阅读说明：本技术 一种平行板反应器中相对位置及平行状态检测的装置及检测方法 (Device and method for detecting relative position and parallel state in parallel plate reactor ) 是由 谭华强 于 2020-06-04 设计创作，主要内容包括：本发明属于检测技术领域,具体提供了一种平行板反应器中相对位置及平行状态检测的装置,用于检测两个平行板之间中心的相对位置以及平行度状态,该测量装置通过摄像头以及3组位移传感器,可以有效的对平行板反应器腔体内,完成两个平行板的中心相对位置及平行度的测量,为对平行板的位置调整提供了数据支撑。且该检测能够在完全无接触的情况下针对封闭墙体内的情况进行监测,无需机械接触定位辅助装置,两个平行板中心位置及平行度测量能够在真空下进行,无需解除腔体真空条件,该检测装置的适应性更强。(The invention belongs to the technical field of detection, and particularly provides a device for detecting the relative position and the parallel state of the centers of two parallel plates in a parallel plate reactor, which is used for detecting the relative position and the parallel state of the centers of the two parallel plates. And this detection can monitor to the condition in the enclosure wall under the complete contactless condition, need not mechanical contact location auxiliary device, and two parallel plate central point put and depth of parallelism measurement can be gone on under the vacuum, need not to relieve cavity vacuum condition, and this detection device's adaptability is stronger.)

1. A device for detecting relative position and parallel state in a parallel plate reactor is characterized in that: comprises a substrate, a positioning system, a sensing system and a data processing system,

the substrate is used for bearing the sensing system and has thickness, and circular grooves are concentrically recessed in the centers of the upper end face and the lower end face;

the positioning system includes one or more sets of features for confirming relative position;

the sensing system comprises a group of cameras which are respectively used for acquiring the central mark position information of the two parallel plates; the three sets of displacement sensors are respectively used for acquiring the distance between the displacement sensors and the opposite parallel plates; the wireless communication module is used for transmitting the acquired digital signals;

and the data processing system is used for receiving and processing the position information acquired by the camera and the sensor to calculate the relative position of the two parallel plate marks and the parallel state between the two parallel plates and provide result output.

2. The apparatus for relative position and parallel condition detection in a parallel plate reactor of claim 1, wherein: the sensing system also comprises a signal acquisition and processing system matched with the camera and used for converting the characteristic mark position analog signals acquired by the camera into digital signals; and the signal acquisition and processing system is matched with the displacement sensor and is used for converting the analog signals acquired by the displacement sensor into digital signals.

3. The apparatus for relative position and parallel condition detection in a parallel plate reactor of claim 2, wherein: the sensing system also comprises a data caching module used for storing the converted digital signal information.

4. The apparatus for relative position and parallel condition detection in a parallel plate reactor of claim 1, wherein: the base plate comprises a circular bottom plate at the bottom, a sub-circular plate is concentrically arranged on the bottom plate, and three strip plates are uniformly arranged along the circumferential direction of the sub-circular plate; concave circular grooves are formed in the circle centers of the upper end surface and the lower end surface of the substrate; the group of cameras are arranged back to back at the circular groove in the center of the substrate; the three sets of displacement sensors are uniformly arranged on the outer edge close to the substrate and on a pitch circle taking the central axis of the substrate as the center.

5. The apparatus for relative position and parallel condition detection in a parallel plate reactor of claim 1, wherein: the wireless communication module and the sensing system are used for receiving the wireless communication signals and transmitting the wireless communication signals to the sensing system.

6. The apparatus for relative position and parallel condition detection in a parallel plate reactor of claim 1, wherein: the camera is provided with an LED illuminating system in a matching way, and the illuminating system is formed by uniformly distributing a plurality of LED particles on a pitch circle which takes the optical axis of the corresponding camera as the center.

7. An apparatus for relative position and parallel condition detection in a parallel plate reactor as claimed in claim 5 wherein: the power supply control system further comprises a micro power supply switch, and the power supply control is carried out on the power module for the sensing system through wireless remote control.

8. The apparatus for relative position and parallel condition detection in a parallel plate reactor of claim 1, wherein: the data processing system comprises a wireless communication receiving module, a digital signal processor, a display module, an RAM, an ROM, a data and communication interface connected with a general computer, an embedded software system, a rechargeable power supply and a charging interface.

9. The apparatus for relative position and parallel condition detection in a parallel plate reactor of claim 1, wherein: the reactor is internally provided with a cavity, a spray plate and a heater are oppositely arranged in the cavity, and the centers of the spray plate and the heater are provided with marks.

10. A method for detecting a relative position and a parallel state in a parallel plate reactor, based on any one of the detection devices, based on the reactor, characterized in that: comprises the following steps of (a) carrying out,

step 1: the first camera captures the position information of the reference characteristic mark on the first parallel plate, and the DSP processes the signal and calculates relative coordinates including X1, Y1 and an angle coordinate theta 1 relative to the sensing system;

step 2: the second camera captures the position information of the reference characteristic mark on the second parallel plate, and the DSP processes the signal and calculates relative coordinates including X2, Y2 and an angle coordinate theta 2 relative to the sensing system;

and step 3: the DSP finally calculates the relative center positions of the two parallel plates by comparing the two sets of relative coordinate data;

and 4, step 4: by taking one of the parallel plates as a placing plane and a relative measurement reference of the sensing system, 3 different distance measurement signals can be obtained, and the digital signals of the measurement results are converted into three different distances D1, D2 and D3 by the DSP; the built-in software fits a virtual plane according to the set of data and the relative position coordinates of the displacement sensor to replace the measured parallel plates, so that the parallelism state data between the set of parallel plates, including the inclination angle and the azimuth angle, is obtained.

Technical Field

The invention belongs to the technical field of detection, and particularly provides a device for detecting the relative position and the parallel state in a parallel plate reactor, which is used for detecting the relative position and the parallel state of the center between two parallel plates.

Background

As the process progresses and the various stages of the process require, various gases are often supplied to the reactor. In a gas phase reaction apparatus, it is known that the uniformity of the reaction gas has a significant influence on the uniformity performance and yield of the final product. Whether the centers of two parallel plates in the parallel plate reactor are aligned or not and the parallelism can influence the distribution of reaction gas, the distribution of plasma and the partial pressure in a cavity, thereby influencing the process and the yield of products. It is necessary to perform center position and parallel state detection of the two parallel plates therein before the reactor is operated. The traditional detection method is that observation and adjustment are carried out after the cavity is opened, observation and detection cannot be carried out after the cavity is closed, and the detection method is not suitable for detection in the cavity in a vacuum state.

Disclosure of Invention

In order to solve one of the above problems, the present invention provides a device for detecting the relative position and the parallel state in a parallel plate reactor, which is used for a reactor with two parallel plates and comprises a substrate, a positioning system, a sensing system and a data processing system.

A substrate for carrying the sensing system, the substrate having a thickness, circular grooves concentrically formed in the centers of the upper and lower end surfaces,

the positioning system includes one or more sets of features for confirming relative position;

the sensing system comprises a group of cameras which are respectively used for acquiring the central mark position information of the two parallel plates; the three sets of displacement sensors are respectively used for acquiring displacement distances between the parallel plates opposite to the displacement sensors; the wireless communication module is used for transmitting the acquired digital signals;

and the data processing system is used for receiving and processing the position information acquired by the camera and the sensor to calculate whether the mark between the two parallel plates is in alignment and the parallel state between the two parallel plates.

Furthermore, the sensing system also comprises a signal acquisition and processing system matched with the camera, and the signal acquisition and processing system is used for converting the characteristic mark position analog signals acquired by the camera into digital signals; and the signal acquisition and processing system is matched with the displacement sensor and is used for converting the analog signals acquired by the displacement sensor into digital signals.

Furthermore, the sensing system further comprises a data caching module for storing the converted digital signal information.

Furthermore, the base plate comprises a circular bottom plate at the bottom, a sub-circular plate is concentrically arranged on the bottom plate, and three long strip plates are uniformly arranged along the circumferential direction of the sub-circular plate; concave circular grooves are formed in the circle centers of the upper end surface and the lower end surface of the substrate; the group of cameras are arranged back to back at the circular groove in the center of the substrate; the three sets of displacement sensors are uniformly arranged on the outer edge close to the substrate and on a pitch circle taking the central axis of the substrate as the center.

Furthermore, the wireless communication module further comprises a rechargeable power module and a charging interface which are responsible for charging the wireless communication module and the power utilization module in the sensing system.

Further, the size of the bottom plate of the substrate is 300mm,200mm or 150 mm.

Further, an LED illumination system is matched with each camera, and the specific LED illumination system is formed by uniformly distributing a plurality of LED particles on a pitch circle which takes the optical axis of the corresponding camera as the center.

And the power supply control device further comprises a micro power supply switch, and the power supply control is carried out on the power module for the sensing system through wireless remote control.

Furthermore, the data processing system comprises a wireless communication receiving module which is responsible for receiving the digital information of the sensing system and sending out instructions, and also comprises a digital signal processor, a display module, an RAM, an ROM, a data and communication interface connected with a computer, an embedded software system, a rechargeable power supply and a charging interface.

Furthermore, the reactor is internally provided with a cavity, the cavity is internally and oppositely provided with a spray plate and a heater, the center of each spray plate and the center of each heater are provided with marks, and the device is conveyed between the spray plates and the heaters through a mechanical arm.

According to another aspect of the present invention, there is provided a method for detecting relative position and parallel state in a parallel plate reactor, based on the detection device as described in any one of the above, based on the reactor as described above, comprising the steps of,

step 1: the first camera will capture the position information of the fiducial markers on the first parallel plate and the DSP will process the signals and calculate the relative coordinates including X1, Y1 and angular coordinate θ 1 with respect to the sensing system.

Step 2: the second camera will capture the position information of the fiducial markers on the second parallel plate and the DSP will process the signals and calculate the relative coordinates including X2, Y2 and angular coordinates θ 2 with respect to the sensing system.

And step 3: the DSP finally calculates the relative center positions of the two parallel plates by comparing the two sets of relative coordinate data;

and 4, step 4: by taking one of the parallel plates as a placing plane and a relative measurement reference of the sensing system, 3 different distance measurement signals can be obtained, and the digital signals of the measurement results are converted into three different distances D1, D2 and D3 by the DSP; the built-in software fits a virtual plane according to the set of data and the relative position coordinates of the displacement sensor to replace the measured parallel plates, so that the parallelism state data between the set of parallel plates, including the inclination angle and the azimuth angle, is obtained.

The technical scheme has the advantages that: the measuring device can effectively measure the central relative position and the parallelism of the two parallel plates in the cavity of the parallel plate reactor through the camera and 3 groups of displacement sensors, and provides data support for the position adjustment of the parallel plates. And the detection can be carried out under the condition of no contact completely without a mechanical contact positioning auxiliary device, the measurement of the central position and the parallelism of the two parallel plates can be carried out under vacuum without releasing the vacuum condition of the cavity, and the detection device has stronger adaptability.

Drawings

FIG. 1 is a schematic structural diagram of a detecting device according to the present invention;

FIG. 2 is a schematic cross-sectional view of FIG. 1;

FIG. 3 is an enlarged view of area A in FIG. 2;

FIG. 4 is a schematic view of a heater and center mark;

FIG. 5 is a schematic view of the position of the detecting device and the heater;

FIG. 6 is a schematic view of the position of the detecting device, the heater and the shower plate;

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Referring to fig. 1 to 6, an apparatus for detecting a relative position and a parallel state in a parallel plate reactor is adapted to a reactor having two parallel plates, each parallel plate having a center mark 5, such as a cross pattern, in which a reactor used in this embodiment has a chamber in which a shower plate 6 and a heater 4 are oppositely disposed, and a mark 5 is disposed in the center of each shower plate 6 and heater 4, and is transferred to a designated position between the shower plate 6 and the heater 4 by a wafer handling system or a robot, and detects the relative positions of the center marks 5 of the shower plate 6 and the heater 4, and detects the parallel state therebetween.

The detection device comprises a substrate, a positioning system, a sensing system 7 and a data processing system,

a positioning system comprising one or more sets of features for confirming relative position; the feature here is a center mark provided on the upper and lower parallel plates.

A substrate for carrying the sensing system, the substrate having a thickness, circular grooves concentrically formed in the centers of the upper and lower end surfaces,

the substrate comprises a circular bottom plate 3 at the bottom, and the size of the bottom plate 3 is 300mm,200mm or 150 mm. A sub-circular plate is concentrically arranged on the bottom plate 3, and three long strip plates are uniformly arranged along the circumferential direction of the sub-circular plate; the circle centers of the upper end surface and the lower end surface of the substrate are provided with concave circular grooves.

The sensing system comprises a group of cameras 2 which are respectively used for acquiring the position information of a central mark 5 of two parallel plates; and three sets of displacement sensors 1 respectively used for acquiring displacement distances between the parallel plates opposite to the displacement sensors, and the set of cameras 2 are arranged at the circular grooves in the centers of the substrates in a back-to-back mode. The three sets of displacement sensors 1 are uniformly arranged on the three strip plates, are close to the outer edge of the substrate and are arranged on a pitch circle taking the central axis of the substrate as the center.

In order to better acquire information images, as an improvement of the scheme, an LED illumination system is provided for each camera 2 in a matching manner, and a specific LED illumination system is formed by uniformly distributing a plurality of LED particles on a pitch circle centered on an optical axis of each corresponding camera 2.

The sensing system also comprises a signal acquisition and processing system matched with the camera 2 and used for converting the position analog signals of the characteristic marks 5 acquired by the camera 2 into digital signals; and the signal acquisition and processing system is matched with the displacement sensor 1 and is used for converting the analog signals acquired by the displacement sensor 1 into digital signals, and the digital signals are position signals.

The wireless communication module is used for transmitting the acquired digital signals to the data processing system.

The sensing system also comprises a data caching module used for storing the converted digital signal information. By applying MEMS technology, the whole sensing system can be integrated on the substrate to form a relatively independent subsystem.

The device also comprises a data processing system which is used for receiving and processing the position information collected by the camera 2 and the sensor, calculating and outputting a plurality of results according to requirements, and judging whether the mark 5 between the two parallel plates is in alignment or in parallel.

The device also comprises a rechargeable power module and a charging interface which are responsible for charging the wireless communication module and the power utilization module in the sensing system. The power supply unit is controlled by a wireless remote control to carry out power supply control on the power utilization unit, so that power utilization is saved.

The data processing system is a subsystem which is relatively independent from the sensing system and is responsible for receiving and processing digital signals sent from the sensing system and providing various result outputs in real time according to requirements, and the data processing system comprises the following sub-modules: the wireless communication receiving module is responsible for receiving the digital information of the sensing system and sending an instruction; the system also comprises a digital signal processor, a display module (touch screen), an RAM, an ROM, a data and communication interface connected with a general computer, an embedded software system, a rechargeable power supply and a charging interface.

The sensing system module can be transmitted to a designated position through the wafer handling system according to requirements; the miniature camera 2 which is arranged in an up-down reverse manner can be used for checking the relative position of the centers of two parallel plates, and the working principle is as follows:

the sensing system is transferred to the target position by the manipulator, placed between two parallel plate center signatures 5,

the first camera 2 will capture the position information of the reference feature mark 5 on the first parallel plate, the digital signal processor DSP will process the signal and calculate the relative coordinates including X1, Y1 and the angle coordinate theta 1 relative to the sensing system;

the second camera 2 will capture the position information of the reference feature mark 5 on the second parallel plate, the digital signal processor DSP will process the signal and calculate the relative coordinates including X2, Y2 and the angle coordinate theta 2 relative to the sensing system;

and finally, the DSP compares the two groups of acquired relative coordinate data to calculate the relative positions of the centers of the two parallel plates.

The 3 displacement sensors 1 can be used to measure the parallelism of a set of parallel plates,

one of the parallel plates is used as a placing plane and a relative measurement reference of a sensing system, 3 different distance measurement signals are acquired through three position sensors, and the DSP converts the digital signals of the measurement results into three different distances D1, D2 and D3; the built-in embedded software system software fits a virtual plane to replace the measured parallel plates according to the set of data and the relative position coordinates of the displacement sensor 1, so that the parallelism state data between the set of parallel plates including the inclination angle and the azimuth angle is obtained. The displacement sensor 1 may be a contact or non-contact sensor.

Referring to fig. 6, the heater 4 is used as a sensing system placement plane, the sensing system is placed at a target position in the heater 4, the camera 2 at the upper end captures position information of the reference feature mark 5 on the shower plate 6, and the DSP processes the signals and calculates relative coordinates including X2, Y2 and an angle coordinate θ 2 with respect to the sensing system; the camera 2 at the lower end captures the position information of the reference characteristic mark 5 on the heater 4, and the DSP processes the signal and calculates relative coordinates including X2, Y2 and an angle coordinate theta 2 relative to the sensing system; and finally, the DSP compares the two groups of acquired relative coordinate data to calculate the relative positions of the centers of the two parallel plates. Three displacement sensors are used for respectively acquiring 3 different distance measurement signals from the three displacement sensors to the spray plate 6, and the DSP converts the digital signals of the measurement results into three different distances D1, D2 and D3; the built-in embedded software system software fits a virtual plane to replace the measured parallel plates according to the set of data and the relative position coordinates of the displacement sensor 1, so that the parallelism state data between the set of parallel plates including the inclination angle and the azimuth angle is obtained. And adjusting the position relation between two groups of parallel plates, namely the spray plate 6 and the heater 4 according to the detected central relative position data and the parallelism state data to meet the process production requirement.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.