阅读说明：本技术 研磨装置及研磨方法 (Polishing apparatus and polishing method ) 是由 外崎宏 陈柏翰 曾根忠一 于 2019-08-06 设计创作，主要内容包括：本发明提供一种提高研磨速率的研磨装置及研磨方法。研磨装置使用具有研磨面的研磨垫进行研磨对象物的研磨,具备：研磨台,所述研磨台构成为能够旋转,并用于支承所述研磨垫；基板保持部,所述基板保持部用于保持研磨对象物并将研磨对象物按压于所述研磨垫；以及研磨液除去部,所述研磨液除去部用于从所述研磨面除去所述研磨液,所述研磨液除去部具有向所述研磨面喷射清洗液的冲洗部和对喷射有所述清洗液的所述研磨面上的研磨液进行吸引的吸引部,所述冲洗部具有由侧壁包围的清洗空间,所述侧壁具有使所述清洗空间朝向所述研磨台的径向外侧开口的开口部。(The invention provides a grinding device and a grinding method for improving grinding rate. A polishing device for polishing an object to be polished by using a polishing pad having a polishing surface, comprising: a polishing table configured to be rotatable and configured to support the polishing pad; a substrate holding section for holding an object to be polished and pressing the object to be polished against the polishing pad; and a polishing liquid removing portion for removing the polishing liquid from the polishing surface, the polishing liquid removing portion including a flushing portion for spraying a cleaning liquid onto the polishing surface and a suction portion for sucking the polishing liquid on the polishing surface sprayed with the cleaning liquid, the flushing portion including a cleaning space surrounded by a side wall, the side wall including an opening portion for opening the cleaning space radially outward of the polishing table.)

1. A polishing apparatus for polishing an object to be polished using a polishing pad having a polishing surface, comprising:

a polishing table configured to be rotatable and configured to support the polishing pad;

a substrate holding section for holding an object to be polished and pressing the object to be polished against the polishing pad; and

a polishing liquid removing section for removing the polishing liquid from the polishing surface,

the polishing liquid removing section includes:

a washing unit that sprays a cleaning liquid onto the polishing surface; and

a suction unit that sucks the polishing liquid on the polishing surface on which the cleaning liquid is ejected,

the flushing part has a cleaning space surrounded by a side wall, and the side wall has an opening part for opening the cleaning space to the radial outer side of the polishing table.

2. The abrading device of claim 1,

the flushing part and the suction part are formed as an integral block or are arranged adjacently.

3. The grinding apparatus according to claim 1 or 2,

the polishing liquid removing portion is disposed outside the substrate holding portion along an outer shape of the substrate holding portion.

4. The abrading device of claim 3,

further comprises a support arm for supporting the substrate holding part,

the polishing liquid removing unit is fixed to the support arm.

5. The abrading device of claim 3,

further comprises a lifting shaft for lifting the substrate holding part,

the polishing liquid removing unit is fixed to the elevation shaft.

6. The abrading device of claim 3,

the polishing liquid removing portion has an arc shape.

7. The grinding apparatus as set forth in any one of claims 1, 2 and 4 to 6,

the polishing apparatus further comprises a pressing mechanism for pressing the flushing part and/or the suction part against the polishing surface.

8. The grinding apparatus as set forth in any one of claims 1, 2 and 4 to 6,

the polishing apparatus further includes a temperature adjusting unit disposed downstream of the polishing liquid removing unit in a rotation direction of the polishing table.

9. The grinding apparatus as set forth in any one of claims 1, 2 and 4 to 6,

the polishing apparatus further includes a supply device for supplying the polishing liquid to the polishing surface in a state of being pressed against the polishing pad.

10. A polishing method for polishing an object to be polished by pressing the object to be polished against a polishing pad while rotating a polishing table on which the polishing pad is mounted, the polishing method comprising:

preparing a polishing liquid removing part having a rinsing part and a suction part;

spraying a cleaning liquid onto the polishing surface of the polishing pad by using the washing section;

discharging the sprayed cleaning liquid from an opening that opens radially outward of the polishing table at a side wall of the cleaning section; and

the polishing liquid on the polishing surface on which the cleaning liquid is ejected is sucked by the suction unit.

Technical Field

The present invention relates to a polishing apparatus and a polishing method.

Background

In the manufacturing process of a semiconductor device,planarization techniques for semiconductor device surfaces are becoming increasingly important. As a planarization technique, chemical Mechanical polishing (cmp) is known. In the chemical mechanical polishing, a polishing apparatus is used to contain silicon dioxide (SiO)₂) Cerium oxide (CeO)₂) The polishing liquid (slurry) having the abrasive grains is supplied to a polishing pad, and a substrate such as a semiconductor wafer is polished by bringing the substrate into sliding contact with the polishing pad.

A polishing apparatus for performing a CMP process includes a polishing table for supporting a polishing pad, and a substrate holding mechanism called a top ring or a polishing head for holding a substrate. This polishing apparatus supplies a polishing liquid from a polishing liquid supply nozzle to a polishing pad, and presses a substrate against the surface (polishing surface) of the polishing pad at a predetermined pressure. At this time, the polishing table and the substrate holding mechanism are rotated, so that the substrate is in sliding contact with the polishing surface, and the surface of the substrate is polished flat and mirror-polished.

The polishing rate of the substrate depends not only on the polishing load of the polishing pad to the substrate but also on the surface temperature of the polishing pad. This is because the chemical action of the polishing liquid on the substrate depends on the temperature. In addition, depending on the manufactured substrate, it is desirable to perform the CMP process at a low temperature in order to prevent a reduction in quality. Therefore, in the polishing apparatus, it is important to maintain the surface temperature of the polishing pad at an optimum value during substrate polishing. Therefore, in recent years, a polishing apparatus including a temperature adjusting mechanism for adjusting the surface temperature of the polishing pad has been proposed.

In addition, since the polishing liquid used in the CMP apparatus is expensive and the cost is required for the treatment of the used polishing liquid, it is required to reduce the amount of the polishing liquid used in order to reduce the operating cost of the CMP apparatus and the manufacturing cost of the semiconductor device. In addition, it is required to suppress or prevent the influence of the used polishing liquid and by-products on the quality of the substrate and/or the polishing rate.

Disclosure of Invention

As an example of reducing the amount of slurry used, there is the following configuration (patent document 1): a housing having a recess opened on a side facing a polishing pad is provided, and a holder in contact with the polishing pad is provided around the recess. In this configuration, a supply path for the polishing liquid is provided in the housing, the polishing liquid is supplied into the recess, and the polishing liquid is sent out from a narrow gap between the holder and the polishing pad, thereby forming a thin layer of the polishing liquid. In addition, as another example, there is a structure (patent document 2): the groove of the polishing pad is filled with the polishing liquid by supplying the polishing liquid to the outside of the chamfered front edge of the distribution device and pressing the polishing liquid against the polishing pad at the chamfered portion of the front edge, and a thin layer of the polishing liquid is formed by the rear edge of the distribution device. These slurry supply methods are relatively complicated in structure, and the effect of reducing the amount of use is not sufficient, leaving room for improvement.

As an example of removing the used polishing liquid, there is a cleaning device for a polishing apparatus, which is disposed so that a suction port connected to a vacuum pipe and a cleaning nozzle connected to a pressurized water pipe are arranged close to each other (patent document 3). Further, the following structure is provided (patent document 4): fluid outlets are provided on both sides in the width direction of a main body of the spray coating system, and a fluid inlet is provided between the fluid outlets on both sides, and the fluid is ejected on the abrasive surface from the fluid outlets on both sides toward the fluid inlet, and the fluid containing the used abrasive liquid is recovered from the fluid inlet. In these structures, the used polishing liquid and the ejected cleaning liquid need to be sucked and recovered, and a large suction force is required.

The present invention has been made in view of the above circumstances, and an object thereof is to solve at least part of the above problems.

Means for solving the problems

According to one aspect of the present invention, there is provided a polishing apparatus for polishing an object to be polished using a polishing pad having a polishing surface, the polishing apparatus including: a polishing table configured to be rotatable and configured to support the polishing pad; a substrate holding section for holding an object to be polished and pressing the object to be polished against the polishing pad; a supply device for supplying a polishing liquid to the polishing surface in a state of being pressed against the polishing pad; and a pressing mechanism that presses the supply device against the polishing pad, the supply device including: a side wall that is pressed against the polishing surface and has a first wall on an upstream side in a rotation direction of the polishing table and a second wall on a downstream side in the rotation direction of the polishing table; and a holding space that is surrounded by the side wall and is open to the polishing surface, holds a polishing liquid, and supplies the polishing liquid to the polishing surface, wherein the pressing mechanism can adjust pressing forces to the first wall and the second wall, respectively.

According to one aspect of the present invention, there is provided a polishing apparatus for polishing an object to be polished using a polishing pad having a polishing surface, the polishing apparatus including: a polishing table configured to be rotatable and configured to support the polishing pad; a substrate holding section for holding an object to be polished and pressing the object to be polished against the polishing pad; and a polishing liquid removing unit for removing the polishing liquid from the polishing surface, the polishing liquid removing unit including: a cleaning section that sprays a cleaning liquid onto the polishing surface; and a suction unit that sucks the polishing liquid on the polishing surface onto which the cleaning liquid is sprayed, the cleaning unit having a cleaning space surrounded by a side wall, the side wall having an opening that opens the cleaning space radially outward of the polishing table.

Drawings

Fig. 1 is a schematic diagram showing a polishing apparatus according to an embodiment of the present invention.

Fig. 2 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus.

Fig. 3 is a schematic view showing an example of the polishing liquid removing unit.

Fig. 4 is a diagram for explaining control of the temperature adjustment unit by the control unit.

Fig. 5 is a plan view schematically showing the gas injection nozzle of the temperature adjustment section and the polishing pad.

Fig. 6 is a side view schematically showing the gas ejection nozzle of the temperature adjustment section and the polishing pad.

Fig. 7 is a diagram schematically showing an example of a polishing liquid removing portion according to a modification.

Fig. 8 is a diagram for explaining control of the temperature adjustment unit of the modification by the control unit.

Fig. 9 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus according to the second embodiment.

Fig. 10 is a plan view showing a schematic shape of the supply device.

Fig. 11 is a cross-sectional view showing a schematic shape of the supply device.

Fig. 12 is a sectional view showing the supply device and the pressing mechanism.

Fig. 13A is a perspective view showing an example of the configuration of the pressing mechanism.

Fig. 13B is a perspective view showing an example of the configuration of the pressing posture adjustment mechanism.

Fig. 13C is a perspective view showing an example of the configuration of the pressing mechanism.

Fig. 14 is a diagram for explaining the discharge of used polishing liquid.

Fig. 15A is a sectional view for explaining the utilization efficiency of a new polishing liquid (second embodiment).

Fig. 15B is a plan view for explaining the utilization efficiency of the new polishing liquid (second embodiment).

Fig. 16A is a cross-sectional view (comparative example) for explaining the utilization efficiency of a new polishing liquid.

Fig. 16B is a plan view for explaining the utilization efficiency of the new polishing liquid (comparative example).

Fig. 17 is a sectional view of a supply device having a slit provided on the secondary side.

Fig. 18A shows an example of a secondary-side slit.

Fig. 18B shows an example of a secondary-side slit.

Fig. 18C shows an example of a secondary-side slit.

Fig. 19A is a diagram for explaining the direction of accumulation of the polishing liquid in the supply device.

Fig. 19B is a diagram for explaining the direction of accumulation of the polishing liquid in the supply device.

Fig. 19C is a diagram for explaining the direction of accumulation of the polishing liquid in the supply device.

Fig. 20A is a plan view showing an example of the shape of the supply device.

Fig. 20B is a plan view showing an example of the shape of the supply device.

Fig. 20C is a plan view showing an example of the shape of the supply device.

Fig. 21 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus according to the third embodiment.

Fig. 22 is a sectional view of a supply device having a slit provided on the primary side.

Fig. 23 shows an example of a slit on the primary side.

Fig. 24 is a plan view of the supply device for explaining the flow of recovering the polishing liquid.

Fig. 25 is a plan view showing an example of the shape of the supply device.

Fig. 26 is a sectional view of a supply device having a slit provided on the secondary side.

Fig. 27 is a cross-sectional view of a supply device having slits provided on the primary side and the secondary side.

Fig. 28 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus according to the fourth embodiment.

Fig. 29 is a cross-sectional view showing an example of the polishing liquid removing portion.

Fig. 30 is a cross-sectional view showing an example of the polishing liquid removing portion.

Fig. 31 is a plan view showing an example of the polishing liquid removing portion.

Fig. 32 is a diagram schematically showing an example of the configuration of the nozzle ejection opening.

Fig. 33 is a diagram schematically showing an example of the configuration of the nozzle ejection opening.

Fig. 34A is a perspective view showing a configuration example of the polishing liquid removing unit.

Fig. 34B is a perspective view showing a configuration example of the polishing liquid removing unit.

Fig. 34C is a perspective view showing a configuration example of the polishing liquid removing unit.

Fig. 35 is a perspective view showing the arrangement relationship of the respective components of the polishing apparatus according to the fifth embodiment.

Fig. 36 is a plan view of the polishing liquid removing unit for explaining the discharge of the cleaning liquid.

Fig. 37 is a perspective view showing an example of a mounting structure of the polishing liquid removing unit.

Fig. 38 is a perspective view showing an example of a mounting structure of the polishing liquid removing portion.

Fig. 39 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus according to the sixth embodiment.

Fig. 40 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus according to the seventh embodiment.

Description of the symbols

10 … grinding device

20 … grinding table

30 … top ring

40 … grinding liquid supply nozzle

50 … polishing liquid removing part

52 … interception part

56 … suction part

57 … slit

58 … flow path

60. 60A … temperature control unit

62 … gas injection nozzle

62A … heat exchanger

70 … control part

100 … polishing pad

102 … abrasive surface

200 … feeding device

201 … space for holding

210. 211, 212 … side wall

250 … pressing mechanism

251 … cylinder device

251a … cylinder

252 … pressing posture adjusting mechanism

300 … grinding liquid removing part

310 … suction part

320 … cleaning part

SL … grinding liquid

Wk … substrate.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same or corresponding components are denoted by the same reference numerals, and redundant description thereof is omitted.

(first embodiment)

Fig. 1 is a schematic diagram showing a polishing apparatus according to an embodiment of the present invention. The polishing apparatus 10 of the present embodiment is configured to be able to polish a substrate Wk such as a semiconductor wafer, which is a polishing target, using a polishing pad 100 having a polishing surface 102. As shown in the drawing, the polishing apparatus 10 includes a polishing table 20 for supporting the polishing pad 100, and a top ring (substrate holding portion) 30 for holding the substrate Wk and pressing the substrate Wk against the polishing pad 100. The polishing apparatus 10 further includes a polishing liquid supply nozzle (polishing liquid supply unit) 40 for supplying a polishing liquid (slurry) to the polishing pad 100.

The polishing table 20 is formed in a disk shape and is configured to be rotatable about a central axis thereof as a rotation axis. The polishing pad 100 is attached to the polishing table 20 by bonding or the like. The surface of the polishing pad 100 forms a polishing surface 102. The polishing pad 100 rotates together with the polishing table 20 by rotating the polishing table 20 by a motor not shown.

The top ring 30 holds a substrate Wk as an object to be polished on its lower surface by vacuum adsorption or the like. The top ring 30 is configured to be rotatable together with the substrate Wk by power from a motor, not shown. The upper portion of the top ring 30 is connected to the support arm 34 via the shaft 31. The top ring 30 can be moved in the vertical direction by an unillustrated air cylinder, and the distance from the polishing table 20 can be adjusted. Thereby, the top ring 30 can press the held substrate Wk against the surface (polishing surface) 102 of the polishing pad 100. The support arm 34 is configured to be swingable by a motor not shown, and to move the top ring 30 in a direction parallel to the polishing surface 102. In the present embodiment, the top ring 30 is configured to be movable between a receiving position of the substrate Wk, not shown, and a position above the polishing pad 100, and is configured to be capable of changing a pressing position of the substrate Wk against the polishing pad 100. Hereinafter, the pressing position (holding position) at which the top ring 30 presses the substrate Wk is also referred to as a "polishing region".

The polishing liquid supply nozzle 40 is provided above the polishing table 20, and supplies a polishing liquid (slurry) to the polishing pad 100 supported by the polishing table 20. The polishing liquid supply nozzle 40 is supported by a shaft 42. The shaft 42 is configured to be swingable by a motor not shown, and the polishing liquid supply nozzle 40 can change the dropping position of the polishing liquid during polishing.

The polishing apparatus 10 further includes a control unit 70 (see fig. 4) for controlling the overall operation of the polishing apparatus 10. The control unit 70 may be configured as a microcomputer including a CPU, a memory, and the like and realizing a desired function by software, may be configured as a hardware circuit for performing a dedicated arithmetic processing, or may be configured as a combination of a microcomputer and a hardware circuit for performing a dedicated arithmetic processing.

In the polishing apparatus 10, the substrate Wk is polished as follows. First, the top ring 30 holding the substrate Wk on the lower surface is rotated, and the polishing pad 100 is rotated. In this state, the polishing liquid is supplied from the polishing liquid supply nozzle 40 to the polishing surface 102 of the polishing pad 100, and the substrate Wk held by the top ring 30 is pressed against the polishing surface 102. Thus, the surface of the substrate Wk is in contact with the polishing pad 100 in the presence of the slurry, and in this state, the substrate Wk and the polishing pad 100 are relatively moved. Thus, the substrate Wk is polished.

As shown in fig. 1, the polishing apparatus 10 further includes a polishing liquid removing unit 50 and a temperature adjusting unit 60. Fig. 2 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus 10. As shown in fig. 2, in the polishing apparatus 10 of the present embodiment, when polishing the substrate Wk, the polishing liquid supply nozzle 40, the polishing region of the substrate Wk (the position where the top ring 30 presses the substrate Wk), the polishing liquid removing unit 50, and the temperature adjusting unit 60 are arranged in this order in the rotation direction Rd of the polishing table 20. In the present embodiment, the polishing liquid removing unit 50 and the temperature adjusting unit 60 are provided adjacent to each other. However, the polishing liquid removing unit 50 and the temperature adjusting unit 60 may be provided separately from each other.

The polishing liquid removing unit 50 is provided behind (downstream of) the polishing region of the substrate Wk in the rotation direction Rd of the polishing table 20, for removing the polishing liquid from the polishing surface 102. That is, the polishing liquid removing unit 50 removes the polishing liquid used for polishing the substrate Wk once from the polishing surface 102. As shown in fig. 2, the polishing liquid removing portion 50 is disposed so as to extend in the radial direction of the polishing table 20.

Fig. 3 is a schematic view showing an example of the polishing liquid removing unit 50. Fig. 3 shows a cross section perpendicular to the longitudinal direction of the polishing liquid removing unit 50 (the radial direction of the polishing table 20). As shown in fig. 3, the polishing liquid removing unit 50 of the present embodiment includes a holding unit 52 for holding the polishing liquid SL on the polishing surface 102 and a suction unit 56 for sucking the polishing liquid SL. In the present embodiment, the blocking portion 52 and the suction portion 56 are integrally formed.

The dam portion 52 abuts on the polishing surface 102 and prevents the polishing liquid SL from moving in the rotation direction Rd of the polishing table 20. Preferably, the material of the dam 52 is selected so that the grinding surface 102 is not damaged and chips of the dam 52 itself generated by contact with the grinding surface 102 do not remain on the grinding surface 102. For example, the dam portion 52 may be made of the same material as a not-shown holding ring that holds the outer peripheral edge of the substrate Wk, or may be made of synthetic resin such as PPS (polyphenylene sulfide) or metal such as stainless steel. Further, the surface of the blocking portion 52 may be coated with a resin such as PEEK (polyether ketone), PTFE (polytetrafluoroethylene), or polyvinyl chloride. As shown in fig. 3, the blocking portion 52 may be R-chamfered (or square-chamfered) at a portion abutting against the polishing surface 102 so that the abutting resistance against the polishing surface 102 is reduced.

The suction portions 56 are disposed adjacent to each other in the front (upstream side) of the dam portion 52 in the rotation direction Rd of the polishing table 20. The suction unit 56 has a slit 57 opening toward the polishing surface 102, and the slit 57 is connected to a vacuum source, not shown, via a flow path 58. In the present embodiment, the flow path 58 from the slit 57 to the vacuum source, not shown, is at an angle of 90 degrees with respect to the polishing surface 102. Preferably, the slit 57 is formed shorter than the length of the dam 52 in the longitudinal direction of the polishing liquid removing portion 50 and longer than the diameter of the substrate Wk. The width Sw of the slit 57 may be determined according to the type of the polishing liquid SL and the performance of a vacuum source not shown. For example, when the diameter of the substrate Wk is 300mm, the length of the slit 57 in the longitudinal direction is preferably 300mm or more and the width Sw is preferably about 1 to 2 mm.

As described above, in the polishing liquid removing unit 50 of the present embodiment, the intercepting unit 52 that intercepts the polishing liquid SL is disposed continuously to the rear of the suction unit 56 that sucks the polishing liquid SL in the rotation direction Rd of the polishing table 20. Therefore, the polishing liquid SL intercepted by the intercepting part 52 can be sucked by the suction part 56, and the polishing liquid SL can be appropriately removed from the polishing surface 102.

Further, the polishing liquid removing unit 50 is preferably separated from the polishing surface 102 when the polishing surface 102 is adjusted by a sprayer or a dresser, not shown. That is, the polishing liquid removing unit 50 may be configured to be movable between a polishing liquid removing position at which the polishing liquid SL is removed and a standby position away from the polishing surface 102, and may be located at the standby position when the polishing surface 102 is adjusted. The polishing apparatus 10 of the present embodiment can adjust the polishing surface 102 in a state where the polishing liquid is removed from the polishing surface 102 by the polishing liquid removing unit 50. Therefore, the liquid used by the atomizer or the dresser can be inhibited from being mixed with the polishing liquid. Therefore, the used liquid generated by polishing and conditioning the substrate Wk can be separately recovered, and environmental protection can be also facilitated.

The description returns to fig. 1 and 2. The temperature adjusting unit 60 is disposed behind the polishing liquid removing unit 50 in the rotation direction Rd of the polishing table 20. The temperature adjusting section 60 controls and adjusts the temperature of the polishing surface 102 by the control section. Fig. 4 is a diagram for explaining the control of the temperature adjustment unit 60 by the control unit. In fig. 4, the polishing liquid removing unit 50 is not shown. As shown in the drawing, the temperature adjusting section 60 of the present embodiment includes a gas injection nozzle (injector) 62 for injecting a gas onto the polishing surface 102. The gas injection nozzle 62 is connected to a compressed air source via a compressed air supply conduit 63. A pressure control valve 64 is provided in the compressed air supply line 63, and the pressure and flow rate of the compressed air supplied from the compressed air source are controlled by the pressure control valve 64. The pressure control valve 64 is connected to the control unit 70. In addition, the compressed air may be at normal temperature, or may be cooled or warmed to a predetermined temperature.

As shown in fig. 4, a temperature sensor 68 for detecting the surface temperature of the polishing pad 100 is provided above the polishing pad 100. Here, the temperature sensor 68 is preferably provided behind the polishing liquid removing unit 50 in the rotation direction Rd of the polishing table 20, and detects the temperature of the polishing surface 102 from which the polishing liquid has been removed. The temperature sensor 68 is connected to the control unit 70. The control unit 70 adjusts the valve opening degree of the pressure control valve 64 by PID control based on the difference between the predetermined temperature or the target temperature, which is the input set temperature, and the actual temperature of the polishing surface 102 detected by the temperature sensor 68, and controls the flow rate of the compressed air injected from the gas injection nozzle 62. Thereby, the compressed air is injected from the gas injection nozzle 62 to the polishing surface 102 of the polishing pad 100 at an optimum flow rate, and the temperature of the polishing surface 102 is maintained at the target temperature.

Fig. 5 and 6 are a plan view and a side view schematically showing the gas injection nozzle 62 of the temperature adjustment unit 60 and the polishing pad 100. As shown in fig. 5, the temperature adjusting unit 60 includes a plurality of gas injection nozzles 62 (eight nozzles are attached in the illustrated example) arranged at predetermined intervals along the radial direction of the polishing table 20. In fig. 5, during polishing, the polishing pad 100 rotates in the clockwise direction Rd about the rotation center CT. Here, the nozzles are numbered in ascending order of 1, 2, and 3 … 8 from the pad inner side, and for example, the third and sixth gas injection nozzles 62 will be described as an example. That is, when concentric circles C1 and C2 passing through points P1 and P2 directly below the third and sixth two gas injection nozzles 62 and centered on CT are drawn and tangential directions at points P1 and P2 on the concentric circles C1 and C2 are defined as the rotational tangential directions of the polishing pad 100, the gas injection directions of the gas injection nozzles 62 are inclined by a predetermined angle (θ 1) toward the pad center side with respect to the rotational tangential directions of the polishing pad. The gas injection direction is a direction of a center line of an angle (gas injection angle) at which the gas expands in a fan shape from the gas injection nozzle opening. Similarly, the other nozzles than the third and sixth nozzles are inclined by a predetermined angle (θ 1) toward the pad center with respect to the rotation tangential direction of the polishing pad. The relationship between the temperature adjustment capability and the angle (θ 1) of the gas ejection direction of the gas ejection nozzle 62 with respect to the tangential direction of rotation of the polishing pad is set to 15 ° to 35 °. In addition, although the case where the number of nozzles is eight has been described here, the number of nozzles can be adjusted by sealing the nozzle holes with plugs or the like, and can be set to any number. The number of nozzles can be appropriately selected according to the size of the polishing pad 100.

As shown in fig. 6, the gas jetting direction of the gas jetting nozzle 62 is not perpendicular to the surface (polishing surface) 102 of the polishing pad 100, but is inclined by a predetermined angle toward the rotation direction Rd side of the polishing table 20. When the angle of the gas ejection direction of the gas ejection nozzle 62 with respect to the polishing surface 102, that is, the angle formed by the polishing surface 102 and the gas ejection direction of the gas ejection nozzle 62 is defined as the gas entry angle (θ 2), the relationship between the gas entry angle (θ 2) and the temperature controllability is set to 30 ° to 50 °. Here, the gas injection direction refers to a direction of a center line of an angle (gas injection angle) at which the gas expands in a fan shape from the gas injection nozzle opening. As shown in fig. 6, the gas injection nozzle 62 is configured to be vertically movable, and the height Hn of the gas injection nozzle 62 from the polishing surface 102 can be adjusted.

The temperature adjusting unit 60 can adjust the temperature of the polishing surface 102 by ejecting gas from at least one gas ejection nozzle 62 toward the polishing pad 100 (polishing surface 102) during polishing of the substrate Wk. A polishing liquid removing unit 50 for removing the polishing liquid from the polishing surface 102 is provided in front of the temperature adjusting unit 60 in the rotation direction Rd of the polishing table 20. Therefore, the temperature adjustment unit 60 can adjust the temperature of the polishing surface 102 in a state where the polishing liquid that can serve as a heat insulating layer is removed, and the efficiency of adjusting the temperature of the polishing surface 102 can be improved. In addition, even when the gas is strongly injected from the gas injection nozzle 62 of the temperature adjustment unit 60 toward the polishing surface 102, scattering of the polishing liquid can be suppressed, and generation of scratches on the substrate Wk can be suppressed. In the polishing apparatus 10 of the present embodiment, the polishing liquid used for polishing the substrate Wk is removed by the polishing liquid removing unit 50, and new polishing liquid is supplied to the polishing surface 102 from the polishing liquid supply nozzle 40 at a time.

(modification 1)

Fig. 7 is a diagram schematically showing an example of a polishing liquid removing portion according to a modification. In the above embodiment, the slit 57 and the flow path 58 of the suction unit 56 are provided at 90 degrees with respect to the polishing surface 102. However, the present invention is not limited to this example, and as shown in fig. 7, the slit 57 and the flow path 58 of the suction portion 56 may be inclined so that the angle with the rotation direction Rd of the polishing table 20 is 10 degrees or more and less than 90 degrees. In this way, the polishing liquid SL can be guided to the flow path 58 with the rotation of the polishing table 20, and the polishing liquid SL can be appropriately sucked.

In the above embodiment, the dam portion 52 of the suction portion 56 abuts the polishing surface 102. However, the present invention is not limited to this example, and the dam portion 52 may be provided with a gap from the polishing surface 102 as long as it is in contact with the polishing liquid. In this case, since the dam 52 does not abut against the polishing surface 102, chipping of the dam 52 and abutment resistance can be prevented from being generated. The polishing apparatus 10 may further include a sensor for detecting the position of the polishing surface 102 or the distance between the polishing liquid removing unit 50 and the polishing surface 102. The polishing apparatus 10 may bring the polishing liquid removing portion 50 into contact with the polishing surface 102 based on the detected position or distance, or may keep the distance between the polishing liquid removing portion 50 and the polishing surface 102 constant.

In the above embodiment, the polishing liquid removing unit 50 has the blocking unit 52 and the suction unit 56 integrally. However, the polishing liquid removing unit 50 is not limited to this example, and may have the blocking unit 52 and the suction unit 56, respectively, or may have only one of the blocking unit 52 and the suction unit 56. The polishing liquid removing unit 50 may be provided integrally with at least a part of a dresser, a sprayer, or the like for conditioning the polishing pad 100.

(modification 2)

Fig. 8 is a diagram for explaining the control of the temperature adjustment unit 60A of the modification by the control unit. The temperature adjusting section 60 of the above embodiment has a gas injection nozzle (injector) 62 that injects gas toward the polishing surface 102. However, the temperature adjusting unit 60 may have a heat exchanger for flowing a fluid inside instead of or in addition to the temperature adjusting unit. As shown in fig. 8, the temperature adjustment portion 60A of the modification includes a heat exchanger 62A instead of the gas injection nozzle 62. The modification shown in fig. 8 is the same as the polishing apparatus 10 of the embodiment except for the temperature adjustment section 60A. In fig. 8, the polishing liquid removing unit 50 is not shown. As shown in fig. 8, the heat exchanger 62A has a flow path, not shown, formed therein and is connected to a fluid supply source 66A via a pipe 63A. A pressure control valve 64A is provided in the pipe 63A, and the pressure and flow rate of the fluid supplied from the fluid supply source 66A are controlled by the pressure control valve 64A. The pressure control valve 64A is connected to the control unit 70. As the fluid used in the heat exchanger 62A, a liquid such as water may be used, or a gas such as air may be used. The reaction gas may flow through the heat exchanger 62A, or a catalyst for promoting an exothermic reaction of the reaction gas may be provided in the heat exchanger 62A. The heat exchanger 62A may be disposed in contact with the polishing surface 102, or may be disposed with a gap between the heat exchanger and the polishing surface 102.

As in the above-described embodiment, the control unit 70 adjusts the valve opening degree of the pressure control valve 64A based on the temperature detected by the temperature sensor 68, and controls the flow rate of the fluid flowing through the heat exchanger 62A. The temperature of the polishing surface 102 can also be adjusted by the temperature adjusting unit 60A of the modification as described above in the same manner as in the above embodiment. Further, a polishing liquid removing unit 50 is provided in front of the temperature adjusting unit 60A in the rotation direction Rd of the polishing table 20. Therefore, in the polishing apparatus according to the modification, the temperature of the polishing surface 102 can be adjusted by the temperature adjusting unit 60A in a state where the polishing liquid that may serve as a heat-insulating layer is removed, and the efficiency of adjusting the temperature of the polishing surface 102 can be improved.

(second embodiment)

Fig. 9 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus 10 according to the second embodiment. In the following description, the same components as those of the above-described embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. In the present embodiment, a supply device (slurry pad) 200 for supplying a polishing liquid to the polishing pad 100 is provided. The supply device 200 has the shape of a pad or a box. The supply device 200 is pressed against the polishing surface 102 of the polishing pad 100 by a pressing mechanism 250 described later. Also illustrated in fig. 9 is a dresser 90 and an atomizer 94. The dresser 90 is connected to a shaft 92 via an arm 93. The shaft 92 is configured to be capable of being swung by a motor, not shown, and is capable of moving the dresser 90 on the polishing pad 100 and moving the dresser 90 to a standby position outside the polishing pad 100. The dresser 90 is configured to be movable up and down by an unillustrated elevating mechanism and configured to be able to press the polishing pad 100. The sprayer 94 is configured to be able to supply pure water (DIW) to the polishing surface of the polishing pad 100. The dresser 90 and the sprayer 94 can be omitted.

Fig. 10 is a plan view showing a schematic shape of the supply device 200. Fig. 11 is a sectional view showing a schematic shape of the supply device 200. The supply device 200 has an elongated shape in plan view, and has a holding space 201 surrounded by a side wall 210 in the interior thereof. The length of the supply device 200 is formed to be substantially the same as the diameter of the substrate Wk held by the top ring 30. As with the above-described dam 52, it is preferable that the side wall 210 of the supply device 200 be made of the same material as the dam 52 so that the grinding surface 102 is not damaged and chips of the side wall 210 themselves generated by contact with the grinding surface 102 do not remain on the grinding surface 102.

The side wall 210 has a side wall 211 located on the upstream side and a side wall 212 located on the downstream side in the rotation direction Rd of the polishing table 20. The supply device 200 is opened on the side facing the polishing surface 102 of the polishing pad 100 (opening 221). That is, the holding space 201 is open to the polishing surface 102. The upper portion of the supply device 200 is closed by an upper plate 220 which is integrated with or separate from the side wall 210. When the upper plate 220 is a separate body, the upper plate 220 may be configured as a top cover that can be attached to the side wall 210. One or more introduction portions 222 for introducing the polishing liquid are provided on the upper plate 220. The polishing liquid (slurry) SLf is supplied from the polishing liquid supply nozzle 40 to the holding space 201 in the supply device 200 via the introduction portion 222. In the case of having a plurality of introduction portions 222, the polishing liquid supply nozzle 40 is configured to have a plurality of nozzle tips branched in accordance with the number of the introduction portions 222. In the following description, the polishing liquid before use in the polishing treatment may be referred to as SLf, and the polishing liquid after use in the polishing treatment may be referred to as SLu.

Fig. 12 is a sectional view showing the supply device 200 and the pressing mechanism 250. The pressing mechanism 250 is disposed above the supply device 200, and includes a cylinder device 251 and a pressing posture adjustment mechanism 252. The pressing mechanism 250 is connected to the shaft 254 via an arm 253. The shaft 254 is configured to be swingable by a motor 255, and the pressing mechanism 250 is configured to be swingable by rotation of the shaft 254. Instead of separately providing the shaft 254, the pressing mechanism 250 may be connected to the shaft 42 of the polishing liquid supply nozzle 40 via an arm 253. The tip of the polishing liquid supply nozzle 40 is connected to each introduction portion 222 of the supply device 200, and the polishing liquid SL is supplied from the polishing liquid supply nozzle 40.

The cylinder device 251 may include a plurality of cylinders 251a along the longitudinal direction of the supply device 200 and/or the width direction of the supply device 200 (the polishing table rotation direction Rd). Each cylinder has a rod driven by a fluid (gas, liquid). In the present embodiment, as shown in fig. 13A, the cylinder device 251 is configured such that three cylinders 251a are arranged in line along the width direction of the supply device 200. Each cylinder 251a is connected to a fluid supply source (not shown) via an electropneumatic regulator (proportional control valve) 71. The electropneumatic regulator 71 is connected to the control unit 70. The control unit 70 controls the electro-pneumatic regulator 71 to control the pressure and flow rate of the driving fluid supplied to each cylinder 251a from a fluid supply source, not shown, and to adjust the pressing force of each cylinder 251 a. By adjusting the pressing force of each cylinder 251a, the pressing force with which the upstream side wall 211 presses the polishing surface 102 is adjusted, and the pressing force with which the downstream side wall 212 presses the polishing surface 102 is adjusted. The pressing force on the side wall 211 and the pressing force on the side wall 212 can be adjusted individually (the same or different). Here, although an example in which three cylinders 251a are provided in line in the width direction of the supply device 200 is described, two, four, or more cylinders 251a may be provided in line in the width direction. If there are two cylinders, that is, a cylinder that presses the side of the side wall 211 and a cylinder that presses the side of the side wall 212, the pressing force on the side wall 211 and the pressing force on the side wall 212 can be adjusted individually. Instead of the cylinder device, another pressing device having a plurality of pressing units (rods driven by power of a solenoid, another motor, or the like) may be used.

By controlling the pressing force of the plurality of cylinders 251a to adjust the pressing force of the upstream side wall 211, the used polishing liquid SLu can be prevented from entering the holding space 201 from the side wall 211, and can be discharged to the outside of the polishing pad 100 along the side wall 211 (fig. 14). Further, by adjusting the pressing force to the side wall 211 on the upstream side, at least a part of the used polishing liquid SLu can be collected into the holding space 201 from the gap between the side wall 211 and the polishing surface 102 (fig. 21, 26, and 27).

Further, a plurality of air cylinders may be provided, which are aligned in the longitudinal direction of the supply device 200. In this case, the pressing force applied to each portion in the longitudinal direction of the supply device 200 can be adjusted to be different.

As shown in fig. 13A and 13B, the pressing posture adjustment mechanism 252 is disposed between the cylinder device 251 and the supply device 200, and adjusts the posture of the supply device 200. The pressing posture adjustment mechanism 252 includes a first block 252a, a second block 252b fixed to the first block 252a, and a third block 252c rotatably engaged with the second block 252b via a shaft 252 d. The first block 252a is fixed to the rod of each cylinder 251a of the cylinder device 251, and the third block 252c is fixed to the supply device 200. With this configuration, when the supply device 200 is placed on the polishing surface 102, the third block 252c of the pressing posture adjustment mechanism 252 rotates about the shaft 252d with respect to the second block 252b, and the supply device 200 is disposed parallel to the polishing surface 102.

Note that, although fig. 13A shows an example in which the pressing posture adjustment mechanism 252 is fixed to the upper plate (top cover) 220 of the supply device 200, the upper plate (top cover) 220 may be omitted and the pressing posture adjustment mechanism 252 may be fixed to the side wall 210 of the supply device 200 as shown in fig. 13C.

Fig. 14 is a diagram for explaining the discharge of used polishing liquid. As shown in the figure, the supply device 200 includes a side wall 211 on the upstream side (the primary side, the downstream side of the top ring 30) in the rotation direction Rd of the polishing pad 100 and a side wall 212 on the downstream side (the secondary side, the upstream side of the top ring 30) in the rotation direction Rd of the polishing pad 100. By appropriately adjusting the pressing force with which the primary-side wall 211 presses the polishing surface 102 of the polishing pad 100 by the pressing mechanism 250, as shown in fig. 14, it is possible to prevent the used polishing liquid SLu from entering the holding space 201 in the supply device 200 through the side wall 211 during the polishing process of the top ring 30, and to discharge the used polishing liquid SLu to the outside of the polishing pad 100 by the centrifugal force generated by the rotation of the polishing table 20. Further, the discharge amount of the used polishing liquid SLu is adjusted by adjusting the shape and angle of the side wall 211 of the supply device 200 (fig. 19A to C, fig. 20A to C), the pressing force of the pressing mechanism 250 against the side wall 211, and/or the structure (number, arrangement, height, shape, and size (described later in the case of providing slits)) of the side wall 211.

Further, by appropriately adjusting the pressing force with which the secondary-side wall 212 presses the polishing surface 102 of the polishing pad 100 by the pressing mechanism 250, it is possible to supply new polishing liquid SLf from the holding space 201 of the supply device 200 to the top ring 30 side through the gap between the side wall 212 and the polishing surface 102, and it is possible to adjust the supply amount of new polishing liquid SLf. Therefore, according to the supply apparatus 200, the used polishing liquid SLu can be discharged by the primary-side wall 211, and the supply amount of the new polishing liquid SLf can be adjusted by the secondary-side wall 212. As a result, the top ring 30 can perform the polishing process of the substrate Wk substantially only with a new polishing liquid, and can improve the polishing quality (polishing rate, in-plane uniformity, and the like).

Fig. 15A and 15B are diagrams for explaining the utilization efficiency of the new polishing liquid according to the second embodiment. Fig. 16A and 16B are cross-sectional views for explaining the utilization efficiency of the new polishing liquid of the comparative example. As shown in fig. 16A and 16B, when the polishing liquid is supplied from the polishing liquid supply nozzle 40 to the polishing surface 102 without using the supply device 200 of the present embodiment, it is necessary to supply the polishing liquid used in the actual polishing process to the entire substrate Wk held by the top ring 30. Therefore, as shown in fig. 16B, a large amount of new polishing liquid SLf may be discharged without being used for polishing treatment due to the centrifugal force generated by the rotation of the polishing pad 100 and the pressing of the holding ring of the top ring 30. On the other hand, in the present embodiment, the polishing liquid SLf is supplied into the holding space 201 when the polishing surface 102 of the polishing pad 100 passes through the supply device 200, and the amount of the polishing liquid is adjusted when the polishing surface 102 passes through the gap between the side wall 212 and the polishing surface 102. At this time, the pressing force of the pressing mechanism 250 against the supply device 200 (side wall 212) is adjusted to adjust the supply amount so that the amount of the polishing liquid necessary for the polishing process remains after passing through the side wall 212. For example, the amount of the polishing liquid is adjusted so that the polishing liquid mainly remains in the groove portion (pad groove, porous portion) 101 of the polishing surface 102, and the amount of the polishing liquid other than the groove portion 101 can be reduced. In one example, the polishing liquid other than the grooves 101 is supplied as a thin layer on the polishing surface. As a result, as shown in fig. 15B, the amount of new polishing liquid discharged without being used for polishing can be greatly reduced on the secondary side (top ring 30 side) of the supply device 200. That is, according to the supply device 200 of the present embodiment, by appropriately adjusting the pressing force to the side wall 212 on the secondary side of the supply device 200, the polishing liquid can be supplied in an amount necessary for a necessary portion, and the amount of new polishing liquid discharged without being used in the polishing process can be reduced. Further, the length of the supply device 200 may be arbitrary. However, the relative relationship with the diameter of the substrate Wk held by the top ring 30 may be substantially the same as the substrate diameter or may be the same as a half radius thereof. The length of the supply device 200 may be set to supply a desired amount of the polishing liquid to the entire surface or a desired range of the substrate Wk.

The output amount of the secondary-side polishing liquid (the flow rate of the polishing liquid output from between the side wall 212 and the polishing surface 102) is adjusted by adjusting the shape and angle of the side wall 212 of the supply device 200 (the angle of the side wall 212: see fig. 19A to C and fig. 20A to C), the pressing force of the pressing mechanism 250 against the side wall 212, and/or the structure (the number, arrangement, height, shape, and size, (described later in the case of providing slits)) of the side wall 212.

Fig. 17 is a sectional view of supply device 200 provided with a slit on the secondary side. Fig. 18A to 18C are views of an example of a slit on the secondary side, as viewed from the direction of arrow XVIII in fig. 17. In order to control the supply amount of the polishing liquid from the supply device 200 and the distribution to each part, as shown in the drawing, a slit 231 may be provided in the secondary side wall 212, and the polishing liquid may be supplied from the holding space 201 through the slit 231. This can improve the degree of freedom in adjusting the amount of the polishing liquid supplied from the supply device 200 (side wall 212). For example, as shown in fig. 18A to 18C, the supply amount of the polishing liquid from the center in the longitudinal direction of the supply device 200 may be increased. In this case, the slit 231 at the center in the longitudinal direction can coincide with the trajectory Ck through which the center of the substrate Wk on the polishing surface 102 passes (see fig. 19C). This enables more polishing liquid to be supplied to the center of the substrate Wk. The flow rate of the polishing liquid flowing in the center of the substrate is adjusted by adjusting the shape and angle of the side walls 211 and 212 of the supply device 200 (angle of the side wall 212: fig. 19A to C, fig. 20A to C), the structure (number, arrangement, height, shape, and size) of the slits, and the pressing force of the pressing mechanism 250.

In the example of fig. 18A, a slit 231 opened at a lower end edge is provided at the center in the longitudinal direction of the side wall 212. This enables the polishing liquid to be positively supplied to the center of the substrate Wk. In the example of fig. 18A, another slit may be added.

In the example of fig. 18B, a slit 231 opened at a position higher than the lower end edge is provided at the center in the longitudinal direction of the side wall 212. In this case, after the polishing liquid is accumulated in the holding space 201 of the supply device 200 to a height up to the slit 231, the polishing liquid is supplied from the slit 231 to the top ring 30 side. In the example of fig. 18B, another slit may be added.

In the example of fig. 18C, a plurality of slits 231 are provided in the longitudinal direction of the side wall 212, the height of the slit 231 in the center is the lowest, and the height of the slit 231 increases as it goes away from the center. In this case, the flow rate of the polishing liquid from the slit 231 at the center is the largest, and the flow rate of the polishing liquid from the slit 231 becomes smaller as it goes away from the center. By adjusting the height of each slit 231, the flow rate of the polishing liquid from each slit 231 can be adjusted.

In addition to the structures illustrated in fig. 18A to 18C, slits can be provided in any number, in any arrangement, in any height, in any shape, and in any size on the side wall of the secondary side. For example, one or more slits can be provided according to the process to increase or decrease the flow rate from the slit at an arbitrary position, not limited to increasing or decreasing the flow rate from the slit at the center of the substrate Wk.

Fig. 19A to 19C are diagrams for explaining the direction of accumulation of the polishing liquid in the supply device 200. Fig. 20A to 20C are plan views showing an example of the shape of the supply device 200.

As shown in fig. 19A and 20A, when the radially outer end of the polishing pad 100 of the side wall 212 on the secondary side of the supply device 200 is arranged to be ahead of the other portions in the rotational direction Rd, the polishing liquid SLf in the holding space 201 of the supply device 200 flows from the inside toward the outside and accumulates from the outside. Further, the radial outer end of the polishing pad 100 of the side wall 211 on the primary side of the supply device 200 is disposed so as to be ahead of the other portions in the rotation direction Rd, and the used polishing liquid SLu can easily flow radially outward through the side wall 211. In this case, as shown in fig. 20A, the holding space 201 of the supply device 200 may be formed so as to be wider radially outward of the polishing pad 100 in a plan view.

As shown in fig. 19B and 20B, when the radially inner end of the polishing pad 100 of the side wall 212 on the secondary side of the supply device 200 is arranged to be ahead of the other portions in the rotation direction Rd, the polishing liquid SLf in the holding space 201 of the supply device 200 flows from the outside to the inside and accumulates from the inside. On the other hand, the radial outer end of the polishing pad 100 of the side wall 211 on the primary side of the supply device 200 is disposed so as to be ahead of the other portions in the rotation direction Rd, and the used polishing liquid SLu can easily flow radially outward through the side wall 211. In this case, as shown in fig. 20B, the holding space 201 of the supply device 200 may be formed so as to be wider radially inward of the polishing pad 100 in a plan view.

As shown in fig. 19C and 20C, when the center of the side wall 212 on the secondary side of the supply device 200 is arranged to lead in the rotation direction Rd, the polishing liquid in the holding space 201 of the supply device 200 flows from both sides toward the center, and starts to accumulate from the center side. In this example, the side wall 212 has a curved shape near the center. On the other hand, the radial outer end of the polishing pad 100 of the side wall 211 on the primary side of the supply device 200 is disposed so as to be ahead of the other portions in the rotation direction Rd, and the used polishing liquid SLu can easily flow radially outward through the side wall 211. In this case, as shown in fig. 20C, the holding space 201 of the supply device 200 may be formed to be wider toward the center in a plan view. The center of the supply device 200 can coincide with the trajectory Ck through which the center of the substrate Wk passes. According to this configuration, the polishing liquid can be accumulated in the holding space 201 from the center side, and the polishing liquid can be positively supplied to the center of the substrate.

In addition to the configurations illustrated in fig. 19A to 19C and 20A to 20C, the polishing liquid can be accumulated from an arbitrary position in the longitudinal direction of the supply apparatus 200. For example, the portion to be initially accumulated is disposed so that the secondary-side sidewall 212 is ahead of the other portions in the rotation direction of the polishing pad 100, and the polishing liquid can be actively supplied from this portion.

As described above, by adjusting the direction of accumulation of the polishing liquid in the holding space 201 of the supply device 200, the supply amount of the polishing liquid output from the supply device 200 can be adjusted depending on the location. For example, when a large amount of polishing liquid is supplied to the center of the substrate, the polishing liquid is accumulated from the center side in the holding space 201. Further, the slits may be provided in the downstream side wall 212 so as to increase the amount of supply to the center of the substrate (see fig. 18A to C).

According to the present embodiment, the used polishing liquid is discharged from the primary side of the supply device 200, and new polishing liquid is supplied to the substrate from the secondary side, and polishing can be performed using only the new polishing liquid. This can improve polishing quality (polishing rate, in-plane uniformity, etc.). In addition, defects in the substrate due to the polishing process can also be suppressed. In addition, another structure for removing the used polishing liquid may be omitted.

(third embodiment)

Fig. 21 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus according to the third embodiment. Although the dresser and the sprayer are not shown, the dresser and the sprayer may be provided as needed. In the present embodiment, the supply device 200 collects at least a part of the used polishing liquid (used polishing liquid) SLu in the holding space 201 on the primary side, mixes the used polishing liquid SLu in the holding space 201 with the newly supplied polishing liquid (new polishing liquid) SLf, and outputs the mixture to the secondary side. In fig. 21, for convenience of explanation, the arrows of the new polishing liquid SLf and the used polishing liquid SLu indicate the polishing liquid output from the supply apparatus 200, but actually, a polishing liquid obtained by mixing the new polishing liquid SLf and the used polishing liquid SLu is output.

By recovering and reusing at least a part of the used polishing liquid SLu, the consumption amount of the polishing liquid can be further reduced. Further, according to the process, it is found that the polishing quality (polishing rate, in-plane uniformity, etc.) can be improved in some cases by mixing the used polishing liquid SLu with the new polishing liquid SLf and using the mixture for the polishing treatment. Therefore, according to the present embodiment, the consumption amount of the polishing liquid can be further reduced, and the polishing quality can be improved. In addition, defects in the substrate due to the polishing process can also be suppressed.

Fig. 22 is a sectional view of a supply device having a slit provided on the primary side. Fig. 23 is an example of a primary-side slit, and is a view seen from the direction of arrow XXIII in fig. 22. Fig. 24 is a plan view of the supply device for explaining the flow of recovering the polishing liquid. As shown in the figure, slits 232 and 233 for allowing the holding space 201 to communicate with the outside are provided in the side wall 211 on the primary side of the supply device 200. The slit 232 is a slit for collecting the used polishing liquid, and the used polishing liquid is collected into the holding space 201 through the slit 232 by the force of the rotation of the polishing table 20. The slit 233 is a slit for returning the polishing liquid overflowing the holding space 201 to the side wall 211 on the primary side, and thereby the used polishing liquid and the polishing liquid in the holding space 201 are mixed well. Only one of the slits 232 and 233 may be provided.

As shown in fig. 23, the slit 232 is disposed at the substantially center of the side wall 211 in the longitudinal direction and opens at the lower end edge of the side wall 211. The slits 233 are disposed on both sides of the slit 232, and the height increases as the distance from the slit 232 increases. The slits 232, 233 can be provided in any number, in any arrangement, in any height, in any shape, and in any size. A plurality of recovery slits 232 may be provided, or a single discharge slit 233 may be provided.

As shown in fig. 23 and 24, in the polishing process, the polishing liquid on the primary side (side wall 211) is collected toward the slit 232 located substantially at the center by the force of rotation of the polishing pad 100, and is collected through the slit 232.

In the polishing process, the new polishing liquid SLf and the recovered used polishing liquid SLu are present in a mixed state in the holding space 201, but a part of the polishing liquid in the mixed state is returned to the primary side via the slit 233. Therefore, in the supply device 200, the following process is repeatedly performed: a part of the polishing liquid in the holding space 201 is output to the secondary side and returned to the primary side via the slit 233, and the polishing liquid on the primary side (used polishing liquid, polishing liquid in the holding space 201) is collected into the holding space 201 via the slit 232. The amount of the polishing liquid to be discharged from the secondary side can be adjusted in the same manner as the structure described in the first embodiment.

Fig. 25 is a plan view showing an example of the shape of the supply device 200. In this example, the side walls 211 and 212 are each curved near the center. The center of the primary-side wall 211 is formed to be ahead in the rotation direction Rd of the polishing pad 100. The recovery amount of the polishing liquid can be adjusted by adjusting the shape and angle of the primary-side wall 211 (see fig. 25), the structure (number, arrangement, height, shape, and size) of the slits 231, and the pressing force of the pressing mechanism 250. In the example of fig. 25, the center of the secondary-side wall 212 is formed to be ahead in the rotation direction Rd of the polishing pad 100. As a result, as shown in fig. 24, the polishing liquid in the holding space 201 flows from both sides in the longitudinal direction of the holding space 201 toward the center, and is accumulated from the center side. Therefore, on the primary side of the supply device 200, the polishing liquid can be collected from the center, and on the secondary side, the output of the polishing liquid from the center can be increased.

The shape of the supply device 200 may be the shape described with reference to fig. 19A to C and 20A to C.

Fig. 26 is a sectional view of supply device 200 having a slit provided on the secondary side. In this example, no slit is provided in the side wall 211 on the primary side, and a slit 231 similar to that in fig. 18A to 18C is provided in the side wall 212 on the secondary side. The primary-side polishing liquid is collected by adjusting the pressing force of the pressing mechanism 250 against the sidewall 211. That is, the used polishing liquid is collected into the holding space 201 from the gap between the primary side wall 212 and the polishing surface 102. The recovery amount of the polishing liquid can be adjusted by adjusting the shape and angle of the primary-side wall 211 (see fig. 25) and the pressing force of the pressing mechanism 250. The amount of the polishing liquid to be discharged from the secondary side can be adjusted in the same manner as the structure described in the first embodiment.

Fig. 27 is a cross-sectional view of a supply device having slits provided on the primary side and the secondary side. In this example, the same slits as in fig. 23 are provided in the side wall 211 on the primary side, and the same slits 231 as in fig. 18A to 18C are provided in the side wall 212 on the secondary side. The adjustment of the recovery amount of the primary-side polishing liquid can be performed in the same manner as the configuration described in the example of fig. 26. The amount of the polishing liquid to be discharged from the secondary side can be adjusted in the same manner as the structure described in the first embodiment.

Further, the primary and secondary side walls 211 and 212 may be configured not to have slits. In this case, the amount of the polishing liquid to be recovered is adjusted by adjusting the pressing force of the pressing mechanism 250 against the side wall 211, and the amount of the polishing liquid to be supplied is adjusted by adjusting the pressing force of the pressing mechanism 250 against the side wall 212.

(fourth embodiment)

Fig. 28 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus 10 according to the fourth embodiment. Fig. 29 and 30 are cross-sectional views showing an example of the polishing liquid removing portion. Fig. 31 is a plan view showing an example of the polishing liquid removing portion. In the present embodiment, the polishing apparatus 10 includes a polishing liquid removing unit 300. The polishing liquid removing unit 300 includes a suction unit 310 and a cleaning unit 320. The suction unit 310 and the cleaning unit 320 may be integrally attached to each other or may be formed as a single block (fig. 29), or may be disposed at intervals as separate blocks (fig. 30).

The suction unit 310 has substantially the same configuration as the suction unit 56 of the polishing liquid removing unit 50 described with reference to fig. 3 and 7. As shown in fig. 28, the suction portion 310 has an elongated pad-like shape in a plan view. As shown in fig. 29, the suction unit 310 includes a suction space 312 that opens to the polishing surface 102, a slit 313 that opens to the suction space 312, and a flow path 314 that is connected to a vacuum source, not shown. The end of the suction portion 310 on the polishing surface 102 side is disposed to such an extent as to contact the polishing surface 102 or to such an extent as to contact the polishing liquid on the polishing surface 102. As in the example of fig. 3 and 7, the suction unit 310 may include a blocking unit 52 that blocks the polishing liquid on the polishing surface 102.

As shown in fig. 31, the cleaning unit 320 has side walls (scrapers) 325, 326, 327 surrounding three sides in a plan view, and a jet space 329 is provided by being surrounded by these side walls. In fig. 31, a part of the structure is omitted for convenience of explanation. As with the above-described dam 52, it is preferable that the side walls 325, 326, 327 be made of the same material as the dam 52 so that the polishing surface 102 is not damaged and chips of the side walls 325, 326, 327 themselves generated by contact with the polishing surface 102 do not remain on the polishing surface 102.

As shown in fig. 31, in the cleaning section 320, no side wall is provided on the radially outer side of the polishing pad 100, and an opening 328 is formed. The opening 328 opens the ejection space 329 radially outward. Through the opening 328, the cleaning liquid (DIW, HOT DIW) ejected from the cleaning liquid ejection nozzle 321 and the used cleaning liquid SL2 are discharged radially outward by the centrifugal force of the rotation of the polishing pad 100 (polishing table 20). Further, the side wall may be present at a part of the radially outer end portion within a range not to inhibit discharge of the polishing liquid. The sidewalls 325, 326, 327 are configured to be non-contacting or slightly contacting the abrasive surface 102. In addition, according to the process, since the polishing rate is decreased when the surface temperature of the polishing pad 100 is decreased, heated pure water (HOT DIW) may be used as the cleaning liquid. In addition, the temperature adjusting portions 60 and 60A described above or other temperature adjusting portions may be provided to adjust the temperature of the polishing surface 102. The temperature adjusting unit may be disposed downstream of the polishing liquid removing unit 300 and upstream of the top ring 30. The temperature adjusting unit can be disposed upstream or downstream of the polishing liquid supply units 40 and 200.

As shown in fig. 29, the cleaning unit 320 includes a cleaning liquid injection nozzle 321 disposed to inject a cleaning liquid toward the injection space 329, and a flow path block 322 having a flow path 323 communicating with the cleaning liquid injection nozzle 321 to supply the cleaning liquid. A cleaning liquid (DIW) is supplied from a fluid supply source (not shown) to the cleaning liquid ejection nozzle 321 via the flow path 323, and the cleaning liquid is ejected from the cleaning liquid ejection nozzle 321 toward the polishing surface 102 in the ejection space 329. The cleaning liquid spray nozzle 321 is installed so that the spray angle is orthogonal or inclined with respect to the polishing surface. The flow path block 322 may be formed integrally with the side walls 325, 326, 327 or may be formed separately. The used polishing liquid, by-products, and the like in the groove 101 of the polishing surface 102 are removed by the ejected cleaning liquid.

In the example of fig. 31, the nozzle jet port 340 of the cleaning liquid jet nozzle 321 has an elliptical or fan-like shape and is disposed obliquely at a predetermined angle with respect to the longitudinal direction of the cleaning portion 320. In the nozzle orifice of an elliptical or fan shape, the ejection flow rate of the central portion is large and the ejection flow rate of the end portion is small. Therefore, the end portions of the adjacent nozzle injection ports 340 are arranged so as to overlap each other in the longitudinal direction of the cleaning portion 320, and a uniform flow rate can be obtained over the entire area. As shown in fig. 33, the nozzle jet port 340 of the cleaning liquid jet nozzle 321 may be oriented to be inclined with respect to the polishing surface 102 and to face radially outward of the polishing surface 102. In this case, the cleaning liquid (DIW) and the used polishing liquid are easily discharged to the outside from the opening 328. In the example of fig. 32, the nozzle jet ports 340 of the cleaning liquid jet nozzle 321 are formed in an elliptical or fan shape, and are arranged in parallel to the longitudinal direction of the cleaning portion 320, the nozzle jet ports 340 are arranged differently from each other, and the end portions of the adjacent nozzle jet ports 340 are arranged so as to overlap each other in the longitudinal direction of the cleaning portion 320.

Fig. 34A to C are perspective views showing a configuration example of the polishing liquid removing unit. Fig. 34A is a perspective view of the polishing pad 100 as viewed from the outside. Fig. 34B is a perspective view of a state in which the cover of the suction unit 310 is removed. Fig. 34C is a perspective view of the polishing pad 100 viewed from the center side. In the configuration example shown in fig. 34A to C, the cleaning unit 320 has side walls 325, 326, 327 disposed on the upstream side and the downstream side in the rotation direction of the polishing table 20 and on the center side of the polishing table 20, and a flow path block 322 is disposed in the upper portion of the space surrounded by the side walls 325, 326, 327. An injection space 329 is formed below the flow path block 322. The injection space 329 is surrounded by the side walls 325, 326, 327 and the flow path block 322. The cleaning unit 320 is provided with an opening 328, without a side wall, on the outer peripheral side of the polishing table 20. The ejection space 329 is opened from the opening 328 on the outer peripheral side of the polishing table 20. A pipe 324 is connected to the flow path block 322, and a flow path 323 is provided in the pipe 324. The flow path 323 is connected to the nozzle jet port 340 (fig. 30) of the cleaning liquid jet nozzle 321 (fig. 29).

In the example of fig. 34A to C, the suction unit 310 includes a suction block 311 fixed to an arm 350 (see fig. 28). A suction space 312 (fig. 29 and 30) is formed in the suction block body 311. A pipe 316 is disposed on the arm 350, and one end of the pipe 316 is connected to a vacuum source, not shown, and the other end is connected to the suction block 311 via a connection block 315. The flow path 314 extends to the pipe 316, the connection block 315, and the suction block 311, and the flow path 314 is connected to a slit 313 (fig. 29 and 30) that opens into the suction space 312. A cover 318 is attached to an upper portion of the suction block 311 so as to cover the connection block 315 and the pipe 316. As in the above-described dam 52, it is preferable that the suction block 311 is made of the same material as the dam 52 so that the polishing surface 102 is not damaged and chips of the suction block 310 itself generated by contact with the polishing surface 102 do not remain on the polishing surface 102.

As shown in fig. 28, the polishing liquid removing unit 300 (the cleaning unit 320 and the suction unit 310) is attached to an arm 350 that can swing and move up and down, and can press the polishing surface 102 of the polishing pad 100. The arm 350 is mounted to a post outside the polishing table 20. For example, an air cylinder can be used as the lifting mechanism for moving the arm 350 up and down. In this case, the pressure of the drive fluid supplied to the air cylinder can be changed by a regulator (such as a proportional control valve) to control the pressing pressure against the polishing pad 100. Further, the weight (dead weight) of the mechanism attached to the arm can be eliminated, and the pressing pressure can be set to 0. The lifting mechanism is not limited to the cylinder, and may be a mechanism based on power of a motor or any other mechanism. The pressing mechanisms in the second and third embodiments may be used. The cleaning unit 320 and the suction unit 310 may be attached to different arms that can swing and move up and down.

According to the polishing liquid removing unit 300, the cleaning liquid is ejected from the cleaning liquid ejection nozzle 321 to the polishing surface in the ejection space 329 of the cleaning unit 320, the used polishing liquid and the by-products on the polishing surface are cleaned by the cleaning liquid, and the cleaning liquid is discharged radially outward through the opening 328 by the centrifugal force of the rotation of the polishing table. Next, in the suction portion 310, the cleaning liquid in the groove portion (pad groove, porous portion) on the polishing surface, which is difficult to be discharged by the centrifugal force in the cleaning portion 320, is removed by suction. This enables the removal of by-products and used polishing liquid on the polishing surface, and enables only new polishing liquid to be supplied onto the polishing surface by the polishing liquid supply mechanism (polishing liquid supply nozzles 40 and 200) disposed later. As a result, defects in the substrate can be prevented, and the polishing quality (polishing rate, in-plane uniformity, and the like) can be improved.

In the present embodiment, as shown in fig. 28, a dresser 90 and a sprayer 94 may be provided. The cleaning unit 320 of the polishing liquid removing unit 300 may be used as a sprayer, and the separate sprayer 94 may be omitted. The dresser 90 and the sprayer 94 may be omitted. In the above description, the case where the side wall is not provided on the radial outer end surface of the cleaning portion 320 has been described, but the side wall may be provided on the radial outer end surface so that the entire circumference of the ejection space 329 is surrounded by the side wall.

(fifth embodiment)

Fig. 35 is a perspective view showing the arrangement relationship of the respective components of the polishing apparatus according to the fifth embodiment. Fig. 36 is a plan view of the polishing liquid removing unit for explaining the discharge of the cleaning liquid. In the present embodiment, the polishing liquid removing portion 300 is configured to have a shape along the outer shape of the top ring 30 and is disposed outside the top ring 30. The polishing liquid removing unit 300 of the present embodiment is the same as the fourth embodiment except that the cleaning unit 320 and the suction unit 310 are formed in an arc shape. As in the fourth embodiment, an opening 328 (fig. 36) is provided at the end portion on the outer side in the radial direction of the cleaning portion 320. Therefore, as shown in fig. 36, the cleaning liquid ejected into the ejection space 329 of the cleaning section 320 is discharged to the outside of the polishing surface 102 through the opening 328 as indicated by an arc-shaped arrow. In the present embodiment, the cleaning liquid may be guided radially outward in the ejection space 329 by the centrifugal force of the polishing table 20, but the nozzle ejection port 340 of the cleaning liquid ejection nozzle 321 may be oriented to be inclined with respect to the polishing surface 102 and to face radially outward of the polishing surface 102 as shown in fig. 33. In this case, the cleaning liquid (DIW) and the used polishing liquid are easily discharged to the outside from the opening 328. The planar shape of the nozzle injection port 340 can be the same as that in fig. 31 and 32.

Fig. 37 and 38 are perspective views showing an example of a mounting structure of the polishing liquid removing portion. In the example of fig. 37, the polishing slurry removing unit 300 is attached to the support arm 34 of the top ring 30 via the elevation guide 35 and the bracket 37. One end of the shaft of the elevation guide 35 is fixed to the suction portion 310 of the polishing liquid removing portion 300, and the other end of the shaft of the elevation guide 35 is connected to the rod of the cylinder 36. The force with which the polishing liquid removing portion 300 is pressed against the polishing surface 102 is adjusted by the expansion and contraction of the rod of the air cylinder 36. One end of the shaft of the elevation guide 35 may be fixed to the cleaning part 320 of the polishing liquid removing part 300, or may be fixed to both the cleaning part 320 and the suction part 310.

In the example of fig. 38, the polishing liquid removing unit 300 is fixed to the rotation/elevation shaft 31a of the top ring 30 via a bracket 37 a. The bracket 37a can be fixed to the cleaning part 320 and/or the suction part 310. The rotation of the rotation/elevation shaft 31a is not transmitted to the bracket 37a by coupling the bracket 37a and the rotation/elevation shaft 31a via a rotation bearing and providing a rotation stop mechanism. In this configuration, the polishing liquid removing unit 300 fixed to the bracket 37a is moved up and down in synchronization with the up and down movement of the rotation/up-and-down shaft 31 a. Thereby, the polishing liquid removing portion 300 is pressed against the polishing surface 102.

According to this embodiment, the same operational effects as those of the fourth embodiment are obtained. Further, the used polishing liquid and by-products can be recovered by the polishing liquid removing unit 300 immediately after the polishing treatment. Further, since the polishing liquid removing portion 300 has a shape along the outer shape of the top ring 30, the polishing liquid removing portion 300 can be made more space-saving.

Further, as in the fourth embodiment, the opening 328 may be provided at the outer end in the radial direction of the cleaning portion 320, or the entire circumference may be surrounded by a sidewall. In the present embodiment, the dresser 90 and the sprayer 94 may be provided as in the example of fig. 28. The cleaning unit 320 of the polishing liquid removing unit 300 may be used as a sprayer, and the separate sprayer 94 may be omitted. The dresser 90 and the sprayer 94 may be omitted.

(sixth embodiment)

Fig. 39 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus according to the sixth embodiment. In this example, the polishing apparatus according to the second embodiment is provided with a polishing liquid removing unit 300. The polishing liquid removing unit 300 may have the same configuration as the polishing liquid removing unit 50 and the polishing liquid removing unit 300 according to the fourth or fifth embodiment, or another configuration. Instead of the supply device 200 according to the second embodiment, a slurry supply device described in japanese patent application laid-open No. 11-114811 (U.S. Pat. No. 6336850) may be combined with the polishing liquid removing unit 300 according to the fourth or fifth embodiment. All disclosures including the specification, the claimed range, the drawings and the abstract of japanese patent laid-open No. 11-114811 (U.S. Pat. No. 6336850) are incorporated herein by reference in their entirety.

Preferably, the polishing liquid removing unit 300 is disposed behind (downstream of) the top ring 30 and in front of (upstream of) the supply device 200 (slurry supply device). According to this embodiment, after the used polishing liquid is removed by the polishing liquid removing unit 300, the used polishing liquid is further discharged to the outside of the polishing pad 100 at the side wall 211 on the primary side of the supply device 200, and therefore, the used polishing liquid can be further prevented from being mixed into the polishing liquid discharged from the secondary side of the supply device 200.

In the present embodiment, the dresser 90 and the sprayer 94 may be provided as in the example of fig. 28. The cleaning unit 320 of the polishing liquid removing unit 300 may be used as a sprayer, and the separate sprayer 94 may be omitted. The dresser 90 and the sprayer 94 may be omitted.

The cleaning unit of the polishing liquid removing unit 300 may be omitted. In this case, the amount of the polishing liquid used can be reduced by setting the suction pressure and the pressing force of the suction portion 310 to optimum pressures for removing only the polishing liquid (abrasive grains) located in the groove portion (pad groove, porous portion) and having no effect on polishing, without completely removing the used polishing liquid on the polishing surface. The polishing liquid not removed by the suction unit 310 is discharged at the primary side of the supply apparatus 200.

(seventh embodiment)

Fig. 40 is a plan view showing the arrangement relationship of the respective components of the polishing apparatus according to the seventh embodiment. In this example, the polishing apparatus according to the second or third embodiment is provided with a temperature adjustment unit 400. The temperature adjustment unit 400 may have the same configuration as the temperature adjustment unit 60 (fig. 4 and the like) and the temperature adjustment unit 60A (fig. 8), or may have another configuration. Preferably, the temperature adjusting unit 400 is disposed behind (downstream of) the top ring 30 and in front of (upstream of) the supply device 200. In addition, the temperature adjustment unit 400 may be controlled based on the temperature detected by the temperature sensor 68, as described above. According to this embodiment, since the temperature of the polishing surface 102 can be adjusted, the polishing quality can be improved.

When the temperature adjustment unit 400 is provided in the polishing apparatus according to the second embodiment, the polishing liquid removal unit 300 described above may be provided. In this case, it is preferable that the supply device 200, the top ring 30, the polishing liquid removing unit 300, and the temperature adjusting unit 400 are disposed in this order. In this case, the temperature adjustment unit 400 can adjust the temperature of the polishing surface 102 in a state where the polishing liquid that can serve as a heat insulating layer is removed, and can improve the efficiency of temperature adjustment of the polishing surface 102.

The supply device 200, the temperature adjustment unit 400, the top ring 30, and the polishing liquid removal unit 300 may be arranged in this order. In this case, the temperature of the polishing surface can be adjusted to the optimum temperature for polishing immediately before the polishing treatment.

In the present embodiment, the dresser 90 and the sprayer 94 may be provided as in the example of fig. 28. The cleaning unit 320 of the polishing liquid removing unit 300 may be used as a sprayer, and the separate sprayer 94 may be omitted. The dresser 90 and the sprayer 94 may be omitted.

At least the following aspects can be understood from the above embodiments.

According to a first aspect, a polishing apparatus for polishing an object to be polished by using a polishing pad having a polishing surface, includes: a polishing table configured to be rotatable and configured to support the polishing pad; a substrate holding section for holding an object to be polished and pressing the object to be polished against the polishing pad; and a polishing liquid removing portion for removing the polishing liquid from the polishing surface, the polishing liquid removing portion including a flushing portion for spraying a cleaning liquid onto the polishing surface and a suction portion for sucking the polishing liquid on the polishing surface sprayed with the cleaning liquid, the flushing portion including a cleaning space surrounded by a side wall, the side wall including an opening portion for opening the cleaning space radially outward of the polishing table.

According to this aspect, the polishing surface is cleaned while the used cleaning liquid is discharged to the outside of the polishing pad in the cleaning space surrounded by the side wall of the rinsing section (cleaning section), and the polishing liquid on the polishing surface is sucked and removed in the suction section, so that the removal performance of the polishing liquid on the polishing surface can be improved. In addition, since the cleaning liquid is sprayed onto the polishing surface in the cleaning space surrounded by the side wall, scattering of the cleaning liquid can be suppressed. Further, since the used cleaning liquid is discharged from the radially outer side wall opening during cleaning, the amount of the polishing liquid sucked into the suction portion can be significantly reduced. This reduces the burden of suction by the suction unit.

According to a second aspect, in the polishing apparatus of the first aspect, the flushing part and the suction part are configured as an integral block or are disposed adjacent to each other. According to this aspect, the polishing liquid removing unit can be disposed in a space-saving manner. Further, since the flushing part is close to the suction part, the abrasive grains, by-products, and the like released from the groove part (pad groove, porous part, and the like) of the polishing surface by the cleaning can be more reliably sucked in the suction part.

According to a third aspect, in the polishing apparatus according to the first or second aspect, the polishing liquid removing portion is disposed outside the substrate holding portion along an outer shape of the substrate holding portion. According to this aspect, the used polishing liquid on the polishing surface immediately after the polishing treatment can be efficiently removed. Further, since the polishing liquid removing portion is provided along the outer shape of the substrate holding portion, the polishing liquid removing portion can be disposed in a space-saving manner.

According to a fourth aspect, the polishing apparatus according to the third aspect further includes a support arm that supports the substrate holding portion, and the polishing liquid removing portion is fixed to the support arm. According to this aspect, a rotation mechanism and/or an elevation mechanism for separately providing the polishing liquid removing unit is not required.

According to a fifth aspect, the polishing apparatus according to the third aspect further comprises an elevation shaft for elevating the substrate holding portion, wherein the polishing liquid removing portion is fixed to the elevation shaft. According to this aspect, a rotation mechanism and/or an elevation mechanism for separately providing the polishing liquid removing unit is not required.

According to a sixth aspect, in the polishing apparatus according to any one of the third to fifth aspects, the polishing liquid removing portion has an arc shape. According to this aspect, the polishing liquid removing portion can be provided along the outer shape of the circular substrate holding portion, and therefore the polishing liquid removing portion can be disposed in a space-saving manner.

According to a seventh aspect, the polishing apparatus according to any one of the first to sixth aspects further comprises a pressing mechanism that presses the flushing part and/or the suction part against the polishing surface. According to this aspect, in the flushing portion, the cleaning liquid or the like in the cleaning space can be prevented from flowing out to the outside of the opening portion. In addition, the suction portion can be pressed against the polishing surface in order to perform satisfactory suction of the cleaning liquid in the suction portion.

According to an eighth aspect, the polishing apparatus according to any one of the first to seventh aspects further comprises a temperature adjusting unit disposed downstream of the polishing liquid removing unit in a rotation direction of the polishing table. According to this aspect, the temperature adjustment unit can adjust the temperature of the polishing surface in a state where the polishing liquid that can serve as the heat insulating layer is removed, and the efficiency of adjusting the temperature of the polishing surface can be improved.

According to a ninth aspect, the polishing apparatus according to any one of the first to eighth aspects further comprises a supply device for supplying a polishing liquid to the polishing surface in a state of being pressed against the polishing pad. According to this aspect, after the used polishing liquid is removed by the polishing liquid removing unit, the used polishing liquid can be further discharged by the supply device (supply pad), and thus the used polishing liquid can be more completely removed.

According to a tenth aspect, there is provided a polishing method for polishing an object to be polished by pressing the object to be polished against a polishing pad while rotating a polishing table on which the polishing pad is mounted, the polishing method including the steps of: preparing a polishing liquid removing part having a rinsing part and a suction part; spraying a cleaning liquid onto the polishing surface of the polishing pad by using the washing section; discharging the sprayed cleaning liquid from an opening that opens radially outward of the polishing table at a side wall of the cleaning section; the polishing liquid on the polishing surface on which the cleaning liquid is ejected is sucked by the suction unit. According to this embodiment, the same effects as those of the first embodiment are obtained.

While the embodiments of the present invention have been described above, the above-described embodiments of the present invention are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The present invention can be modified and improved without departing from the scope of the invention, and it is needless to say that the present invention includes equivalent inventions. In addition, any combination of the embodiments and the modifications is possible within a range in which at least a part of the above-described problems can be solved or within a range in which at least a part of the effects can be obtained, and any combination or omission of the claimed range and each component described in the specification is possible.

The present invention claims priority based on japanese patent application No. 2018-147917, filed on 8/6 of 2018. The entire disclosure including the specification of japanese patent application No. 2018-147917, filed on 8/6 of 2018, the scope of the claims, the drawings and the abstract are incorporated herein by reference in their entirety. The entire disclosures including the specifications, claims, abstracts and drawings of japanese patent application laid-open No. 2001-150345 (patent document 1), japanese patent No. 4054306 (patent document 2), japanese patent application laid-open No. 2008-194767 (patent document 3) and us patent publication No. 2016/0167195 (patent document 4) are incorporated herein by reference in their entirety.