阅读说明：本技术 一种抛光机的高精度的加压装置 (High-precision pressurizing device of polishing machine ) 是由 王永成 于 2021-08-24 设计创作，主要内容包括：本发明公开了一种抛光机的高精度的加压装置,包括伺服电机、丝杆、传动装置、弹簧、传感器和施压单元,伺服电机底部输出端与丝杆进行传动连接,丝杆上安装有传动装置,传动装置的侧端上安装有弹簧,弹簧上安装有传感器,传动装置与施压单元进行传动连接。本发明可以实现0压力接触以及精准的压力控制,并且设置的传感器可以检测弹簧的形变而产生的压力变化,电机驱动丝杠压缩弹簧可以产生微量的形变,从而实现精准的压力控制。(The invention discloses a high-precision pressurizing device of a polishing machine, which comprises a servo motor, a screw rod, a transmission device, a spring, a sensor and a pressurizing unit, wherein the output end of the bottom of the servo motor is in transmission connection with the screw rod, the transmission device is arranged on the screw rod, the spring is arranged on the side end of the transmission device, the sensor is arranged on the spring, and the transmission device is in transmission connection with the pressurizing unit. The invention can realize 0 pressure contact and accurate pressure control, the arranged sensor can detect the pressure change generated by the deformation of the spring, and the motor drives the lead screw to compress the spring to generate micro deformation, thereby realizing accurate pressure control.)

1. The utility model provides a pressure device of high accuracy of burnishing machine which characterized in that: including servo motor (1), lead screw (2), transmission (3), spring (4), sensor (5) and the unit (6) of exerting pressure, servo motor (1) bottom output is connected with lead screw (2) transmission, install transmission (3) on lead screw (2), install spring (4) on the side of transmission (3), install sensor (5) on spring (4), transmission (3) carry out the transmission with the unit (6) of exerting pressure and are connected.

2. The high precision pressurizing device of the polishing machine according to claim 1, wherein: the springs (4) are mounted in two.

3. The high precision pressurizing device of the polishing machine according to claim 2, wherein: the two springs (4) are arranged in parallel and symmetrical up and down and are respectively arranged at the upper end and the lower end of the transmission device (3).

4. The high precision pressurizing device of the polishing machine according to claim 1, wherein: the number of the sensors (5) is two.

5. The high precision pressurizing device of the polishing machine according to claim 4, wherein: the two sensors (5) are arranged in an up-and-down symmetrical manner, are arranged corresponding to the two springs (4) and are respectively and correspondingly arranged on the two springs (4).

6. The high precision pressurizing device of the polishing machine according to claim 1, wherein: the transmission device (3) is in transmission connection with the screw rod (2).

7. The high precision pressurizing device of the polishing machine according to claim 1, wherein: the pressing unit (6) and the transmission device (3) run synchronously.

Technical Field

The invention relates to the related field of polishing machines, in particular to a high-precision pressurizing device of a polishing machine.

Background

The prior art adopts servo motor's transmission mode to go on, because there is frictional force between the motion subassembly, frictional force needs to be overcome earlier to atmospheric pressure for the precision through the change of atmospheric pressure change pressure is not high.

When a soft and brittle or thinner semiconductor wafer is ground or polished, in order to reduce the breakage rate, a small pressure is needed, so that the precision of a pressurizing device with the small pressure is not high, and the yield of products is influenced.

Disclosure of Invention

Therefore, in order to solve the above-mentioned disadvantages, the present invention provides a high-precision pressing device of a polishing machine.

The invention is realized in such a way that a high-precision pressurizing device of a polishing machine is constructed, the device comprises a servo motor, a screw rod, a transmission device, a spring, a sensor and a pressurizing unit, the output end of the bottom of the servo motor is in transmission connection with the screw rod, the transmission device is arranged on the screw rod, the spring is arranged on the side end of the transmission device, the sensor is arranged on the spring, and the transmission device is in transmission connection with the pressurizing unit.

Preferably, the springs are mounted in a total of two.

Preferably, the two springs are arranged in parallel and symmetrically up and down and are respectively arranged at the upper end and the lower end of the transmission device.

Preferably, a total of two sensors are provided.

Preferably, the two sensors are arranged in a vertically symmetrical manner, are arranged corresponding to the two springs, and are respectively and correspondingly arranged on the two springs.

Preferably, the transmission device is in transmission connection with the screw rod.

Preferably, the pressing unit is operated synchronously with the transmission device.

The invention has the following advantages: the invention provides a high-precision pressurizing device of a polishing machine through improvement, and compared with the same type of equipment, the high-precision pressurizing device has the following improvements:

the advantages are that: the high-precision pressurizing device of the polishing machine can realize 0-pressure contact and accurate pressure control, the arranged sensor can detect pressure change generated by the deformation of the spring, and the motor drives the lead screw to compress the spring to generate micro deformation, so that accurate pressure control is realized.

Drawings

FIG. 1 is a schematic structural view of the present invention;

fig. 2 is an enlarged schematic view of the structure at a in fig. 1 according to the present invention.

Wherein: servo motor-1, screw rod-2, transmission device-3, spring-4, sensor-5 and pressure unit-6.

Detailed Description

The present invention will be described in detail with reference to fig. 1-2, and the technical solutions in the embodiments of the present invention will be clearly and completely described, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The invention provides a high-precision pressurizing device of a polishing machine through improvement, which comprises a servo motor 1, a screw rod 2, a transmission device 3, a spring 4, a sensor 5 and a pressurizing unit 6, wherein the output end of the bottom of the servo motor 1 is in transmission connection with the screw rod 2, the transmission device 3 is installed on the screw rod 2, the spring 4 is installed on the side end of the transmission device 3, the sensor 5 is installed on the spring 4, and the transmission device 3 is in transmission connection with the pressurizing unit 6.

Further, two springs 4 are installed, and the two springs 4 are arranged in a vertically parallel and symmetrical manner, and are installed at the upper end and the lower end of the transmission device 3 respectively, and are used for acting on the upper end and the lower end of the transmission device 3 simultaneously.

Further, the sensors 5 are provided with two, the two sensors 5 are arranged in an up-and-down symmetrical manner and are arranged corresponding to the two springs 4 and are respectively and correspondingly arranged on the two springs 4, and the two sensors 5 can simultaneously detect the deformation of the two springs 4.

Furthermore, the transmission device 3 is in transmission connection with the screw rod 2, and the screw rod 2 can drive the transmission device 3.

Further, the pressing unit 6 operates synchronously with the transmission device 3, and the pressing unit 6 is driven by the transmission device 3.

The invention provides a high-precision pressurizing device of a polishing machine through improvement, and the working principle of the high-precision pressurizing device is as follows;

firstly, the output end at the bottom of a servo motor 1 is in transmission connection with a screw rod 2, and after the servo motor 1 is connected with external air pressure equipment, the servo motor controls the screw rod 2 to move;

secondly, a transmission device 3 is arranged on the screw rod 2, and the transmission device 3 is driven to move after the screw rod 2 moves;

thirdly, the upper end and the lower end of the transmission device 3 are both provided with a spring 4, and the two springs 4 in the ward area are arranged in parallel and symmetrically up and down and are used for acting on the upper end and the lower end of the transmission device 3 simultaneously;

fourthly, a sensor 5 is arranged on each of the two springs 4, and the two sensors 5 can be used for simultaneously detecting the deformation of the two springs 4;

fifthly, the driving device 3 is in driving connection with the pressing unit 6, so that the pressing unit 6 and the driving device 3 operate synchronously, and the pressing unit 6 generates accurate pressure or accurate 0 pressure.

The high-precision pressurizing device of the polishing machine is provided by improvement, so that 0 pressure contact and accurate pressure control can be realized, the arranged sensor 5 can detect pressure change generated by deformation of the spring 4, and the motor-driven lead screw 2 can compress the spring 4 to generate micro deformation, so that accurate pressure control is realized.

The basic principles and main features of the present invention and the advantages of the present invention have been shown and described, and the standard parts used in the present invention are all available on the market, the special-shaped parts can be customized according to the description and the accompanying drawings, the specific connection mode of each part adopts the conventional means of bolt and rivet, welding and the like mature in the prior art, the machinery, parts and equipment adopt the conventional type in the prior art, and the circuit connection adopts the conventional connection mode in the prior art, and the details are not described herein.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.