阅读说明：本技术 一种半导体级不锈钢管清洗装置 (Semiconductor-grade stainless steel pipe cleaning device ) 是由 朱亚中 苏海英 杨松江 胡海波 沈平 冯凯杰 李明星 黄伟宏 于 2021-09-08 设计创作，主要内容包括：本发明公开了一种半导体级不锈钢管清洗装置,包括清洗箱、放置箱、放置筒、固定板、升降机构、吊钩、吊环、升降装置、喷水盘、喷水管、供水软管、出水管、控制装置,所述清洗箱底部设有一根出水管,出水管上安装有一个第一控制阀,所述清洗箱内设有一个放置箱,放置箱为一个上下两端均开口的箱体,放置箱内设有一块水平设置的固定板,固定板上设有若干个贯穿固定板上下两端的通孔。本发明通过将放置箱在浸泡工作位上下轻微移动使得不锈钢管得到初步清洗,放置箱在冲洗工作位时对不锈钢管清洗冲洗,使得不锈钢管可得到充分的冲洗,整个清洗过程用水较少,冲洗时使用的水可用于下一批不锈钢管的初步清洗,使得水可得到充分的利用。(The invention discloses a semiconductor-grade stainless steel pipe cleaning device which comprises a cleaning box, a placing cylinder, a fixing plate, a lifting mechanism, a lifting hook, a lifting ring, a lifting device, a water spraying disc, a water spraying pipe, a water supply hose, a water outlet pipe and a control device. According to the invention, the stainless steel pipe is preliminarily cleaned by slightly moving the placing box up and down on the soaking working position, and the stainless steel pipe is cleaned and washed when the placing box is in the washing working position, so that the stainless steel pipe can be sufficiently washed, the water used in the whole washing process is less, and the water used in washing can be used for preliminarily cleaning the next batch of stainless steel pipes, so that the water can be sufficiently utilized.)

1. The utility model provides a stainless steel pipe belt cleaning device of semiconductor level which characterized in that: comprises a cleaning box (1), a placing box (2), a placing cylinder (25), a fixing plate (20), a lifting mechanism (3), a lifting hook (33), a lifting ring (24), a lifting device (40), a water spraying disc (4), a water spraying pipe (41), a water supply hose (45), a water outlet pipe (11) and a control device (5), wherein the bottom of the cleaning box (1) is provided with the water outlet pipe (11), the water outlet pipe (11) is provided with a first control valve (12), the cleaning box (1) is internally provided with the placing box (2), the placing box (2) is a box body with upper and lower ends which are both open, the placing box (2) is internally provided with the fixing plate (20) which is horizontally arranged, the fixing plate (20) is provided with a plurality of through holes (21) which penetrate through the upper and lower ends of the fixing plate (20), and the placing box (2) is internally provided with a plurality of vertically arranged placing cylinders (25), a placing cylinder (25) penetrates through the fixing plate (20) and is fixed with the fixing plate (20), the upper end and the lower end of the placing cylinder (25) are provided with openings, the side wall, close to the bottom, of the placing cylinder (25) is provided with a plurality of elastic convex strips (26), each placing cylinder (25) is internally provided with a stainless steel pipe, the outer diameter of each stainless steel pipe is smaller than the inner diameter of the placing cylinder (25), each elastic convex strip (26) supports the bottom end of each stainless steel pipe, the top end of each stainless steel pipe is positioned inside the placing cylinder (25), the outer wall of the placing box (2) is provided with a plurality of lifting rings (24), the top of the cleaning box (1) is provided with a mounting frame (30), a plurality of lifting mechanisms (3) which correspond to the lifting rings (24) one by one, the tail ends of the lifting mechanisms (3) are hinged with a lifting hook (33), the lifting rings (24) are hooked by the lifting hook (33), and a water spraying disc (4) is arranged above the placing box (2), the water spraying disc (4) is connected with a water supply hose (45), the water supply hose (45) is connected with a water supply device, the water spraying disc (4) is connected with a lifting device (40), the lifting device (40) is installed on an installation frame (30), a plurality of water spraying pipes (41) which correspond to the placing cylinders (25) one by one are installed at the bottom of the water spraying disc (4), the water spraying pipes (41) can be sleeved on the corresponding placing cylinders (25), the water spraying pipes (41) are communicated with the water spraying disc (4), the placing box (2) is provided with three working positions of a soaking working position, a flushing working position and a taking working position from bottom to top, the placing box (2) is completely immersed by liquid in the cleaning box (1) when the placing box (2) is at the soaking working position, the placing box (2) is positioned above the liquid level in the cleaning box (1) when the placing box (2) is at the flushing working position, and the lifting device (40) can drive the water spraying disc (4) to enable the water spraying pipes (41) to be sleeved on the placing cylinders (25), the placing box (2) is completely positioned outside the cleaning box (1) when the placing box (2) is positioned at the workpiece taking working position, and the lifting mechanism (3), the lifting device (40), the water supply device and the first control valve (12) are controlled by the control device (5).

2. The apparatus of claim 1, wherein the cleaning device comprises: the lifting mechanism (3) consists of a winch (31) and a steel rope (32), the steel rope (32) winds around the winch (31), and a hook (33) is installed at the tail end of the steel rope (32).

3. The apparatus of claim 1, wherein the cleaning device comprises: the lifting device (40) is an air cylinder with a pressure sensing device.

4. The apparatus of claim 1, wherein the cleaning device comprises: the inner wall of the water spraying pipe (41) is provided with a ring of stop ring (42), the inner diameter of the stop ring (42) is slightly smaller than that of the placing barrel (25), and the bottom end of the stop ring (42) is fixed with an elastic pad (43).

5. The apparatus of claim 1, wherein the cleaning device comprises: be equipped with a overflow pipe (15) on the lateral wall of wasing case (1), overflow pipe (15) are less than the bottom of placing case (2) of washing the work position, be equipped with a second control valve (16) on overflow pipe (15), overflow pipe (15) link to each other with a liquid storage box (17), liquid storage box (17) link to each other with a water pump (18), the play liquid end of water pump (18) even has a connecting pipe (19), connecting pipe (19) link to each other with wasing case (1), second control valve (16) and water pump (18) are controlled by controlling means (5).

6. The apparatus of claim 1, wherein the cleaning device comprises: the cleaning box is characterized in that a circle of fixing rings (22) are arranged on the outer wall of the placing box (2), a plurality of guide holes (23) are formed in the fixing rings (22), a plurality of guide rods (13) which are vertically arranged are arranged in the cleaning box (1), the guide rods (13) upwards penetrate through the guide holes (23), the guide rods (13) are staggered with the hanging rings (24), and the guide rods (13) still penetrate through the guide holes (23) when the placing box (2) is located at a flushing work position.

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of stainless steel pipes, in particular to the technical field of cleaning devices.

[ background of the invention ]

After the precise stainless steel pipe in the semiconductor industry is subjected to machining, welding and other working procedures, a large number of scratches and polishing marks are generated on the surface of the precise stainless steel pipe, so that the surface treatment of the precise stainless steel pipe in the semiconductor industry is one of effective ways for prolonging the service life of the precise stainless steel pipe. The stainless steel pipe needs to be cleaned after passivation in the passivation tank, the cleaning effect of the existing cleaning equipment is not ideal enough, and passivation solution residues can be generated.

[ summary of the invention ]

The invention aims to solve the problems in the prior art and provides a semiconductor-grade stainless steel pipe cleaning device which can thoroughly clean a stainless steel pipe and is not easy to leave passivation solution.

In order to achieve the purpose, the invention provides a semiconductor grade stainless steel pipe cleaning device which comprises a cleaning box, a placing cylinder, a fixed plate, a lifting mechanism, a lifting hook, a lifting ring, a lifting device, a water spraying disc, a water spraying pipe, a water supply hose, a water outlet pipe and a control device, wherein the bottom of the cleaning box is provided with the water outlet pipe, the water outlet pipe is provided with a first control valve, the cleaning box is internally provided with the placing box, the placing box is a box body with openings at the upper end and the lower end, the placing box is internally provided with a horizontally arranged fixed plate, the fixed plate is provided with a plurality of through holes penetrating through the upper end and the lower end of the fixed plate, the placing cylinder is vertically arranged and penetrates through the fixed plate and is fixed with the fixed plate, the upper end and the lower end of the placing cylinder are both opened, and the side wall of the placing cylinder close to the bottom is provided with a plurality of elastic convex strips, every places a nonrust steel pipe in the section of thick bamboo, and the external diameter of nonrust steel pipe is less than the internal diameter of placing a section of thick bamboo, and the elasticity sand grip supports the bottom of nonrust steel pipe, and the top of nonrust steel pipe is located the inside of placing a section of thick bamboo, it is equipped with a plurality of rings on the outer wall of case to place, and the top of washing case is equipped with a mounting bracket, installs the elevating system of a plurality of and rings one-to-one on the mounting bracket, and elevating system's end articulates there is a lifting hook, and the lifting hook hooks rings, it is equipped with a water spray dish to place the case top, and the water spray dish links to each other with a water supply hose, and the water supply hose links to each other with water supply equipment, and the water spray dish links to each other with an elevating system, and elevating system installs on the mounting bracket, and a plurality of spray pipes and the spray pipe one-to-one of placing a section of thick bamboo are installed to the bottom of water spray dish, and the spray pipe can overlap on corresponding placing a section of thick bamboo, and the water spray pipe is linked together, it has from bottom upwards to place the case and soak the position, The washing working position, the three operating position of a work position of getting, place the case and be in when soaking the work position place the case by the complete submergence of the liquid of wasing the incasement, place the case and be located when washing the work position place the case and wash incasement liquid level top and elevating gear can drive the spray water dish and make the spray pipe cover place a section of thick bamboo on, place the case and be in when getting the work position place the case and be located the outside of wasing the case completely, elevating gear, water supply installation, first control valve are controlled by controlling means.

Preferably, the lifting mechanism comprises a winch and a steel rope, the steel rope is wound on the winch, and the lifting hook is installed at the tail end of the steel rope.

Preferably, the lifting device is a cylinder with a pressure sensing device.

Preferably, a circle of stop ring is arranged on the inner wall of the water spraying pipe, the inner diameter of the stop ring is slightly smaller than that of the placing cylinder, and an elastic pad is fixed at the bottom end of the stop ring.

Preferably, a overflow pipe is arranged on the side wall of the cleaning box and is lower than the bottom end of the washing work position, the bottom end of the washing work position is arranged at the bottom end of the washing work position, a second control valve is arranged on the overflow pipe, the overflow pipe is connected with a liquid storage box, the liquid storage box is connected with a water pump, a liquid outlet end of the water pump is connected with a connecting pipe, the connecting pipe is connected with the cleaning box, and the second control valve and the water pump are controlled by a control device.

Preferably, the outer wall of the placing box is provided with a circle of fixing rings, the fixing rings are provided with a plurality of guide holes, a plurality of guide rods which are vertically arranged are arranged in the cleaning box, the guide rods upwards penetrate through the guide holes and are staggered with the hanging rings, and the guide rods still penetrate through the guide holes when the placing box is located at the flushing work position.

The invention has the beneficial effects that: according to the invention, the stainless steel pipe is preliminarily cleaned by slightly moving the placing box up and down on the soaking working position, and the stainless steel pipe is cleaned and washed when the placing box is in the washing working position, so that the stainless steel pipe can be sufficiently washed, the water used in the whole washing process is less, and the water used in washing can be used for preliminarily cleaning the next batch of stainless steel pipes, so that the water can be sufficiently utilized.

The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.

[ description of the drawings ]

FIG. 1 is a front view of a semiconductor grade stainless steel pipe cleaning apparatus of the present invention.

In the figure: 1-cleaning box, 2-placing box, 3-lifting mechanism, 4-water spray disk, 5-control device, 11-water outlet pipe, 12-first control valve, 13-guide bar, 15-overflow pipe, 16-second control valve, 17-liquid storage box, 18-water pump, 19-connecting pipe, 20-fixing plate, 21-through hole, 22-fixing ring, 23-guide hole, 24-hanging ring, 25-placing cylinder, 26-elastic raised line, 30-mounting frame, 31-windlass, 32-steel rope, 33-lifting hook, 40-lifting device, 41-water spray pipe, 42-blocking ring, 43-elastic cushion and 45-water supply hose.

[ detailed description ] embodiments

Referring to fig. 1, the semiconductor grade stainless steel pipe cleaning device of the invention comprises a cleaning box 1, a placing box 2, a placing cylinder 25, a fixing plate 20, a lifting mechanism 3, a lifting hook 33, a lifting ring 24, a lifting device 40, a water spraying disc 4, a water spraying pipe 41, a water supply hose 45, a water outlet pipe 11 and a control device 5, wherein the bottom of the cleaning box 1 is provided with the water outlet pipe 11, the water outlet pipe 11 is provided with a first control valve 12, the cleaning box 1 is internally provided with the placing box 2, the placing box 2 is a box body with openings at the upper and lower ends, the placing box 2 is internally provided with the fixing plate 20 which is horizontally arranged, the fixing plate 20 is provided with a plurality of through holes 21 which penetrate through the upper and lower ends of the fixing plate 20, the placing box 2 is internally provided with a plurality of vertically arranged placing cylinders 25, the placing cylinders 25 penetrate through the fixing plate 20 and are fixed with the fixing plate 20, the upper and lower ends of the placing cylinders 25 are open, a plurality of elastic raised strips 26 are arranged on the side wall, close to the bottom, of each placing barrel 25, a stainless steel pipe is placed in each placing barrel 25, the outer diameter of each stainless steel pipe is smaller than the inner diameter of each placing barrel 25, each elastic raised strip 26 supports the bottom end of each stainless steel pipe, the top end of each stainless steel pipe is positioned in each placing barrel 25, a plurality of lifting rings 24 are arranged on the outer wall of each placing box 2, a mounting frame 30 is arranged at the top of each cleaning box 1, a plurality of lifting mechanisms 3 which correspond to the lifting rings 24 one by one are mounted on the mounting frame 30, the tail ends of the lifting mechanisms 3 are hinged with lifting hooks 33, the lifting hooks 33 hook the lifting rings 24, a water spray disk 4 is arranged above each placing box 2, the water spray disk 4 is connected with a water supply hose 45, the water supply hose 45 is connected with a water supply device, the water spray disk 4 is connected with a lifting device 40, the lifting device 40 is mounted on the mounting frame 30, a plurality of water spray pipes 41 which correspond to the placing barrels 25 one by one, the water spraying pipe 41 can be sleeved on the corresponding placing cylinder 25, the water spraying pipe 41 is communicated with the water spraying disc 4, the placing box 2 is provided with three working positions of a soaking working position, a washing working position and a taking working position from bottom to top, the placing box 2 is completely immersed by liquid in the cleaning box 1 when the placing box 2 is in the soaking working position, the placing box 2 is positioned above the liquid level in the cleaning box 1 when the placing box 2 is in the washing working position, the lifting device 40 can drive the water spraying disc 4 to enable the water spraying pipe 41 to be sleeved on the placing cylinder 25, the placing box 2 is completely positioned outside the cleaning box 1 when the placing box 2 is in the taking working position, the lifting mechanism 3, the lifting device 40, the water supply device and the first control valve 12 are controlled by the control device 5, the lifting mechanism 3 consists of a winch 31 and a steel rope 32, the steel rope 32 is wound on the winch 31, a lifting hook 33 is arranged at the tail end of the steel rope 32, the lifting device 40 is an air cylinder with a pressure sensing device, a circle of stop ring 42 is arranged on the inner wall of the spray pipe 41, the inner diameter of the stop ring 42 is slightly smaller than the inner diameter of the placing cylinder 25, an elastic cushion 43 is fixed at the bottom end of the stop ring 42, a spilled liquid pipe 15 is arranged on the side wall of the cleaning box 1, the spilled liquid pipe 15 is lower than the bottom end of the placing box 2 at a flushing working position, a second control valve 16 is arranged on the spilled liquid pipe 15, the spilled liquid pipe 15 is connected with a liquid storage box 17, the liquid storage box 17 is connected with a water pump 18, the liquid outlet end of the water pump 18 is connected with a connecting pipe 19, the connecting pipe 19 is connected with the cleaning box 1, the second control valve 16 and the water pump 18 are controlled by a control device 5, a circle of fixing ring 22 is arranged on the outer wall of the placing box 2, a plurality of guide holes 23 are arranged on the fixing ring 22, a plurality of guide rods 13 which are vertically arranged are arranged in the cleaning box 1, the guide rod 13 penetrates through the guide hole 23 upwards, the guide rod 13 is staggered with the hanging ring 24, and the guide rod 13 still penetrates through the guide hole 23 when the placing box 2 is in the flushing working position.

The working process of the invention is as follows:

in the working process of the semiconductor-grade stainless steel pipe cleaning device, the placing box 2 slightly moves up and down in the soaking working position to primarily clean the stainless steel pipes, the placing box 2 cleans and washes the stainless steel pipes in the washing working position to fully wash the stainless steel pipes, the water used in the whole cleaning process is less, and the water used in the washing process can be used for primarily cleaning the next batch of stainless steel pipes, so that the water can be fully utilized.

The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.