Wafer cassette carrying device and wafer cassette carrying equipment
阅读说明:本技术 晶圆盒载运装置及晶圆盒载运设备 (Wafer cassette carrying device and wafer cassette carrying equipment ) 是由 古伊钧 林祺浩 吕思纬 陈荣哲 蔡佳棋 李旻哲 曹仁杰 于 2018-07-18 设计创作,主要内容包括:本发明公开了一种晶圆盒载运装置,包含:机台本体、控制模块、门框结构及门体模块。机台本体内预留有容置空间,以让相关人员选择性地设置抽排气模块。机台本体用以承载晶圆盒的盘体,具有多个预留凹槽,以让相关人员选择性地设置气体辅助组件。抽排气模块、气体辅助组件及控制模块能相互配合,以对晶圆盒内进行气体交换作业。门框结构、门体模块及控制模块能相互配合,以开启晶圆盒的盖体。门框结构远离盘体的一侧预留有设置吹气模块的结构、构件,以让相关人员选择性地设置吹气模块,从而使吹气模块于被开启的晶圆盒的一侧形成气帘。(The invention discloses an wafer cassette carrying device, which comprises a machine table body, a control module, a frame structure and a body module, wherein an accommodating space is reserved in the machine table body to enable related personnel to selectively arrange an air pumping and exhausting module, the machine table body is used for bearing a wafer cassette tray body and is provided with a plurality of reserved grooves to enable the related personnel to selectively arrange an air auxiliary assembly, the air pumping and exhausting module, the air auxiliary assembly and the control module can be mutually matched to carry out air exchange operation in the wafer cassette, the frame structure, the body module and the control module can be mutually matched to open a cover body of the wafer cassette, a structure and a component for arranging an air blowing module are reserved on the side of the frame structure, which is far away from the tray body, to enable the related personnel to selectively arrange the air blowing module, and accordingly the air blowing module forms an air curtain on the side of the opened wafer cassette.)
1, wafer cassette carrier device, comprising:
machine body, including disk body, the disk body includes a plurality of reserved grooves, the disk body is used to provide wafer box, each reserved groove is used to provide gas auxiliary components, the machine body has th accommodation space and second accommodation space, the second accommodation space is used to provide gas pumping module accommodation, the gas pumping module is used to connect with the gas auxiliary components, so as to exchange gas to the wafer box inside of the machine body through the gas auxiliary components;
control module disposed in the machine body and correspondingly located in the accommodating space;
frame structure, which is arranged on the machine body, wherein the frame structure comprises communication port, the frame structure is far away from side of the tray body and can provide blowing module arrangement, the control module can be electrically connected with the blowing module to control the blowing module to blow preset gas to the communication port;
body module, including driving mechanism and movable , the driving mechanism is installed on the machine body, the movable is connected with the driving mechanism, the control module can control the driving mechanism to act, so that the movable shields the communicating opening or does not shield the communicating opening, the movable is installed with opening module, the opening module can be driven by the driving mechanism to connect with the cover of the wafer box installed on the machine body;
when the control module controls the driving mechanism to connect the opening module of the movable part with the wafer cassette disposed on the machine body, the control module can control the driving mechanism to operate, so that the movable part and the cover body of the wafer cassette connected with the movable part are away from the communication port, and the inside of the wafer cassette can be communicated with the outside through the communication port;
when the frame structure is provided with the blowing module, and the control module controls the activity to be connected with the wafer cassette arranged on the machine body, the control module can control the blowing module to actuate, so that an air flow flowing towards the machine body is formed in the area of the communication port.
2. The wafer cassette carrier of claim 1 further comprising a plurality of gas assist assemblies, each gas assist assembly being detachably disposed in a plurality of the pre-grooves, each gas assist assembly comprising holders and nozzles, the holders being fixedly disposed in the pre-grooves, the nozzles being disposed in the holders and being capable of being fixed to the wafer cassettes disposed on the tray, the nozzles being capable of cooperating with the evacuation module for exchanging gas within the wafer cassettes, the tool body being provided with a slide module, the slide module being interconnected to the tray, the slide module being controllable by the control module to move the tray in a direction closer to the communication opening or move the tray in a direction away from the communication opening.
3. The wafer cassette carrier of claim 1 wherein the activity is configured with a counter that is controllable by the control module to count the number of wafers disposed in the wafer cassette when the activity is interconnected with the wafer cassette disposed on the tool body and the activity moves the lid of the wafer cassette.
4. The wafer cassette carrier apparatus of claim 3, wherein the counter comprises emitters and receivers, the emitters are pivotally connected to the movable , the receivers are pivotally connected to the movable , when the movable is connected to the wafer cassette mounted on the platform body and the movable drives the lid of the wafer cassette to move, the control module controls the emitters and receivers to rotate relative to the movable , such that the emitters and receivers are disposed facing each other, and the emitters and receivers facing each other move along with the movable to count the number of wafers mounted in the wafer cassette.
5. The wafer cassette carrier apparatus as claimed in claim 1, wherein the opening module comprises at least two engaging elements and at least two adsorbing elements, the two engaging elements are controlled by the control module to engage with a lid of the wafer cassette disposed on the machine body, each adsorbing element is connected to the evacuation module, the control module controls the evacuation module to perform gas exchange operation on the wafer cassette when the two engaging elements engage with the lid of the wafer cassette, a partition is disposed in the machine body, two opposite sides of the partition are the accommodating space and the second accommodating space, the control module is fixed on the side of the partition, the other side of the partition is used for fixing the evacuation module, the machine body further has a casing disposed under the disk, the casing is detachably disposed on the machine body, and when the casing is detached from the machine body, the partition and the control module are exposed to the machine body.
6, a wafer cassette carrier apparatus, comprising:
A wafer cassette carrier comprising:
machine body, including tray body, the tray body includes a plurality of reserved grooves, the tray body is used to bear wafer box, the machine body has the th accommodation space and the second accommodation space;
control module disposed in the machine body and located in the accommodating space;
frame structure disposed on the machine body, wherein the frame structure comprises communication port, and
body module including driving mechanism and movable , the driving mechanism is disposed on the machine body, the movable is connected with the driving mechanism, the control module can control the driving mechanism to act so that the movable shields or does not shield the communication opening, the movable is provided with opening module, the opening module can be driven by the driving mechanism to connect with the cover of the wafer box disposed on the machine body, and
an accessory device, comprising:
air blowing module detachably arranged at side of the frame structure far away from the tray body, wherein the air blowing module is electrically connected with the control module, and the control module can control the air blowing module to blow predetermined air to the communication port;
the gas auxiliary assemblies are correspondingly arranged in the reserved grooves; and
exhaust module detachably disposed in the machine body and located in the second accommodation space, wherein the exhaust module is connected to the plurality of gas-assisted components and can be controlled to enable at least gas-assisted components to perform gas exchange operation on the inside of the wafer cassette disposed on the machine body;
when the control module controls the driving mechanism to connect the opening module of the movable part with the wafer cassette disposed on the machine body, the control module can control the driving mechanism to operate, so that the movable part and the cover body of the wafer cassette connected with the movable part are away from the communication port, and the inside of the wafer cassette can be communicated with the outside through the communication port;
when the control module controls the movable part to be connected with the wafer cassette disposed on the machine body, the control module can control the blowing module to actuate, so as to form an air flow flowing towards the machine body in the area of the communication port.
7. The wafer cassette carrier apparatus of claim 6, further comprising a plurality of gas assist modules, each gas assist module being detachably disposed in the plurality of pre-formed grooves, each gas assist module comprising fixing seats and suckers, wherein the machine body is provided with a sliding module, the sliding module being connected to the tray body, and the sliding module being controlled by the control module to move the tray body in a direction close to the communication opening or move the tray body in a direction away from the communication opening.
8. The wafer cassette carrier apparatus of claim 6 wherein the activity is configured with a counter that is controllable by the control module to count the number of wafers disposed in the wafer cassette when the activity is interconnected with the wafer cassette disposed on the tool body and the activity moves the lid of the wafer cassette.
9. The wafer cassette carrier apparatus of claim 8 wherein the counter comprises emitters and receivers, the emitters are pivotally connected to the movable and the receivers are pivotally connected to the movable . when the movable is connected to the wafer cassette mounted on the platform body and the movable moves the lid of the wafer cassette, the control module can control the emitters and receivers to rotate relative to the movable such that the emitters and receivers face each other and move with the movable to count the number of wafers mounted in the wafer cassette.
10. The wafer cassette loading apparatus as claimed in claim 9, wherein the opening module comprises at least two engaging elements and at least two adsorbing elements, the two engaging elements are controlled by the control module to engage with a lid of the wafer cassette disposed on the machine body, each adsorbing element is connected to the evacuation module, the control module can control the evacuation module to perform gas exchange operation on the wafer cassette when the two engaging elements engage with the lid of the wafer cassette, a partition is disposed in the machine body, two opposite sides of the partition are the accommodating space and the second accommodating space, the control module is fixedly disposed on the side of the partition, the other side of the partition is used for fixing the evacuation module, the machine body further has a casing disposed under the disk, the casing is detachably disposed on the machine body, and when the casing is detached from the machine body, the partition and the control module are exposed to the machine body.
Technical Field
The present invention relates to types of carriers and carriers, and more particularly to a wafer cassette carrier and a wafer cassette carrier for conveying wafer cassettes.
Background
Most of the conventional apparatuses for transferring the pod have only a single function, such as a work station for temporarily storing the pod or a work station for inflating the interior of the pod, and therefore, the space of the factory is limited, so how to enable the single work station to support or perform various operations becomes a demand of related manufacturers.
Disclosure of Invention
The present invention is directed to wafer cassette carrier and apparatus thereof, which are used to improve the problem of the prior art that the workstation of the wafer cassette cannot support or execute a plurality of different operations at the same time according to the needs of the manufacturer.
In order to achieve the above object, the present invention provides a wafer cassette carrier device, comprising a machine body comprising 0 tray body comprising a plurality of preformed grooves, wherein the tray body is used for providing 3 wafer cassettes, each preformed groove is used for providing 5 gas auxiliary components, the machine body is internally provided with a No. 7 accommodating space and a No. 9 accommodating space, the second accommodating space is used for accommodating a gas pumping module, the gas pumping module is used for being connected with the gas auxiliary components so as to perform gas exchange operation on the interior of the wafer cassette arranged on the machine body through the gas auxiliary components, a 0 control module is arranged in the machine body and correspondingly positioned in the No. 5 accommodating space, a 1 frame structure is arranged on the machine body, the 2 frame structure comprises a communication port, the 4 frame structure is far away from the 1 side of the tray body and can provide a gas blowing module, the control module can be electrically connected with the gas blowing module so as to control the communication port, a 8 module comprises a driving mechanism and a movable driving mechanism, the driving mechanism 1 is arranged on the side of the tray body, the movable box, the driving mechanism is connected with the machine body so as to enable the wafer cassette to be connected with the wafer cassette, the driving mechanism, the movable driving mechanism, the driving mechanism is connected with the wafer cassette, the driving mechanism, the wafer cassette is connected with the driving mechanism, the wafer cassette, the driving mechanism, the wafer cassette is connected with the wafer cassette, the driving mechanism, the wafer cassette is connected with the wafer cassette, the wafer cassette driving mechanism, the wafer cassette is connected with the wafer cassette driving mechanism, the wafer cassette is connected with the wafer cassette, the wafer cassette driving mechanism, the wafer cassette driving mechanism, the wafer cassette, the wafer.
Preferably, the wafer cassette carrying device further comprises a plurality of gas auxiliary assemblies, each gas auxiliary assembly is detachably arranged in the plurality of reserved grooves and comprises an fixing seat and a nozzle, the fixing seat can be fixedly arranged in the reserved grooves, the nozzles are arranged on the fixing seats and can be mutually fixed with the wafer cassettes arranged on the tray body, the nozzles can be mutually matched with the exhaust module to exchange gas in the wafer cassettes, the machine table body is provided with a sliding module, the sliding module is mutually connected with the tray body, and the sliding module can be controlled by the control module to drive the tray body to move towards the direction close to the communicating port or drive the tray body to move towards the direction far away from the communicating port.
Preferably, the activity is provided with a counter, and when the activity is connected to the wafer cassette disposed on the machine body and the activity drives the cover of the wafer cassette to move, the counter can be controlled by the control module to count the number of wafers disposed in the wafer cassette.
Preferably, the counter comprises emitting units and receiving units, the emitting units are pivoted to the movable , the receiving units are pivoted to the movable , when the movable and the wafer cassette disposed on the machine body are connected with each other and the movable drives the cover of the wafer cassette to move together, the control module can control the emitting units and the receiving units to rotate relative to the movable , so that the emitting units and the receiving units are disposed facing each other, and the emitting units and the receiving units facing each other can move along with the movable to calculate the number of wafers disposed in the wafer cassette.
Preferably, the opening module includes at least two engaging elements and at least two adsorbing elements, the two engaging elements can be controlled by the control module to engage with a lid of the wafer cassette disposed on the machine body, each adsorbing element is connected to the exhaust module, when the two engaging elements engage with the lid of the wafer cassette, the control module can control the exhaust module to perform gas exchange operation on the wafer cassette, a partition plate is disposed in the machine body, two opposite side surfaces of the partition plate are the accommodating space and the second accommodating space, the control module is fixedly disposed on the side of the partition plate, the other side of the partition plate is used to fix the exhaust module, the machine body is further provided with a casing below the disk body, the casing is detachably disposed on the machine body, and when the casing is detached from the machine body, the partition plate and the control module can be exposed to the machine body.
In order to achieve the above object, the invention further provides wafer cassette carrying equipment comprising a wafer cassette carrying device, a machine table body, a control module, a frame structure, a 3 body module, an opening 1 module, a blowing control module and a blowing control module, wherein the wafer cassette carrying device comprises 2 machine table body comprising 4 disc bodies comprising a plurality of reserved grooves, the disc bodies are used for carrying 5 wafer cassettes, the machine table body is internally provided with a 0 th accommodating space and a 3 th second accommodating space, the control module is arranged in the machine table body and correspondingly positioned in the 6 th accommodating space, the frame structure is 0 arranged in the machine table body, the frame structure 1 comprises 7 communication openings, the body module comprises 8 driving mechanisms and 9 movement 6, the driving mechanisms are arranged in the machine table body, the movement 7 is connected with the driving mechanisms, the control module can control the driving mechanisms to actuate, so that the movement 8 shields the communication openings or does not shield the communication openings, the movement 9 is provided with the opening 1 module, the 2 module can be driven by the driving mechanisms to be mutually connected with a cover body of the wafer cassette arranged on the machine table body, the wafer cassette carrying module, the blowing control module is detachably arranged in the machine table body and correspondingly connected with the blowing control modules, the gas exchange modules, the blowing control modules are detachably arranged in the machine table body and correspondingly connected with the gas exchange modules, and the gas exchange modules, the blowing control modules are detachably connected with the gas exchange modules, and the gas exchange modules, when the gas exchange modules, the gas exchange modules are detachably connected with the gas exchange modules, the gas exchange modules are detachably arranged in the gas exchange modules, and the gas exchange modules, the gas exchange modules are detachably connected with the gas exchange modules, and the gas exchange modules are detachably connected with the gas exchange modules.
Preferably, the wafer cassette carrying device further comprises a plurality of gas auxiliary assemblies, each gas auxiliary assembly is detachably arranged in the plurality of reserved grooves and comprises an fixing seat and a sucking disc, the machine table body is provided with a sliding module, the sliding module is connected with the disc body, and the sliding module can be controlled by the control module to drive the disc body to move towards the direction close to the communication port or drive the disc body to move towards the direction far away from the communication port.
Preferably, the activity is provided with a counter, and when the activity is connected to the wafer cassette disposed on the machine body and the activity drives the cover of the wafer cassette to move, the counter can be controlled by the control module to count the number of wafers disposed in the wafer cassette.
Preferably, the counter comprises emitting units and receiving units, the emitting units are pivoted to the movable , the receiving units are pivoted to the movable , when the movable and the wafer cassette disposed on the machine body are connected with each other and the movable drives the cover of the wafer cassette to move together, the control module can control the emitting units and the receiving units to rotate relative to the movable , so that the emitting units and the receiving units are disposed facing each other, and the emitting units and the receiving units facing each other can move along with the movable to calculate the number of wafers disposed in the wafer cassette.
Preferably, the opening module includes at least two engaging elements and at least two adsorbing elements, the two engaging elements can be controlled by the control module to engage with a lid of the wafer cassette disposed on the machine body, each adsorbing element is connected to the exhaust module, when the two engaging elements engage with the lid of the wafer cassette, the control module can control the exhaust module to perform gas exchange operation on the wafer cassette, a partition plate is disposed in the machine body, two opposite side surfaces of the partition plate are the accommodating space and the second accommodating space, the control module is fixedly disposed on the side of the partition plate, the other side of the partition plate is used to fix the exhaust module, the machine body is further provided with a casing below the disk body, the casing is detachably disposed on the machine body, and when the casing is detached from the machine body, the partition plate and the control module can be exposed to the machine body.
The wafer box carrying device has the beneficial effects that the plurality of reserved grooves and the second accommodating space are arranged on the disc body of the wafer box carrying device, so that relevant manufacturers of the wafer box carrying device can add the gas auxiliary assembly and the exhaust module in the reserved grooves and the second accommodating space according to the requirements of relevant users, and the wafer box carrying device can open the cover body of the wafer box by using the module so that relevant personnel or equipment can take and place wafers in the wafer box, and can also use the mutual matching of the gas auxiliary assembly and the exhaust module so as to carry out gas exchange operation on the interior of the wafer box.
Drawings
Fig. 1 is a schematic view of a wafer cassette carrier apparatus of the present invention.
Fig. 2 is a partially exploded view of the wafer cassette carrier apparatus of the present invention.
Fig. 3 is a partially enlarged schematic view of the wafer cassette carrier apparatus of the present invention.
Fig. 4 is a partially exploded view of the wafer cassette carrier apparatus of the present invention.
Fig. 5 is a schematic view of another perspective of the wafer cassette carrier apparatus of the present invention.
Fig. 6 is another partially exploded view of the wafer cassette carrier apparatus of the present invention.
Fig. 7 is a schematic view of a wafer cassette.
Fig. 8 is a schematic view of the wafer cassette carrying apparatus of the present invention provided with a wafer cassette.
Fig. 9 is an operation diagram of the wafer cassette loading apparatus of the present invention with the wafer cassette.
Fig. 10 is a schematic view showing the gas flow inside the wafer cassette mounted on the wafer cassette carrier apparatus of the present invention.
Detailed Description
Please , refer to fig. 1 to 4, which are schematic diagrams of the wafer
The
The
In the drawings, the
it should be noted that the
In order to effectively fix the wafer cassette F disposed on the
The detecting
Please referring to fig. 4 to 6, body module 14 is disposed on the
As shown in fig. 5 to 7, the movable has an
In a specific embodiment, as shown in fig. 4, the
The specific embodiment of the
In different applications, the
The two
As shown in fig. 5, 6, and 8 to 10, the
For example, the
As shown in fig. 2, 3 and 10, when the cover F2 is moved away from the wafer cassette F by the
When the related equipment or personnel do not need to pick up or place the wafer in the wafer box F, the
Please , refer to fig. 2, 4 and 6, which are schematic views of the wafer cassette carrier of the present invention, wherein only some components of the
As shown in fig. 2, the
As shown in FIG. 4, the
As shown in fig. 6, the
As described above, the
In the case that the
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