阅读说明：本技术 一种多晶硅电池片链式背抛光设备 (Chain type back polishing equipment for polycrystalline silicon battery piece ) 是由 赵华飞 于 2021-08-11 设计创作，主要内容包括：本发明公开了一种多晶硅电池片链式背抛光设备,包括机架、集水槽、辅助输送辊、水喷淋板、除湿输送辊、吸湿护套、第一反应液槽、带液输送辊、带液凹槽、第二反应液槽、抛光输送辊、抛光凹槽、水洗槽、水洗输送网、下水洗辊、上水洗辊、喷水孔和烘干机构。本发明能够保证电池的效率和稳定性,保证正面无酸腐蚀,不易形成刻蚀印而影响外观,还能降低酸使用量、漏电比例低、背抛光效果好。(The invention discloses a chain type back polishing device for a polycrystalline silicon cell, which comprises a rack, a water collecting tank, an auxiliary conveying roller, a water spray plate, a dehumidifying conveying roller, a moisture absorbing sheath, a first reaction liquid tank, a liquid carrying conveying roller, a liquid carrying groove, a second reaction liquid tank, a polishing conveying roller, a polishing groove, a water washing tank, a water washing conveying net, a lower water washing roller, an upper water washing roller, a water spray hole and a drying mechanism. The invention can ensure the efficiency and stability of the battery, ensure that the front surface has no acid corrosion, is not easy to form etching print to influence the appearance, can also reduce the use amount of acid, has low electric leakage ratio and good back polishing effect.)

1. The utility model provides a polycrystalline silicon battery piece chain back of body polishing equipment which characterized in that: comprises a frame (1), a water collecting tank (2), auxiliary conveying rollers (3), water spray plates (4), dehumidifying conveying rollers (5), a moisture absorbing sheath (6), a first reaction liquid tank (7), liquid carrying conveying rollers (8), a liquid carrying groove (9), a second reaction liquid tank (10), polishing conveying rollers (11), a polishing groove (12), a water washing tank (13), a water washing conveying net (14), a lower water washing roller (15), an upper water washing roller (16), water spray holes (17) and a drying mechanism (18), wherein the water collecting tank (2) is arranged on the left side of the frame (1), a plurality of auxiliary conveying rollers (3) are arranged above the water collecting tank (2), the water spray plates (4) are arranged in parallel right above the auxiliary conveying rollers (3), the dehumidifying conveying rollers (5) are arranged on the right side of the auxiliary conveying rollers (3), and the moisture absorbing sheath (6) can be disassembled on the dehumidifying conveying rollers (5), the right side of the water collecting tank (2) is provided with a first reaction liquid tank (7), a plurality of liquid carrying conveying rollers (8) with tops parallel to the liquid level are arranged in the first reaction liquid tank (7), a plurality of liquid carrying grooves (9) are distributed on the liquid carrying conveying rollers (8), a second reaction liquid tank (10) is arranged on the right side of the first reaction liquid tank (7), a plurality of polishing conveying rollers (11) with tops parallel to the liquid level are arranged in the second reaction liquid tank (10), a plurality of polishing grooves (12) are distributed on the polishing conveying rollers (11), a water washing tank (13) is arranged on the right side of the second reaction tank, a water washing conveying net (14) is arranged in the water washing tank (13), a lower water washing roller (15) and an upper water washing roller (16) are symmetrically arranged on the water washing conveying net (14) from top to bottom, a plurality of water spraying holes (17) connected with a water pump are uniformly arranged on the circumferential surfaces of the upper water washing roller (16) and the lower water washing roller (15), and a drying mechanism (18) is arranged at the rear section of the washing conveying net (14).

2. The chain type back polishing apparatus for polysilicon battery plates as claimed in claim 1, wherein: the first reaction liquid tank (7) is a hydrofluoric acid and nitric acid mixed liquid reaction liquid tank, and the second reaction liquid tank (10) is an alkali liquor etching reaction liquid tank.

3. The chain type back polishing apparatus for polysilicon battery plates as claimed in claim 1, wherein: the auxiliary conveying roller (3), the dehumidifying conveying roller (5), the liquid-carrying conveying roller (8) and the polishing conveying roller (11) are parallel to each other and are positioned on the same horizontal plane.

4. The chain type back polishing apparatus for polysilicon battery plates as claimed in claim 1, wherein: and dehumidifying conveying rollers (5) are arranged among the water collecting tank (2), the first reaction liquid tank (7), the second reaction liquid tank (10) and the rinsing tank (13) for conveying.

5. The chain type back polishing apparatus for polysilicon battery plates as claimed in claim 1, wherein: the polishing device is characterized in that extrusion limiting rollers (19) are symmetrically extruded above the polishing conveying rollers (11), and elastic extrusion sleeves are sleeved on the outer surfaces of the extrusion limiting rollers (19).

6. The chain type back polishing apparatus for polysilicon battery plates as claimed in claim 1, wherein: the depth of the liquid carrying groove (9) is 0.2mm, the width of the liquid carrying groove (9) is 25mm, and the liquid carrying groove (9) is uniformly and axially distributed on the liquid carrying conveying roller (8).

7. The chain type back polishing apparatus for polysilicon battery plates as claimed in claim 1, wherein: the depth of the polishing groove (12) is 1mm, the width of the polishing groove (12) is 0.3mm, and the polishing groove (12) is uniformly and axially distributed on the polishing conveying roller (11).

8. The chain type back polishing apparatus for polysilicon battery plates as claimed in claim 1, wherein: washing delivery network (14) oblique upper right side sets up, stoving mechanism (18) include air heater (20) and air exhauster (21), washing delivery network (14) top evenly distributed has a plurality of air heaters (20), the below evenly distributed of washing network has a plurality of air exhausters (21).

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of cell production, in particular to the technical field of chain type back polishing equipment for polycrystalline silicon cells.

[ background of the invention ]

Solar energy is an environment-friendly energy source, the solar cell can directly convert sunlight into electric energy, and the power generation principle is the photovoltaic effect of PN junctions. At present, the conventional battery technology is limited by technology, the conversion efficiency is not greatly improved, and the battery conversion efficiency must depend on upgrading the existing technology and a new battery structure type. At present, the PERC battery technology in the industry is undoubtedly the most effective means for improving efficiency, one of the core technologies of the PERC battery is a back polishing process, and the requirements of the PERC battery back polishing are the requirements of smooth texture, consistency, high reflectivity and the like of the whole back surface of a battery piece. The existing back polishing technology generally adopts a Schmid etching process, and has the problems of uneven texture surface on the back of a silicon wafer and high acid consumption.

[ summary of the invention ]

The invention aims to solve the problems in the prior art, and provides chain type back polishing equipment for a polycrystalline silicon cell, which can ensure the efficiency and stability of the cell, ensure that the front surface has no acid corrosion, is not easy to form etching prints to influence the appearance, can reduce the use amount of acid, has low electric leakage ratio and has good back polishing effect.

In order to realize the purpose, the invention provides chain type back polishing equipment for a polycrystalline silicon cell, which comprises a frame, a water collecting tank, auxiliary conveying rollers, water spray plates, a dehumidifying conveying roller, a moisture absorption sheath, a first reaction liquid tank, a liquid carrying conveying roller, a liquid carrying groove, a second reaction liquid tank, a polishing conveying roller, a polishing groove, a water washing tank, a water washing conveying net, a lower water washing roller, an upper water washing roller, water spray holes and a drying mechanism, wherein the water collecting tank is arranged on the left side of the frame, the auxiliary conveying rollers are arranged above the water collecting tank, the water spray plates are arranged in parallel right above the auxiliary conveying rollers, the dehumidifying conveying roller is arranged on the right side of the auxiliary conveying rollers, the moisture absorption sheath is detachably arranged on the dehumidifying conveying rollers, the first reaction liquid tank is arranged on the right side of the water collecting tank, the liquid carrying conveying rollers with the tops aligned with the liquid level are arranged in the first reaction liquid tank, the improved automatic washing machine is characterized in that a plurality of liquid carrying grooves are distributed on the liquid carrying conveying rollers, a second reaction liquid tank is arranged on the right side of the first reaction liquid tank, a plurality of polishing conveying rollers with tops parallel to the liquid level are arranged in the second reaction liquid tank, a plurality of polishing grooves are distributed on the polishing conveying rollers, a water washing tank is arranged on the right side of the second reaction liquid tank, a water washing conveying net is arranged in the water washing tank, a lower water washing roller and an upper water washing roller are symmetrically arranged on the water washing conveying net in an up-down mode, a plurality of water spraying holes connected with a water pump are uniformly formed in the circumferential surfaces of the upper water washing roller and the lower water washing roller, and a drying mechanism is arranged at the rear section of the water washing conveying net.

Preferably, the first reaction liquid tank is a hydrofluoric acid and nitric acid mixed liquid reaction liquid tank, and the second reaction liquid tank is an alkali liquor etching reaction liquid tank.

Preferably, the auxiliary conveying roller, the dehumidifying conveying roller, the liquid-carrying conveying roller and the polishing conveying roller are parallel to each other and are located on the same horizontal plane.

Preferably, dehumidification conveying rollers are arranged among the water collecting tank, the first reaction liquid tank, the second reaction liquid tank and the rinsing tank for conveying.

Preferably, extrusion limiting rollers are symmetrically arranged above the polishing conveying rollers in an extrusion mode, and elastic extrusion sleeves are sleeved on the outer surfaces of the extrusion limiting rollers.

Preferably, the depth of the liquid carrying groove is 0.2mm, the width of the liquid carrying groove is 25mm, and the liquid carrying groove is uniformly and axially distributed on the liquid carrying conveying roller.

Preferably, the depth of the polishing grooves is 1mm, the width of the polishing grooves is 0.3mm, and the polishing grooves are uniformly and axially distributed on the polishing conveying roller.

Preferably, the washing conveying net is arranged obliquely above the right, the drying mechanism comprises an air heater and an exhaust fan, a plurality of air heaters are uniformly distributed above the washing conveying net, and a plurality of exhaust fans are uniformly distributed below the washing conveying net.

The invention has the beneficial effects that: according to the invention, through combining the frame, the water collecting tank, the auxiliary conveying roller, the water spray plate, the dehumidifying conveying roller, the moisture absorption sheath, the first reaction liquid tank, the liquid carrying conveying roller, the liquid carrying groove, the second reaction liquid tank, the polishing conveying roller, the polishing groove, the water washing tank, the water washing conveying net, the lower water washing roller, the upper water washing roller, the water spray hole and the drying mechanism together, through experimental optimization, the efficiency and the stability of the battery can be ensured, the front surface is ensured to be free from acid corrosion, etching prints are not easy to form to influence the appearance, the use amount of acid can be reduced, the electric leakage ratio is low, and the back polishing effect is good.

The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of a chain type back polishing device for polysilicon cells of the present invention.

In the figure: 1-a frame, 2-a water collecting tank, 3-an auxiliary conveying roller, 4-a water spraying plate, 5-a dehumidifying conveying roller, 6-a moisture absorbing sheath, 7-a first reaction liquid tank, 8-a liquid carrying conveying roller, 9-a liquid carrying groove, 10-a second reaction liquid tank, 11-a polishing conveying roller, 12-a polishing groove, 13-a water washing tank, 14-a water washing conveying net, 15-a lower water washing roller, 16-an upper water washing roller, 17-a water spraying hole, 18-a drying mechanism, 19-an extrusion limiting roller, 20-a hot air blower and 21-an exhaust fan.

[ detailed description ] embodiments

Referring to fig. 1, the chain type back polishing device for polysilicon battery plates of the invention comprises a frame 1, a water collecting tank 2, auxiliary conveying rollers 3, water spray plates 4, dehumidifying conveying rollers 5, a moisture absorbing sheath 6, a first reaction liquid tank 7, a liquid carrying conveying roller 8, a liquid carrying groove 9, a second reaction liquid tank 10, a polishing conveying roller 11, a polishing groove 12, a rinsing tank 13, a rinsing conveying net 14, a lower rinsing roller 15, an upper rinsing roller 16, water spray holes 17 and a drying mechanism 18, wherein the left side of the frame 1 is provided with the water collecting tank 2, a plurality of auxiliary conveying rollers 3 are arranged above the water collecting tank 2, the water spray plates 4 are arranged in parallel right above the auxiliary conveying rollers 3, the right side of the auxiliary conveying rollers 3 is provided with the dehumidifying conveying rollers 5, the moisture absorbing sheath 6 is detachably arranged on the dehumidifying conveying rollers 5, the right side of the water collecting tank 2 is provided with the first reaction liquid tank 7, the device is characterized in that a plurality of liquid carrying conveying rollers 8 with tops parallel to the liquid level are arranged in the first reaction liquid tank 7, a plurality of liquid carrying grooves 9 are distributed on the liquid carrying conveying rollers 8, a second reaction liquid tank 10 is arranged on the right side of the first reaction liquid tank 7, a plurality of polishing conveying rollers 11 with tops parallel to the liquid level are arranged in the second reaction liquid tank 10, a plurality of polishing grooves 12 are distributed on the polishing conveying rollers 11, a water washing tank 13 is arranged on the right side of the second reaction tank, a water washing conveying net 14 is arranged in the water washing tank 13, a lower water washing roller 15 and an upper water washing roller 16 are symmetrically arranged on the water washing conveying net 14 from top to bottom, a plurality of water spraying holes 17 connected with a water pump are uniformly arranged on the circumferential surfaces of the upper water washing roller 16 and the lower water washing roller 15, a drying mechanism 18 is arranged at the rear section of the water washing conveying net 14, the first reaction liquid tank 7 is a hydrofluoric acid and nitric acid mixed liquid reaction tank, the second reaction liquid tank 10 is an alkali liquor etching reaction liquid tank, the auxiliary conveying rollers 3, the dehumidifying conveying rollers 5, the liquid carrying conveying rollers 8 and the polishing conveying rollers 11 are parallel to each other and are positioned on the same horizontal plane, the dehumidifying conveying rollers 5 are arranged among the water collecting tank 2, the first reaction liquid tank 7, the second reaction liquid tank 10 and the rinsing tank 13 for conveying, the extruding limiting rollers 19 are symmetrically extruded above the polishing conveying rollers 11, the outer surfaces of the extruding limiting rollers 19 are sleeved with elastic extruding sleeves, the depth of the liquid carrying grooves 9 is 0.2mm, the width of the liquid carrying grooves 9 is 25mm, the liquid carrying grooves 9 are uniformly and axially distributed on the liquid carrying conveying rollers 8, the depth of the polishing grooves 12 is 1mm, the width of the polishing grooves 12 is 0.3mm, the polishing grooves 12 are uniformly and axially distributed on the polishing conveying rollers 11, the water washing conveying net 14 is arranged above the right side, the drying mechanism 18 comprises a hot air blower 20 and an exhaust blower 21, a plurality of hot air blowers 20 are uniformly distributed above the washing conveying net 14, and a plurality of exhaust blowers 21 are uniformly distributed below the washing net.

According to the invention, the frame 1, the water collecting tank 2, the auxiliary conveying roller 3, the water spraying plate 4, the dehumidifying conveying roller 5, the moisture absorbing sheath 6, the first reaction liquid tank 7, the liquid carrying conveying roller 8, the liquid carrying groove 9, the second reaction liquid tank 10, the polishing conveying roller 11, the polishing groove 12, the water washing tank 13, the water washing conveying net 14, the lower water washing roller 15, the upper water washing roller 16, the water spraying holes 17 and the drying mechanism 18 are combined together, and through test optimization, the efficiency and the stability of the battery can be ensured, the front surface is ensured to be free from acid corrosion, etching prints are not easy to form to influence the appearance, the acid consumption can be reduced, the electric leakage ratio is low, and the back polishing effect is good.

The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.