阅读说明：本技术 一种精密半导体清洗装置 (Accurate semiconductor belt cleaning device ) 是由 陈建华 薛敬伟 王锡胜 胡长文 刘庆贵 于 2019-10-12 设计创作，主要内容包括：本发明涉及半导体技术领域,公开了一种精密半导体清洗装置,包括箱体、控制器、水箱、半导体进出口、废水出口；箱体的内部左侧固定安装有气缸腔,气缸腔的内中部固定有气缸,气缸的右侧输出端设置有穿过气缸腔的横向的活塞杆,活塞杆的末端固定安装有旋转安装块,旋转安装块的右侧转动连接有与活塞杆同轴心的连接杆,连接杆的末端固定安装有夹持块,箱体的内部右侧固定安装有旋转电机腔,旋转电机腔的内中部设置有旋转电机,旋转电机的左侧输出端转动连接有穿过旋转电机腔的旋转杆,旋转杆的末端也固定安装有夹持块。夹持块的一侧设置有夹持口,位于夹持块上方的箱体的内顶部向下设置有两组喷水口。本发明冲洗速度快,全面,精度高,效果好。(The invention relates to the technical field of semiconductors, and discloses a precision semiconductor cleaning device which comprises a box body, a controller, a water tank, a semiconductor inlet, a semiconductor outlet and a wastewater outlet; the inside left side fixed mounting of box has the cylinder chamber, the interior middle part in cylinder chamber is fixed with the cylinder, the right side output of cylinder is provided with the horizontal piston rod that passes the cylinder chamber, the terminal fixed mounting of piston rod has rotatory installation piece, the right side of rotatory installation piece is rotated and is connected with the connecting rod with the piston rod is with the axle center, the terminal fixed mounting of connecting rod has the grip block, the inside right side fixed mounting of box has the rotating electrical machines chamber, the interior middle part in rotating electrical machines chamber is provided with the rotating electrical machines, the left side output of rotating electrical machines rotates and is connected with the rotary rod that passes the rotating electrical machines chamber, the terminal also fixed mounting of. One side of the clamping block is provided with a clamping opening, and the inner top of the box body above the clamping block is downwards provided with two groups of water spraying openings. The invention has the advantages of high flushing speed, comprehensiveness, high precision and good effect.)

1. A precision semiconductor cleaning device comprises a box body (10), a controller (11), a water tank (12), a semiconductor inlet and outlet (13) and a waste water outlet (17); the semiconductor water heater is characterized in that the box body (10) is of a transparent structure, a cylinder cavity (19) is fixedly mounted on the left side of the inside of the box body (10), an air cylinder (20) is fixed in the middle of the inside of the cylinder cavity (19), a transverse piston rod (21) penetrating through the cylinder cavity (19) is arranged at the right output end of the air cylinder (20), a rotary mounting block (22) is fixedly mounted at the tail end of the piston rod (21), a connecting rod (23) coaxial with the piston rod (21) is rotatably connected to the right side of the rotary mounting block (22), a clamping block (16) is fixedly mounted at the tail end of the connecting rod (23), a rotary motor cavity (18) is fixedly mounted at the right side of the inside of the box body (10), the utility model discloses a water tank (12) of fixing at box (10) upper surface is provided with the solenoid valve on raceway (29), waste water outlet (17) have been seted up downwards to the bottom left and right sides of box (10) to the interior middle part in rotating electrical machine chamber (18), the left side output of rotating electrical machine (24) rotates and is connected with rotary rod (25) that pass rotating electrical machine chamber (18), the end of rotary rod (25) also fixed mounting has grip block (16), one side of grip block (16) is provided with centre gripping mouth (26), the interior top of box (10) that is located grip block (16) top is provided with two sets of water jet (28) downwards, the top of water jet (28) communicates through raceway (29) and fixes on water tank (12) of box (10) upper surface, be.

2. A precision semiconductor cleaning device according to claim 1, characterized in that four sets of pads for keeping the bottom of the tank (10) stable are fixedly installed on the bottom of the tank (10).

3. A precision semiconductor cleaning apparatus according to claim 2, wherein the cross section of the tank (10) is configured to be an upper semicircular lower rectangular shape.

4. A precision semiconductor cleaning device according to claim 3, characterized in that a group of push-pull type flaps (14) is provided in the middle of the semiconductor inlet/outlet (13).

5. A precision semiconductor cleaning device according to claim 4, characterized in that the pushing block (13) is fixedly mounted on the top of the cover (14).

6. The precision semiconductor cleaning apparatus according to claim 1, wherein a rubber pad (27) is fixedly adhered to an inner surface of the holding opening (26).

7. The precision semiconductor cleaning device according to claim 6, wherein the cylinder (20), the rotating motor (24), the water jet (28) and the solenoid valve are electrically connected to the controller (11).

8. A precision semiconductor cleaning device according to claim 1 or 2, characterized in that a set of flow guide plates with upward convex middle parts are fixedly arranged on the inner surface of the box body (10) between the two sets of waste water outlets (17).

Technical Field

The invention relates to the technical field of semiconductors, in particular to a precise semiconductor cleaning device.

Background

Cleaning of semiconductor wafers is a very delicate task and the semiconductor wafers are demanding in terms of cleaning environment, which requires ensuring cleanliness of the surrounding environment during cleaning, and cleaning of the wafers is also a time-consuming and labor-consuming task.

Chinese patent (publication No. CN 110112086A, bulletin date: 2019.08.09) discloses a semiconductor wafer cleaning device, which comprises a feeding system, a discharging system, an operation system and a grabbing system, wherein the feeding system and the discharging system both comprise two material belts, the intermittent feeding and discharging of a semiconductor wafer are realized through the synchronous operation of the two material belts, when the grabbing system moves to a cleaning area of a cam ring rail under the action of a chain, the grabbing system extends into a cleaning box, and when the grabbing system moves to a parallel area of the cam ring rail under the action of the chain, the grabbing system leaves the cleaning box; and when the grabbing system moves to the feeding system and the discharging system, the grabbing system is contacted with the claw opening limiting device and is opened. However, the cleaning equipment cannot ensure that each position of the semiconductor can be flushed, so that the flushing is incomplete, and the flushing precision is influenced.

Disclosure of Invention

The present invention has been made to solve the above-mentioned problems occurring in the background art.

In order to achieve the purpose, the invention provides the following technical scheme: a precision semiconductor cleaning device comprises a box body, a controller, a water tank, a semiconductor inlet, a semiconductor outlet and a wastewater outlet; the controller is fixedly installed in the middle of the left side wall of the box body, and the controller can control the start and stop of each part of the whole device. The box sets up to transparent construction, and convenient to use person observes inside condition. The top left side fixed mounting of box has a set of water tank, has seted up the semiconductor downwards on the right side box of water tank and has imported and exported, and the inside left side fixed mounting of box has the cylinder chamber, and the interior middle part in cylinder chamber is fixed with the cylinder, and the right side output of cylinder is provided with the horizontal piston rod that passes the cylinder chamber, and the terminal fixed mounting of piston rod has rotatory installation piece, and the right side of rotatory installation piece is rotated and is connected with the connecting rod with the same axle center with the piston rod, and the terminal fixed mounting of connecting rod has the. The inside right side fixed mounting of box has the rotating electrical machines chamber, and the interior middle part in rotating electrical machines chamber is provided with the rotating electrical machines, and the left side output of rotating electrical machines rotates and is connected with the rotary rod that passes the rotating electrical machines chamber, and the terminal also fixed mounting of rotary rod has the grip block. One side of grip block is provided with the centre gripping mouth, and the inside of centre gripping mouth is used for the one side of centre gripping semiconductor body, can carry out the centre gripping fixedly with the semiconductor body that gets into from semiconductor import and export through the left and right sides grip block. The piston rod is driven to move left and right through the starting cylinder, the clamping blocks at the tail ends of the connecting rods are driven to adjust the position left and right, the right end of the semiconductor body is placed in the clamping blocks at the tail ends of the rotating rods, then the semiconductor body is tightly fixed between the two groups of clamping blocks through the clamping blocks at the tail ends of the connecting rods at the left side, then the rotating motor is started to drive the rotating rods to rotate, and then the semiconductor body between the two groups of clamping blocks is driven to rotate. The top of the interior of the box that is located the grip block top is provided with two sets of water jets downwards, and the top of water jet communicates through the raceway and fixes on the water tank of box upper surface, is provided with the solenoid valve on the raceway for the flow of control raceway normal water, through the downward water spray of water jet, and then washs the semiconductor body of centre gripping between the grip block, is convenient for carry out the omnidirectional abundant washing to semiconductor body through adopting rotatory abluent mode. And the left side and the right side of the bottom of the box body are downwards provided with a wastewater outlet, so that the flushed wastewater is conveniently discharged through the wastewater outlet.

As a further scheme of the invention: four groups of cushion blocks used for keeping the bottom of the box body stable are fixedly arranged at the bottom of the box body.

As a further scheme of the invention: the cross section of the box body is set to be a rectangle with a semicircular upper part and a semicircular lower part, so that the whole box body is kept to be stably placed, and meanwhile, the attractiveness of the box body can be improved.

As a further scheme of the invention: a group of push-pull type opening covers are arranged in the middle of the semiconductor inlet and outlet, push blocks are fixedly mounted at the tops of the opening covers, and the semiconductor inlet and outlet can be opened and closed conveniently through the push-pull type opening covers.

As a further scheme of the invention: the rubber pad is fixedly adhered to the inner surface of the clamping opening, and the rubber pad is arranged to improve the clamping force of the semiconductor body and prevent the semiconductor body from being abraded.

As a further scheme of the invention: the air cylinder, the rotating motor, the water spraying opening and the electromagnetic valve are all electrically connected with the controller.

As a still further scheme of the invention: the internal surface fixed mounting that is located the box between two sets of waste water exports has a set of middle part bellied guide plate that makes progress, and the setting up of guide plate is convenient for guide and washes the quick waste water to waste water export in flow of production, prevents to take place to pile up in the inside of box.

Compared with the prior art, the invention has the beneficial effects that: through treating abluent semiconductor centre gripping in the intermediate position of box, then set up it into rotation state, and then two sets of water jets of rethread are washed it, and the omnidirectional of being convenient for is washed, guarantees the precision of washing.

Drawings

Fig. 1 is a schematic view of an external structure of a precision semiconductor cleaning apparatus.

FIG. 2 is a schematic diagram of a front view of an internal structure of a precision semiconductor cleaning apparatus.

FIG. 3 is a schematic diagram of a clamping block in a precision semiconductor cleaning apparatus.

Wherein: the semiconductor device comprises a box body 10, a controller 11, a water tank 12, a semiconductor inlet and outlet 13, a cover 14, a semiconductor body 15, a clamping block 16, a waste water outlet 17, a rotary motor cavity 18, a cylinder cavity 19, a cylinder 20, a piston rod 21, a rotary mounting block 22, a connecting rod 23, a rotary motor 24, a rotary rod 25, a clamping port 26, a rubber pad 27, a water spray port 28 and a water delivery pipe 29.

Detailed Description

The technical solution of the present patent will be described in further detail with reference to the following embodiments.