阅读说明：本技术 传送物体的装置及其控制方法 (Apparatus for transferring object and method for controlling the same ) 是由 李俊范 崔永才 于 2020-12-02 设计创作，主要内容包括：一种装置,包括：伺服电动机,其被配置为驱动行进部以沿着行进轨道传送物体；伺服驱动器,其被配置为通过根据负载水平调节伺服电动机的转矩来控制伺服电动机的操作；过载确定单元,其被配置为检查伺服驱动器的过载程度；以及运动控制器,其被配置为根据控制行进部的操作的控制单元向其发送的传递命令来生成速度信号和速度曲线,运动控制器在伺服驱动器不处于过载状态时生成正常速度曲线,或者在伺服驱动器处于过载状态时生成校正速度曲线,并将速度信号和速度曲线传输至伺服驱动器。(An apparatus, comprising: a servo motor configured to drive the traveling section to convey the object along the traveling track; a servo driver configured to control an operation of the servo motor by adjusting a torque of the servo motor according to a load level; an overload determination unit configured to check an overload degree of the servo driver; and a motion controller configured to generate a speed signal and a speed profile according to a transfer command transmitted thereto by a control unit controlling an operation of the traveling part, the motion controller generating a normal speed profile when the servo driver is not in an overload state or generating a corrected speed profile when the servo driver is in the overload state and transmitting the speed signal and the speed profile to the servo driver.)

1. An apparatus for conveying objects, the apparatus comprising:

a servo motor configured to drive the traveling section to convey the object along the traveling track;

a servo driver configured to control an operation of the servo motor by adjusting a torque of the servo motor according to a load level;

an overload determination unit configured to check an overload degree of the servo driver; and

a motion controller configured to generate a speed signal and a speed profile according to a transfer command transmitted thereto by a control unit controlling an operation of the traveling part, the motion controller generating a normal speed profile when the servo driver is not in an overload state or generating a corrected speed profile when the servo driver is in an overload state and transmitting the speed signal and the speed profile to the servo driver.

2. The apparatus of claim 1, wherein the motion controller generates the corrected speed profile having a constant speed interval and an acceleration interval when the servo drive is in an overload state.

3. The apparatus of claim 2, wherein the motion controller generates the corrected velocity profile having a first acceleration interval having a first acceleration, a constant velocity interval, and a second acceleration interval having a second acceleration higher than the first acceleration when the servo drive is in an overload state.

4. The apparatus of claim 1, wherein the motion controller generates the corrected velocity profile having a first acceleration interval with a first acceleration and a second acceleration interval with a second acceleration higher than the first acceleration when the servo drive is in an overload state.

5. The apparatus of claim 1, wherein the overload determination unit determines whether the servo drive is in an overload state based on a non-operation time of the servo drive.

6. The apparatus of claim 5, wherein the overload determination unit comprises a timer configured to measure a non-operational time of the servo drive.

7. The apparatus of claim 1, wherein the overload determination unit defines the normal speed profile as a maximum value greater than a rating of the servo drive.

8. A method of controlling an apparatus for conveying objects, the method comprising:

generating a velocity signal to be supplied from the motion controller to the servo driver according to a transmission command transmitted from a control unit that controls an operation of the traveling section;

determining whether the servo drive is in an overload state;

when the servo driver is not in an overload state, the motion controller generates a normal speed curve; or generating a corrected speed profile corresponding to an overload state of the motion controller when the servo driver is in the overload state; and is

Driving a servo motor by the servo driver according to the normal speed profile or the corrected speed profile.

9. The method of claim 8, wherein the corrected speed profile includes a constant speed interval and an acceleration interval when the servo drive is in an overload condition.

10. The method of claim 9, wherein the corrected velocity profile includes a first acceleration interval having a first acceleration, a constant velocity interval, and a second acceleration interval having a second acceleration higher than the first acceleration when the servo drive is in an overload condition.

11. The method of claim 8, wherein the corrected velocity profile includes a first acceleration interval having a first acceleration and a second acceleration interval having a second acceleration higher than the first acceleration when the servo drive is in an overload condition.

12. The method of claim 8, wherein determining whether the servo drive is in an overload state is performed based on a non-operational time of the servo drive.

13. The method of claim 8, wherein the normal speed profile is defined to have a maximum value greater than a nominal value of the servo drive.

Background

Generally, a plurality of semiconductor manufacturing apparatuses are arranged in series to perform various processes for manufacturing semiconductor devices. The means for conveying the object may convey the object along the semiconductor manufacturing apparatus to perform each semiconductor manufacturing process.

The apparatus travels along a travel track provided in a space where the semiconductor manufacturing apparatus is provided, and may be controlled by a control unit.

A servo motor included in the apparatus for transferring an object may power the traveling part. The servo driver may control the servo motor.

When the servo driver generates a driving command to transmit the driving command to the servo motor, or when the front obstacle is released, the servo motor may start driving the traveling part.

The servo drive may be limited to operating at a speed greater than a nominal value for only a predetermined period of time. That is, when the servo driver is operated at a speed greater than a rated value for more than a predetermined period of time, overload may occur to the servo driver, and the servo driver may be stopped from operating to cause an emergency situation to occur unexpectedly. Therefore, when the movement of the servo driver is designed, a sufficient margin of the rating can be secured to suppress the occurrence of overload of the servo driver. Here, the margin is defined by subtracting a rated value from a maximum value for operating the servo motor.

Since the servo driver cannot drive the servo motor at the maximum value and only at a speed less than the rated value, the apparatus for conveying an object cannot avoid conveying the object at a relatively low moving speed. Therefore, it is necessary to improve the conveying efficiency of the apparatus of the object.

Disclosure of Invention

An embodiment of the present invention provides an apparatus for transferring an object, which is capable of correcting a normal speed profile for driving a servo motor according to an overload degree of a servo driver to generate a corrected speed profile to be provided to the servo motor.

Embodiments of the present invention provide a method of controlling an apparatus for transferring an object, which is capable of correcting a normal speed profile for driving a servo motor according to an overload degree of a servo driver to generate a corrected speed profile.

According to an example embodiment of the present invention, an apparatus for conveying an object is disclosed. The device includes: a servo motor configured to drive the traveling section to convey the object along the traveling track; a servo driver configured to control an operation of the servo motor by adjusting a torque of the servo motor according to a load level; an overload determination unit configured to check an overload degree of the servo driver; and a motion controller configured to generate a speed signal and a speed profile according to a transfer command transmitted thereto by a control unit controlling an operation of the traveling part, the motion controller generating a normal speed profile when the servo driver is not in an overload state or generating a corrected speed profile when the servo driver is in the overload state and transmitting the speed signal and the speed profile to the servo driver.

In an example embodiment, the motion controller may generate a corrected speed profile having a constant speed interval and an acceleration interval when the servo drive is in an overload state.

Here, when the servo driver is in the overload state, the motion controller may generate a correction velocity profile having a first acceleration section having a first acceleration, a constant velocity section, and a second acceleration section having a second acceleration higher than the first acceleration.

In an example embodiment, when the servo drive is in an overload state, the motion controller may generate a corrected velocity profile having a first acceleration interval with a first acceleration and a second acceleration interval with a second acceleration higher than the first acceleration.

In an example embodiment, the overload determination unit may determine whether the servo driver is in the overload state based on a non-operation time of the servo driver.

Here, the overload determination unit may include a timer configured to measure a non-operation time of the servo driver.

In an example embodiment, the overload determination unit may define the normal speed profile as a maximum value that is greater than a nominal value of the servo drive.

According to an example embodiment of the present invention, a method of controlling an apparatus for conveying an object is disclosed. In detail, according to a transmission command transmitted from a control unit controlling the operation of the traveling part, a velocity signal is generated to be supplied from the motion controller to the servo driver. Then, it is determined whether the servo driver is in an overload state. When the servo driver is not in an overload state, the motion controller generates a normal speed curve; when the servo drive is in an overload state, a corrected speed profile corresponding to the overload state of the motion controller will be generated. Then, the servo driver drives the servo motor according to the normal speed profile or the corrected speed profile.

In an example embodiment, the corrected speed profile may include a constant speed interval and an acceleration interval when the servo drive is in an overload state.

In an example embodiment, when the servo drive is in an overload state, the corrected speed profile may include a first acceleration interval having a first acceleration, a constant speed interval, and a second acceleration interval having a second acceleration higher than the first acceleration.

In an example embodiment, when the servo drive is in an overload state, the corrected speed profile may include a first acceleration interval having a first acceleration and a second acceleration interval having a second acceleration higher than the first acceleration.

In an example embodiment, determining whether the servo drive is in an overload state may be performed based on a non-operational time of the servo drive.

In an example embodiment, the normal speed profile may be defined to have a maximum value greater than a nominal value of the servo drive.

An apparatus and a method of controlling the same according to an exemplary embodiment of the present invention may generate a normal speed curve or a corrected speed curve according to whether a servo driver is overloaded. The arrangement may have an improved transfer efficiency, since the speed profile may be adjusted depending on whether the servo drive is in an overload state or not.

The above summary of the present disclosure is not intended to describe each illustrated embodiment or every implementation of the present disclosure. The following detailed description and claims more particularly exemplify these embodiments.

Drawings

Example embodiments may be understood in more detail by the following description taken in conjunction with the accompanying drawings, in which:

fig. 1 is a block diagram illustrating an apparatus for transferring an object according to an embodiment of the present invention;

FIGS. 2-4 are diagrams illustrating a normal speed profile and a corrected speed profile, respectively, generated by the motion controller of FIG. 1; and

fig. 5 is a flowchart illustrating a method of controlling an apparatus for transferring an object according to an exemplary embodiment of the present invention.

Detailed Description

While various embodiments are amenable to various modifications and alternative forms, specifics thereof have been shown by way of example in the drawings and will be described in detail. It should be understood, however, that the intention is not to limit the claimed invention to the particular embodiments described. On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the subject matter defined by the appended claims.

Hereinafter, specific embodiments regarding a raceway unit and an OHT having the same will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like reference numerals refer to like elements throughout. In the drawings, the size of layers and regions may be exaggerated for clarity.

Terms such as first, second, etc. may be used to describe various elements, but the above elements defined by the above terms should not be limited. The above terms are only used to distinguish one element from another. For example, in the present invention, a first component may be similarly named to a second component, which may also be named to the first component, without departing from the scope of the first component to the second component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the inventive concept. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the inventive concept belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

Fig. 1 is a block diagram illustrating an apparatus for transferring an object according to an embodiment of the present invention. Fig. 2 is a diagram showing an example of a normal speed profile and a corrected speed profile generated by the motion controller in fig. 1.

Referring to fig. 1 and 2, an apparatus for transferring an object 100 according to an embodiment of the present invention may travel along a travel track to transfer an object.

The apparatus 100 for transferring an object may include a moving part, a frame part, a sliding part, a lifting part, and a hand part. The object may include a Front Opening Unified Pod (FOUP), a Front Opening Shipping Box (FOSB), a magazine, a tray, and the like.

The traveling part may move along the traveling rail. The sliding portion is connected to the traveling portion so that the lifting portion moves in the horizontal direction. The lifting portion may fix the hand and move the hand in a vertical direction. The hand may hold an object. The sliding portion may move the object in a horizontal direction, and the lifting portion may move the object in a vertical direction. Thus, the device 100 including the traveling part, the sliding part, the lifting part, and the hand part can transfer the object.

The apparatus for transferring an object 100 includes a servo motor 110, a servo driver 120, an overload determination unit 130, and a motion controller 140.

The servo motor 110, the servo driver 120, the overload determiner 130, and the motion controller 140 may be provided in the traveling part.

The servo motor 110 may provide a driving force to the traveling part to rotate a driving wheel included in the traveling part, thereby causing the apparatus 100 for transferring an object to operate in a horizontal direction.

The servo driver 120 is connected to the servo motor 110. The servo driver 120 may control the operation of the servo motor 110.

Specifically, the servo driver 120 may control the servo motor 110 according to a velocity profile generated by the motion controller 140 to be provided to the servo driver 120.

Meanwhile, the servo driver 120 may drive the servo motor 110. The servo drive 120 may operate at a predetermined nominal value and a maximum value that is about 10% to about 20% greater than the predetermined nominal value.

That is, the servo driver 120 can drive the servo motor 110 at the maximum value. Generally, when the servo driver 120 drives the servo motor 110 at a rated value to have a margin of about 10-20% lower than the maximum value, the servo driver 120 may be restrained from being overloaded due to a margin of about 10% to about 20%. However, since the servo driver 120 may not drive the servo motor 110 at the maximum value, the servo driver 120 may have poor efficiency.

The overload determination unit 130 may determine whether the servo driver 120 is overloaded. The overload determination unit 130 may determine whether there is an overload by measuring a non-operation time of the servo driver 120. The overload determination unit 130 may include a timer 135 for measuring an operation time of the servo driver 120.

When the non-operation time of the servo driver 120 does not exceed the standard value, the overload determination unit 130 may determine that the servo driver 120 is in the overload state. When the non-operation time of the servo driver 120 exceeds a standard value, the overload determination unit 130 may determine that the servo driver 120 is not overloaded.

The motion controller 140 receives a transmission command to operate the apparatus for transmitting an object 100 from the control unit 10, the control unit 10 being configured to control the operation of the apparatus for transmitting an object 100. In addition, the motion controller 140 may generate a velocity signal and a velocity profile for the apparatus for transferring an object 100 according to the transfer command, and may transmit the velocity signal and the velocity profile to the servo driver 120.

The velocity signal may include information for calculating a constant velocity value, an acceleration value, and a deceleration value for the apparatus for conveying objects 100. The speed profile may include speed information, which may vary with respect to the travel time of the apparatus 100.

When the servo drive 120 is not in an overload state, the motion controller 140 generates a normal speed profile.

However, when the servo driver 120 is in an overload state, the motion controller 140 generates a corrected speed profile.

That is, the inefficiency of the servo driver 120 due to the above-described operation margin of the servo driver 120 may be required. When the servo driver 120 stops for a non-operation time equal to or greater than the reference value, the apparatus 100 may move at a constant speed or may be maintained in a stationary state, and the servo driver 120 may be sufficiently cooled.

Accordingly, the servo driver 120 may be set to drive the servo motor 110 at a maximum value greater than a rated value. Accordingly, the servo motor 110 can operate the traveling part to the maximum acceleration value. In this case, the motion controller 140 may generate a normal speed curve having the maximum acceleration value. As a result, the servo driver 120 drives the servo motor 110 at the maximum value, thereby increasing the output value of the servo motor 110 to improve the efficiency of the apparatus 100.

Meanwhile, when the servo driver 120 has stopped for a non-operation time (t) lower than the reference value_cs) The servo driver 120 may still be in an overload state. Therefore, the motion controller 140 corrects the normal speed profile so that the servo driver 120 can be additionally stopped as a non-operation time, i.e., an additional constant speed time t_cs1. When the additional non-operation time elapses and the servo driver 120 has the non-operation time greater than or equal to the reference value, the servo driver 120 may drive the servo motor 110 at a maximum value greater than the rated value. Thus, the servomotor 110 can be operated at maximum accelerationAs a driving unit. As a result, the normal speed profile is corrected to produce a profile including a constant speed section (t)_cs1) And a maximum acceleration interval (t)_acc) The correct speed profile. After the servo driver 120 is cooled, the servo driver 120 may drive the servo motor 110 at a maximum value. In summary, the apparatus 100 may have improved efficiency.

Fig. 3 is a diagram showing another example of a normal speed profile and a corrected speed profile generated by the motion controller in fig. 1.

Referring to fig. 3, when the servo driver 120 is in an overload state, the motion controller 140 is configured to generate a correct velocity profile including a first acceleration interval t having a first acceleration_acc1Constant speed interval t_cs1A second acceleration interval t with a second acceleration higher than the first acceleration_acc2. In a first acceleration interval t_acc1The servo driver 120 may drive the servo motor 100 at a first acceleration lower than the second acceleration, i.e., at a relatively low torque or current. Then, the servo driver 120 is at a constant speed interval t_cs1The period is stopped. Accordingly, the servo driver 120 can be released from the overload state. Then, the servo driver 120 is driven at a speed greater than the second acceleration interval t_acc2Drives the servo motor 110 at a second acceleration that is the first acceleration. In the second acceleration interval t_acc2The servo driver 120 may drive the servo motor 110 at a maximum value greater than a rated value. Therefore, the servo motor 110 can operate the driving unit at the maximum acceleration.

Fig. 4 is a diagram showing still another example of a normal speed profile and a corrected speed profile generated by the motion controller in fig. 1.

Referring to fig. 4, when the servo driver 120 is in an overload state, the motion controller 140 is configured to generate a correct velocity profile including a first acceleration interval t having a first acceleration_acc1And a second acceleration section t having a second acceleration higher than the first acceleration_acc2. In a first acceleration interval t_acc1The servo driver 120 may be at a first acceleration lower than the second accelerationThe servomotor 100 is driven at a relatively low speed, i.e., with a relatively low torque or current. Accordingly, the servo driver 120 can be released from the overload state. Then, the servo driver 120 accelerates for a period t greater than the second acceleration period_acc2Drives the servo motor 110 at a second acceleration that is the first acceleration. In the second acceleration interval t_acc2The servo driver 120 may drive the servo motor 110 at a maximum value greater than a rated value. Therefore, the servo motor 110 can operate the driving unit at the maximum acceleration.

Fig. 5 is a flowchart illustrating a method of controlling an apparatus for transferring an object according to an exemplary embodiment of the present invention.

Referring to fig. 1 and 5, first, a speed signal is generated in S110. The velocity signal is provided to the servo driver 120 by the motion controller 140. The motion controller 140 generates a speed signal according to the transmission command that the control unit 10 sends to the motion controller 140 in S110.

The speed signal may include information about the constant speed value, acceleration, and deceleration rate of the object transfer device 100.

Next, the overload state of the servo driver 120 is determined in S120.

When the servo driver 120 is not in the overload state, the servo driver 120 may drive the servo motor 110 at a normal speed profile corresponding to a maximum value greater than a rated value. Therefore, the conveying efficiency of the apparatus 100 for conveying an object can be improved.

When the servo driver 120 is stopped longer than the reference value, it is determined that the servo driver 120 is not in the overload state or released from the overload state. In these cases, motion controller 140 may drive servo drive 120 to a maximum value by generating a normal speed profile with a maximum value greater than a nominal value.

When the time for which the servo driver 120 is stopped is less than the reference value, it is determined that the servo driver 120 is in the overload state.

In S140, the motion controller 140 generates a corrected speed profile by correcting a normal speed profile for operating the servo driver when the servo driver 120 is in an overload state. In this case, the correction speed profile may have a constant speed interval or a relatively low first acceleration interval.

In the constant speed section, the servo driver 120 can be cooled by stopping the driving of the servo motor. Further, in the first acceleration section, the servo driver 120 can be cooled by driving the motor at a relatively low acceleration.

Then, in S150, the servo driver 120 drives the servo motor 110 according to one of the normal speed profile and the corrected speed profile.

When the velocity profile is a normal velocity profile, the device 100 may travel at maximum acceleration by operating the servo motor 110. In this case, the servo driver 120 may operate at a maximum value greater than the rated value.

When the speed profile is a corrected speed profile, the servo motor 110 can be operated at a rated value, and the apparatus 100 can achieve relatively low efficiency because the rated value is less than the maximum value. For example, the corrected speed profile includes a constant speed section or a low acceleration section. After cooling the servo drive 120 to release from the overload condition, the servo drive 120 may have a maximum value greater than a rated value. Therefore, the servo motor can drive the drive unit at the maximum acceleration.

As described above, the apparatus for transferring an object and the method of controlling the same according to the present invention can generate a normal speed profile or a corrected speed profile according to whether the servo driver is in an overload state. The device can ensure improved transport efficiency.

Although the exemplary embodiments of the present invention have been described with reference to specific embodiments, they are not limited thereto. Accordingly, those skilled in the art will readily appreciate that various modifications and changes may be made thereto without departing from the spirit and scope of the present disclosure, which is defined by the appended claims.