阅读说明：本技术 一种反馈元件安装结构及应用其的超精密级静压导轨 (Feedback element mounting structure and ultra-precise hydrostatic guide rail applying same ) 是由 李云飞 朱生根 张舜华 吴东旭 李晓会 苗松 宋国伟 于 2021-08-20 设计创作，主要内容包括：本发明涉及一种反馈元件安装结构及应用其的超精密级静压导轨,反馈元件安装结构包括连接板、光栅安装板、光栅和读数头、读数头支架和读数头弯板；光栅安装板包括固定连接部和位于固定连接部两端的弹性变形连接部,弹性变形连接部与固定连接部的连接处开设有弹性铰链结构,并且弹性变形连接部上还开设有n形弹性变形缝隙；连接板中部通过连接件与光栅安装板的固定连接部连接,连接板的两端通过连接件分别与两个弹性变形连接部连接；光栅中间固定在光栅安装板上,两端通过压紧件压在光栅安装板上；读数头通过读数头支架安装在读数头弯板上。该安装结构用于高分辨率的反馈元件的安装及调节,具有消除反馈系统元件在环境温度波动时产生的热应力的功能。(The invention relates to a feedback element mounting structure and an ultra-precise hydrostatic guide rail using the same, wherein the feedback element mounting structure comprises a connecting plate, a grating mounting plate, a grating, a reading head bracket and a reading head bent plate; the grating mounting plate comprises a fixed connecting part and elastic deformation connecting parts positioned at two ends of the fixed connecting part, an elastic hinge structure is arranged at the connecting part of the elastic deformation connecting parts and the fixed connecting part, and n-shaped elastic deformation gaps are also arranged on the elastic deformation connecting parts; the middle part of the connecting plate is connected with the fixed connecting part of the grating mounting plate through a connecting piece, and two ends of the connecting plate are respectively connected with the two elastic deformation connecting parts through connecting pieces; the middle of the grating is fixed on the grating mounting plate, and the two ends of the grating are pressed on the grating mounting plate through pressing pieces; the reading head is arranged on the reading head bent plate through the reading head bracket. The mounting structure is used for mounting and adjusting the feedback element with high resolution and has the function of eliminating the thermal stress generated by the feedback system element when the ambient temperature fluctuates.)

1. A feedback element mounting structure is characterized by comprising a connecting plate, a grating mounting plate, a grating, a reading head bracket and a reading head bent plate; the grating mounting plate comprises a fixed connecting part and elastic deformation connecting parts positioned at two ends of the fixed connecting part, a notch is formed at the connecting part of the elastic deformation connecting parts and the fixed connecting part, and n-shaped elastic deformation joints are further formed in the elastic deformation connecting parts; the middle part of the connecting plate is connected with the fixed connecting part of the grating mounting plate through a connecting piece, and two ends of the connecting plate are respectively connected with the two elastic deformation connecting parts through connecting pieces; the middle of the grating is fixed on the grating mounting plate, and two ends of the grating are tightly pressed and mounted on the grating mounting plate through pressing pieces; the reading head is arranged on the reading head bent plate through the reading head bracket.

2. A feedback element mounting structure according to claim 1 wherein the gap between the grating and the readhead is adjusted by fine-tuning the horizontal orientation and the rotational angle of the readhead mount on the readhead angle plate.

3. A feedback element mounting structure according to claim 1, wherein the grating is fixed to the grating mounting plate at a fixing portion thereof by bonding, and both ends of the grating are pressed against the grating mounting plate by an elastic pressing plate.

4. A feedback element mounting arrangement according to claim 1, further comprising a grating housing enclosing the connection plate, grating mounting plate, grating and readhead, readhead support and readhead angle plate therein.

5. The feedback element mounting structure according to claim 4, wherein a positive pressure gas inlet is formed in the grating housing, and an air inlet quick connector is mounted on the positive pressure gas inlet.

6. An ultra-precise hydrostatic guideway applying the feedback element mounting structure of claim 1, comprising a feedback element mounting structure, a guideway, an air inlet quick connector, a linear motor, a carriage and a grating housing, wherein the carriage is slidably mounted on the guideway and driven by the linear motor; the connecting plate of the feedback element mounting structure is fixedly connected with the slide carriage through a connecting piece, and the reading head bent plate of the feedback element mounting structure is connected with the side surface of the guide rail; the grating outer cover covers the connecting plate, the grating mounting plate, the grating and reading head, the reading head bracket and the reading head bent plate, and the air inlet quick connector is arranged on a positive pressure air inlet formed in the grating outer cover.

Technical Field

The invention relates to the technical field of ultra-precision hydrostatic guide rails, in particular to a feedback element mounting structure and an ultra-precision hydrostatic guide rail applying the same.

Background

The feedback element with high resolution sold in the market at present has the problem of applicability in the feeding of the resolution of the nanometer level, the feeding capability corresponding to the resolution is difficult to realize when the feedback element is actually applied to a commercialized ultra-precision machine tool, and the problems of thermal drift and thermal stress of the feedback element possibly exist in a linear shaft of the ultra-precision machine tool due to the fluctuation of the environmental temperature. In order to eliminate the function of thermal stress of contact-type installed feedback system elements (a grating ruler, a holographic linear grating and the like), reduce the influence of environmental temperature fluctuation and air flow on the feedback system elements through a semi-closed structure and improve the applicability and the robustness of a high-resolution feedback element in nanoscale resolution feeding, the mounting structure of the feedback element suitable for the ultra-precise hydrostatic guide rail is provided.

Therefore, how to provide a feedback element mounting structure and an ultra-precise hydrostatic guideway applying the same are problems to be solved by those skilled in the art.

Disclosure of Invention

Accordingly, the present invention is directed to a feedback element mounting structure and an ultra-precise hydrostatic guideway using the same, which solves at least one of the problems set forth in the background of the invention.

In order to realize the scheme, the invention adopts the following technical scheme:

a feedback element mounting structure comprises a connecting plate, a grating mounting plate, a grating, a reading head bracket and a reading head bent plate; the grating mounting plate comprises a fixed connecting part and elastic deformation connecting parts positioned at two ends of the fixed connecting part, a notch is formed at the connecting part of the elastic deformation connecting parts and the fixed connecting part, and n-shaped elastic deformation joints are further formed in the elastic deformation connecting parts; the middle part of the connecting plate is connected with the fixed connecting part of the grating mounting plate through a connecting piece, and two ends of the connecting plate are respectively connected with the two elastic deformation connecting parts through connecting pieces; the middle of the grating is fixed on the grating mounting plate, and two ends of the grating are tightly pressed and mounted on the grating mounting plate through pressing pieces; the reading head is arranged on the reading head bent plate through the reading head bracket.

Preferably, in the feedback element mounting structure, the gap between the grating and the reading head is adjusted by finely adjusting the horizontal direction and the rotation angle of the reading head support on the reading head bending plate.

Preferably, in the feedback element mounting structure, the middle of the grating is fixed to the fixed connection portion of the grating mounting plate by bonding, and both ends of the grating are pressed against the grating mounting plate by the elastic pressing plate.

Preferably, in the feedback element mounting structure, a grating housing is further included, and the grating housing houses the connecting plate, the grating mounting plate, the grating and reading head, the reading head bracket and the reading head bending plate therein.

Preferably, in the feedback element mounting structure, a positive pressure gas inlet is formed in the grating housing, and an air inlet quick connector is mounted on the positive pressure gas inlet.

An ultra-precision hydrostatic guide rail applying a feedback element mounting structure comprises the feedback element mounting structure, a guide rail, an air inlet quick connector, a linear motor, a slide carriage and a grating housing, wherein the slide carriage is slidably mounted on the guide rail and driven by the linear motor; the connecting plate of the feedback element mounting structure is fixedly connected with the slide carriage through a connecting piece, and the reading head bent plate of the feedback element mounting structure is connected with the side surface of the guide rail; the grating outer cover covers the connecting plate, the grating mounting plate, the grating and reading head, the reading head bracket and the reading head bent plate, and the air inlet quick connector is arranged on a positive pressure air inlet formed in the grating outer cover.

According to the technical scheme, compared with the prior art, the feedback element mounting structure and the ultra-precision hydrostatic guide rail applying the feedback element mounting structure are different from the prior ultra-precision hydrostatic guide rail feedback element mounting structure, the prior structure is that the middle of a grating is directly bonded on a grating mounting plate or a slide carriage or directly bonded on the guide rail, a grating ruler is fixed only by a two-end pressing mode, the thermal stress of a grating system is released completely by a low-thermal-expansion-coefficient material of the grating and the two-end pressing mode, the influence of thermal deformation on a grating mounting base plane cannot be eliminated, and the drift of the whole grating along with a structural member is difficult to reduce.

The invention solves the problem of thermal stress of a feedback element in high-resolution feeding of a large-stroke moving part, and makes a feedback element of an ultra-precise hydrostatic guideway less susceptible to environmental temperature fluctuation and the influence of air flow on the feedback system element through a semi-closed structure, wherein positive air pressure exists in the semi-closed structure, and the feedback element is prevented from being polluted by dust, oil mist and other factors in the environment through clearance sealing.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a schematic overall view of an ultra-precision hydrostatic guideway employing a feedback element mounting structure;

FIG. 2 is a schematic view of the resilient connection of the feedback element mounting structure;

FIG. 3 is a schematic view showing the installation relationship of the connection plate, the grating mounting plate, the grating and the reading head;

fig. 4 is a schematic structural diagram of the grating mounting plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The embodiment of the invention discloses a feedback element mounting structure, which comprises a connecting plate 1, a grating mounting plate 2, a grating 3, a reading head 4, a reading head bracket 5 and a reading head bent plate 6, wherein the grating is arranged on the grating mounting plate; the grating mounting plate 2 comprises a fixed connecting part 7 and elastic deformation connecting parts 8 positioned at two ends of the fixed connecting part 7, a gap 9 is formed at the connecting part of the elastic deformation connecting parts 8 and the fixed connecting part 7, and an n-shaped elastic deformation joint 10 is further formed on the elastic deformation connecting parts 8; the middle part of the connecting plate 1 is connected with a fixed connecting part 7 of the grating mounting plate 2 through a connecting piece, and two ends of the connecting plate 1 are respectively connected with two elastic deformation connecting parts 8 through connecting pieces; the middle of the grating 3 is fixed on the grating mounting plate 2, and the two ends of the grating are tightly pressed and mounted on the grating mounting plate 2 through pressing pieces; the reading head 4 is mounted on a reading head bending plate 6 through a reading head bracket 5.

The grating mounting plate 2 is made of indium steel material with low thermal expansion coefficient, and only generates slight thermal stress with the grating 3 when the environmental temperature fluctuates, and the thermal drift phenomenon between the two is basically avoided due to the middle bonding; the grating mounting plate 2 and the connecting plate 1 which is similar to or made of the same material as the slide carriage 15 are connected in a mode of being fixed in the middle, and the two ends of the grating mounting plate are of elastic hinge structures, so that the grating mounting plate 2 is prevented from being directly influenced by the thermal deformation of the slide carriage 15 and the connecting plate 1. The system has the advantages of thermal stability of system motion, avoidance of system thermal stress, realization of large-stroke nanometer resolution motion feeding, and application to ultra-precision processing machine tools.

In order to further optimize the technical scheme, the gap between the grating 3 and the reading head 4 is adjusted by finely adjusting the horizontal direction and the rotation angle of the reading head bracket 5 on the reading head bent plate 6.

In order to further optimize the technical scheme, the middle of the grating 3 is fixed on the fixed connecting part 7 of the grating mounting plate 2 in an adhesion mode, and two ends of the grating are pressed on the grating mounting plate 2 through elastic pressing plates.

In order to further optimize the technical scheme, the optical grating reading device further comprises an optical grating housing 11, and the optical grating housing 11 houses the connecting plate 1, the optical grating mounting plate 2, the optical grating 3, the reading head 4, the reading head support 5 and the reading head bent plate 6.

In order to further optimize the technical scheme, a positive pressure gas inlet is formed in the grating housing 11, an air inlet quick connector 12 is mounted on the positive pressure gas inlet, clean and dry compressed air is provided for the interior of the grating housing 11 through the air inlet quick connector 12, the grating housing 11 enables the air not to blow the connecting plate 1, the grating mounting plate 2, the grating 3, the reading head 4, the reading head support 5 and other key parts as far as possible through pipeline design, and the feedback elements are prevented from being polluted by dust, oil mist and other factors in the environment through positive pressure in a system cavity and gap sealing.

An ultra-precise hydrostatic guide rail applying a feedback element mounting structure comprises the feedback element mounting structure, a guide rail 13, an air inlet quick connector 12, a linear motor 14, a slide carriage 15 and a grating housing 11, wherein the slide carriage 15 is slidably mounted on the guide rail 13 and driven by the linear motor 14; the connecting plate 1 of the feedback element mounting structure is fixedly connected with the slide carriage 15 through a connecting piece, and the reading head bent plate 6 of the feedback element mounting structure is connected with the side surface of the guide rail 13; the grating housing 11 houses the connecting plate 1, the grating mounting plate 2, the grating 3, the reading head 4, the reading head bracket 5 and the reading head bent plate 6, and the gas inlet quick connector 12 is mounted on a positive pressure gas inlet formed in the grating housing 11.

The guide rail 13 is integrally scraped after being assembled by a high-strength casting material, and is a basis for the precision of moving parts. The carriage 15 is a moving part which moves on the guide rail 13 supported by the hydrostatic slider. The carriage 15 is driven by a linear motor 14 in conjunction with a high resolution closed loop feedback system, which mainly uses a grating 3 system.

The movement of the slide carriage 15 is controlled by a set of numerical control system with nanometer resolution, the numerical control system sends a movement instruction to control the movement of the linear motor 14, the reading head 4 and the grating 3 generate relative movement, the reading head 4 detects a corresponding position signal and feeds the signal back to the numerical control system. The core point of the device is that the grating mounting plate 2 is not directly connected with the slide carriage 15, the grating mounting plate 2 is designed by adopting an elastic hinge structure, indium steel materials with low thermal expansion coefficient are selected and connected with the connecting plate 1 by inner hexagon bolts, and the connection mode is that two ends are fixed in the middle to allow elastic deformation. When the slide carriage 15 and the connecting plate 1 are subjected to thermal deformation caused by heating of the environment or a static pressure bearing medium, the middle is fixed to avoid causing thermal drift of the grating 3 relative to the reading head 4, and thermal stress caused by the connecting plate 1 is eliminated through an elastic structure of the grating mounting plate 2.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.