阅读说明：本技术 超声检测试块、其制备方法和应用 (Ultrasonic detection test block, preparation method and application thereof ) 是由 尹小康 张昊 熊江涛 李京龙 宋慧 于 2021-01-20 设计创作，主要内容包括：本发明提供了超声检测试块、其制备方法和应用,涉及超声检测技术领域。超声检测试块的制备方法包括：将叠放的第一基材和第二基材之间的一端放置垫件,以形成从第一基材和第二基材的第一端至相对的第二端宽度逐渐增大的夹缝；将第一基材和第二基材的第一端和第二端分别固定,然后再进行扩散焊。本发明实施例中的制备方法形成的试块的内部具有连续宽度渐变的夹缝缺陷,且尺寸便于调节,可以达到微米级别,显著提升制备得到试块的精度,可以用于超声检测中,能够更好地进行测试前的校准工作。(The invention provides an ultrasonic detection test block, a preparation method and application thereof, and relates to the technical field of ultrasonic detection. The preparation method of the ultrasonic detection test block comprises the following steps: placing a pad at one end between the first substrate and the second substrate which are stacked to form a gap with gradually increasing width from the first end to the opposite second end of the first substrate and the second substrate; and fixing the first end and the second end of the first substrate and the second substrate respectively, and then performing diffusion welding. The test block formed by the preparation method in the embodiment of the invention has the crack defect with gradually changed continuous width in the interior, is convenient to adjust in size, can reach the micron level, obviously improves the precision of the prepared test block, can be used in ultrasonic detection, and can better perform calibration work before testing.)

1. A preparation method of an ultrasonic detection test block is characterized by comprising the following steps:

placing a pad at one end between the first substrate and the second substrate which are stacked to form a seam with a width gradually increasing from the first end to the opposite second end of the first substrate and the second substrate;

and fixing the first end and the second end of the first substrate and the second substrate respectively, and then performing diffusion welding.

2. The method as claimed in claim 1, wherein the pad is cylindrical and has a diameter of 100-250 μm; preferably 150-;

more preferably, the padding is silk-filled.

3. The method of manufacturing an ultrasonic testing block according to claim 2, wherein the surfaces of the first substrate and the second substrate are polished before the cushion member is added;

preferably, the first substrate and the second substrate are both titanium alloy plates.

4. The method of claim 1, wherein the fixing of the first end and the second end is performed by welding;

preferably, the first end and the second end are fixed by means of TIG welding.

5. The method of manufacturing an ultrasonic testing block according to claim 1, wherein a diffusion welding assembly is performed before the diffusion welding; wherein the diffusion weld assembly comprises: turning over the fixed first base material and the fixed second base material, wherein two end faces with a seam with gradually changed width on the surface are a welding top face and a welding bottom face, and a cover plate is added at the welding top face;

preferably, the shape and size of the cover plate match the shape and size of the welding top surface;

preferably, the process of diffusion solder assembly further comprises adding a solder mask at both the top surface of the cover plate and the solder bottom surface.

6. The method of manufacturing an ultrasonic testing block according to claim 1 or 5, wherein the first substrate, the second substrate, and the cover plate are surface-cleaned before the diffusion welding assembly is performed after the first substrate and the second substrate are fixed;

preferably, the surface cleaning comprises grinding, polishing and acid washing which are sequentially carried out;

preferably, the polishing solution adopted in the polishing process comprises silica sol and hydrogen peroxide;

preferably, the mass ratio of the silica sol to the hydrogen peroxide is 8-12: 1;

preferably, the acid solution used in the acid washing process is obtained by mixing hydrofluoric acid, hydrochloric acid, nitric acid and water, and the acid washing time is 1-2 min.

7. The method for preparing an ultrasonic testing block according to claim 6, wherein after said acid washing, water washing and drying are performed;

preferably, the water washing is rinsing with water for 20-40 min;

preferably, after the acid washing and before the water washing, washing with an organic reagent;

more preferably, the organic reagent is cleaned by ethanol ultrasonic cleaning for 8-12 min.

8. The method for preparing an ultrasonic testing block as claimed in claim 1, wherein in the diffusion welding, the welding temperature is 800-;

preferably, the heat preservation time in the diffusion welding process is 50-70 min.

9. An ultrasonic test block produced by the method for producing an ultrasonic test block according to any one of claims 1 to 8.

10. Use of an ultrasound test block according to claim 9 in ultrasound testing.

Technical Field

The invention relates to the technical field of ultrasonic detection, in particular to an ultrasonic detection test block, and a preparation method and application thereof.

Background

In order to ensure the accuracy, repeatability and comparability of the detection result in the ultrasonic detection, a sample with known fixed characteristics is required to be used for calibrating the detection system, and the sample with a simple geometric artificial reflector or simulated defect designed according to a certain purpose is generally called a test block. The test block for ultrasonic testing is generally divided into a standard test block, a reference test block and a simulation test block. The artificial reflectors in the test block are selected according to the purpose and should be as close as possible to the defect features to be detected.

Usually, the required shape and size are machined inside or on the surface of the material by a mechanical machining method, and the commonly used artificial reflectors mainly comprise long transverse holes, short transverse holes, transverse through holes, flat-bottom holes, V-shaped grooves, other wire-cut grooves and the like.

The existing preparation method of the test block mainly has the following problems: (1) because the diffusion welding defects exist in the joint, namely the diffusion welding interface position, and the dimension is micron-sized, the position precision cannot be ensured and the dimension precision cannot be ensured by the traditional machining mode, namely the machining of the internal micron-sized artificial reflector is difficult to realize. (2) Although the method of surface turning and processing threads on the surface to be welded can realize defect prefabrication at a diffusion welding interface, the dimensional precision is difficult to ensure, the shape is uneven, and a test block is difficult to form.

Disclosure of Invention

The invention aims to provide an ultrasonic detection test block and a preparation method thereof, so as to form the test block with a crack-shaped defect with continuously changed width, facilitate the control of size and prepare the test block with higher precision.

The invention also aims to provide the application of the ultrasonic detection test block in ultrasonic detection.

The invention provides a preparation method of an ultrasonic detection test block, which comprises the following steps:

placing a pad at one end between the first substrate and the second substrate which are stacked to form a gap with gradually increasing width from the first end to the opposite second end of the first substrate and the second substrate;

and fixing the first end and the second end of the first substrate and the second substrate respectively, and then performing diffusion welding.

The invention also provides an ultrasonic detection test block prepared by the preparation method.

The invention also provides the application of the ultrasonic detection test block in ultrasonic detection.

The embodiment of the invention has the beneficial effects that: forming a nip having a width gradually increasing from a first end to a second end by placing a spacer between the end portions of the first substrate and the second substrate placed in superposition; and then diffusion welding is performed after the first end and the second end are fixed. The test block formed by the preparation method in the embodiment of the invention has the crack defect with gradually changed continuous width in the interior, the size is convenient to adjust, the micron level can be achieved, and the precision of the prepared test block is obviously improved.

When the ultrasonic detection test block prepared in the embodiment of the invention is used in ultrasonic detection, calibration work before testing can be better carried out.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a schematic view of a diffusion bonding joint interface defect provided in an embodiment of the present invention;

FIG. 2 is a schematic diagram illustrating defect preparation of a diffusion welding continuous gap according to an embodiment of the present invention;

FIG. 3 illustrates the non-defective locations remaining with unbonded micro-hole defects at a bonding temperature of 700 ℃;

FIG. 4 is a view showing a depression at one side of the cap plate at a welding temperature of 950 ℃;

FIG. 5 is a graph showing the results of testing for a continuous defect in diffusion welding;

fig. 6 is an ultrasonic C-scan picture of a small size continuous defect.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally found in use of products of the present invention, and are used for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Some embodiments of the invention are described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

In an actual welding manufacturing process, in order to pursue the complexity of the structure, the deformation amount after welding needs to be controlled, and all process parameters in the welding process cannot be satisfied at the same time, which may cause welding defects such as non-welding (fig. 1 (a)), weak connection (fig. 1 (b)), holes (fig. 1 (c)) and the like at the interface as shown in fig. 1. The weld formed by diffusion welding is a quasi-two-dimensional interface region with a small thickness, so that the defect of diffusion welding can be equivalent to the defect of a two-dimensional plane without the thickness.

The lack of welding refers to the existence of obvious continuous defects at the welding interface, and the main reasons for the occurrence of the defects are generally low welding temperature, insufficient welding pressure, insufficient heat preservation time or low vacuum degree and other process deviations. In addition, when the surface to be welded is contaminated or has a large roughness, the defect of non-welded interface is easily generated, and usually, the non-welded interface is easily generated at the edge part of the welded sample due to the uneven distribution of the stress of the interface. The weak connection means that the two welding interfaces are only in close physical contact without atomic bonding, and the gap size is in the micron order. The void defects are discrete small voids, typically on the order of microns in size, which is one of the most common defects in diffusion welding. When the welding temperature is low, the welding pressure is low, or the roughness of the surface to be welded is large, the interface hole is not completely closed, and then the defect of the micro-hole is formed.

Aiming at the welding head interface defects in diffusion welding, a targeted test block is needed to be adopted for calibration before ultrasonic detection, so that the accuracy of ultrasonic detection is improved. The ultrasonic detection test block provided by the embodiment of the invention is a test block with continuously-changed crack-shaped defects, and the specific size of a crack can be more conveniently controlled through optimization of the preparation method, so that the micron level can be achieved.

As shown in fig. 2, an embodiment of the present invention provides a method for preparing an ultrasonic testing block, including the following steps:

s1, making a crack

Placing the first substrate and the second substrate in an overlapping mode, and placing a cushion piece between the end portions of two contact surfaces of the first substrate and the second substrate to form a gap with the width gradually increasing from the first end to the opposite second end of the first substrate and the second substrate; the first and second ends of the first and second substrates are then secured.

Specifically, the first substrate and the second substrate are stacked, and the first substrate is placed above the second substrate to form a two-layer substrate structure.

In some embodiments, the first substrate and the second substrate are both titanium alloy sheets, such as TC 4. The specific dimensions of the titanium alloy sheet are not limited and may be 20X 10X 5 mm. Preferably, before the pad member is added, the surfaces of the first substrate and the second substrate are polished, and only the upper and lower surfaces of the first substrate and the second substrate may be polished, that is, the surface of 20 × 10mm is polished, so that no obvious scratch is formed on the surfaces, and the polished surfaces are butted when the first substrate and the second substrate are placed on each other.

The specific shape and size of the pad are not limited, and can be selected according to the requirement, and if a micrometer-grade crack is required, a micrometer-grade pad is required to be selected.

In some preferred embodiments, the pad may be cylindrical, and the diameter of the pad is 100-250 μm, preferably 150-200 μm, such as 100 μm, 150 μm, 200 μm, 250 μm, etc. Alternatively, the pad is a filler wire, which is cylindrical in shape, typically used for laser filler wire bonding and the like.

In some embodiments, the first end and the second end are fixed by welding, the welding is simple and easy, and the specific welding method is not limited and may be TIG welding. During welding, it is possible to fix by means of a bow clamp and then weld the first and second ends, obtaining a continuously varying gap.

The inventor creatively adopts a mode of combining wire filling and TIG welding to manufacture small-size gaps (gaps), and uses a diffusion welding mode to retain the continuously changed small-size gaps at the positions of diffusion welding interfaces to form continuously changed small defects of the interfaces, thereby achieving the purpose of manufacturing small-size defect ultrasonic detection test blocks.

S2 preparation before diffusion welding

And after the first base material and the second base material are fixed, before diffusion welding assembly is carried out, the first base material, the second base material and the cover plate are subjected to surface cleaning, so that the welding quality is ensured. The surface cleaning is mainly to clean the surfaces to be welded at the non-defect positions of the first base material, the second base material and the cover plate, and the specific cleaning method is not limited, and the existing method can be referred.

In order to further improve the surface cleaning effect, the inventor further optimizes the surface cleaning step. In a preferred embodiment, the surface cleaning comprises grinding, polishing and pickling, which are performed sequentially. The polishing can be to polish the surface step by using sand paper so as to ensure that the surface has no obvious scratch; polishing, namely putting the substrate or the cover plate into polishing solution, and polishing the surface to a mirror surface and keeping parallelism; the pickling is to remove the oxide film on the surface by cleaning with an acid solution to atomize the surface.

In a preferred embodiment, the polishing solution adopted in the polishing process comprises silica sol and hydrogen peroxide, and the mass ratio of the silica sol to the hydrogen peroxide is 8-12: 1; the acid solution used in the pickling process is obtained by mixing hydrofluoric acid, hydrochloric acid, nitric acid and water, and the pickling time is 1-2 min. By further selecting the raw materials of the polishing solution and the acid solution, the polishing effect and the acid washing effect are improved, so that the surface to be welded after surface treatment is clean and free of impurities. Wherein, hydrofluoric acid, hydrochloric acid and nitric acid are all commercial concentrated acids, and the acid solution can be prepared by 1mL of hydrofluoric acid, 1.5mL of hydrochloric acid, 2.5mL of nitric acid and 95mL of water, and is also called Keller reagent.

In a preferred embodiment, after pickling, water washing and drying are carried out; more preferably, after acid washing and before water washing, washing is performed with an organic reagent. The polishing solution and the acid solution on the surface are removed by the organic reagent, and then the organic reagent and other impurities are removed by water washing.

In some embodiments, the water wash is a rinse with water for 20-40 min; the organic reagent is cleaned by ultrasonic cleaning with ethanol for 8-12min, and the drying can be carried out by blowing with cold air.

S3 diffusion welding assembly

Before diffusion welding, diffusion welding assembly is carried out; wherein the diffusion welding assembly comprises: and turning the fixed first substrate and the second substrate, wherein two end faces with a crack with gradually changed width on the surface are a welding top face and a welding bottom face, and a cover plate is added at the welding top face. By introducing the cover plate, one surface of the prepared test block has no crack, and the requirement of the test block is met.

In some embodiments, the cover plate has a shape and size that matches the shape and size of the weld top surface, the cover plate having a generally trapezoidal cross-section that is the same shape as the weld top surface. The cover plate may be made of the same material as the first substrate and the second substrate.

In some embodiments, the diffusion bonding assembly process further includes adding solder mask, which may be a mica sheet, on both the top and bottom surfaces of the cover plate (i.e., between the upper and lower surfaces of the coupon and the contact location of the indenter) to prevent diffusion bonding between the coupon and indenter.

S4, diffusion welding

The diffusion welding is to place the assembled sample in a diffusion welding machine, the specific model of the machine is not limited, the machine can be FJK-2 type diffusion welding machine, the height of the sample is positioned at the center of the furnace chamber, and initial pressure is applied to enable the connecting joints to be in initial contact tightly.

In diffusion welding, the welding temperature is 800-. The inventor further optimizes the specific operation parameters of the diffusion welding so as to further improve the welding effect.

The embodiment of the invention also provides the ultrasonic detection test block which is prepared by the preparation method of the ultrasonic detection test block, the inside of the ultrasonic detection test block is provided with a crack with continuously changed width, and the width of the crack is gradually increased from the first end to the opposite second end of the ultrasonic detection test block. The ultrasonic detection test block is applied to ultrasonic detection, and is used for calibrating an instrument before ultrasonic detection, so that the detection precision of a welding product with a crack-shaped defect is improved.

The present invention will be described in detail with reference to specific embodiments.

Example 1

The embodiment provides a method for preparing an ultrasonic detection test block, which comprises the following steps:

(1) manufacturing a crack: firstly, the surfaces of 20X 10mm planes of two TC4 titanium alloy plates (20X 10X 5mm) are ground until no obvious scratch is formed, the ground surfaces are butted, as shown in (a) in figure 2, two TC4 blocks are butted, the tail end of a butting interface is padded up with molybdenum wires at the right end (a cylinder represents a molybdenum wire with the diameter of 180 mu m), then an arch clamp is fixed, and two ends (the narrowest end and the widest end of a gap) of the butted plates are all welded by TIG to keep the gap, so that a continuously-changing gap is obtained.

(2) Preparation before diffusion welding: cleaning the surfaces to be welded of the cover plate and the surfaces to be welded of the non-defect positions of the two crack plates in the step (1), firstly, using sand paper to polish the surfaces step by step, and using polishing solution (silicon dioxide sol: hydrogen peroxide: 10:1) to polish the surfaces to a mirror surface and keep parallelism; and (3) pickling the sample to be welded for 2 minutes by using acid liquor formed by mixing 1mL of hydrofluoric acid, 1.5mL of hydrochloric acid, 2.5mL of nitric acid and 95mL of water, taking out the sample, putting the sample into absolute ethyl alcohol, ultrasonically cleaning the sample for 10 minutes, taking out clean water, rinsing the sample for 30 minutes, and drying the sample by cold air.

(3) And (3) diffusion welding assembly: turning the sample in (a) of FIG. 2 by 90 degrees, fitting and centering a cover plate (20X 2mm) with the surface to be welded of the plate with the gap, preventing the misalignment of the sample to ensure that the pressure can be uniformly applied to the surface to be welded, and adding mica sheets as solder masks between the upper and lower surfaces of the sample and the contact position of the pressure head, as shown in (b) of FIG. 2.

(4) Welding: after the sample was assembled, it was placed in an FJK-2 type diffusion welder at a height centered in the oven cavity and initial pressure was applied to bring the joints into intimate contact. Inputting set process parameters (the welding temperature is 850 ℃, the welding pressure is 2MPa and the heat preservation time is 60min) at a control panel of the diffusion welding machine, and operating a program to weld. And slowly cooling after heat preservation is finished to form a diffusion welding joint, and reserving the prefabricated defects at the diffusion welding interface position to form a test block.

Example 2

The embodiment provides a method for preparing an ultrasonic detection test block, which comprises the following steps:

(1) manufacturing a crack: firstly, the surfaces of 20X 10mm planes of two TC4 titanium alloy plates (20X 10X 5mm) are ground until no obvious scratch is formed, the ground surfaces are butted, as shown in (a) in figure 2, two TC4 blocks are butted, the tail end of a butting interface is padded up with molybdenum wires at the right end (a cylinder represents a molybdenum wire with the diameter of 100 mu m), then an arch clamp is fixed, and two ends (the narrowest end and the widest end of a gap) of the butted plates are all welded by TIG to keep the gap, so that a continuously-changing gap is obtained.

(2) Preparation before diffusion welding: cleaning the surfaces to be welded of the cover plate and the surfaces to be welded of the non-defect positions of the two crack plates in the step (1), firstly, using sand paper to polish the surfaces step by step, and using polishing solution (silicon dioxide sol: hydrogen peroxide: 8:1) to polish the surfaces to a mirror surface and keep parallelism; and (3) pickling the sample to be welded for 1 minute by using acid liquor formed by mixing 1mL of hydrofluoric acid, 1.5mL of hydrochloric acid, 2.5mL of nitric acid and 95mL of water, taking out the sample, putting the sample into absolute ethyl alcohol, ultrasonically cleaning the sample for 8 minutes, taking out clean water, rinsing the sample for 20 minutes, and drying the sample by cold air.

(3) And (3) diffusion welding assembly: turning the sample in (a) of FIG. 2 by 90 degrees, fitting and centering a cover plate (20X 2mm) with the surface to be welded of the plate with the gap, preventing the misalignment of the sample to ensure that the pressure can be uniformly applied to the surface to be welded, and adding mica sheets as solder masks between the upper and lower surfaces of the sample and the contact position of the pressure head, as shown in (b) of FIG. 2.

(4) Welding: after the sample was assembled, it was placed in an FJK-2 type diffusion welder at a height centered in the oven cavity and initial pressure was applied to bring the joints into intimate contact. Inputting set process parameters (welding temperature 800 ℃, welding pressure 1.8MPa and heat preservation time 70min) at a control panel of the diffusion welding machine, and operating a program to weld. And slowly cooling after heat preservation is finished to form a diffusion welding joint, and reserving the prefabricated defects at the diffusion welding interface position to form a test block.

Example 3

The embodiment provides a method for preparing an ultrasonic detection test block, which comprises the following steps:

(1) manufacturing a crack: firstly, the surfaces of 20X 10mm planes of two TC4 titanium alloy plates (20X 10X 5mm) are ground until no obvious scratch is formed, the ground surfaces are butted, as shown in (a) in figure 2, two TC4 blocks are butted, the tail end of a butting interface is padded up with molybdenum wires at the right end (a cylinder represents a molybdenum wire with the diameter of 250 mu m), then an arch clamp is fixed, and two ends (the narrowest end and the widest end of a gap) of the butted plates are all welded by TIG to keep the gap, so that a continuously-changing gap is obtained.

(2) Preparation before diffusion welding: cleaning the surfaces to be welded of the cover plate and the surfaces to be welded of the non-defect positions of the two crack plates in the step (1), firstly, using sand paper to polish the surfaces step by step, and using polishing solution (silicon dioxide sol: hydrogen peroxide: 12:1) to polish the surfaces to a mirror surface and keep parallelism; and (3) pickling the sample to be welded for 2 minutes by using acid liquor formed by mixing 1mL of hydrofluoric acid, 1.5mL of hydrochloric acid, 2.5mL of nitric acid and 95mL of water, taking out the sample, putting the sample into absolute ethyl alcohol, ultrasonically cleaning the sample for 12 minutes, taking out clean water, rinsing the sample for 40 minutes, and drying the sample by cold air.

(3) And (3) diffusion welding assembly: turning the sample in (a) of FIG. 2 by 90 degrees, fitting and centering a cover plate (20X 2mm) with the surface to be welded of the plate with the gap, preventing the misalignment of the sample to ensure that the pressure can be uniformly applied to the surface to be welded, and adding mica sheets as solder masks between the upper and lower surfaces of the sample and the contact position of the pressure head, as shown in (b) of FIG. 2.

(4) Welding: after the sample was assembled, it was placed in an FJK-2 type diffusion welder at a height centered in the oven cavity and initial pressure was applied to bring the joints into intimate contact. Inputting set process parameters (welding temperature 900 ℃, welding pressure 2.2MPa and heat preservation time 50min) at a control panel of the diffusion welding machine, and operating a program to weld. And slowly cooling after heat preservation is finished to form a diffusion welding joint, and reserving the prefabricated defects at the diffusion welding interface position to form a test block.

Comparative example 1

This comparative example provides a method for preparing an ultrasonic test block, which is different from example 1 only in that: the welding temperature was 700 ℃.

The result shows that the low welding temperature leads to the failure of reliable connection at the non-defect position of the diffusion welding interface, as shown in fig. 3, the holes which are not welded on the interface affect the continuity and uniformity of the test block, which can cause interference to the ultrasonic detection signal and affect the detection precision, and thus the test block cannot be used as the test block.

Comparative example 2

This comparative example provides a method for preparing an ultrasonic test block, which is different from example 1 only in that: the welding temperature was 950 ℃.

The result shows that the welding temperature is too high, the welding deformation is increased, on one hand, the overall deformation of the test block is too large to influence the dimensional accuracy of the test block, on the other hand, the cover plate at the position of the defect of the diffusion welding interface collapses to influence the dimensional accuracy of the defect, and as shown in fig. 4, the cover plate side of the diffusion welding interface is sunken at the welding temperature of 950 ℃.

Test example 1

The size of the test block obtained in example 1 was tested, and in order to determine the size of the prefabricated defect, the defect (gap) at both ends of the test block after both ends were cut was observed and the size was measured by a scanning electron microscope, as shown in fig. 5, fig. 5(a) is the front end defect morphology, fig. 5(b) is the rear end defect morphology, and fig. 5(c) is the continuous defect scale.

It can be seen from fig. 3 that the non-prefabricated defect position of the diffusion welding interface is welded well, the sizes of the defects measured at two ends are 19.2 μm and 156.0 μm respectively in fig. 5(a) and 5(b), a continuous defect scale as shown in fig. 5(c) is made according to the continuity of the defects and the length of the test block, the shape of the defects on the diffusion welding interface is in a right trapezoid shape, and the defect width at any position can be determined according to the geometric characteristics of the right trapezoid in the experimental analysis process.

Test example 2

The test block obtained in example 1 is detected by adopting an ultrasonic C-scan detection mode, probes with the frequency of 50MHz, the focal length of 20mm and the wafer diameter of 6mm are respectively selected to detect the defects of the test block, a result shown in fig. 6 is obtained, a C-scan picture is displayed by a gray scale, each pixel point has a determined gray value which is between 0 and 255, wherein 0 represents black, 255 represents white, the gray value in the C-scan picture is in direct proportion to the position of the pixel point, namely the interface reflected wave intensity of a scanning point, and the reflected wave intensity is represented by the waveform amplitude of an interface wave. When the diffusion welding interface is well welded and has no defects, the interface echo intensity acquired by the probe is 0, namely the gray value is 0, the picture is represented as black, and when the interface has defects, the probe acquires the interface echo with certain intensity, the gray value is increased along with the increase of the intensity of the interface echo, and the picture is represented as white at most 255.

It can be seen that the width of the gray-white color in the C-scan increases with the size of the defect, and the black area indicates that the non-defect location is in a fully welded state. It can be seen that the size of the bright white defect in the image changes from small to large, but the left and right ends are discontinuous, because the edge of the test block causes the sound beam emitted by the probe not to be focused at the diffusion welding interface, and the image is represented as non-uniform, the radius of the wafer in the known probe is 3mm, the 3mm length part at the two ends of the C-scan image is cut off as shown in fig. 6, and the cut-off C-scan image (refer to the virtual examination reference data) with the length of 12,200 μm is obtained through image processing, and the defect sizes at the two ends are respectively calculated to be 41.75 μm and 133.45 μm according to the geometric properties of the continuous defect right trapezoid after cutting off, so as to obtain a new continuous defect scale.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.