阅读说明：本技术 一种用于方棒中转的机械手装置 (Manipulator device for transferring square rods ) 是由 吴广忠 张笑笑 赵晓 东野广俊 王勇 宋培林 解培玉 于 2019-12-04 设计创作，主要内容包括：本发明涉及一种用于方棒中转的机械手装置,属于半导体晶硅加工设备领域,包括中转框架,所述中转框架上滑动连接有抓手支架组件,所述抓手支架组件的下方滑动连接有抓手基板组件,所述抓手基板组件的下部设有至少一组方棒夹持单元,所述方棒夹持单元与所述抓手基板组件滑动连接,在夹持方棒的同时实现在X轴、Y轴和Z轴三个垂直正交方向上的位置调节,能够抓取不同长度和宽度的方棒,具有重复定位精度高、适用范围广泛的特点。(The invention relates to a manipulator device for transferring square rods, which belongs to the field of semiconductor crystal silicon processing equipment and comprises a transfer frame, wherein a gripper support assembly is connected onto the transfer frame in a sliding manner, a gripper substrate assembly is connected below the gripper support assembly in a sliding manner, at least one group of square rod clamping units are arranged at the lower part of the gripper substrate assembly and are connected with the gripper substrate assembly in a sliding manner, the square rods are clamped, position adjustment in three vertical orthogonal directions of an X axis, a Y axis and a Z axis is realized, the square rods with different lengths and widths can be grabbed, and the manipulator device has the characteristics of high repeated positioning precision and wide application range.)

1. The utility model provides a manipulator device for square bar transfer, its characterized in that, includes transfer frame (1), sliding connection has tongs bracket component (2) on transfer frame (1), the below sliding connection of tongs bracket component (2) has tongs base plate subassembly (3), the lower part of tongs base plate subassembly (3) is equipped with at least a set of square bar clamping unit (4), square bar clamping unit (4) with tongs base plate subassembly (3) sliding connection realizes the position control in the three perpendicular orthogonal direction of X axle, Y axle and Z axle when centre gripping square bar.

2. The manipulator device for square bar transfer of claim 1, wherein the gripper bracket assembly (2) comprises a first lead screw (201), a gripper fixing plate (202) and a transfer motor (204), the first lead screw (201) is arranged along the Y axis, the gripper fixing plate (202) is fixedly connected with the first lead screw (201), two substrate fixing blocks (203) are fixedly arranged below the gripper fixing plate, the substrate fixing blocks (203) are located in an X, Z plane perpendicular to the Y axis, the output end of the transfer motor (204) is connected with the first lead screw (201), and the gripper fixing plate (202) is driven to move along the Y axis.

3. The manipulator device for transferring square rods according to claim 2, wherein a second sliding rail (2031) is disposed on the substrate fixing block (203), the second sliding rail (2031) is inclined in the X, Z plane, and the gripper substrate assembly (3) is slidably connected to the substrate fixing block (203) through the second sliding rail (2031).

4. The manipulator device for transferring square rods according to claim 3, wherein the gripper base plate assembly (3) comprises a gripper base plate (301), a base plate connecting block (302) and a base plate driving assembly (304), the base plate connecting block (302) is fixedly arranged on the upper portion of the gripper base plate (301) and is in sliding fit with the second sliding rail (2031), the base plate driving assembly (304) drives the gripper base plate (301) to slide along the second sliding rail (2031), a third sliding rail (303) is arranged on the lower bottom surface of the gripper base plate (301), and the third sliding rail (303) is arranged along the Y axis.

5. The manipulator device for transferring square rods according to claim 4, wherein the square rod clamping unit (4) comprises a push plate assembly (401), a square rod fixing assembly (402) and a buffer assembly (403), the upper part of the push plate assembly (401) is in sliding fit with the third slide rail (303), the lower part of the push plate assembly is provided with the square rod fixing assembly (402), and the buffer assembly is arranged on the push plate assembly (401) and is fixedly connected with the square rod fixing assembly (402).

6. The manipulator device for square bar transfer of claim 5, wherein the push plate assembly (401) comprises two push plates (4011) which are arranged oppositely, the upper parts of the push plates (4011) are slidably connected with a third slide rail (303), the inner sides of the two push plates (4011) are provided with a fourth slide rail (4013), the fourth slide rail (4013) is arranged along the X axis, a push plate lead screw (4012) is fixedly arranged between the two push plates (4011), and the push plate lead screw (4012) pushes the push plates (4011) to slide along the third slide rail (303).

7. The manipulator device for transferring the square rods as claimed in claim 6, wherein the square rod fixing assembly (402) comprises a fixed block (4021) of a grabbing plate and a grabbing plate (4022) fixedly connected with the fixed block (4021) of the grabbing plate, the fixed block (4021) of the grabbing plate is in sliding fit with the fourth slide rail (4013), the grabbing plates (4022) on the two push plates (4011) are arranged oppositely, and a groove (4023) for accommodating the square rods is formed in the grabbing plate (4022).

8. The manipulator device for transfer of square rods as claimed in claim 7, wherein said groove (4023) is provided with an elastic material for protecting the square rods from mechanical damage.

9. The manipulator device for square bar transfer of any one of claims 6-8, wherein the buffer assembly comprises a first fixed block (4031) and a second fixed block (4032) which are arranged at intervals, the first fixed block (4031) and the second fixed block (4032) are positioned on the same straight line, a buffer screw (4034) is fixedly arranged between the first fixed block and the second fixed block, a buffer spring (4033) is sleeved outside the buffer screw (4034), and the first fixed block (4031) and the second fixed block (4032) are fixedly connected with the fixed block (4021) of the gripping plate and the push plate (4011) respectively.

10. The robot apparatus for transferring square rods according to claim 9, wherein the buffer spring (4033) is disposed in parallel with the fourth slide rail (4013).

Technical Field

The invention belongs to the field of semiconductor crystal silicon processing equipment, and particularly relates to a manipulator device for transferring a square rod.

Background

In the photovoltaic industry, the processing of crystalline silicon involves preparation, ingot casting, edge skin cutting, squaring, surface grinding, polishing, chamfering, slicing, cells, components, and the like. After the squaring procedure, the silicon rod is changed from a cylindrical shape to a square shape. In order to remove the defects in the silicon rod processing process and reduce the waste chip rate, the silicon rod is ground after cutting and before slicing. In the grinding process, the silicon rod needs to be clamped and transferred, in the transferring process, if the deviation of the silicon rod is large, the removing allowance of the silicon rod in the grinding process can be increased, the processing time is prolonged, the processing efficiency is influenced, and in the serious process, waste rods can be caused. Therefore, the deviation of the square rod in the clamping process is effectively reduced, and the improvement of the clamping precision of the square rod has important significance for the subsequent processing of the square rod.

Disclosure of Invention

Aiming at various defects in the prior art, the invention provides the manipulator device for transferring the square rod, which can realize the position adjustment of three vertical orthogonal directions of an X axis, a Y axis and a Z axis, has high clamping precision, reduces the influence caused by secondary clamping to the maximum extent, and ensures the processing efficiency of the square rod.

In order to achieve the purpose, the invention provides the following technical scheme:

the utility model provides a manipulator device for square rod transfer, includes the transfer frame, sliding connection has the tongs bracket component on the transfer frame, sliding connection has tongs base plate subassembly in the below of tongs bracket component, the lower part of tongs base plate subassembly is equipped with at least a set of square rod clamping unit, square rod clamping unit with tongs base plate subassembly sliding connection realizes the position control in the three perpendicular orthogonal direction of X axle, Y axle and Z axle when the centre gripping square rod.

Further, the gripper bracket assembly comprises a first lead screw, a gripper fixing plate and a transfer motor, the first lead screw is arranged along the Y axis, the gripper fixing plate is fixedly connected with the first lead screw, two substrate fixing blocks are fixedly arranged below the gripper fixing plate, the substrate fixing blocks are located in an X, Z plane vertical to the Y axis, the output end of the transfer motor is connected with the first lead screw, and the gripper fixing plate is driven to move along the Y axis.

Furthermore, a second slide rail is arranged on the substrate fixing block, the second slide rail is obliquely arranged in the X, Z plane, and the gripper substrate assembly is connected with the substrate fixing block in a sliding mode through the second slide rail.

Further, the gripper base plate assembly comprises a gripper base plate, a base plate connecting block and a base plate driving assembly, the base plate connecting block is fixedly arranged on the upper portion of the gripper base plate and is in sliding fit with the second sliding rail, the base plate driving assembly drives the gripper base plate to slide along the second sliding rail, a third sliding rail is arranged on the lower bottom surface of the gripper base plate, and the third sliding rail is arranged along the Y axis.

Further, the square bar clamping unit comprises a push plate assembly, a square bar fixing assembly and a buffering assembly, the upper portion of the push plate assembly is in sliding fit with the third sliding rail, the lower portion of the push plate assembly is provided with the square bar fixing assembly, and the buffering assembly is arranged on the push plate assembly and fixedly connected with the square bar fixing assembly.

Further, the push pedal subassembly includes the push pedal of two relative settings, the upper portion and the third slide rail sliding connection of push pedal, and the inboard of two push pedals all is provided with the fourth slide rail, the fourth slide rail sets up along the X axle, sets firmly the push pedal lead screw between two push pedals, and the push pedal lead screw promotes the push pedal and slides along the third slide rail.

Further, the square rod fixing component comprises a grabbing plate fixing block and a grabbing plate fixedly connected with the grabbing plate fixing block, the grabbing plate fixing block is in sliding fit with the fourth sliding rail, the grabbing plates located on the two pushing plates are arranged oppositely, and a groove for accommodating the square rod is formed in the grabbing plate.

Further, the groove is provided with an elastic material for protecting the square bar from mechanical damage.

Further, the buffering subassembly includes first fixed block and the second fixed block that the interval set up, first fixed block and second fixed block are located same straight line and have set firmly the buffering screw between the two, just the buffering screw overcoat is equipped with buffer spring, first fixed block and second fixed block link firmly with grabbing board fixed block and push pedal respectively.

Further, buffer spring and fourth slide rail parallel arrangement.

The invention has the beneficial effects that:

1. the second slide rail sets up in the X, Z plane at base plate fixed block place, and the slope of second slide rail sets up, consequently, when tongs base plate subassembly slides along the second slide rail, can produce along the displacement component of two directions of X axle and Z axle, and square bar clamping unit can slide along the third slide rail, realizes the displacement adjustment of Y axle direction, can realize the position adjustment in the three perpendicular orthogonal direction of X axle, Z axle and Y axle through the device, and the precision of location obtains greatly improving.

2. The gripper bracket assembly is connected with the transfer frame in a sliding mode through the first lead screw, and the first lead screw is arranged along the Y-axis direction, so that the position of the gripper bracket assembly in the Y-axis direction can be adjusted.

3. Be provided with the push pedal lead screw between two push pedals, the square bar of interval in order to centre gripping different width between two adjustable push pedals, application scope is wide.

4. Be provided with in the push pedal and grab the board, grab and be provided with the recess on the board, and the longitudinal section of recess becomes the right angle, can effectual centre gripping and fixed square bar, prevents the slippage.

5. The groove surface of the groove is provided with the elastic material, so that the square rod can be effectively protected from mechanical damage.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic diagram of the present invention except that the transfer frame is shown;

fig. 3 is a schematic structural view of the buffer assembly.

In the drawings:

1-a relay frame;

2-a gripper bracket assembly, 201-a first lead screw, 2011-a first slide rail, 202-a gripper fixing plate, 203-a substrate fixing block, 2031-a second slide rail and 204-a transfer motor;

3-a gripper substrate assembly, 301-a gripper substrate, 302-a substrate connecting block, 303-a third slide rail and 304-a substrate driving assembly;

the device comprises a 4-square rod clamping unit, a 401-push plate assembly, a 4011-push plate, a 4012-push plate screw rod, a 4013-fourth slide rail, a 4014-screw rod pushing motor, a 402-square rod fixing assembly, a 4021-grabbing plate fixing block, a 4022-grabbing plate, a 4023-groove, a 403-buffer assembly, a 4031-first fixing block, a 4032-second fixing block, a 4033-buffer spring and a 4034-buffer screw.

Detailed Description

In order to make the technical solutions of the present invention better understood, the following description of the technical solutions of the present invention with reference to the accompanying drawings of the present invention is made clearly and completely, and other similar embodiments obtained by a person of ordinary skill in the art without any creative effort based on the embodiments in the present application shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.

The invention is further described with reference to the drawings and the preferred embodiments.

As shown in fig. 1, a manipulator device for transferring square rods comprises a transfer frame 1, wherein a gripper support assembly 2 is arranged on the transfer frame 1, the gripper support assembly 2 is connected with the transfer frame 1 in a sliding manner, a gripper substrate assembly 3 is connected below the gripper support assembly 2 in a sliding manner, at least one group of square rod clamping units 4 are arranged on the lower portion of the gripper substrate assembly 3, the square rod clamping units 4 are connected with the gripper substrate assembly 3 in a sliding manner, and position adjustment in three perpendicular orthogonal directions of an X axis, a Y axis and a Z axis is realized while clamping the square rods.