阅读说明：本技术 致动器 (Actuator ) 是由 北原裕士 武田正 土桥将生 于 2018-03-23 设计创作，主要内容包括：本发明提供一种致动器,在致动器(1)中,将第一磁驱动电路(6)的第一线圈支架(65)、第二磁驱动电路(7)的第二线圈支架(75)以及第三磁驱动电路(8)的第三线圈支架(85)沿Z方向重叠配置,第一线圈支架(65)、第二线圈支架(75)以及第三线圈支架(85)通过约束部件(90)在Z方向上紧固,以将持有磁驱动电路中使用的线圈或磁铁的多个支架无晃动地在第一方向上重叠配置。因此,可以将第一线圈支架(65)、第二线圈支架(75)以及第三线圈支架(85)无晃动地沿Z方向重叠配置。约束部件(90)由包括尺寸及形状在内结构相同的第一部件(91)和第二部件(92)构成。(The present invention provides a kind of actuator, in actuator (1), by the first coil bracket (65) of the first Magnetic driving circuit (6), the second coil brace (75) of second Magnetic driving circuit (7) and the tertiary coil bracket (85) of third Magnetic driving circuit (8) overlap along Z-direction, first coil bracket (65), second coil brace (75) and tertiary coil bracket (85) are fastened in z-direction by constraint component (90), the multiple brackets for holding coil used in Magnetic driving circuit or magnet to be overlapped in a first direction without ground is shaken.Therefore, first coil bracket (65), the second coil brace (75) and tertiary coil bracket (85) can without shaking be overlapped along Z-direction.Constraint component (90) is constituted by including size and shape in the identical first component of interior structure (91) and second component (92).)

1. a kind of actuator comprising:

Supporting mass, the supporting mass have first support and second support Chong Die with first support in a first direction；

Movable body, the movable body are removable relative to the supporting mass；

First Magnetic driving circuit, in the first Magnetic driving circuit, the side in first coil and the first magnet is by described first Bracket is held, and another party is held by the movable body, drives the movable body along the second direction orthogonal with the first direction；

Second Magnetic driving circuit, in the second Magnetic driving circuit, the side in the second coil and the second magnet is by described second Bracket is held, and another party is held by the movable body, along it is orthogonal with the first direction and intersect with the second direction the Three directions drive the movable body；And

Constraint component, the constraint component clamp and constrain the first support and described second from the two sides of the first direction Bracket,

The constraint component has: first part, and the first part is from the side of the first direction directly or via other Component is added to the first support；Second part, the second part from the other side of the first direction directly or via Other components are added to the second support；Part III, the second direction of the Part III in the supporting mass Side is connected to the first part and the second part；Part IV, the Part IV is described in the supporting mass The other side of second direction is connected to the first part and the second part；Part V, the Part V is described The side of the third direction of supporting mass is connected to the first part and the second part；And Part VI, it is described Part VI is connected to the first part and the second part in the other side of the third direction of the supporting mass.

2. actuator according to claim 1, which is characterized in that

The constraint component includes the first component, and the first component is by the Part III and the Part IV from institute The end of the end of the side of the second direction of first part and the other side of the second direction is stated towards described first Another lateral bend in direction and formed；Second component, the second component be by the Part V and the Part VI from The end of the other side of the end and second direction of the side of the third direction of the second part is towards described The curving in one direction and formed,

The end of the other side of the first direction of the Part III and the Part IV respectively with the second part Connection,

The end of the side of the first direction of the Part V and the Part VI connects with the first part respectively It connects.

3. actuator according to claim 2, which is characterized in that

The first component and the second component are individually metal plate-shaped member,

The end of the other side of the first direction of the Part III and the Part IV each by welding with it is described Second part connection,

The end of the side of the first direction of the Part V and the Part VI respectively connects with the first part It connects.

4. actuator according to claim 2, which is characterized in that

The first component and the second component are to include size and shape in the identical composition of interior structure.

5. actuator according to any one of claims 1 to 4, which is characterized in that

The first support, which has, to be held the first of the first coil or first magnet and holds portion and hold described first There is the end in portion to the first direction multiple first columnar parts outstanding,

The second support, which has, to be held the second of second coil or second magnet and holds portion and hold described second There is the end in portion to the first direction multiple second columnar parts outstanding,

The multiple first columnar part and the multiple second columnar part are respectively connected.

6. actuator according to claim 5 comprising:

Third bracket, the third bracket overlap relative to the second support in described first on the supporting mass Bracket opposite side；

Third Magnetic driving circuit, in the third Magnetic driving circuit, a side of tertiary coil and third magnet is by the third Bracket is held, and another party is held by the movable body, drives the movable body along the second direction,

The constraint component clamps and constrains the first support, the second support and institute from the two sides of the first direction State third bracket.

7. actuator according to claim 1, which is characterized in that

The first support is to hold the first coil bracket of the first coil,

The second support is to hold the second coil brace of second coil.

Technical field

The present invention relates to the actuators for generating various vibrations.

Background technique

Equipment as vibration is generated by Magnetic driving mechanism, motion have a kind of actuator, have the bearing of magnet Body and the movable body for having the coil opposed with magnet, and configured with elastomeric element, (reference is specially between movable body and supporting mass Sharp document 1).In addition, in actuator described in Patent Document 1, on bracket of the plate thickness direction towards first direction, with There are two first coils for the setting of separated position in the orthogonal second direction in one direction, on the other hand, relative to first direction And there are two the second coils for separated position setting on the orthogonal third direction of second direction.In addition, on supporting mass, relative to The two sides of first coil in a first direction are configured with the first magnet, relative to the two sides of the second coil in a first direction configured with the Two magnet.Therefore, the first Magnetic driving circuit that first coil and the first magnet composition vibrate movable body in a second direction, second Coil and the second magnet constitute the second Magnetic driving circuit for vibrating movable body along third direction.Therefore, the is generated by actuator The vibration in two directions, the vibration of third direction.

Summary of the invention

The technical problems to be solved by the invention

In actuator described in Patent Document 1, on movable body, relative to plate thickness direction towards the bracket of first direction Plane earth is provided with first coil and the second coil, and therefore, the area of plane of movable body is larger.This technical problem is solved to exist In as long as the first Magnetic driving circuit and the second Magnetic driving circuit overlap in a first direction, but in such case Under, it will hold the coil of the first Magnetic driving circuit or the first support of magnet and the coil or magnetic of holding the second Magnetic driving circuit The second support of iron overlaps in a first direction.As a result, bracket can generate rolling due to the influence of part tolerance etc. It is dynamic.

In view of the above problems, technical problem of the invention is, provides a kind of actuator, can will hold Magnetic driving electricity Multiple brackets of coil or magnet used in road overlap in a first direction without ground is shaken.

Technical scheme applied to solve the technical problem

In order to solve the above technical problem, the present invention provides a kind of actuator comprising: supporting mass, described Supporting mass has first support and second support Chong Die with first support in a first direction；Movable body, the movable body phase It is removable for the supporting mass；First Magnetic driving circuit, in the first Magnetic driving circuit, first coil and the first magnet In a side held by the first support, another party is held by the movable body, along orthogonal with the first direction second Direction drives the movable body；Second Magnetic driving circuit, in the second Magnetic driving circuit, the second coil and the second magnet One side is held by the second support, and another party is held by the movable body, along orthogonal with the first direction and with described the The third direction that two directions intersect drives the movable body；And constraint component, the constraint component is from the first direction Two sides clamp and constrain the first support and the second support, and the constraint component has: first part, and described first Divide from the side of the first direction and directly or via other components overlaps onto the first support；Second part, described second Part directly or via other components overlaps onto the second support from the other side of the first direction；Part III, it is described Part III is connected to the first part and the second part in the side of the second direction of the supporting mass；4th Part, the Part IV are connected to the first part and described in the other side of the second direction of the supporting mass Two parts；Part V, the Part V are connected to described first in the side of the third direction of the supporting mass Point and the second part；Part VI, the Part VI are connected in the other side of the third direction of the supporting mass To the first part and the second part.

In actuator of the invention, on supporting mass, hold the coil of Magnetic driving circuit or multiple brackets (of magnet One bracket and second support) it overlaps in a first direction.Therefore, multiple Magnetic driving circuits (the first Magnetic driving circuit and Second Magnetic driving circuit) it overlaps in a first direction.Therefore, (the plane face of the size from first direction when actuator Product) it is smaller.In addition, though multiple brackets overlap in a first direction, but constraint component is clamped from the two sides of first direction With the multiple brackets of constraint.Therefore, multiple brackets can be overlapped in a first direction without ground is shaken.

In the present invention, can be in the following ways: the constraint component includes the first component, and the first component is By the Part III and the Part IV from the end and described of the side of the second direction of the first part The end of the other side in two directions towards the first direction another lateral bend and formed；Second component, the second component Formula is by the Part V and the Part VI from the end of the side of the third direction of the second part and described The end of the other side of second direction towards the first direction curving and formed, the Part III and the described 4th The end of the other side of the partial first direction is connect with the second part respectively, the Part V and the described 6th The end of the side of the partial first direction is connect with the first part respectively.

In the present invention, can be in the following ways: the first component and the second component be individually metal The end of the other side of the first direction of plate-shaped member, the Part III and the Part IV each by welding with The end of the side of the first direction of second part connection, the Part V and the Part VI is respectively and institute State first part's connection.

In the present invention, can be in the following ways: the first component and the second component be include size and shape Shape is in the identical composition of interior structure.According to this mode, common constraint component is also can be used in the first component and second component. Therefore, the cost of actuator can be reduced.

In the present invention, can be in the following ways: the first support, which has, holds the first coil or described The first of one magnet holds portion and holds the end in portion to the first direction multiple first columnar parts outstanding described first, The second support, which has, to be held the second of second coil or second magnet and holds portion and hold portion described second End to the first direction multiple second columnar parts outstanding, the multiple first columnar part and the multiple second column Portion is respectively connected.

It in the present invention, can be in the following ways: including third bracket, the third bracket is on the supporting mass Relative to the second support overlap in the first support opposite side；Third Magnetic driving circuit, in the third magnetic In driving circuit, a side of tertiary coil and third magnet is held by the third bracket, and another party is held by the movable body, The movable body is driven along the second direction, and the constraint component clamps and constrain described the from the two sides of the first direction One bracket, the second support and the third bracket.

In the present invention, can be in the following ways: the first support be to hold the first coil of the first coil Bracket, the second support are to hold the second coil brace of second coil.

Detailed description of the invention

Fig. 1 is the perspective view of the actuator of embodiment of the present invention 1.

Fig. 2 is the exploded perspective view for having removed the actuator of state of cover shown in FIG. 1.

Fig. 3 is the explanatory diagram indicated when cutting off actuator shown in FIG. 1 along first direction and second direction.

Fig. 4 is the explanatory diagram indicated when cutting off actuator shown in FIG. 1 along first direction and third direction.

Fig. 5 is the exploded perspective view for having removed the actuator of state of first end plate shown in Fig. 2 and the second end plate.

Fig. 6 is exploded perspective view when decomposing Magnetic driving circuit used in actuator shown in FIG. 1.

Fig. 7 is the exploded perspective view of the first Magnetic driving circuit shown in fig. 6.

Fig. 8 is the exploded perspective view of the second Magnetic driving circuit shown in fig. 6.

Fig. 9 is the exploded perspective view of third Magnetic driving circuit shown in fig. 6.

Figure 10 is the explanatory diagram indicated in the variation for applying constraint component used in actuator of the invention.

Specific embodiment

The embodiments of the present invention will be described with reference to the drawings.In addition, in the following description, by cross one another three A direction is set to X-direction, Y-direction and Z-direction and is illustrated.Z-direction is the direction orthogonal with x-direction and y-direction.Separately Outside, X1 is marked in the side of X-direction, marks X2 in the other side of X-direction, side in the Y direction marks Y1, in the Y direction another Side marks Y2, marks Z1 in the side of Z-direction, and in the other side of Z-direction, mark Z2 is illustrated.Here, X-direction, Y-direction And Z-direction respectively has following relationship with the direction in the present invention.

" second direction " in X-direction=present invention

" third direction " in Y-direction=present invention

" first direction " in Z-direction=present invention

(overall structure)

Fig. 1 is the perspective view for applying actuator 1 of the invention.Fig. 2 is to unload constraint component from actuator shown in FIG. 1 State exploded perspective view.Fig. 3 is to cut off actuator shown in FIG. 1 along first direction (Z-direction) and second direction (X-direction) Explanatory diagram when 1.Fig. 4 is saying when cutting off actuator 1 shown in FIG. 1 along first direction (Z-direction) and third direction (Y-direction) Bright figure.Fig. 5 is the exploded perspective view for unloading the actuator 1 of state of first end plate 28 shown in FIG. 1 and the second end plate 29.

As shown in Figure 1, the actuator 1 of present embodiment has the body part 10 and covering body part of rectangular shape 10 cover 9.There is the wiring substrate being made of flexible wiring substrate in the surface mount of the side Y1 of the Y-direction of body part 10 16.Multiple electrodes 161 and Wiring pattern 162 are formed on wiring substrate 16, the overhang being described hereinafter is connected to The electrode 161.

As shown in Fig. 3, Fig. 4 and Fig. 5, actuator 1 includes supporting mass 2, movable body 3 and setting in supporting mass 2 and movable Elastomeric element 4 between body 3.Movable body 3 is supported by elastomeric element 4 by supporting mass 2, so as in Z-direction, X-direction and the side Y It moves up.Actuator 1 further includes multiple Magnetic driving circuits (the first Magnetic driving circuit 6, the second Magnetic driving circuit 7 and third magnetic Property driving circuit 8), the multiple Magnetic driving circuit drives in x and y direction relative to supporting member 2 and vibrates movable body 3.

Supporting mass 2 has first end plate 28 and the second end plate in the end of the side Z1 of Z-direction and the end of other side Z2 29.First end plate 28 is opposed with movable body 3 in the side Z1 of Z-direction, and first is configured between movable body 3 and first end plate 28 Elastomeric element 41 (elastomeric element 4).Second end plate 29 is opposed with movable body 3 in the other side Z2 of Z-direction, in movable body 3 and The second elastomeric element 42 (elastomeric element 4) is configured between two end plates 29.

In the present embodiment, elastomeric element 4 is that have viscoelastic viscoelastic body, in the present embodiment, uses plate The gel damping means of shape are as elastomeric element 4 (viscoelastic body).The two sides of the Z-direction of first elastomeric element 41 passes through respectively The methods of bonding is connected to movable body 3 and first end plate 28.Second end plate 29, the two sides point of the Z-direction of the second elastomeric element 42 It the methods of Tong Guo not be bonded and to be connected to movable body 3 and the second end plate 29.That is, elastomeric element 4 is set to relative to movable body 3 Each side other side Z2 of the side Z1 of one direction Z and the first direction Z relative to movable body 3.In addition, elastomeric element 4 is configured to First elastomeric element 41 and the second elastomeric element 42, wherein first in the first elastomeric element 41 and movable body 3 and supporting mass 2 Part (first end plate 28) the both sides side Z1 of direction Z opposed with movable body 3 connect, the second elastomeric element 42 and movable body 3 And the other side Z2 of Z opposed with movable body 3 part (the second end plate 29) both sides connect in a first direction in supporting mass 2.

Gel damping means have expansion performance linearly or nonlinearly according to its telescopic direction.For example, plate is solidifying Gluey damping means are being pressed when compressive deformation along its thickness direction (axial direction), and it is bigger than linear component to have nonlinear component Expansion performance, on the other hand, in the case where through-thickness (axial direction) is stretched and extends, have linear component than non-thread The property big expansion performance of component.In addition, in the case where being deformed along the direction (shear direction) intersected with thickness direction (axial direction), Also have the linear component deformation characteristic bigger than nonlinear component.In the present embodiment, be configured to movable body 3 in X direction And when Y-direction vibration, elastomeric element 4 (viscoelastic body) is deformed along shear direction.

Multiple Magnetic driving circuits (the first Magnetic driving circuit 6, the second Magnetic driving circuit 7 and third Magnetic driving circuit 8) are equal With coil and the magnet opposed with each coil.Coil is set in a sidepiece part of supporting mass 2 and movable body 3, magnet setting In on the component of the other side.In addition, the component for being set to 2 side of supporting mass in coil and magnet is arranged at the branch of 2 side of supporting mass Frame is held, and another component is held by movable body 3.As described below, in the present embodiment, coil (first coil 61, the second coil 71 and tertiary coil 81) be set on supporting mass 2.Therefore, bracket is configured to hold coil (first coil 61, the second coil 71 and tertiary coil 81) coil brace (first coil bracket 65, the second coil brace 75 and tertiary coil bracket 85). In addition, being provided with magnet (the first magnet, the 622, second magnet 721,722 and third magnet 821) and yoke on movable body 3 (the first yoke 64, the second yoke 74 and third yoke 84).In addition, the first Magnetic driving circuit 6, the second Magnetic driving circuit 7 and third Magnetic driving circuit 8 successively overlaps from the side Z1 of Z-direction to other side Z2.

(composition of driving circuit)

Exploded perspective view when Fig. 6 is by Magnetic driving circuitry breaks down used in actuator 1 shown in FIG. 1.Such as Fig. 3, figure 4, shown in Fig. 5 and Fig. 6, the first Magnetic driving circuit 6 has first coil 61 and right in the other side Z2 and first coil 61 of Z-direction The first magnet 622 set.Second Magnetic driving circuit 7 have the second coil 71, Z-direction side Z1 it is opposed with the second coil 71 The second magnet 721 and second magnet 722 opposed with the second coil 71 in the other side Z2 of Z-direction.Third Magnetic driving electricity Road 8 has tertiary coil 81 and the third magnet 821 opposed with tertiary coil 81 in the side Z1 of Z-direction.

In order to along Z-direction overlap the first Magnetic driving circuit 6 formed as described above, the second Magnetic driving circuit 7 and Third Magnetic driving circuit 8, supporting mass 2 have the first coil bracket 65 for holding first coil 61, hold the of the second coil 71 Two wires coil support 75 and the tertiary coil bracket 85 for holding tertiary coil 81, first coil bracket 65, the second coil brace 75 And tertiary coil bracket 85 successively overlaps from the side Z1 of Z-direction to other side Z2.In addition, first coil bracket 65, The coil brace adjacent in z-direction of second coil brace 75 and tertiary coil bracket 85 is connected to each other.

In addition, movable body 3 has side Z1, the first coil 61 and second for being configured at Z-direction relative to first coil 61 The other side of Z-direction is configured between coil 71, between the second coil 71 and tertiary coil 81 and relative to tertiary coil 81 Multiple yokes (the first yoke 64, the second yoke 74 and third yoke 84) of Z2, the first magnet 622, the second magnet 721,722 and third magnetic Iron 821 is respectively held by any one in multiple yokes.In addition, adjacent yoke is connected to each other in z-direction in multiple yokes.

In the present embodiment, comprising being configured at the first of the side Z1 of Z-direction relative to first coil 61 in multiple yokes Yoke 64 (yoke plate 641), the second yoke 74 (yoke plate 741,742) and phase that the two sides of Z-direction are configured at relative to the second coil 71 The third yoke 84 of the other side Z2 of Z-direction is configured at for tertiary coil 81.Here, the second yoke 74 is held relative to the second coil 71 are configured at the second magnet 721,722 of the two sides of Z-direction.In addition, the second yoke 74 is held in the other side Z2 and first of Z-direction The first opposed magnet 622 of coil 61 and the third magnet 821 opposed with tertiary coil 81 in the side Z1 of Z-direction.Therefore, One yoke 64 and third yoke 84 do not hold magnet.

(the detailed composition of the first Magnetic driving circuit 6)

Fig. 7 is the exploded perspective view of the first Magnetic driving circuit 6 shown in fig. 6.As shown in Fig. 5, Fig. 6 and Fig. 7, first coil Bracket 65 has inside and holds the first frame portion 66 (first coil holds portion) of first coil 61 and from the end of the first frame portion 66 (four angles) is connect towards the two sides of Z-direction multiple first columnar parts 69 outstanding, the first columnar part 69 with first end plate 28.The One coil brace 65 is made of resin or made of metal.In the present embodiment, first coil bracket 65 and first end plate 28 are resin System, the first columnar part 69 and first end plate 28 are connected by bonding etc..

First coil 61 used in first Magnetic driving circuit 6 is with the first effective rim portion extended along Y-direction 611, the oval air core coil of 612 (long side parts).It is corresponding with the shape, in the first frame portion 66 of first coil bracket 65 Being formed with makes elliptical first opening portion 67 of the major diameter direction towards Y-direction, and first coil 61 is fixed on by bonding etc. The inside of first opening portion 67.

In first coil bracket 65, in the other side Z2 of the Z-direction relative to the first frame portion 66, with the first opening portion The position of the both ends overlapping of 67 Y-direction is formed with the first seating portion 681,682, and first seating portion 681,682 is in Z-direction Other side Z2 be supported on the first invalid rim portion 613,614 (short legs that the both ends of first coil 61 extend along Y-direction Point).Other side Z2 of first seating portion 681,682 from the first frame portion 66 to Z-direction is prominent, by the X-direction of the first opening portion 67 Both ends constitute Z-direction other side Z2 bottom.In addition, on the face of the side Z1 of the Z-direction of the first frame portion 66, recess portion (not shown) extends to edge from the first opening portion 67, which is the extension for starting the winding of first coil 61 The guide part passed through.The thickness (size of Z-direction) of first frame portion 66 is greater than the thickness (size of Z-direction) of first coil 61. Therefore, in the state that first coil 61 is incorporated in the inside of the first opening portion 67, first coil 61 is not from the first frame portion 66 It is prominent to the side Z1 of Z-direction.

The flat shape that first magnet 622 is rectangle, long side extend in X direction, and short side extends along Y-direction.First magnetic Iron 622 is polarized magnetization in the X direction, and the pole N and the pole S are opposed with first effective rim portion 611,612 of first coil 61 respectively. Therefore, when being powered to first coil 61, the first Magnetic driving circuit 6 generates the driving force for driving movable body 3 in X direction.First In Magnetic driving circuit 6, the first yoke 64 is made of the yoke plate 641 for being configured at the side Z1 of Z-direction relative to first coil 61.Yoke plate 641 have other side Z2 curved side plate 641b, 641c from the both ends of X-direction towards Z-direction, side plate 641b, The front end of 641c is formed with recess portion.

(the detailed composition of the second Magnetic driving circuit 7)

Fig. 8 is the exploded perspective view of the second Magnetic driving circuit 7 shown in fig. 6.As shown in Fig. 5, Fig. 6 and Fig. 8, the second coil Bracket 75, which has, holds the second frame portion 76 (the second coil holds portion) of the second coil 71 in inside and from the end of the second frame portion 76 Portion (four angles) to the two sides of Z-direction multiple second columnar parts 79 outstanding, the second columnar part 79 in the side Z1 phase of Z-direction The first columnar part 69 connection of adjacent first coil bracket 65.Second coil brace 75 is made of resin or made of metal.In this implementation In mode, the second coil brace 75 is made of resin, and the first columnar part 69 and the second columnar part 79 are connected by bonding etc..

Second coil 71 used in second Magnetic driving circuit 7 is with the second effective rim portion extended in X direction 711, the elliptical air core coil of 712 (long side parts).Corresponding to the shape, in the second frame portion of the second coil brace 75 76 are formed with and make elliptical second opening portion 77 of the major diameter direction towards X-direction, and the second coil 71 is fixed by bonding etc. In the inside of the second opening portion 77.

In the second coil brace 75, in the side Z1 of the Z-direction relative to the second frame portion 76, with the second opening portion 77 X-direction both ends overlapping position be formed with second seat 781,782, the second seat 781,782 is in the side of Z-direction Z1 is supported on the second invalid rim portion 713,714 (short side part) that the both ends of the second coil 71 extend along Y-direction.Second Side Z1 of the portion 781,782 from the second frame portion 76 to Z-direction is prominent, constitutes the side Z by the both ends of the X-direction of the first opening portion 77 To side Z1 bottom.In second frame portion 76, recess portion 762 extends from the second opening portion 77 towards edge, which is to make The guide part that the extension that the winding of second coil 71 starts passes through.The thickness (size of Z-direction) of second frame portion 76 is greater than The thickness (size of Z-direction) of second coil 71.Therefore, the shape of the inside of the second opening portion 77 is incorporated in the second coil 71 Under state, other side Z2 of second coil 71 not from the second frame portion 76 to Z-direction is prominent.

The flat shape that second magnet 721,722 is rectangle respectively, long edge Y-direction extend, and short side prolongs along Y-direction It stretches.Second magnet 721,722 is polarized magnetization in the Y direction respectively, and the pole N and the pole S are effective with the second of the second coil 71 respectively Rim portion 711,712 is opposed.Therefore, when being powered to the second coil 71, the second Magnetic driving circuit 7 is generated can along Y-direction driving The driving force of kinetoplast 3.In second Magnetic driving circuit 7, the second yoke 74 is by being configured at the side Z1 of Z-direction relative to the second coil 71 Yoke plate 741 and relative to the second coil 71 be configured at the other side Z2 of Z-direction yoke plate 742 constitute.Yoke plate 742, which has, to be used in The flat magnet that the second magnet 722 is held in the face of the side Z1 of Z-direction holds portion 742a, holds the Y of portion 742a from magnet The side Z1 of the both ends in direction towards Z-direction curved side plate 742b, 742c and the X-direction for holding portion 742a from magnet Both ends be projected into X-direction two sides web portion 742f, 742g.It is formed in the front end of side plate 742b, 742c Protrusion is formed jagged in the front end of web portion 742f, 742g.In present embodiment, the magnet of yoke plate 742 holds portion Hold the third magnet 821 of third Magnetic driving circuit 8 on the surface of the other side Z2 of the Z-direction of 742a.

Yoke plate 741, which has, holds portion in the tabular magnet that the second magnet 721 is held in the face of the other side Z2 of Z-direction 741a, hold from magnet portion 741a Y-direction side Y1 from both ends to Y-direction and the other side Y2 web portion outstanding 741b, 741c and hold the both ends of the X-direction of portion 741a to side Y1 and the other side Y2 company outstanding of X-direction from magnet Fishplate bar portion 741f, 741g.The front end of web portion 741b, 741c, 741f, 741g form jagged.In present embodiment, yoke The magnet of plate 742 holds the third magnet for holding third Magnetic driving circuit 8 on the surface of the other side Z2 of the Z-direction of portion 742a 821。

In the present embodiment, the protrusion insertion in the front end for the side plate 742b for being formed in yoke plate 742 is formed in yoke In the state of the notch of the front end of the web portion 741b of plate 741, the front end of side plate 742b and web portion 741b's Front end passes through the connections such as welding, riveting.In addition, the protrusion in the front end for the side plate 742c for being formed in yoke plate 742 is embedded in It is formed under the notch state of the front end of the web portion 741c of yoke plate 741, the front end of side plate 742c and web portion The front end of 741c passes through the connections such as welding, riveting.

In addition, the protrusion insertion in the front end for the side plate 641b for being formed in yoke plate 641 shown in Fig. 7 is formed in yoke plate In the state of the notch of the front end of 741 web portion 741f, before the front end of side plate 641b and web portion 741f End passes through the connections such as welding, riveting.In addition, in the convex of the front end for the side plate 641c for being formed in yoke plate 641 shown in Fig. 7 In the state that portion's insertion is formed in the notch of the front end of the web portion 741g of yoke plate 741, the front end of side plate 641c Pass through the connections such as welding, riveting with the front end of web portion 741g.

(the detailed composition of third Magnetic driving circuit 8)

Fig. 9 is the exploded perspective view of third Magnetic driving circuit 8 shown in fig. 6.As shown in Fig. 5, Fig. 6 and Fig. 9, tertiary coil Bracket 85 has inside and holds the third frame portion 86 (tertiary coil holds portion) of tertiary coil 81 and from the end of third frame portion 86 (four angles) to the two sides of Z-direction multiple third columnar parts 89 outstanding, third columnar part 89 is adjacent with the side Z1 in Z-direction The second coil brace 75 the second columnar part 79 connection.In addition, third columnar part 89 is connect with the second end plate 29.Tertiary coil Bracket 85 is made of resin or made of metal.In present embodiment, tertiary coil bracket 85 is made of resin, the second columnar part 79 and third Columnar part 89 passes through the connection such as bonding.In addition, the second end plate 29 is made of resin, third columnar part 89 and the second end plate 29 are by gluing The connection such as connect.

Third Magnetic driving circuit 8 configures in the same manner as the first Magnetic driving circuit 6.More specifically, third Magnetic driving circuit 8 Used in tertiary coil 81 be with the ellipse of the effective rim portion 811,812 (long side part) of third extended along Y-direction The air core coil of shape.Corresponding with the shape, being formed in the third frame portion 86 of tertiary coil bracket 85 makes major diameter direction towards Y The elliptical third opening portion 87 in direction, tertiary coil 81 are fixed on the inside of third opening portion 87 by bonding etc..

In tertiary coil bracket 85, in the side Z1 of the Z-direction relative to third frame portion 86, with third opening portion 87 Y-direction both ends overlapping position be formed with third portions 881,882, the third portions 881,882 are in the side of Z-direction The invalid rim portion 813,814 (short side part) of the third that the both ends that Z1 is supported on tertiary coil 81 extend in X direction.Third seat Side Z1 of the portion 881,882 from third frame portion 86 to Z-direction is prominent, constitutes Z by the both ends of the Y-direction of third opening portion 87 The bottom of the side Z1 in direction.In third frame portion 86, recess portion 862 extends from third opening portion 87 towards edge, which is The guide part for the extension that winding for passing through tertiary coil 81 starts.The thickness (size of Z-direction) of third frame portion 86 Greater than the thickness (size of Z-direction) of tertiary coil 81.Therefore, the inside of third opening portion 87 is incorporated in tertiary coil 81 In the state of, other side Z2 of the tertiary coil 81 not from third frame portion 86 to Z-direction is prominent.

The flat shape that third magnet 821 is rectangle, long side extend in X direction, and short side extends along Y-direction.Third magnetic Iron 821 magnetizes in the X direction, and the pole N and the pole S are opposed with the effective rim portion 811,812 of the third of tertiary coil 81 respectively.Therefore, When to tertiary coil 81 be powered when, third Magnetic driving circuit 8 generated with the first Magnetic driving circuit 6 in the same manner as in X direction drive can The driving force of kinetoplast 3.In the present embodiment, third magnet 821 is identical as the first magnet 621 of the first Magnetic driving circuit 6 Direction on magnetize.

In third Magnetic driving circuit 8, third yoke 84 is by being configured at relative to tertiary coil 81 other side Z2 of Z-direction Yoke plate 842 is constituted.Yoke plate 842 has side Z1 curved side plate 842b, 842c from the both ends of X-direction towards Z-direction, Protrusion is formed in the front end of side plate 842b, 842c.In the present embodiment, in the side plate for being formed in yoke plate 842 The protrusion insertion of the front end of 842b is formed in the state of the notch of the front end of the web portion 742f of yoke plate 742, side plate The front end of portion 842b and the front end of web portion 742f pass through the connections such as welding, riveting.In addition, being formed in yoke plate 842 Side plate 842c front end protrusion insertion be formed in yoke plate 742 web portion 742g front end notch state Under, the front end of side plate 842c and the front end of web portion 742g pass through the connections such as welding, riveting.

(positional relationship of the center of gravity of the magnetic center and movable body 3 of Magnetic driving circuit)

In the actuator 1 constituted in this way, first coil 61, the second coil 71, tertiary coil 81, first coil bracket 65, the second coil brace 75 and tertiary coil bracket 85 are configured to pass through the center of the X-direction of movable body 3 and along Y-direction Line centered on line centered on the dummy line of extension is symmetrical and the center to pass through Y-direction and the dummy line extended in X direction Symmetrically.In addition, the first magnet 622, the second magnet 721,722, third magnet 821, the first yoke 64, the second yoke 74 and third yoke 84 be configured to by the center for the X-direction for passing through movable body 3 and along the dummy line that Y-direction extends centered on line it is symmetrical and to wear Line centered on crossing the center of Y-direction and the dummy line that extends in X direction is symmetrical.In addition, the second coil 71 is configured at movable body 3 Z-direction center, the second magnet 721,722 is configured to centered on the second coil 71 that face is symmetrical in z-direction.In addition, the One magnet 622 and the first yoke 64 are configured to relative to third magnet 821 and third yoke 84 centered on the second coil 71 in Z-direction It is symmetrical above.

Therefore, the magnetic center position (driving center) of the second Magnetic driving circuit 7 is in Z-direction, X-direction and Y-direction Upper and movable body 3 the consistent position of center of gravity or substantially uniform position.In addition, by the non-magnetic center of the first Magnetic driving circuit 6 The magnetic center position of position and third Magnetic driving circuit 8 synthesis and obtain property center be in Z-direction, X-direction with And the consistent position of center of gravity or substantially uniform position of Y-direction and movable body 3.

(composition of constraint component 90)

Again in fig. 1 and fig. 2, on supporting mass 2, first coil bracket 65, the second coil brace 75 and third line Coil support 85 successively overlaps from the side Z1 of Z-direction to other side Z2, and the shape of supporting mass 2 and body part 10 is by first End plate 28, first coil bracket 65, the second coil brace 75, tertiary coil bracket 85 and the second end plate 29 are constituted.

In the actuator 1 that assembly is constituted in this way, it is overlapped first end plate 28, the first elastomeric element 41, first in z-direction Yoke 64, the first coil bracket 65 for holding first coil 61 hold the first magnet 622, the second magnet 721,722 and third magnet 821 the second yoke 74, the second coil brace 75 for holding the second coil 71, the tertiary coil bracket 85 for holding tertiary coil 81, Third yoke 84, the second elastomeric element 42 and the second end plate 29 constitute body part 10.Then, installation diagram 1 and cover shown in Fig. 2 9.At this point, cover 9 plays a role as constraint component 90, the constraint component 90 clamps and constrains First Line from the two sides of Z-direction Coil support 65, the second coil brace 75 and tertiary coil bracket 85.

In the present embodiment, constraint component 90 is by be covered on body part 10 from the side Z1 of Z-direction first Part 91 and other side Z2 from Z-direction are covered on the composition of the second component 92 on body part 10, by the first component 91 and the In the state that two components 92 combine, constraint component 90 (first part 91 and second component 92) makes from the overlapping of the two sides of Z-direction First part 901 and second part 902 are from the two sides clamp body part 10 of Z-direction.In the present embodiment, the first component 91 And second component 92 is made of the metal plate-shaped member for bending to regulation shape.

More specifically, the first component 91 has the side Z1 from Z-direction via first end plate 28 and the first elastomeric element The first part 901 of 41 plates Chong Die with first coil bracket 65, the end from the side X1 of the X-direction of first part 901 Towards the Part III 903 of the curved plate of other side Z2 of Z-direction and the other side X2 of the X-direction from first part 901 End towards Z-direction the curved plate of other side Z2 Part IV 904.In addition, first part 901 has in the Y direction Side Y1 end and other side Y2 end towards Z-direction the other side portion Z2 curved interconnecting piece 901a, 901b.

Second component 92 has the other side Z2 from Z-direction via the second end plate 29 and the second elastomeric element 42 and the second line Plate second part 902 that coil support 75 and tertiary coil bracket 85 are overlapped, from the side Y1's of the Y-direction of second part 902 End towards Z-direction the curved plate of side Z1 Part V 905 and the Y-direction from second part 902 the other side The end of Y2 towards Z-direction the curved plate of side Z1 Part VI 906.In addition, second part 902 has in X-direction Side X1 end and other side X2 end towards Z-direction side Z1 curved interconnecting piece 902a, 902b.

In the present embodiment, the first component 91 and second component 92 are by the structure whole phase including size and shape Same metal parts is constituted.Therefore, when the first component 91 and second component 92 are covered on body part 10 from the two sides of Z-direction It is upper and pressed from two sides, and first end plate 28, first coil bracket 65, the second coil brace 75, tertiary coil bracket 85 and Second end plate 29 clamps so that in the first columnar part 69, the second columnar part 79 and third columnar part 89 very close to each other, and the 5th Part 905 and the front end of Part VI 906 are Chong Die with the front end of interconnecting piece 901a, 901b of first part 901, third portion Points 903 and the front end of Part IV 904 and the front end of interconnecting piece 902a, 902b of second part 902 it is Chong Die.So when Interconnecting piece 901a, 901b of first part 901 and Part V 905 and Part VI 906 are respectively welded, and by second When 902 interconnecting piece 902a, 902b, Part III 903 and Part IV 904 being divided respectively to weld, become state shown in FIG. 1. That is, becoming side X1 and first part 901 and second of the Part III 903 in the X-direction of supporting mass 2 in constraint component 90 Part 902 connects, and Part IV 904 connects in the other side X2 of the X-direction of supporting mass 2 and first part 901 and second part 902 The state connect.In addition, becoming Part V 905 in a side Y1 and first part 901 and second part for the Y-direction of supporting mass 2 902 connections, Part VI 906 are connect in another party Y2 of the Y-direction of supporting mass 2 with first part 901 and second part 902 State.

In this state, in angle part, first end plate 28, first coil bracket 65, the second coil brace 75, third line Coil support 85 and the second end plate 29 expose from the gap of the first component 91 and second component 92.It therefore, can be by first end plate 28, each boundary part weldering of first coil bracket 65, the second coil brace 75, tertiary coil bracket 85 and the second end plate 29 It connects, so, it can be by first end plate 28, first coil bracket 65, the second coil brace 75, tertiary coil bracket 85 and second The connection of end plate 29 is without generating extra gap.In addition, in the present embodiment, the first component 91 and second component 92 all by Identical metal parts is constituted, and but not limited to this.As long as structure of these components including size and shape is identical Composition.

(elemental motion)

In the actuator 1 of present embodiment, apply alternating current to first coil 61 and tertiary coil 81, on the other hand, When stopping being powered to the second coil 71, movable body 3 vibrates in X direction, and therefore, the center of gravity of actuator 1 changes in X direction.Cause This, user can experience the vibration of X-direction.At this point, if adjusting the alternating current for being applied to first coil 61 and tertiary coil 81 Waveform makes the acceleration that movable body 3 is mobile to the other side X2 of X-direction to the side X1 of X-direction mobile acceleration and movable body 3 Degree is different, then user can experience has directive vibration in the X direction.

In addition, applying alternating current to the second coil 71, on the other hand, stop logical to first coil 61 and tertiary coil 81 Electricity.As a result, since movable body 3 is along Y-direction vibration, so the center of gravity of actuator 1 is changed along Y-direction.Therefore, user can be with Experience the vibration of Y-direction.At this point, making movable body 3 one to Y-direction if adjusting the AC wave shape for being applied to the second coil 71 Side Y1 mobile acceleration and movable body 3 are different to the other side Y2 of third direction mobile acceleration, then user can experience Has directive vibration in the Y direction.

In addition, if energization of the combination to the energization of first coil 61 and tertiary coil 81 and to the second coil 71, is used Family can obtain the impression of the vibration in the vibration and Y-direction being combined in X-direction.In addition, when to first coil 61 and third When coil 81 applies reverse phase alternating current, apply the couple around the central axis extended along Z-direction, therefore, user on movable body 3 More complicated impression can be obtained.

(stop mechanism)

In the actuator 1 of present embodiment, it is provided with Fig. 3 and stop mechanism shown in Fig. 4, so that movable body 3 is opposite When supporting mass 2 is excessively mobile, the weaker position of intensity is not abutted.More specifically, as shown in figure 4, first coil bracket 65 The first portions 681 be located at the position opposed with the first magnet 622 across specified interval side Y1 in the Y direction, first coil First portions 682 of bracket 65 are located at the position opposed with the first magnet 622 across specified interval other side Y2 in the Y direction. In addition, the third portions 881 of tertiary coil bracket 85 are located at side Y1 in the Y direction across specified interval and third magnet 821 Opposed position, the third portions 882 of tertiary coil bracket 85 are located at other side Y2 in the Y direction across specified interval and third The opposed position of magnet 821.In the present embodiment, the first portions 681,682 is opposed with the first magnet 622 in the Y direction Side end work as the first retainer 683,684.In addition, third portions 881,882 in the Y direction with third magnet It works as third retainer 883,884 821 opposed side ends.Therefore, it is driven by the second Magnetic driving circuit 7 along Y-direction Movable body 3 when movable body 3 is stopped mechanism limitation to the movable range of Y-direction, which is by the first Magnetic driving electricity What first magnet 622 on road 6 and the first portions 681,682 (the first retainer 683,684) of first coil bracket 65 were constituted stops Motivation structure and by the third magnet 821 of third Magnetic driving circuit 8 and third portions 881, the 882 (thirds of tertiary coil bracket 85 Retainer 883,884) stop mechanism constituted.

In the present embodiment, the first retainer 683,684 be located at than first coil 61 the first invalid rim portion 613, 622 side of the first magnet is leaned in 614 inner edge.Therefore, though the winding starting side of first coil 61 extension for example from the In the case that the inner edge of one invalid rim portion 613 is across first coil 61 and the first portions 681, it is not easy to produce the first magnetic The case where extension of the winding starting side of iron 621 and first coil 61 contacts.Therefore, it is not likely to produce the volume of first coil 61 The case where around the extension broken string of starting side.In addition, third retainer 883,884 is positioned at more invalid than the third of tertiary coil 81 821 side of third magnet is leaned in the inner edge of rim portion 813,814.Therefore, though tertiary coil 81 winding starting side lead division In the case where dividing for example from the inner edge of the invalid rim portion 813 of third across tertiary coil 81 and third portions 881, also it is not easy The case where extension of the winding starting side of generation third magnet 821 and tertiary coil 81 contacts.Therefore, it is not likely to produce third The case where extension broken string of the winding starting side of coil 81.

In addition, as shown in figure 3, the second seat 781 of the second coil brace 75 be located at the second Magnetic driving circuit 7 in the side X To the position opposed with the second magnet 721 across specified interval side X1, the second seat 782 of the second coil brace 75 is located at In the position that the other side X2 of X-direction is opposed with the second magnet 721 across specified interval.In the present embodiment, second seat 781 and the side end opposed with the second magnet 721 in the X direction of second seat 782 acted as the second retainer 783,784 With.Therefore, drive movable range when movable body 3 by only in X direction by the first Magnetic driving circuit 6 and third Magnetic driving circuit 8 The limitation of motivation structure, the stop mechanism is by the second magnet 721 of the second Magnetic driving circuit 7 and the second seat of the second coil brace 75 781,782 (the second retainers 783,784) are constituted.

In the present embodiment, the second retainer 783,784 be located at than the second coil 71 the second invalid rim portion 713, 721 side of the second magnet is leaned in 714 inner edge.Therefore, though the winding starting side of the second coil 71 extension for example from the In the case that the inner edge of two invalid rim portions 713 is across the second coil 71 and second seat 781, it is not easy to produce the second magnetic The case where extension of the winding starting side of iron 721 and the second coil 71 contacts.Therefore, it is not likely to produce the volume of the second coil 71 The case where around the extension broken string of starting side.

(main effect of the present embodiment)

As described above, the first magnetic that being provided with vibrates movable body 3 in X direction drives in the actuator 1 of present embodiment Dynamic circuit 6, the second Magnetic driving circuit 7 for vibrating movable body 3 along Y-direction and the third magnetic for vibrating movable body 3 in X direction Therefore driving circuit 8 can make movable body 3 in X direction and Y-direction vibration.Therefore, it is possible to use the vibration of X-direction is experienced at family Dynamic, Y-direction vibration and it is combined with the vibration of the vibration of X-direction and the vibration of Y-direction.In addition, due to the first Magnetic driving electricity Road 6, the second Magnetic driving circuit 7 and third Magnetic driving circuit 8 overlap along Z-direction, therefore, from Z-direction when actuator 1 Size (area of plane) it is smaller.Therefore, the actuator 1 of present embodiment is adapted to be mounted in the equipment such as hand held controller. In addition, being provided in the two sides of Z-direction makes 3 edge of movable body for the second Magnetic driving circuit 7 for vibrating movable body 3 along Y-direction The the first Magnetic driving circuit 6 and third Magnetic driving circuit 8 of X-direction vibration, it is therefore, difficult when vibrating movable body 3 in X direction Situations such as movable body 3 tilts occurs.In addition, the magnetic center position (driving point) of the second Magnetic driving circuit 7 is located in Z-direction, X On direction and Y-direction with the consistent position of the center of gravity of movable body 3 or substantially uniform position.In addition, synthesis the first Magnetic driving electricity The magnetic center position (driving point) on road 6 and the magnetic center position (driving point) of third Magnetic driving circuit 8 and the magnetic center position of acquisition Setting in the consistent position of center of gravity or substantially uniform position in Z-direction, x-direction and y-direction and movable body 3.Therefore, make When movable body 3 is in X direction and Y-direction is vibrated, it is difficult to situations such as movable body 3 tilts occur.

In addition, by the first Magnetic driving circuit 6, the second Magnetic driving circuit 7 and third Magnetic driving circuit 8 along Z-direction weight In the case where folded configuration, although overlapping first coil bracket 65, the second coil brace 75 and tertiary coil bracket along Z-direction 85, but first coil bracket 65, the second coil brace 75 and tertiary coil bracket 85 and first end plate 28 and the second end plate 29 It is clamped in z-direction by constraint component 90 together.It therefore, can be by first coil bracket 65, the second coil brace 75 and third Coil brace 85 without shaking overlaps along Z-direction.In addition, constraint component 90 is by including that size and shape is whole in interior structure The identical first component 91 and second component 92 are constituted.Due to can reduce the cost of constraint component 90, so can reduce cause The cost of dynamic device 1.

In addition, first coil bracket 65, the second coil brace 75 and tertiary coil bracket 85 are via first coil bracket The third columnar part 89 of 65 the first columnar part 69, the second columnar part 79 of the second coil brace 75 and tertiary coil bracket 85 connects It connects, so the space of distributed magnet, yoke is ensured between first coil 61, the second coil 71 and tertiary coil 81 are respective It, can be by 85 integration of first coil bracket 65, the second coil brace 75 and tertiary coil bracket under state.In such case Under, since first coil bracket 65, the second coil brace 75 and tertiary coil bracket 85 are pressed from both sides in z-direction by constraint component 90 Tightly, therefore first coil bracket 65, the second coil brace 75 and tertiary coil bracket 85 can be reinforced.

In addition, elastomeric element 4 is that have viscoelastic viscoelasticity part, it is set to one of the Z-direction relative to movable body 3 Every side in the side Z1 and other side Z2 of the Z-direction relative to movable body 3.Therefore, in movable body 3 relative to supporting mass 2 along X When direction and Y-direction are vibrated, elastomeric element 4 is deformed along the shear direction orthogonal with telescopic direction.Therefore, elastomeric element 4 is in height Deformation in the range of linearity, thus, it is possible to obtain linear good vibration characteristics.

That is, elastomeric element 4 (the first elastomeric element 41 and the second elastomeric element 42) is the viscoelasticity part (gel of plate Damping means), according to its telescopic direction, have expansion performance linearly or nonlinearly.For example, along its thickness direction (axial direction) It is pressed when compressive deformation, has the nonlinear component expansion performance bigger than linear component (spring constant), on the other hand, In Through-thickness (axial direction) stretches in the case where extending, and has flexible bigger than nonlinear component of linear component (spring constant) Characteristic.In addition, in the case where being deformed along the direction (shear direction) intersected with thickness direction (axial direction), no matter in which direction It is mobile, all it is the deformation in the direction for being stretched and extending, therefore, has linear component (spring constant) than nonlinear component (bullet Spring coefficient) big deformation characteristic.In the present embodiment, in movable body 3 in X direction and when Y-direction is vibrated, elastomeric element 4 is (viscous Elastomeric element) it is deformed along shear direction.Therefore, in elastomeric element 4, movable body 3 in X direction and Y-direction vibrate when, movement The elastic force that direction is formed is constant.Therefore, by using the spring element of the shear direction of elastomeric element 4, vibration can be improved Therefore dynamic reproducibility of the acceleration relative to input signal can be realized with delicate nuance and be vibrated.

It stretches in addition, elastomeric element 4 is installed to be between movable body 3 and supporting mass 2 along first direction Z, works as elastic portion The through-thickness (axial direction) between movable body 3 and supporting mass 2 of part 4 is pressed and when compressive deformation, has nonlinear component (bullet Spring coefficient) expansion performance bigger than linear component (spring constant).Therefore, in the Z-direction orthogonal with the driving direction of movable body 3 On, elastomeric element 4 can be inhibited substantially to deform, therefore, movable body 3 and the gap of supporting mass 2 can be inhibited to significantly change.

In addition, the two sides of the Z-direction of the first elastomeric element 41 passes through the methods of bonding and movable body 3 and first end plate respectively 28 connections, the two sides of the Z-direction of the second elastomeric element 42 pass through the methods of bonding respectively and connect with movable body 3 and the second end plate 29 It connects.Therefore, elastomeric element 4 reliably follows the movement of movable body 3, it is possible to be effectively prevented the resonance of movable body 3.

In addition, movable range when driving movable body 3 in X direction by the first Magnetic driving circuit 6 and third Magnetic driving circuit 8 Limited by stop mechanism, the stop mechanism by the second Magnetic driving circuit 7 the second magnet 721 and the second coil brace 75 second Portions 781,782 are constituted.In addition, driving the movable body 3 when movable body 3 to Y-direction along Y-direction from the second Magnetic driving circuit 7 Movable range is limited by stop mechanism, which includes the first magnet 622 and First Line by the first Magnetic driving circuit 6 Stop mechanism that first portions 681,682 of coil support 65 are constituted and by the third magnet 821 of third Magnetic driving circuit 8 and the The stop mechanism that the third portions 881,882 of three-winding bracket 85 are constituted.To even if the situation excessively mobile in movable body 3 Under, the weaker position of intensity is also difficult to abut each other, so the reliability of actuator 1 is very high.In addition, movable body 2 in X-direction and Movable range in Y-direction by constituted between first coil bracket 65 and the first magnet 622 stop mechanism, in the second coil The stop mechanism and the structure between tertiary coil bracket 85 and third magnet 821 constituted between bracket 75 and the second magnet 721 At stop mechanism limit.If it is such stop mechanism, then can be set in z-direction with the first Magnetic driving circuit 6, the position that the second Magnetic driving circuit 7 and third Magnetic driving circuit 8 are overlapped.Therefore, actuating when can reduce from Z-direction The area of plane of device 1.

[variation of constraint component 90]

Figure 10 is the explanatory diagram indicated in the variation for applying constraint component 90 used in actuator 1 of the invention. In the above-described embodiment, 92 structure of the first component 91 and second component formed by being in advance bent metal plate-shaped member At constraint component 90, but in the present embodiment, as shown in Figure 10, by with the first component 96 and second component 97 of band-like extension Constitute constraint component 90.

More specifically, the first component 96 with from the other side Z2 of the Z-direction of body part 10 pass through X-direction side The mode that the other side X2 of X1, the side Z1 of Z-direction and X-direction return to the other side Z2 of Z-direction is wound, and square with welding etc. End 970 is fixed on the other side Z2 of Z-direction by method.In addition, second component 97 is with from the other side of the Z-direction of body part 10 The mode for the other side Z2 that the other side Y2 that Z2 passes through the side Y1 of Y-direction, the side Z1 of Z-direction and Y-direction returns to Z-direction twines Around, and end 960 is fixed on to the other side Z2 of Z-direction with the methods of welding.Therefore, in the constraint component of present embodiment In 90, the first component 96, which has from the side Z1 of Z-direction, is directly overlapped in the first part 901 of first coil bracket 65, from the side Z To other side Z2 be overlapped in the second part 902 of the second coil brace 75 via tertiary coil bracket 85, in the X of supporting mass 2 Part III 903 that the side X1 in direction is connect with first part 901 and second part and supporting mass 2 X-direction it is another The Part IV 904 that side X2 is connect with first part 901 and second part 902.In addition, in the constraint component of present embodiment In 90, second component 97, which has from the other side Z2 of Z-direction, is directly overlapped in the first part 901 of first coil bracket 65, from Z The other side Z1 in direction is overlapped in the second part 902 of the second coil brace 75 via tertiary coil bracket 85, in supporting mass 2 Part V 905 that the side Y1 of Y-direction is connect with first part 901 and second part and supporting mass 2 Y-direction it is another The Part VI 906 that side Y2 is connect with first part 901 and second part 902.

In such a configuration, first coil bracket 65, the second coil brace 75 and tertiary coil bracket 85 are in Z-direction On be clamped by constraint component 90.It therefore, can be by first coil bracket 65, the second coil brace 75 and tertiary coil bracket 85 without shaking overlap along Z-direction.

[other embodiment]

In the above-described embodiment, first magnet 622 is used in the first Magnetic driving circuit 6, in third Magnetic driving Using third magnet 821 but it is also possible to be in the first Magnetic driving circuit 6, by the first magnet configuration the in circuit 8 The two sides of the Z-direction of one coil 61, in the third Magnetic driving circuit 8, by third magnet configuration tertiary coil 81 Z-direction Two sides.

In the above-described embodiment, elastomeric element 4 (viscoelasticity part) is configured to the two sides of the Z-direction of movable body 3, but Elastomeric element 4 (viscoelasticity part) can also be configured to the two of the two sides of the X-direction of movable body 3 and the Y-direction of movable body 3 Side.In addition, in the above-described embodiment, having used gel damping means as elastomeric element 4, but can also be by rubber or bullet Spring etc. is used as elastomeric element 4.As gel component (gel damping means), silicon systems gel may be exemplified.More specifically, As elastomeric element 4, the silicon systems gel that needle penetration is 10 degree~110 degree can be used.Needle penetration in JIS-K-2207 and It is provided in JIS-K-2220, it is meant that the value is smaller harder.

In addition, viscoplasticity refers to the bulk properties of viscosity and elasticity both, it is contour in gel component, plastics, rubber The property obviously observed in molecular substance.Therefore, as having viscoelastic elastomeric element 4, also can be used natural rubber, Diene rubber (for example, styrene butadiene ribber, isoprene rubber, butadiene rubber), neoprene, acrylonitrile fourth Diene rubber etc.), non-diene rubber is (for example, butyl rubber, ethylene propylene rubber, ethylene propylene diene rubber, poly- ammonia Ester rubber, silicon rubber, fluorubber etc.), various rubber materials and their modified material such as thermoplastic elastomer (TPE).

In addition, in the above-described embodiment, by bonding etc. by the two sides of the Z-direction of the first elastomeric element 41 respectively with can Kinetoplast 3 and first end plate 28 connect, by bonding by the two sides of the Z-direction of the second elastomeric element 42 respectively with movable body 3 and the When two end plates 29 connect, elastomeric element 4 (the first elastomeric element 41 and the second elastomeric element 42) is in supporting mass 2 and movable body Along the compressed state of Z-direction between 3.Therefore, elastomeric element 4 reliably follows the movement of movable body 3, therefore, can be effective Ground prevents the resonance of movable body 3.

In the above-described embodiment, coil and coil brace are set on supporting mass 2, and magnet and yoke are arranged at movable body On 3, but can also in the case where coil and coil brace are set on movable body 3 and magnet and yoke are set on supporting mass 2 With the application present invention.In this case, bracket by hold the yoke piece of magnet at.

Industrial availability

In actuator of the invention, on supporting mass, hold the coil of Magnetic driving circuit or multiple brackets (of magnet One bracket and second support) it overlaps in a first direction.Therefore, multiple Magnetic driving circuits (the first Magnetic driving circuit and Second Magnetic driving circuit) it overlaps in a first direction.Therefore, (the plane face of the size from first direction when actuator Product) it is smaller.In addition, though multiple brackets overlap in a first direction, but constraint component is clamped from the two sides of first direction With the multiple brackets of constraint.Therefore, multiple brackets can be overlapped in a first direction without ground is shaken.