Fixing platform for thin and flexible film substrate

文档序号:1778251 发布日期:2019-12-06 浏览:20次 中文

阅读说明:本技术 一种用于薄柔薄膜基底的固定平台 (Fixing platform for thin and flexible film substrate ) 是由 冯宗宝 欧阳俊波 张海銮 程园园 崔阳阳 郑永强 韩长峰 钱磊 张德龙 于 2019-09-24 设计创作,主要内容包括:一种用于薄柔基底的固定平台,包括有基台,所述基台的表面设置有用于支撑薄柔基底的台面,所述台面区间内设置有用于薄柔基底涂布的涂布机,所述基台包括有涂布区以及位于所述涂布区两侧的固定区,所述固定区设置有若干个真空吸附孔,所述真空吸附孔连接有真空发生器,所述涂布机在所述涂布区内对薄柔基底进行涂布;薄柔基底平铺在台面上,真空吸附孔通过真空发生器产生的负压将位于固定区内的薄柔基底固定在固定区内,固定区设置在涂布区的两侧,从而使得涂布区内的薄柔基底平铺且薄柔基底的表面不会出现凹坑,从而保证对涂布区内的薄柔基底进行高精涂布过程中涂布厚度的均一性。(A fixed platform for a thin and flexible substrate comprises a base platform, wherein the surface of the base platform is provided with a table top for supporting the thin and flexible substrate, a coating machine for coating the thin and flexible substrate is arranged in a table top interval, the base platform comprises a coating area and fixed areas positioned on two sides of the coating area, the fixed areas are provided with a plurality of vacuum adsorption holes, the vacuum adsorption holes are connected with a vacuum generator, and the coating machine is used for coating the thin and flexible substrate in the coating area; the thin and flexible substrate is flatly laid on the table board, the vacuum adsorption holes fix the thin and flexible substrate in the fixed area through the negative pressure generated by the vacuum generator, and the fixed area is arranged on two sides of the coating area, so that pits cannot appear on the surface of the thin and flexible substrate which is flatly laid in the coating area, and the uniformity of the coating thickness in the high-precision coating process of the thin and flexible substrate in the coating area is ensured.)

1. the utility model provides a fixed platform for thin gentle base, includes the base station, the surface of base station is provided with the mesa that is used for supporting thin gentle base, be provided with the coating machine that is used for thin gentle base coating in the mesa interval, its characterized in that, the base station is including coating district and being located the fixed area of coating district both sides, the fixed area is provided with a plurality of vacuum adsorption hole, vacuum adsorption hole connection has vacuum generator, the coating machine is in coat to thin gentle base in the coating district.

2. Fixed platform according to claim 1, characterized in that the application zone is provided with heating means.

3. The mounting platform of claim 1, wherein the mounting areas are symmetrically disposed on opposite sides of the coating area.

4. A fixed platform according to claim 1 or 3, wherein the fixed area is in the same plane as the coating area.

5. A mounting platform according to claim 1 or 3, wherein the mounting section is of convex arcuate configuration, the edge of the mounting section being connected to the application section.

6. The mounting platform of claim 4, wherein the vacuum chucking holes are tangential to the arcuate surface of the mounting region.

7. A fixed platform according to claim 1 or 3, characterized in that the fixed area is arranged obliquely towards the side remote from the application area, the edge of the fixed area being connected with the application area.

8. The fixed platform of claim 7, wherein the vacuum suction holes are perpendicular to the plate surface of the fixed area and/or the vacuum suction holes are arranged at an included angle with the plate surface of the fixed area.

9. The fixed platform of claim 1, wherein a controller is connected to the vacuum generator for controlling the operating state of the vacuum generator.

10. The fixed platform of claim 1, wherein the coating process is a die slot coating process.

Technical Field

the invention relates to the technical field of printing equipment, in particular to a fixing platform for a thin and flexible film substrate.

background

Extrusion formula slit coating mode is with its accurate to coating film quality controllability widely used in novel thin-film solar cell, novel display material, optical function membrane, novel trade fields such as environmental protection osmotic membrane. In the process of applying the functional material to the surface of the flexible sheet, the substrate needs to be fixed on the platform. The prior art is generally in a vacuum adsorption mode, which is simple and has strong operability in industrial mass production.

As shown in fig. 1, a coating base comprises a base having a table top for supporting a substrate, and a vacuum suction hole for sucking the substrate is formed on the table top.

When the thickness of the substrate is relatively thick (the thickness is more than 100um), because the vacuum adsorption force is small, the whole deformation quantity is small relative to the thickness of the substrate, and the influence on the thickness of the coating functional layer on the surface of the substrate is small; however, when the thickness of the substrate is less than 50um and the substrate is soft, when the substrate is fixed by the coating base station in a vacuum adsorption manner, the substrate material at the vacuum adsorption hole inevitably generates an adsorption deformation phenomenon, the substrate generates a pit under the action of the vacuum adsorption hole, and the coating of the functional layer is completed on the basis, so that the coating thickness difference inevitably occurs, especially in photoelectric thin film materials, the functional difference is caused by the thickness difference, and the prior art has an improvement.

disclosure of Invention

In order to solve the technical problems, the invention provides a fixing platform for a thin and flexible substrate, wherein the substrate on the fixing platform is fixed through fixing areas positioned at two sides of a coating area, and vacuum adsorption holes are arranged in the fixing areas, so that the substrate in the coating area is prevented from deforming, and the uniformity of the coating thickness of the thin and flexible substrate in a high-precision coating process is ensured.

In order to achieve the purpose, the technical scheme of the invention is as follows: the utility model provides a fixed platform for thin gentle base, includes the base station, the surface of base station is provided with the mesa that is used for supporting thin gentle base, be provided with the coating machine that is used for thin gentle base coating in the mesa interval, the base station is including coating district and being located the fixed area of coating district both sides, the fixed area is provided with a plurality of vacuum adsorption hole, the vacuum adsorption hole is connected with vacuum generator, the coating machine is in coat to thin gentle base in the coating district.

Through adopting above-mentioned technical scheme, thin gentle base tiling is on the mesa, and the vacuum adsorption hole passes through the negative pressure that vacuum generator produced and will be located the thin gentle base of fixed area and fix in the fixed area, and the fixed area sets up the both sides in the coating district to make the surface of the thin gentle base tiling and the thin gentle base of coating in the coating district can not appear the pit, thereby guarantee to carry out the homogeneity of high-accuracy coating thickness to the thin gentle base in the coating district.

The invention is further configured to: the coating area is provided with a heating device.

By adopting the technical scheme, as the coating area is not provided with the vacuum adsorption hole, a heating device for heating the thin and flexible substrate in the coating area can be arranged in the coating area, and the solidification speed of the functional layer on the surface of the thin and flexible substrate is improved.

The invention is further configured to: the two fixing areas are symmetrically arranged on two sides of the coating area.

By adopting the technical scheme, the thin and flexible substrate is more uniformly stressed, and the flatness of the thin and flexible substrate in the coating area is ensured.

The invention is further configured to: the fixing area and the coating area are positioned in the same plane.

By adopting the technical scheme, the thin and flexible substrate can be continuously processed conveniently, and the smoothness of the sliding of the thin and flexible substrate on the table top is ensured.

the invention is further configured to: the fixing area is of an outward convex arc-shaped structure, and the edge of the fixing area is connected with the coating area.

By adopting the technical scheme, the arc-shaped structure enables the thin and flexible substrate to be more stretched on the table board, and the flatness and the stretching degree of the thin and flexible substrate in the coating area are improved.

The invention is further configured to: the vacuum adsorption hole is tangent to the cambered surface of the fixed area.

Through adopting above-mentioned technical scheme, guarantee the fixed effect of the fixed zone of arc structure to thin gentle basement.

The invention is further configured to: the fixed area is obliquely arranged towards one side far away from the coating area, and the edge of the fixed area is connected with the coating area.

Through adopting above-mentioned technical scheme, the fixed area of slope structure can improve the degree of stretching of thin gentle basement on the mesa, can guarantee thin gentle basement gliding smoothness nature on the mesa again simultaneously, conveniently drops into industrial production.

The invention is further configured to: the vacuum adsorption hole is perpendicular to the plate surface of the fixed area and/or the vacuum adsorption hole and the panel of the fixed area are arranged at an included angle.

Through adopting above-mentioned technical scheme, improve the fixed effect of the fixed zone of slope setting to thin gentle basement.

The invention is further configured to: the vacuum generator is connected with a controller used for controlling the working state of the vacuum generator.

by adopting the technical scheme, after the thin and flexible substrate in the coating area is coated, the vacuum adsorption function is removed through the controller, the thin and flexible substrate can be moved more easily, and the continuous coating of the thin and flexible substrate is realized.

The invention is further configured to: the coating process is an extrusion slit coating process.

By adopting the technical scheme, the accuracy of the thickness of the functional layer is ensured.

In summary, the present invention has the following technical effects:

1. The fixing areas arranged on the two sides of the coating area can reduce the difficulty of coating on the thin and flexible substrate and ensure the flatness of the thin and flexible substrate during base coating;

2. Because the thin and flexible substrate in the fixed area is not used for coating, the requirements on the vacuum adsorption holes in the fixed area can be reduced, the requirements on the aperture of the vacuum adsorption holes and the distribution of the vacuum adsorption holes are reduced, and the processing cost of the fixed platform during manufacturing is reduced;

3. The vacuum adsorption holes in the fixed area can be set with vacuum adsorption holes with different hole patterns and directions aiming at different thin and flexible substrates, so that the adsorption effect on the substrates with different thicknesses can be realized more easily.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the embodiments or the description of the prior art will be briefly described below.

FIG. 1 is a schematic diagram of a prior art coating station;

FIG. 2 is a schematic structural view of a fixed platen in embodiment 1;

FIG. 3 is a schematic structural view of a fixed platen in embodiment 2;

Fig. 4 is a schematic structural view of a fixed platform in embodiment 3.

In the figure: 1. a base station; 11. a fixed zone; 12. a coating area; 2. a thin flexible substrate; 3. a functional layer; 4. a vacuum adsorption hole; 5. a vacuum generator; 6. a pit; 7. a heating device; 8. and a controller.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

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