阅读说明：本技术 一种基于空化现象的声波探测器 (Acoustic detector based on cavitation phenomenon ) 是由 不公告发明人 于 2019-09-27 设计创作，主要内容包括：本发明涉及一种基于空化现象的声波探测器,包括下固定板,所述下固定板的上方设置有第一电极,所述第一电极的上方设置有压电材料层,所述压电材料层的上方设置有第二电极,所述第二电极的上方设置有隔离层,所述隔离层的上方设置有相互间隔的支撑部,所述支撑部的上方设置有上固定板,所述隔离层、支撑部、上固定板中间形成空腔,所述空腔内设置有空化液体；该基于空化现象的声波探测器,通过在空腔内设置空化液体,当声波作用于空化液体的时候,会使得液体产生空化现象,从而增加空腔内部的压力,通过检测压电材料层的导电特性的变化,实现声波的检测。(The invention relates to a sound wave detector based on cavitation phenomenon, which comprises a lower fixing plate, wherein a first electrode is arranged above the lower fixing plate, a piezoelectric material layer is arranged above the first electrode, a second electrode is arranged above the piezoelectric material layer, an isolation layer is arranged above the second electrode, supporting parts which are mutually spaced are arranged above the isolation layer, an upper fixing plate is arranged above the supporting parts, a cavity is formed among the isolation layer, the supporting parts and the upper fixing plate, and cavitation liquid is arranged in the cavity; this sound wave detector based on cavitation through set up cavitation liquid in the cavity, when the sound wave acted on cavitation liquid, can make liquid produce cavitation to increase the inside pressure of cavity, through the change that detects piezoelectric material layer's conductive characteristic, realize the detection of sound wave.)

1. The acoustic detector based on the cavitation phenomenon is characterized by comprising a lower fixing plate (1), wherein a first electrode (2) is arranged above the lower fixing plate (1), a piezoelectric material layer (3) is arranged above the first electrode (2), a second electrode (4) is arranged above the piezoelectric material layer (3), an isolation layer (5) is arranged above the second electrode (4), supporting parts (7) which are mutually spaced are arranged above the isolation layer (5), an upper fixing plate (8) is arranged above the supporting parts (7), a cavity (6) is formed among the isolation layer (5), the supporting parts (7) and the upper fixing plate (8), and cavitation liquid is arranged in the cavity (6).

2. A sonic detector based on cavitation as claimed in claim 1, characterized in that the cavity (6) is further provided with a layer of porous material (9).

3. A sonic detector based on cavitation as claimed in claim 2, characterized in that the height of the layer of porous material (9) is higher than the height of the liquid surface of the cavitation liquid.

4. A sonic detector based on cavitation as claimed in claim 1, characterized in that the side walls of the cavity (6) are provided with a layer of aerogel material (11) inside.

5. A sonic detector based on cavitation as claimed in claim 1, characterized in that the interior of one side wall of the cavity (6) is provided with a sonic reflecting layer (10).

6. The acoustic wave sensor based on cavitation phenomenon as claimed in claim 1, wherein the upper portion of the isolation layer (5) is provided with a plurality of supporting portions to form a plurality of cavities.

7. The acoustic detector based on cavitation as claimed in claim 6, wherein said plurality of cavities are in communication.

Technical Field

The invention relates to the technical field of sound wave detection, in particular to a sound wave detector based on cavitation.

Background

Acoustic wave detectors are becoming very important today, either as part of a speech transmission device or can be used as part of a photo acoustic detector in a gas analyzer for analyzing a gas, e.g. ambient air.

A frequently used acoustic wave detector is designed as a capacitive detector, which has two capacitor-defining diaphragms spaced apart from one another. One of the diaphragms is fixed and the other is displaceable by the acoustic wave to be detected. The displacement of the movable diaphragm determines a capacitance change of the capacitor, which can be detected by a suitable read circuit and can be output as an electrical signal from which a characteristic of the sound waves to be detected, for example the sound pressure, can be inferred.

Although the capacitive acoustic wave probe is characterized by high sensitivity, it has many disadvantages mainly caused by its complicated structure.

The disadvantages of the conventional capacitive acoustic wave sensor with regard to its complex structure can be eliminated by a piezoelectric acoustic wave sensor. Such detectors use a membrane made of piezoelectric material that is deformable by the acoustic wave to be detected. The deformation of the piezoelectric film induces a voltage in the piezoelectric film, which can be detected by a suitable read circuit and can be output as an electrical signal from which the characteristics of the acoustic wave to be detected can be deduced.

The existing sound wave detector has the defects of complex structure and easy influence from the outside.

Disclosure of Invention

The invention aims to solve the problems that the existing sound wave detector is complex in structure and is easily influenced by the outside.

Therefore, the invention provides a sound wave detector based on cavitation phenomenon, which comprises a lower fixing plate, wherein a first electrode is arranged above the lower fixing plate, a piezoelectric material layer is arranged above the first electrode, a second electrode is arranged above the piezoelectric material layer, an isolation layer is arranged above the second electrode, supporting parts which are mutually spaced are arranged above the isolation layer, an upper fixing plate is arranged above the supporting parts, a cavity is formed among the isolation layer, the supporting parts and the upper fixing plate, and cavitation liquid is arranged in the cavity.

The cavity is further provided with a porous material layer.

The height of the porous material layer is higher than the height of the liquid level of the cavitation liquid.

An aerogel material layer is arranged inside the side wall of the cavity.

And a sound wave reflecting layer is arranged inside the side wall at one side of the cavity.

The upper portion of isolation layer is provided with a plurality of supporting parts, forms a plurality of cavitys.

The cavities are communicated.

The invention has the beneficial effects that: according to the acoustic wave detector based on the cavitation phenomenon, the cavitation liquid is arranged in the cavity, when acoustic waves act on the cavitation liquid, the liquid can generate the cavitation phenomenon, so that the pressure in the cavity is increased, the pressure can act on the isolation layer, the isolation layer can generate the desired pressure, the piezoelectric material layer below the isolation layer is extruded, and the detection of the acoustic waves is realized by detecting the change of the conductive characteristic of the piezoelectric material layer; the acoustic wave detector based on the cavitation phenomenon has the advantages of simple structure, high detection sensitivity, strong anti-interference capability, simple structure and the like.

The present invention will be described in further detail below with reference to the accompanying drawings.

Drawings

Fig. 1 is a schematic structural diagram one of an acoustic wave detector based on cavitation phenomenon.

Fig. 2 is a schematic structural diagram of an acoustic wave probe based on cavitation.

Fig. 3 is a schematic structural diagram three of an acoustic wave probe based on cavitation.

Fig. 4 is a fourth schematic structural diagram of an acoustic wave probe based on cavitation.

Fig. 5 is a schematic structural diagram five of an acoustic wave probe based on cavitation.

In the figure: 1. a lower fixing plate; 2. a first electrode; 3. a layer of piezoelectric material; 4. a second electrode; 5. an isolation layer; 6. a cavity; 7. a support portion; 8, fixing a plate; 9. a layer of porous material; 10. an acoustic wave reflective layer; 11. a layer of aerogel material.

Detailed Description

To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.