阅读说明：本技术 一种磁控溅射中卷绕式纤维镀膜装置 (Winding type fiber film coating device in magnetron sputtering ) 是由 马毅 谢续友 黄先伟 俞越翎 张泰华 于 2019-12-05 设计创作，主要内容包括：一种磁控溅射中卷绕式纤维镀膜装置,包括纤维丝线、真空腔体、升降台及靶材支座,所述真空腔体内部在位于靶材支座一侧的位置处设有放卷装置,另一侧的位置处设有收卷装置,所述真空腔体内部在靠近放卷装置位置设有左丝架,真空腔体内部在靠近收卷装置位置设有右丝架,所述纤维丝线从放卷装置放出后在左丝架及右丝架之间进行展开后由收卷装置进行收卷。本发明的有益效果是：该装置设计结构简单合理,使用方便,应用本装置为纤维线进行磁控溅射镀膜,纤维丝线在滑轮之间绕动,纤维丝线有效镀膜的行程增加,使得纤维丝线的表面得到充分镀膜,保证了纤维镀膜的全面性与均匀性,也保证了镀膜的效率。(The utility model provides a roll up formula fibre coating film device in magnetron sputtering, includes fibre silk thread, vacuum chamber, elevating platform and target support, the inside position department that is located target support one side of vacuum chamber is equipped with unwinding device, and the position department of opposite side is equipped with the coiling mechanism, the inside left bank of filaments that is close to unwinding device position that is equipped with of vacuum chamber, the inside right bank of filaments that is close to coiling mechanism position that is equipped with of vacuum chamber, the fibre silk thread is followed unwinding device and is followed the back and expand the back and carry out the rolling by the coiling mechanism between left bank of filaments and right bank of filaments. The invention has the beneficial effects that: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating film for the fibre line, and the fibre silk thread moves around between the pulley, and the effective coating film's of fibre silk thread stroke increases for the surface of fibre silk thread obtains abundant coating film, has guaranteed the comprehensive and the homogeneity of fibre coating film, has also guaranteed the efficiency of coating film.)

1. The utility model provides a roll up formula fibre coating film device in magnetron sputtering, its characterized in that includes fibre silk thread (11), vacuum chamber (14), elevating platform (2) and target support (12), its characterized in that, vacuum chamber (14) inside is equipped with unwinding device in the position department that is located target support (12) one side, and the position department of opposite side is equipped with coiling mechanism, vacuum chamber (14) inside is equipped with left bank of wires (3) near unwinding device position, and vacuum chamber (14) inside is equipped with right bank of wires (15) near coiling mechanism position, fibre silk thread (11) are rolled up by coiling mechanism after launching between left bank of wires (3) and right bank of wires (15) after unreeling from unwinding device.

2. The winding type fiber coating device in magnetron sputtering according to claim 1, wherein the unwinding device comprises a motor (10), a support seat (6), a pinion (9), a gearwheel (8), a transmission shaft (7), a winding drum (4) and the support seat (6), the pinion (9) is arranged on the motor, the pinion (9) is meshed with the gearwheel (8), the transmission shaft (7) is arranged on the support seat (6) in a penetrating manner, and one end of the transmission shaft is connected with the gearwheel (8) while the other end is connected with the winding drum (4).

3. The winding type fiber coating device in magnetron sputtering as claimed in claim 1, wherein the unwinding device comprises a support base (6), a transmission shaft (7), a wire unwinding reel (16) and the support base (6), the transmission shaft (7) is arranged on the support base (6) in a penetrating way, and one end of the transmission shaft is connected with the reel (4).

4. The winding type fiber coating device in magnetron sputtering as claimed in claim 1, wherein the left lead frame comprises a support frame (17), a small pulley II (18), a large pulley VIII (19), a large pulley VI (20), a large pulley II (21), a large pulley IV (22) and a wire outlet through hole, the wire outlet through hole is formed in the support frame (17), the large pulley VIII (19) and the large pulley IV (22) are arranged above and below the wire outlet through hole, the large pulley VI (20) and the large pulley II (21) are arranged in the front and rear positions of the wire outlet through hole, and the small pulley II (18) is arranged above the wire outlet through hole.

5. The winding type fiber coating device in magnetron sputtering as claimed in claim 1, wherein the right guide frame comprises a support frame (17), a large pulley VII (23), a large pulley V, a large pulley III (25), a large pulley V (24), a large pulley I (26), a small pulley I (27) and an incoming line through hole, the incoming line through hole is arranged on the support frame (17), the large pulley VII (23) and the large pulley III (25) are arranged at positions above and below the incoming line through hole, the large pulley V (24) and the large pulley I (26) are arranged at positions in front of and behind the incoming line through hole, and the small pulley I (27) is arranged at a position in front of the incoming line through hole.

Technical Field

The invention relates to the technical field of vacuum magnetron sputtering coating, in particular to a winding type fiber coating device in magnetron sputtering.

Background

The fiber coating has great value in practical application, the metal-plated fiber is a composite fiber taking metal as a sheath and non-metal fiber as a core, and the metal-plated fiber can be divided into the following parts according to the metal of the coating: the composite fiber has the advantages of keeping the flexibility and mechanical property of the original core fiber, along with the reflection performance and conductivity to electromagnetic waves and infrared rays, prolonging the service life and the like according to different coatings. For example, the metal-plated glass fiber has good electromagnetic wave reflection performance, so the metal-plated glass fiber is used as an interference wire for resisting radar in military, and the silver-plated glass fiber can be welded and can be used as a lead; the aluminized glass fiber can reflect a large amount of heat energy and can be used as high-temperature protective clothing and the like.

In the prior art, the fiber is coated with a film by an electrochemical method, but when the fiber is coated with aluminum by the method, pollution is easily caused, and the aluminum film is not very dense. The magnetron sputtering related to the device is one of physical vapor deposition, has the advantage of strong film adhesion and has no pollution to the environment. However, because the fiber is fine, it is difficult to ensure that the surface of the fiber can be completely and uniformly coated in the magnetron sputtering coating process, and therefore, how to ensure the completeness and uniformity of the coating becomes a technical problem to be solved in the present invention.

Disclosure of Invention

In view of the above problems in the prior art, an object of the present invention is to provide a winding fiber coating apparatus in magnetron sputtering, which can improve the overall and uniformity of the coating.

The technical scheme of the invention is as follows:

the winding type fiber film coating device in magnetron sputtering is characterized by comprising a fiber silk thread, a vacuum cavity, a lifting table and a target support, wherein an unwinding device is arranged at a position on one side of the target support inside the vacuum cavity, a winding device is arranged at a position on the other side of the target support, a left silk frame is arranged at a position close to the unwinding device inside the vacuum cavity, a right silk frame is arranged at a position close to the winding device inside the vacuum cavity, and the fiber silk thread is unwound between the left silk frame and the right silk frame and then wound by the winding device after being discharged from the unwinding device.

A roll up formula fibre coating film device in magnetron sputtering, a serial communication port, unwinding device includes motor, supporting seat, pinion, gear wheel, transmission shaft, receipts silk reel and supporting seat, the pinion sets up on the motor, and pinion and gear wheel meshing set up, the transmission shaft is worn to establish on the supporting seat, and its one end links to each other with the gear wheel, and the other end links to each other with the reel.

The winding type fiber film coating device in magnetron sputtering is characterized in that the unwinding device comprises a supporting seat, a transmission shaft, a wire unwinding winding drum and a supporting seat, the transmission shaft penetrates through the supporting seat, and one end of the transmission shaft is connected with the winding drum.

The winding type fiber coating device in magnetron sputtering is characterized in that the left lead frame comprises a support frame, a small pulley II, a large pulley VIII, a large pulley VI, a large pulley II, a large pulley IV and a lead-out through hole, the lead-out through hole is formed in the support frame, the large pulley VIII and the large pulley IV are arranged on the upper portion and the lower portion of the lead-out through hole, the large pulley VI and the large pulley II are arranged on the front portion and the rear portion of the lead-out through hole, and the small pulley II is arranged on the upper portion of the lead-out through hole.

The utility model provides a coiling formula fibre coating film device in magnetron sputtering, a serial communication port, right side silk frame includes support frame, big pulley VII, big pulley V, big pulley III, big pulley V, big pulley I, small pulley I and inlet wire through-hole, the inlet wire through-hole sets up on the support frame, big pulley VII and big pulley III set up position department about the inlet wire through-hole, big pulley V sets up in inlet wire through-hole front and back position department with big pulley I, small pulley I sets up in inlet wire through-hole dead ahead position department.

The invention has the beneficial effects that: the device design simple structure is reasonable, and convenient to use uses this device to carry out magnetron sputtering coating film for the fibre line, and the fibre silk thread moves around between the pulley, and the stroke of the effective coating film of fibre silk thread increases for the surface of fibre silk thread obtains abundant coating film, has guaranteed the comprehensiveness and the homogeneity of fibre coating film, has also guaranteed the efficiency of coating film, has important meaning to the manufacturing field of fibre coating film.

Drawings

FIG. 1 is a schematic view of the installation of the present invention;

FIG. 2 is a partial block diagram of the present invention;

FIG. 3 is a view of the construction of the wire frame of the present invention;

FIG. 4 is a schematic view of a left creel of the present invention;

FIG. 5 is a schematic view of a right frame of the present invention;

in the figure: 1-sealing cover, 2-lifting platform, 3-left wire frame, 4-wire winding reel, 5-supporting bearing, 6-supporting seat, 7-transmission shaft, 8-big gear, 9-small gear, 10-motor, 11-fiber silk thread, 12-target support, 13-target, 14-cavity, 15-right wire frame, 16-wire unwinding reel, 17-supporting frame, 18-small pulley II, 19-big pulley VIII, 20-big pulley VI, 21-big pulley II, 22-big pulley IV, 23-small pulley VII, 24-big pulley V, 25-big pulley III, 26-big pulley I and 27-small pulley I.

Detailed Description

The technical scheme of the invention is further described by combining the attached drawings of the specification:

as shown in fig. 1-5, a winding type fiber coating device in magnetron sputtering comprises a sealing cover 1, a lifting table 2, a left wire frame 3, a wire winding drum 4, a supporting bearing 5, a supporting seat 6, a transmission shaft 7, a large gear 8, a small gear 9, a motor 10, a fiber wire 11, a target support 12, a target 13, a vacuum cavity 14, a right wire frame 15, a wire unwinding drum 16, a supporting frame 17, a small pulley II 18, a large pulley VIII 19, a large pulley VI 20, a large pulley II 21, a large pulley IV 22, a small pulley VII 23, a large pulley V24, a large pulley III 25, a large pulley I26 and a small pulley I27.