阅读说明：本技术 双镭射烧结陶瓷材料的方法及其烧结设备 (Method for sintering ceramic material by double lasers and sintering equipment thereof ) 是由 林宗立 林致扬 于 2019-10-16 设计创作，主要内容包括：一种双镭射烧结陶瓷材料的方法,包含有以下步骤：提供陶瓷浆料,其包含有陶瓷粉末及溶剂；铺设陶瓷浆料；以第一镭射光照射及加热陶瓷浆料之特定区域,以使特定区域之陶瓷浆料进行成型程序,进而形成生胚层；以第二镭射光加热生胚层以烧结生胚层,进而形成陶瓷层。其中,第一镭射光的波长系落于溶剂的吸收波长范围之内,而第二镭射光的波长系落于陶瓷粉末的吸收波长范围之内。本发明之方法可提高陶瓷层之硬度及表面细致度,以及提高形状分辨度及保持制程形状精度。本发明亦提供实施此方法之陶瓷材料的烧结设备。(A method for sintering ceramic material by double lasers comprises the following steps: providing ceramic slurry, which comprises ceramic powder and a solvent; paving ceramic slurry; irradiating and heating a specific region of the ceramic slurry with a first laser beam to perform a forming process on the ceramic slurry in the specific region, thereby forming a raw layer; and heating the green layer with the second laser light to sinter the green layer, thereby forming the ceramic layer. Wherein the first laser light has a wavelength falling within an absorption wavelength range of the solvent, and the second laser light has a wavelength falling within an absorption wavelength range of the ceramic powder. The method of the present invention can increase the hardness and surface fineness of the ceramic layer, and increase the shape resolution and maintain the shape precision of the manufacturing process. The invention also provides an apparatus for sintering ceramic materials for carrying out the method.)

1. A method for sintering a ceramic material by double lasers comprises the following steps:

providing a ceramic slurry, which comprises a ceramic powder and a solvent;

laying the ceramic slurry;

irradiating and heating a specific area of the ceramic slurry with a first laser beam to perform a forming process on the ceramic slurry in the specific area, thereby forming a raw germ layer; and

heating the green layer with a second laser beam to sinter the green layer to form a ceramic layer;

wherein the wavelength of the first laser light is within the absorption wavelength range of the solvent, and the wavelength of the second laser light is within the absorption wavelength range of the ceramic powder.

2. The method of claim 1, wherein the solvent has an absorption wavelength in a range of 1000 to 20000nm, and the first laser light comprises one of carbon dioxide laser light and diode laser light.

3. The method of claim 1, wherein the ceramic powder has an absorption wavelength in the range of 1000 to 12000nm, and the second laser light comprises one of fiber laser light and Nd-YAG laser light.

4. The method of claim 1, further comprising the steps of, before the step of heating the green layer with the second laser light to sinter the green layer to form the ceramic layer:

removing the ceramic slurry without forming the germinal layer.

5. The method of claim 1, wherein said step of irradiating and heating said specific region of said ceramic slurry with said first laser light to perform said shaping process on said specific region of said ceramic slurry, thereby forming said green layer further comprises the steps of:

irradiating the specific area of the ceramic slurry with the first laser light to perform a chemical reaction on the ceramic slurry in the specific area to release water molecules; and

heating the water molecule by the first laser light to evaporate the water molecule from the ceramic slurry, thereby forming the green layer.

6. The method of dual laser sintering ceramic material of claim 5 wherein said chemical reaction comprises at least one of a hydrolysis reaction, a condensation reaction, a polymerization reaction and a sol-gel reaction.

7. The method of dual laser sintering a ceramic material of claim 1 wherein said ceramic slurry has a solids content of between 50% and 80%.

8. The method of claim 1 wherein said ceramic powder has a particle size of 50 to 50000 nm.

9. The method of claim 7, wherein said ceramic powder further comprises nano-scale ceramic powder having a particle size of 50-500 nm.

10. A sintering apparatus for ceramic materials for three-dimensional printing, the sintering apparatus comprising:

the lifting device is provided with a material placing part and a lifting part, the material placing part is used for providing a ceramic slurry placing area, the lifting part is coupled with the material placing part, the lifting part is used for lifting or lowering the material placing part, and the ceramic slurry comprises ceramic powder and a solvent;

a feeding device arranged above the material placing part, wherein the feeding device is used for providing a ceramic slurry to the material placing part;

a first laser device arranged above the lifting device, wherein the first laser device is used for emitting first laser to the ceramic slurry arranged on the material placing part to form a primary germ layer; and

a second laser device disposed above the lifting device, the second laser device being used to emit a second laser to the green layer disposed on the material placing member to form a ceramic layer;

the first laser device and the second laser device control the action paths of the first laser light and the second laser light, the action paths of the first laser light and the second laser light are adjusted corresponding to the material placing part, so that the first laser device emits the first laser light to the ceramic slurry on the material placing part, and the second laser device emits the second laser light to the green layer on the material placing part, the wavelength of the first laser light is within the absorption wavelength range of the solvent, and the wavelength of the second laser light is within the absorption wavelength range of the ceramic powder.

[ technical field ] A method for producing a semiconductor device

The present invention relates to a method for sintering ceramic material and a sintering apparatus thereof, and more particularly, to a method for sintering ceramic material by using laser light with two wavelengths in combination with a three-dimensional printing technique and a sintering apparatus for implementing the method.

[ Prior Art ]

The conventional ceramic products have brittle and fragile characteristics, and thus are only applied to ornamental products. However, with the rapid development of industrial technologies related to ceramics, the excellent characteristics of ceramic materials, such as high hardness, high strength, high temperature resistance, wear resistance, corrosion resistance, acid and alkali resistance, oxidation resistance, insulation, and non-magnetic properties, have been developed and widely used.

In addition to the general ceramic molding method, with the development of three-dimensional printing technology, the molding of ceramic materials can also be achieved by using the three-dimensional printing technology. At present, ceramic three-dimensional printing and forming technologies can be mainly classified into ink-jet printing (IJP), Fused Deposition Modeling (FDM), Layered Object Manufacturing (LOM), Selective Laser Sintering (SLS), and stereo light curing (SLA). The ceramic blank obtained by three-dimensional printing by using the technologies can be degreased and sintered at high temperature to obtain a ceramic finished product.

If the ceramic slurry is heated by high power laser to solidify or even sinter the ceramic slurry, the solvent and ceramic powder in the ceramic slurry will vibrate rapidly due to heating, and thus the problem of thermal expansion caused by sputtering or excessive melting of the ceramic powder during the forming process is easily occurred. Due to these problems, the ceramic product obtained by high power laser processing has problems of low shape resolution, loose structure, rough surface or incomplete sintering. Therefore, there is a need for improvement.

[ summary of the invention ]

In view of the above, one aspect of the present invention is to provide a method for sintering a ceramic material by dual laser sintering, which comprises the following steps: providing ceramic slurry, which comprises ceramic powder and a solvent; paving ceramic slurry; irradiating and heating a specific region of the ceramic slurry with a first laser beam to perform a forming process on the ceramic slurry in the specific region, thereby forming a raw layer; and heating the green layer with the second laser light to sinter the green layer, thereby forming the ceramic layer. Wherein the first laser light has a wavelength falling within an absorption wavelength range of the solvent, and the second laser light has a wavelength falling within an absorption wavelength range of the ceramic powder.

Wherein the absorption wavelength range of the solvent is between 1000 and 20000 nm. The first laser light includes one of carbon dioxide laser light and diode laser light.

Wherein the absorption wavelength range of the ceramic powder is between 1000 and 12000 nm. The second laser light includes one of fiber laser light and Nd-YAG laser light.

Wherein, before the step of heating the raw germ layer by the second laser light to sinter the raw germ layer and further form the ceramic layer, the method further comprises the following steps: removing the ceramic slurry without forming the germinal layer.

Wherein, in the step of irradiating and heating the specific area of the ceramic slurry by the first laser light to make the ceramic slurry in the specific area perform the forming process, thereby forming the raw layer, the method further comprises the following steps: irradiating a specific region of the ceramic slurry with first laser light to perform a chemical reaction on the ceramic slurry in the specific region to release water molecules; heating water molecules with the first laser light to evaporate the water molecules from the ceramic slurry, thereby forming a raw germ layer.

Wherein the chemical reaction comprises at least one of a hydrolysis reaction, a condensation reaction, a polymerization reaction, and a sol-gel reaction.

Wherein the solid content of the ceramic slurry is between 50% and 80%.

Wherein the ceramic powder has a particle size of 50 to 50000 nm.

Wherein the grain size of the ceramic powder further comprises at least nano-scale ceramic powder with grain size between 50 to 500 nm.

The invention also provides a sintering device of the ceramic material, which is applied to three-dimensional printing. The sintering equipment comprises a lifting device, a feeding device, a first laser device and a second laser device. The lifting device is provided with a material placing component and a lifting component. The material placing component is used for providing a region for placing the ceramic slurry, the lifting component is coupled with the material placing component, and the lifting component is used for lifting or lowering the material placing component. The feeding device is arranged above the material placing part and used for providing ceramic slurry to the material placing part. The first laser device is arranged above the lifting device. The first laser device is used to emit a first laser to the ceramic slurry disposed on the material placing member to form a raw layer. The second laser device is arranged above the lifting device. The second laser device is used to emit a second laser to the raw layer on the material-placing component to form a ceramic layer. The first laser device and the second laser device control action paths of the first laser light and the second laser light, the action paths of the first laser light and the second laser light are adjusted corresponding to the material placing part, so that the first laser device emits the first laser light to ceramic slurry on the material placing part, and the second laser device emits the second laser light to a green layer on the material placing part. Wherein the ceramic slurry comprises ceramic powder and a solvent, and the wavelength of the first laser light falls within the absorption wavelength range of the solvent, and the wavelength of the second laser light falls within the absorption wavelength range of the ceramic powder.

Compared with the prior art, the method for sintering the ceramic material by double laser sintering of the invention heats according to the absorption wavelength of the material component to be sintered and formed. The sintering method of the present invention has the following advantages: 1. the method comprises the steps of irradiating and heating a solvent contained in ceramic slurry and laser light with the wavelength corresponding to that of ceramic powder according to the absorption wavelength range of the solvent and the ceramic powder, enabling the ceramic slurry to firstly perform chemical reaction to release water molecules, further firstly improving the solid content of the ceramic slurry, and then sintering to avoid one-time sintering of the ceramic slurry, so that the ceramic powder is sputtered along with the evaporation of the solvent due to overhigh energy, and further the sintered ceramic layer is loose in structure, rough in surface or even incomplete in sintering. 2. The ceramic slurry is irradiated and heated by the first laser light falling within the absorption wavelength range of the solvent to increase the solid content of the ceramic slurry, and the ceramic powder is sintered by the second laser light falling within the absorption wavelength range of the ceramic powder to increase the density of the sintered ceramic layer and increase the hardness of the ceramic layer. 3. The invention utilizes two laser lights to heat different components in the ceramic slurry, and the method of heating different components gradually can prevent the ceramic slurry from the problem of thermal diffusion caused by excessive melting, thereby improving the shape resolution. 4. The method of the invention not only can lead the ceramic slurry to be firstly solidified into the green body, but also can lead the green body to be completely sintered into the ceramic, thereby achieving the working procedure of one-time sintering in the processing process of single batch of three-dimensional printing, and not needing to carry out sintering procedure on the three-dimensional printed finished product by additionally utilizing a high-temperature furnace after the three-dimensional printing is finished, thereby reducing the cost of manufacturing working hours, working procedures and equipment.

[ brief description of drawings ]

FIG. 1 is a schematic view of a ceramic material in a one-stage process.

FIG. 2 is a flow chart of steps in one embodiment of a method of dual laser sintering ceramic material in accordance with the present invention.

FIG. 3 is a schematic flow diagram according to FIG. 2.

Fig. 4 is a flow chart of steps in another embodiment of a method of dual laser sintering ceramic material in accordance with the present invention.

FIG. 5 is a flowchart illustrating steps in a further embodiment of a method for dual laser sintering ceramic materials in accordance with the present invention.

FIG. 6 is a schematic diagram of an embodiment of a sintering apparatus for sintering ceramic materials by dual laser sintering according to the present invention.

FIG. 7 is a schematic diagram of an embodiment of a sintering apparatus for dual laser sintering ceramic materials according to the present invention.

FIG. 8 is a schematic diagram of another embodiment of an apparatus for sintering ceramic material by dual laser sintering according to the present invention.

[ notation ] to show

E: material placing plate

1: ceramic slurry

11: ceramic powder

12: solvent(s)

2: germinal layer

3: ceramic layer

4: sintering equipment

41: lifting device

411: material placing part

412: lifting component

42: feeding device

431: first laser device

4311: first laser light

432: second laser device

4321: second laser light

44: scraping knife

S1-S63: step (ii) of

S21-S32: substeps of

[ embodiment ] A method for producing a semiconductor device

In order that the advantages, spirit and features of the invention will be readily understood and appreciated, embodiments thereof will be described and illustrated with reference to the accompanying drawings. It should be noted that these examples are only representative examples of the present invention. It may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

The terminology used in the various embodiments of the disclosure is for the purpose of describing particular embodiments only and is not intended to be limiting of the various embodiments of the disclosure. As used herein, the singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise. Unless otherwise defined, all terms (including technical and scientific terms) used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which the various embodiments of the disclosure belong. The above terms (such as those defined in commonly used dictionaries) should be interpreted as having a meaning that is consistent with their meaning in the context of the same technical field and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

To sinter and form the ceramic slurry, the ceramic slurry may be heated by laser light to solidify the ceramic slurry, and then the solidified ceramic slurry is sintered at high temperature in a high temperature furnace to obtain the final ceramic product. Alternatively, a one-stage process of directly sintering a ceramic slurry into a ceramic product by high-power laser light is also attempted in order to save cost. Referring to FIG. 1, FIG. 1 is a schematic view illustrating a ceramic material in a one-stage process. As shown in fig. 1, in a stage process of directly sintering a ceramic slurry 1 on a material placing plate E into a ceramic by using high-power optical fiber laser light or carbon dioxide laser light, since a high-temperature process is directly performed on the ceramic slurry 1 at room temperature, a solvent 12 and ceramic powder 11 in the ceramic slurry 1 are easily vibrated violently by instantaneous high-temperature heating, and when the vibration is too violent, problems of sputtering and excessive melting are easily caused, thereby causing the surface of a ceramic product to be rough, the shape resolution to be low, and the internal structure to be loose and fragile. In addition, the agglomeration density of the nano-sized ceramic powder 11 is increased in a region where the temperature is high. When the high power laser beam of a stage process instantaneously heats the surface of the ceramic slurry 1, the ceramic slurry 1 at room temperature is directly heated, so that the ceramic slurry 1 is agglomerated unevenly with the nano-scale ceramic powder 11, so that the ceramic product has a low structural strength, even an incomplete sintering problem.

In order to solve the above problems, the present invention provides a method for sintering a ceramic material by dual laser, which comprises performing a multi-stage heating process on different components in a ceramic slurry 1. Referring to fig. 2 and 3, fig. 2 is a flowchart illustrating steps of an embodiment of a method for sintering ceramic materials by dual laser sintering according to the present invention, and fig. 3 is a schematic flowchart illustrating the steps of fig. 2. As shown in FIG. 2, the method of the present invention comprises the following steps: step S1: providing a ceramic slurry 1 comprising a ceramic powder 11 and a solvent 12; step S2: laying the ceramic slurry 1 on a material placing plate E; step S3: irradiating and heating a specific region of the ceramic slurry 1 with a first laser light to remove the solvent 12 contained in the ceramic slurry 1 in the specific region, thereby forming a raw layer 2; step S4: the green layer 2 is heated by the second laser light to sinter the ceramic powder 11 contained in the green layer 2, thereby forming the ceramic layer 3. Wherein the wavelength of the first laser light falls within the absorption wavelength range of the solvent 12, and the wavelength of the second laser light falls within the absorption wavelength range of the plurality of ceramic powders 11.

In the embodiment of fig. 2, after the step S4, the method further includes the following steps: step S5: the ceramic slurry 1 without the formation of the germinal layer 2 is removed. The cleaned ceramic layer 3 is obtained by step S5.

Referring further in combination to fig. 4, fig. 4 is a flowchart illustrating steps of another embodiment of a method for dual laser sintering ceramic material in accordance with the present invention. As shown in the embodiments of fig. 3 and 4, the ceramic slurry 1 is irradiated and heated with one of carbon dioxide laser light and diode laser light corresponding to the absorption wavelength range of the solvent 12 in the ceramic slurry 1 as the first laser light. Since the wavelength of the first laser light falls within the absorption wavelength range of the solvent 12, the solvent 12 in the ceramic slurry 1 proceeds to step S31 due to irradiation when heated by the first laser light: a specific region on the ceramic slurry 1 is heated by the first laser light to cause the ceramic slurry 1 to perform a chemical reaction to release water molecules. And since the solvent 12 in the ceramic slurry 1 is rapidly vibrated to be evaporated, the step S32 is performed: the water molecules are heated with the first laser light to evaporate the water molecules from the ceramic slurry 1. At this time, the ceramic powder 11 does not vibrate rapidly with the solvent 12, but only the heat energy generated by the rapid vibration of the solvent 12 raises the temperature thereof, thereby indirectly achieving the preheating effect. After the first laser light heating, the solvent 12 in the ceramic slurry 1 is almost removed to form the raw germ layer 2, and the ceramic powder 11 is also arranged more closely. Then, the green layer 2 is heated by using one of the fiber laser light and the Nd-YAG laser light falling within the absorption wavelength range of the ceramic powder 11 as a second laser light. The first laser light has preheated the raw germ layer 2 first and the arrangement between the ceramic powders 11 is also tighter. When the second laser light is used for heating, the ceramic powder 11 will not generate sputtering problem due to the temperature difference reduced by preheating and the close arrangement, and further the ceramic powder 3 with high structural density and high shape resolution is sintered. Wherein the absorption wavelength range of the solvent 12 is between 1000 and 20000nm, and in a more preferred embodiment, the absorption wavelength range of the solvent 12 is between 1500 and 20000 nm. The absorption wavelength range of the ceramic powder 11 is between 1000 and 12000 nm.

In detail, in the ceramic slurry 1 used in the present invention, the solvent 12 further includes a nano metal oxide and an organic solvent, which can be generated by a sol-gel method including a hydrolysis reaction and a condensation reaction after being irradiated by the first laser light. Therefore, the ceramic slurry 1 of the present invention releases water molecules by condensation reaction. The method of the present invention employs a sol-gel method to coat the ceramic powder 11 in the ceramic slurry 1 with gel and to bond the ceramic powder 11 together, thereby increasing the mechanical strength of the raw layer 2. In addition, it should be noted that the ceramic slurry 1 used in the method of the present invention can undergo a sol-gel reaction upon irradiation with laser light, but in one embodiment, when the irradiation with laser light is accompanied by heat, the sol-gel reaction accelerates the reaction due to the heating of the laser light. Therefore, the chemical reaction in the method of the present invention may include the irradiation of laser light, and both the irradiation of laser light and the heating.

In summary, the multi-stage dual laser process of the present invention avoids the problem of thermal diffusion caused by one-time heating of all the components in the ceramic slurry 1 in the present one-stage process. The thermal diffusion is caused by the fact that a part of molecules in the material vibrate excessively and violently, and the adjacent molecules are driven to vibrate, so that all the molecules in the material are in a rapid vibration state. Therefore, if the solvent 12 and the ceramic powder 11 are vibrated at the same time, the solvent 12 and the ceramic powder 11 are easily vibrated excessively by thermal diffusion, and the ceramic powder 11 is easily melted excessively. The present invention is to heat single or partial components separately, and when only single or partial components absorb laser light greatly due to absorption wavelength, other components will not or to a very small extent vibrate, thereby avoiding the problem of excessive melting. In other words, in the process of heating and sintering the ceramic powder 11 by the second laser light, the second laser light does not directly vibrate the solvent 12 and raise the temperature to evaporate or only slightly. Therefore, it is ensured that the vibration heating degree of the ceramic powder 11 can be controlled without causing the problem of excessive melting, and the process shape accuracy can be maintained.

It should be noted that the present invention is directed to heating the ceramic slurry 1 by laser light with corresponding wavelength in the absorption wavelength range of different components. Therefore, it is understood that one skilled in the art can use this concept to heat different materials by using laser light other than carbon dioxide laser light, diode laser light, fiber laser light, and Nd-YAG laser light, but not limited thereto. In other words, one skilled in the art can heat multiple materials separately, and heat multiple stages with more corresponding laser light to maintain the precision of the shape of the object at each stage of the process.

When the ceramic slurry 1 with high water content is heated to remove water, problems such as sputtering, uneven heating, inconsistent thickness, rough surface, etc. may occur. In one embodiment, the first laser light includes a first low power laser light and a first high power laser light having the same wavelength but different powers. The ceramic slurry 1 is heated with a first low power laser light to remove part of the water, the ceramic slurry 1 is heated with a second high power laser light to remove the remaining water to form the green sheets 2, and finally the ceramic layer 3 is sintered with the second laser light. In this embodiment, the first laser light is used at least twice and from low power to high power, so as to avoid the loose structure, improve the surface fineness and the structural stability of the final product, and improve the bonding strength due to the advantages of uniform heating, uniform particle density, uniform thickness and high bonding strength.

Ceramics are a wide variety of products produced by powdering a nonmetallic inorganic material having an ionic bond and then sintering the powder at a high temperature. During sintering, atoms are rearranged, so that the powder particles grow into grains gradually. The growth rate of the crystal grains can affect the sizes of pores between the crystal grains, and the compactness can be reduced when the growth rate is too high or too low. During sintering, in the initial sintered state, the distance between the centers of the powder particles is reduced to close. In the intermediate sintering state, the powder particles will have distinct corners, changing from the original spherical shape to a polygonal shape. At the end of sintering or the final stage, the pores between the powder particles will gradually become smaller. Generally, if the sintering temperature and time are not sufficient, the pores of the final product will increase and enlarge. The sintering temperature and time are moderate, the better the compactness is, and the strength and the hardness are relatively enhanced. If the sintering time is too long, the crystal grains become large and the strength is lowered. If the temperature is too high and the grain growth speed is too fast, the holes are wrapped by the grains, and the compactness is reduced. It can be seen that the second laser 4321 used for sintering can be adjusted with different powers according to the sintering/crystallization/crystal phase arrangement required for different materials, and those skilled in the art can make appropriate adjustments.

The method for sintering the ceramic material by double lasers is applied to the three-dimensional printing technology, namely, ceramic slurry 1 is laid on a material placing part of a sintering device of the ceramic material, and the process of stacking layer by layer is carried out. Referring to fig. 5, fig. 5 is a flowchart illustrating a method for sintering ceramic material by dual lasers according to another embodiment of the present invention. As shown in fig. 5, in the embodiment of fig. 5, the step S2 further includes a sub-step of: and laying ceramic slurry on the three-dimensional printing device. After step S4, the method further includes the following steps: step S61: laying ceramic slurry on the ceramic layer to form an nth layer of ceramic slurry; step S62: irradiating and heating the n-th specific region on the n-th layer ceramic slurry with first laser light 4311 to remove the solvent contained in the n-th layer ceramic slurry of the n-th specific region, thereby forming an n-th layer of green layer; step S63: the nth green layer is heated by the second laser light to sinter the plurality of ceramic powders 11 contained in the nth green layer, thereby forming an nth ceramic layer. Wherein n is an integer of 2 or more. In other words, the method of the present invention can be applied to a three-dimensional printing technology, wherein a dual laser sintering process is performed for each layer of ceramic slurry to obtain a three-dimensional ceramic product, and the ceramic slurry that is not formed is removed after the three-dimensional printing is completed.

In addition to the embodiment of fig. 5, in another embodiment, during the three-dimensional printing process, when each layer of ceramic slurry is sintered into a ceramic layer, the ceramic slurry without forming a green layer and a ceramic layer is removed first, so as to ensure that the ceramic slurry without forming or sintering is not formed or sintered in a non-specific area by the laser heating process of the next layer, thereby improving the precision of the finished product.

In the above embodiment, during three-dimensional printing, the sintered ceramic layer in the nth specific region in the nth layer may be connected to the sintered ceramic layer in the nth-1 specific region in the nth layer, and the connected region may be a part of the nth specific region and a part of the nth-1 specific region, so as to obtain a three-dimensional ceramic product. Wherein, the n-th specific area can be larger than, equal to or smaller than the n-1-th specific area.

In addition, in the above embodiment, the solid content of the ceramic slurry 1 is between 50% and 80%, so as to ensure that the ceramic powder is uniformly dispersed in the ceramic slurry, and if the ceramic slurry with too high or too low solid content is used, it is feared that the three-dimensional printing is not favorable for laying. The ceramic powder has a particle size of 50 to 50000 nm. Wherein, at least comprises ceramic powder with nano-grade grain size, the grain size of the ceramic powder is between 50 to 500nm, in a preferred embodiment, the grain size of the ceramic powder is between 50 to 200 nm. The nano-grade ceramic powder is mixed because the absorption efficiency of the ceramic powder is improved in the nano-grade process, so that the ceramic powder can be melted in advance to assist the unmelted ceramic powder to gather and adhere with each other, thereby improving the structural density and avoiding the problem of sputtering of the ceramic powder.

In addition, the ceramic powder of the ceramic slurry comprises at least one of silicon dioxide, silicon carbide, silicon nitride, titanium dioxide, zirconium dioxide and aluminum oxide. Besides ceramic powder and solvent, the ceramic slurry can be added with copolymer material to improve the adhesive strength of the solidified germinal layer. The copolymer material comprises polylactic acid (PLA), poly-L/D-lactate (PLDLA), polyvinyl alcohol (PVA), polyethylene glycol (poly (ethylene oxide), PEG), chitin (Chitosan), sodium Alginate (Alginate) and Gelatin (Gelatin). The ceramic powder 11 and the copolymer material can be adjusted according to the needs of those skilled in the art, but not limited thereto.

Referring to fig. 6 to 8, fig. 6 is a schematic device diagram of an embodiment of a sintering apparatus for dual laser sintering ceramic material according to the present invention, fig. 7 is a schematic operation diagram of an embodiment of a sintering apparatus 4 for dual laser sintering ceramic material according to the present invention, and fig. 8 is a schematic operation diagram of another embodiment of a sintering apparatus 4 for dual laser sintering ceramic material according to the present invention. As shown in fig. 6 to 8, the method for sintering ceramic material by dual laser sintering according to the present invention can be implemented by the following sintering equipment 4, and the forming and sintering principle is the same as the above method, which will not be described herein again. The sintering apparatus 4 comprises a lifting device 41, a feeding device 42, a first laser device 431 and a second laser device 432. The lifting device 41 includes a material placing member 411 and a lifting member 412. The material placing part 411 is used for providing an area for placing the ceramic slurry 1, the lifting part 412 is coupled to the material placing part 411, and the lifting part 412 is used for lifting or lowering the material placing part 411. The feeding device 42 is disposed above the material placing member 411, and the feeding device 42 is used for providing the ceramic slurry 1 onto the material placing member 411. The first laser device 431 is disposed above the lifting device 41. The first laser device 431 is used to emit first laser light 4311 to the ceramic slurry 1 placed on the material placing part 411 to form a raw germ layer 2. The second laser device 432 is disposed above the lifting device 41. The second laser device 432 is used to emit a second laser beam 4321 to the raw layer 2 disposed on the material placing part 411 to form a ceramic layer 3. The first laser device 431 and the second laser device 432 can control the action paths of the first laser beam 4311 and the second laser beam 4321, so that the action paths of the first laser beam 4311 and the second laser beam 4321 can be adjusted corresponding to the material placing part 411, so that the first laser device 431 emits the first laser beam 4311 to the ceramic slurry 1 on the material placing part 411, and the second laser device 432 emits the second laser beam 4321 to the raw germ layer 2 on the material placing part 411. Wherein the ceramic slurry comprises ceramic powder and a solvent, and the wavelength of the first laser light falls within the absorption wavelength range of the solvent, and the wavelength of the second laser light falls within the absorption wavelength range of the ceramic powder.

In addition, in practical applications, in order to ensure that the ceramic slurry 1 is laid smoothly, a scraper 44 may be further included to scrape the surface of the laid ceramic slurry 1 off. As shown in fig. 7, a supply device 42 lays the ceramic slurry 1 on a material placing member 411, and a scraper 44 scrapes the surface of the ceramic slurry 1 to the same height. Next, first laser light 4311 is emitted with the first laser device 431 to irradiate and heat the ceramic slurry 1 and cause a chemical reaction to form the germinal layer 2. Further, second laser light 4321 is emitted from a second laser device 432 to the ceramic slurry 1 to sinter the green sheets 2, thereby forming a ceramic layer 3. Wherein, in the process of irradiating and heating the first laser beam 4331, water molecules released from the ceramic slurry 1 by chemical reaction are evaporated, so that the ceramic slurry 1 is formed into a green layer 2.

As shown in fig. 8, when three-dimensional printing of a ceramic material is to be performed, the lifting device 41 can be lowered by a certain height to allow the feeding device 42 to stack the nth layer of ceramic slurry 1 on the sintered ceramic layer 3, and then the steps described in the embodiment of fig. 7 are repeated to sinter the nth layer of ceramic slurry 1 into the nth layer of ceramic layer 3.

In addition, the method and sintering apparatus 4 for sintering ceramic material by dual laser of the present invention can be further applied to ceramic coating, wherein an object to be coated with ceramic material on the surface is placed on the material placing part 411, a ceramic slurry 1 is laid on the surface of the object by the material supplying device 42, a first laser device 431 is used to emit a first laser beam 4311 to irradiate and heat the position to be coated with ceramic material on the object to form a green layer 2, and a second laser device 432 is used to emit a second laser beam 4321 on the green layer 2 to form a ceramic layer 3. The above steps are repeated until the ceramic layer 3 has been provided on the object at the location where the ceramic material is to be applied.

In addition, it should be understood that the first laser device 431 and the second laser device 432 are configured to provide the first laser beam 4311 and the second laser beam 4321 with different wavelength ranges, so that if one laser device can provide the first laser beam 4311 and the second laser beam 4321 with two different wavelengths, only one laser device can be used for operation, and the operation is not limited thereto.

Compared with the prior art, the method for sintering the ceramic material by double lasers and the sintering equipment 4 of the invention heat according to the absorption wavelength of the material component to be sintered and formed, so that the ceramic slurry 1 can be gradually sintered into the ceramic layer 3 by double lasers in the three-dimensional printing process without sintering by a high-temperature furnace. The method of the present invention can increase the density of the sintered ceramic layer 3, prevent sputtering during the process to increase the hardness and surface fineness of the ceramic layer 3, and prevent the ceramic slurry 1 from excessive melting and thermal diffusion, thereby increasing the shape resolution and maintaining the shape precision of the process. In addition, the method and sintering equipment 4 for sintering ceramic material by double lasers of the invention can also be applied to the ceramic coating on the surface of the object made of the same material or different materials, thereby further expanding the application range of the ceramic industry.

The foregoing detailed description of the embodiments is intended to more clearly illustrate the features and spirit of the invention, and not to limit the scope of the invention by the embodiments disclosed above. On the contrary, it is intended to cover various modifications and equivalent arrangements included within the scope of the claims.