阅读说明：本技术 一种微型压电厚膜振子 (Miniature piezoelectric thick film vibrator ) 是由 王大志 宗浩然 赵奎鹏 袁钰恒 李岩 蒋朝阳 王伦翔 于 2021-08-09 设计创作，主要内容包括：本发明提供了一种微型压电厚膜振子,包括压电陶瓷厚膜、下电极、弹性体、分区上电极。该振子的结构根据功能可分为环形和直线形,通过给压电陶瓷施加交变电压激励出振子的驱动模态,使振子表面形成波形,实现动子不同的运动。压电陶瓷厚度介于薄膜和厚膜之间,兼具块材与薄膜的优点,驱动力大、驱动电压低。本发明通过电流体喷印技术直接将压电陶瓷厚膜喷印至下电极表面,通过共烧技术使弹性体、下电极和压电陶瓷厚膜形成无界面的整体,实现压电陶瓷厚膜和弹性体的一体化体系,显著提高了压电陶瓷和弹性体的结合强度,并提高了振子的驱动性能和长期可靠性,实现了微型化、大驱动力的压电振子制备,能满足狭小空间驱动要求。(The invention provides a miniature piezoelectric thick film vibrator which comprises a piezoelectric ceramic thick film, a lower electrode, an elastic body and a partitioned upper electrode. The structure of the vibrator can be divided into annular and linear according to functions, and the driving mode of the vibrator is excited by applying alternating voltage to the piezoelectric ceramic, so that the surface of the vibrator forms a waveform, and different motions of the rotor are realized. The thickness of the piezoelectric ceramic is between that of a thin film and that of a thick film, and the piezoelectric ceramic has the advantages of both a bulk material and the thin film, and is large in driving force and low in driving voltage. According to the invention, the piezoelectric ceramic thick film is directly sprayed and printed on the surface of the lower electrode by an electrofluid spray printing technology, the elastomer, the lower electrode and the piezoelectric ceramic thick film form an integral body without an interface by a co-firing technology, so that an integral system of the piezoelectric ceramic thick film and the elastomer is realized, the bonding strength of the piezoelectric ceramic and the elastomer is obviously improved, the driving performance and long-term reliability of the vibrator are improved, the preparation of the piezoelectric vibrator with miniaturization and large driving force is realized, and the driving requirement in a narrow space can be met.)