阅读说明：本技术 基于激光诱导击穿光谱的玻璃表面附着物检测器 (Glass surface attachment detector based on laser induced breakdown spectroscopy ) 是由 李阔湖 赵志敏 宋晓燕 孙现亭 王雪晴 代克杰 吴天放 于 2019-09-10 设计创作，主要内容包括：本发明涉及一种基于激光诱导击穿光谱的玻璃表面附着物检测器；该检测器含有激光器﹑中央控制器﹑光谱仪﹑激光耦合器﹑N个相同的激光聚焦器和光采集器﹑水平设置的安装板,激光器﹑中央控制器﹑光谱仪﹑激光耦合器均设置在安装板上,安装板的上表面均匀开有N对激光聚焦及采集通孔,每对激光聚焦及采集通孔中安装有激光聚焦器和光采集器；中央控制器的激光发射控制信号输出口与激光器的控制信号输入口连接,激光器发出的激光通过激光耦合器进入N个激光聚焦器,N个光采集器的输出光纤接口与光谱仪连接,光谱仪的检测信号输出口与中央控制器的检测信号输入口连接；本发明检测快速﹑自动化程度高,且对玻璃板的破坏小﹑检测结果可靠。(The present invention relates to a kind of glass surface attachment detector based on laser induced breakdown spectroscopy；The detector, which contains centre in sharp light device ﹑, controls the sharp N number of identical laser focalizer of photo-coupler ﹑ of device ﹑ light spectrum instrument ﹑ processed and the horizontally disposed mounting plate of light collector ﹑, swash the device ﹑ light spectrum instrument ﹑ laser couplers processed of centre control in light device ﹑ to be respectively provided on a mounting board, the upper surface of mounting plate is uniformly provided with N and through-hole is focused and acquired to laser, and each pair of laser, which is focused and acquired in through-hole, is equipped with laser focalizer and light collector；The Laser emission control signal output of central controller and the control signal input of laser connect, the laser that laser issues enters N number of laser focalizer by laser couplers, the output optical fibre interface of N number of light collector is connect with spectrometer, and the detection signal output of spectrometer and the detection signal input of central controller connect；The present invention detects Kuai Su ﹑ high degree of automation, and reliable to the destruction little ﹑ testing result of glass plate.)

1. a kind of glass surface attachment detector based on laser induced breakdown spectroscopy, it is characterized in that: containing the center Ji Guang Qi ﹑ It controls device ﹑ light spectrum instrument ﹑ processed and swashs the poly- burnt N number of identical light collector of device ﹑ of the N number of identical laser of photo-coupler ﹑ and horizontally disposed peace Loading board, the centre Ji Guang Qi ﹑ Zhong Kong Qi ﹑ Guang Pu Yi ﹑ laser couplers are arranged on the upper surface of mounting plate, the upper table of mounting plate Face periphery is provided with installation through-hole, and the upper surface middle part of mounting plate is uniformly provided with N and through-hole is focused and acquired to identical laser；It is each pair of Laser focus and acquisition through-hole contain a laser focalizer through-hole and a light collector through-hole, the laser focalizer through-hole and The light collector through-hole is disposed adjacent, and is equipped with a laser focalizer in the laser focalizer through-hole, the light collector through-hole In a light collector is installed, the laser exit wound of bullet of laser focalizer is arranged vertically downward, and the light-receiving mouth of light collector inclines It is arranged obliquely, the laser that the laser exit wound of bullet of laser focalizer projects is focused at the coke of the object lens of the light-receiving mouth of light collector Point at or near focal point, and the primary optical axis of laser focalizer pass through light collector light-receiving mouth object lens focus；Center control The Laser emission control signal output of device processed and the control signal input of laser connect, the initial laser that laser issues Into in laser couplers, N number of output optical fibre interface of laser couplers passes through the optical fiber input with N number of laser focalizer respectively Optical fiber interface connection, the output optical fibre interface of N number of light collector close the input optical fibre interface of 1 optical fiber and spectrometer by a N Connection, the detection signal output of spectrometer and the detection signal input of central controller connect, the trigger signal of laser The connection of the external trigger signal input part of output end and spectrometer.

2. the glass surface attachment detector according to claim 1 based on laser induced breakdown spectroscopy, it is characterized in that: Contain N number of partially reflecting mirror and N number of first convex lens inside the laser couplers, the initial laser that laser issues is penetrated the On the reflecting surface of 1 partially reflecting mirror, and the angle of the reflecting surface of the initial laser and the 1st partially reflecting mirror is 45 °, the 2nd ~N number of partially reflecting mirror is successively set in the reflected light path of the 1st partially reflecting mirror, and the 2nd~N number of partially reflecting mirror it is anti- Penetrate that face is parallel with the 1st reflecting surface of partially reflecting mirror, it is anti-that the reflecting surface of the 2nd~N number of partially reflecting mirror reflects the 1st part The reflected light of mirror is penetrated, the 1st the first convex lens is located at the rear of the 1st partially reflecting mirror and is located in the optical path of initial laser, 2nd~N number of first convex lens is respectively provided at the 2nd~reflected light path of N number of partially reflecting mirror in, N number of output of laser couplers The light receiving surface center of optical fiber interface is located at the rear focal point of N number of first convex lens, and the key light of N number of first convex lens Axis is respectively perpendicular across the light receiving surface center of N number of output optical fibre interface of laser couplers, and N is less than or equal to 5.

3. the glass surface attachment detector according to claim 2 based on laser induced breakdown spectroscopy, it is characterized in that: Also contain diaphragm inside the laser couplers, diaphragm is located at the front of the 1st partially reflecting mirror, the central axis of diaphragm and swashs The central axis for the initial laser that light device issues is overlapped, and the initial laser that laser issues after diaphragm by penetrating the 1st part On the reflecting surface of reflecting mirror.

4. the glass surface attachment detector according to claim 1 based on laser induced breakdown spectroscopy, it is characterized in that: Containing the second convex lens and third convex lens being one in front and one in back arranged inside each laser focalizer, the second convex lens is located at The key light overlapping of axles of the input optical fibre interface dead astern of laser focalizer, the second convex lens and third convex lens are in a center line On, which passes through the light emergence face center of the input optical fibre interface of laser focalizer, the input light of laser focalizer The distance between the light emergence face center of fine interface and the optical center of the second convex lens are equal to the focal length of the second convex lens, third convex lens Mirror is located at the laser exit wound of bullet of laser focalizer.

5. the glass surface attachment detector according to claim 1 based on laser induced breakdown spectroscopy, it is characterized in that: Containing the 4th convex lens and the 5th convex lens being one in front and one in back arranged inside each light collector, the 4th convex lens is located at light At the light-receiving mouth of collector, the output optical fibre interface of light collector is located at the dead astern of the 5th convex lens, the 4th convex lens and For the key light overlapping of axles of 5th convex lens on one article of center line, which passes through the output optical fibre interface of light collector Light receiving surface center, the light receiving surface center of the output optical fibre interface of light collector and the distance between the optical center of the 5th convex lens Equal to the focal length of the 5th convex lens.

6. the glass surface attachment detector according to claim 1 based on laser induced breakdown spectroscopy, it is characterized in that: The Ji Guang Qi ﹑ spectrometer and laser couplers are arranged in the control box on mounting plate upper surface.

7. the glass surface attachment detector according to claim 6 based on laser induced breakdown spectroscopy, it is characterized in that: The model of the laser are as follows: DPS-1064-mini；The model of spectrometer are as follows: Avaspec-Mini2048-UVI10；Center control Device processed is computer.

8. the glass surface attachment detector according to claim 1 based on laser induced breakdown spectroscopy, it is characterized in that: The N focuses and is acquired to laser through-hole and is in line on the upper surface of mounting plate, or arranges by matrix form, or presses annulus Form arrangement；Mounting plate is rectangular slab, is respectively provided with an installation through-hole at four angles of mounting plate upper surface.

9. the glass surface attachment detector according to claim 1 based on laser induced breakdown spectroscopy, it is characterized in that: The shape of the laser focalizer is cylinder, and laser focalizer through-hole is vertically disposed circular through hole, laser focalizer Upper side is equipped with laterally protruding edge, and laterally protruding edge is stuck on the upper surface of mounting plate；The shape of light collector is also cylinder Shape, light collector through-hole are the circular through hole being obliquely installed, and the upper side of light collector is equipped with oblique protrusion edge, oblique protrusion Edge is stuck on the upper surface of mounting plate.

10. the glass surface attachment detector according to claim 1 based on laser induced breakdown spectroscopy, feature Be: the laser that the laser exit wound of bullet of the laser focalizer projects is focused at the focal point of the object lens of the light-receiving mouth of light collector Or focus close beneath.

(1), technical field:

The present invention relates to a kind of glass surface attachment detector, in particular to a kind of glass based on laser induced breakdown spectroscopy Surface attachments detector.

(2), background technique:

Currently, glass plate is in manufacture, carrying and process, some impurity easy to attach, such as when with float glass, Glass surface can adhere to tin element.The impurity of glass surface attachment will affect the processing technologys such as subsequent plating, therefore want Which kind of glass surface is detected, it is determined whether attachment impurity and attachment impurity.But lacking at present can online/on-site test glass The technology of glass surface attachments ingredient.

Laser induced breakdown spectroscopy (Laser Induced Breakdown Spectroscopy, abbreviation LIBS) is a kind of Atomic emission spectrum technology, it generates plasma using high intensity pulses laser ablation sample, is analyzed by spectrometer collection Plasma emission spectroscopy obtains the type and content of element in sample.LIBS technology has Kuai speed Jian Ce ﹑ less or is not required to sample The advantages that lower sample Sun Hao ﹑ of product Bei ﹑ online in situ detection.

(3), summary of the invention:

The technical problem to be solved by the present invention is providing a kind of glass surface attachment analyte detection based on laser induced breakdown spectroscopy Device should detect Kuai Su ﹑ high degree of automation based on the glass surface attachment detector of laser induced breakdown spectroscopy, and to glass The destruction little ﹑ testing result of plate is reliable.

Technical solution of the present invention:

A kind of glass surface attachment detector based on laser induced breakdown spectroscopy entreats Kong Qi ﹑ spectrum containing Ji Guang Qi ﹑ Zhong Instrument ﹑ swashs the poly- burnt N number of identical light collector of device ﹑ of the N number of identical laser of photo-coupler ﹑ and horizontally disposed mounting plate, swashs light device ﹑ The centre Zhong Kong Qi ﹑ Guang Pu Yi ﹑ laser couplers are arranged on the upper surface of mounting plate, and the upper surface periphery of mounting plate is provided with peace Through-hole is filled, the upper surface middle part of mounting plate is uniformly provided with N and through-hole is focused and acquired to identical laser；Each pair of laser is focused and is adopted Collection through-hole contains a laser focalizer through-hole and a light collector through-hole, and the laser focalizer through-hole and the light collector are logical Hole is disposed adjacent, and is equipped with a laser focalizer in the laser focalizer through-hole, is equipped with one in the light collector through-hole The laser exit wound of bullet of light collector, laser focalizer is arranged vertically downward, and the light-receiving mouth of light collector is arranged diagonally downward, swashs The laser that the laser exit wound of bullet of light focalizer projects be focused at the object lens of the light-receiving mouth of light collector focal point or focus it is attached Closely, and the primary optical axis of laser focalizer pass through light collector light-receiving mouth object lens focus；The laser of central controller is sent out The control signal input for penetrating control signal output and laser connects, and the initial laser that laser issues enters laser coupled In device, N number of output optical fibre interface of laser couplers is connected with the input optical fibre interface of N number of laser focalizer respectively by optical fiber It connects, the output optical fibre interface of N number of light collector is connected by the input optical fibre interface that a N closes 1 optical fiber and spectrometer, spectrometer Detection signal output and central controller detection signal input connect, the trigger signal output end and spectrum of laser The external trigger signal input part of instrument connects, and provides trigger signal for spectrometer.

Contain N number of partially reflecting mirror and N number of first convex lens inside laser couplers, the initial laser that laser issues is penetrated the On the reflecting surface of 1 partially reflecting mirror, and the angle of the reflecting surface of the initial laser and the 1st partially reflecting mirror is 45 °, the 2nd ~N number of partially reflecting mirror is successively set in the reflected light path of the 1st partially reflecting mirror, and the 2nd~N number of partially reflecting mirror it is anti- Penetrate that face is parallel with the 1st reflecting surface of partially reflecting mirror, it is anti-that the reflecting surface of the 2nd~N number of partially reflecting mirror reflects the 1st part The reflected light of mirror is penetrated, the 1st the first convex lens is located at the rear of the 1st partially reflecting mirror and is located in the optical path of initial laser, 2nd~N number of first convex lens is respectively provided at the 2nd~reflected light path of N number of partially reflecting mirror in, N number of output of laser couplers The light receiving surface center of optical fiber interface is located at the rear focal point of N number of first convex lens, and the key light of N number of first convex lens Axis is respectively perpendicular across the light receiving surface center of N number of output optical fibre interface of laser couplers, and N is less than or equal to 5.

Also contain diaphragm inside laser couplers, diaphragm is located at the front of the 1st partially reflecting mirror, the central axis of diaphragm It is overlapped with the central axis of the initial laser of laser sending, the initial laser that laser issues after diaphragm by penetrating at the 1st On the reflecting surface of partially reflecting mirror.

Diaphragm can carry out shaping to initial laser beam, keep the cross section of initial laser beam round.

When laser inject partially reflecting mirror when, a part of laser be partially reflected mirror reflection, another part laser directly from Partially reflecting mirror transmissive；Initial laser a part that laser issues is reflected away by the 1st partially reflecting mirror, another Part is focused at the light of the 1st output optical fibre interface through the 1st the first convex lens again after the 1st partially reflecting mirror transmissive Receiving plane center, the laser that the 1st partially reflecting mirror reflects away sequentially passes through the 2nd~N number of partially reflecting mirror and through 2~N The reflection of a partially reflecting mirror, the laser that the 2nd~N number of partially reflecting mirror reflects away respectively through the 2nd~N number of first convex lens assembles The 2nd~the light receiving surface center of N number of output optical fibre interface.

Contain the second convex lens and third convex lens being one in front and one in back arranged, the second convex lens inside each laser focalizer Positioned at the input optical fibre interface dead astern of laser focalizer, the key light overlapping of axles of the second convex lens and third convex lens are in one On heart line, the central axis pass through laser focalizer input optical fibre interface light emergence face center, laser focalizer it is defeated Enter the focal length that the distance between the light emergence face center of optical fiber interface and the optical center of the second convex lens are equal to the second convex lens, third Convex lens is located at the laser exit wound of bullet of laser focalizer.

Contain the 4th convex lens and the 5th convex lens being one in front and one in back arranged, the 4th convex lens position inside each light collector At the light-receiving mouth of light collector, the output optical fibre interface of light collector is located at the dead astern of the 5th convex lens, the 4th convex lens On one article of center line, the output optical fibre which passes through light collector connects the key light overlapping of axles of mirror and the 5th convex lens The light receiving surface center of mouth, between the light receiving surface center of the output optical fibre interface of light collector and the optical center of the 5th convex lens Distance is equal to the focal length of the 5th convex lens.

Ji Guang Qi ﹑ spectrometer and laser couplers are arranged in the control box on mounting plate upper surface.

The model of laser are as follows: DPS-1064-mini；The model of spectrometer are as follows: Avaspec-Mini2048-UVI10；In Centre controller is computer.

N focuses and is acquired to laser through-hole and is in line on the upper surface of mounting plate, or arranges by matrix form, or press Form of annular rings arrangement.

Mounting plate is rectangular slab, is respectively provided with an installation through-hole at four angles of mounting plate upper surface.

The shape of laser focalizer is cylinder, and laser focalizer through-hole is vertically disposed circular through hole, and laser focuses The upper side of device is equipped with laterally protruding edge, and laterally protruding edge is stuck on the upper surface of mounting plate；The shape of light collector is also Cylinder, light collector through-hole are the circular through hole being obliquely installed, and the upper side of light collector is equipped with oblique protrusion edge, oblique Protrusion edge is stuck on the upper surface of mounting plate.

The laser that the laser exit wound of bullet of laser focalizer projects is focused at the focus of the object lens of the light-receiving mouth of light collector Place or focus close beneath (such as: be focused at below focus at 0mm~3mm).

By taking the tin face for detecting glass plate as an example, the course of work of the glass surface attachment detector are as follows: central controller It issues Laser emission and controls signal, control laser issues pulse laser, and pulse laser is coupled into N optical fiber through laser couplers In, while laser issues trigger signal control spectrometer and acquires optical signal in the time of setting, the laser difference in N optical fiber It is transmitted in N number of laser focalizer, then focuses on N number of point in the detected face of glass plate by N number of laser focalizer, and in N Plasma is inspired at a point, the light that the plasma at N number of point issues is coupled into one after the acquisition of N number of light collector respectively N is closed in 1 optical fiber, is then transmit to spectrometer and is carried out optical signal parsing, the spectral information parsed via spectrometer inside Detector module be converted to electric signal after be transmitted to central controller, by central controller according to spectral information determine tin element It whether there is, if there is the spectral line of tin element, then the detected face of glass plate is tin face, otherwise the other one side of glass plate is tin Face.

It, can be by the installation through-hole on mounting plate by glass when using the glass surface attachment detector in actual production Surface attachments detector is installed in the production line, and glass surface attachment detector is made to be located at the top of glass plate, so i.e. It is convenient to detect glass plate.

Beneficial effects of the present invention:

Attachment (such as: tin element) of the 1 ﹑ present invention using LIBS technology detection glass pane surface, the mountable life in glass plate On-line checking in producing line detects Kuai Su ﹑ high degree of automation.

2, the initial laser that laser issues is divided into N beam using laser couplers by the present invention, then is passed to through optical fiber N number of sharp It in light focalizer, is focused at N number of point on glass plate through N number of laser focalizer, N is then acquired using N number of light collector again The light that plasma at a point issues is detected；Due to using laser beam splitter multipoint acquisition, can both collect higher Total spectral intensity improves detection limit, while each excitation point being made to have lower laser intensity again, reduces laser ablation pair as far as possible The destruction of glass reduces the influence to glass plate.

The 3 ﹑ present invention use multi-point detection method, it is therefore prevented that glass pane surface attachment (such as: tin element) when single-point detects Error caused by uneven, testing result are reliable.

(4), Detailed description of the invention:

Fig. 1 is the structural schematic diagram of the glass surface attachment detector based on laser induced breakdown spectroscopy；

Fig. 2 is the A-A schematic cross-sectional view in Fig. 1；

Fig. 3 is the circuit and light channel structure schematic diagram of the glass surface attachment detector based on laser induced breakdown spectroscopy；

Fig. 4 is the internal structure and light path schematic diagram of laser couplers；

Fig. 5 is the internal structure and light path schematic diagram of laser focalizer；

Fig. 6 is the internal structure and light path schematic diagram of light collector；

Light channel structure schematic diagram when Fig. 7 is the glass surface attachment sensors work based on laser induced breakdown spectroscopy；

Fig. 8 is the structural schematic diagram of fine adjustment optical fiber interface；

Fig. 9 is the B-B schematic cross-sectional view in Fig. 8；

Figure 10 is structural schematic diagram when installing the contact pin of Optical fiber plug in Fig. 9；

Figure 11 is one of the structural schematic diagram of snap ring；

Figure 12 is the C-C schematic cross-sectional view in Figure 11；

Figure 13 is the second structural representation of snap ring；

Figure 14 is the D-D schematic cross-sectional view in Figure 13；

Figure 15 is that lens are mounted on one of the structural schematic diagram in lens barrel by snap ring；

Figure 16 is that lens are mounted on the second structural representation in lens barrel by snap ring.

(5), specific embodiment:

Referring to Fig. 1~Figure 16, in figure, the glass surface attachment detector based on laser induced breakdown spectroscopy contains Ji Guang Qi ﹑ Sharp identical 5 ﹑ of laser focalizer, the 3 identical light collectors 6 of photo-coupler ﹑ 3 of device ﹑ light spectrum instrument ﹑ processed are controlled in middle centre and level is set The mounting plate 1 set, the centre Ji Guang Qi ﹑ Zhong Kong Qi ﹑ Guang Pu Yi ﹑ laser couplers are arranged on the upper surface of mounting plate 1, install The upper surface periphery of plate 1 is provided with installation through-hole 3, and the upper surface middle part of mounting plate 1 is uniformly provided with 3 pairs of identical laser and focuses and adopt Collect through-hole；Each pair of laser focuses and acquisition through-hole contains a laser focalizer through-hole 24 and a light collector through-hole 25, should Laser focalizer through-hole 24 and the light collector through-hole 25 are disposed adjacent, and are equipped with a laser in the laser focalizer through-hole 24 Focalizer 5 is equipped with a light collector 6 in the light collector through-hole 25, and the laser exit wound of bullet of laser focalizer 5 is vertically downward Setting, the light-receiving mouth of light collector 6 are arranged diagonally downward, and the laser that the laser exit wound of bullet of laser focalizer 5 projects is focused at The focal point of the object lens of the light-receiving mouth of light collector 6, and the primary optical axis of laser focalizer 5 passes through the light-receiving of light collector 6 The focus of the object lens of mouth, the location of focus of object lens of light-receiving mouth of light collector 6 are test point；Central controller Laser emission control signal output and laser control signal input connect, laser issue initial laser enter In laser couplers, 3 output optical fibre interfaces (17 ﹑, 18 ﹑ 19) of laser couplers are focused with 3 laser respectively by optical fiber 7 The input optical fibre interface 20 of device 5 connects, and the output optical fibre interface 28 of 3 light collectors 6 passes through one 31 optical fiber 8 of conjunction and spectrometer Input optical fibre interface connection, spectrometer detection signal output and central controller detection signal input connect, swash The trigger signal output end of light device and the external trigger signal input part of spectrometer connect, and provide trigger signal for spectrometer.

Contain 3 partially reflecting mirrors (11 ﹑, 12 ﹑ 13) and 3 the first convex lenses (14 ﹑, 15 ﹑ 16), laser inside laser couplers The initial laser of sending is penetrated on the reflecting surface of the 1st partially reflecting mirror 11, and the initial laser and the 1st partially reflecting mirror 11 The angle of reflecting surface be 45 °, the 2nd partially reflecting mirror of ﹑ 3 (12 ﹑ 13) is successively set on the reflection of the 1st partially reflecting mirror 11 In optical path, and the reflecting surface of 3 partially reflecting mirrors of the 2nd ﹑ (12 ﹑ 13) is parallel with the 1st reflecting surface of partially reflecting mirror 11, the 2nd ﹑ The reflecting surface of 3 partially reflecting mirrors (12 ﹑ 13) reflects the reflected light of the 1st partially reflecting mirror 11, the 1st the first convex lens 14 It is located at the rear of the 1st partially reflecting mirror 11 and is located in the optical path of initial laser, the 2nd the first convex lens of ﹑ 3 (15 ﹑ 16) point It is not located in the reflected light path of 3 partially reflecting mirrors of the 2nd ﹑ (12 ﹑ 13), 3 output optical fibre interfaces (17 ﹑, 18 ﹑ of laser couplers 19) light receiving surface center is located at the rear focal point of 3 the first convex lenses (14 ﹑, 15 ﹑ 16), and 3 the first convex lenses The primary optical axis of (14 ﹑, 15 ﹑ 16) is respectively perpendicular the light receiving surface of 3 output optical fibre interfaces (17 ﹑, 18 ﹑ 19) across laser couplers Center.

Also contain diaphragm 47 inside laser couplers, diaphragm 47 is located at the front of the 1st partially reflecting mirror 11, diaphragm 47 Central axis is overlapped with the central axis for the initial laser that laser issues, and the initial laser that laser issues passes through after diaphragm 47 It penetrates on the reflecting surface of the 1st partially reflecting mirror 11.

Diaphragm 47 can carry out shaping to initial laser beam, keep the cross section of initial laser beam round.

Initial laser a part that laser issues is reflected away by the 1st partially reflecting mirror 11, and another part is from the 1st The light for being focused at the 1st output optical fibre interface 17 through the 1st the first convex lens 14 again after a 11 transmissive of partially reflecting mirror connects Receipts face center, the laser that the 1st partially reflecting mirror 11 reflects away sequentially pass through 3 partially reflecting mirrors of the 2nd ﹑ (12 ﹑ 13) and pass through The reflection of 2nd partially reflecting mirror of ﹑ 3 (12 ﹑ 13), the laser that the 2nd partially reflecting mirror of ﹑ 3 (12 ﹑ 13) reflects away is respectively through the 2nd ﹑ 3 the first convex lenses (15 ﹑ 16) are focused at the light receiving surface center of 3 output optical fibre interfaces of the 2nd ﹑ (18 ﹑ 19).

Containing the second convex lens 21 and third convex lens 22 that are one in front and one in back arranged inside each laser focalizer 5, second Convex lens 21 is located at 20 dead astern of input optical fibre interface of laser focalizer 5, the master of the second convex lens 21 and third convex lens 22 For optical axis coincidence on a center line, which passes through the light emergence face of the input optical fibre interface 20 of laser focalizer 5 Center, the distance between the optical center at the light emergence face center of the input optical fibre interface 20 of laser focalizer 5 and the second convex lens 21 Equal to the focal length of the second convex lens 21, third convex lens 22 is located at the laser exit wound of bullet of laser focalizer 5.

Containing the 4th convex lens 26 and the 5th convex lens 27 being one in front and one in back arranged inside each light collector 6, the 4th is convex Lens 26 are located at the light-receiving mouth of light collector 6, and the output optical fibre interface 28 of light collector 6 is being located at the 5th convex lens 27 just For the key light overlapping of axles of rear, the 4th convex lens 26 and the 5th convex lens 27 on one article of center line, which passes through light The light receiving surface center of the output optical fibre interface 28 of collector 6, the light receiving surface center of the output optical fibre interface 28 of light collector 6 The distance between optical center of 5th convex lens 27 is equal to the focal length of the 5th convex lens 27.

Ji Guang Qi ﹑ spectrometer and laser couplers are arranged in the control box 2 on 1 upper surface of mounting plate.

The model of laser are as follows: DPS-1064-mini；The model of spectrometer are as follows: Avaspec-Mini2048-UVI10；In Centre controller is computer, and in practical application, computer can be located to 2 outside of control box, computer and laser and spectrometer Between connecting cable pass through control box 2.

3 pairs of laser focus and acquisition through-hole is in line on the upper surface of mounting plate 1.

Mounting plate 1 is rectangular slab, is respectively provided with an installation through-hole 3 at four angles of 1 upper surface of mounting plate.

The shape of laser focalizer 5 is cylinder, and laser focalizer through-hole 24 is vertically disposed circular through hole, and laser is poly- The upper side of burnt device 5 be equipped with it is laterally protruding along 9, it is laterally protruding to be stuck on the upper surface of mounting plate 1 along 9；Outside light collector 6 Shape is also cylinder, and light collector through-hole 25 is the circular through hole being obliquely installed, and the upper side of light collector 6 is equipped with oblique convex Out along 10, oblique protrusion is stuck on the upper surface of mounting plate 1 along 10.

When practical application, in order to keep the optical path of 5 ﹑ light collector 6 of laser focalizer and laser couplers more accurate, it can lead to It crosses 5 axis tunable optical component mounting bases and laser focalizer 5 and light collector 6 is separately mounted to laser focalizer through-hole 24 and one In a light collector through-hole 25, optical fiber interface in 5 ﹑ light collector 6 of laser focalizer and laser couplers (17,18,19,20, 28) it is all made of fine adjustment optical fiber interface, the lens in 5 ﹑ light collector 6 of laser focalizer and laser couplers are pacified by snap ring In lens barrel.

The model of 5 axis tunable optical component mounting bases are as follows: K5X1, manufacturer: U.S. THORLABS(translation are as follows: Soret It is rich) company.

Fine adjustment optical fiber interface contains columnar shell 30, is fixed with inside shell 30 perpendicular to 30 axis of shell Baffles 36, baffles 36 will be divided into left and right two chambers 45,46 inside shell 30, left and right two chambers 45,46 by every The connection through-hole 35 at 36 middle part of baffle is connected to, and is connected to through-hole 35 and shell 30 is coaxial, left chamber 45 is bigger than right chamber 46, left chamber A fiber fixed seat 31 is equipped in 45, fiber fixed seat 31 is the assembly of cylindrical body and cone, fiber fixed seat 31 The left side is cylindrical body, and the right is cone, and cylindrical body and cone are coaxial, the major part of cone towards the right side, fiber fixed seat 31 Right side is contacted with baffles 36, and the outer diameter of 31 right side of fiber fixed seat is less than the internal diameter of shell 30, in fiber fixed seat 31 Left side be equipped with a step through-hole 32, step through-hole 32 and cylindrical body are coaxial, and the internal diameter of step through-hole 32, which is less than, to be connected to The internal diameter of through-hole 35, the right end of step in step through-hole 32 close to fiber fixed seat 31；On one circumference of 30 side of shell Three tapped through holes are uniformly provided with, the circumference and shell 30 are coaxial, three adjusting screws 33 are installed respectively in three tapped through holes, The end of three adjusting screws 33 is contacted with the side of the cone on fiber fixed seat 31, and the left end of shell 30 is equipped with end cap 29, end cap 29 is connect by fastening screw 38 with shell 30, and the left end of fiber fixed seat 31 is from the through-hole 34 at 29 middle part of end cap It stretches out, the lateral surface of 31 left end of fiber fixed seat is equipped with external screw thread, for inserting in the left end of fiber fixed seat 31 installation optical fiber The medial surface of head fixing sleeve or dustproof cover (using when not installing optical fiber), right chamber 46 is equipped with internal screw thread, is used for and optical device Connection.

When using the fine adjustment optical fiber interface, the contact pin 37 of Optical fiber plug is inserted into step from the left end of fiber fixed seat 31 In through-hole 32, then Optical fiber plug fixing sleeve is mounted on to the left end of fiber fixed seat 31, keeps Optical fiber plug fixed, optical fiber The outer diameter of the contact pin 37 of plug is identical as the internal diameter of step through-hole 32,37 end face of contact pin (fiber end face and the contact pin of Optical fiber plug End face is generally aligned in the same plane) it is blocked at the step of step through-hole 32.The convergence to come from the optical device on 30 the right of shell Laser is injected after connection through-hole 35 and step through-hole 32 on 37 end face of contact pin of Optical fiber plug, i.e., on fiber end face, thus Enter light in optical fiber；Or can make from the light transmitted in optical fiber by step through-hole 32 transmitted after being connected to through-hole 35 to The optical device on 30 the right of shell；Three adjust the position that fiber fixed seat 31 is adjusted in screw 33, penetrate convergent laser just At the center of 37 end face of contact pin of Optical fiber plug, i.e., at end centre of optic fibre, keep optical path more accurate.

In the light receiving surface center of output optical fibre interface (17,18,19,28) and the light emergence face of input optical fibre interface (20) The heart is the center of 37 end face of contact pin of the Optical fiber plug connected thereon, i.e. end centre of optic fibre.

Snap ring is containing there are two types of forms: one is circular ring shape snap ring 39, the lateral surface of the circular ring shape snap ring 39 is equipped with outer spiral shell Line；Another snap ring is formed after deformation on the basis of circular ring shape snap ring 39, referred to as flange snap ring 41, specific structure Are as follows: so that the side of circular ring shape snap ring 39 is extended to form a circle flange to one end, is respectively equipped on the medial surface and lateral surface of flange Internal screw thread and external screw thread, the external screw thread on flange lateral surface are linked together with the external screw thread on 39 lateral surface of circular ring shape snap ring.Circle Driving hole 40,42 is equipped on the end face of circumferential clasp 39 and flange snap ring 41, driving hole 40,42 is used to help to install snap ring In lens barrel 44.

Lens 43 can take two ways when being mounted in lens barrel 44 by snap ring: a kind of mode is by two circular ring shape cards Ring 39 is clipped in lens 43 among two circular ring shape snap rings 39 by being threadably mounted in lens barrel 44；Another way be by By being threadably mounted in lens barrel 44, lens 43 are placed in flange snap ring 41 flange snap ring 41, then circular ring shape snap ring 39 is passed through It is threadably mounted in flange snap ring 41, is clipped in lens 43 among circular ring shape snap ring 39 and flange snap ring 41.

By taking the tin face for detecting glass plate as an example, the course of work of the glass surface attachment detector are as follows: central controller It issues Laser emission and controls signal, control laser issues pulse laser, and pulse laser is coupled into 3 optical fiber through laser couplers In 7, while laser issues trigger signal control spectrometer and acquires optical signal in the time of setting, the laser point in 3 optical fiber 7 It is not transmitted in 3 laser focalizers 5, then focuses on 3 points in the detected face of glass plate 23 by 3 laser focalizers 5, And plasma is inspired at 3 points, the light that plasma at 3 points the issues coupling after 3 light collectors 6 acquire respectively It closes into one 31 optical fiber 8 of conjunction, is then transmit to spectrometer and carries out optical signal parsing, the spectral information parsed is via spectrum Detector module inside instrument is transmitted to central controller after being converted to electric signal, is determined by central controller according to spectral information Tin element whether there is, and if there is the spectral line of tin, then the detected face of glass plate 23 is tin face, otherwise other the one of glass plate 23 Face is tin face.

It, can be by the installation through-hole 3 on mounting plate 1 by glass when using the glass surface attachment detector in actual production Glass surface attachments detector is installed in the production line, and glass surface attachment detector is made to be located at the top of glass plate 23, this Sample is convenient to detect glass plate 23.