying the appearance of a first sample in real time through the imaging module in the process of driving the first object stage and the second object stage to move;

and circulating the steps to transfer the next sample to the first sample.

10. The method for processing the multilayer micro-nano device according to claim 9, wherein the first stage is configured to be connected to a rotating stage of the first optical displacement platform, and is configured to drive the first sample to rotate; after one transfer is completed, the area to be mounted is replaced by rotating the first sample, and the first stage is moved by the first optical displacement to adjust the position of the first sample.

Technical Field

The invention relates to the technical field of micro-nano processing, in particular to an optical transfer device and a multilayer micro-nano device processing method.

Background

As electronic components enter a nanoscale, the two-dimensional layered material has great advantages, the layered material heterojunction device has peculiar properties which are not possessed by a plurality of traditional devices, and specific device functions can be realized by designing a heterostructure, so that the development of the material functions is expanded, and the future electronic component field is positively influenced. At present, micro-area optical alignment equipment is needed for manufacturing the heterojunction device, however, the known optical transfer platform is composed of a manual optical table and a microscope, and alignment is realized through manual adjustment, so that process parameters cannot be quantized and refined in the device manufacturing process, high failure rate can be caused by human error factors, and the requirement for efficiently manufacturing the device cannot be met.

Disclosure of Invention

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides an optical transfer device which can carry out quantifiable moving operation on a sample to be pasted and reduce the influence of human factors, thereby improving the efficiency and the quality.

The invention also provides a multilayer micro-nano device processing method applied to the optical transfer device.

An embodiment of the first aspect of the present invention provides an optical transfer device, including:

the first adjusting mechanism comprises a first objective table and a first optical displacement platform, wherein the first objective table is used for fixing a first sample to be pasted, and the first optical displacement platform is connected to the first objective table and used for moving the first objective table so as to adjust the position of the first sample;

a microscopic imaging system comprising a microscope alignable with the first sample on the first stage and an imaging module for imaging visualization of the microscope;

the second adjusting mechanism comprises a second objective table and a second optical displacement platform, the second objective table comprises a piezoelectric ceramic displacement table and a fixing component, and the fixing component is connected to the piezoelectric ceramic displacement table and used for fixing a second sample to be pasted; the piezoceramic displacement stage is connected to the second optical displacement stage, and the second optical displacement is used for moving the piezoceramic displacement stage so that a second sample is positioned between the microscope and the first object stage.

The optical transfer device of the embodiment of the invention at least has the following beneficial effects: first displacement platform can carry out controllable, the removal of quantifiable to first objective table, second displacement platform can carry out controllable, the removal of quantifiable to the second objective table, therefore, under first adjustment mechanism and second adjustment mechanism's effect, first sample and second sample can align each other, and, in the in-process of ordering about first objective table and second objective table removal, show the appearance of first sample in real time through imaging module, thereby realize the micro-district subsides dress visually, overcome the unable quantization of current transfer device parameter and the shortcoming of meticulous control, reduce the influence of human factor, thereby efficiency and quality are improved.

According to some embodiments of the invention, the first stage comprises a heating stage coupled to the first optical displacement stage, the heating stage having a work surface thereon for carrying the first sample, the heating stage being for heating the first sample on the work surface.

According to some embodiments of the invention, the first stage further comprises a rotary stage, the heating stage is connected to the rotary stage, and the rotary stage is connected to the first optical displacement platform for rotating the heating stage.

According to some embodiments of the invention, the optical transfer device further comprises a temperature controller, wherein a heating element is arranged in the heating table, and the heating element is electrically connected to the temperature controller.

According to some embodiments of the present invention, the first optical displacement stage is a three-axis displacement stage capable of moving the first stage in three directions X, Y, Z.

According to some embodiments of the optical transfer device of the present invention, the second optical displacement stage is a three-axis displacement stage capable of moving the second stage in three directions X, Y, Z.

According to some embodiments of the optical transfer device of the present invention, the fixing assembly comprises a connecting member, a fastening member and a transparent carrier, the connecting member is connected to the piezoceramic displacement table through the fastening member, one part of the transparent carrier is clamped and fixed between the connecting member and the piezoceramic displacement table, and the other part of the transparent carrier is suspended outside the piezoceramic displacement table.

An optical transfer device according to some embodiments of the present invention, further comprising a control system, the control system comprising:

a computer configured to: generating a first instruction for instructing the first optical displacement platform to move the first object stage in a first set mode, generating a second instruction for instructing the second optical displacement platform to move the second object stage in a second set mode, generating a third instruction for instructing the piezoelectric ceramic displacement platform to step in a third set mode, and receiving a signal of the imaging module and displaying the imaging visualization of the microscope;

a first motion controller coupled to the first optical displacement platform and configured to communicate with the computer and control operation of the first optical displacement platform to move the first stage in response to the first command;

the second motion controller is connected to the second optical displacement platform; the second optical displacement platform is configured to be in communication connection with the computer and control the second object stage to move in response to the second instruction;

the piezoelectric ceramic controller is connected to the piezoelectric ceramic displacement table; the piezoelectric ceramic displacement table is configured to be in communication connection with the computer and control stepping operation of the piezoelectric ceramic displacement table in response to the third instruction.

The embodiment of the second aspect of the invention also provides a multilayer micro-nano device processing method, which is applied to the optical transfer device of the embodiment of the first aspect of the invention and used for processing the multilayer micro-nano device, and the method comprises the following steps:

fixing a first sample on the first object stage, and fixing a second sample on the side, away from the microscope, of the fixing piece;

controlling the first optical displacement stage to drive the first stage to move to align the first sample with the microscope, and controlling the second optical displacement stage to drive the second stage to move to align the second sample with the first sample;

controlling the second optical displacement platform to drive the second object stage to drive the second sample to move to a set position towards the first sample on the first object stage, and controlling the piezoelectric ceramic displacement platform to drive the second sample to step towards the first sample in a set range so as to transfer the second sample to the first sample;

displaying the appearance of a first sample in real time through the imaging module in the process of driving the first object stage and the second object stage to move;

and circulating the steps to transfer the next sample to the first sample.

According to the multilayer micro-nano device processing method provided by some embodiments of the invention, the first objective table is configured and connected to a rotating table of the first optical displacement platform and used for driving the first sample to rotate; after one transfer is completed, the area to be mounted is replaced by rotating the first sample, and the first stage is moved by the first optical displacement to adjust the position of the first sample.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic view of an optical transfer device according to an embodiment of the present invention;

FIG. 2 is a schematic view of a first X-direction translation stage;

fig. 3 is a schematic diagram of a control system portion module of an optical transfer apparatus according to an embodiment of the present invention.

Reference numerals:

a first adjusting mechanism 100, a first object stage 120, a heating stage 121, a temperature controller 122, a rotating stage 123, a first displacement platform 130, a first X-direction displacement platform 131, a first Y-direction displacement platform 132, a first Z-direction displacement platform 133, a stepping motor 134, a screw 135, a slider 136, a slide rail 137, and a first motion controller 140;

a second adjusting mechanism 200, a second object stage 210, a piezoceramic displacement stage 211, a connecting piece 212, a fastener 213, a transparent carrier 214, a second optical displacement stage 220, a second X-direction displacement stage 221, a second Y-direction displacement stage 222, a second Z-direction displacement stage 223, a connecting frame 224 and a supporting frame 225;

a second motion controller 230, a piezo ceramic controller 240;

a microscopic imaging system 300, a microscope 310;

a computer 400.

Detailed Description

The concept and technical effects of the present invention will be clearly and completely described below in conjunction with the embodiments to fully understand the objects, features and effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention.

In the description of the embodiments of the present invention, if an orientation description is referred to, for example, the orientations or positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", etc. are based on the orientations or positional relationships shown in the drawings, only for convenience of describing the present invention and simplifying the description, but not for indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

In the description of the embodiments of the present invention, if a feature is referred to as being "disposed", "fixed", "connected", or "mounted" to another feature, it may be directly disposed, fixed, or connected to the other feature or may be indirectly disposed, fixed, connected, or mounted to the other feature. In the description of the embodiments of the present invention, if "a number" is referred to, it means one or more, if "a plurality" is referred to, it means two or more, if "greater than", "less than" or "more than" is referred to, it is understood that the number is not included, and if "greater than", "lower" or "inner" is referred to, it is understood that the number is included. If reference is made to "first" or "second", this should be understood to distinguish between features and not to indicate or imply relative importance or to implicitly indicate the number of indicated features or to implicitly indicate the precedence of the indicated features.

Fig. 1 is a schematic diagram of an optical transfer device according to an embodiment of the present invention, and referring to fig. 1, a first aspect embodiment of the present invention provides an optical transfer device, which includes a first adjusting mechanism 100, a second adjusting mechanism 200, and a microscopic imaging system 300, where the first adjusting mechanism 100 is used for adjusting a position of a first sample, the second adjusting mechanism 200 is used for adjusting a position of a second sample, and transferring and mounting the second sample onto the first sample, and the microscopic imaging system 300 is used for visually displaying a topography of the first sample, so as to accurately mount the second sample. Wherein:

the first adjusting mechanism 100 includes a first stage 120 for fixing a first specimen to be mounted, and a first optical displacement stage connected to the first stage 120 for moving the first stage 120 to adjust a position of the first specimen.

The second adjusting mechanism 200 includes a second stage 210 and a second optical displacement platform 220, the second stage 210 includes a piezoelectric ceramic displacement stage 211 and a fixing component, the fixing component is connected to the piezoelectric ceramic displacement stage 211 and is used for fixing a second sample to be mounted; piezoceramic displacement stage 211 is coupled to second optical displacement stage 220 and the second optical displacement is used to move piezoceramic displacement stage 211 such that the second sample is positioned between microscope 310 and first stage 120. The piezoceramic displacement table 211 is driven by piezoceramics and can realize accurate stepping within a micro-nano scanning range, so that accurate and controllable fitting of a first sample and a second sample is realized.

The microscopic imaging system 300 includes a microscope 310 capable of aligning to the first specimen on the first stage 120 and an imaging module for visualizing an image of the microscope 310.

As can be seen from the above-described embodiment, the first stage 120 can be controllably and quantitatively moved by the first displacement stage 130, and the second stage 210 can be controllably and quantitatively moved by the second displacement stage, so that the first sample and the second sample can be aligned with each other by the first adjustment mechanism 100 and the second adjustment mechanism 200. In addition, in the process of driving the first stage 120 and the second stage 210 to move, the image module displays the morphology of the first sample in real time, so that the micro-area mounting is visually realized, the defect that the parameters of the current transfer device cannot be quantized and finely controlled is overcome, the influence of human factors is reduced, and the efficiency and the quality are improved.

In some embodiments, the first stage 120 includes a heating stage 121, the heating stage 121 is connected to the first optical displacement platform, the heating stage 121 has a working surface for carrying the first sample, and the heating stage 121 is configured to heat the first sample on the working surface to remove moisture and the like adsorbed on the surface of the first sample, so as not to affect the integrity of the package. The specific heating temperature and duration can be reasonably configured according to actual requirements. In addition, a temperature controller can be arranged to regulate the stability of the heating table 121. For example, a heating member is provided in the heating stage 121, and the heating member is electrically connected to a thermostat. The heating member may be a conventional device capable of being electrically heated, such as a ceramic heating sheet, and is built in the heating stage 121 to heat the first sample on the work surface. The temperature controller is connected in the heating member in the electricity, can adopt the PID temperature controller commonly used for adjust the temperature of heating member, from this, can set up heating temperature and heat time, in order to satisfy the processing demand high-efficiently, help pasting the dress fast of sample.

In some embodiments, the first stage 120 further includes a rotating table 123, the heating table 121 is connected to the rotating table 123, and the rotating table 123 is connected to the first optical displacement platform, and a high-precision rotating table 123 commonly used in industrial production can be used to rotate the heating table 121, so that the first sample rotates with the heating table 121, and therefore, the mounting of the plurality of areas on the first sample can be achieved by rotating the first sample.

In the above embodiment, the first optical displacement stage is a three-axis displacement stage capable of moving the first stage 120 in three directions X, Y, Z. Wherein X, Y, Z the three directions are referenced by Cartesian rectangular coordinates. Specifically, the first optical displacement stage includes a first X-direction displacement stage 131, a first Y-direction displacement stage 132, and a first Z-direction displacement stage 133, and the first X-direction displacement stage 131 is connected to the first Y-direction displacement stage 132 and can drive the first Y-direction displacement stage 132 to move along the X-direction. The first Z-direction displacement stage 133 is connected to the first X-direction displacement stage 131, and can drive the first X-direction displacement stage 131 to move along the Z-direction. The first Y-direction displacement stage 132 is connected to the first stage 120 and can drive the first stage 120 to move along the Y-direction.

Fig. 2 is a schematic view of a first X-direction displacement table, referring to fig. 2 and fig. 1, wherein the first X-direction displacement table 131 includes a high resolution stepping motor 134, a lead screw 135, a slider 136 and a guide rail, wherein the high resolution stepping motor 134 is used for driving the lead screw 135 to rotate, the slider 136 is screwed on the lead screw 135 and is slidably connected to the slide rail 137, the extending directions of the slide rail 137 and the lead screw 135 are both along the X direction, and the first X-direction displacement table 131 may be directly connected to a bottom surface or a working table, or may be connected through a support frame 225. The first Y-direction displacement table 132 is connected to the slider 136 of the first X-direction displacement table 131, and the stepping motor 134 has the characteristics of accuracy and controllability and parameter metering, so that the high-resolution stepping motor 134 is adopted to drive the screw rod 135 to rotate so as to drive the slider 136 to move along the guide rail, thereby realizing the high-accuracy displacement control of the first X-direction displacement table 131 in the X direction. Similarly, the first Y-direction displacement stage 132 and the first Z-direction displacement stage 133 may also have the same structure as the first X-direction displacement stage 131, that is, respectively include the high-resolution stepping motor 134, the lead screw 135, the slider 136, and the guide rail, the lead screw 135 and the guide rail of the first Y-direction displacement stage 132 are disposed to extend in the Y direction, and the first Z-direction displacement stage 133 is connected to the slider 136 of the first Y-direction displacement stage 132, so as to implement the high-precision displacement control of the first Z-direction displacement stage 133 in the Y direction. The lead screw 135 and the guide rail of the first Z-direction displacement stage 133 are extended in the Z-direction, and the first stage 120 is connected to the slider 136 of the first Z-direction displacement stage 133, thereby realizing high-precision displacement control of the first stage in the Y-direction. Therefore, the movement of the first stage 120 in the three directions X, Y, Z can be accurately controlled by the displacement control of the first X-direction displacement stage 131, the first Y-direction displacement stage 132, and the first Z-direction displacement stage 133. The first stage 120 on which the rotary stage 123 is disposed may rotate the first sample in the Z direction.

In the above embodiment, the second optical stage 220 is a three-axis stage capable of moving the second stage 210 along X, Y, Z, wherein X, Y, Z is referenced to a cartesian coordinate system. Similar to the second optical displacement stage 220, the second optical displacement stage 220 includes a second X-direction displacement stage 221, a second Y-direction displacement stage 222 and a second Z-direction displacement stage 223, and the second X-direction displacement stage 221 is connected to the second Y-direction displacement stage 222 and can drive the second Y-direction displacement stage 222 to move along the X direction. The second Y-direction displacement stage 222 is connected to the second Z-direction displacement stage 223 and can drive the second Z-direction displacement stage 223 to move along the Y-direction. The second Z-direction displacement stage 223 is connected to the second stage 210 and can drive the second stage 210 to move along the Z-direction. The second stage 210 may be connected to the second Z-direction displacement stage 223 by a connection frame 224, so that the connection stability of the second stage 210 is ensured.

Similarly, can refer to fig. 2 and the above-mentioned setting of first X direction displacement platform 131, second X direction displacement platform 221 includes high-resolution step motor, the lead screw, slider and guide rail, wherein, high-resolution step motor is used for driving the lead screw to rotate, the slider connects in the lead screw soon, and sliding connection is in the slide rail, the extending direction of slide rail and lead screw all follows the X direction, second Y direction displacement platform 222 connects in the slider of second X direction displacement platform 221, step motor has the characteristics that accurate controllable and parameter can be measured, therefore, adopt high-resolution step motor to drive the lead screw rotation and can drive the slider and remove along the guide rail, thereby realize the high accuracy displacement control of second X direction displacement platform 221 in the X direction. Similarly, the second Y-direction displacement stage 222 and the second Z-direction displacement stage 223 may also have the same structure as the second X-direction displacement stage 221, that is, include a high-resolution stepping motor, a lead screw, a slider, and a guide rail, respectively, the lead screw and the guide rail of the second Y-direction displacement stage 222 are disposed in the Y-direction in an extending manner, and the second Z-direction displacement stage 223 is connected to the slider of the second Y-direction displacement stage 222, so as to realize the high-precision displacement control of the second Z-direction displacement stage 223 in the Y-direction. The lead screw and the guide rail of the second Z-direction displacement stage 223 extend along the Z-direction, and the second stage 210 is connected to the slider of the second Z-direction displacement stage 223, thereby realizing high-precision displacement control of the second stage in the Y-direction. Therefore, the movement of the second stage 210 in the three directions X, Y, Z can be accurately controlled by the displacement control of the second X-direction displacement stage 221, the second Y-direction displacement stage 222, and the second Z-direction displacement stage 223.

In some embodiments, the fixing assembly comprises a connector 212, a fastener 213 and a transparent carrier 214, the connector 212 is connected to the piezoceramic displacement stage 211 through the fastener 213, one part of the transparent carrier 214 is clamped between the connector 212 and the piezoceramic displacement stage 211, and the other part is suspended outside the piezoceramic displacement stage 211 for attaching the second sample. Therefore, when the second stage 210 is moved to a set position corresponding to the first stage 120 by the second displacement platform, the second sample on the transparent carrier 214 can be attached to the first sample on the first stage 120, and the second sample on the transparent carrier 214 can be attached to the first sample on the first stage 120 in an accurately controllable manner through the piezoceramic displacement platform 211. The fastening member 213 may be a screw, the connecting member 212 may be a plate-shaped structure, and a connection hole is formed through the connecting member 212, the screw passes through the connection hole and is screwed to the piezoceramic displacement table 211, so that the fixed connection of the connecting member 212 can be realized, the transparent carrier 214 can be detachably clamped and fixed between the connecting member 212 and the piezoceramic displacement table 211, and the transparent carrier 214 can be detached by loosening the screw. The transparent carrier 214 is made of a transparent material, and may be a glass plate, for example, so that the microscope 310 can show the appearance of the first sample on the heating stage 121 through the transparent carrier 214. The microscope 310 employs a tele-optical microscope 310, which can be adapted for use in the present apparatus for focusing on the side of the transparent carrier 214 facing away from the first sample.

Fig. 3 is a schematic diagram of a part of modules of a control system of an optical transfer apparatus according to an embodiment of the present invention, referring to fig. 1 to 3, the optical transfer apparatus according to an embodiment of the present invention further includes a control system for controlling operations such as displacement and attachment of the first sample and the second sample, in this embodiment, the control system includes a computer 400 and a first motion controller 140, a second motion controller 230, and a piezoelectric ceramic controller 240 communicatively connected to the computer 400, wherein:

the computer 400 is configured to: generating a first command instructing the first optical displacement stage to move the first object stage 120 in a first set manner, generating a second command instructing the second optical displacement stage 220 to move the second object stage 210 in a second set manner, generating a third command instructing the piezoceramic displacement stage 211 to step in a third set manner, and receiving the signal from the imaging module and displaying the image of the microscope 310 in a visual manner.

The first motion controller 140 is connected to the first optical displacement stage, and the first motion controller 140 is in communication with the computer 400 and controls the first optical displacement stage to move the first object stage 120 in response to a first command;

the second motion controller 230 is connected to the second optical displacement stage 220; configured to be in communication with the computer 400 and to control the operation of the second optical stage 210 by the second optical displacement stage 220 in response to the second instruction;

piezoelectric ceramic controller 240 is connected to piezoelectric ceramic displacement stage 211; is configured to be communicatively coupled to the computer 400 and to control the stepping operation of the piezo ceramic displacement stage 211 in response to a third command.

In the above embodiment, the computer 400 is equipped with a programmable logic controller commonly used in industrial control applications, that is, can realize signal transmission with the first motion controller 140, the second motion controller 230, and the piezoelectric ceramic controller 240, the programmable logic controller adopts a programmable memory, and stores therein instructions for executing operations such as logic operation, sequence control, timing, counting, and arithmetic operation, and controls various types of mechanical devices or production processes through digital or analog input and output, and is a digital operation electronic system widely used in industrial environments. Therefore, by the precise control of the first optical moving stage, the second optical moving stage, and the piezo ceramic controller 240, the precise movement of the first stage 120 and the second stage 210 can be realized to realize the transfer mounting of the sample. Moreover, the whole transfer process can be completed under the operation of the computer 400, and the computer 400 can also display the whole laminating process in real time, so that the quantification of the process parameters is controllable and fine, and the interference of human factors is small. The optical transfer device provided by the embodiment of the invention can be used for efficiently constructing the layered material heterojunction device with high interface quality.

An embodiment of a second aspect of the present invention further provides a processing method of a multilayer micro-nano device, which is applied to an optical transfer apparatus according to an embodiment of the first aspect of the present invention, and is used for processing the multilayer micro-nano device, with reference to fig. 1 to 3, and the optical transfer apparatus according to the above embodiment, and the processing method includes the following steps:

securing a first sample to the first stage 120 and a second sample to a side of the fixture facing away from the microscope 310;

controlling the first optical displacement stage to move the first stage 120 to align the first sample with the microscope 310, and controlling the second optical displacement stage 220 to move the second stage to align the second sample with the first sample;

controlling the second optical displacement stage 220 to drive the second stage 210 to drive the second sample to move to a set position toward the first sample on the first stage 120, and controlling the piezoceramic displacement stage 211 to drive the second sample to step toward the first sample within a set range, so as to transfer the second sample to the first sample; in the process of driving the first stage 120 and the second stage 210 to move, the topography of the first sample is displayed in real time through the imaging module, so that the visual operation of sample mounting is realized.

And (4) circulating the steps, transferring the next sample to the first sample, and obtaining the required multilayer micro-nano device.

In some embodiments of the method for processing a multi-layer micro-nano device, the first stage 120 is configured to be connected to the rotating stage 123 of the first optical displacement platform, and is configured to drive the first sample to rotate; after one transfer is completed, the area to be mounted is replaced by rotating the first sample, and the first stage 120 is moved by the first optical level to adjust the position of the first sample.

In the multilayer micro-nano device processing method of some embodiments, the PID temperature controller 122 is used to control the temperature of the heating table 121 in real time, so as to realize the precise and quantitative control of the heating temperature of the first sample, thereby efficiently meeting the processing requirements and facilitating the rapid mounting of the sample.

In the multilayer micro-nano device processing method of the embodiment, the digital control of each step is realized through the control system, the process parameter quantization is controllable and fine, and the interference of human factors is small.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention. Furthermore, the embodiments of the present invention and the features of the embodiments may be combined with each other without conflict.