阅读说明：本技术 半导体器件及其制造方法
(Semiconductor device and method for manufacturing the same
) 是由 司空炫哲
裵相友
崔琦铉
朴浚均
郑旭珍 于 2019-04-29 设计创作，主要内容包括：提供半导体器件。半导体器件包括：衬底；第一鳍型图案和第二鳍型图案,其从衬底的上表面突出并彼此隔开；第一鳍型图案上的第一半导体图案；第二鳍型图案上的第二半导体图案；和第一半导体图案和第二半导体图案之间的阻挡图案,第一半导体图案的一部分插入到阻挡图案中。(A semiconductor device is provided. The semiconductor device includes: a substrate; a first fin pattern and a second fin pattern protruding from an upper surface of the substrate and spaced apart from each other; a first semiconductor pattern on the first fin pattern; a second semiconductor pattern on the second fin pattern; and a barrier pattern between the first semiconductor pattern and the second semiconductor pattern, a portion of the first semiconductor pattern being inserted into the barrier pattern.)
1. A semiconductor device, comprising:
a substrate;
a first fin pattern and a second fin pattern protruding from an upper surface of the substrate and spaced apart from each other;
a first semiconductor pattern on the first fin pattern;
a second semiconductor pattern on the second fin pattern; and
a barrier pattern between the first semiconductor pattern and the second semiconductor pattern,
a portion of the first semiconductor pattern is inserted into the barrier pattern.
2. The semiconductor device of claim 1, further comprising:
a field insulating film on the substrate, the field insulating film wrapping at least a portion of each of the first and second fin patterns; and
an interlayer insulating film disposed on the field insulating film and covering the first semiconductor pattern and the second semiconductor pattern,
wherein the barrier pattern is disposed in the interlayer insulating film and extends to an upper surface of the field insulating film.
3. The semiconductor device of claim 1, further comprising:
a field insulating film on the substrate, the field insulating film wrapping at least a portion of each of the first and second fin patterns; and
an interlayer insulating film disposed on the field insulating film and covering the first semiconductor pattern and the second semiconductor pattern,
the barrier pattern is disposed in the interlayer insulating film and is disposed to be spaced apart from an upper surface of the field insulating film.
4. The semiconductor device of claim 1, wherein the first and second fin patterns extend along a first direction,
the semiconductor device further includes:
a first gate structure on the first fin pattern extending in a second direction different from the first direction; and
a second gate structure on the second fin pattern extending along the second direction and spaced apart from the first gate structure;
the first semiconductor pattern is disposed on at least one side of the first gate structure,
the second semiconductor pattern is disposed on at least one side of the second gate structure, an
The blocking pattern extends in the first direction between the first gate structure and the second gate structure.
5. The semiconductor device of claim 4, wherein the blocking pattern is spaced apart from the second gate structure.
6. The semiconductor device of claim 4, wherein a portion of the first gate structure is inserted into the barrier pattern, and
the blocking pattern contacts the second gate structure.
7. The semiconductor device of claim 4, further comprising:
a first transistor including the first gate structure and the first semiconductor pattern, an
A second transistor including the second gate structure and the second semiconductor pattern,
wherein the first transistor and the second transistor are different types of transistors.
8. The semiconductor device of claim 4, further comprising:
a first transistor including the first gate structure and the first semiconductor pattern, an
A second transistor including the second gate structure and the second semiconductor pattern,
wherein the first transistor and the second transistor are the same type of transistor.
9. The semiconductor device of claim 1, wherein the first and second fin patterns extend along the first direction,
the semiconductor device further includes:
a gate structure on the first and second fin patterns extending in a second direction different from the first direction,
wherein the first semiconductor pattern, the second semiconductor pattern, and the blocking pattern are disposed on one side of the gate structure.
10. The semiconductor device of claim 9, wherein the gate structure comprises a first portion overlapping the first fin pattern and a second portion overlapping the second fin pattern, and
a first transistor formed by the first portion of the gate structure and the first semiconductor pattern is of a different type than a second transistor formed by the second portion of the gate structure and the second semiconductor pattern.
11. A semiconductor device, comprising:
a first fin pattern and a second fin pattern on a substrate, the first and second fin patterns protruding to extend in a first direction and spaced apart from each other;
a first gate structure on the first fin pattern extending in a second direction different from the first direction;
a first semiconductor pattern disposed on at least one side of the first gate structure and on the first fin pattern;
a second gate structure on the second fin pattern extending along the second direction and spaced apart from the first gate structure;
a second semiconductor pattern disposed on at least one side of the second gate structure and on the second fin pattern; and
a blocking pattern disposed between the first semiconductor pattern and the second semiconductor pattern and between the first gate structure and the second gate structure,
wherein a portion of the first semiconductor pattern is inserted into the barrier pattern.
12. The semiconductor device of claim 11, wherein a portion of the first gate structure is inserted into the barrier pattern, and
the blocking pattern contacts the second gate structure.
13. The semiconductor device of claim 11, wherein the blocking pattern is spaced apart from the second gate structure.
14. The semiconductor device of claim 11, further comprising:
a field insulating film on the substrate, the field insulating film wrapping at least a portion of each of the first and second fin patterns; and
an interlayer insulating film disposed on the field insulating film and covering the first semiconductor pattern and the second semiconductor pattern,
wherein the barrier pattern is disposed in the interlayer insulating film and extends to an upper surface of the field insulating film.
15. The semiconductor device of claim 11, further comprising:
a field insulating film on the substrate, the field insulating film wrapping at least a portion of each of the first and second fin patterns; and
an interlayer insulating film disposed on the field insulating film and covering the first semiconductor pattern and the second semiconductor pattern,
wherein the barrier pattern is disposed in the interlayer insulating film and is disposed to be spaced apart from an upper surface of the field insulating film.
16. A semiconductor device, comprising:
a first transistor including a first gate structure and a first semiconductor pattern disposed on at least one side of the first gate structure;
a second transistor including a second gate structure and a second semiconductor pattern disposed on at least one side of the second gate structure; and
a barrier pattern between the first semiconductor pattern and the second semiconductor pattern,
wherein a portion of the first semiconductor pattern is inserted into the barrier pattern.
17. The semiconductor device of claim 16, wherein the blocking pattern further extends between the first and second gate structures.
18. The semiconductor device of claim 16, further comprising:
first fin patterns extending in the first direction and spaced apart from each other; and
a field insulating film enclosing at least a portion of the first fin pattern,
wherein the first gate structure extends over the first fin pattern in a second direction different from the first direction,
the first semiconductor pattern is disposed on the first fin-type pattern,
the barrier pattern extends in the first direction, an
The barrier pattern contacts an upper surface of the field insulating film.
19. The semiconductor device of claim 16, further comprising:
first fin patterns extending in the first direction and spaced apart from each other; and
a field insulating film enclosing at least a portion of the first fin pattern,
wherein the first gate structure extends over the first fin pattern in a second direction different from the first direction,
the first semiconductor pattern is disposed on the first fin-type pattern,
the barrier pattern extends in the first direction, an
The barrier pattern is spaced apart from an upper surface of the field insulating film.
20. The semiconductor device of claim 16, wherein the first gate structure and the second gate structure are single gate structures connected to each other, and
the first transistor and the second transistor are of different types from each other.
Technical Field
The inventive concept relates to a semiconductor device and a method of manufacturing the same.
Background
Recently, semiconductor devices have been miniaturized and have been improved in performance. Therefore, small structural differences of transistors included in the semiconductor device greatly affect the performance of the semiconductor device.
On the other hand, as semiconductor devices are miniaturized, source/drain regions of adjacent transistors may be shorted with each other.
Disclosure of Invention
Aspects of the inventive concept provide a method for manufacturing a semiconductor device capable of improving a yield of the semiconductor device by preventing a short circuit of source/drain regions of adjacent transistors without reducing sizes of the source/drains of the transistors.
Aspects of the inventive concept are not limited to those described above, and other aspects not mentioned may be clearly understood by those skilled in the art from the following description.
According to some embodiments of the inventive concept, there is provided a semiconductor device including: a substrate; a first fin pattern and a second fin pattern protruding from an upper surface of the substrate and spaced apart from each other; a first semiconductor pattern on the first fin pattern; a second semiconductor pattern on the second fin pattern; and a barrier pattern between the first semiconductor pattern and the second semiconductor pattern, a portion of the first semiconductor pattern being inserted into the barrier pattern.
According to some embodiments of the inventive concept, there is provided a semiconductor device including: a first fin pattern and a second fin pattern on the substrate, protruding to extend in a first direction and spaced apart from each other; a first gate structure on the first fin pattern, extending in a second direction different from the first direction; a first semiconductor pattern disposed on at least one side of the first gate structure and on the first fin pattern; a second gate structure on the second fin pattern, extending along a second direction and spaced apart from the first gate structure; a second semiconductor pattern disposed on at least one side of the second gate structure and on the second fin pattern; and a barrier pattern disposed between the first semiconductor pattern and the second semiconductor pattern and between the first gate structure and the second gate structure, wherein a portion of the first semiconductor pattern is inserted into the barrier pattern.
According to some embodiments of the inventive concept, there is provided a semiconductor device including: a first transistor including a first gate structure and a first semiconductor pattern disposed on at least one side of the first gate structure; a second transistor including a second gate structure and a second semiconductor pattern disposed on at least one side of the second gate structure; and a barrier pattern between the first semiconductor pattern and the second semiconductor pattern, wherein a portion of the first semiconductor pattern is inserted into the barrier pattern.
Drawings
The above and other aspects and features of the inventive concept will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings in which:
fig. 1 is a layout view of a semiconductor device according to some embodiments of the technical idea of the present inventive concept;
FIG. 2 is a cross-sectional view taken along line A-A' of FIG. 1;
FIG. 3 is an enlarged view of region K of FIG. 2;
FIG. 4 is a cross-sectional view taken along line B-B' of FIG. 1;
FIG. 5 is a cross-sectional view taken along line A-A' of FIG. 1;
FIG. 6 is an enlarged view of region J of FIG. 5;
FIG. 7 is a cross-sectional view taken along line B-B' of FIG. 1;
fig. 8 is a layout view of a semiconductor device according to some embodiments of the technical idea of the present inventive concept;
FIG. 9 is a cross-sectional view taken along line C-C' of FIG. 8;
FIG. 10 is a sectional view taken along line C-C' of FIG. 8;
fig. 11 is a layout view of a semiconductor device according to some embodiments of the technical idea of the present inventive concept;
FIG. 12 is a sectional view taken along line E-E' of FIG. 11;
fig. 13 to 17 are intermediate step diagrams for explaining a method for manufacturing a semiconductor device according to some embodiments of the technical idea of the present inventive concept; and
fig. 18 to 22 are intermediate step diagrams for explaining a method for manufacturing a semiconductor device according to some embodiments of the technical idea of the present inventive concept.
Detailed Description
In the drawings of a semiconductor device according to some embodiments of the inventive concept, a fin transistor (FinFET) including a channel region in a fin pattern shape is exemplarily shown, but the inventive concept is not limited thereto. Of course, semiconductor devices according to some embodiments of the inventive concept may include planar transistors, tunnel transistors (FETs), transistors including nanowires, transistors including nanosheets, or three-dimensional (3D) transistors. In addition, the semiconductor device according to some embodiments of the inventive concept may include a bipolar junction transistor, a lateral double diffused transistor (LDMOS), and the like.
Hereinafter, a semiconductor device according to some embodiments of the technical idea of the inventive concept will be described with reference to fig. 1 to 4.
Fig. 1 is a layout view of a semiconductor device according to some embodiments of the technical idea of the inventive concept. In fig. 1, the field insulating film (161 of fig. 2) and the interlayer insulating film (163 of fig. 2) are not shown for the sake of clarity. Fig. 2 is a sectional view taken along line a-a' of fig. 1. Fig. 3 is an enlarged view of the region K of fig. 2. Fig. 4 is a sectional view taken along line B-B' of fig. 1.
Referring to fig. 1 to 4, a semiconductor device according to some embodiments of the technical idea of the inventive concept may include a substrate 100, a field insulating film 161, a first fin pattern 101, a second fin pattern 102, a first semiconductor pattern 121, a second semiconductor pattern 122, an interlayer insulating film 163, and a first barrier pattern 131.
The substrate 100 may have a structure in which a base substrate and an epitaxial layer are stacked, but the embodiment is not limited thereto. The substrate 100 may be a silicon substrate, a gallium arsenide substrate, a silicon germanium substrate, a ceramic substrate, a quartz substrate, a display glass substrate, or the like, and may be an SOI (semiconductor on insulator) substrate. Hereinafter, a silicon substrate will be described as an example. Further, the substrate 100 may have a form in which an insulating film is formed over a silicon substrate.
The first and second fin patterns 101 and 102 may protrude from the upper surface 100U of the substrate 100. The first and second fin patterns 101 and 102 may extend in the first direction D1. The first and second fin patterns 101 and 102 may be spaced apart from each other.
The upper surface of the portion of the first fin pattern 101 on which the first semiconductor pattern 121 is disposed is substantially on the same plane as the upper surface 161U of the field insulating film 161. An upper surface of a portion of the first fin pattern 101 on which the first gate structure 140 is disposed may protrude from, for example, an upper surface 161U of the field insulating film 161.
The first and second fin patterns 101 and 102 may be a portion of the substrate 100 and may include an epitaxial layer grown from the substrate 100. Each of the first and second fin patterns 101 and 102 may include, for example, silicon or germanium as an elemental semiconductor material. Further, each of the first and second fin patterns 101 and 102 may include a compound semiconductor, and may include, for example, a group IV-IV compound semiconductor or a group III-V compound semiconductor.
Specifically, taking a group IV-IV compound semiconductor as an example, each of the first and second fin patterns 101 and 102 may be a binary compound or a ternary compound including at least two of the following: carbon (C), silicon (Si), germanium (Ge), and tin (Sn), or a compound obtained by doping these elements with a group IV element. Taking a III-V compound semiconductor as an example, each of the first and second fin patterns 101 and 102 may be one of: a binary compound, a ternary compound, or a quaternary compound formed by bonding at least one of aluminum (Al), gallium (Ga), and indium (In) As a group III element with at least one of phosphorus (P), arsenic (As), and antimony (Sb) As a group V element.
In the drawings, respective side surfaces of the first and second fin patterns 101 and 102 are illustrated to have any inclination from the upper surface 100U of the substrate 100, but the technical idea of the inventive concept is not limited thereto. For example, it is a matter of course that a side surface of each of the first and second fin patterns 101 and 102 may be perpendicular to the upper surface 100U of the substrate 100, depending on the process.
The field insulating film 161 may be disposed on the substrate 100. The field insulating film 161 may wrap at least a portion of each of the first and second fin patterns 101 and 102.
The field insulating film 161 may include, for example, a material containing at least one of: silicon oxide films, silicon nitride films, and silicon oxynitride films.
The first gate structure 140 may be disposed on the first fin pattern 101 to cross the first fin pattern 101. The first gate structure 140 may extend along the second direction D2. The second direction D2 may be a different direction than the first direction D1. The second gate structure 150 may be disposed on the second fin pattern 102 to cross the second fin pattern 102. The second gate structure 150 may extend along the second direction D2. The first gate structure 140 and the second gate structure 150 may be spaced apart from each other.
In some embodiments, the first gate structure 140 and the second fin pattern 102 may not overlap each other. In addition, the second gate structure 150 and the first fin pattern 101 may not overlap each other.
The first gate structure 140 may include first gate insulating films 141 and 142 and a first gate electrode 143. The second gate structure 150 may include second gate insulating films 151 and 152 and a second gate electrode 153.
The first gate insulating films 141 and 142 may extend along the upper surface 161U of the field insulating film 161 and portions of the first fin pattern 101 protruding from the upper surface 161U of the field insulating film 161. The second gate insulating films 151 and 152 may extend along the upper surface 161U of the field insulating film 161 and portions of the second fin pattern 102 protruding from the upper surface 161U of the field insulating film 161.
The first gate insulating films 141 and 142 may include, for example, a first interface film 141 and a first high-dielectric-constant insulating film 142. The second gate insulating films 151 and 152 may include, for example, a second interface film 151 and a second high-dielectric-constant insulating film 152.
The first and second interface films 141 and 151 may include, but are not limited to, silicon dioxide, for example. That is, the first interface film 141 and the second interface film 151 may of course contain other materials depending on the type of the substrate 100, the types of the first high-permittivity insulating film 142 and the second high-permittivity insulating film 152, and the like.
The first high-permittivity insulation film 142 may be provided on the first interface film 141. Further, a second high-permittivity insulation film 152 may be provided on the second interface film 151. The first high-permittivity insulation film 142 and the second high-permittivity insulation film 152 may include one or more of: hafnium oxide, hafnium silicon oxide, hafnium aluminum oxide, lanthanum aluminum oxide, zirconium silicate, tantalum oxide, titanium oxide, barium strontium titanate, barium titanate, strontium titanate, yttrium oxide, aluminum oxide, lead scandium tantalum oxide, or lead zinc niobate.
Further, the first high-permittivity insulation film 142 and the second high-permittivity insulation film 152 have been described focusing on oxides. Alternatively, the first high-dielectric-constant insulating film 142 and the second high-dielectric-constant insulating film 152 may include, but are not limited to, one or more of a nitride (e.g., hafnium nitride) or an oxynitride (e.g., hafnium oxynitride) of the above-described metal materials.
The first gate electrode 143 may be disposed on the first gate insulating films 141 and 142. The second gate electrode 153 may be disposed on the second gate insulating films 151 and 152. The first gate electrode 143 and the second gate electrode 153 may include at least one or more metal layers.
The first semiconductor pattern 121 may be disposed on the first fin pattern 101. The first semiconductor pattern 121 may be disposed on the upper surface 161U of the field insulating film 161. The first semiconductor pattern 121 may be disposed on at least one side of the first gate structure 140.
The second semiconductor pattern 122 may be disposed on the second fin pattern 102. The second semiconductor pattern 122 may be disposed on the upper surface 161U of the field insulating film 161. The second semiconductor pattern 122 may be disposed on at least one side of the second gate structure 150.
The first and second semiconductor patterns 121 and 122 may be source/drains of different transistors and may be, for example, raised source/drains.
The first gate structure 140 and the first semiconductor pattern 121 may form a first transistor. The second gate structure 150 and the second semiconductor pattern 122 may form a second transistor. In some embodiments, the first transistor and the second transistor may be the same type of transistor or different types of transistors.
When the first transistor and/or the second transistor are PMOS transistors, the first semiconductor pattern 121 and/or the second semiconductor pattern 122 may include a compressive stress material. For example, the compressive stress material may be a material having a larger lattice constant than Si and may be, for example, SiGe. The compressive stress material may apply a compressive stress material to the first semiconductor pattern 121 and/or the second semiconductor pattern 122 to improve carrier mobility of the channel region.
When the first transistor and/or the second transistor are NMOS transistors, the first semiconductor pattern 121 and/or the second semiconductor pattern 122 may be the same material as the substrate 100 or a tensile stress material. For example, when the substrate 100 is Si, the first semiconductor pattern 121 and/or the second semiconductor pattern 122 may be Si or a material having a smaller lattice constant than Si (e.g., SiC).
The first and second semiconductor patterns 121 and 122 may have at least one of a diamond shape, a circular shape, and a rectangular shape. Although a diamond shape (or a pentagon or a hexagon) is illustrated in the drawings as an example, the technical idea of the inventive concept is not limited thereto.
An interlayer insulating film 163 may be disposed on the upper surface 161U of the field insulating film 161. The interlayer insulating film 163 may wrap and cover the first and second semiconductor patterns 121 and 122. An interlayer insulating film 163 may be disposed between the second gate structure 150 and the first barrier pattern 131. The interlayer insulating film 163 may wrap, for example, side surfaces of the first gate structure 140 and side surfaces of the second gate structure 150. For example, the interlayer insulating film 163 may expose the upper surface of the first gate structure 140 and the upper surface of the second gate structure 150.
The interlayer insulating film 163 may include the first trench 131T. The first trench 131T may expose the first portion 121P of the first semiconductor pattern 121. In some embodiments, the first trench 131T may expose the upper surface 161U of the field insulating film 161. The first trench 131T may be formed in the interlayer insulating film 163 to extend in the first direction D1. In some embodiments, the first trench 131T may expose a portion of the first gate structure 140.
The first barrier patterns 131 may be disposed in the first trenches 131T. In other words, the first barrier pattern 131 may be disposed in the interlayer insulating film 163. The first barrier pattern 131 may be disposed between the first semiconductor pattern 121 and the second semiconductor pattern 122.
In some embodiments, the first barrier pattern 131 may be disposed between the first and second gate structures 140 and 150. In this case, for example, the first barrier patterns 131 may extend in the first direction D1, for example, between the first and second semiconductor patterns 121 and 122 and between the first and second gate structures 140 and 150.
A width of a portion of the first barrier pattern 131 disposed between the first and second gate structures 140 and 150 may be less than a width of a portion of the first barrier pattern 131 disposed between the first and second semiconductor patterns 121 and 122. Here, the width may be a value measured in the second direction D2.
In some embodiments, the first barrier patterns 131 may extend in the third direction D3, for example, from the upper surface of the interlayer insulating film 163 to the upper surface 161U of the field insulating film. For example, the first barrier pattern 131 may contact the upper surface 161U of the field insulating film 161.
The third direction D3 may be a direction crossing the first direction D1 and the second direction D2. The third direction D3 may be, for example, a direction perpendicular to the upper surface 161U of the field insulating film 161.
In some embodiments, the first barrier pattern 131 may be spaced apart from the second gate structure 150. A portion of the interlayer insulating film 163 may be disposed between the first barrier pattern 131 and the second gate structure 150.
The first portion 121P of the first semiconductor pattern 121 may be inserted into the first barrier pattern 131. In other words, the first portion 121P of the first semiconductor pattern 121 may overlap the first barrier pattern 131 in the third direction D3. A portion of the first barrier pattern 131 may be disposed on the first semiconductor pattern 121.
In the semiconductor device according to some embodiments of the technical idea of the present inventive concept, by disposing the first barrier pattern 131 between the first and second semiconductor patterns 121 and 122 without reducing the size of the first semiconductor pattern 121, a short circuit between the first and second semiconductor patterns 121 and 122 may be prevented. In other words, since the first portion 121P of the first semiconductor pattern 121 is inserted into the first barrier pattern 131, the size of the first semiconductor pattern 121 may not be reduced. It is possible to prevent a short circuit between the first and second semiconductor patterns 121 and 122 while maintaining the performance of the semiconductor device, thereby improving the yield of the semiconductor device.
A portion of the first gate structure 140 may be inserted into the first barrier pattern 131. In other words, a portion of the first gate structure 140 may overlap the first barrier pattern 131 in the third direction D3. The first barrier pattern 131, for example, together with the interlayer insulating film 163, may insulate the first gate structure 140 from the second gate structure 150.
The first barrier pattern 131 may include, for example, one of SiN and SiOCN. However, the technical idea of the inventive concept is not limited thereto. For example, the first barrier pattern 131 may be a material that may insulate the first semiconductor pattern 121 from the second semiconductor pattern 122 and has resistance to an etching process.
Hereinafter, a semiconductor device according to some embodiments of the technical idea of the inventive concept will be described with reference to fig. 1, 5, 6, and 7. For clarity of description, overlapping portions of the above description will be omitted or simplified.
Fig. 5 is a sectional view taken along line a-a' of fig. 1. Fig. 6 is an enlarged view of the region J of fig. 5. Fig. 7 is a sectional view taken along line B-B' of fig. 1.
Referring to fig. 1, 5, 6 and 7, the interlayer insulating film 163 of the semiconductor device according to some embodiments of the technical idea of the inventive concept may include the second trench 132T.
The second trench 132T may expose the first portion 121P of the first semiconductor pattern 121. In some embodiments, the second trench 132T may not expose the upper surface 161U of the field insulating film 161. The second trench 132T may be formed in the interlayer insulating film 163 to extend in the first direction D1. In some embodiments, the second trench 132T may expose a portion of the first gate structure 140.
The second barrier pattern 132 may be disposed in the second trench 132T. The second barrier pattern 132 may be disposed between the first semiconductor pattern 121 and the second semiconductor pattern 122. The second barrier pattern 132 may be disposed on the first semiconductor pattern 121 between the first semiconductor pattern 121 and the second semiconductor pattern 122. In other words, the second barrier pattern 132 may have a portion disposed between the first and second semiconductor patterns 121 and 122 while being disposed on the first semiconductor pattern 121.
In some embodiments, the second blocking pattern 132 may be disposed between the first and second gate structures 140 and 150. In this case, the second barrier patterns 132 may extend in the first direction D1, for example, between the first and second semiconductor patterns 121 and 122 and between the first and second gate structures 140 and 150.
In some embodiments, the second blocking pattern 132 may be spaced apart from the second gate structure 150. A portion of the interlayer insulating film 163 may be disposed between the second barrier pattern 132 and the second gate structure 150.
In some embodiments, for example, the second barrier pattern 132 may extend from the upper surface of the interlayer insulating film 163 to a portion of the interlayer insulating film 163 inside the interlayer insulating film 163 in the third direction D3. In other words, the second barrier pattern 132 may be disposed to be spaced apart from the upper surface 161U of the field insulating film 161.
The first portion 121P of the first semiconductor pattern 121 may be inserted into the second barrier pattern 132. In other words, the first portion 121P of the first semiconductor pattern 121 may overlap the second barrier pattern 132 in the third direction D3.
In the semiconductor device according to some embodiments of the technical idea of the present inventive concept, in the case where the aspect ratio is high when the second trench 132T is formed in the interlayer insulating film 163, by preventing the second barrier pattern 132 from extending to the upper surface 161U of the field insulating film 161 while the second barrier pattern 132 is disposed between the first semiconductor pattern 121 and the second semiconductor pattern 122, the limitation due to the high aspect ratio can be overcome.
A portion of the first gate structure 140 may be inserted into the second blocking pattern 132. In other words, a portion of the first gate structure 140 may overlap the second barrier pattern 132 in the third direction D3. The second barrier patterns 132, for example, together with the interlayer insulating film 163, may insulate the first gate structure 140 from the second gate structure 150.
The second barrier pattern 132 may include, for example, one of SiN and SiOCN. However, the technical idea of the inventive concept is not limited thereto. For example, the second barrier pattern 132 may be a material that may insulate the first semiconductor pattern 121 from the second semiconductor pattern 122 and has resistance to an etching process.
Hereinafter, a semiconductor device according to some embodiments of the technical idea of the inventive concept will be described with reference to fig. 2, 8, and 9. For clarity of description, overlapping portions of the above description will be omitted or simplified.
Fig. 8 is a layout view of a semiconductor device according to some embodiments of the technical idea of the inventive concept. In fig. 8, the field insulating film (161 of fig. 2) and the interlayer insulating film (163 of fig. 2) are not shown for clarity of illustration. The cross-sectional view taken along line a-a' of fig. 8 may be the same as fig. 2.
Fig. 9 is a sectional view taken along line C-C' of fig. 8.
Referring to fig. 2, 8 and 9, the first barrier pattern 131 of the semiconductor device according to some embodiments of the technical idea of the inventive concept may contact the second gate structure 150.
The first blocking pattern 131 may separate the first and second gate structures 140 and 150 between the first and second gate structures 140 and 150. For example, the first gate structure 140 and the second gate structure 150 may be a single gate structure connected to each other at an intermediate stage of a manufacturing process of the semiconductor device. Since the first blocking patterns 131 are disposed in a single gate structure in a subsequent process, the single gate structure may be divided into the first and second gate structures 140 and 150.
The first gate structure 140 and the first semiconductor pattern 121 may form a first transistor. The second gate structure 150 and the second semiconductor pattern 122 may form a second transistor. In some embodiments, the first transistor and the second transistor may be the same type of transistor or may be different types of transistors.
Hereinafter, a semiconductor device according to some embodiments of the technical idea of the inventive concept will be described with reference to fig. 5, 8, and 10. For clarity of explanation, overlapping portions of the above description will be omitted or simplified.
Fig. 10 is a sectional view taken along line C-C' of fig. 8. The cross-sectional view taken along line a-a' of fig. 8 may be the same as fig. 5.
Referring to fig. 5, 8 and 10, the second blocking pattern 132 of the semiconductor device according to some embodiments of the technical idea of the inventive concept may contact the second gate structure 150.
The second blocking patterns 132 may separate the first gate structure 140 from the second gate structure 150 between the first gate structure 140 and the second gate structure 150. An interlayer insulating film 163 may be disposed between the second barrier pattern 132 and the upper surface 161U of the field insulating film 161.
Hereinafter, a semiconductor device according to some embodiments of the technical idea of the inventive concept will be described with reference to fig. 2, 5, 11, and 12. For clarity of explanation, overlapping portions of the above description will be omitted or simplified.
Fig. 11 is a layout view of a semiconductor device according to some embodiments of the technical idea of the inventive concept. In fig. 11, the field insulating film (161 of fig. 2) and the interlayer insulating film (163 of fig. 2) are not shown for clarity of illustration. The sectional view taken along line a-a' of fig. 11 may be the same as any one of fig. 2 and 5.
Fig. 12 is a sectional view taken along line E-E' of fig. 11.
Referring to fig. 2, 5, 11 and 12, a semiconductor device according to some embodiments of the technical idea of the inventive concept may include a third gate structure 170.
The third gate structure 170 may be disposed on the first and second fin patterns 101 and 102 to cross the first and second fin patterns 101 and 102. The third gate structure 170 may extend along the second direction D2.
The third gate structure 170 may include a first portion 170_1 and a second portion 170_ 2. The first portion 170_1 of the third gate structure 170 may be a portion overlapping the first fin pattern 101 in the third direction D3. The second portion 170_2 of the third gate structure 170 may be a portion overlapping the second fin pattern 102 in the third direction D3.
The third gate structure 170 may include third gate insulating films 171 and 172 and a third gate electrode 173. The third gate insulating films 171 and 172 may extend along the upper surface 161U of the field insulating film 161, a portion of the first fin pattern 101 protruding from the upper surface 161U of the field insulating film 161, and a portion of the second fin pattern 102 protruding from the upper surface 161U of the field insulating film 161.
The third gate insulating films 171 and 172 may include, for example, a third interface film 171 and a third high-permittivity insulating film 172. The description of the first interface film 141 and the second interface film 151 is also applicable to the third interface film 171. The description of the first high-permittivity dielectric insulating film 142 and the second high-permittivity dielectric insulating film 152 can also be applied to the third high-permittivity dielectric insulating film 172.
The third gate electrode 173 may be disposed on the third gate insulating films 171 and 172. The description of the first gate electrode 143 and the second gate electrode 153 can also be applied to the third gate electrode 173.
The first and second semiconductor patterns 121 and 122 may be disposed on at least one side of the third gate structure 170.
The first or second blocking pattern 131 or 132 may be disposed on at least one side of the third gate structure 170. The first barrier pattern 131 or the second barrier pattern 132 may be disposed between the first semiconductor pattern 121 and the second semiconductor pattern 122. The first or second barrier patterns 131 or 132 may extend in the first direction D1, for example, across the third gate structure 170.
The first portion 170_1 of the third gate structure 170 and the first semiconductor pattern 121 may form a third transistor. The second portion 170_2 of the third gate structure 170 and the second semiconductor pattern 122 may form a fourth transistor. In some embodiments, the third transistor and the fourth transistor may be the same type of transistor or may be different types of transistors.
In the semiconductor device according to some embodiments of the technical idea of the present inventive concept, when it is intended to form individual transistors of the same type or different types using one continuous gate structure, a short-circuit phenomenon between semiconductor patterns of the individual transistors can be prevented by using the first and second barrier patterns 131 and 132.
Hereinafter, a method for manufacturing a semiconductor device according to some embodiments of the technical idea of the present inventive concept will be described with reference to fig. 13 to 17. For clarity of explanation, overlapping portions of the above description will be omitted or simplified.
Fig. 13 to 17 are intermediate step diagrams for explaining a method for manufacturing a semiconductor device according to some embodiments of the technical idea of the present inventive concept.
Referring to fig. 13, a substrate 100 may be provided on which a first fin pattern 101, a second free fin pattern 102p, a field insulating film 161, and a first semiconductor pattern 121 are formed.
The second free fin pattern 102p may include a portion protruding from the upper surface 161U of the field insulating film 161. The second free fin pattern 102p may be the second fin pattern 102 before forming the second semiconductor pattern 122.
A first mask layer 181 may be formed on the substrate 100. The first mask layer 181 may cover the upper surfaces 161U of the second free fin pattern 102p, the first semiconductor pattern 121, and the field insulating film 161.
By removing a portion of the first mask layer 181, the first trench 131T may be formed. That is, the first trench 131T may be formed in the first mask layer 181. The first trench 131T may expose the first portion 121P of the first semiconductor pattern 121. The first trench 131T may expose the upper surface 161U of the field insulating film 161.
Referring to fig. 14, the first barrier patterns 131 may be formed by filling the first trenches 131T with a barrier pattern material. The barrier pattern material may encase the first portion 121P of the first semiconductor pattern 121 exposed by the first trench 131T. As a result, the first portion 121P of the first semiconductor pattern 121 is inserted into the first barrier pattern 131 and may overlap the first barrier pattern 131 in the third direction D3.
In the manufacturing process of the semiconductor device according to some embodiments of the technical idea of the present inventive concept, after the first semiconductor pattern 121 is formed, by forming the first barrier pattern 131 before the second semiconductor pattern 122 is formed, it is possible to prevent a short circuit between the first semiconductor pattern 121 and the second semiconductor pattern 122 without reducing the size of the first semiconductor pattern 121.
Referring to fig. 15, the first mask layer 181 may be removed.
Referring to fig. 16, a second semiconductor pattern 122 may be formed.
For example, the second mask layer 183 may be formed to cover the first semiconductor pattern 121. Portions of the second free fin pattern 102p protruding from the upper surface 161U of the field insulating film 161 are removed, and the second fin pattern 102 may be formed. A second semiconductor pattern 122 may be formed on the second fin pattern 102.
Referring to fig. 17, the second mask layer 183 may be removed.
Referring to fig. 2, an interlayer insulating film 163 may be formed on an upper surface of the field insulating film 161. An interlayer insulating film 163 may be formed to cover the first and second semiconductor patterns 121 and 122. An interlayer insulating film 163 may be formed to wrap the side surface of the first barrier pattern 131.
Hereinafter, a method for manufacturing a semiconductor device according to some embodiments of the technical idea of the present inventive concept will be described with reference to fig. 5 and 18 to 22. For clarity of explanation, overlapping portions of the above description will be omitted or simplified.
Fig. 18 to 22 are intermediate step diagrams for explaining a method for manufacturing a semiconductor device according to some embodiments of the technical idea of the present inventive concept.
Referring to fig. 18, a portion of the first mask layer 181 may be removed to form the second trench 132T. That is, the second trench 132T may be formed in the first mask layer 181. The second trench 132T may expose the first portion 121P of the first semiconductor pattern 121. The second trench 132T may not expose the upper surface 161U of the field insulating film 161.
Referring to fig. 19, the second barrier patterns 132 may be formed by filling the second trenches 132T with a barrier pattern material. The barrier pattern material may encase the first portion 121P of the first semiconductor pattern 121 exposed by the second trench 132T. As a result, the first portion 121P of the first semiconductor pattern 121 is inserted into the second barrier pattern 132 and may overlap the second barrier pattern 132 in the third direction D3.
In a manufacturing process of a semiconductor device according to some embodiments of the technical idea of the present inventive concept, when an aspect ratio is high, the second barrier pattern 132 may be formed after removing only a portion of the first mask layer 181 to form the second trench 132T.
Referring to fig. 20, the second mask layer 183 may be removed.
Referring to fig. 21, the second mask layer 183 may be formed to cover the first semiconductor pattern 121 and the second semiconductor pattern 122 may be formed.
Referring to fig. 22, the second mask layer 183 may be removed.
Referring to fig. 5, an interlayer insulating film 163 may be formed on an upper surface of the field insulating film 161. An interlayer insulating film 163 may be formed to wrap the side surface of the second barrier pattern 132. An interlayer insulating film 163 may be formed between the upper surface 161U of the field insulating film 161 and the first semiconductor pattern 121. The interlayer insulating film 163 may be formed between the upper surface 161U of the field insulating film 161 and the second barrier pattern 132.
In the drawings, a method for fabricating a fin transistor (FinFET) including a channel region in the shape of a fin pattern is exemplarily shown, but the inventive concept is not limited thereto. According to some embodiments of the inventive concept, it goes without saying that the method for manufacturing a semiconductor device can also be used in a method for manufacturing the following transistor: a planar transistor, a tunnel transistor (FET), a transistor comprising a nanowire, a transistor comprising a nanoplate, or a three-dimensional (3D) transistor. Further, methods for manufacturing semiconductor devices according to some embodiments of the inventive concept may be used in methods for manufacturing the following transistors: bipolar junction transistors, lateral double diffused transistors (LDMOS), and the like.
While the inventive concept has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the inventive concept as defined by the appended claims. It is therefore intended that the present embodiments be considered in all respects as illustrative and not restrictive, with reference to the appended claims rather than to the foregoing description, to indicate the scope of the invention.
