阅读说明：本技术 加工装置 (Processing device ) 是由 川口吉洋 政田孝行 相川真纪 于 2021-04-25 设计创作，主要内容包括：本发明提供加工装置,该加工装置能够准确地掌握加工装置内的状况。加工装置(1)至少具有：保持工作台(10),其对被加工物(100)进行保持；加工单元(40),其对保持工作台(10)所保持的被加工物(100)进行加工；搬送臂(51、52、53),其搬送被加工物(100)；以及显示器(61),其具有显示加工装置(1)的状态的显示功能。显示器(61)按照从斜向观察加工装置(1)的方式立体地显示配置图,该配置图根据实际的加工装置(1)内的配置来显示加工装置(1)的各结构单元的图例和加工装置(1)处理中的被加工物(100)的图例。(The invention provides a processing device, which can accurately grasp the state in the processing device. The processing device (1) at least comprises: a holding table (10) that holds a workpiece (100); a processing unit (40) which processes the workpiece (100) held by the holding table (10); a conveying arm (51, 52, 53) which conveys a workpiece (100); and a display (61) having a display function for displaying the state of the processing device (1). The display (61) displays a three-dimensional layout drawing showing a legend of each component of the processing device (1) and a legend of the workpiece (100) being processed by the processing device (1) in accordance with the actual layout in the processing device (1) as viewed from an oblique direction in the processing device (1).)

1. A processing apparatus, comprising at least:

a holding table for holding a workpiece;

a processing unit for processing the workpiece held by the holding table;

a conveying arm for conveying the processed object; and

a display device is arranged on the base plate,

it is characterized in that the preparation method is characterized in that,

the display stereoscopically displays an arrangement diagram, which shows a legend of each component unit of the processing apparatus and a legend of a workpiece being processed by the processing apparatus, in accordance with an actual arrangement within the processing apparatus, as viewed from an oblique direction.

2. The processing device according to claim 1,

at least two units of the processing apparatus are arranged at a vertical interval, and are in a positional relationship of overlapping when viewed from the upper surface of the processing apparatus during movement or at a fixed position of the units.

Technical Field

The present invention relates to a processing apparatus.

Background

For example, a machining apparatus that machines a workpiece such as a cutting apparatus or a grinding apparatus includes: a cassette mounting table on which a cassette for storing a workpiece in a shelf shape is mounted; a temporary placing table for temporarily placing the workpiece taken out from the cassette; a holding table for holding a workpiece to be processed; a carrying-in unit which carries the object to be processed from the temporary placing worktable to the holding worktable; a processing unit, which is provided with a processing tool and processes the processed object held by the holding workbench; a cleaning unit for cleaning the processed object; a carrying-out unit for carrying out the processed object from the holding workbench to the cleaning workbench; a conveying unit which takes out the processed object from the box or stores the processed object in the box; and an input member and a display (e.g., a touch panel) for inputting and displaying various kinds of processing information (see, for example, patent document 1).

The touch panel has an input function for setting input processing conditions and a display function for displaying an operating state of the processing device. The display function of the touch panel is a function of displaying an arrangement diagram showing the arrangement of each unit such as the cassette mounting table, the temporary placement table, the holding table, the carry-in unit, the processing unit, the cleaning table, the carry-out unit, and the conveying unit when the processing apparatus is viewed from above. In addition, when the machining device is fully automatically operated, the objects to be machined that move in the machining device are also displayed on the layout (see, for example, patent document 2).

Patent document 1: japanese patent laid-open No. 2014-161948

Patent document 2: japanese patent laid-open publication No. 2019-198940

In recent years, with the demand for high-quality devices, the number of components (units) to be mounted in a processing apparatus has increased. Therefore, a machining device is provided in which a plurality of members (units) are provided at intervals in the vertical direction, thereby achieving space saving. In addition, a typical machining apparatus includes two arms, i.e., a conveying arm that conveys a clean workpiece that has been cleaned before or after machining and a conveying arm that conveys the machined workpiece from the holding table to the cleaning table. Further, when viewed from above, the positions of the respective units and the transfer arm may be covered, such as the transfer arm and the holding table or the transfer arm and the cleaning table. In such a case, there is a problem that the state in the processing apparatus cannot be accurately grasped in a plan view (a view viewed from above) as in patent document 2.

Disclosure of Invention

The present invention has been made in view of the above problems, and an object thereof is to provide a machining device capable of accurately grasping a state in the machining device.

In order to solve the above problems and achieve the object, a machining apparatus according to the present invention includes at least: a holding table for holding a workpiece; a processing unit for processing the workpiece held by the holding table; a conveying arm for conveying the processed object; and a display that displays a layout drawing showing a legend of each component unit of the processing device and a legend of a workpiece being processed by the processing device in accordance with an actual layout in the processing device, in a three-dimensional manner such that the processing device is viewed obliquely.

At least two components of the processing apparatus may be arranged at a vertical interval, and the components may be in a positional relationship such that they overlap when viewed from the upper surface of the processing apparatus during movement or at a fixed position of the components.

The invention can accurately grasp the condition in the processing device.

Drawings

Fig. 1 is a perspective view showing a configuration example of a processing apparatus according to an embodiment.

Fig. 2 is a diagram schematically showing an example of a functional configuration of the processing apparatus of fig. 1.

Fig. 3 is a diagram showing an example of an image stored in the image data storage unit of fig. 2.

Fig. 4 is a diagram showing an example of three-dimensional data stored in the three-dimensional data storage unit of fig. 2.

Fig. 5 is a diagram showing an example of layout coordinate data stored in the layout setting storage unit of fig. 2.

Fig. 6 is a diagram showing an example of layout stacking order data stored in the layout setting storage unit of fig. 2.

Fig. 7 is a diagram showing an example of the movement history data stored in the movement history storage unit of fig. 2.

Fig. 8 is a diagram illustrating an example of processing by the display processing unit of fig. 2.

Fig. 9 is a diagram illustrating an example of processing by the display processing unit of fig. 2.

Fig. 10 is a diagram illustrating an example of processing by the display processing unit of fig. 2.

Fig. 11 is a diagram illustrating an example of processing by the display processing unit of fig. 2.

Fig. 12 is a diagram showing an example of a layout displayed on a display of the processing apparatus of fig. 1.

Fig. 13 is a diagram illustrating an example of processing by the display processing unit of fig. 2.

Fig. 14 is a diagram illustrating an example of processing by the display processing unit of fig. 2.

Description of the reference symbols

1: a processing device; 10: a holding table; 40: a processing unit; 51: (1 st) a transfer arm; 52: (2) a carrying arm; 53: (3 rd) a carrying arm; 61: a display; 100: a workpiece; 200: and (5) configuration diagrams.

Detailed Description

A mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. The components described below include substantially the same components as can be easily conceived by those skilled in the art. The following structures can be combined as appropriate. Various omissions, substitutions, and changes in the structure can be made without departing from the spirit of the invention.

[ embodiment ]

A machining apparatus 1 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a processing apparatus 1 according to an embodiment. Fig. 2 is a diagram schematically showing an example of a functional configuration of the processing apparatus 1 shown in fig. 1. As shown in fig. 1, the processing apparatus 1 of the embodiment includes a holding table 10, a rotating table 20, a temporary placement table 30, a processing unit 40, transfer arms 51, 52, and 53, a touch panel 60, a cleaning unit 70, a cassette mounting table 80, cassettes 81 and 82, and a control unit 90. In the present embodiment, the processing apparatus 1 includes an apparatus base 2 and an apparatus cover 3, and the components of the processing apparatus 1 are provided on the apparatus base 2, and the components except the touch panel 60 are covered with the apparatus cover 3. The components of the present invention are all components that hold the workpiece 100 described later among the components of the processing apparatus 1, and in the present embodiment, specifically, the holding table 10, the staging table 30, the transfer arms 51, 52, and 53, the cleaning table 71 of the cleaning unit 70, and the cassettes 81 and 82 are shown.

In the present embodiment, as shown in fig. 1, the object 100 to be processed by the processing apparatus 1 is, for example, a disc-shaped semiconductor wafer or an optical device wafer based on silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. The workpiece 100 has a chip-size device in a region defined by a plurality of planned dividing lines formed in a lattice shape on a flat front surface. In the present invention, the object 100 may be provided with an adhesive tape attached to the back surface of the front surface and the back surface, and an annular frame may be attached to the outer edge portion of the adhesive tape. In the present invention, the workpiece 100 may be a rectangular package substrate, a ceramic plate, a glass plate, or the like, which includes a plurality of resin-sealed devices.

In the present embodiment, the processing apparatus 1 automatically performs, for example, the following fully automatic processing: the respective constituent units of the processing apparatus 1 are caused to perform a series of operations to repeatedly carry and process the workpiece 100, and the workpiece 100 stored in the cassettes 81 and 82 is sequentially processed. In the present invention, the machining device 1 is not limited to the embodiment in which the full-automatic machining is performed, and may be a manual machine that performs each process one by one according to the operation of the operator without performing the full-automatic machining.

The holding table 10 holds the workpiece 100 by the holding surface 11. The holding table 10 has a disk shape, and includes: a disk-shaped suction portion made of porous ceramics or the like having a flat holding surface 11 formed on an upper surface thereof for holding the workpiece 100 and having a plurality of pores; and a frame body, which is embedded and fixed on the concave part of the central part of the upper surface. The holding surface 11 is formed substantially parallel to an XY plane as a horizontal plane. The holding table 10 is provided to be rotatable about an axis parallel to a Z-axis direction perpendicular to a horizontal plane by a rotation drive source, not shown. The suction portion of the holding table 10 is connected to a vacuum suction source, not shown, via a vacuum suction path, not shown, and sucks and holds the workpiece 100 by the entire holding surface 11. The holding table 10 is provided with a sensor not shown. The sensor provided in the holding table 10 detects the workpiece 100 held by the holding surface 11, and transmits the detection result to the control unit 90.

As shown in fig. 1, two holding tables 10 are provided on the rotating table 20. The two holding tables 10 are provided on the turning table 20 so as to be independent from the turning table 20 and to be rotatable substantially in a horizontal plane. As shown in fig. 1, the turning table 20 is a disk-shaped table, and is an example of a conveying member provided to be rotatable in a horizontal plane, and configured to move the holding table 10 by being rotationally driven at a predetermined timing to convey the workpiece 100 on the holding table 10. The two holding tables 10 are disposed on the rotating table 20 at equal intervals, for example, at a phase angle of 180 °. The two holding tables 10 are sequentially moved to the carrying in/out position and the processing position by the rotation of the rotating table 20. The rotary table 20 is provided with a sensor not shown. The sensor provided in the rotating table 20 detects the rotation angle of the rotating table 20 and transmits the detection result to the control unit 90.

The temporary placing table 30 is a table as follows: the workpiece 100 is temporarily placed before the workpiece 100 before processing taken out of the cassettes 81 and 82 placed on the cassette mounting table 80 is carried onto the holding table 10, and the center of the workpiece 100 is aligned. The temporary placement table 30 is provided with a sensor not shown. The sensor provided in the temporary stand 30 detects the workpiece 100 held by the temporary stand 30, and transmits the detection result to the control unit 90.

The machining unit 40 machines the workpiece 100 held by the holding table 10. In the present embodiment, the machining unit 40 is a grinding unit and has a grinding wheel 41. The grinding wheel 41 has a grinding wheel disposed in an annular shape, and grinds the workpiece 100 by pressing the grinding wheel 41 in the Z-axis direction against the workpiece 100 held by the holding table 10 positioned at the machining position while applying a rotational motion about an axis parallel to the Z-axis direction to the grinding wheel 41.

As shown in fig. 1, the machining apparatus 1 further has a grinding amount detection unit 45. The grinding amount detection unit 45 is provided in the vicinity of the outer periphery of the holding surface 11 of the holding table 10 positioned at the processing position. In the present embodiment, the grinding amount detection unit 45 is a contact type height detection device, and has two contact type probes for detecting the height of the contact position. One probe of the grinding amount detection means 45 detects the height of the holding surface 11 of the holding table 10, the other probe detects the height of the upper surface of a region slightly inside the outer edge of the workpiece 100 held by the holding surface 11 of the holding table 10, and the thickness of the region slightly inside the outer edge of the workpiece 100 is detected based on the difference between the height detected by the one probe and the height detected by the other probe, and the detection result of the thickness is transmitted to the control means 90. In the present invention, the grinding amount detection means 45 is not limited to this, and may be configured as follows: the thickness of a region slightly inside the outer edge of the workpiece 100 is detected by receiving the interference wave of the laser beam having the wavelength reflected by the held surface 11 and the workpiece 100.

The 1 st transport arm 51 has an adsorption pad, and is an example of a carry-in unit that adsorbs and holds the pre-processed object 100 aligned on the temporary placement table 30 and carries it into the holding table 10 located at the carry-in/carry-out position. The 2 nd transfer arm 52 has an adsorption pad, and is an example of a carrying-out unit that adsorbs and holds the processed object 100 held on the holding table 10 at the carrying-in and carrying-out position and carries out the object to be processed on the cleaning table 71 of the cleaning unit 70. The 3 rd transfer arm 53 is, for example, a robot pickup having a U-shaped hand, and transfers the workpiece 100 by sucking and holding the workpiece 100 by the U-shaped hand. The 3 rd transport arm 53 is an example of a transport unit that transports the workpiece 100 before processing from the cassettes 81 and 82 to the temporary placement table 30 and transports the workpiece 100 after processing from the cleaning unit 70 to the cassettes 81 and 82. The 3 rd transfer arm 53 carries the processed and cleaned workpiece 100 stored in the magazine 81 before processing into the magazine 81, and carries the processed and cleaned workpiece 100 stored in the magazine 82 before processing into the magazine 82. The transfer arms 51, 52, and 53 are provided with sensors, not shown. The sensors provided in the conveying arms 51, 52, and 53 detect driving information, which is information related to driving of the conveying arms 51, 52, and 53, such as the rotational angles and positions of the arms constituting the conveying arms 51, 52, and 53, and the workpiece 100 sucked and held by the conveying arms 51, 52, and 53, and transmit the detection results to the control unit 90.

As shown in fig. 1, the touch panel 60 is provided on the apparatus cover 3 in a state where the display surface faces outward. The touch panel 60 includes: a display 61 that displays various information related to the processing apparatus 1; and an input unit 62 that receives various operation inputs related to the machining apparatus 1, such as setting inputs of machining conditions, from an operator. In the present embodiment, the display 61 displays a layout 200 (see fig. 12) in a three-dimensional manner so that the machining device 1 is viewed obliquely, and the layout 200 displays a diagram of each component of the machining device 1 and a diagram of the workpiece 100 being processed by the machining device 1 in accordance with the actual layout in the machining device 1.

Here, the illustration of each component of the processing apparatus 1 is a two-dimensional stereoscopic image stereoscopically displayed so that at least a part of the outer shape of each component of the processing apparatus 1 is viewed from obliquely above, and in the present embodiment, specifically, the device base stereoscopic image 202, the holding table stereoscopic image 210, the rotating table stereoscopic image 220, the temporary table stereoscopic image 230, the processing unit stereoscopic image 240, the transfer arm stereoscopic images 251, 252, and 253, the cleaning unit stereoscopic image 270, the cassette mounting table stereoscopic image 280, and the cassette stereoscopic images 281 and 282 (see fig. 3, 8, and 9) described later are illustrated.

The illustration of the workpiece 100 being processed by the processing apparatus 1 is a two-dimensional stereoscopic image stereoscopically displayed so that the outer shape of the workpiece 100 being processed by the processing apparatus 1 is viewed from obliquely above, and in the present embodiment, specifically, a workpiece stereoscopic image 400 (see fig. 10) to be described later. In the present embodiment, the workpieces 100 processed by the processing apparatus 1 are, for example, the workpieces 100 stored in the cassettes 81 and 82, the workpiece 100 sucked, held, and conveyed by the 3 rd conveying arm 53, the workpiece 100 held and centered by the temporary holding table 30, the workpiece 100 sucked, held, and conveyed by the 1 st conveying arm 51, the workpiece 100 sucked, held, and conveyed by the holding table 10, the workpiece 100 processed by the processing unit 40, the workpiece 100 sucked, held, and conveyed by the 2 nd conveying arm 52, and the workpiece 100 held, and cleaned by the cleaning table 71.

The display 61 displays the layout 200 of the machining device 1 viewed from obliquely above on the display 61 in a three-dimensional manner, and at least displays two-dimensional image data of the layout 200 of the machining device 1 viewed from obliquely above.

The cleaning unit 70 has a cleaning table 71 for holding the ground workpiece 100. The cleaning unit 70 cleans the ground workpiece 100 on the cleaning table 71 to remove contaminants such as grinding chips adhering to the ground surface. The cleaning table 71 is provided with a sensor not shown. The sensor provided in the cleaning table 71 detects the workpiece 100 held by the cleaning table 71, and transmits the detection result to the control unit 90.

The cassette mounting table 80 is a mounting table on which cassettes 81 and 82, which are containers for storing a plurality of workpieces 100, are mounted. In the present embodiment, the processing apparatus 1 has two cassette tables 80, and the cassette 81 is placed on one cassette table 80 and the cassette 82 is placed on the other cassette table 80.

The cassettes 81 and 82 can be taken out and put in the workpiece 100 through the openings, and have a plurality of slots for holding the workpiece 100 at intervals in the Z-axis direction. In the processing apparatus 1, the workpieces 100 stored in the cassettes 81 and 82 are managed and processed one by the number of slots stored. In the present embodiment, both the cassettes 81 and 82 have 13-layer slots, and the processing is performed by dividing 13 workpieces 100, but the present invention is not limited to this, and the number of slots may be several. The cassettes 81 and 82 are placed on the cassette mounting table 80 with the openings facing the 3 rd transfer arm 53 side.

The control unit 90 controls each component of the machining apparatus 1, and causes the machining apparatus 1 to perform each operation related to a machining process for machining the workpiece 100. The control unit 90 receives detection results of sensors provided in the respective constituent units and the like. The control unit 90 performs information processing relating to the state of the processing apparatus 1 based on the detection results of these sensors, and displays the information on the display 61. As shown in fig. 2, the control unit 90 has a storage section 91 and a processing section 92.

The storage unit 91 stores a program for realizing functions such as various processes of the machining apparatus 1 executed by the processing unit 92, data (machining conditions) used for the processes of the program, and the like. The storage unit 91 includes a Memory device such as a nonvolatile or volatile semiconductor Memory, for example, a RAM (Random Access Memory), a ROM (Read Only Memory), a flash Memory, an EPROM (Erasable Programmable Read Only Memory), an EEPROM (registered trademark) (Electrically Erasable Programmable Read Only Memory), or the like. The program stored in the storage unit 91 can also be said to be a program product having a non-transitory (non-transitory) recording medium readable by a processor and containing a plurality of commands for performing data processing executable by the processor of the processing unit 92. The storage unit 91 can also be used as a temporary work area when the processor included in the processing unit 92 executes a command described in a program.

As shown in fig. 2, the storage unit 91 according to the embodiment includes an image data storage unit 94, a three-dimensional data storage unit 95, a layout setting storage unit 96, and a movement history storage unit 97. The functions of the storage unit 91, the image data storage unit 94, the three-dimensional data storage unit 95, the layout setting storage unit 96, and the movement history storage unit 97 are realized by a storage device included in the storage unit 91.

Fig. 3 is a diagram showing an example of an image stored in the image data storage unit 94 of fig. 2. The image data storage unit 94 stores a two-dimensional stereoscopic image that is stereoscopically (three-dimensionally) displayed when at least a part of each component of the processing device 1 other than each component is viewed from obliquely above. Specifically, as shown in fig. 3, the image data storage unit 94 stores a device base station stereoscopic image 202, a rotary table stereoscopic image 220, a provisional table stereoscopic image 230, a machining unit stereoscopic image 240, a cleaning unit stereoscopic image 270, a cassette mounting table stereoscopic image 280, and cassette stereoscopic images 281 and 282. These stereoscopic images stored in the image data storage unit 94 are stored in the image data storage unit 94 by an operator or manager of the processing apparatus 1 in advance.

The device base stereoscopic image 202 is a two-dimensional stereoscopic image that stereoscopically displays the device base 2 so that the outer shape of the device base 2 is viewed from obliquely above (in the same direction as the arrangement diagram 200). The swivel table stereoscopic image 220 is a two-dimensional stereoscopic image for stereoscopically displaying the swivel table 20 so that the outer shape of the swivel table 20 is viewed from obliquely above (in the same direction as the arrangement diagram 200). The provisional table stereoscopic image 230 is a two-dimensional stereoscopic image for stereoscopically displaying the provisional table 30 so that the outer shape of the provisional table 30 is viewed from obliquely above (in the same direction as the arrangement diagram 200). The machining-unit three-dimensional image 240 is a two-dimensional three-dimensional image that stereoscopically displays the machining unit 40 so that the outer shape of the machining unit 40 is viewed from obliquely above (in the same direction as the arrangement diagram 200). The cleaning unit stereoscopic image 270 is a two-dimensional stereoscopic image stereoscopically showing a part of the cleaning unit 70 so that a part of the outer shape of the cleaning unit 70 is viewed from obliquely above (in the same direction as the arrangement diagram 200). The cleaning unit stereoscopic image 270 includes a cleaning stage stereoscopic image 271 (see fig. 12), and the cleaning stage stereoscopic image 271 is a two-dimensional stereoscopic image for stereoscopically displaying the cleaning stage 71 so that the outer shape of the cleaning stage 71 is viewed obliquely from above (in the same direction as the arrangement diagram 200). The cartridge table stereoscopic image 280 is a two-dimensional stereoscopic image for stereoscopically displaying the cartridge table 80 so that the outer shape of the cartridge table 80 is viewed from obliquely above (in the same direction as the arrangement diagram 200). The cartridge stereoscopic images 281 and 282 are two-dimensional stereoscopic images that stereoscopically display a part of the cartridges 81 and 82 so that a part of the outer shapes of the cartridges 81 and 82 are viewed from obliquely above (in the same direction as the arrangement diagram 200), respectively. All of these stereoscopic images stored in the image data storage unit 94 are stereoscopic two-dimensional stereoscopic images obtained by observing the outer shapes of the respective components of the processing apparatus 1 from the same direction as the arrangement diagram 200. In the present embodiment, the stereoscopic images stored in the image data storage unit 94 are all images obtained by the operator viewing the components of the processing apparatus 1 from a position substantially at an angle from the touch panel 60. In the present embodiment, the cleaning unit stereoscopic image 270 and the cartridge stereoscopic images 281 and 282 are the stereoscopic images in which the portions covering the upper portions of the cleaning unit 70 and the cartridges 81 and 82 are omitted, and thus the workpiece stereoscopic image 400 (see fig. 10) is easily visually recognized in the arrangement diagram 200, and the workpiece stereoscopic image 400 displays the workpiece 100 stored on the cleaning table 71 or in the cartridges 81 and 82.

These stereoscopic images stored in the image data storage unit 94 may be moved or rotated without moving the workpiece 100 in the arrangement diagram 200. For example, although the rotary table 20 is rotationally driven, the shape and position of the rotary table stereoscopic image 220 are not changed in the arrangement diagram 200. Although the grinding wheel 41 of the machining unit 40 rotates, the shape and position of the machining unit stereoscopic image 240 do not change in the layout 200. Although the cleaning table 71 of the cleaning unit 70 rotates, the shape and position of the cleaning unit stereoscopic image 270 do not change in the arrangement diagram 200.

Fig. 4 is a diagram showing an example of three-dimensional data stored in the three-dimensional data storage unit 95 of fig. 2. The three-dimensional data storage unit 95 stores three-dimensional data of each component unit of the machining device 1 and the workpiece 100, in which a stereoscopic image is not stored in the image data storage unit 94. Each of the structural units and the workpiece 100 stored as the three-dimensional data is selected from structural units and workpieces whose positions and outer shapes displayed in the layout 200 are changed by moving, rotating, or the like during a series of processing of the workpiece 100. Specifically, as shown in fig. 4, the three-dimensional data storage unit 95 stores the holding table three-dimensional data 310, the transfer arm three-dimensional data 351, 352, and 353, and the workpiece three-dimensional data 300. The holding table three-dimensional data 310 is data showing the outer shape of the holding table 10 in three dimensions. The transfer arm three-dimensional data 351, 352, 353 are data showing the outer shapes of the transfer arms 51, 52, 53 in three dimensions, respectively. The three-dimensional workpiece data 300 is data showing the outer shape of the workpiece 100 in three dimensions. The three-dimensional data stored in the three-dimensional data storage unit 95 is, for example, data in which each component is represented by three-dimensional CAD (Computer-Aided Design). The stereoscopic image generated from the three-dimensional data stored in the three-dimensional data storage unit 95 can be moved or rotated in the arrangement diagram 200 according to the movement of each component and the workpiece 100. In the present embodiment, the three-dimensional data 351, 352, 353 of the transfer arms can perform processing for changing the shape in the data according to the rotational movement of each of the arms constituting the transfer arms 51, 52, 53. These three-dimensional data stored in the three-dimensional data storage unit 95 are stored in the three-dimensional data storage unit 95 in advance by an operator or manager of the machining apparatus 1.

Fig. 5 is a diagram showing an example of layout coordinate data 501 stored in the layout setting storage unit 96 of fig. 2. The layout setting storage unit 96 stores information indicating the positions of the stereoscopic images of the components of the machining apparatus 1 in the layout 200, which is determined based on the layout of the components in the machining apparatus 1 when viewed from obliquely above (in the same direction as the layout 200). Specifically, as shown in fig. 5, the layout setting storage unit 96 associates and stores the in-layout coordinates of the stereoscopic images 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, and 282 and the stereoscopic images 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, and 282 representing the components of the machining apparatus 1 in a one-to-one relationship as layout coordinate data 501. Here, the in-arrangement-diagram coordinates of the stereoscopic images 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, 282 are coordinates in the arrangement diagram 200 in which the positions where the stereoscopic images 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, 282 are arranged are represented by a coordinate system set in the arrangement diagram 200, and for example, in a coordinate system in which an arbitrary position of the center or four corners of the arrangement diagram 200 is an origin, an arbitrary position of the center or four corners of the stereoscopic images 202, 210, 220, 230, 240, 251, 252, 253, 270, 280, 281, 282 arranged in the arrangement diagram 200 is represented by X coordinates and Y coordinates defined by pixel units. The X-coordinate of the in-map coordinate represents a position in the left-right direction of the map 200, and the Y-coordinate of the in-map coordinate represents a position in the up-down direction of the map 200. The layout coordinate data 501 is stored in the layout setting storage unit 96 by an operator or manager of the machining apparatus 1 in advance.

In the present embodiment, the respective constituent units and the workpiece 100 are in a positional relationship of overlapping when viewed from the upper surface of the processing apparatus 1 by the movement of the holding table 10 and the movement of the conveying arms 51, 52, and 53 by the rotational driving of the turn table 20. Therefore, the layout coordinate data 501 sets correction for the in-layout coordinates of the stereoscopic image of the workpiece 100 and each of the constituent elements in the superimposed positional relationship, the correction being performed so that the Y coordinates indicating the vertical direction are spaced apart by an interval.

In the present embodiment, the layout coordinate data 501 is corrected, for example, as follows: the Y coordinate of the in-layout coordinates of the transfer arm three-dimensional image 251 is added 3 times the predetermined value, the Y coordinate of the in-layout coordinates of the 2 nd transfer arm three-dimensional image 252 is added 2 times the predetermined value, the Y coordinate of the in-layout coordinates of the 3 rd transfer arm three-dimensional image 253 and the processing unit three-dimensional image 240 is added a predetermined value, and the Y coordinate of the in-layout coordinates of the holding stage three-dimensional image 210, the rotating stage three-dimensional image 220, the temporary stage three-dimensional image 230 and the cleaning unit three-dimensional image 270 is subtracted by the predetermined value. Thus, in the layout diagram 200, the layout coordinate data 501 is corrected to enlarge the interval in the vertical direction at each position where the transfer arm three-dimensional images 251, 252, and 253 are arranged. In addition, in the arrangement diagram 200, the layout coordinate data 501 sets a correction for expanding the passing area of the object three-dimensional image 400 between the transfer arm three-dimensional images 251, 252, and 253 and the processing unit three-dimensional image 240 and the holding table three-dimensional image 210, the temporary stage three-dimensional image 230, and the cleaning unit three-dimensional image 270 in the vertical direction of the coordinates in the arrangement diagram.

Fig. 6 is a diagram showing an example of layout stacking order data 502 stored in the layout setting storage unit 96 of fig. 2. The layout setting storage unit 96 stores an image stacking order in which the stereoscopic images 210, 220, 240, and 400 of the components 10, 20, and 40 of the processing apparatus 1 and the processed object 100 are stacked when the stereoscopic images 210, 220, 240, and 400 are arranged in the arrangement diagram 200. Specifically, as shown in fig. 6, the layout setting storage unit 96 stores layout stacking order data 502, and the layout stacking order data 502 associates the machining unit three-dimensional image 240, the workpiece three-dimensional image 400, the holding table three-dimensional image 210, and the rotating table three-dimensional image 220 stacked near the position where the machining unit three-dimensional image 240 is disposed, with the image stacking order of the three-dimensional images 240, 400, 210, and 220.

Although not shown, the layout stacking order data 502 of the layout setting storage unit 96 associates the conveying arm three-dimensional images 251, 252, and 253, the workpiece three-dimensional image 400, the holding table three-dimensional image 210, the rotating table three-dimensional image 220, the pause table three-dimensional image 230, and the cleaning unit three-dimensional image 270 with the image stacking order of the three-dimensional images 251, 252, 253, 400, 210, 220, 230, and 270, one for one.

In the example shown in fig. 6, the layout stacking order data 502 is set to: the stereoscopic image with the smaller number in the image stacking order is stacked at a position on the front side in the layout 200 of the stereoscopic image with the larger number in the image stacking order. The layout stacking order data 502 is stored in the layout setting storage unit 96 by an operator or manager of the processing apparatus 1 in advance.

The layout stacking order data is set based on the appearance of the machining apparatus 1 when actually viewed obliquely: the 1 st transfer arm three-dimensional image 251 is stacked at a position closer to the front side than the 2 nd transfer arm three-dimensional image 252, and the 2 nd transfer arm three-dimensional image 252 is stacked at a position closer to the front side than the 3 rd transfer arm three-dimensional image 253. In the present embodiment, the 3 rd transfer arm three-dimensional image 253 and the 1 st transfer arm three-dimensional image 251 are stacked on each other in the arrangement diagram 200 only when the 3 rd transfer arm 53 extends toward the transfer stage 30, and the 3 rd transfer arm three-dimensional image 253 and the 2 nd transfer arm three-dimensional image 252 are stacked on each other in the arrangement diagram 200 only when the 3 rd transfer arm 53 extends toward the cleaning unit 70.

Fig. 7 is a diagram showing an example of the movement history data 600 stored in the movement history storage unit 97 of fig. 2. As shown in fig. 7, the movement history storage unit 97 records the number of the steps of the slot for storing each workpiece 100 before machining and the movement history (movement completion status) of each workpiece 100 as movement history data 600 in association with each workpiece 100. The movement history storage unit 97 records movement history data 600 for each of the cartridges 81 and 82. In the example shown in fig. 7, the movement history data 600 records whether or not the movement processing of the workpiece 100 in the processing apparatus 1 for performing the fully automatic processing is completed for each workpiece 100, but the present invention is not limited to this, and the items and the sequence of the movement history of each workpiece 100 may be different for each workpiece 100 when the processing apparatus 1 is a manual machine or the like.

In the example shown in fig. 7, the movement history data 600 indicates the following case: the workpiece 100 stored in the slot of the number "1" of the slot stages before the machining is already moved on the moving path of all the workpieces 100 and is already stored in the same slot again, the workpiece 100 stored in the slot of the number "2" of the slot stages before the machining is already moved substantially on the moving path of the workpiece 100 and is just to be stored in the same slot again by the 3 rd transport arm 53, the workpiece 100 stored in the slot of the number "3" of the slot stages before the machining is held by the holding table 10 which holds the workpiece 100 by suction is positioned at the machining position and is in the machining process, the workpiece 100 stored in the slot of the number "4" of the slot stages before the machining is held by suction is positioned at the carrying-in and carrying-out position and waits for the machining process, the workpiece 100 stored in the slot with the number "5" of the slot stages before the machining is already conveyed to the temporary placement table 30, and none of the workpieces 100 stored in the slots with the number "6" of the slot stages and thereafter is unloaded.

The movement history storage unit 97 records and updates the movement history data 600 in real time every time the actual position and movement of each workpiece 100 are recognized, based on the detection results of the sensors provided in each component unit obtained in real time. When the detection signal of the workpiece 100 from the sensor of the structural unit before the movement of the workpiece 100 disappears and it is recognized that the detection signal of the workpiece 100 from the sensor of the structural unit at the movement destination of the workpiece 100 occurs, the movement history storage unit 97 recognizes that the workpiece 100 has been transported from the structural unit before the movement to the structural unit at the movement destination, and records and updates the situation in the movement history data 600. The movement history storage unit 97 recognizes that the workpiece 100 is conveyed (moved) based on the detection signal of the workpiece 100 from the sensor of the conveying arm 51, 52, 53, and records and updates the result in the movement history data 600.

In addition to the above, the storage 91 stores information such as processing conditions necessary for processing the workpiece 100 by the processing means 40. The information such as the machining conditions is stored in the storage unit 91 in advance by an operator or manager of the machining apparatus 1.

The Processing Unit 92 includes an arithmetic Processing device such as a CPU (Central Processing Unit) microprocessor, a microcomputer, a DSP (Digital Signal Processor), a system LSI (Large Scale Integration), or other Processor. The processor of the processing unit 92 executes the program loaded on the RAM of the storage unit 91. This realizes the functions of various processes and the like executed by the processing apparatus 1. Among the programs loaded on the RAM included in the storage unit 91 and executed by the processor included in the processing unit 92, there are a program for displaying each stereoscopic image in a layered manner, a program for generating or displaying a stereoscopic image by rotating three-dimensional data, a program for displaying three-dimensional data while being fixed at a predetermined angle and for moving the display in parallel, and the like. Examples of the functions of various processes and the like executed by the processing device 1 include a function of processing the workpiece 100 by the processing unit 40, and a function of generating and changing the layout 200 for realizing the display function of the display 61.

The processing unit 92 operates according to a program stored in the storage unit 91, and executes various processes (a machining process, a process of creating the layout diagram 200, a process of changing the layout diagram 200, and the like) of the machining apparatus 1 described below. As shown in fig. 2, the processing unit 92 of the embodiment includes a processing unit 98 and a display unit 99. The functions of the processing unit 92 and the functions of the processing unit 98 and the display processing unit 99 are realized by the arithmetic processing unit executing a program stored in the storage device of the storage unit 91. The processing unit 98 controls each component of the processing apparatus 1 based on information such as processing conditions stored in the storage unit 91, and executes processing of the workpiece 100 by the processing unit 40.

Next, in the present specification, an example of the operation of the machining device 1 according to the embodiment will be described with reference to the drawings. For example, when an input indicating that the workpiece 100 stored in the cassettes 81 and 82 is to be fully automatically processed by the operator is received by the input unit 62, the processing apparatus 1 automatically performs a series of processing processes described below by the processing unit 98. First, the machining device 1 carries out one sheet of the workpiece 100 before machining stored in the cassettes 81 and 82 by the 3 rd conveying arm 53 and conveys the workpiece to the temporary placement table 30, performs center alignment of the workpiece 100 conveyed by the 3 rd conveying arm 53 by the temporary placement table 30, and carries the workpiece 100 on the temporary placement table 30 subjected to the center alignment to the holding table 10 located at the carrying-in and carrying-out position by the 1 st conveying arm 51. Next, the machining device 1 moves the holding table 10 that holds the workpiece 100 before machining by suction from the carrying in/out position to the machining position by the rotational drive of the rotating table 20, and performs grinding of the workpiece 100 on the holding table 10 at the machining position by the machining unit 40. In the machining apparatus 1, during or after grinding by the machining means 40, the grinding amount of the workpiece 100 is detected by the grinding amount detection means 45. When the grinding of the workpiece 100 is completed, the machining apparatus 1 moves the holding table 10 holding the ground workpiece 100 from the machining position to the carrying-in and carrying-out position by the rotational driving of the rotary table 20, carries out the ground workpiece 100 on the holding table 10 at the carrying-in and carrying-out position onto the cleaning table 71 of the cleaning unit 70 by the 2 nd conveying arm 52, cleans the ground workpiece 100 on the cleaning table 71 by the cleaning unit 70, and stores the workpiece 100 on the cleaned cleaning table 71 in the cassettes 81 and 82 by the 3 rd conveying arm 53. In this way, the machining apparatus 1 automatically performs a series of machining processes for one workpiece 100 as follows: the processing process is performed from the unloading of the workpiece 100 before processing from the cassettes 81 and 82, the processing of the workpiece 100, and the loading of the processed workpiece 100 into the cassettes 81 and 82. Then, the machining device 1 automatically performs a series of machining processes for one piece of the workpiece 100 for all the workpieces 100 in the cassettes 81 and 82 in the order of the number of slots in which the workpieces 100 are stored, one by one, thereby completing the fully automatic machining of all the workpieces 100 stored in the cassettes 81 and 82. The processing apparatus 1 is not limited to the embodiment for performing the fully automatic processing, and may be an embodiment for performing each processing by receiving an input by an operator through the input unit 62 for each processing performed on each workpiece 100.

Next, in the present specification, a description will be given of processing performed by the display processing unit 99 in the processing device 1 according to the embodiment before the display 61 displays the layout diagram 200 and the storage state diagram 201, with reference to the drawings. Fig. 8, 9, 10, and 11 are diagrams illustrating an example of processing by the display processing unit 99 of fig. 2. Fig. 12 is a diagram showing an example of a layout 200 displayed on the display 61 of the processing apparatus 1 shown in fig. 1. When the input unit 62 of the processing apparatus 1 receives an input intended for performing the full-automatic processing of the workpiece 100 or an input intended for performing each process by the operator, the display processing unit 99 starts generating the arrangement diagram 200 as shown in fig. 12.

As shown in fig. 8, the display processing unit 99 generates the holding table stereoscopic image 210 from the holding table three-dimensional data 310. The holding table stereoscopic image 210 is a stereoscopic two-dimensional stereoscopic image in which the holding table 10 is stereoscopically displayed so that the outer shape of the holding table 10 is viewed from obliquely above (in the same direction as the arrangement diagram 200), and is a stereoscopic two-dimensional stereoscopic image viewed from the same direction as the stereoscopic image in which each component is displayed. In the present embodiment, the display processing unit 99 generates the holding table stereoscopic image 210 for each of the two holding tables 10. The display processing unit 99 calculates the position of each holding table 10 in the processing apparatus 1 at the time of starting to generate the arrangement diagram 200, based on the information of the rotation angle of the rotating table 20 at the time of starting to generate the arrangement diagram 200. The display processing unit 99 calculates the in-layout coordinates 510 as the arrangement position of the holding table stereoscopic image 210 on the arrangement diagram 200, which correspond to the position in the processing apparatus 1 of each holding table 10 at the time of starting to generate the arrangement diagram 200, based on the information of the position in the processing apparatus 1 of each holding table 10 at the time of starting to generate the arrangement diagram 200, the information of the in-layout coordinates of the holding table stereoscopic image 210 at the carrying-in/out position and the processing position included in the layout coordinate data 501, and the information of the in-layout coordinates of the swivel table stereoscopic image 220.

As shown in fig. 9, the display processing unit 99 generates the transport arm three-dimensional images 251, 252, and 253 based on the transport arm three-dimensional data 351, 352, and 353 and the drive information of the transport arms 51, 52, and 53 at the start of generating the layout diagram 200. The display processing unit 99 generates the transport arm three-dimensional images 251, 252, and 253 by deforming the transport arm three-dimensional data 351, 352, and 353 based on the drive information of the transport arms 51, 52, and 53. For example, when the transfer arms 51, 52, 53 are inverted, inverted transfer arm stereoscopic images 251, 252, 253 are generated. The transfer arm three-dimensional images 251, 252, and 253 are three-dimensional images obtained by three-dimensionally displaying the transfer arms 51, 52, and 53 so that the outer shapes of the transfer arms 51, 52, and 53 are viewed from obliquely above (in the same direction as the arrangement diagram 200), and are three-dimensional two-dimensional three-dimensional images obtained by viewing the three-dimensional images of the respective components from the same direction as the direction in which the three-dimensional images are displayed.

Further, when the layout diagram 200 is generated based on the input unit 62 of the processing apparatus 1 receiving the input indicating the execution of the fully automatic processing of the objects 100 by the operator, the display processing unit 99 acquires the positional information of each object 100 indicating that all the objects 100 are accommodated in the cassettes 81 and 82 when the generation of the layout diagram 200 is started based on the reception of the input indicating the execution of the fully automatic processing. The display processing unit 99 acquires attitude information of each workpiece 100 when stored in the cassettes 81 and 82. Here, in the present embodiment, the posture information of the workpiece 100 is, for example, information of an inclination angle of the workpiece 100 with respect to the horizontal direction. Then, the display processing unit 99 generates a workpiece three-dimensional image 400 for each workpiece 100 based on the workpiece three-dimensional data 300 and the posture information of each workpiece 100. The workpiece three-dimensional image 400 is a three-dimensional image in which the workpiece 100 is stereoscopically displayed so that the outer shape of the workpiece 100 is viewed from obliquely above (in the same direction as the arrangement diagram 200), and is a three-dimensional two-dimensional three-dimensional image viewed from the same direction as the three-dimensional image in which the components are displayed. In the present embodiment, the display processing unit 99 generates the workpiece three-dimensional image 400 by displaying the number of the slot steps associated with each workpiece 100 so that the workpiece three-dimensional image can be identified by the number of the slot steps in which each workpiece 100 is accommodated before machining.

Further, when the layout diagram 200 is generated based on the input unit 62 of the processing apparatus 1 receiving an input intended to perform the fully automatic processing of the workpiece 100 by the operator, the display processing unit 99 calculates a position on the layout diagram 200 corresponding to the position of the workpiece 100 when stored in the cassettes 81 and 82 based on the information of the in-layout-diagram coordinates of the cassette stereoscopic images 281 and 282 included in the layout coordinate data 501, and sets the calculated position on the layout diagram 200 as the arrangement position (in-layout-diagram coordinates 530) of each workpiece stereoscopic image 400 on the layout diagram 200 when the generation of the layout diagram 200 is started, as shown in fig. 10. The display processing unit 99 calculates the position on the layout 200 of each of the three-dimensional images of the object 400 superimposed on the bottom plate portion of the three-dimensional images of the box 281 and 282 in the order from the larger slot level to the smaller slot level, for example, by adding the product of a predetermined value and the stacking order of the three-dimensional images of the object 400 counted from the lower side to the Y coordinate of the bottom plate portion of the three-dimensional images of the box 281 and 282, and calculates the calculated value as the in-layout coordinate 530.

When the arrangement diagram 200 is generated in response to the reception of the input to perform each process, the display processing unit 99 specifies the component unit that actually holds the workpiece 100 at the start of the generation of the arrangement diagram 200 for each workpiece 100, based on the detection result of the sensor provided in each component unit at the start of the generation of the arrangement diagram 200 or the movement history data 600 at the start of the generation of the arrangement diagram 200, and acquires the posture information of the workpiece 100 held by the component unit. When the constituent elements for holding the workpiece 100 are the conveying arms 51, 52, and 53, the display processing unit 99 further acquires the posture information of the workpiece 100 held by the conveying arms 51, 52, and 53 based on the drive information of the conveying arms 51, 52, and 53. Then, the display processing unit 99 generates a workpiece three-dimensional image 400 for each workpiece 100 based on the workpiece three-dimensional data 300 and the posture information of each workpiece 100. When the respective workpieces 100 are inverted as the transport arms 51, 52, 53 are inverted, the display processing unit 99 rotates the workpiece three-dimensional data 300 based on the posture information to generate the workpiece three-dimensional image 400.

Further, when the layout diagram 200 is generated in response to the reception of the input to perform each process, the display processing unit 99 calculates the position on the layout diagram 200 corresponding to the position of the workpiece 100 when held by the constituent elements, based on the information on the in-layout coordinates of each constituent element included in the layout coordinate data 501, and sets the calculated position on the layout diagram 200 as the in-layout coordinates 530 when the generation of the layout diagram 200 is started, as shown in fig. 10. Specifically, when the component unit that actually holds the workpiece 100 is any one of the holding table 10, the temporary stage 30, and the cleaning table 71 that holds the workpiece 100 at the upper side, the display processing unit 99 calculates the position on the arrangement diagram 200 superimposed on the holding region portion of any one of the holding table stereoscopic image 210, the temporary stage stereoscopic image 230, and the cleaning table stereoscopic image 271 using a value obtained by adding a predetermined value to the Y coordinate of the in-arrangement-diagram coordinate of the holding region portion of any one of the holding table stereoscopic image 210, the temporary stage stereoscopic image 230, and the cleaning table stereoscopic image 271, and calculates the calculated value as the in-arrangement-diagram coordinate 530. In the case where the constituent elements that actually hold the workpiece 100 are the transport arms 51, 52, and 53 that hold the workpiece 100 therebelow, the display processing unit 99 calculates the positions on the layout 200 superimposed below the holding area portions of the transport arm three-dimensional images 251, 252, and 253 by subtracting a predetermined value from the Y-coordinate of the in-layout coordinates of the holding area portions of the transport arm three-dimensional images 251, 252, and 253, and calculates the calculated values as the in-layout coordinates 530.

In the present embodiment, the display processing unit 99 calculates in-layout coordinates 530 of the three-dimensional object image 400 based on the corrected layout coordinate data 501 set in the layout 200 so that the passing area of the three-dimensional object image 400 is expanded in the vertical direction. Therefore, in the arrangement diagram 200, the display processing unit 99 can arrange the three-dimensional images of the components that display the positional relationship of overlapping with the workpiece 100 when viewed from the upper surface of the processing device 1, at intervals in the vertical direction with respect to the workpiece three-dimensional image 400 that displays the workpiece 100.

After performing the generation processing of each stereoscopic image and the calculation processing of the in-map coordinates shown in fig. 8 to 10, the display processing unit 99 generates the map 200 and the storage state map 201 as shown in fig. 12 from each stereoscopic image, the layout coordinate data 501, the layout stacking order data 502, the holding table stereoscopic image 210, the in-map coordinates 510 of the holding table stereoscopic image 210, the transfer arm stereoscopic images 251, 252, and 253, the workpiece stereoscopic images 400 for all the workpieces 100, and the in-map coordinates 530 of each workpiece stereoscopic image 400 stored in the image data storage unit 94, and displays them on the display 61, as shown in fig. 11.

Specifically, first, the display processing unit 99 arranges the stereoscopic images stored in the image data storage unit 94 on the basis of the layout coordinate data 501 and the layout stacking order data 502, and generates a basic portion of the arrangement diagram 200. Then, the display processing unit 99 arranges the holding table three-dimensional image 210 on the basis of the in-layout coordinates 510 and the layout stacking order data 502 of the holding table three-dimensional image 210 in the basic portion of the layout 200, arranges the transfer arm three-dimensional images 251, 252, and 253 on the basis of the layout coordinate data 501 and the layout stacking order data 502 in the basic portion of the layout 200, and arranges the object three-dimensional images 400 on the basis of the in-layout coordinates 530 and the layout stacking order data 502 in each object three-dimensional image 400 in the basic portion of the layout 200, thereby generating the layout 200. By generating the arrangement diagram 200 in this way, the arrangement diagram 200 is a diagram in which the entire processing device 1 in which the respective components are arranged is viewed from obliquely above, and is a diagram in which the workpiece 100 viewed from obliquely above is displayed at a position equivalent to the actual position on the arrangement diagram 200. The display processing unit 99 may generate the basic portion of the arrangement diagram 200 before or in synchronization with the generation processing of the stereoscopic images and the calculation processing of the coordinates in the arrangement diagram shown in fig. 8 to 10.

Next, the display processing unit 99 extracts the three-dimensional images 400 of the objects stacked on the cassette three-dimensional images 281 and 282, that is, the three-dimensional images 400 of the objects 100 stored in the cassettes 81 and 82, based on the in-arrangement-diagram coordinates 530 of the three-dimensional images 400 of the objects, and generates the storage state diagram 201 in which the extracted three-dimensional images 400 of the objects are arranged at intervals in the vertical direction in the order of the number of slots of the cassettes 81 and 82, unlike the arrangement diagram 200.

As shown in fig. 12, the display processing unit 99 displays a display screen on which the generated layout diagram 200 and the storage state diagram 201 are arranged on the display 61.

Next, in the present specification, the processing after the display processing unit 99 causes the display 61 to display the arrangement diagram 200 and the storage state diagram 201 in the processing apparatus 1 according to the embodiment will be described with reference to the drawings. Fig. 13 and 14 are diagrams illustrating an example of processing performed by the display processing unit 99 of fig. 2.

As shown in fig. 8, the display processing unit 99 detects information of the rotation angle of the rotating table 20 every time corresponding to the actual movement of the holding table 10, newly acquires the actual position in the machining apparatus 1 of each holding table 10 from the detected rotation angle of the rotating table 20, newly calculates the in-layout coordinates 510 of the holding table stereoscopic image 210 from the newly acquired actual position in the machining apparatus 1 of each holding table 10, and repeatedly executes the movement processing for moving the holding table stereoscopic image 210 from the already displayed position to the newly calculated in-layout coordinates 510 in the layout 200. In this movement processing, the display processing unit 99 moves the holding table stereoscopic image 210 at a predetermined speed along the movement trajectory of the holding table stereoscopic image 210 in the arrangement diagram 200 calculated from the actual movement trajectory of the holding table 10 known in advance.

As shown in fig. 13, the display processing unit 99 detects the drive information of the actual transport arms 51, 52, 53 each time corresponding to the rotational movement of each of the arms constituting the actual transport arms 51, 52, 53, generates the transport arm three-dimensional images 251, 252, 253 by changing the shapes of the transport arm three-dimensional data 351, 352, 353 based on the detected drive information of the actual transport arms 51, 52, 53, and changes the transport arm three-dimensional images 251, 252, 253 from the transport arm three-dimensional images 251, 252, 253 already displayed to the newly generated transport arm three-dimensional images 251, 252, 253 in the layout 200, and reflects the newly generated transport arm three-dimensional images 251, 252, 253 on the layout 200, thereby repeatedly executing the change processing for changing the transport arm three-dimensional images 251, 252, 253. In this change processing, the display processing unit 99 changes the transfer arm three-dimensional images 251, 252, and 253 at a predetermined speed in accordance with the change pattern of the shapes of the transfer arm three-dimensional images 251, 252, and 253 in the layout 200 calculated from the actual drive patterns of the respective arms of the transfer arms 51, 52, and 53 known in advance.

As shown in fig. 14, the display processing unit 99 specifies a component unit that actually holds the workpiece 100, based on the detection results of the sensors provided in the component units or the updated movement history data 600, acquires the posture information of the workpiece 100 held by the component unit, rotates the three-dimensional workpiece data 300 based on the acquired posture information of the workpiece 100 to generate the three-dimensional workpiece image 400, and repeatedly executes the change processing for changing the three-dimensional workpiece image 400 by changing the displayed three-dimensional workpiece image 400 to the newly generated three-dimensional workpiece image 400 in the arrangement diagram 200 and reflecting the newly generated three-dimensional workpiece image 400 on the arrangement diagram 200, in accordance with the actual tilt or inversion of the workpiece 100.

As shown in fig. 14, the display processing unit 99 specifies the constituent elements that actually hold the workpiece 100 for each workpiece 100 based on the detection results of the sensors provided in the constituent elements or the updated movement history data 600 in accordance with the actual movement of the workpiece 100, recalculates the in-layout coordinates 530 of the workpiece stereoscopic image 400 based on the information of the newly specified constituent elements that actually hold the workpiece 100, and repeatedly executes the movement processing for moving the workpiece stereoscopic image 400 from the already displayed position to the recalculated in-layout coordinates 530 in the layout 200 and the storage state diagram 201. In this movement processing, the display processing unit 99 moves each of the three-dimensional object images 400 at a predetermined speed along the movement trajectory of the three-dimensional object image 400 in the arrangement diagram 200 calculated from the actual movement trajectory of the object 100 known in advance. Further, when the movement trajectory of the three-dimensional workpiece image 400 in the arrangement diagram 200 becomes complicated due to the complexity of the actual movement trajectory of the workpiece 100, the display processing unit 99 may linearly approximate the movement trajectory of the three-dimensional workpiece image 400 and linearly move the three-dimensional workpiece image 400 from the already displayed position to the newly calculated in-arrangement-diagram coordinates 530 at a predetermined speed. When the actual workpiece 100 moves without tilting or reversing, the display processing unit 99 may display the three-dimensional workpiece data 300 as the three-dimensional workpiece image 400 in the arrangement diagram 200 in a state fixed at the angle, and move the three-dimensional workpiece image 400 to execute the movement processing.

By executing the change processing and the movement processing described above with reference to fig. 8, 13, and 14, the display processing unit 99 can reflect and display the actual driving and movement of the holding table 10, the conveying arms 51, 52, and 53, and the workpiece 100 in real time in the arrangement diagram 200 and the storage state diagram 201 in a smaller number of processes.

In this way, the display 61 displays the three-dimensional workpiece image 400 at the same position on the layout 200 of the image of the entire machining apparatus 1 as the position of the workpiece 100 on the actual machining apparatus 1 during machining by the image data storage unit 94, the three-dimensional data storage unit 95, the layout setting storage unit 96, the movement history storage unit 97, and the display processing unit 99, and changes the position of the three-dimensional workpiece image 400 on the layout 200 of the image of the entire machining apparatus 1 to the same position as the position of the workpiece 100 on the actual machining apparatus 1 as the workpiece 100 moves. Similarly, the display 61 displays the positions on the layout 200 of the stereoscopic images showing at least two components in the overlapping positional relationship when viewed from the upper surface (upper side) of the processing apparatus 1 at intervals in the vertical direction from the actual position, through the image data storage unit 94, the three-dimensional data storage unit 95, the layout setting storage unit 96, the movement history storage unit 97, and the display processing unit 99.

In the machining device 1 according to embodiment 1 having the above-described configuration, the display 61 stereoscopically displays the arrangement diagram 200 as viewed from the oblique direction of the machining device 1, and the arrangement diagram 200 displays the legends of the respective constituent elements of the machining device 1 and the legend of the workpiece 100 being processed by the machining device 1 in accordance with the arrangement in the actual machining device 1, so that even if the respective constituent elements of the machining device 1 and the workpiece 100 are actually superimposed in the vertical direction, the display 61 displays the respective constituent elements and the respective stereoscopic images of the workpiece 100 in a vertically offset manner, and therefore, there is an advantageous effect that the state in the machining device 1 can be accurately grasped by the display of the display 61.

In the processing apparatus 1 according to embodiment 1, at least two components of the processing apparatus 1 that are in an overlapping positional relationship when viewed from the upper surface of the processing apparatus 1 while moving or at a fixed position are arranged and displayed on the display 61 with a gap in the vertical direction in the arrangement diagram 200, and therefore, even if the components of the processing apparatus 1 or the workpiece 100 actually overlap in the vertical direction, there is an advantageous effect that the state in the processing apparatus 1 can be accurately grasped by the display of the display 61.

The present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the scope of the present invention. In the above embodiment, the machining apparatus 1 provided with the display 61 having the display function of displaying the state of the machining apparatus 1 is a grinding apparatus that grinds the workpiece 100, but the present invention is not limited to the grinding apparatus, and may be a cutting apparatus that cuts the workpiece 100, a polishing apparatus that polishes the workpiece 100, a laser machining apparatus that performs laser machining on the workpiece 100, and a tape spreading apparatus that spreads a tape stuck to the workpiece 100. In addition, when the display 61 is provided in the tape expanding device, since the holding table for holding the workpiece 100 and the tape expanding unit are vertically overlapped and moved up and down relative to each other, the stereoscopic image for displaying the holding table and the stereoscopic image for displaying the tape expanding unit are arranged and displayed in the display 61 with a vertical gap therebetween, as in the above-described embodiment. In this case, the ultraviolet irradiation unit is disposed below the cassette so as to overlap the cassette, and is provided to be movable up and down together with the cassette by a cassette lifter.