阅读说明：本技术 微音叉谐振器刚度自动匹配结构和方法 (Automatic rigidity matching structure and method for tuning fork resonator ) 是由 崔健 赵前程 于 2020-12-22 设计创作，主要内容包括：本申请实施例提供了一种微音叉谐振器刚度自动匹配结构和方法,涉及微机电传感器领域,所述方法包括：微音叉谐振器子谐振器上都添加独立的加力结构和匹配结构,通过加力结构产生对应的共模驱动力,通过前置读出电路输出振动信号,通过振动信号,自动获取开关控制信号和匹配电压,并将匹配电压施加于匹配结构上,进行负反馈控制,完成自动刚度匹配。采取本申请的技术方案,可以实现振动刚度的高效率、高精度匹配,且摆脱了对振动台的依赖,降低调试成本,并且,本申请可摆脱现有匹配方法中对振动台的依赖,且不受振动台激励信号频率范围限制、振动台安装限制,当微音叉谐振器在应用场景中安装固定后仍然可以实现原位在线匹配,无需使用振动台。(The embodiment of the application provides a structure and a method for automatically matching the rigidity of a tuning fork resonator, which relate to the field of micro-electromechanical sensors, and the method comprises the following steps: independent stress application structures and matching structures are added on the sub-resonators of the micro-tuning fork resonator, corresponding common-mode driving force is generated through the stress application structures, vibration signals are output through a front-end reading circuit, switch control signals and matching voltages are automatically obtained through the vibration signals, the matching voltages are applied to the matching structures, negative feedback control is conducted, and automatic rigidity matching is completed. By adopting the technical scheme, the high-efficiency and high-precision matching of the vibration rigidity can be realized, the dependence on the vibration table is eliminated, the debugging cost is reduced, the dependence on the vibration table in the existing matching method can be eliminated, the limitation of the frequency range of the excitation signal of the vibration table and the limitation of the installation of the vibration table are avoided, the in-situ online matching can still be realized after the tuning fork resonator is fixedly installed in an application scene, and the vibration table does not need to be used.)

1. An automatic matching structure of rigidity of a tuning fork resonator is characterized by comprising:

each sub-resonator is provided with a force application structure and a matching structure;

the output end of the bias voltage circuit is connected with the vibration mass block of the sub-resonator;

the output end of the voltage generation circuit is connected with the stress application structure, so that the stress application structure generates a common-mode driving force and acts on the sub-resonator;

the input end of the preposed readout circuit is connected with the output end of the sub-resonator and is used for receiving the vibration displacement signal output by the sub-resonator and outputting a vibration signal;

the digital processing circuit is connected with the output end of the preposed reading circuit and is used for processing the vibration signal to obtain a switch control signal and a matching voltage signal;

and the switching circuit is connected with the output end of the digital processing circuit and is used for applying the matching voltage signal to a matching structure indicated by the switching control signal so that the matching structure adjusts the rigidity of the vibration mass blocks of the sub-resonators connected with the matching structure until the rigidity of the vibration mass blocks of the sub-resonators is matched.

2. The tuning fork resonator stiffness auto-matching structure of claim 1, wherein the voltage generation circuit comprises:

the output end of the sine wave generator is connected with the input end of the first digital-to-analog converter;

and the output end of the first digital-to-analog converter is connected with the force application structure, so that the force application structure generates a common-mode driving force and acts on the sub-resonator.

3. The tuning fork resonator stiffness auto-matching structure of claim 1, wherein the front-end readout circuit comprises:

the two preposed reading sub-circuits are connected with the output ends of the detection electrodes of the sub-resonators;

and the differential amplifier is connected with two output ends of the two preposed reading sub-circuits and outputs differential mode vibration signals.

4. The tuning fork resonator stiffness auto-matching structure of claim 1, wherein the digital processing circuit comprises:

the analog-to-digital converter is connected with the output end of the preposed reading circuit and is used for carrying out digital processing on the vibration signal to obtain a digital quantization signal;

the full-wave rectifier is connected with the output end of the analog-to-digital converter and is used for performing full-wave rectification on the digital quantized signal;

the low-pass filter is connected with the output end of the full-wave rectifier to obtain an amplitude signal;

the PID controller is connected with the output end of the low-pass filter and processes the amplitude signal to the matching signal;

the second digital-to-analog converter is connected with the matching signal output end of the digital control circuit and outputs a matching voltage signal;

and the switch control circuit is connected with the output end of the low-pass filter and outputs the switch control signal.

5. The tuning fork resonator stiffness auto-matching structure of claim 4, wherein the PID controller processes the amplitude signal to obtain the matching signal, comprising:

K_s1+K_se1＝K_s2or K_s2+K_se2＝K_s1 (1)

K_se1，2＝-η(V_p-V_s)² (2)

Wherein, K_s1Is the stiffness, K, of a sub-resonator in a certain vibration direction_se1Adjusting the stiffness, K, of the matching structure for a sub-resonator_s2For the stiffness of the other sub-resonator in a certain vibration direction, K_se2Adjusting stiffness, V, of the matching structure of another resonator, respectively_sFor regulating voltage of said matching structure, V_pThe bias voltages of the two sub-resonators are shown, and eta is an electrostatic negative stiffness conversion coefficient;

obtained by the formulas (1) and (2), and the matching signal is

Where Δ k is the difference in stiffness of the two subresonators.

6. The tuning fork resonator stiffness auto-matching structure of claim 1, wherein the switching circuit comprises:

the common end of the electronic single-pole double-throw switch is connected with a matching voltage signal output end of the digital control circuit, the control end of the electronic single-pole double-throw switch is connected with a switch control signal output end of the digital control circuit, and the electronic single-pole double-throw switch applies the matching voltage signal to a matching structure indicated by the switch control signal so that the matching structure can adjust the rigidity of the vibration mass block of the sub-resonator connected with the matching structure until the rigidity of the vibration mass blocks of the sub-resonators is matched.

7. The tuning fork resonator stiffness auto-matching structure of claim 1,

the vibration pickup structure of the sub-resonator includes any one of:

differential capacitive structure, piezoelectric structure.

8. The tuning fork resonator stiffness auto-matching structure of claim 1,

the matching structure is an electrostatic negative stiffness adjusting structure of the squeeze film capacitor.

9. The tuning fork resonator stiffness auto-matching structure of claim 1, wherein the input of the pre-sensing circuit is connected to the sub-resonator output, comprising:

the input end of the prepositive readout circuit is connected with the detection electrode of the vibration pickup structure of the sub-resonator;

the detection electrode outputs a vibration displacement signal of the vibration mass block, and the vibration displacement signal comprises any one of the following signals: capacitance variation, charge variation, and resistance variation.

10. A tuning fork resonator rigidity automatic matching method applied to the rigidity automatic matching structure according to any one of claims 1 to 9, the method comprising:

applying a bias voltage to the sub-resonator by the bias voltage circuit;

applying a driving voltage to the force application structure through the voltage generation circuit so that the force application structure generates a common-mode driving force and acts on the sub-resonator;

receiving the vibration displacement signal output by the sub-resonator through a preposed reading circuit and outputting a vibration signal;

processing the vibration signal through the digital processing circuit to obtain a switch control signal and a matching voltage signal;

applying the matching voltage signal to the matching structure indicated by the switching control signal through a switching circuit to cause the matching structure to adjust the stiffness of the vibrating masses of the sub-resonators connected thereto until the stiffness between the vibrating masses of the sub-resonators matches.

Technical Field

The embodiment of the application relates to the field of micro-electromechanical sensors, in particular to a structure and a method for automatically matching rigidity of a tuning fork resonator.

Background

The tuning fork resonator is a resonance type device with the characteristic dimension in the micron order processed by the microelectronic process, is a core basic structure component of various microsensors, such as a micro-electromechanical gyroscope, a micro-resonance temperature sensor, a micro-mass sensor and the like, has small volume and low cost, is suitable for batch processing, and has wide application prospect.

The tuning fork resonator generally differentially interconnects the detection structures of the two sub-resonators to sense useful differential input signals, suppress external common mode interference signals, and reduce the sensitivity of the tuning fork resonator to common mode vibration signals. However, due to the existence of process errors, the structural parameters of the two sub-resonators are inconsistent, the rigidity of the two sub-resonators is not matched in a certain vibration direction, and when a vibration common mode interference signal exists in an actual application environment, the motion displacements of the two sub-resonators are inconsistent, so that the external vibration interference cannot be completely counteracted, and the output error of the micro-tuning fork resonator is caused. In order to solve the problem, the Tuning the Anti-Phase Mode sensing to Vibrations of a MEMS gyro by Pierre Janioud, Alexandra Koumela, Christophe pouulin, Patrice Rey et al, proposes to use the electrostatic negative stiffness effect to perform stiffness matching on the designed Tuning fork resonator, thereby reducing the Sensitivity to external vibration. However, the method adopts manual rough debugging, so that high-efficiency and high-precision matching is difficult to achieve, meanwhile, the method has the defects of long debugging time and high cost, and needs to be adjusted by using a vibration table, so that offline matching degree verification test cannot be performed on devices which are installed in application.

Disclosure of Invention

The embodiment of the application provides an automatic rigidity matching structure of a tuning fork resonator, and aims to solve the problems that an existing rigidity matching method of the tuning fork resonator is low in efficiency, low in precision, long in cost and high in cost, and cannot perform offline matching degree verification test on installed devices.

The first aspect of the embodiments of the present application provides an automatic matching structure for rigidity of a tuning fork resonator, where the structure includes:

each sub-resonator is provided with a force application structure and a matching structure;

the output end of the bias voltage circuit is connected with the vibration mass block of the sub-resonator;

the output end of the voltage generation circuit is connected with the stress application structure, so that the stress application structure generates a common-mode driving force and acts on the sub-resonator;

the input end of the preposed readout circuit is connected with the output end of the sub-resonator and is used for receiving the vibration displacement signal output by the sub-resonator and outputting a vibration signal;

the digital processing circuit is connected with the output end of the preposed reading circuit and is used for processing the vibration signal to obtain a switch control signal and a matching voltage signal;

and the switching circuit is connected with the output end of the digital processing circuit and is used for applying the matching voltage signal to a matching structure indicated by the switching control signal so that the matching structure adjusts the rigidity of the vibration mass blocks of the sub-resonators connected with the matching structure until the rigidity of the vibration mass blocks of the sub-resonators is matched.

Optionally, the voltage generating circuit includes:

the output end of the sine wave generator is connected with the input end of the first digital-to-analog converter;

and the output end of the first digital-to-analog converter is connected with the force application structure, so that the force application structure generates a common-mode driving force and acts on the sub-resonator.

Optionally, the two pre-readout sub-circuits are connected to the output ends of the detection electrodes of the sub-resonators;

a differential amplifier connected with two output ends of the two preposed readout sub-circuits for outputting differential mode vibration signals

Optionally, the digital processing circuit includes:

the analog-to-digital converter is connected with the output end of the preposed reading circuit and is used for carrying out digital processing on the vibration signal to obtain a digital quantization signal;

the full-wave rectifier is connected with the output end of the analog-to-digital converter and is used for performing full-wave rectification on the digital quantized signal;

the low-pass filter is connected with the output end of the full-wave rectifier to obtain an amplitude signal;

the PID controller is connected with the output end of the low-pass filter and processes the amplitude signal to obtain the matching signal;

the second digital-to-analog converter is connected with the matching signal output end of the digital control circuit and outputs a matching voltage signal;

and the switch control circuit is connected with the output end of the low-pass filter and outputs the switch control signal.

Optionally, the processing, by the PID controller, the amplitude signal to obtain the matching signal includes:

K_s1+K_se1＝K_s2or K_s2+K_se2＝K_s1 (1)

K_se1,2＝-η(V_p-V_s)² (2)

Wherein, K_s1Is the stiffness, K, of a sub-resonator in a certain vibration direction_se1Adjusting the stiffness, K, of the matching structure for a sub-resonator_s2For the stiffness of the other sub-resonator in a certain vibration direction, K_se2Adjusting stiffness, V, of the matching structure of another resonator, respectively_sFor regulating voltage of said matching structure, V_pThe bias voltages of the two sub-resonators are shown, and eta is an electrostatic negative stiffness conversion coefficient;

obtained by the formula (1) and the formula (2)

Where Δ k is the difference in stiffness of the two subresonators.

Optionally, the switching circuit includes:

the switching circuit includes:

the common end of the electronic single-pole double-throw switch is connected with a matching voltage signal output end of the digital control circuit, the control end of the electronic single-pole double-throw switch is connected with a switch control signal output end of the digital control circuit, and the electronic single-pole double-throw switch applies the matching voltage signal to a matching structure indicated by the switch control signal so that the matching structure can adjust the rigidity of the vibration mass block of the sub-resonator connected with the matching structure until the rigidity of the vibration mass blocks of the sub-resonators is matched.

Alternatively to this, the first and second parts may,

the vibration pickup structure of the sub-resonator includes any one of:

differential capacitive structure, piezoelectric structure.

Alternatively to this, the first and second parts may,

the matching structure is an electrostatic negative stiffness adjusting structure of the squeeze film capacitor.

Optionally, the input end of the pre-sensing circuit is connected to the output end of the sub-resonator, and the pre-sensing circuit includes:

the input end of the prepositive readout circuit is connected with the detection electrode of the vibration pickup structure of the sub-resonator;

the detection electrode outputs a vibration displacement signal of the vibration mass block, and the vibration displacement signal comprises any one of the following signals: capacitance variation, charge variation, and resistance variation.

A second aspect of the embodiments of the present application provides an automatic rigidity matching method for a tuning fork resonator, which is applied to the automatic rigidity matching structure described in any one of the above, where the method includes:

applying a voltage to the sub-resonator by the bias voltage circuit;

applying a voltage to the forcing structure through the voltage generating circuit so that the forcing structure generates a common-mode driving force and acts on the sub-resonator;

receiving the vibration displacement signal output by the sub-resonator through a prepositive reading circuit and outputting a vibration signal

Processing the vibration signal through the digital processing circuit to obtain a switch control signal and a matching voltage signal;

applying the matching voltage signal to the matching structure indicated by the switching control signal through a switching circuit to cause the matching structure to adjust the stiffness of the vibrating masses of the sub-resonators connected thereto until the stiffness between the vibrating masses of the sub-resonators matches.

The embodiment of the application provides a structure and a method for automatically matching the rigidity of a tuning fork resonator, wherein an independent stress application structure and an independent matching structure are added on two sub-resonators of a tuning fork resonator device, a driving voltage is applied on the stress application structure to generate a corresponding common-mode driving force, a vibration displacement signal output by the sub-resonators is received through a front-arranged reading circuit and outputs a vibration signal, a switch control signal and a matching voltage are automatically obtained through the vibration signal, the matching voltage is applied on the matching structure, negative feedback control is carried out, and automatic rigidity matching is completed. By adopting the technical scheme, the high-efficiency and high-precision matching of the vibration rigidity can be realized, the dependence on the vibration table is eliminated, and the debugging cost is reduced.

In addition, the method can get rid of the dependence on the vibrating table in the existing matching method, is not limited by the frequency range of the exciting signal of the vibrating table and the installation of the vibrating table, can still realize in-situ online matching after the tuning fork resonator is installed and fixed in an application scene, and does not need to use the vibrating table.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the description of the embodiments of the present application will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive exercise.

Fig. 1 is a schematic diagram of an automatic stiffness matching structure of a tuning fork resonator according to an embodiment of the present application;

fig. 2 is a schematic view of a tuning fork resonator stiffness auto-matching structure according to an embodiment of the present application;

fig. 3 is a schematic diagram of an automatic stiffness matching structure of a tuning fork resonator according to an embodiment of the present application;

fig. 4 is a flowchart of a method for automatically matching the stiffness of a tuning fork resonator according to an embodiment of the present application.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Referring to fig. 1, fig. 1 is a schematic diagram of a stiffness auto-matching structure of a micro tuning fork resonator according to an embodiment of the present application. As shown in fig. 1, the tuning fork resonator rigidity automatic matching structure includes:

at least two sub-resonators of the tuning fork resonator 100, each sub-resonator being provided with a force application structure and a matching structure;

referring to fig. 2, fig. 2 is a partial schematic view of a tuning fork resonator 100 of a tuning fork resonator stiffness auto-matching structure according to an embodiment of the present application. The tuning fork resonator 100 comprises two sub-resonators 101 and 102, each comprising a vibrating mass, a driving structure and a sensing structure, etc., e.g. the sub-resonator 101 is composed of a vibrating mass 1, a vibrating spring beam 5, an anchor point 3, a vibrating pick-up structure 12. The vibrating mass 1 is connected to the anchor point 3 by a vibrating spring beam 5; the subresonator 102 is composed of a vibrating mass 2, a vibrating spring beam 7, an anchor point 4, and a vibrating pick-up structure 13, the vibrating mass 2 being connected to the anchor point 4 through the vibrating spring beam 7. The subresonators 101 and 102 are connected by the coupling spring beam 6 to form a tuning fork structure.

In the embodiment of the application, a force application structure and a matching structure are additionally arranged on each sub-resonator, the force application structure 18 and the matching structure 16 are arranged on the sub-resonator 101, and the force application structure 19 and the matching structure 17 are additionally arranged on the sub-resonator 102.

When the two sub-resonators are driven by the same magnitude and opposite directions, the two sub-resonators simultaneously move oppositely to balance the moment of the substrate brought by the single resonator, the displacement change of the two sub-resonators can be detected through the vibration pickup structure, and the motion information of the micro-tuning fork resonator can be obtained through the vibration displacement signal output by the vibration pickup structure.

A bias voltage circuit 107, the output of which is connected to the vibrating mass of the sub-resonator.

A DC bias voltage 107 is simultaneously applied to the vibrating masses 1 and 2 of the two subresonators 101 and 102, and the voltage amplitude thereof can be set to V_p

The output end of the voltage generating circuit 106 is connected with the boosting structure, so that the boosting structure generates a common-mode driving force and acts on the sub-resonator;

the voltage generating circuit 106 can generate a driving voltage with a specific amplitude and frequency to be applied to the forcing structures 19 and 18, so as to generate virtual vibration forces 20 and 21 in the same direction to drive the vibrating masses 1 and 2 to vibrate simultaneously, and the generated driving forces 20 and 21 are equal in magnitude and same in direction due to the symmetrical structures of the sub-resonators 1 and 2.

And the input end of the preposed readout circuit 103 is connected with the output end of the sub-resonator, and is used for receiving the vibration displacement signal output by the sub-resonator and outputting a vibration signal.

The pre-readout circuit 103 is connected to the output terminals of the two sub-resonators, processes the received two signals, and outputs a vibration signal generated by the virtual vibration force of the tuning fork resonator.

And the digital processing circuit 104 is connected with the output end of the preposed reading circuit 103, and processes the vibration signal to obtain a switch control signal and a matching voltage signal.

The digital processing circuit 104 receives the vibration signal output by the pre-readout circuit 103, and on one hand, the digital processing circuit calculates a matching voltage signal required for adjusting the vibration stiffness of the sub-resonator according to the differential mode vibration voltage signal, and on the other hand, the digital control circuit also needs to judge according to the differential mode vibration voltage signal and output a switch control signal according to the judgment result.

A switch circuit 105, connected to the output of the digital processing circuit, for applying the matching voltage signal to the matching structure indicated by the switch control signal, so that the matching structure adjusts the stiffness of the vibrating masses of the sub-resonators connected thereto until the stiffness of the vibrating masses of the sub-resonators matches.

The switch circuit 105 is connected with the output end of the digital control circuit 104, and the on-off of the switch circuit is controlled by a switch control signal, so that the matching voltage can be connected with different electrostatic negative stiffness adjusting structures, and the vibration stiffness of the sub-resonator can be changed after the matching voltage is connected with the electrostatic negative stiffness adjusting structures to obtain the voltage.

The two sub-resonators of the tuning fork resonator device are respectively added with an independent stress application structure and an electrostatic negative stiffness adjusting structure, then a driving voltage is applied to the stress application structure to generate a common-mode driving force to vibrate the sub-resonators, a vibration displacement signal output by the sub-resonators due to vibration is differentially received through a front reading circuit and a vibration signal is output, a switch control signal and a matching voltage are automatically obtained through the vibration signal, the matching voltage is applied to the electrostatic negative stiffness adjusting structure, negative feedback control is carried out, and automatic stiffness matching is completed.

The embodiment of the application provides a structure and a method for automatically matching the rigidity of a tuning fork resonator, wherein an independent stress application structure and an independent matching structure are added on two sub-resonators of a tuning fork resonator device, a driving voltage is applied on the stress application structure to generate a corresponding common-mode driving force, a vibration displacement signal output by the sub-resonators is received through a front-arranged reading circuit and outputs a vibration signal, a switch control signal and a matching voltage are automatically obtained through the vibration signal, the matching voltage is applied on the matching structure, negative feedback control is carried out, and automatic rigidity matching is completed. By adopting the technical scheme, the high-efficiency and high-precision matching of the vibration rigidity can be realized, the dependence on the vibration table is eliminated, and the debugging cost is reduced.

In addition, the method can get rid of the dependence on the vibrating table in the existing matching method, is not limited by the frequency range of the exciting signal of the vibrating table and the installation of the vibrating table, can still realize in-situ online matching after the tuning fork resonator is installed and fixed in an application scene, and does not need to use the vibrating table.

In an alternative embodiment of the present application, referring to fig. 3, fig. 3 is a schematic diagram of a stiffness automatic matching structure of a tuning fork resonator according to an embodiment of the present application. As shown in fig. 3, the voltage generation circuit includes:

the output end of the sine wave generator is connected with the input end of the first digital-to-analog converter;

and the output end of the first digital-to-analog converter is connected with the force application structure, so that the force application structure generates a common-mode driving force and acts on the sub-resonator.

The sine wave generator 212 can generate signals with fixed amplitude and frequency, the output end of the sine wave generator is connected with the D/A digital-to-analog converter 215 to obtain driving voltage signals 220 with fixed amplitude and frequency, and the driving voltage signals are respectively connected to the driving force application structure electrodes 22 and 23 of the two sub-resonators to generate virtual vibration force.

Optionally, the pre-sensing circuit includes:

the two preposed reading sub-circuits are connected with the output ends of the detection electrodes of the sub-resonators;

a differential amplifier connected with two output ends of the two pre-readout sub-circuits for outputting differential mode vibration signal

The prepositive reading circuit adopts a differential structure, the input end of the circuit is the difference value of two sub-resonator signals, a differential amplifier is adopted to amplify the difference value of the two input signals to obtain a differential mode vibration voltage signal, and the differential amplifier is an electronic amplifier and can amplify the difference of the two input ends with fixed gain. The differential structure can make the effective input of the interference signal zero, thus achieving the purpose of common mode interference resistance.

Optionally, the digital processing circuit includes:

the analog-to-digital converter is connected with the output end of the preposed reading circuit and is used for carrying out digital processing on the vibration signal to obtain a digital quantization signal;

the full-wave rectifier is connected with the output end of the analog-to-digital converter and is used for performing full-wave rectification on the digital quantized signal;

the low-pass filter is connected with the output end of the full-wave rectifier to obtain an amplitude signal;

the PID controller is connected with the output end of the low-pass filter and processes the amplitude signal to obtain the matching signal;

the second digital-to-analog converter is connected with the matching signal output end of the digital control circuit and outputs a matching voltage signal;

and the switch control circuit is connected with the output end of the low-pass filter and outputs the switch control signal.

The vibration signal is converted into a digital signal form, rectification and filtering are carried out on the vibration signal, an amplitude signal output by a low-pass filter is divided into two paths of signals, one path of signal is sent to a switch control circuit to be distinguished on the amplitude to obtain a switch control signal, the other path of signal is sent to a proportional-integral-derivative (PID) controller to be processed by using a proportional-integral-derivative control algorithm to obtain a matching signal, the matching signal obtained by the PID controller is in a digital signal form, the digital signal cannot be directly used by a static negative stiffness matching structure, and the matching signal needs to be subjected to analog conversion by using a second digital-to-analog converter to obtain a matching voltage signal.

The switching circuit includes:

the common end of the electronic single-pole double-throw switch is connected with a matching voltage signal output end of the digital control circuit, the control end of the electronic single-pole double-throw switch is connected with a switch control signal output end of the digital control circuit, and the electronic single-pole double-throw switch applies the matching voltage signal to a matching structure indicated by the switch control signal so that the matching structure can adjust the rigidity of the vibration mass block of the sub-resonator connected with the matching structure until the rigidity of the vibration mass blocks of the sub-resonators is matched.

The common terminal of the electronic single-pole double-throw switch of the switch circuit receives the matching voltage signal output by the second digital-to-analog converter, and the control terminal of the electronic single-pole double-throw switch receives the switch control signal output by the switch control circuit. According to different switch control signals, the electronic single-pole double-throw switch can control the connection and disconnection of the matching voltage signal and different static negative stiffness adjusting structures.

In an optional embodiment of the present application, the processing of the amplitude signal by the PID controller to obtain the matching signal includes:

K_s1+K_se1＝K_s2or K_s2+K_se2＝K_s1 (1)

K_se1,2＝-η(V_p-V_s)² (2)

Wherein, K_s1Is the stiffness, K, of a sub-resonator in a certain vibration direction_se1Adjusting the stiffness, K, of the matching structure for a sub-resonator_s2For the stiffness of the other sub-resonator in a certain vibration direction, K_se2Adjusting stiffness, V, of the matching structure of another resonator, respectively_sFor regulating voltage of said matching structure, V_pThe bias voltages of the two sub-resonators are shown, and eta is an electrostatic negative stiffness conversion coefficient;

obtained by the formula (1) and the formula (2)

Where Δ k is the difference in stiffness of the two subresonators.

According to the method, the sub-resonators with lower rigidity are used as matching references, and the matching structure can only realize negative rigidity, so that the rigidity of a certain sub-resonator can only be reduced, but the judgment of which sub-resonator has lower rigidity cannot be carried out in advance, so that two matching equations can be provided as shown in formula (1).

It can be seen from equation (1) that the difference in stiffness between the sub-resonators is the same, and thus K_se1Value of (A) and K_se2Is equal in magnitude and opposite in value, K_se1And K_se2Absolute value of (K)_se1,2Can be calculated by the formula (2).

The calculation formula of the corresponding adjustment voltage of the stiffness difference Δ k of the two sub-resonators, namely, the formula (3), can be obtained by the formulas (1) and (2). The PID controller calculates the matching signal which is corresponding to the output and is currently input by the amplitude signal through the formula (3).

In an alternative embodiment of the present application, the vibration pickup structure of the sub-resonator includes any one of:

differential capacitive structure, piezoelectric structure.

Different structures such as a differential capacitive structure and a piezoelectric structure can be adopted for the vibration pickup structure of the sub-resonator.

Optionally, the input end of the pre-sensing circuit is connected to the output end of the sub-resonator, and the pre-sensing circuit includes:

the input end of the prepositive readout circuit is connected with the detection electrode of the vibration pickup structure of the sub-resonator;

the detection electrode outputs a vibration displacement signal of the vibrating mass, and the vibration displacement signal comprises any one of the following signals: capacitance variation, charge variation, and resistance variation.

When the vibration pickup structure adopts different detection structures, the vibration displacement signals output by the detection electrodes can also be different, such as capacitance variation, charge variation, resistance variation, and the like.

In an alternative embodiment of the present application, the matching structure is an electrostatic negative stiffness adjustment structure of a squeeze film capacitor.

Based on the same inventive concept, an embodiment of the application provides an automatic matching method for the rigidity of a micro tuning fork resonator. Referring to fig. 4, fig. 4 is a flowchart of a method for automatically matching stiffness of a tuning fork resonator according to an embodiment of the present application. As shown in fig. 4, the method is applied to the rigidity automatic matching structure described in any one of the above, and the method includes:

step S400, applying bias voltage to the sub-resonator through the bias voltage circuit;

step S401, a driving voltage is applied to the boosting structure through the voltage generating circuit, so that the boosting structure generates a common-mode driving force and acts on the sub-resonator;

step S402, receiving the vibration displacement signal output by the sub-resonator through a prepositive reading circuit and outputting a vibration signal

Step S403, processing the vibration signal through the digital processing circuit to obtain a switch control signal and a matching voltage signal;

step S404, applying the matching voltage signal to the matching structure indicated by the switching control signal through a switching circuit, so that the matching structure adjusts the stiffness of the vibrating masses of the sub-resonators connected thereto until the stiffness between the vibrating masses of the sub-resonators matches.

Applying a bias voltage to the vibrating mass of the sub-resonator;

applying a driving voltage to the boosting structure to enable the boosting structure to generate, wherein the common-mode driving force drives the two sub-resonators to vibrate;

receiving vibration displacement signals output by the sub-resonators to obtain vibration signals, reading the motion displacement signals of the two sub-resonators, and converting to obtain the vibration signals of the two sub-resonators;

carrying out digital processing on the vibration signal to obtain a digital quantized signal, and carrying out full-wave rectification and low-pass filtering on the digital quantized signal to obtain an amplitude signal;

dividing the amplitude signal into two paths of signals, carrying out amplitude discrimination on one path of signal to obtain a switch control signal, processing the other path of signal by using a proportional-integral-derivative control algorithm to obtain a matching signal, and carrying out analog conversion on the matching signal to obtain a matching voltage signal;

and controlling the connection of the matching voltage signal and the electrostatic negative stiffness adjusting structure through a control signal until the main stiffness of the two sub-resonators is the same.

And for the amplitude signal, one path of the amplitude signal is sent to a PID controller to calculate a first matching signal corresponding to the amplitude, the first matching signal is converted into a matching voltage signal, the other path of the amplitude signal is subjected to amplitude judgment, and the amplitude signal at the moment is the first amplitude signal.

The switch is connected with any one static negative stiffness adjusting structure in advance, and the first amplitude signal at the moment is actually the amplitude after stiffness adjustment.

And when the first amplitude signal is judged to be zero, the two sub-resonators have the same rigidity and do not need to be changed, the connection between the first matching voltage and the electrostatic negative rigidity adjusting structure is kept through the first switch control signal, and the matching process is finished.

When the first amplitude signal is judged to be not zero, the electrostatic negative stiffness adjusting structure connected with the first matching voltage is adjusted to be wrong, the switch is adjusted to the electrostatic negative stiffness adjusting structure of the other sub-self-resonator, and therefore the switch is controlled to be switched on and off through the first switch control signal, and the first matching voltage is eliminated.

After the switch is switched on in a reversing way, a second vibration signal is obtained by adopting the same process, and a second amplitude signal is obtained after the second vibration signal is subjected to full-wave rectification and low-pass filtering after being subjected to digital processing;

the second amplitude signal is also divided into two paths of signals, one path of signal is subjected to amplitude discrimination to obtain a second switch control signal, and after one path of signal is processed by using a proportional-integral-derivative control algorithm, the processing result is subjected to analog conversion to obtain a second matching voltage signal;

at the moment, the second amplitude signal is zero, the second matching voltage is the matching voltage which enables the rigidity of the two sub-resonators to be consistent, the output second switch control signal keeps the current closed state, and the matching voltage is fixed. And finishing the matching process.

For the device embodiment, since it is basically similar to the method embodiment, the description is simple, and for the relevant points, refer to the partial description of the method embodiment.

The embodiments in the present specification are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

As will be appreciated by one of skill in the art, embodiments of the present application may be provided as a method, apparatus, or computer program product. Accordingly, embodiments of the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, embodiments of the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.

Embodiments of the present application are described with reference to flowchart illustrations and/or block diagrams of methods, terminal devices (systems), and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flow diagrams and/or block diagrams, and combinations of flows and/or blocks in the flow diagrams and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing terminal to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing terminal, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing terminal to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be loaded onto a computer or other programmable data processing terminal to cause a series of operational steps to be performed on the computer or other programmable terminal to produce a computer implemented process such that the instructions which execute on the computer or other programmable terminal provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

While preferred embodiments of the present application have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the true scope of the embodiments of the application.

Finally, it should also be noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or terminal that comprises the element.

The structure and the method for automatically matching the rigidity of the tuning fork resonator provided by the application are introduced in detail, specific examples are applied in the structure to explain the principle and the implementation mode of the application, and the description of the embodiments is only used for helping to understand the method and the core idea of the application; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.