阅读说明：本技术 一种智能农业动力机械加工用的注塑板线切割装置 (Injection molding plate linear cutting device for intelligent agricultural power machinery processing ) 是由 吴佳平 于 2021-07-28 设计创作，主要内容包括：本发明公布了一种智能农业动力机械加工用的注塑板线切割装置,包括底座、电阻丝和驱动机构,驱动机构包括同步电机和滑座,通过驱动机构带动左右两侧的滑动柱在对应的套筒中往复移动,从而带动电阻丝左右移动,而电阻丝的两端通过外界电源供电,进而通过往复移动的发热电阻丝对注塑板件进行线切割,通过发热的电阻丝进行切割,使得切割位置的注塑板件融化,从而提高切割的效率,左右两侧的同步电机工作时带动输出轴转动,进而输出轴上固接的往复丝杆转动,往复丝杆转动时,滑座往复的左右移动,而滑座与滑动柱通过耳板固定连接,因此,左右两侧的滑动柱同步进行往复的移动,进而带动电阻丝往复移动。(The invention discloses an injection plate wire cutting device for intelligent agricultural power machining, which comprises a base, a resistance wire and a driving mechanism, wherein the driving mechanism comprises a synchronous motor and a sliding seat, sliding columns on the left side and the right side are driven by the driving mechanism to reciprocate in corresponding sleeves so as to drive the resistance wire to move left and right, two ends of the resistance wire are powered by an external power supply, the injection plate is subjected to wire cutting by the reciprocating heating resistance wire, the injection plate at the cutting position is melted by the heating resistance wire, so that the cutting efficiency is improved, the synchronous motors on the left side and the right side drive an output shaft to rotate when working, a reciprocating lead screw fixedly connected on the output shaft rotates, the sliding seat moves left and right in a reciprocating manner when the reciprocating lead screw rotates, the sliding seat and the sliding columns on the left side and the right side are fixedly connected through ear plates, so that the sliding columns on the left side and the right side synchronously reciprocate, thereby driving the resistance wire to move back and forth.)

1. The utility model provides an injection moulding board wire-electrode cutting device that intelligent agricultural power machinery processing was used which characterized in that: comprises a base (1), a resistance wire (2) and a driving mechanism; the upper surface of the base (1) is fixedly connected with box bodies (11) in a bilateral symmetry mode, two ends of the resistance wire (2) extend into the box bodies (11) on the left side and the right side respectively, sliding columns (21) are fixedly connected with two ends of the resistance wire (2), sleeves (22) are fixedly connected to the inner walls of side plates of the box bodies (11) opposite to the sliding columns (21), the sliding columns (21) are connected into the corresponding sleeves (22) in a sliding mode, and two ends of the resistance wire (2) are electrically connected with an external power supply;

the driving mechanism comprises a synchronous motor (31) and a sliding seat (32); synchronous motor (31) rigid coupling is equipped with output shaft (33) in the left and right sides of base (1), synchronous setting, output shaft (33) rotate to be connected in base (1), box (11) cover closes regional base (1) upper surface and has seted up track groove (34), and the rigid coupling has reciprocal lead screw (35) on output shaft (33) of track groove (34) position, and the rigid coupling has guide bar (36) in track groove (34) of both sides around reciprocal lead screw (35), slide (32) sliding connection is in track groove (34), slide (32) and guide bar (36) sliding connection and with reciprocal lead screw (35) meshing, the rigid coupling has otic placode (37) on slip post (21), the bottom of otic placode (37) and the last fixed surface of slide (32) are connected.

2. The intelligent cutting device for the injection molding plate wire used for the agricultural power machinery processing according to claim 1, wherein: sliding column (21) and sleeve (22) are insulating material, the one end rigid coupling that sliding column (21) are located sleeve (22) has first electric connection piece (41), resistance wire (2) parcel is in sliding column (21), the head and the first electric connection piece (41) electric connection of resistance wire (2), still have second electric connection piece (43), two through insulating spring (42) electric connection in sleeve (22) second electric connection piece (43) pass through wire (44) respectively with external power source's two poles of the earth electric connection.

3. The intelligent cutting device for the injection molding plate wire used for agricultural power machinery processing according to claim 2, wherein: when the first electric connecting piece (41) is contacted with the second electric connecting piece (43), the insulating spring (42) is always in a pressed state.

4. The intelligent cutting device for the injection molding plate wire used for the agricultural power machinery processing according to claim 1, wherein: the side plate rigid coupling that box (11) are close to each other has mounting box (51), mounting box (51) are located and are equipped with disc (52) on the outside curb plate of box (11), the center rigid coupling of disc (52) has scrapes cover (53), resistance wire (2) sliding connection scrapes cover (53) in, and resistance wire (2) pass mounting box (51) and enter into in box (11).

5. The intelligent cutting device for the injection molding plate wire used for agricultural power machinery processing according to claim 4, wherein: disc (52) rotate with mounting box (51) and are connected, and the even rigid coupling of inner wall circumference of disc (52) has electrical pole (61), and the curb plate inner wall symmetry rigid coupling has curved permanent magnet (62), two around mounting box (51) the polarity of permanent magnet (62) is opposite, curb plate inner wall symmetry rigid coupling has power generation pole (63) of directional resistance wire (2) around box (11), power generation pole (63) and electrical pole (61) electric connection, the position that corresponds disc (52) in the outside of box (11) is equipped with scraper blade (64).

6. The intelligent cutting device for the injection molding plate wire used for agricultural power machinery processing according to claim 5, wherein: the utility model discloses a vibration damping device, including box (11), the curb plate outer wall of box (11) corresponds disc (52) position front and back symmetry rigid coupling has extension board (65), extension board (65) are located the top of disc (52), and the rigid coupling has slide bar (66) between extension board (65), the top rigid coupling of scraper blade (64) has slider (67), slider (67) and slide bar (66) sliding connection, the cover is equipped with vibrations spring (68) on slide bar (66) between slider (67) and extension board (65).

7. The intelligent cutting device for the injection molding plate wire used for the agricultural power machinery processing of claim 6, wherein: an electrostatic chuck (71) is arranged at the position, corresponding to the disc (52), of the upper surface of the base (1).

8. The intelligent cutting device for the injection molding plate wire used for the agricultural power machinery processing of claim 7, wherein: the novel automatic sealing device is characterized in that a transmission cavity (72) is formed in the base (1) corresponding to the position of the electrostatic chuck (71), one end, far away from the synchronous motor (31), of the output shaft (33) extends into the transmission cavity (72) and is fixedly connected with a driving bevel gear (73), the transmission cavity (72) is sealed through a partition plate (74), a rubber ring (75) is fixedly connected to the upper surface of the partition plate (74), a shaft rod (76) is rotatably connected to the partition plate (74), a driven bevel gear (77) is fixedly connected to the bottom of the shaft rod (76), the driven bevel gear (77) is meshed with the driving bevel gear (73), the electrostatic chuck (71) is fixedly connected to the top of the shaft rod (76), the lower surface of the electrostatic chuck (71) is in contact with the rubber ring (75), and a fur layer is glued to the outer surface of the electrostatic chuck (71).

Technical Field

The invention relates to the technical field of intelligent agricultural power machine production, in particular to an injection molding plate linear cutting device for intelligent agricultural power machine processing.

Background

Agricultural power machinery refers to machinery for providing motive power for agricultural production, agricultural and sideline product processing, farmland construction, agricultural transportation and various agricultural facilities, various internal combustion engines (diesel engines, gasoline engines, gas engines and the like), tractors, motors, water turbines, wind turbines and the like are commonly used, and the agricultural power machinery replaces manpower and animal power with electromechanical power, can improve labor productivity, reduce labor intensity, enhance natural disaster resistance, complete various agricultural operations in time, and has a remarkable effect on improving yield.

Modern agriculture emphasizes the effect of the Internet of things, big data and artificial intelligence on the intelligent improvement of agricultural machinery equipment, particularly the neural network, algorithm, learning and the like in the artificial intelligence play an important role in improving the intelligence of the agricultural machinery equipment.

The blade type cutting machine in the prior art is easy to generate a large amount of floating dust when the plates are cut and machined, the cutting efficiency is poor, and the straightness accuracy during cutting is poor, so that the invention provides a device for wire cutting by using a resistance wire.

Disclosure of Invention

In order to solve the problems, the invention provides an injection molding plate wire cutting device for intelligent agricultural power machinery processing, which is realized by the following technical scheme.

An injection molding plate wire cutting device for intelligent agricultural power machinery processing comprises a base, a resistance wire and a driving mechanism; the upper surface of the base is fixedly connected with box bodies in a bilateral symmetry mode, two ends of the resistance wire extend into the box bodies on the left side and the right side respectively, sliding columns are fixedly connected with two ends of the resistance wire, sleeves are fixedly connected to the inner walls of the side plates of the box bodies, which are opposite to the sliding columns, the sliding columns are connected in the corresponding sleeves in a sliding mode, and two ends of the resistance wire are electrically connected with an external power supply;

the driving mechanism comprises a synchronous motor and a sliding seat; synchronous machine rigid coupling is equipped with the output shaft in the left and right sides of base, and the synchronous setting, the output shaft rotates to be connected in the base, the box covers the base upper surface that closes the region and has seted up the track groove, and the rigid coupling has reciprocal lead screw on the output shaft of track groove position, and the track inslot rigid coupling of both sides has the guide bar around the reciprocal lead screw, slide sliding connection is in the track groove, slide and guide bar sliding connection and with reciprocal lead screw meshing, the rigid coupling has the otic placode on the slip post, the bottom of otic placode is connected with the last fixed surface of slide.

Furthermore, the sliding column and the sleeve are made of insulating materials, a first electric connecting piece is fixedly connected to one end, located in the sleeve, of the sliding column, the resistance wire is wrapped in the sliding column, the head of the resistance wire is electrically connected with the first electric connecting piece, a second electric connecting piece is further electrically connected in the sleeve through an insulating spring, and the second electric connecting pieces are respectively electrically connected with the two poles of an external power source through wires.

Further, when the first electric connecting piece is contacted with the second electric connecting piece, the insulating spring is always in a pressed state.

Furthermore, a mounting box is fixedly connected to side plates, close to each other, of the box body, a disc is arranged on the side plate, located outside the box body, of the mounting box, a scraping sleeve is fixedly connected to the center of the disc, the resistance wire is connected in the scraping sleeve in a sliding mode, and the resistance wire penetrates through the mounting box to enter the box body.

Furthermore, the disc is rotatably connected with the mounting box, the electric connecting rods are fixedly connected to the circumference of the inner wall of the disc uniformly, arc-shaped permanent magnets are fixedly connected to the inner walls of the front side plate and the rear side plate of the mounting box symmetrically, the polarities of the two permanent magnets are opposite, the electric generating rods of the directional resistance wire are fixedly connected to the inner walls of the front side plate and the rear side plate of the box symmetrically, the electric generating rods are electrically connected with the electric connecting rods, and scraping plates are arranged at the positions, corresponding to the disc, of the outer side of the box.

Furthermore, support plates are symmetrically and fixedly connected to the front and back of the outer wall of the side plate of the box body corresponding to the position of the disc, the support plates are located above the disc, a sliding rod is fixedly connected between the support plates, a sliding block is fixedly connected to the top of the scraping plate, the sliding block is connected with the sliding rod in a sliding mode, and a vibration spring is sleeved on the sliding rod between the sliding block and the support plates.

Furthermore, an electrostatic chuck is arranged at the position, corresponding to the disc, of the upper surface of the base.

Furthermore, a transmission cavity is formed in the base corresponding to the position of the electrostatic chuck, one end, far away from the synchronous motor, of the output shaft extends into the transmission cavity and is fixedly connected with a driving bevel gear, the transmission cavity is sealed through a partition plate, a rubber ring is fixedly connected to the upper surface of the partition plate, a shaft rod is rotatably connected to the partition plate, a driven bevel gear is fixedly connected to the bottom of the shaft rod and is meshed with the driving bevel gear, the electrostatic chuck is fixedly connected to the top of the shaft rod, the lower surface of the electrostatic chuck is in contact with the rubber ring, and a fur layer is glued to the outer surface of the electrostatic chuck.

The invention has the following beneficial effects:

1. the sliding columns which drive the left side and the right side through the driving mechanism move in the corresponding sleeves in a reciprocating mode, so that the resistance wire is driven to move left and right, the two ends of the resistance wire are powered through an external power supply, the heating resistance wire which moves in a reciprocating mode carries out wire cutting on the injection molding plate, the heating resistance wire which generates heat is used for cutting, the injection molding plate at the cutting position is made to melt, and therefore the cutting efficiency is improved.

The synchronous motor of the left and right sides drives the output shaft to rotate when working, and then the reciprocating screw rod fixedly connected with the output shaft rotates, because the slide seat is limited and guided by the guide rod and is meshed in the slide seat, when the reciprocating screw rod rotates, the slide seat moves left and right in a reciprocating manner, and the slide seat and the sliding columns are fixedly connected through the lug plates, so that the sliding columns on the left and right sides synchronously move in a reciprocating manner, and then the resistance wire is driven to move in a reciprocating manner.

2. The second electricity connecting pieces on the left side and the right side are respectively connected with two poles of an external power supply through leads, and under the action of the insulating springs, the second electricity connecting pieces are always in contact with the first electricity connecting pieces, so that the sliding columns drive the resistance wires to reciprocate, the two ends of the resistance wires are always electrically connected with the external power supply, and the reliability of electricity connection of the resistance wires is guaranteed.

3. The resistance wire is at the in-process that carries out the wire cutting, can the adhesion mould plastics impurity after the plate melts on it, through the setting of scraping the cover for the resistance wire is at reciprocating motion's in-process, scrapes down impurity on it through scraping the cover, keeps the cleanliness factor of resistance wire, improves the quality of wire cutting.

4. Because the resistance wire is the circular telegram electric wire that resistance is great, it is at the in-process of circular telegram, can produce the magnetic field of spiral around it, and because it moves about reciprocating to just to the motion of cutting the magnetic induction line is made to the power generation pole of resistance wire, thereby can produce induced current and carry on the power generation pole on, because the reciprocating motion about the resistance wire, thereby produce the electric current of constantly transferring the direction on the power connection pole, owing to set up two relative permanent magnets with opposite polarity again, thereby the permanent magnet drives the integrative structure rotation of power connection pole and disc.

The impurities scraped by the scraping sleeve can be partially adhered to the disc, and the impurities on the disc can be scraped by the scraping plate.

Through the setting of vibrations spring for the scraper blade can be continuous the emergence shake at the in-process of scraping the ash, thereby shakes off the impurity on it.

5. The impurity that will scrape through the electrostatic chuck adsorbs, avoids flying upward of impurity, drives the rotation of drive bevel gear when the output shaft rotates, rotates with the driven bevel gear of drive bevel gear meshing to axostylus axostyle and electrostatic chuck rotate, because the veneer has the fur layer on the electrostatic chuck, and electrostatic chuck and rubber ring contact, rub with the rubber ring when the electrostatic chuck rotates, thereby make the last static that produces of electrostatic chuck, thereby improve its effect of adsorbing impurity.

Drawings

In order to more clearly illustrate the technical solution of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without inventive labor.

FIG. 1: the invention discloses a structural schematic diagram of an injection molding plate wire-electrode cutting device for intelligent agricultural power machinery processing;

FIG. 2: the internal structure of the box body is schematically shown;

FIG. 3: the internal transmission schematic diagram of the track groove and the transmission cavity is shown;

FIG. 4: the internal structure of the sleeve is schematic;

FIG. 5: the internal structure of the mounting box is schematic;

FIG. 6: the resistance wire of the invention passes through the structural schematic diagram of the scraping sleeve;

FIG. 7: FIG. 1 shows a close-up view at A;

FIG. 8: the invention relates to a cross section of the positions of a track groove and a transmission cavity.

The reference numbers are as follows:

1-a base, 11-a box body,

2-resistance wire, 21-sliding column, 22-sleeve,

31-synchronous motor, 32-slide seat, 33-output shaft, 34-track groove, 35-reciprocating screw rod, 36-guide rod, 37-lug plate,

41-a first electric connecting piece, 42-an insulating spring, 43-a second electric connecting piece, 44-a conducting wire,

51-mounting box, 52-disc, 53-scraping sleeve,

61-connecting electric rod, 62-permanent magnet, 63-generating rod, 64-scraping plate, 65-support plate, 65-sliding rod, 66-sliding block, 67-vibration spring,

71-electrostatic chuck, 72-transmission cavity, 73-driving bevel gear, 74-clapboard, 75-rubber ring, 76-shaft rod, 77-driven bevel gear.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As shown in fig. 1 to 8, the present invention has the following five embodiments.

Example 1

An injection molding plate wire cutting device for intelligent agricultural power machinery processing comprises a base 1, a resistance wire 2 and a driving mechanism; the upper surface of the base 1 is fixedly connected with box bodies 11 in a bilateral symmetry mode, two ends of the resistance wire 2 respectively extend into the box bodies 11 on the left side and the right side, two ends of the resistance wire 2 are fixedly connected with sliding columns 21, the inner wall of a side plate of the box body 11, which is opposite to the sliding columns 21, is fixedly connected with sleeves 22, the sliding columns 21 are connected in the corresponding sleeves 22 in a sliding mode, and two ends of the resistance wire 2 are electrically connected with an external power supply;

the driving mechanism comprises a synchronous motor 31 and a sliding seat 32; the synchronous motor 31 is fixedly connected to the left side and the right side of the base 1, the output shaft 33 is synchronously arranged, the output shaft 33 is rotatably connected in the base 1, the upper surface of the base 1 in the area covered by the box body 11 is provided with a track groove 34, the output shaft 33 at the position of the track groove 34 is fixedly connected with a reciprocating screw rod 35, guide rods 36 are fixedly connected in the track grooves 34 on the front side and the rear side of the reciprocating screw rod 35, the sliding seat 32 is slidably connected in the track groove 34, the sliding seat 32 is slidably connected with the guide rods 36 and meshed with the reciprocating screw rod 35, the sliding column 21 is fixedly connected with an ear plate 37, and the bottom of the ear plate 37 is fixedly connected with the upper surface of the sliding seat 32.

In this embodiment:

slide post 21 through actuating mechanism drive the left and right sides in the sleeve 22 that corresponds reciprocating motion to control about driving resistance wire 2, and the both ends of resistance wire 2 are through external power supply, and then carry out the line cutting to the injection molding plate through reciprocating motion's heating resistor wire 2, cut through the resistance wire 2 that generates heat, make the injection molding plate of cutting position melt, thereby improve the efficiency of cutting.

The synchronous motors 31 on the left and right sides drive the output shaft 33 to rotate when working, and then the reciprocating screw rod 35 fixedly connected with the output shaft 33 rotates, and the slide base 32 is limited, guided and meshed in the slide base 32 through the guide rod 36, therefore, when the reciprocating screw rod 35 rotates, the slide base 32 moves left and right in a reciprocating manner, and the slide base 32 and the slide column 21 are fixedly connected through the lug plate 37, therefore, the slide columns 21 on the left and right sides synchronously move in a reciprocating manner, and further the resistance wire 2 is driven to move in a reciprocating manner.

Example 2

The difference from embodiment 1 is that the following is also included:

the sliding column 21 and the sleeve 22 are made of insulating materials, one end of the sliding column 21, which is located in the sleeve 22, is fixedly connected with a first electric connection piece 41, the resistance wire 2 is wrapped in the sliding column 21, the head of the resistance wire 2 is electrically connected with the first electric connection piece 41, a second electric connection piece 43 is further electrically connected in the sleeve 22 through an insulating spring 42, and the two second electric connection pieces 43 are respectively electrically connected with two poles of an external power supply through a lead 44.

Preferably, the insulation spring 42 is always in a pressed state when the first electric contact 41 and the second electric contact 43 are contacted.

In this embodiment:

the second electricity connecting pieces 43 on the left side and the right side are respectively connected with two poles of an external power supply through leads 44, and under the action of the insulating springs 42, the second electricity connecting pieces 43 are always in contact with the first electricity connecting pieces 41, so that in the process that the sliding column 21 drives the resistance wire 2 to reciprocate, two ends of the resistance wire 2 are always electrically connected with the external power supply, and the reliability of electricity connection of the resistance wire 2 is ensured.

Example 3

The difference from embodiment 2 is that the following contents are also included:

the side plates of the box body 11, which are close to each other, are fixedly connected with a mounting box 51, the mounting box 51 is provided with a circular disc 52 on the side plate outside the box body 11, the center of the circular disc 52 is fixedly connected with a scraping sleeve 53, the resistance wire 2 is slidably connected in the scraping sleeve 53, and the resistance wire 2 penetrates through the mounting box 51 and enters the box body 11.

In this embodiment:

resistance wire 2 can the adhesion mould plastics impurity after the plate melts on it at the in-process that carries out the wire-electrode cutting, through the setting of scraping cover 53 for resistance wire 2 is at reciprocating motion's in-process, scrapes down the impurity on it through scraping cover 53, keeps the cleanliness factor of resistance wire 2, improves the quality of wire-electrode cutting.

Example 4

The difference from embodiment 3 is that the following is also included:

the disc 52 is rotatably connected with the mounting box 51, the circumference of the inner wall of the disc 52 is uniformly and fixedly connected with an electric connection rod 61, the inner walls of the front and rear side plates of the mounting box 51 are symmetrically and fixedly connected with arc-shaped permanent magnets 62, the polarities of the two permanent magnets 62 are opposite, the inner walls of the front and rear side plates of the box body 11 are symmetrically and fixedly connected with a power generation rod 63 pointing to the resistance wire 2, the power generation rod 63 is electrically connected with the electric connection rod 61, and a scraper plate 64 is arranged at the position, corresponding to the disc 52, of the outer side of the box body 11.

Preferably, support plates 65 are symmetrically and fixedly connected to the outer wall of the side plate of the box body 11 in front and back directions corresponding to the position of the disc 52, the support plates 65 are located above the disc 52, slide rods are fixedly connected between the support plates 65, a slide block 66 is fixedly connected to the top of the scraping plate 64, the slide block 66 is slidably connected with the slide rods, and a vibration spring 67 is sleeved on the slide rods between the slide block 66 and the support plates 65.

In this embodiment:

because resistance wire 2 is the circular telegram electric wire that resistance is great, its in the circular telegram in-process, can produce spiral magnetic field around it, and because its reciprocal left-right movement to just do the motion of cutting magnetic induction line to the electric pole 63 of resistance wire 2, thereby can produce induced current on the electric pole 63 and carry on the electric pole 61, because resistance wire 2 left-right reciprocating motion, thereby produce the electric current of constantly turning direction on the electric pole 61, owing to set up two relative permanent magnets 62 with opposite polarity again, thereby permanent magnet 62 drives the integrative structure rotation of electric pole 61 and disc 52.

The foreign substances scraped by the scraping sleeve 53 are partially adhered to the disc 52, and the foreign substances on the disc 52 can be scraped by the scraping plate 64.

Through the arrangement of the vibration spring 67, the scraping plate 64 can continuously shake in the ash scraping process, so that impurities on the scraping plate can be shaken off.

Example 5

The difference from embodiment 4 is that the following is also included:

the upper surface of the base 1 is provided with an electrostatic chuck 71 at a position corresponding to the disk 52.

Preferably, a transmission cavity 72 is formed in the base 1 corresponding to the position of the electrostatic chuck 71, one end of the output shaft 33, which is far away from the synchronous motor 31, extends into the transmission cavity 72 and is fixedly connected with a driving bevel gear 73, the transmission cavity 72 is sealed through a partition 74, the upper surface of the partition 74 is fixedly connected with a rubber ring 75, the partition 74 is rotatably connected with a shaft rod 76, the bottom of the shaft rod 76 is fixedly connected with a driven bevel gear 77, the driven bevel gear 77 is meshed with the driving bevel gear 73, the electrostatic chuck 71 is fixedly connected to the top of the shaft rod 76, the lower surface of the electrostatic chuck 71 is contacted with the rubber ring 75, and a fur layer is glued on the outer surface of the electrostatic chuck 71.

In this embodiment:

the scraped impurities are adsorbed by the electrostatic chuck 71, so that the impurities are prevented from flying, the output shaft 33 drives the driving bevel gear 73 to rotate when rotating, and the driving bevel gear 73 is meshed with the driven bevel gear 77 to rotate, so that the shaft rod 76 and the electrostatic chuck 71 rotate, a fur layer is glued on the electrostatic chuck 71, the electrostatic chuck 71 is in contact with the rubber ring 75, the electrostatic chuck 71 is rubbed with the rubber ring 75 when rotating, static electricity is generated on the electrostatic chuck 71, and the impurity adsorbing effect is improved.

The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.