阅读说明：本技术 一种可识别料片位置的取料设备及方法 (Material taking equipment and method capable of identifying positions of material sheets ) 是由 张念 罗帅 黄阳 张洪华 王伟 张坤坤 于 2021-06-15 设计创作，主要内容包括：本发明公开了一种可识别料片位置的取料设备及方法,属于晶圆制造技术领域。本发明提供的取料设备,包括位置检测装置,所述位置检测装置通过连接部固定在基座上,所述位置检测装置用于获取料盒的待取料位置处的料片信息；所述取料设备还包括升降机构及抓取机构,所述升降机构用于带动所述料盒升降,所述抓取机构用于在所述料盒的所述待取料位置处抓取料片。本发明公开的可识别料片位置的取料设备及方法,通过安装有探测料片位置的检测装置获取预设料片位置处的料片信息,解决了因料盒加工、组装偏差造成的夹取料片错位的问题,避免了因料盒加工或组装偏差导致的料片空置、错位等问题而造成的错误取料作业。(The invention discloses a material taking device and method capable of identifying positions of material sheets, and belongs to the technical field of wafer manufacturing. The invention provides a material taking device which comprises a position detection device, wherein the position detection device is fixed on a base through a connecting part and is used for acquiring material sheet information at a position of a material box to be taken; the material taking equipment further comprises a lifting mechanism and a grabbing mechanism, the lifting mechanism is used for driving the material box to lift, and the grabbing mechanism is used for grabbing the material sheets at the position, to be taken, of the material box. According to the material taking equipment and the method capable of identifying the material sheet position, disclosed by the invention, the material sheet information at the preset material sheet position is obtained through the detection device for detecting the material sheet position, so that the problem of material sheet clamping dislocation caused by material box processing and assembling deviation is solved, and the problem of material sheet vacant and dislocation caused by material box processing or assembling deviation is avoided, and the wrong material taking operation is avoided.)

1. The material taking equipment capable of identifying the material sheet position is characterized by comprising a position detection device, wherein the position detection device is fixed on a base through a connecting part and is used for acquiring material sheet information at a preset material sheet position of a material box; the material taking equipment further comprises a lifting mechanism and a grabbing mechanism, the lifting mechanism is used for driving the material box to lift, and the grabbing mechanism is used for grabbing the material sheets in the material box.

2. The web position identifiable picking apparatus of claim 1, wherein the position detecting device includes an optical fiber sensor mounted on the attachment portion by a first mounting bracket.

3. The web position identifiable picking apparatus of claim 1, wherein the position detecting device includes a proximity sensor mounted to the attachment portion by a second mounting bracket.

4. The material taking device capable of identifying the positions of the tablets as claimed in claim 1, wherein the grabbing mechanism comprises a transplanting module and a grabbing part, the transplanting module is fixedly mounted on the base, and the transplanting module is used for driving the grabbing part to move so as to grab the tablets in the magazine.

5. The material taking device capable of identifying the position of the material sheet as claimed in claim 4, wherein the grabbing part comprises a clamping hand and a driving air cylinder, and the driving air cylinder drives the clamping hand to grab the material sheet in the material box.

6. The material taking device capable of identifying the position of the material sheet as claimed in claim 4, wherein the grabbing part comprises a vacuum chuck and a vacuum generator, and the vacuum generator controls the vacuum chuck to suck the material sheet in the material box.

7. The material taking device capable of identifying the position of the material sheet as claimed in claim 1, wherein the lifting mechanism comprises a lifting module, and the lifting module is used for driving the material box to lift; the lifting mechanism further comprises a position reading device, and the position reading device is used for reading position information of the material sheet at the preset material sheet position on the lifting module.

8. A material extractor apparatus according to claim 7 wherein the position reading means is a servo encoder or a grating or magnetic grating.

9. The material taking equipment capable of identifying the positions of material sheets as claimed in claim 1, wherein the material taking equipment further comprises a regulating mechanism, the regulating mechanism is mounted on the main connecting seat, the regulating mechanism comprises at least two regulating guide rails and an adjusting device, and the adjusting device is used for adjusting the positions of the at least two regulating guide rails.

10. The apparatus for extracting material according to claim 9, wherein the adjusting device comprises a linear guide and a regulating drive assembly, the at least two regulating guides are mounted on a slide block of the linear guide, and the drive assembly drives the slide block to drive the at least two regulating guides to move so as to adjust the positions of the at least two regulating guides.

11. A method of retrieving material from a web location, the method comprising:

controlling a lifting mechanism to drive a material box to move to a first material taking position so that a position detection device obtains material piece information at a first preset material piece position of the material box, wherein the first material taking position and the first preset material piece position have a corresponding relation;

and if the material sheet information indicates that material sheets exist at the first preset material sheet position, driving the grabbing mechanism to move to the first preset material sheet position so as to clamp the material sheets.

12. The method of retrieving material from an identifiable web location as in claim 11, further comprising:

and if the material sheet information does not indicate that material sheets exist at the first preset material sheet position, controlling the lifting mechanism to drive the material box to move to a second material taking position so that the position detection device acquires the material sheet information at the second preset material sheet position of the material box.

13. The method of claim 11, wherein the position sensing device includes two sensors, the method further comprising:

if the two sensors detect the material sheets at the first preset material sheet position, the material sheet information acquired by the position detection device prompts that the material sheets exist at the first preset material sheet position;

and if the material sheet information indicates that material sheets exist at the first preset material sheet position, driving the grabbing mechanism to move to the first preset material sheet position so as to clamp the material sheets.

14. The method of retrieving material from an identifiable web location as in claim 13, further comprising:

if neither sensor detects a material sheet at the first preset material sheet position, the material sheet information acquired by the position detection device prompts that no material sheet exists at the first preset material sheet position;

if the material sheet information indicates that no material sheet exists at the first preset material sheet position, the lifting mechanism is controlled to drive the material box to move to a second material taking position, so that the position detection device obtains the material sheet information at the second preset material sheet position of the material box.

15. The method of retrieving material from an identifiable web location as in claim 13, further comprising:

if only one of the two sensors detects a material sheet at the first preset material sheet position, the material sheet information acquired by the position detection device prompts that the material sheet at the first preset material sheet position is dislocated;

and if the material sheet information prompts that the material sheet at the first preset material sheet position is staggered, controlling the lifting mechanism to drive the material box to move to a second material taking position so that the position detection device acquires the material sheet information at the second preset material sheet position of the material box.

Technical Field

The invention belongs to the technical field of wafer manufacturing, and particularly relates to material taking equipment and a method capable of identifying positions of material slices.

Background

With the mechanized and intelligent development of industrial production, the operations of picking, placing and carrying in the wafer manufacturing process are automated. A plurality of wafers can be stacked in a general wafer material box, the existing wafer material taking equipment can take materials by adjusting the lifting height of the material box according to the design interval of two wafers, the material taking equipment cannot accurately identify the specific position of a wafer material sheet to be grabbed, and therefore accurate judgment and identification of the problems of empty boxes of the material box, material sheet dislocation and the like cannot be achieved.

Disclosure of Invention

In order to solve the problems in the prior art, the embodiment of the invention provides a material taking device capable of identifying the position of a material sheet. The technical scheme is as follows:

the invention provides a material taking device capable of identifying the position of a material sheet, which comprises a position detection device, wherein the position detection device is fixed on a base through a connecting part and is used for acquiring material sheet information at the preset material sheet position of a material box; the material taking equipment further comprises a lifting mechanism and a grabbing mechanism, the lifting mechanism is used for driving the material box to lift, and the grabbing mechanism is used for grabbing the material sheets in the material box.

In some embodiments, the position detection device includes an optical fiber sensor mounted on the connection part through a first mounting bracket.

In some embodiments, the position detection device comprises a proximity sensor mounted on the attachment portion by a second mounting bracket.

In some embodiments, the gripping mechanism comprises a transplanting module and a gripping part, the transplanting module is fixedly mounted on the base, and the transplanting module is used for driving the gripping part to move so as to grip the tablets in the magazine.

In some embodiments, the gripping part comprises a gripper and a driving cylinder, and the driving cylinder drives the gripper to grip the material sheet in the material box.

In some embodiments, the gripping portion comprises a vacuum cup and a vacuum generator, the vacuum generator controlling the vacuum cup to suck up the tablets in the magazine.

In some embodiments, the lifting mechanism comprises a lifting module for driving the magazine to lift; the lifting mechanism further comprises a position reading device, and the position reading device is used for reading position information of the material sheet at the preset material sheet position on the lifting module.

In some embodiments, the position reading device is a servo encoder or a grating scale or a magnetic grating scale.

In some embodiments, the material taking device further comprises a regulating mechanism, the regulating mechanism is mounted on the main connecting seat, the regulating mechanism comprises at least two regulating guide rails and an adjusting device, and the adjusting device is used for adjusting the positions of the at least two regulating guide rails.

In some embodiments, the adjusting device includes a linear guide rail and a regulating driving assembly, the at least two regulating guide rails are mounted on a sliding block of the linear guide rail, and the driving assembly drives the sliding block to drive the at least two regulating guide rails to move so as to adjust the positions of the at least two regulating guide rails.

The invention also provides a material taking method capable of identifying the position of the material sheet, which comprises the following steps: controlling a lifting mechanism to drive a material box to move to a first material taking position so that a position detection device obtains material piece information at a first preset material piece position of the material box, wherein the first material taking position and the first preset material piece position have a corresponding relation; and if the material sheet information indicates that material sheets exist at the first preset material sheet position, driving the grabbing mechanism to move to the first preset material sheet position so as to clamp the material sheets.

In some embodiments, the method further comprises:

and if the material sheet information does not indicate that material sheets exist at the first preset material sheet position, controlling the lifting mechanism to drive the material box to move to a second material taking position so that the position detection device acquires the material sheet information at the second preset material sheet position of the material box.

In some embodiments, the position detection device comprises two sensors, the method further comprising:

if the two sensors detect the material sheets at the first preset material sheet position, the material sheet information acquired by the position detection device prompts that the material sheets exist at the first preset material sheet position; and if the material sheet information indicates that material sheets exist at the first preset material sheet position, driving the grabbing mechanism to move to the first preset material sheet position so as to clamp the material sheets.

In some embodiments, the method further comprises:

if neither sensor detects a material sheet at the first preset material sheet position, the material sheet information acquired by the position detection device prompts that no material sheet exists at the first preset material sheet position; if the material sheet information indicates that no material sheet exists at the first preset material sheet position, the lifting mechanism is controlled to drive the material box to move to a second material taking position, so that the position detection device obtains the material sheet information at the second preset material sheet position of the material box.

In some embodiments, the method further comprises:

if only one of the two sensors detects a material sheet at the first preset material sheet position, the material sheet information acquired by the position detection device prompts that the material sheet at the first preset material sheet position is dislocated; and if the material sheet information prompts that the material sheet at the first preset material sheet position is staggered, controlling the lifting mechanism to drive the material box to move to a second material taking position so that the position detection device acquires the material sheet information at the second preset material sheet position of the material box.

The technical scheme provided by the embodiment of the invention has the following beneficial effects:

according to the material taking equipment and the method capable of identifying the material sheet position, disclosed by the invention, the material sheet information at the preset material sheet position is obtained through the detection device for detecting the material sheet position, so that the problem of material sheet clamping dislocation caused by material box processing and assembling deviation is solved, and the problem of material sheet vacant and dislocation caused by material box processing or assembling deviation is avoided, and the wrong material taking operation is avoided.

Furthermore, the material taking equipment is also provided with a position reading device to record the position information of each material sheet in the material box, so that the material taking accuracy of the grabbing structure is guaranteed.

Drawings

The above features and advantages of the present disclosure will be better understood upon reading the detailed description of embodiments of the disclosure in conjunction with the following drawings. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.

Fig. 1-1 shows an overall view of an angle 1 of a material taking device capable of identifying the position of a material sheet according to the invention;

fig. 1-2 show an overall view of an angle 2 of a material taking device capable of identifying the position of a material sheet according to the invention;

fig. 2 is a schematic diagram illustrating a material taking device capable of identifying the positions of material sheets according to the present invention;

fig. 3 shows a schematic diagram of a material removal method for identifying web locations according to the present invention.

The attached drawings are marked as follows:

a base-1; a connecting part-2;

position detection means-3; a fiber optic sensor-31; a first mounting bracket-32;

a grabbing mechanism-4; a transplanting module-41; a grasping portion-42;

a lifting mechanism-5; a lifting module-51; a position reading device-52; a support frame-53;

a regulating mechanism-6; a regular guide rail-61; -an adjustment device-62;

a magazine-7; a code scanner-8.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that the descriptions of the present invention with respect to the directions of "left", "right", "lower", etc. are defined based on the relationship of the orientation or position shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device described must be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present invention, "plurality" or "a number" means two or more unless specifically limited otherwise.

In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, such mechanical terms as "mounted," "disposed," and the like are to be construed broadly and include, for example, fixed connections, detachable connections, or integral connections; the connection can be mechanical connection, electrical connection or communication connection; they may be directly connected to each other, indirectly connected to each other through an intermediate member, or connected to each other through the inside of two members. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

According to the material taking equipment and the method capable of identifying the material sheet position, the material sheet information at the preset material sheet position is obtained through the detection device for detecting the material sheet position, the problem that material sheets are clamped and staggered due to material box processing and assembling deviation is solved, and the problem that material sheets are vacant and staggered due to material box processing or assembling deviation is avoided.

The following describes in detail a material extracting apparatus capable of identifying a position of a material sheet according to an embodiment of the present invention with reference to specific embodiments and accompanying drawings.

Example 1

Fig. 1 is an overall structural diagram of a material taking device capable of identifying a material sheet position according to the present disclosure (where fig. 1-1 and fig. 1-2 are overall structural diagrams of a material taking device capable of identifying a material sheet position from different viewing angles, respectively), and the following is a detailed description of this embodiment with reference to fig. 1.

The material taking equipment capable of identifying the material sheet position in the embodiment comprises a position detection device 3, wherein the position detection device 3 is fixed on a base 1 through a connecting part 2, and the position detection device 3 is used for acquiring material sheet information at a preset material sheet position of a material box 7; further, the material taking equipment further comprises a lifting structure 5 and a grabbing mechanism 4, wherein the lifting structure 3 is used for driving the material box 7 to lift, and the grabbing mechanism 4 is installed on the base 1 to grab the material sheets in the material box 7.

Fig. 2 is a schematic structural diagram of a material taking device capable of identifying the positions of material sheets according to the disclosure, which is combined with fig. 2.

It should be noted that the material sheet in this embodiment is a sheet-like object to be grabbed, including a wafer material sheet, a glass material sheet, and the like, and the application does not limit the kind thereof; the magazine is a magazine for storing a plurality of tablets, and the shape of the magazine is not limited in this embodiment. For visualization and discussion purposes, the present embodiment will be described in detail below with reference to a wafer sheet and a wafer cassette as examples.

Specifically, an x-y-z coordinate system is established as shown in the lower left of FIG. 2. Theoretically, the wafers to be taken are stacked in the wafer magazine 7 (assuming that N wafer sheets are stored in the wafer magazine 7, and the first wafer sheet, the second wafer sheet, … … and the nth wafer sheet are sequentially arranged from the base of the wafer magazine 7), the N wafer sheets are all parallel to the reference surface of the wafer magazine 7 (it should be noted that the reference surface of the wafer magazine 7 is not limited in this embodiment, and for convenience of discussion, the reference surface is assumed to be a horizontal plane at the base of the wafer magazine, that is, the N wafer sheets are all parallel to the x-y plane shown in the figure and perpendicular to the z axis), and meanwhile, the distance between each wafer sheet is set in advance (assuming that the preset design distance between each wafer sheet is a, and the design distance here is the distance between each wafer sheet in the z axis direction). After the grabbing mechanism 4 finishes fetching the material at the first preset material sheet position (assumed to be the theoretical first wafer material sheet position), the lifting mechanism 5 drives the wafer magazine 7 to descend by a height a along the z-axis with reference to the designed distance a between the first wafer material sheet and the second wafer material sheet, so that the grabbing mechanism 4 can grab the second wafer material sheet at the second preset material sheet position (i.e. the theoretical second wafer material sheet position). However, in actual operation, there is a deviation in processing or assembling of the wafer magazine 7, and it is not guaranteed that the n wafer tablets are all parallel to the reference surface (i.e., the x-y plane shown in the figure) of the wafer magazine 7 and it is not guaranteed that the actual distances between the wafer tablets are the preset design distances a, so that, in order to avoid idle operation caused by empty tablets in the wafer magazine 7, or avoid tablet fragmentation caused by collision with the wafer when the grabbing mechanism 4 grabs the tablets due to dislocation of the tablets in the wafer magazine 7 or an error in the actual distance between the tablets (i.e., the actual distance is not equal to the design distance a). In this embodiment, a position detection device 3 for acquiring wafer material sheet information at a preset material sheet position of the wafer material cassette is installed on the wafer material taking device, and the position detection device 3 is fixed on the base 1 through the connection portion 2. Before the grabbing mechanism 4 on the base 1 grabs a wafer tablet at a preset tablet position of the wafer magazine 7, the position detection device 3 acquires wafer tablet information at the preset tablet position, so that no-load operation or tablet fragmentation caused by tablet vacancy or dislocation when the grabbing mechanism 4 grabs is avoided.

More specifically, when the wafer material sheet information acquired by the position detection device 3 after detecting at the first preset material sheet position (i.e. the theoretical first wafer material sheet position) of the wafer material cassette 7 indicates that a wafer material sheet exists at the position, the position detection device 3 feeds back a grabbing instruction to control the grabbing mechanism 4 to grab the wafer material sheet at the first preset material sheet position. When the wafer tablet information acquired by the position detection device 3 after detecting at the first preset tablet position (i.e. the theoretical first wafer tablet position) of the wafer magazine 7 does not indicate that a wafer tablet exists at the position, the acquired wafer tablet information does not indicate that a wafer tablet exists at the position, including:

scene a 1: the position detection device 3 detects that no wafer sheet exists at the first preset sheet position (i.e. the first wafer sheet position) of the wafer magazine 7, or,

scene a 2: the position detection device 3 detects that the wafer material slice exists at the first preset material slice position (namely the first wafer material slice position) of the wafer material box 7 but the material slice is misplaced,

at this time, the position detection device 3 feeds back an error reporting instruction to prompt that no wafer material sheet exists or a misplaced wafer material sheet exists at the first material to be taken position (i.e. the theoretical first wafer material sheet position) of the wafer material box; further, the error reporting instruction is further configured to instruct the wafer magazine 7 to move to the second predetermined material fetching position, so that the position detection device 3 obtains the tablet information at the second predetermined tablet position of the wafer magazine 7, that is, instruct the wafer magazine 7 to descend by the height a for the position detection device 3 to obtain the wafer tablet information at the second predetermined tablet position (i.e., at the theoretical second wafer tablet position).

Preferably, the position detecting device 3 includes an optical fiber sensor 31, and the optical fiber sensor 31 is mounted on the link 2 through a first mounting bracket 32.

Specifically, the position detection device 3 includes an optical fiber sensor 31 and a background light source emitting portion. The optical fiber sensor 31 converts the state of the object to be measured into a measurable optical signal, and in this embodiment, the optical fiber sensor 31 sends the optical signal emitted by the background light source emitting part to the modulator through the optical fiber to form a modulated enable signal. More specifically, the optical fiber sensor 31 and the background light source emitting portion are both mounted on the connecting portion 2, and the optical fiber sensor 31 is fixed to the connecting portion 2 by a U-shaped first mounting bracket 32 so that it approaches the wafer magazine 7 for detection to acquire wafer web information.

Further, the position detecting device 3 includes two optical fiber sensors 31, and the two optical fiber sensors 31 form a straight line parallel to the reference surface of the wafer magazine 7 (i.e., the straight line formed by the two optical fiber sensors 31 is parallel to the illustrated x-y plane and perpendicular to the z-axis).

Specifically, since the straight line formed by the two optical fiber sensors 31 is parallel to the wafer to be taken, when the wafer material sheet information acquired by the position detection device 3 indicates that the wafer material sheet exists at the first preset material sheet position, that is, the two optical fiber sensors 31 both detect that the wafer material sheet exists at the first preset material sheet position of the wafer material box 7, the two optical fiber sensors 31 both trigger the enabling signal to drive the grabbing mechanism 4 to grab the wafer material sheet at the position. When the wafer material sheet information acquired by the position detection device 3 does not indicate that a wafer material sheet exists at the first preset material sheet position, the method includes:

scene b 1: there is one and only one optical fiber sensor 31 that detects the presence of a wafer web at a first predetermined web location of the wafer magazine 7, or,

scene b 2: when neither of the two optical fiber sensors 31 detects the presence of a wafer tablet at the first predetermined tablet position of the wafer magazine 7,

for the scenario b1, only the optical fiber sensor 31 that detects the first wafer web triggers an enable signal to prompt that the wafer web at the first predetermined web position is misaligned, and to instruct the lifting mechanism 5 to descend by the height a for re-detection to obtain the wafer web information at the second predetermined web position (i.e. the theoretical second wafer web position); for the scenario b2, neither of the two optical fiber sensors 31 triggers an enable signal and prompts a wafer web vacancy at the first preset web position, so as to instruct the lifting mechanism to descend by the height a for re-detection to acquire wafer web information at the second preset web position (i.e., the theoretical second wafer web position).

Preferably, the position detection device 3 comprises a proximity sensor mounted on the connection portion by a second mounting bracket.

Specifically, the position detection apparatus 3 includes a proximity sensor, which is a device having an ability to sense the proximity of an object, and recognizes the proximity of the object by a sensitive characteristic to the approaching object and outputs a corresponding switch signal, which can detect information on the movement and presence of the object without contacting the detected object and convert it into an electric signal. More specifically, the proximity sensor is mounted on the link 2 by a second mounting bracket.

Preferably, the grabbing mechanism 4 comprises a transplanting module 41 and a grabbing part 42, wherein the transplanting module 41 is fixedly installed on the base 1, and the transplanting module 41 is used for driving the grabbing part 42 to move so as to grab the wafer material sheet.

Specifically, when the material taking device takes materials, after the position detection device 3 acquires the information of the wafer material sheet at the position of the wafer material box 7 to be taken, if it is detected that the wafer material sheet exists at the preset material sheet position of the wafer material box 7, the grabbing instruction is fed back to control the transplanting module 41 of the grabbing mechanism 4 to drive the grabbing part 42 to move to the preset material sheet position to grab the wafer material sheet. More specifically, the transplanting module 41 is fixedly mounted on the base 1, and includes a moving servo motor and a lead screw moving module, where the lead screw moving module includes a ball screw, a linear guide rail, an aluminum alloy profile, a coupler, a photoelectric switch assembly, etc. to convert the rotary motion of the moving servo motor into a linear motion with high precision and high load through the lead screw moving module, so that the grabbing portion 42 is driven by the moving servo motor to move along the x-axis direction to a preset material sheet position to grab a wafer material sheet.

Preferably, the gripping part 42 comprises a gripper and a driving cylinder, and the driving cylinder drives the gripper to grip the wafer material sheet. Specifically, after the grabbing part 42 moves to a preset material sheet position, the driving cylinder drives the clamping hand to clamp the wafer material sheet at the position; furthermore, the clamping hand is provided with a guide structure, so that the clamping hand can accurately and stably clamp the wafer material piece, and the wafer material piece is prevented from being broken in the clamping process.

Preferably, the gripping portion 42 includes a vacuum chuck and a vacuum generator that controls the chuck to suck up the wafer web. Specifically, the part to be grabbed moves to the position of the preset material sheet, and the vacuum generator works to control the vacuum chuck to adsorb the wafer material sheet.

Preferably, the lifting mechanism 5 comprises a lifting module 51, and the lifting module 5 is used for driving the wafer magazine 7 to lift; the lifting mechanism 5 further comprises a position reading device 52, and the position reading device 52 is used for reading the position information of the material sheet at the preset material sheet position on the lifting module 5.

Preferably, the lifting mechanism 5 further includes a support frame 53, and the wafer cassette 7 is fixed on the support frame 53.

Preferably, the position reading device 52 is a servo encoder or a grating or magnetic grating.

Specifically, elevating system 5 is including being used for driving the lifting module 51 that wafer magazine 7 fixed mounting on support frame 53 goes up and down, this lifting module 51 is including lift drive subassembly and lead screw lifting module, and the lead screw lifting module of here includes ball screw, linear guide, aluminum alloy ex-trusions, shaft coupling, photoelectric switch subassembly etc. to turn into the rotary motion of lift drive subassembly into the linear motion of high accuracy high load through lead screw lifting module, thereby drive supporting part 53 and the wafer magazine 7 on it through lift drive subassembly and go up and down along the z axle direction. Further, the lifting mechanism 5 further comprises a position reading device 52 for reading position information of the wafer magazine 7, and when the position detection device 3 detects that a wafer material sheet exists at the preset material sheet position of the wafer magazine 7, a grabbing instruction is fed back to indicate the position information of the wafer material sheet at the preset material sheet position of the position reading device 52 on the lead screw lifting module. More specifically, the position reading device 52 is equivalent to a scale on a screw rod lifting module of the lifting mechanism, and the position reading device 52 can accurately record the position information of the wafer material sheet on the screw rod module at the preset material sheet position, so that before the grabbing mechanism performs grabbing operation, the position of the grabbing mechanism 4 is accurately adjusted to ensure that the grabbing mechanism can accurately perform fetching operation.

Preferably, the material taking equipment further comprises a regulating mechanism 6, the regulating mechanism 6 is mounted on the connecting part 2, the regulating mechanism 6 comprises at least two regulating guide rails 61 and an adjusting device 62, and the adjusting device 62 is used for adjusting the positions of the at least two regulating guide rails 61.

Specifically, the lifting mechanism 5 can control the position of the wafer magazine 7 along the z-axis direction, the grabbing part 42 of the grabbing mechanism 4 can move in the x-axis direction to grab a wafer sheet, and in order to ensure the stability of the material taking operation in the y-axis direction, the material taking device provided by the embodiment further comprises a regulating mechanism 6 installed on the connecting part 2. The arranging mechanism 6 comprises at least two arranging guide rails 61 and an adjusting device 62, the grabbing part 42 grabs the wafer material sheet and then takes the material sheet out of the wafer material box 7 along the x-axis direction, and the wafer material sheet is clamped in the grooves of the two arranging guide rails 61 so as to fix the material sheet in the y-axis direction. Further, the adjusting device 62 of the regulating mechanism 6 is used for adjusting the positions of the at least two regulating guide rails 61 so as to make it compatible with regulating and guiding operations of multi-specification and multi-size wafer sheets.

Preferably, the adjusting device 62 includes a linear guide and a driving assembly, the at least two regulating rails 61 are mounted on a linear guide slider, and the driving assembly drives the slider to drive the at least two regulating rails 61 to move, so as to adjust the positions of the at least two regulating rails 61.

In particular, the adjustment means 62 comprise a linear guide, the aforesaid at least two regular guides 61 being mounted on different slides of the linear guide and each being perpendicular to the linear guide. The adjustment device 62 further includes a drive assembly that drives the slide on the linear guide to slide along the guide. More specifically, the driving assembly is a synchronous pulley, and the driving pulley drives the slider on the linear guide rail to slide along the guide rail so as to drive the two regular guide rails 61 to move to adjust the positions of the at least two regular guide rails 61.

Preferably, the material taking device further comprises a code scanner 8, and the code scanner 8 is used for recording the number of the wafer material sheets grabbed by the material taking device.

Example 2

Fig. 3 is a schematic diagram of a web position identifiable material removal method according to the present invention, as shown in fig. 3.

The embodiment provides a material taking method capable of identifying the position of a material sheet, which comprises the following steps:

controlling a lifting mechanism to drive a material box to move to a first material taking position so that a position detection device obtains material piece information at a first preset material piece position of the material box, wherein the first material taking position and the first preset material piece position have a corresponding relation; and if the material sheet information indicates that material sheets exist at the first preset material sheet position, driving the grabbing mechanism to move to the first preset material sheet position so as to clamp the material sheets at the position.

Preferably, if the material sheet information does not indicate that material sheets exist at the first preset material sheet position, the lifting mechanism is controlled to drive the material box to move to the second preset material taking position, so that the position detection device acquires the material sheet information at the second preset material sheet position of the material box.

Preferably, the position detection means comprises two sensors; if the two sensors detect the material sheets at the first preset material sheet position, the material sheet information acquired by the position detection device prompts that the material sheets exist at the first preset material sheet position; and if the material sheet information indicates that material sheets exist at the first preset material sheet position, driving the grabbing mechanism to move to the first preset material sheet position so as to clamp the material sheets at the first preset material sheet position.

Preferably, if neither of the sensors detects a web at the first predetermined web position, the web information obtained by the position detecting device indicates that no web exists at the first predetermined web position; if the material sheet information indicates that no material sheet exists at the first preset material sheet position, the lifting mechanism is controlled to drive the material box to move to the second material taking position, so that the position detection device obtains the material sheet information at the second preset material sheet position of the material box.

Preferably, if only one of the two sensors detects a material sheet at the first preset material sheet position, the material sheet information acquired by the position detection device indicates that the material sheet at the first preset material sheet position is dislocated; if the material sheet information prompts that the material sheet at the first preset material sheet position is staggered, the lifting mechanism is controlled to drive the material box to move to the second material taking position, so that the position detection device obtains the material sheet information at the second preset material sheet position of the material box.

The lifting mechanism drives the material box to move so that the reference surface of the material box is located at the initial position of material taking. Assuming that the initial material taking position is above the horizontal plane of the position reading device, namely the horizontal plane of the base of the material box is higher than the horizontal plane of the position reading device, and grid grooves parallel to the horizontal plane of the base of the material box are arranged in the material box to place material sheets; on the basis, it is further assumed that when the grid groove of the magazine is filled, N tablets are commonly placed in the magazine and are respectively marked as a first tablet, a second tablet, … … and an Nth tablet from bottom to top, and it is further expected that the tablets in the magazine are mutually parallel (all are parallel to the horizontal plane where the base of the magazine is located), and the design intervals among the tablets are the same and are all a.

Specifically, the lifting mechanism drives the material box to move from top to bottom to the initial material taking position, so that the material box base is moved to a first preset material taking position, at this time, the position detection device is started to acquire material sheet information at the first preset material sheet position of the material box (the "first preset material sheet position" here is the predicted position of the first material sheet in the material box according to the assumption above), the material sheet information here includes material sheet placement state information, and the position states of the material sheets in the material box detected by the position detection device are mainly three types: (ii) that there is a tablet in the current position and the tablet placement is in accordance with the prediction (i.e. parallel to the horizontal plane in which the base of the magazine is located); material sheets are present in the current position but the material sheet placement does not match the prediction (i.e. the material sheet placement is misaligned); no material sheet is present in the current position (i.e. a material sheet empty position). For the first step, the material sheet information indicates that material sheets exist at the first preset material sheet position, and at the moment, the position detection device feeds back a grabbing instruction to drive the grabbing mechanism to move to the first preset material sheet position to clamp the material sheets; for the second and third aspects, the material sheet information does not indicate that material sheets exist at the first preset material sheet position, at this time, the position detection device feeds back an error reporting instruction and indicates the lifting mechanism to drive the material box to move so that the material box base moves to the second preset material taking position, and then the position detection device can detect the material sheets to obtain the material sheet information at the second preset material sheet position of the material box.

More specifically, as assumed in the foregoing, in an ideal state, the relative relationship between the magazine and each of the material sheets should be fixed, the material taking position is a magazine position, the predetermined material sheet position is a predetermined material sheet position, and the material taking positions correspond to the predetermined material sheet positions, that is, the first material taking position corresponds to the first predetermined material sheet position, the second material taking position corresponds to the second predetermined material sheet position, … …, and the nth material taking position corresponds to the nth predetermined material sheet position. When the material taking device takes materials, the lifting mechanism drives the material box to start moving from a material taking initial position from top to bottom, firstly, the material box base is moved to a first material taking position, at the moment, the position detection device detects to acquire material piece information of a first preset material piece position corresponding to the first material taking position, and so on, when the material box base is moved to an Nth material taking position, at the moment, the position detection device detects to acquire material piece information of an Nth preset material piece position corresponding to the Nth material taking position.

It should be noted that, in this embodiment, the above-mentioned upper and lower relationship between the initial material taking position and the horizontal plane of the position reading device is not limited, for example, if the initial material taking position is below the horizontal plane of the position reading device, the lifting mechanism drives the material box to move from bottom to top, and at this time, for the material sheets stacked in the material box, the first material sheet from top to bottom is the first material sheet, and the last material sheet is the nth material sheet.

Preferably, the position detection device includes an optical fiber sensor.

Preferably, the position detection device includes a proximity sensor.

Preferably, the lifting module on the lifting mechanism is controlled to drive the material box to move to a first material taking position, so that the position detection device obtains material piece information at a first preset material piece position of the material box, wherein the first material taking position and the first preset material piece position have a corresponding relation.

Preferably, if the material sheet information indicates that a material sheet exists at the first preset material sheet position, the transplanting module of the grabbing mechanism is instructed to drive the grabbing part to move to the first preset material sheet position so as to clamp the material sheet at the position.

Further, if the material sheet information indicates that material sheets exist at the first preset material sheet position, the transplanting module of the grabbing mechanism is instructed to drive the grabbing part to move to the first preset material sheet position, so that a driving cylinder on the grabbing part drives a clamping hand on the grabbing part to clamp the material sheets at the first preset material sheet position of the material box.

Further, if the material sheet information indicates that material sheets exist at the first preset material sheet position, the transplanting module of the grabbing mechanism is instructed to drive the grabbing part to move to the first preset material sheet position so that the vacuum generator on the grabbing part controls the vacuum chuck on the grabbing part to suck the material sheets at the first preset material sheet position of the material box.

Preferably, if the material sheet information indicates that a material sheet exists at the first preset material sheet position, before the grabbing mechanism is driven to move to the first preset material sheet position to clamp the first material sheet at the position, the position reading device on the lifting mechanism is controlled to read the position information of the material sheet at the first preset material sheet position on the lifting module, so that the grabbing mechanism can accurately clamp the first material sheet at the position after moving to the first preset material sheet position.

Furthermore, the position reading device is a servo encoder or a grating ruler or a magnetic grating ruler.

Preferably, if the material sheet information indicates that a material sheet exists at the first preset material sheet position, after the grabbing mechanism is driven to move to the first preset material sheet position, the adjusting device is controlled according to the size of the material sheet to be grabbed to adjust the positions of the two regular guide rails arranged on the material sheet to enable the material sheet to be clamped with the guide rails so as to facilitate the grabbing mechanism to grab the material sheet at the first preset material sheet position.

Further, preferably, if the material sheet information indicates that material sheets exist at the first preset material sheet position, after the driving grabbing mechanism is driven to move to the first preset material sheet position, the driving assembly of the adjusting device is controlled to drive the slider on the linear guide rail to move so as to drive the at least two regulating guide rails of the adjusting device to adjust the positions of the at least two regulating guide rails according to the size of the material sheets to be grabbed, so that the material sheets are clamped with the guide rails, and the grabbing mechanism is convenient to grab the material sheets at the first preset material sheet position.

The technical scheme provided by the embodiment of the invention has the following beneficial effects:

according to the material taking equipment and the method capable of identifying the material sheet position, disclosed by the invention, the material sheet information at the preset material sheet position is obtained through the detection device for detecting the material sheet position, so that the problem of material sheet clamping dislocation caused by material box processing and assembling deviation is solved, and the problem of material sheet vacant and dislocation caused by material box processing or assembling deviation is avoided, and the wrong material taking operation is avoided.

Furthermore, the material taking equipment is also provided with a position reading device to record the position information of each material sheet in the material box, so that the material taking accuracy of the grabbing structure is guaranteed.

All the above-mentioned optional technical solutions can be combined arbitrarily to form the optional embodiments of the present invention, and are not described herein again.

While preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including the preferred embodiment and all changes and modifications that fall within the true scope of the embodiments of the present application.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Those not described in detail in this specification are within the skill of the art.