阅读说明：本技术 一种滤光片激光切割方法 (Optical filter laser cutting method ) 是由 邵西河 于 2021-09-08 设计创作，主要内容包括：本发明涉及滤光片切割技术领域,公开了一种滤光片激光切割方法,包括以下步骤：S1、将绿光激光器输出的高斯光通过多个反射镜传送至变倍扩束镜；S2、将经过变倍扩束镜的激光通过反射镜传送至1/2水晶波长板,使得激光变成偏振方向可调的线性偏振光；S3、线性偏振光经过偏光立方体分光镜后分成S偏光和P偏光；S4、将P偏光传送至组合透镜,形成能量密度从内往外逐渐减弱的环形光束；S5、将环形光束通过反射镜传送至聚焦镜,将环形光束聚焦于材料内部,通过伺服控制系统带动聚焦镜移动,对材料进行切割。通过多组反射镜和组合透镜后将激光传送至待加工的滤光片材料,通过控制激光功率和光斑形状将切割破坏影响降低至5微米以内。(The invention relates to the technical field of optical filter cutting, and discloses an optical filter laser cutting method, which comprises the following steps: s1, transmitting the Gaussian light output by the green laser to the zoom beam expander through a plurality of reflectors; s2, transmitting the laser passing through the zoom beam expander to a 1/2 crystal wavelength plate through a reflector, so that the laser is changed into linearly polarized light with adjustable polarization direction; s3, dividing the linearly polarized light into S polarized light and P polarized light after passing through the polarizing cube beam splitter; s4, transmitting the P polarized light to the combined lens to form an annular light beam with gradually reduced energy density from inside to outside; and S5, transmitting the annular light beam to a focusing mirror through a reflecting mirror, focusing the annular light beam in the material, and driving the focusing mirror to move through a servo control system to cut the material. The laser is transmitted to the optical filter material to be processed after passing through the multiple groups of reflectors and the combined lens, and the cutting damage influence is reduced to be within 5 microns by controlling the laser power and the light spot shape.)

1. A method for laser cutting an optical filter is characterized in that: the method comprises the following steps:

s1, transmitting the Gaussian light output by the green laser to the zoom beam expander through a plurality of reflectors;

s2, transmitting the expanded laser to a 1/2 crystal wavelength plate through a reflector, so that the laser is changed into linearly polarized light with adjustable polarization direction;

s3, dividing the linearly polarized light into S polarized light and P polarized light after passing through the polarizing cube beam splitter;

s4, transmitting the P polarized light to the combined lens to form an annular light beam with gradually reduced energy density from inside to outside;

and S5, transmitting the annular light beam to a focusing mirror through a reflecting mirror, focusing the annular light beam in the material, and driving the focusing mirror to move through a servo control system to cut the material.

2. The laser cutting method of the optical filter according to claim 1, wherein: the laser beam emitted from the light source in step S1 passes through the shutter and the plurality of mirrors, and is then transmitted to the variable beam expander.

3. The laser cutting method of the optical filter according to claim 1, wherein: in step S2, the 1/2 crystal wavelength plate is driven by an electric module to adjust the angle.

4. The laser cutting method of the optical filter according to claim 1, wherein: in step S3, the P-polarized light is directly transmitted through the polarizing cube beam splitter, and the S-polarized light is totally reflected.

5. The laser cutting method of the optical filter according to claim 1, wherein: the combined lens in the step S4 is composed of a 1-degree conical lens and a plano-convex lens with f =250mm, and the two groups of lenses are respectively fixed on the two groups of three-dimensional adjusting mirror frames; and the two groups of three-dimensional adjusting mirror frames are arranged on the one-dimensional translation table.

Technical Field

The invention relates to a cutting method, in particular to a laser cutting method for an optical filter.

Background

In recent years, the mobile phone industry is rapidly developed, with the popularization of high-end mobile phones with 4 shots, 8 shots and the like, the demand of optical filters in camera modules is rapidly increased every year, and various large chip manufacturers such as five-square photoelectricity, crystal photoelectricity, star wave optics and the like are all producing energy expansion at present so as to meet the increasing consumption demand. Laser cutting is the main cutting method at present, and utilizes high-power density laser beam to irradiate the material to be cut, so that the material is quickly heated to vaporization temperature, and evaporated to form holes, and the holes continuously form slits with narrow width along with the movement of the material by the light beam, thereby completing the cutting of the material. The performance of the laser manufacturing industry is indistinguishable from the popularity of the whole industry, the cutting damage influence of the existing laser cutting equipment is large, the influence is usually 30 microns or even 50 microns, and the cutting effect is not ideal.

Disclosure of Invention

The invention provides a laser cutting method for an optical filter, which is characterized in that laser is transmitted to an optical filter material to be processed through a plurality of groups of reflectors and combined lenses, the shape and the energy density of light are changed through the combined lenses, the pulse energy and the spot size of the laser are further changed, and the influence of laser cutting damage is reduced.

The working principle of the invention is as follows: a method for cutting an optical filter by laser comprises the following steps:

s1, transmitting the Gaussian light output by the green laser to the zoom beam expander through a plurality of reflectors;

s2, transmitting the laser passing through the zoom beam expander to a 1/2 crystal wavelength plate through a reflector, so that the laser is changed into linearly polarized light with adjustable polarization direction;

s3, dividing the linearly polarized light into S polarized light and P polarized light after passing through the polarizing cube beam splitter;

s4, transmitting the P polarized light to the combined lens to form an annular light beam with gradually reduced energy density from inside to outside;

and S5, transmitting the annular light beam to a focusing mirror through a reflecting mirror, focusing the annular light beam in the material, and driving the focusing mirror to move through a servo control system to cut the material.

Further, the method comprises the following steps: the laser beam emitted from the light source in step S1 passes through the shutter and the plurality of mirrors, and is then transmitted to the variable beam expander.

Further, the method comprises the following steps: in step S2, the 1/2 crystal wavelength plate is driven by an electric module to adjust the angle.

Further, the method comprises the following steps: in step S3, the P-polarized light is directly transmitted through the polarizing cube beam splitter, and the S-polarized light is totally reflected.

Further, the method comprises the following steps: the combined lens in the step S4 is composed of a 1-degree conical lens and a plano-convex lens with f =250mm, and the two groups of lenses are respectively fixed on the two groups of three-dimensional adjusting mirror frames; and the two groups of three-dimensional adjusting mirror frames are arranged on the one-dimensional translation table.

The invention has the beneficial effects that:

1. 1/2 crystal wavelength plates are driven by the motor module, and the laser incident angle can be freely adjusted by the polarizing cube spectroscope, so that the power control is realized.

2. The size of a light spot is changed through a zoom beam expander, the power is changed through a polarizer, the shape of the focused light spot is changed through a combined lens, and the fact that the laser has higher focal depth and smaller divergence angle under the condition of the same light beam size is guaranteed; and finally, driving a focusing mirror to move through a servo control system, changing a cutting focus, and cutting the laser inside the material for multiple times, thereby reducing the damage influence of laser cutting and reducing the section extension lines to within 5 microns.

3. Two groups of lenses of the combined lens are respectively fixed on two groups of three-dimensional adjusting lens frames, the two groups of three-dimensional adjusting lens frames are arranged on a one-dimensional translation table, and the distance between the two groups of lenses is changed by adjusting the one-dimensional translation table, so that the compatibility of processing blue glass and white glass can be realized.

Drawings

FIG. 1 is a flow chart of a cutting method;

FIG. 2 is a schematic view of the cutting apparatus;

labeled as: 1. a first shutter; 2. a first reflector; 3. a second reflector; 4. a third reflector;

5. a zoom beam expander; 6. a fourth mirror; 7. 1/2 crystal wavelength plate; 8. a polarizing cube beam splitter; 9. an axicon lens; 10. a plano-convex lens; 11. a fifth mirror; 12. and a sixth mirror.

Detailed Description

For the purpose of enhancing the understanding of the present invention, the present invention will be described in further detail with reference to the accompanying drawings and examples, which are provided for the purpose of illustration only and are not intended to limit the scope of the present invention.

A method for cutting an optical filter by using laser, in which a cutting device of this embodiment is shown in fig. 2, and after laser is output from a light source and adjusted by the cutting device, an annular light beam with output power and a light spot shape meeting a processing requirement is output, and then the annular light beam is focused in a material to be processed by using a focusing lens to be cut, specifically including the following steps:

s1, transmitting the Gaussian light output by the green laser to a first reflector 2 through a first shutter 1, and then transmitting the Gaussian light to a variable-magnification beam expander 5 through a second reflector 3 and a third reflector 4; the light propagation path is changed through the plurality of reflectors, the light path stroke is ensured to be within a certain reasonable range, and the cutting effect is ensured.

S2, transmitting the laser passing through the zoom beam expander to the 1/2 crystal wavelength plate 7 through the fourth reflector 6, so that the laser becomes linear polarized light with adjustable polarization direction;

s3, dividing the linear polarized light into S polarized light and P polarized light after passing through the polarizing cube spectroscope 8; the P polarized light directly transmits through the polarized cube spectroscope, and the S polarized light is totally reflected;

s4, transmitting the P polarized light to the combined lens to form an annular light beam with gradually reduced energy density from inside to outside;

and S5, transmitting the annular light beam to the focusing mirror through the fifth reflecting mirror 11 and the sixth reflecting mirror 12, focusing the annular light beam inside the material, driving the focusing mirror to move through the servo control system, and cutting the material.

On the basis, the 1/2 crystal wavelength plate in the step S2 is driven by an electric module to adjust the angle, and the 1/2 crystal wavelength plate is a zero-order wavelength plate formed by two crystal plates directly contacted with each other, so that the linear adjustment of the polarization direction of light can be realized through the rotation angle, and the light is divided into P light and S light after passing through the polarizing cube beam splitter, thereby achieving the purpose of controlling the power.

On the basis of the above, the combined lens described in step S4 is composed of a 1-degree axicon lens 9 and a plano-convex lens 10 with f =250mm, and two groups of lenses are respectively fixed on two groups of three-dimensional adjusting mirror frames; the two three-dimensional adjusting mirror frames are arranged on the one-dimensional translation table, the distance between the two sets of lenses is changed by adjusting the one-dimensional translation table, and when the distance between the two sets of lenses is changed, the shape and the energy density of the ring light are changed, so that the pulse energy and the light spot size of the laser are changed, and the compatibility of processing blue glass and white glass can be realized.

The above embodiments should not limit the present invention in any way, and all technical solutions obtained by using equivalent alternatives or equivalent transformations fall within the protection scope of the present invention.