阅读说明：本技术 测量设备平衡件 (Measuring device balance element ) 是由 C·布朗 雨果·乔治·戴瑞克 于 2018-04-17 设计创作，主要内容包括：本发明提供了一种定位设备,该定位设备包括能够在其上安装探针设备的套筒轴、用于使该套筒轴在基本上竖直的维度上定位的至少一个马达、以及用于该套筒轴的气动平衡机构。该定位设备被配置为基于与该套筒轴有关的至少一个因素而自动实现该气动平衡机构的压力的变化,从而调节该套筒轴上的由该气动平衡机构提供的平衡力。(The present invention provides a kind of positioning device, which includes that can install the quill of probe device, at least one motor for positioning the quill in substantially vertical dimension and the air-balance mechanism for the quill on it.The positioning device is configured as the variation for the pressure for realizing the air-balance mechanism automatically based at least one factor related with the quill, to adjust the equilibrant force provided by the air-balance mechanism in the quill.)

1. a kind of positioning device, the positioning device includes the quill that can install probe device on it, described for making At least one motor that quill positions in substantially vertical dimension and the air-balance machine for the quill Structure, wherein the positioning device is configured as realizing automatically described based at least one factor related with the quill The variation of the pressure of air-balance mechanism, to adjust the balance provided by the air-balance mechanism in the quill Power.

2. positioning device as claimed in any preceding claim, wherein at least one described motor includes direct drive motor, It is optionally linear motor.

3. positioning device as claimed in claim 1 or 2, wherein the reality of at least one described factor and the quill is vertical Position or expected vertical position are related.

4. positioning device as claimed in any preceding claim further comprises the vertical position for measuring the quill One or more position coders, and wherein at least one described factor includes from one or more of position encoded The output of at least one position coder in device.

5. positioning device as claimed in any preceding claim, wherein at least one described factor and at least one described motor Actual power demand or anticipating power demand it is related.

6. positioning device as claimed in any preceding claim, wherein the reality of described at least one factor and the quill Direction of travel or expected direction of travel are related.

7. positioning device as claimed in claim 6, the positioning device is configured as adjusting the pressure of the air-balance mechanism Power, to assist the motor to move the quill on the direction of travel.

8. positioning device as claimed in any preceding claim, wherein described at least one factor and such as probe etc. have loaded Or at least one module that be loaded in the quill is related.

9. positioning device as claimed in claim 8, wherein the weight of described at least one factor and at least one module It is related.

10. positioning device as claimed in claim 8 or 9, wherein by the module pair being loaded in the quill It is assessed in the influence of the coordinate positioning apparatus to determine at least one described factor.

11. positioning device as claimed in any preceding claim, including pressure regulator, the pressure regulator is configured as The pressure of the air-balance mechanism is maintained into setting pressure, and wherein the equipment is configured as based on described at least one It is a because usually changing the setting pressure.

12. positioning device as claimed in any preceding claim, wherein being determined according to look-up table and/or function described pneumatic The variation of the pressure of balance mechanism.

13. positioning device as claimed in any preceding claim, the positioning device is configured to respond to the quill On load performance of expected change or measurement variation and automatically adjust the pressure of the air-balance mechanism.

14. positioning device as claimed in any preceding claim, wherein the positioning device includes that cartesian coordinate positioning is set It is standby.

15. a kind of operating method of positioning device, the positioning device include the quill that can install probe device on it, At least one motor for moving the quill in substantially vertical dimension and the gas for the quill Dynamic balancer, the pressure for realizing the air-balance mechanism automatically the method includes the state based on the quill Variation, to adjust the equilibrant force provided by the air-balance mechanism in the quill.

16. a kind of positioning device, comprising: the first component that can be relatively moved in substantially vertical freedom degree and the second structure Part, wherein energy conduit is connected at least one of the first component and the second component, wherein in first structure It is applied to what at least one of described component was attached thereto by the energy conduit in the freedom degree of part and the second component Load on component changes according to the relative position of the first component and the second component, and the positioning device into One step includes air-balance part, and the air-balance part is configured as the freedom degree in the first component and the second component Upper application load, the load changes according to the relative position of the first component and the second component, with the energy The load that conduit is applied is on the contrary, this load change is realized by changing the air pressure of the air-balance part.