阅读说明：本技术 一种低功耗的氢气检测方法及其装置和制备方法 (Low-power-consumption hydrogen detection method and device and preparation method thereof ) 是由 张敏昊 宋凤麒 曹路 张同庆 于 2019-10-18 设计创作，主要内容包括：本发明公开了一种低功耗的氢气检测方法及其装置和制备方法,该检测方法利用钯金属吸氢前和吸氢后的自旋轨道耦合强度不同,不同的自旋轨道耦合强度通过逆自旋霍尔效应表现出来,即通过钯金属与自旋极化层的异质结构,自旋极化层中的自旋信号会在的钯金属层中自发产生不一样的电流信号,实现氢气的检测。自旋极化层的自旋流在理论上具备无耗散的性质,而且钯金属层中的电流是自发形成的,不需要引入电源,因此减小了氢气检测的功耗,满足了传感小型化的目标。本发明既利用了钯金属层的自旋轨道耦合作用,又利用了钯金属层优异的氢敏特性,由于自旋无耗散的特点,使得这种结构的氢气检测方法能获得更小的功耗。(The invention discloses a low-power consumption hydrogen detection method, a device and a preparation method thereof, wherein the detection method utilizes that spin orbit coupling strengths of palladium metal before and after hydrogen absorption are different, and the different spin orbit coupling strengths are shown by an inverse spin Hall effect, namely, through a heterostructure of the palladium metal and a spin polarization layer, a spin signal in the spin polarization layer can spontaneously generate different current signals in a palladium metal layer, so that the detection of hydrogen is realized. The spin current of the spin polarization layer has the property of no dissipation theoretically, and the current in the palladium metal layer is formed spontaneously without introducing a power supply, so that the power consumption of hydrogen detection is reduced, and the aim of sensing miniaturization is met. The invention not only utilizes the spin orbit coupling effect of the palladium metal layer, but also utilizes the excellent hydrogen sensitive characteristic of the palladium metal layer, and the hydrogen detection method with the structure can obtain smaller power consumption due to the characteristic of no dissipation of spin.)

1. The low-power consumption hydrogen detection method is characterized in that spin orbit coupling strengths of a palladium metal layer before and after hydrogen absorption are different, and different spin orbit coupling strengths enable spin signals in a spin polarization layer to spontaneously generate different current signals in the palladium metal layer, so that hydrogen detection is realized.

2. The utility model provides a hydrogen detection device of low-power consumption, its characterized in that includes substrate, spin polarization layer and the palladium metal layer that sets gradually from bottom to top, the electrode layer that sets up on spin polarization layer is connected respectively at the both ends of palladium metal layer, or includes substrate, spin polarization layer, barrier layer and the palladium metal layer that sets gradually from bottom to top, the electrode layer that sets up on the barrier layer is connected respectively at the both ends of palladium metal layer.

3. The low-power consumption hydrogen gas detection device according to claim 2, wherein the spin polarization layer is a topological insulator, a dirac semimetal, a pheral semimetal, or a heavy metal.

4. The low-power consumption hydrogen detection device according to claim 2, wherein the spin polarization layer is a ferromagnetic metal, a ferromagnetic half-metal, or a ferromagnetic insulator.

5. The low-power consumption hydrogen detection device according to claim 2, wherein the palladium metal layer is a metal film, a metal nanowire or a metal nanowire array of palladium.

6. The low-power consumption hydrogen detection device according to claim 2, wherein the barrier layer is graphene, aluminum oxide, magnesium oxide, or boron nitride.

7. The low power consumption hydrogen gas detection device according to claim 2, wherein the electrode layer is a gold, silver, copper, platinum, nickel or indium layer.

8. The low-power consumption hydrogen gas detection device according to claim 2, wherein, before the hydrogen gas is absorbed, a current is spontaneously formed in the palladium metal layer by a spin current in the spin polarization layer due to a spin orbit coupling effect of the palladium metal layer; after the hydrogen is absorbed, the volume of the palladium metal layer expands, the spin-orbit coupling effect changes, and the spontaneously formed current changes.

9. The hydrogen detection device with low power consumption of claim 2, wherein the volume expansion of the palladium metal layer before and after hydrogen absorption causes the difference in spin-orbit coupling strength, and the spin current in the spin polarization layer is different from the current spontaneously formed in the palladium metal layer.

10. A method for manufacturing a low power consumption hydrogen gas detecting device according to any one of claims 2 to 9, characterized by comprising the steps of:

s1, selecting a substrate, and ultrasonically cleaning the substrate with acetone, ethanol and deionized water in sequence;

s2, preparing a spin polarization layer on the substrate by a method of pulse laser deposition, molecular beam epitaxy, mechanical transfer or chemical vapor deposition;

s3, preparing a barrier layer on the spin polarization layer by an atomic layer deposition, mechanical transfer or chemical vapor deposition method;

s4, preparing a metal palladium nanowire on the graphene by using an electron beam evaporation method, a magnetron sputtering method, a thermal evaporation method, a pulsed laser deposition method or a molecular beam epitaxy method;

and S5, depositing the upper electrode layers at the two ends of the metal palladium nanowire by using an electron beam evaporation method, a magnetron sputtering method, a thermal evaporation method, a pulse laser deposition method or a molecular beam epitaxy method.

Technical Field

The invention belongs to the technical field of spinning electronic devices, and particularly relates to a low-power-consumption hydrogen detection method, a device and a preparation method thereof.

Background

With the rapid development of spintronics, the spin-orbit coupling effect is more and more concerned by people, and more international reports are made about various novel physical phenomena caused by the spin-orbit coupling effect in related materials, such as spin (inverse spin) hall effect, spin field effect transistor, spin quantum computation and the like.

The spin-orbit coupling effect provides a full-electrical (without external magnetic field or magnetic material) method for controlling spin, and along with the deepening of theoretical research and the development of experimental technology, various electronic devices based on the spin-orbit coupling effect are endlessly developed and bring greater practical application value.

Palladium metal has strong spin-orbit coupling effect because it is a heavy metal, and is extremely sensitive to hydrogen and is often used as a sensitive medium of a hydrogen sensor.

Based on hydrogen detection techniques in which the palladium metal has different conductivity properties before and after hydrogen absorption, it is necessary to apply a current to the palladium metal layer having a hydrogen sensitive characteristic to detect a change in resistance. The power consumption of the core detection unit is increased due to the joule heating effect of the current.

Based on hydrogen detection technology with different refractive index properties before hydrogen absorption and after hydrogen evolution of palladium metal, an additional optical module is required to be introduced to detect the change of the refractive index; the introduction of optical modules makes it difficult to miniaturize the detection system and introduces additional power consumption.

Thus, further improvements are needed in existing hydrogen detection methods based on palladium metal.

Disclosure of Invention

In order to solve the problems in the prior art, the invention provides a low-power-consumption hydrogen detection method, a device and a preparation method thereof.

In order to achieve the purpose, the invention adopts the technical scheme that:

the spin orbit coupling strength of a palladium metal layer before and after hydrogen absorption is different, and the different spin orbit coupling strengths ensure that spin signals in a spin polarization layer can spontaneously generate different current signals in the palladium metal layer, so that the detection of hydrogen is realized.

The utility model provides a hydrogen detection device of low-power consumption, includes the substrate, spin polarization layer and the palladium metal layer that set gradually from supreme down, the electrode layer that sets up on spin polarization layer is connected respectively at the both ends of palladium metal layer, or includes substrate, spin polarization layer, barrier layer and the palladium metal layer that sets gradually from supreme down, the electrode layer that sets up on the barrier layer is connected respectively at the both ends of palladium metal layer.

Preferably, the spin-polarizing layer is a topological insulator, a dirac semimetal, a vernal semimetal or a heavy metal.

Preferably, the spin polarizing layer is a ferromagnetic metal, a ferromagnetic half-metal, or a ferromagnetic insulator.

Preferably, the palladium metal layer is a metal film, a metal nanowire or a metal nanowire array of palladium.

Preferably, the barrier layer is graphene, alumina, magnesia or boron nitride.

Preferably, the electrode layer is a gold, silver, copper, platinum, nickel or indium layer.

Further, the spin current in the spin polarizing layer is generated by applying a current, a thermal gradient, or microwaves in the spin polarizing layer.

Further, before hydrogen is absorbed, the spin current in the spin polarization layer can spontaneously form current in the palladium metal layer due to the spin-orbit coupling effect of the palladium metal layer; after the hydrogen is absorbed, the volume of the palladium metal layer expands, the spin-orbit coupling effect changes, and the spontaneously formed current changes. The structure not only makes full use of the spin orbit coupling effect of the palladium metal layer, but also makes use of the excellent hydrogen sensitive characteristic of the palladium metal layer, and the hydrogen detection method of the structure can obtain smaller power consumption due to the characteristic of no dissipation of spin.

Further, the volume expansion of the palladium metal layer before and after the absorption of hydrogen causes the difference in the spin-orbit coupling strength, and the spin current in the spin polarization layer is different from the current spontaneously formed in the palladium metal layer.

A preparation method of a low-power consumption hydrogen detection device comprises the following steps:

s1, selecting a substrate, and ultrasonically cleaning the substrate with acetone, ethanol and deionized water in sequence;

s2, preparing a spin polarization layer on the substrate by a method of pulse laser deposition, molecular beam epitaxy, mechanical transfer or chemical vapor deposition;

s3, preparing a barrier layer on the spin polarization layer by an atomic layer deposition, mechanical transfer or chemical vapor deposition method;

s4, preparing a metal palladium nanowire on the graphene by using an electron beam evaporation method, a magnetron sputtering method, a thermal evaporation method, a pulsed laser deposition method or a molecular beam epitaxy method;

and S5, depositing the upper electrode layers at the two ends of the metal palladium nanowire by using an electron beam evaporation method, a magnetron sputtering method, a thermal evaporation method, a pulse laser deposition method or a molecular beam epitaxy method.

Compared with the prior art, the invention has the following beneficial effects:

the invention adopts the composite structure of the spin polarization layer/the palladium metal layer, not only makes full use of the spin orbit coupling effect of the palladium metal layer, but also makes use of the excellent hydrogen sensitive characteristic of the palladium metal layer, and the hydrogen detection method of the structure can obtain smaller power consumption due to the characteristic of no dissipation of spin, and also meets the goal of sensing miniaturization.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a side view of a low power consumption hydrogen test prior to hydrogen sorption in FIG. 1;

FIG. 3 is a side view of the low power consumption hydrogen gas detection of FIG. 1 after hydrogen gas absorption;

wherein: 1-spin polarization layer, 2-palladium metal layer, 3-spin current, 4-current, 5-electrode layer, 6-barrier layer.

Detailed Description

The present invention will be further described with reference to the following examples.

The principle of the invention is as follows: the invention utilizes the different spin orbit coupling strengths of the palladium metal before and after hydrogen absorption, and the different spin orbit coupling strengths can be shown by the inverse spin Hall effect, namely, through the heterostructure of the palladium metal and the spin polarization layer, the spin signal in the spin polarization layer can spontaneously generate different current signals in the palladium metal layer, thereby realizing the detection of the hydrogen. The spin current of some spin polarization layers has no dissipation property in theory, and the current in the palladium metal layer is formed spontaneously without introducing a power supply, so that the power consumption of hydrogen detection is greatly reduced, and the aim of sensing miniaturization is also met.

The spin orbit coupling strength of a palladium metal layer before and after hydrogen absorption is different, and the different spin orbit coupling strengths ensure that spin signals in a spin polarization layer can spontaneously generate different current signals in the palladium metal layer, so that the detection of hydrogen is realized.

As shown in fig. 1, a low-power consumption hydrogen detection device includes a substrate, a spin polarization layer 1, and a palladium metal layer 2, which are sequentially disposed from bottom to top, two ends of the palladium metal layer 2 are respectively connected to electrode layers 5 disposed on the spin polarization layer 1, or include a substrate, a spin polarization layer 1, a barrier layer 6, and a palladium metal layer 2, which are sequentially disposed from bottom to top, two ends of the palladium metal layer 2 are respectively connected to electrode layers 5 disposed on the barrier layer 6.

As a preferable scheme, the spin polarization layer 1 is a topological insulator, dirac semimetal, extrinsic semimetal or heavy metal, preferably, the spin polarization layer 1 is a ferromagnetic metal, ferromagnetic semimetal or ferromagnetic insulator, preferably, the palladium metal layer 2 is a metal thin film, a metal nanowire or a metal nanowire array of palladium, preferably, the barrier layer 6 is graphene, aluminum oxide, magnesium oxide or boron nitride, and preferably, the electrode layer 5 is a gold, silver, copper, platinum, nickel or indium layer.

As shown in fig. 2 and 3, the spin current in the spin polarizing layer 1 is generated by applying a current, a thermal gradient, or a microwave in the spin polarizing layer 1. Specifically, the volume expansion of the palladium metal layer 2 before and after hydrogen absorption causes the spin-orbit coupling strength to be different, the current spontaneously formed in the palladium metal layer 2 by the spin current in the spin polarization layer 1 is also different, and further, the spin current 3 in the spin polarization layer 1 spontaneously forms a current 4 in the palladium metal layer by the spin-orbit coupling effect of the palladium metal layer 2 before hydrogen absorption, as shown in fig. 2; after the hydrogen gas is absorbed, the palladium metal layer 2 expands in volume and the spin-orbit coupling effect changes, so that the spontaneously formed current 4 changes, as shown in fig. 3. The structure not only makes full use of the spin orbit coupling effect of the palladium metal layer, but also makes use of the excellent hydrogen sensitive characteristic of the palladium metal layer, and the hydrogen detection method of the structure can obtain smaller power consumption due to the characteristic of no dissipation of spin.

The following describes a method for manufacturing a hydrogen gas detection device with low power consumption by way of example,