阅读说明：本技术 闭式静压导轨及超精密球轴承套圈磨削设备 (Closed hydrostatic guideway and ultra-precise ball bearing ring grinding equipment ) 是由 郑良钢 于 2021-08-26 设计创作，主要内容包括：本发明公开了一种闭式静压导轨及超精密球轴承套圈磨削设备,所述闭式静压导轨包括滑台和轨体；所述滑台中设有第一配合面、第二配合面、第三配合面、第四配合面、第五配合面以及第六配合面；所述第一配合面上设有第一油腔,所述第二配合面上设有第二油腔,所述第三配合面上设有第三油腔,所述第四配合面上设有第四油腔,所述第五配合面上设有第五油腔,所述第六配合面上设有第六油腔；所述滑台中还设有油路系统,所述油路系统包括左集油通道、右集油通道、连接通道、至少一个进油口、第一导油通道、第二导油通道、第三导油通道、第四导油通道、第五导油通道以及第六导油通道。本发明能够简化油路系统,使油路系统布局合理,进而能够节省加工成本。(The invention discloses a closed hydrostatic guideway and ultra-precise ball bearing ring grinding equipment, wherein the closed hydrostatic guideway comprises a sliding table and a track body; a first matching surface, a second matching surface, a third matching surface, a fourth matching surface, a fifth matching surface and a sixth matching surface are arranged in the sliding table; a first oil cavity is arranged on the first matching surface, a second oil cavity is arranged on the second matching surface, a third oil cavity is arranged on the third matching surface, a fourth oil cavity is arranged on the fourth matching surface, a fifth oil cavity is arranged on the fifth matching surface, and a sixth oil cavity is arranged on the sixth matching surface; an oil path system is further arranged in the sliding table and comprises a left oil collecting channel, a right oil collecting channel, a connecting channel, at least one oil inlet, a first oil guide channel, a second oil guide channel, a third oil guide channel, a fourth oil guide channel, a fifth oil guide channel and a sixth oil guide channel. The invention can simplify the oil circuit system, make the layout of the oil circuit system reasonable, and further save the processing cost.)

1. A closed hydrostatic guideway is characterized by comprising a sliding table (100) and a guideway body (1); wherein the content of the first and second substances,

the sliding table (100) is connected to the rail body (1) in a sliding manner along the front-back direction;

the sliding table (100) is internally provided with at least one first matching surface (2) which is in matching butt joint with the upper end surface of the left side end of the rail body (1), at least one second matching surface (3) which is in matching butt joint with the lower end surface of the left side end of the rail body (1), at least one third matching surface (4) which is in matching butt joint with the left side surface of the rail body (1), at least one fourth matching surface (5) which is in matching butt joint with the upper end surface of the right side end of the rail body (1), at least one fifth matching surface (6) which is in matching butt joint with the lower end surface of the right side end of the rail body (1) and at least one sixth matching surface (7) which is in matching butt joint with the right side surface of the rail body (1);

a first oil cavity (8) is formed in the first matching surface (2), a second oil cavity (9) is formed in the second matching surface (3), a third oil cavity (10) is formed in the third matching surface (4), a fourth oil cavity (11) is formed in the fourth matching surface (5), a fifth oil cavity (12) is formed in the fifth matching surface (6), and a sixth oil cavity (13) is formed in the sixth matching surface (7);

an oil path system is further arranged in the sliding table (100), and comprises a left oil collecting channel (14), a right oil collecting channel (15), a connecting channel (16), at least one oil inlet (17), a first oil guide channel (18) corresponding to the first oil cavity (8), a second oil guide channel (19) corresponding to the second oil cavity (9), a third oil guide channel (20) corresponding to the third oil cavity (10), a fourth oil guide channel (21) corresponding to the fourth oil cavity (11), a fifth oil guide channel (22) corresponding to the fifth oil cavity (12) and a sixth oil guide channel (23) corresponding to the sixth oil cavity (13);

at least one of the left oil collecting channel (14), the right oil collecting channel (15) and the connecting channel (16) is connected with the oil inlet (17);

one end of the connecting channel (16) is connected with the left oil collecting channel (14), and the other end of the connecting channel (16) is connected with the right oil collecting channel (15);

one end part of the first oil guide channel (18) is connected with the left oil collecting channel (14), and the other end part of the first oil guide channel (18) is connected with the corresponding first oil cavity (8);

one end part of the second oil guide channel (19) is connected with the left oil collecting channel (14), and the other end part of the second oil guide channel (19) is connected with the corresponding second oil cavity (9);

one end part of the third oil guide channel (20) is connected with the left oil collecting channel (14), and the other end part of the third oil guide channel (20) is connected with the corresponding third oil cavity (10);

one end of the fourth oil guide channel (21) is connected with the right oil collecting channel (15), and the other end of the fourth oil guide channel (21) is connected with the corresponding fourth oil cavity (11);

one end of the fifth oil guide channel (22) is connected with the right oil collecting channel (15), and the other end of the fifth oil guide channel (22) is connected with the corresponding fifth oil cavity (12);

one end of the sixth oil guide channel (23) is connected with the right oil collecting channel (15), and the other end of the sixth oil guide channel (23) is connected with the corresponding sixth oil cavity (13).

2. Closed hydrostatic guideway according to claim 1,

the left oil collecting channel (14) is arranged in the left end part of the sliding table (100) and extends along the front-back direction;

the right oil collecting channel (15) is arranged in the right end part of the sliding table (100) and extends along the front-back direction;

the connecting channel (16) extends in the transverse direction;

four oil inlets (17) are arranged;

the first oil inlet (17) is positioned at the front end part of the left side end of the sliding table (100) and is communicated with the front end part of the left oil collecting channel (14);

the second oil inlet (17) is positioned at the rear end part of the left side end of the sliding table (100) and is communicated with the rear end part of the left oil collecting channel (14);

the third oil inlet (17) is positioned at the front end part of the right side end of the sliding table (100) and is communicated with the front end part of the right oil collecting channel (15);

the fourth oil inlet (17) is located at the rear end of the right side end of the sliding table (100) and communicated with the rear end of the right oil collecting channel (15).

3. The closed hydrostatic guideway of claim 1, wherein the slide table (100) includes a main body portion (24), a left slider (25), and a right slider (26); wherein the content of the first and second substances,

the left slider (25) is connected to the left side end of the main body part (24), and the right slider (26) is connected to the right side end of the main body part (24);

the first matching surface (2), the first oil cavity (8), the fourth matching surface (5) and the fourth oil cavity (11) are all arranged on the main body part (24);

the second matching surface (3), the second oil cavity (9), the third matching surface (4) and the third oil cavity (10) are arranged on the left sliding block (25);

the fifth matching surface (6), the fifth oil cavity (12), the sixth matching surface (7) and the sixth oil cavity (13) are arranged on the right sliding block (26);

the left oil collecting channel (14), the right oil collecting channel (15), the connecting channel (16), the first oil guiding channel (18) and the fourth oil guiding channel (21) are all arranged in the main body part (24);

one part of the second oil guide channel (19) is arranged in the main body part (24), and the other part of the second oil guide channel (19) is arranged in the left sliding block (25);

a part of the third oil guide channel (20) is arranged in the main body part (24), and the other part of the third oil guide channel (20) is arranged in the left sliding block (25);

one part of the fifth oil guide channel (22) is arranged in the main body part (24), and the other part of the fifth oil guide channel (22) is arranged in the right sliding block (26);

one part of the sixth oil guide passage (23) is provided in the main body portion (24), and the other part of the sixth oil guide passage (23) is provided in the right slider (26).

4. Closed hydrostatic guideway according to claim 3,

the first oil guide channel (18) comprises a first transverse hole (27) and a first vertical hole (28); wherein the content of the first and second substances,

the first transverse hole (27) and the first vertical hole (28) are both provided in the main body portion (24);

one end part of the first transverse hole (27) is connected with the left oil collecting channel (14);

the other end of the first transverse hole (27) is connected with the upper end of the first vertical hole (28);

the lower end part of the first vertical hole (28) is connected with the corresponding first oil chamber (8);

and/or the second oil guide channel (19) comprises a second upper transverse hole (29), a second lower transverse hole (30), a second upper vertical hole (31), a second lower vertical hole (32) and a connecting hole (33); wherein the content of the first and second substances,

the second upper transverse hole (29) and the second upper vertical hole (31) are both arranged in the main body part (24);

the second lower transverse hole (30), the second lower vertical hole (32) and the connecting hole (33) are all arranged in the left sliding block (25);

the second upper transverse hole (29), the second upper vertical hole (31), the second lower vertical hole (32), the second lower transverse hole (30) and the connecting hole (33) are connected in sequence;

the second upper transverse hole (29) is also connected with the left oil collecting channel (14);

the connecting hole (33) is also connected with the corresponding second oil cavity (9);

a first sealing ring which enables the second upper vertical hole (31) and the second lower vertical hole (32) to be in sealing connection is further connected between the main body part (24) and the left sliding block (25);

and/or the third oil guiding channel (20) comprises a third upper transverse hole (34), a third lower transverse hole (35), a third upper vertical hole (36) and a third lower vertical hole (37); wherein the content of the first and second substances,

the third upper transverse hole (34) and the third upper vertical hole (36) are both disposed in the main body portion (24);

the third lower transverse hole (35) and the third lower vertical hole (37) are both arranged in the left sliding block (25);

the third upper transverse hole (34), the third upper vertical hole (36), the third lower vertical hole (37) and the third lower transverse hole (35) are connected in sequence;

the third upper transverse hole (34) is also connected with the left oil collecting channel (14);

the third lower transverse hole (35) is also connected with the corresponding third oil chamber (10);

a second sealing ring which enables the third upper vertical hole (36) and the third lower vertical hole (37) to be in sealing connection is further connected between the main body part (24) and the left sliding block (25);

and/or the fourth oil guiding channel (21) comprises a fourth transverse hole (38) and a fourth vertical hole (39); wherein the content of the first and second substances,

the fourth transverse hole (38) and the fourth vertical hole (39) are both provided in the main body portion (24);

one end part of the fourth transverse hole (38) is connected with the right oil collecting channel (15);

the other end of the fourth transverse hole (38) is connected with the upper end of the fourth vertical hole (39);

the lower end part of the fourth vertical hole (39) is connected with the corresponding fourth oil chamber (11);

and/or the fifth oil guiding channel (22) comprises a fifth upper transverse hole (40), a fifth lower transverse hole (41), a fifth upper vertical hole (42), a fifth lower vertical hole (43) and a via hole (44); wherein the content of the first and second substances,

the fifth upper transverse hole (40) and the fifth upper vertical hole (42) are both disposed in the main body portion (24);

the fifth lower transverse hole (41), the fifth lower vertical hole (43) and the via hole (44) are all arranged in the right slider (26);

the fifth upper transverse hole (40), the fifth upper vertical hole (42), the fifth lower vertical hole (43), the fifth lower transverse hole (41) and the via hole (44) are connected in sequence;

the fifth upper transverse hole (40) is also connected with the right oil collecting channel (15);

the through holes (44) are also connected with the corresponding fifth oil chambers (12);

a third sealing ring which enables the fifth upper vertical hole (42) and the fifth lower vertical hole (43) to be in sealing connection is further connected between the main body part (24) and the right sliding block (26);

and/or the sixth oil guiding channel (23) comprises a sixth upper transverse hole (45), a sixth lower transverse hole (46), a sixth upper vertical hole (47) and a sixth lower vertical hole (48); wherein the content of the first and second substances,

the sixth upper transverse hole (45) and the sixth upper vertical hole (47) are both arranged in the main body part (24);

the sixth lower transverse hole (46) and the sixth lower vertical hole (48) are both arranged in the right sliding block (26);

the sixth upper transverse hole (45), the sixth upper vertical hole (47), the sixth lower vertical hole (48) and the sixth lower transverse hole (46) are connected in sequence;

the sixth upper transverse hole (45) is also connected with the right oil collecting channel (15);

the sixth lower transverse hole (46) is also connected with the corresponding sixth oil chamber (13);

and a fourth sealing ring which enables the sixth upper vertical hole (47) and the sixth lower vertical hole (48) to be in sealing connection is further connected between the main body part (24) and the right sliding block (26).

5. The closed hydrostatic guideway according to claim 1, characterized in that a mounting channel (50) adapted to mount a linear motor (49) is further provided between the slide table (100) and the rail body (1).

6. The closed hydrostatic guideway of claim 1, further comprising a grating scale (51), the grating scale (51) comprising a scale grating and a grating reader; wherein the content of the first and second substances,

the scale grating is connected to any one of the sliding table (100) and the rail body (1);

the grating reading head is connected to the rest one of the sliding table (100) and the rail body (1) and is installed in a matched mode with the scale grating.

7. The closed hydrostatic guideway of claim 1, characterized in that a limit switch (52) adapted to limit the travel of the slide table (100) is further connected to the rail body (1).

8. Closed hydrostatic guideway according to claim 1, characterized in that a throttle (53) is provided in at least one of the first oil guide channel (18), the second oil guide channel (19), the third oil guide channel (20), the fourth oil guide channel (21), the fifth oil guide channel (22) and the sixth oil guide channel (23).

9. An ultra-precise ball bearing ring grinding device is characterized by comprising a frame (54), a workpiece electric spindle (55), a grinding wheel electric spindle (56) and at least two closed hydrostatic guide rails according to any one of claims 1-8; wherein the content of the first and second substances,

the at least two closed hydrostatic guide rails comprise an X-direction closed hydrostatic guide rail and a Y-direction closed hydrostatic guide rail;

the rail body (1) in the X-direction closed hydrostatic guide rail and the rail body (1) in the Y-direction closed hydrostatic guide rail are both connected to the frame (54);

the workpiece electric spindle (55) is connected to a sliding table (100) in the Y-direction closed hydrostatic guide rail and is connected to the rack (54) in a sliding manner along the Y direction through the Y-direction closed hydrostatic guide rail, and the workpiece electric spindle (55) is suitable for mounting a workpiece and driving the workpiece to rotate;

the grinding wheel electric spindle (56) is connected to a sliding table (100) in the X-direction closed hydrostatic guide rail and is slidably connected to the rack (54) along the X direction through the X-direction closed hydrostatic guide rail, and a grinding wheel is mounted on the grinding wheel electric spindle (56) and is suitable for driving the grinding wheel to rotate so as to grind the workpiece;

the X-direction closed hydrostatic guide rail and the Y-direction closed hydrostatic guide rail are also respectively provided with a linear motor (49), and the linear motors (49) are arranged between the sliding table (100) and the rail body (1) and are suitable for driving the sliding table (100) to slide relative to the rail body (1).

10. The ultra-precise ball bearing ring grinding apparatus according to claim 9,

the rack (54) comprises a bottom support frame and a marble table top (57), and the rail body (1) in the X-direction closed hydrostatic guideway and the rail body (1) in the Y-direction closed hydrostatic guideway are both connected to the marble table top (57);

the workpiece electric spindle (55) and the grinding wheel electric spindle (56) are both liquid static pressure electric spindles.

Technical Field

The invention relates to a closed hydrostatic guideway and ultra-precise ball bearing ring grinding equipment.

Background

At present, an ultra-precise ball bearing is a core supporting component of a high-speed machine tool spindle, an aviation gyro system, a navigation system, an aircraft engine rotor system and the like, and the processing precision of the ultra-precise ball bearing directly influences the operation precision, the working efficiency and the service life of equipment. In order to ensure the dimensional accuracy of the ultra-precise ball bearing, the machining accuracy of a grinding machine for machining the ultra-precise ball bearing must be improved, so that a static pressure guide rail is generally used in the grinding machine to replace a common linear guide rail so as to improve the accuracy of the linear motion of the grinding machine.

However, the oil circuit system in the existing hydrostatic guide rail is very complex and unreasonable in design, which results in difficult processing and high processing cost on one hand; on the other hand, the existing hydrostatic guide rail needs to be connected with a plurality of external oil conveying pipes to realize oil supply, so that the external oil conveying pipes are arranged in a complicated and disordered manner.

Disclosure of Invention

The technical problem to be solved by the invention is to overcome the defects of the prior art and provide a closed hydrostatic guide rail which can simplify an oil way system, ensure that the oil way system is reasonable in layout and further save the processing cost.

In order to solve the technical problems, the technical scheme of the invention is as follows: a closed hydrostatic guideway comprises a sliding table and a guideway body; wherein the content of the first and second substances,

the sliding table is connected to the rail body in a sliding mode along the front-back direction;

the sliding table is internally provided with at least one first matching surface which is matched and abutted with the upper end surface of the left side end of the rail body, at least one second matching surface which is matched and abutted with the lower end surface of the left side end of the rail body, at least one third matching surface which is matched and abutted with the left side surface of the rail body, at least one fourth matching surface which is matched and abutted with the upper end surface of the right side end of the rail body, at least one fifth matching surface which is matched and abutted with the lower end surface of the right side end of the rail body and at least one sixth matching surface which is matched and abutted with the right side surface of the rail body;

a first oil cavity is arranged on the first matching surface, a second oil cavity is arranged on the second matching surface, a third oil cavity is arranged on the third matching surface, a fourth oil cavity is arranged on the fourth matching surface, a fifth oil cavity is arranged on the fifth matching surface, and a sixth oil cavity is arranged on the sixth matching surface;

an oil path system is further arranged in the sliding table and comprises a left oil collecting channel, a right oil collecting channel, a connecting channel, at least one oil inlet, a first oil guide channel corresponding to the first oil cavity, a second oil guide channel corresponding to the second oil cavity, a third oil guide channel corresponding to the third oil cavity, a fourth oil guide channel corresponding to the fourth oil cavity, a fifth oil guide channel corresponding to the fifth oil cavity and a sixth oil guide channel corresponding to the sixth oil cavity;

at least one of the left oil collecting channel, the right oil collecting channel and the connecting channel is connected with the oil inlet;

one end of the connecting channel is connected with the left oil collecting channel, and the other end of the connecting channel is connected with the right oil collecting channel;

one end of the first oil guide channel is connected with the left oil collecting channel, and the other end of the first oil guide channel is connected with the corresponding first oil cavity;

one end of the second oil guide channel is connected with the left oil collecting channel, and the other end of the second oil guide channel is connected with the corresponding second oil cavity;

one end of the third oil guide channel is connected with the left oil collecting channel, and the other end of the third oil guide channel is connected with the corresponding third oil cavity;

one end of the fourth oil guide channel is connected with the right oil collecting channel, and the other end of the fourth oil guide channel is connected with the corresponding fourth oil cavity;

one end of the fifth oil guide channel is connected with the right oil collecting channel, and the other end of the fifth oil guide channel is connected with the corresponding fifth oil cavity;

one end of the sixth oil guide channel is connected with the right oil collecting channel, and the other end of the sixth oil guide channel is connected with the corresponding sixth oil cavity.

Further providing a specific arrangement mode of the left oil collecting channel and the right oil collecting channel, wherein the left oil collecting channel is arranged in the left end part of the sliding table and extends along the front-back direction;

the right oil collecting channel is arranged in the right end part of the sliding table and extends along the front-back direction;

the connecting channel extends along the transverse direction;

four oil inlets are formed;

the first oil inlet is positioned at the front end part of the left side end of the sliding table and is communicated with the front end part of the left oil collecting channel;

the second oil inlet is positioned at the rear end part of the left side end of the sliding table and is communicated with the rear end part of the left oil collecting channel;

the third oil inlet is positioned at the front end part of the right side end of the sliding table and is communicated with the front end part of the right oil collecting channel;

and the fourth oil inlet is positioned at the rear end part of the right side end of the sliding table and is communicated with the rear end part of the right oil collecting channel.

Further provides a concrete structure of the sliding table, wherein the sliding table comprises a main body part, a left sliding block and a right sliding block; wherein the content of the first and second substances,

the left sliding block is connected to the left side end of the main body part, and the right sliding block is connected to the right side end of the main body part;

the first matching surface, the first oil cavity, the fourth matching surface and the fourth oil cavity are all arranged on the main body part;

the second matching surface, the second oil cavity, the third matching surface and the third oil cavity are all arranged on the left sliding block;

the fifth matching surface, the fifth oil cavity, the sixth matching surface and the sixth oil cavity are all arranged on the right sliding block;

the left oil collecting channel, the right oil collecting channel, the connecting channel, the first oil guiding channel and the fourth oil guiding channel are all arranged in the main body part;

one part of the second oil guide channel is arranged in the main body part, and the other part of the second oil guide channel is arranged in the left sliding block;

one part of the third oil guide channel is arranged in the main body part, and the other part of the third oil guide channel is arranged in the left sliding block;

one part of the fifth oil guide channel is arranged in the main body part, and the other part of the fifth oil guide channel is arranged in the right sliding block;

one part of the sixth oil guide channel is arranged in the main body part, and the other part of the sixth oil guide channel is arranged in the right sliding block.

Further provided is a concrete structure of the first oil guide passage, which includes a first transverse hole and a first vertical hole; wherein the content of the first and second substances,

the first transverse hole and the first vertical hole are both arranged in the main body part;

one end part of the first transverse hole is connected with the left oil collecting channel;

the other end of the first transverse hole is connected with the upper end of the first vertical hole;

the lower end part of the first vertical hole is connected with the corresponding first oil cavity;

and/or the second oil guide channel comprises a second upper transverse hole, a second lower transverse hole, a second upper vertical hole, a second lower vertical hole and a connecting hole; wherein the content of the first and second substances,

the second upper transverse hole and the second upper vertical hole are both arranged in the main body part;

the second lower transverse hole, the second lower vertical hole and the connecting hole are all arranged in the left sliding block;

the second upper transverse hole, the second upper vertical hole, the second lower transverse hole and the connecting hole are sequentially connected;

the second upper transverse hole is also connected with the left oil collecting channel;

the connecting holes are also connected with the corresponding second oil cavities;

a first sealing ring which enables the second upper vertical hole and the second lower vertical hole to be in sealing connection is further connected between the main body part and the left sliding block;

and/or the third oil guide channel comprises a third upper transverse hole, a third lower transverse hole, a third upper vertical hole and a third lower vertical hole; wherein the content of the first and second substances,

the third upper transverse hole and the third upper vertical hole are both arranged in the main body part;

the third lower transverse hole and the third lower vertical hole are both arranged in the left sliding block;

the third upper transverse hole, the third upper vertical hole, the third lower vertical hole and the third lower transverse hole are connected in sequence;

the third upper transverse hole is also connected with the left oil collecting channel;

the third lower transverse hole is also connected with the corresponding third oil cavity;

a second sealing ring which enables the third upper vertical hole and the third lower vertical hole to be in sealing connection is further connected between the main body part and the left sliding block;

and/or the fourth oil guide channel comprises a fourth transverse hole and a fourth vertical hole; wherein the content of the first and second substances,

the fourth transverse hole and the fourth vertical hole are both arranged in the main body part;

one end part of the fourth transverse hole is connected with the right oil collecting channel;

the other end of the fourth transverse hole is connected with the upper end of the fourth vertical hole;

the lower end part of the fourth vertical hole is connected with the corresponding fourth oil cavity;

and/or the fifth oil guide channel comprises a fifth upper transverse hole, a fifth lower transverse hole, a fifth upper vertical hole, a fifth lower vertical hole and a via hole; wherein the content of the first and second substances,

the fifth upper transverse hole and the fifth upper vertical hole are both arranged in the main body part;

the fifth lower transverse hole, the fifth lower vertical hole and the via hole are all arranged in the right sliding block;

the fifth upper transverse hole, the fifth upper vertical hole, the fifth lower transverse hole and the conducting hole are sequentially connected;

the fifth upper transverse hole is also connected with the right oil collecting channel;

the conducting holes are also connected with the corresponding fifth oil chambers;

a third sealing ring which enables the fifth upper vertical hole and the fifth lower vertical hole to be in sealing connection is further connected between the main body part and the right sliding block;

and/or the sixth oil guide channel comprises a sixth upper transverse hole, a sixth lower transverse hole, a sixth upper vertical hole and a sixth lower vertical hole; wherein the content of the first and second substances,

the sixth upper transverse hole and the sixth upper vertical hole are both arranged in the main body part;

the sixth lower transverse hole and the sixth lower vertical hole are both arranged in the right sliding block;

the sixth upper transverse hole, the sixth upper vertical hole, the sixth lower vertical hole and the sixth lower transverse hole are connected in sequence;

the sixth upper transverse hole is also connected with the right oil collecting channel;

the sixth lower transverse hole is also connected with the corresponding sixth oil cavity;

and a fourth sealing ring which enables the sixth upper vertical hole and the sixth lower vertical hole to be in sealing connection is further connected between the main body part and the right sliding block.

Further, an installation channel suitable for installing a linear motor is further arranged between the sliding table and the rail body.

Further, in order to accurately position the sliding table, the closed hydrostatic guideway further comprises a grating ruler, and the grating ruler comprises a scale grating and a grating reading head; wherein the content of the first and second substances,

the scale grating is connected to any one of the sliding table and the rail body;

the grating reading head is connected to the rest one of the sliding table and the rail body and is installed in a matched mode with the scale grating.

Further, in order to limit the stroke of the sliding table, a limit switch suitable for limiting the stroke of the sliding table is connected to the rail body.

In order to further adjust the oil pressure, a restrictor is arranged in at least one of the first oil guide channel, the second oil guide channel, the third oil guide channel, the fourth oil guide channel, the fifth oil guide channel and the sixth oil guide channel.

The invention also provides ultra-precise ball bearing ring grinding equipment which comprises a rack, a workpiece electric main shaft, a grinding wheel electric main shaft and at least two closed hydrostatic guide rails; wherein the content of the first and second substances,

the at least two closed hydrostatic guide rails comprise an X-direction closed hydrostatic guide rail and a Y-direction closed hydrostatic guide rail;

the rail body in the X-direction closed hydrostatic guide rail and the rail body in the Y-direction closed hydrostatic guide rail are both connected to the frame;

the workpiece electric spindle is connected to a sliding table in the Y-direction closed hydrostatic guideway and is connected to the rack in a sliding manner along the Y direction through the Y-direction closed hydrostatic guideway, and the workpiece electric spindle is suitable for mounting a workpiece and driving the workpiece to rotate;

the grinding wheel electric spindle is connected to a sliding table in the X-direction closed hydrostatic guide rail and is connected to the rack in a sliding manner along the X direction through the X-direction closed hydrostatic guide rail, and a grinding wheel is suitable for being mounted on the grinding wheel electric spindle and is suitable for driving the grinding wheel to rotate so as to grind the workpiece;

the X-direction closed hydrostatic guide rail and the Y-direction closed hydrostatic guide rail are respectively provided with a linear motor, and the linear motors are arranged between the sliding table and the rail body and are suitable for driving the sliding table to slide relative to the rail body.

The specific structure of the rack is further provided, the rack comprises a bottom support frame and a marble table top, and the rail body in the X-direction closed hydrostatic guideway and the rail body in the Y-direction closed hydrostatic guideway are both connected to the marble table top;

the workpiece electric spindle and the grinding wheel electric spindle are both hydrostatic pressure electric spindles.

After the technical scheme is adopted, when oil flows into the left oil collecting channel, the right oil collecting channel and the connecting channel from the oil inlet, the oil flows into the first oil chamber from the first oil guiding channel, flows into the second oil chamber from the second oil guiding channel, flows into the third oil chamber from the third oil guiding channel, flows into the fourth oil chamber from the fourth oil guiding channel, flows into the fifth oil chamber from the fifth oil guiding channel, and flows into the sixth oil chamber from the sixth oil guiding channel. Then the oil in the first oil chamber can permeate the first matching surface and form an oil film between the rail bodies, the oil in the second oil chamber can permeate the second matching surface and form an oil film between the rail bodies, the oil in the third oil chamber can permeate the third matching surface and form an oil film between the rail bodies, the oil in the fourth oil chamber can permeate the fourth matching surface and form an oil film between the rail bodies, the oil in the fifth oil chamber can permeate the fifth matching surface and form an oil film between the rail bodies, the oil in the sixth oil chamber can permeate the sixth matching surface and form an oil film between the rail bodies, and the oil film can play a role of lubrication and reduce abrasion. Oil is only required to be guided into the oil inlet through an external oil conveying pipe, and the oil can flow through the oil way system to supply oil to all parts; on one hand, the oil circuit system is simple and reasonable in layout, convenient to process and capable of saving processing cost; on the other hand, the oil liquid flows in the oil way system, and a plurality of external oil conveying pipes are not required to be connected, so that the arrangement of the external oil conveying pipes is simpler and more concise, and the use convenience is improved.

In addition, in the ultra-precise ball bearing ring grinding equipment, the workpiece electric spindle and the grinding wheel electric spindle both adopt liquid static pressure electric spindles, and compared with a belt transmission type spindle, the liquid static pressure electric spindles have the advantage of small vibration, so that the rotation precision of the workpiece and the grinding wheel is improved, and the grinding precision is improved. The X-direction closed hydrostatic guide rail can improve the sliding precision of the grinding wheel electric spindle, and the Y-direction closed hydrostatic guide rail can improve the sliding precision of the workpiece electric spindle, so that the machining precision of the grinding workpiece is further improved, and the support rigidity, the damping performance and the fatigue life are also improved. The linear motor drive can also improve the dynamic performance of the system, and has wider speed range and less wear.

Drawings

Fig. 1 is a schematic structural view of a closed hydrostatic guideway according to the present invention;

fig. 2 is an exploded assembly view from one perspective of the closed hydrostatic guideway of the present invention;

fig. 3 is an exploded assembly view from another perspective of the closed hydrostatic guideway of the present invention;

FIG. 4 is a top cross-sectional view of a closed hydrostatic guideway of the present invention;

FIG. 5 is a cross-sectional view A-A of FIG. 4;

FIG. 6 is a cross-sectional view B-B of FIG. 4;

FIG. 7 is a cross-sectional view C-C of FIG. 4;

fig. 8 is a schematic structural view of the ultra-precise ball bearing ring grinding device of the present invention.

Detailed Description

In order that the present invention may be more readily and clearly understood, a more particular description of the invention briefly described above will be rendered by reference to specific embodiments that are illustrated in the appended drawings.

Example one

As shown in fig. 1 to 7, a closed hydrostatic guideway comprises a sliding table 100 and a guideway body 1; wherein the content of the first and second substances,

the sliding table 100 is connected to the rail body 1 in a sliding manner along the front-back direction;

the sliding table 100 is provided with at least one first matching surface 2 in matching and abutting connection with the upper end surface of the left side end of the rail body 1, at least one second matching surface 3 in matching and abutting connection with the lower end surface of the left side end of the rail body 1, at least one third matching surface 4 in matching and abutting connection with the left side surface of the rail body 1, at least one fourth matching surface 5 in matching and abutting connection with the upper end surface of the right side end of the rail body 1, at least one fifth matching surface 6 in matching and abutting connection with the lower end surface of the right side end of the rail body 1 and at least one sixth matching surface 7 in matching and abutting connection with the right side surface of the rail body 1;

a first oil cavity 8 is arranged on the first matching surface 2, a second oil cavity 9 is arranged on the second matching surface 3, a third oil cavity 10 is arranged on the third matching surface 4, a fourth oil cavity 11 is arranged on the fourth matching surface 5, a fifth oil cavity 12 is arranged on the fifth matching surface 6, and a sixth oil cavity 13 is arranged on the sixth matching surface 7;

an oil path system is further arranged in the sliding table 100, and the oil path system comprises a left oil collecting channel 14, a right oil collecting channel 15, a connecting channel 16, at least one oil inlet 17, a first oil guide channel 18 corresponding to the first oil chamber 8, a second oil guide channel 19 corresponding to the second oil chamber 9, a third oil guide channel 20 corresponding to the third oil chamber 10, a fourth oil guide channel 21 corresponding to the fourth oil chamber 11, a fifth oil guide channel 22 corresponding to the fifth oil chamber 12, and a sixth oil guide channel 23 corresponding to the sixth oil chamber 13;

at least one of the left oil collecting channel 14, the right oil collecting channel 15 and the connecting channel 16 is connected with the oil inlet 17;

one end of the connecting channel 16 is connected to the left oil collecting channel 14, and the other end of the connecting channel 16 is connected to the right oil collecting channel 15, so that the left oil collecting channel 14 is communicated with the right oil collecting channel 15;

one end of the first oil guide channel 18 is connected with the left oil collecting channel 14, and the other end of the first oil guide channel 18 is connected with the corresponding first oil chamber 8;

one end of the second oil guide channel 19 is connected with the left oil collecting channel 14, and the other end of the second oil guide channel 19 is connected with the corresponding second oil chamber 9;

one end of the third oil guide channel 20 is connected to the left oil collecting channel 14, and the other end of the third oil guide channel 20 is connected to the corresponding third oil chamber 10;

one end of the fourth oil guide channel 21 is connected with the right oil collecting channel 15, and the other end of the fourth oil guide channel 21 is connected with the corresponding fourth oil chamber 11;

one end of the fifth oil guide channel 22 is connected with the right oil collecting channel 15, and the other end of the fifth oil guide channel 22 is connected with the corresponding fifth oil chamber 12;

one end of the sixth oil guide channel 23 is connected with the right oil collecting channel 15, and the other end of the sixth oil guide channel 23 is connected with the corresponding sixth oil chamber 13; specifically, when the oil flows into the left oil collecting channel 14, the right oil collecting channel 15 and the connecting channel 16 from the oil inlet 17, the oil flows into the first oil chamber 8 from the first oil guiding channel 18, flows into the second oil chamber 9 from the second oil guiding channel 19, flows into the third oil chamber 10 from the third oil guiding channel 20, flows into the fourth oil chamber 11 from the fourth oil guiding channel 21, flows into the fifth oil chamber 12 from the fifth oil guiding channel 22 and flows into the sixth oil chamber 13 from the sixth oil guiding channel 23. Then, oil in the first oil chamber 8 can permeate into the first matching surface 2 and the rail body 1 to form an oil film, oil in the second oil chamber 9 can permeate into the second matching surface 3 and the rail body 1 to form an oil film, oil in the third oil chamber 10 can permeate into the third matching surface 4 and the rail body 1 to form an oil film, oil in the fourth oil chamber 11 can permeate into the fourth matching surface 5 and the rail body 1 to form an oil film, oil in the fifth oil chamber 12 can permeate into the fifth matching surface 6 and the rail body 1 to form an oil film, and oil in the sixth oil chamber 13 can permeate into the sixth matching surface 7 and the rail body 1 to form an oil film, so that the oil film can play a lubricating role and reduce abrasion. In this embodiment, oil is introduced into the oil inlet 17 through an external oil pipe, and the oil can flow through the oil passage system to supply oil to each part; on one hand, the oil circuit system is simple and reasonable in layout, convenient to process and capable of saving processing cost; on the other hand, the oil liquid flows in the oil way system, and a plurality of external oil conveying pipes are not required to be connected, so that the arrangement of the external oil conveying pipes is simpler and more concise, and the use convenience is improved.

In this embodiment, there are two first matching surfaces 2, two second matching surfaces 3, two third matching surfaces 4, two fourth matching surfaces 5, two fifth matching surfaces 6, and two sixth matching surfaces 7; the first oil chambers 8 correspond to the first oil guide channels 18 one by one, the second oil chambers 9 correspond to the second oil guide channels 19 one by one, the third oil chambers 10 correspond to the third oil guide channels 20 one by one, the fourth oil chambers 11 correspond to the fourth oil guide channels 21 one by one, the fifth oil chambers 12 correspond to the fifth oil guide channels 22 one by one, and the sixth oil chambers 13 correspond to the sixth oil guide channels 23 one by one; the first oil chamber 8, the second oil chamber 9, the third oil chamber 10, the fourth oil chamber 11, the fifth oil chamber 12 and the sixth oil chamber 13 are cavities.

As shown in fig. 4, the left oil collecting channel 14 may be provided in a left end portion of the slide table 100 and extend in the front-rear direction;

the right oil collecting channel 15 may be provided in a right end portion of the slide table 100 and extend in the front-rear direction;

the connecting channel 16 extends in a transverse direction, which is a left-right direction in this embodiment;

the number of the oil inlets 17 can be four;

the first oil inlet 17 is located at the front end of the left side end of the sliding table 100 and is communicated with the front end of the left oil collecting channel 14;

the second oil inlet 17 is located at the rear end of the left side end of the sliding table 100 and is communicated with the rear end of the left oil collecting channel 14;

the third oil inlet 17 is located at the front end of the right side end of the sliding table 100 and is communicated with the front end of the right oil collecting channel 15;

the fourth oil inlet 17 is located at the rear end of the right side end of the sliding table 100 and is communicated with the rear end of the right oil collecting channel 15; in the embodiment, only one oil inlet 17 is connected with the external oil pipeline, and the other three oil inlets 17 can be blocked by plugs; the advantage of designing like this lies in, can be according to outside defeated oil pipe with the actual spatial layout of slip table 100, select the oil inlet 17 that is closest to outside defeated oil pipe links to each other with outside defeated oil pipe, and then has made things convenient for the arrangement of outside defeated oil pipe.

As shown in fig. 2 to 7, the sliding table 100 may include a main body portion 24, a left slider 25, and a right slider 26; wherein the content of the first and second substances,

the left slider 25 is connected to the left side end of the main body part 24, and the right slider 26 is connected to the right side end of the main body part 24; specifically, the left slider 25 and the right slider 26 are both locked and connected to the main body portion 24 through a connecting bolt;

the first matching surface 2, the first oil cavity 8, the fourth matching surface 5 and the fourth oil cavity 11 are all arranged on the main body part 24;

the second matching surface 3, the second oil cavity 9, the third matching surface 4 and the third oil cavity 10 are all arranged on the left slide block 25;

the fifth matching surface 6, the fifth oil cavity 12, the sixth matching surface 7 and the sixth oil cavity 13 are all arranged on the right slide block 26;

the left oil collecting channel 14, the right oil collecting channel 15, the connecting channel 16, the first oil guiding channel 18 and the fourth oil guiding channel 21 are all arranged in the main body part 24;

a part of the second oil guide passage 19 is provided in the main body portion 24, and the other part of the second oil guide passage 19 is provided in the left slider 25;

a part of the third oil guide passage 20 is provided in the main body portion 24, and the other part of the third oil guide passage 20 is provided in the left slider 25;

a part of the fifth oil guide passage 22 is provided in the main body portion 24, and another part of the fifth oil guide passage 22 is provided in the right slider 26;

a part of the sixth oil guide passage 23 is provided in the main body portion 24, and the other part of the sixth oil guide passage 23 is provided in the right slider 26.

4-7, the first oil guide channel 18 may include a first transverse hole 27 and a first vertical hole 28; wherein the content of the first and second substances,

the first transverse hole 27 and the first vertical hole 28 are both provided in the main body portion 24;

one end of the first transverse hole 27 is connected with the left oil collecting channel 14;

the other end of the first transverse hole 27 is connected to the upper end of the first vertical hole 28;

the lower end of the first vertical hole 28 is connected with the corresponding first oil chamber 8;

the second oil guide passage 19 may include a second upper transverse hole 29, a second lower transverse hole 30, a second upper vertical hole 31, a second lower vertical hole 32, and a connection hole 33; wherein the content of the first and second substances,

the second upper transverse hole 29 and the second upper vertical hole 31 are both provided in the main body portion 24;

the second lower transverse hole 30, the second lower vertical hole 32 and the connecting hole 33 are all arranged in the left sliding block 25;

the second upper transverse hole 29, the second upper vertical hole 31, the second lower vertical hole 32, the second lower transverse hole 30 and the connecting hole 33 are connected in sequence;

the second upper transverse hole 29 is also connected with the left oil collecting channel 14;

the connecting hole 33 is also connected with the corresponding second oil chamber 9;

a first sealing ring which enables the second upper vertical hole 31 and the second lower vertical hole 32 to be connected in a sealing mode is further connected between the main body part 24 and the left slider 25;

the third oil guide passage 20 may include a third upper transverse hole 34, a third lower transverse hole 35, a third upper vertical hole 36, and a third lower vertical hole 37; wherein the content of the first and second substances,

the third upper transverse hole 34 and the third upper vertical hole 36 are both provided in the main body portion 24;

the third lower transverse hole 35 and the third lower vertical hole 37 are both arranged in the left slider 25;

the third upper transverse hole 34, the third upper vertical hole 36, the third lower vertical hole 37 and the third lower transverse hole 35 are connected in sequence;

the third upper transverse hole 34 is also connected with the left oil collecting channel 14;

the third lower transverse hole 35 is also connected with the corresponding third oil chamber 10;

a second sealing ring which enables the third upper vertical hole 36 and the third lower vertical hole 37 to be connected in a sealing mode is further connected between the main body part 24 and the left sliding block 25;

the fourth oil guide passage 21 may include a fourth transverse hole 38 and a fourth vertical hole 39; wherein the content of the first and second substances,

the fourth transverse bore 38 and the fourth vertical bore 39 are both provided in the body portion 24;

one end of the fourth transverse hole 38 is connected with the right oil collecting channel 15;

the other end of the fourth transverse hole 38 is connected to the upper end of the fourth vertical hole 39;

the lower end part of the fourth vertical hole 39 is connected with the corresponding fourth oil chamber 11;

the fifth oil guiding passage 22 may include a fifth upper transverse hole 40, a fifth lower transverse hole 41, a fifth upper vertical hole 42, a fifth lower vertical hole 43, and a via hole 44; wherein the content of the first and second substances,

the fifth upper transverse hole 40 and the fifth upper vertical hole 42 are both provided in the main body portion 24;

the fifth lower transverse hole 41, the fifth lower vertical hole 43 and the via hole 44 are all arranged in the right slider 26;

the fifth upper transverse hole 40, the fifth upper vertical hole 42, the fifth lower vertical hole 43, the fifth lower transverse hole 41 and the via hole 44 are connected in sequence;

the fifth upper transverse hole 40 is also connected with the right oil collecting channel 15;

the through hole 44 is further connected with the corresponding fifth oil chamber 12;

a third sealing ring which enables the fifth upper vertical hole 42 and the fifth lower vertical hole 43 to be connected in a sealing mode is further connected between the main body portion 24 and the right slider 26;

the sixth oil guide channel 23 may include a sixth upper transverse hole 45, a sixth lower transverse hole 46, a sixth upper vertical hole 47, and a sixth lower vertical hole 48; wherein the content of the first and second substances,

the sixth upper transverse hole 45 and the sixth upper vertical hole 47 are both provided in the main body portion 24;

the sixth lower transverse hole 46 and the sixth lower vertical hole 48 are both provided in the right slider 26;

the sixth upper transverse hole 45, the sixth upper vertical hole 47, the sixth lower vertical hole 48 and the sixth lower transverse hole 46 are connected in sequence;

the sixth upper transverse hole 45 is also connected with the right oil collecting channel 15;

the sixth lower transverse hole 46 is also connected with the corresponding sixth oil chamber 13;

a fourth sealing ring which hermetically connects the sixth upper vertical hole 47 and the sixth lower vertical hole 48 is further connected between the main body portion 24 and the right slider 26.

As shown in fig. 5 to 7, an installation channel 50 suitable for installing a linear motor 49 may be further provided between the sliding table 100 and the rail body 1; specifically, the linear motor 49 is adapted to drive the sliding table 100 to slide on the rail body 1, a stator of the linear motor 49 is connected to the rail body 1, and a rotor of the linear motor 49 is connected to the sliding table 100.

As shown in fig. 1, the closed hydrostatic guideway may further include a grating scale 51, where the grating scale 51 includes a scale grating and a grating reading head; wherein the content of the first and second substances,

the scale grating is connected to any one of the sliding table 100 and the rail body 1;

the grating reading head is connected to the rest one of the sliding table 100 and the rail body 1 and is installed in a matching manner with the scale grating; in this embodiment, the scale grating is connected to the sliding table 100, the grating reading head is installed on the rail body 1, and the sliding table 100 is further connected to a protection box for protecting the grating scale 51. Specifically, the grating ruler 51 is suitable for accurately positioning the position of the sliding table 100 on the rail body 1, and the specific structures of the linear motor 49 and the grating ruler 51 are the prior art well known to those skilled in the art, and are not described in detail in this embodiment.

As shown in fig. 1, a limit switch 52 adapted to limit the travel of the sliding table 100 is further connected to the rail body 1; specifically, two end portions of the rail body 1 are respectively provided with one limit switch 52, when the sliding table 100 touches the limit switch 52, the limit switch 52 sends a control signal to the controller, and the controller controls the linear motor 49 to move reversely according to the received control signal, so as to drive the sliding table 100 to reciprocate on the rail body 1.

As shown in fig. 4 to 7, a restrictor 53 is disposed in at least one of the first oil guide passage 18, the second oil guide passage 19, the third oil guide passage 20, the fourth oil guide passage 21, the fifth oil guide passage 22 and the sixth oil guide passage 23; in this embodiment, all of the first oil guide channel 18, the second oil guide channel 19, the third oil guide channel 20, the fourth oil guide channel 21, the fifth oil guide channel 22 and the sixth oil guide channel 23 are provided with a restrictor 53, and the restrictor 53 can adjust oil pressures in the first oil chamber 8, the second oil chamber 9, the third oil chamber 10, the fourth oil chamber 11, the fifth oil chamber 12 and the sixth oil chamber 13, so that the oil pressures can be automatically adjusted according to a change of an external load to balance the external load.

Example two

As shown in fig. 1 and 8, an ultra-precise ball bearing ring grinding device comprises a frame 54, a workpiece electric spindle 55, a grinding wheel electric spindle 56 and at least two closed hydrostatic guide rails according to the first embodiment; wherein the content of the first and second substances,

the at least two closed hydrostatic guide rails comprise an X-direction closed hydrostatic guide rail and a Y-direction closed hydrostatic guide rail;

the rail body 1 in the X-direction closed hydrostatic guideway and the rail body 1 in the Y-direction closed hydrostatic guideway are both connected to the frame 54;

the workpiece electric spindle 55 is connected to the sliding table 100 in the Y-direction closed hydrostatic guideway and is slidably connected to the frame 54 along the Y direction through the Y-direction closed hydrostatic guideway, and the workpiece electric spindle 55 is suitable for mounting a workpiece and driving the workpiece to rotate;

the grinding wheel electric spindle 56 is connected to a sliding table 100 in the X-direction closed hydrostatic guide rail and is slidably connected to the frame 54 along the X direction through the X-direction closed hydrostatic guide rail, and the grinding wheel electric spindle 56 is suitable for mounting a grinding wheel and driving the grinding wheel to rotate so as to grind the workpiece;

the X-direction closed hydrostatic guide rail and the Y-direction closed hydrostatic guide rail are also respectively provided with a linear motor 49, and the linear motor 49 is arranged between the sliding table 100 and the rail body 1 and is suitable for driving the sliding table 100 to slide relative to the rail body 1; in the present embodiment, the X direction is perpendicular to the Y direction, and both the axial direction of the workpiece electric spindle 55 and the axial direction of the grinding wheel electric spindle 56 are arranged along the X direction; specifically, the workpiece may be a ring of an ultra-precise ball bearing, and the grinding wheel may be a grinding wheel. More specifically, the X-direction closed hydrostatic guide can improve the sliding accuracy of the grinding wheel electric spindle 56, and the Y-direction closed hydrostatic guide can improve the sliding accuracy of the workpiece electric spindle 55, so as to improve the machining accuracy of the ground workpiece.

As shown in fig. 1 and 8, the frame 54 may include a bottom support frame and a marble table 57, and the rail body 1 in the X-direction closed hydrostatic guideway and the rail body 1 in the Y-direction closed hydrostatic guideway are both connected to the marble table 57;

the workpiece electric spindle 55 and the grinding wheel electric spindle 56 are both hydrostatic electric spindles; in the embodiment, the hydrostatic electric spindle can improve the rotation precision of the workpiece and the grinding wheel, reduce vibration and further improve grinding precision; compared with the existing iron veneer, the marble tabletop 57 can reduce vibration and improve stability. Specifically, the specific structure of the hydrostatic spindle is the prior art well known to those skilled in the art, and details are not described in this embodiment, and the bottom of the bottom support frame is further connected to a vibration-proof pad 58. Specifically, the ultra-precise ball bearing ring grinding equipment of this patent can be used for processing accurate angular contact ball bearing outer lane inner hook and inner circle excircle.

The working principle of the invention is as follows:

when the oil flows into the left oil collecting channel 14, the right oil collecting channel 15 and the connecting channel 16 from the oil inlet 17, the oil flows into the first oil chamber 8 from the first oil guiding channel 18, flows into the second oil chamber 9 from the second oil guiding channel 19, flows into the third oil chamber 10 from the third oil guiding channel 20, flows into the fourth oil chamber 11 from the fourth oil guiding channel 21, flows into the fifth oil chamber 12 from the fifth oil guiding channel 22 and flows into the sixth oil chamber 13 from the sixth oil guiding channel 23. Then, oil in the first oil chamber 8 can permeate into the first matching surface 2 and the rail body 1 to form an oil film, oil in the second oil chamber 9 can permeate into the second matching surface 3 and the rail body 1 to form an oil film, oil in the third oil chamber 10 can permeate into the third matching surface 4 and the rail body 1 to form an oil film, oil in the fourth oil chamber 11 can permeate into the fourth matching surface 5 and the rail body 1 to form an oil film, oil in the fifth oil chamber 12 can permeate into the fifth matching surface 6 and the rail body 1 to form an oil film, and oil in the sixth oil chamber 13 can permeate into the sixth matching surface 7 and the rail body 1 to form an oil film, so that the oil film can play a lubricating role and reduce abrasion. Oil is introduced into the oil inlet 17 through an external oil delivery pipe, and the oil can flow through the oil path system to supply oil to each part; on one hand, the oil circuit system is simple and reasonable in layout, convenient to process and capable of saving processing cost; on the other hand, the oil liquid flows in the oil way system, and a plurality of external oil conveying pipes are not required to be connected, so that the arrangement of the external oil conveying pipes is simpler and more concise, and the use convenience is improved.

In addition, in the ultra-precise ball bearing ring grinding equipment, the workpiece electric spindle 55 and the grinding wheel electric spindle 56 both adopt hydrostatic electric spindles, and compared with a belt transmission type spindle, the hydrostatic electric spindles have the advantage of small vibration, so that the rotation precision of the workpiece and the grinding wheel is improved, and the grinding precision is improved. The X-direction closed hydrostatic guide rail can improve the sliding precision of the grinding wheel electric spindle 56, and the Y-direction closed hydrostatic guide rail can improve the sliding precision of the workpiece electric spindle 55, so that the machining precision of the ground workpiece is further improved, and the support rigidity, the shock absorption performance and the fatigue life are also improved. The use of linear motor 49 drive also improves system dynamic performance, has a wider speed range and is less worn.

The above embodiments are described in further detail to solve the technical problems, technical solutions and advantages of the present invention, and it should be understood that the above embodiments are only examples of the present invention and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.