Method and device for applying material to a carrier

文档序号:1865712 发布日期:2021-11-19 浏览:24次 中文

阅读说明:本技术 将材料施加到载体上的方法和装置 (Method and device for applying material to a carrier ) 是由 安德烈亚斯·吕茨 亚历山大·佩施 丹尼尔·托马 米尔科·里特米勒 于 2020-03-12 设计创作,主要内容包括:本发明涉及将材料(1)施加到载体(6)上的方法和装置。所述材料被布置在空气轴承装置(2,3)的多孔层(2)上。(The invention relates to a method and a device for applying a material (1) to a carrier (6). The material is arranged on a porous layer (2) of an air bearing device (2, 3).)

1. A method of mounting a material (1, 8) on a carrier (6; 50), comprising:

placing a material (1, 8; 51) on a surface of a porous layer (2) of an air bearing device (2, 3), wherein the surface of the porous layer (2) is designed to be complementary to a surface of the carrier (6; 50) on which the material (1, 8; 51) is to be mounted, and

arranging the carrier (6; 50) on the material (1, 8; 51) of the surface of the porous layer (2),

wherein the method further comprises:

applying a negative pressure to the air bearing device (2, 3) to suck the material (1, 8) and/or to suck the material (1, 8) before arranging the carrier (6; 50) on the material (1, 8; 51)

Applying an overpressure to the air bearing device (2, 3) in order to release the carrier (6) from the air bearing device (2, 3), the carrier (6) having the material (1, 8; 51) mounted thereon.

2. The method according to claim 1, wherein the material (1) comprises a film, and wherein the method further comprises applying an adhesive (5) on the film (1) before the carrier (6) is arranged on the material (1).

3. The method according to claim 1, wherein the material (8) comprises a liquid material.

4. A method according to claim 3, wherein the method comprises closing the air connection (4) of the air bearing arrangement (2, 3) when placing the material (8) on the surface of the porous layer (2) and when arranging the carrier (6).

5. A method according to any of claims 1 to 4, wherein the method further comprises heat treating the material (1, 8; 51) placed on the surface of the porous layer (2).

6. The method according to any one of claims 1 to 5, wherein the method further comprises processing the material (1, 8; 51).

7. The method according to claim 6, wherein the processing comprises exposure to create a holographic structure and/or a grating structure, engraving or laser processing.

8. A method according to claim 6 or 7, wherein during said treatment said material (1, 8; 51) is mounted on the surface of said porous layer (2).

9. A method according to claim 6 or 7, wherein during said treatment said material (1, 8; 51) is connected to said carrier (6) and removed from said porous layer (2).

10. The method of any of claims 1 to 9, further comprising:

excess material is removed from the carrier (6; 50).

11. The method according to any one of claims 1 to 10, further comprising mounting a further carrier (7) on the material (1, 8) on a side facing away from the carrier (6).

12. The method according to any one of claims 1 to 11, wherein the carrier (6; 50) is a transparent carrier.

13. The method according to any one of claims 1 to 12, wherein the material (1, 8; 51) comprises an optical material or an optical element.

14. The method according to any one of claims 1 to 13, wherein the method is used for manufacturing an optical component (53A, 53B).

15. The method according to any one of claims 1 to 14, wherein the carrier (50) and/or the material (51) comprises a glass plate.

16. The method of any of claims 1 to 14, further comprising:

placing the carrier (50) on a surface of a further porous layer (2') of a further air bearing device (2', 3'), wherein the surface of the further porous layer (2') is designed to correspond to a desired surface of the carrier (50) on which the material (1, 8; 51) is to be mounted, and

applying a negative pressure to the further air bearing device (2', 3') to suck the carrier (50) before the carrier (50) is arranged on the material (1, 8; 51).

17. A device for fixing a material (1, 8; 51) on a carrier (6; 50), comprising:

an air bearing device (2, 3), the air bearing device (2, 3) having a porous layer (2) arranged on the air bearing (3), wherein the porous layer (2) has a surface for receiving the material (1, 8; 51), and

a pump (15), the pump (15) being configured to apply an overpressure and/or a negative pressure to the air bearing (3).

18. The device according to claim 17, wherein the surface of the porous layer (2) has a curved surface.

19. The device according to claim 17 or 18, further comprising heating means (18), the heating means (18) being arranged for heating a material mounted on the surface of the porous layer (2).

20. The device according to any one of claims 17 to 19, further comprising a holder (19), the holder (19) being adapted to hold the material (1) at an edge of a surface of the porous material (2).

21. Apparatus according to any one of claims 17 to 20, further comprising cutting means (20), said cutting means (20) being adapted to remove excess material from said carrier (6).

22. The device according to any one of claims 17 to 21, wherein the surface of the porous layer (2) has a coating (20).

23. The device according to claim 22, wherein the coating has openings with a diameter smaller than the average diameter of the pores in the surface of the porous layer (2).

24. The device according to any one of claims 17 to 23, wherein the deviation of the surface of the porous layer (2) from the desired shape corresponding to the surface of the support is less than 100 μm.

25. The apparatus of any of claims 17 to 24, further comprising:

a further air bearing device (2', 3'), the further air bearing device (2', 3') having a further porous layer (2') arranged on a further air bearing (3'), wherein the further porous layer (2') has a surface for receiving the carrier (50).

26. An apparatus according to any of claims 17 to 25, wherein the apparatus is arranged to perform the method of any of claims 1 to 16.

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