阅读说明：本技术 等离子辅助氧化处理装置及其用途 (Plasma-assisted oxidation treatment device and use thereof ) 是由 单广斌 黄贤滨 李贵军 屈定荣 于 2018-09-03 设计创作，主要内容包括：本发明涉及一种等离子辅助氧化处理装置及其用途,主要解决现有技术中工艺复杂、对处理件要求高、处理过程中产生大量废液不环保、处理过程中易引入杂质等问题。本发明通过采用一种等离子辅助氧化处理装置,包括气源、氧化气源、加热器、高温氧化气输送管、等离子发生器、连接管、等离子喷头、氧化气喷头、传送器,红外测温器,气源与等离子发生器一端相连,等离子发生器通过连接管与等离子喷头相连,氧化气源与加热器一端相连,加热器通过高温氧化气输送管与氧化气喷头相连,等离子喷头、氧化气喷头均为对喷布置,喷头出口方向设有传送器,待处理样品位于传送器上的技术方案较好地解决了上述问题,可用于各行业的不锈钢器件的表面氧化处理。(The invention relates to a plasma auxiliary oxidation treatment device and application thereof, and mainly solves the problems that the prior art is complex in process, high in requirement on treatment parts, environment-friendly due to the fact that a large amount of waste liquid is generated in the treatment process, impurities are easy to introduce in the treatment process and the like. The invention adopts a plasma auxiliary oxidation treatment device, which comprises a gas source, an oxidation gas source, a heater, a high-temperature oxidation gas conveying pipe, a plasma generator, a connecting pipe, a plasma spray head, an oxidation gas spray head, a conveyor and an infrared temperature measurer, wherein the gas source is connected with one end of the plasma generator, the plasma generator is connected with the plasma spray head through the connecting pipe, the oxidation gas source is connected with one end of the heater, the heater is connected with the oxidation gas spray head through the high-temperature oxidation gas conveying pipe, the plasma spray head and the oxidation gas spray head are arranged in a spraying mode, the conveyor is arranged in the outlet direction of the spray head, and a sample to be treated is positioned on the conveyor.)

1. The utility model provides a supplementary oxidation treatment device of plasma, including the air supply, the oxidation air supply, the heater, high temperature oxidation gas conveyer pipe, plasma generator, the connecting pipe, plasma shower nozzle, oxidation gas shower nozzle, the conveyer, infrared thermoscope, the air supply links to each other with plasma generator one end, plasma generator passes through the connecting pipe and links to each other with plasma shower nozzle, the oxidation air supply links to each other with heater one end, the heater passes through high temperature oxidation gas conveyer pipe and links to each other with oxidation gas shower nozzle, plasma shower nozzle, oxidation gas shower nozzle are the opposite spray arrangement, the shower nozzle exit direction is equipped with the conveyer, the sample of treating is located the conveyer.

2. The plasma-assisted oxidation treatment apparatus according to claim 1, wherein the plasma shower head and the oxidation gas shower head are arranged in parallel above the conveyor, and an infrared temperature detector is provided between the plasma shower head and the oxidation gas shower head.

3. The plasma-assisted oxidation treatment apparatus according to claim 1, wherein the height of the plasma flame is adjusted by adjusting the flow rate of the gas source and replacing a different plasma torch.

4. The plasma-assisted oxidation treatment apparatus according to claim 1, wherein the treatment and preheating degree are adjusted by adjusting the distance between the plasma shower head and the sample, and the oxidation temperature is controlled by the heater.

5. The plasma-assisted oxidation treatment apparatus according to claim 2, wherein the temperature measurement and feedback of the treatment surface are realized by an infrared temperature detector.

6. The plasma-assisted oxidation treatment apparatus according to claim 1, wherein the control of the treatment time is effected by adjusting the speed of the conveyor.

7. The plasma-assisted oxidation treatment device according to claim 1, wherein the gas source supplies gas to the plasma generator to generate plasma flow, the plasma flow passes through the connecting pipe and the plasma nozzle sequentially, the plasma flows through the nozzle to treat the upper and lower surfaces of the sample to be treated, so as to clean, activate and preheat the surface, the gas of the oxidation gas source is heated to a set temperature by the heater and then is sprayed out by the oxidation gas nozzle, and the sample to be treated after plasma treatment is oxidized by the oxidation gas nozzle under the transmission of the conveyor.

8. The plasma-assisted oxidation treatment apparatus according to claim 1, wherein the number of the plasma jet heads is at least two, and the number of the oxidizing gas jet heads is at least two.

9. The plasma-assisted oxidation treatment apparatus according to claim 1, wherein the flow rate of each plasma shower head is the same, and the flow rate of each oxidation gas shower head is the same.

10. Use of a plasma assisted oxidation treatment apparatus as claimed in claims 1 to 9 in the passivation of stainless steel.

Technical Field

The invention relates to a plasma auxiliary oxidation treatment device and application thereof.

Background

The corrosion resistance of stainless steel depends on the formation of a dense oxide film on the surface, and in order to exert the corrosion resistance of stainless steel, passivation treatment is generally required, and conventional passivation treatment methods such as: dipping, brushing, paste forming, spraying, electrochemistry and the like, the working procedures are more complicated, the cost is higher, a large amount of waste liquid is generated by pickling and passivation, and the method is not environment-friendly. Moreover, the sample with large volume and complex shape is difficult to process, and HF, dichromate and other impurities can be introduced in the process. The invention provides a plasma auxiliary oxidation treatment device which is simple and convenient to treat, low in cost, environment-friendly and excellent in effect.

The surface plasma oxidation treatment method of the CN201410077076.4 coated stainless steel plate and the coated stainless steel bipolar plate mainly adopt a vacuum sample chamber to introduce 700-900V bias voltage to ionize oxygen into plasma, and treat the surface film of the coated stainless steel to form an oxygen-enriched surface, which is mainly used for proton exchange membrane fuel cells.

CN200880011183.X plasma oxidation treatment method and plasma treatment device, the application field is semiconductor manufacturing, mainly adopt high frequency bias to form plasma under the vacuum condition, realize oxidation treatment and obtain the silicon oxide film.

Disclosure of Invention

One of the technical problems to be solved by the invention is the problems of complex process, high requirement on a treated part, no environmental protection of a large amount of waste liquid generated in the treatment process and easy introduction of impurities in the treatment process in the prior art, and the invention provides a novel plasma auxiliary oxidation treatment device which has the advantages of simple process, low requirement on the treated part and good treatment effect. The second technical problem to be solved by the present invention is to provide an application of the plasma assisted oxidation processing apparatus corresponding to the first technical problem to be solved.

In order to solve one of the problems, the technical scheme adopted by the invention is as follows: the utility model provides a supplementary oxidation treatment device of plasma, including the air supply, the oxidation air supply, the heater, high temperature oxidation gas conveyer pipe, plasma generator, the connecting pipe, plasma shower nozzle, oxidation gas shower nozzle, the conveyer, infrared thermoscope, the air supply links to each other with plasma generator one end, plasma generator passes through the connecting pipe and links to each other with plasma shower nozzle, the oxidation air supply links to each other with heater one end, the heater passes through high temperature oxidation gas conveyer pipe and links to each other with oxidation gas shower nozzle, plasma shower nozzle, oxidation gas shower nozzle are the opposite spray arrangement, the shower nozzle exit direction is equipped with the conveyer, the sample of treating is located the conveyer.

In the above technical solution, preferably, the plasma shower nozzle and the oxidizing gas shower nozzle above the conveyor are arranged in parallel, and an infrared temperature detector is arranged between the plasma shower nozzle and the oxidizing gas shower nozzle.

In the above technical solution, preferably, the height adjustment of the plasma flame is realized by adjusting the flow rate of the gas source and replacing different plasma nozzles.

In the above technical solution, preferably, the distance between the plasma nozzle and the sample is adjusted to achieve the adjustment of the treatment and preheating degrees, and the oxidation temperature is controlled by the heater.

In the above technical scheme, preferably, the processing surface temperature measurement and feedback are realized through an infrared temperature detector.

In the above technical solution, preferably, the control of the processing time is realized by adjusting a speed of the conveyor.

In the above technical solution, preferably, the gas source provides gas to the plasma generator to generate plasma flow, the plasma flow sequentially passes through the connecting pipe and the plasma nozzle, the plasma flow passes through the nozzle to treat the upper and lower surfaces of the sample to be treated, so as to clean, activate and preheat the surface, the gas of the oxidizing gas source is heated to a set temperature by the heater and then sprayed out by the oxidizing gas nozzle, and the sample to be treated after plasma treatment is oxidized by the oxidizing gas nozzle under the transmission of the conveyor.

In the above technical solution, preferably, there are at least two plasma spray heads, and at least two oxidizing gas spray heads.

In the above technical solution, preferably, each plasma spray head has the same flow rate, and each oxidizing gas spray head has the same flow rate.

In order to solve the second problem, the invention adopts the following technical scheme: the plasma-assisted oxidation treatment device is applied to the passivation treatment of stainless steel.

By adopting the device, the plasma generator is utilized to generate plasma, the surface of a sample to be treated is cleaned, activated and preheated through plasma beam current, and then the sample which is just subjected to plasma treatment is subjected to controlled oxidation treatment through high-temperature oxidation gas, so that a uniform oxidation film is formed on the surface of stainless steel. The device can omit the link of deoiling rust cleaning, and need not passivation liquid/cream, and easy and simple to handle, low cost, temperature is adjustable, and is low to test piece shape requirement, can handle irregular and big sample, handles evenly, and the effect is good, has improved corrosion resisting property, has obtained better technological effect.

Drawings

FIG. 1 is a schematic flow diagram of the apparatus of the present invention.

In the figure 1, a gas source, 2, a plasma generator, 3, a connecting pipe, 4, a plasma spray head, 5, an oxidizing gas spray head, 6, an oxidizing gas source, 7, a heater, 8, a high-temperature oxidizing gas conveying pipe, 9, a to-be-processed sample, 10, a conveyer and 11, an infrared temperature measurer.

FIG. 2 shows a comparison between stainless steel 022Cr19Ni10 and stainless steel before and after plasma-assisted oxidation treatment (left untreated, right oxidation treatment);

FIG. 3 shows the self-etching potential before and after plasma-assisted oxidation treatment of 022Cr19Ni10 stainless steel;

FIG. 4 is a comparison of 022Cr17Ni12Mo2 stainless steel before and after plasma assisted oxidation treatment (left oxidation treatment, right untreated);

FIG. 5 shows the change in corrosion rate before and after plasma assisted oxidation treatment of 022Cr17Ni12Mo2 stainless steel.

The present invention will be further illustrated by the following examples, but is not limited to these examples.

Detailed Description

[ example 1 ]

A plasma auxiliary oxidation treatment device is shown in figure 1 and comprises a gas source, an oxidation gas source, a heater, a high-temperature oxidation gas conveying pipe, a plasma generator, a connecting pipe, a plasma spray head, an oxidation gas spray head, a conveyor and an infrared temperature measurer, wherein the gas source is connected with one end of the plasma generator, the plasma generator is connected with the plasma spray head through the connecting pipe, the oxidation gas source is connected with one end of the heater, the heater is connected with the oxidation gas spray head through the high-temperature oxidation gas conveying pipe, the plasma spray head and the oxidation gas spray head are arranged in a counter-spraying mode, the conveyor is arranged in the outlet direction of the spray head, and a sample to be treated is located on. The flow rate of each plasma spray head is the same, and the flow rate of each oxidizing gas spray head is the same. The number of the plasma spray heads is two, and the number of the oxidizing gas spray heads is two.

The gas of the oxidizing gas source is heated to a set temperature by the heater and then sprayed out by the oxidizing gas spray head, and the sample to be processed after plasma processing is subjected to oxidation processing by the oxidizing gas spray head under the transmission of the conveyer.

The plasma spray head and the oxidizing gas spray head above the conveyor are arranged in parallel, and an infrared temperature detector is arranged between the plasma spray head and the oxidizing gas spray head. The height of the plasma flame is adjusted by adjusting the flow of the gas source and replacing different plasma nozzles. The distance between the plasma nozzle and the sample is adjusted to realize the adjustment of treatment and preheating degree, and the oxidation temperature is controlled by the heater. And the measurement and feedback of the temperature of the processing surface are realized through an infrared temperature detector. Control of the processing time is achieved by adjusting the conveyor speed.

[ example 2 ]

The apparatus was used for surface oxidation treatment of 022Cr19Ni10 stainless steel samples according to the conditions and procedures described in example 1, air was used as the air source 1, 20X 1mm was selected as the plasma nozzle 4, and 30X 4mm was selected as the oxidizing gas nozzle 5. The distance between the plasma spray head 4 and the upper and lower surfaces of the sample 9 is adjusted to be about 8mm, and the distance between the oxidizing gas spray head 5 and the upper and lower surfaces of the sample 9 is 15 mm. The surface temperature of the specimen was controlled at 230 ℃ by adjusting the heater 7, and the conveying speed of the conveyor 10 was set at 1 mm/min.

After the treatment, a golden yellow oxide film is formed on the surface of the sample, as shown in FIG. 2. The thickness of the oxide film after oxidation treatment is obviously increased, the thickness of the oxide film of an untreated sample is 8nm, and the thickness of the treated film reaches about 40 nm. The self-corrosion potential of the sample is obviously improved after treatment by utilizing an electrochemical test system for self-corrosion potential measurement, as shown in figure 3, and the corrosion resistance is improved.

[ example 3 ]

The apparatus was used for surface oxidation treatment of 022Cr17Ni12Mo2 stainless steel filler pieces according to the conditions and procedures described in example 1, with the plasma nozzle 4 selected to be 40 × 1mm, the plasma nozzle 4 adjusted to be 8mm away from the top and bottom surfaces of the sample 9, the oxidizing gas nozzle 5 selected to be 50 × 5mm in size, and the oxidizing gas nozzle 5 adjusted to be 15mm away from the top and bottom surfaces of the sample 9. The surface temperature of the specimen was controlled at 230 ℃ by adjusting the heater 7, and the conveying speed of the conveyor 10 was set at 1 mm/min.

After the treatment, a golden and light blue oxide film was formed on the surface of the sample, as shown in FIG. 4.

The heat conducting oil is selected as base oil, the acid value is adjusted to 10mgKOH/g by using commercial naphthenic acid distillate, and a high-temperature high-pressure kettle is adopted for corrosion experiments, wherein the experiment temperature is 310 ℃, and the experiment period is 100 hours. The results show that the corrosion rate after the oxidation treatment is greatly reduced and the corrosion resistance is improved, as shown in FIG. 5.