阅读说明：本技术 一种织构化压电陶瓷叠层驱动器及其制备方法 (Textured piezoelectric ceramic laminated driver and preparation method thereof ) 是由 李飞 刘金凤 杨帅 王明文 乔辽 邱超锐 高翔宇 李景雷 徐卓 于 2020-12-29 设计创作，主要内容包括：本发明提供的一种织构化压电陶瓷叠层驱动器及其制备方法,包括以下步骤：步骤1,通过细晶压电陶瓷基体和片状模板制备得到陶瓷厚膜,将得到的陶瓷厚膜切成预设尺寸的方片结构,然后在方片结构的陶瓷厚膜的一表面刷上电极,得到刷有内电极的陶瓷厚膜；步骤2,将得到的刷有内电极的陶瓷厚膜按照电极交错的方式进行堆叠,得到陶瓷压电堆；步骤4,对得到的陶瓷压电堆依次进行排胶和烧结,得到烧结后的陶瓷压电堆；步骤5,在得到的烧结后的陶瓷压电堆的两侧面依次进行被电极、极化,得到织构化铅基压电叠层驱动器；本发明通过细晶压电陶瓷基体围绕片状模板定向生长获得各向异性的陶瓷,从而大幅提高陶瓷的压电性能。(The invention provides a textured piezoelectric ceramic laminated driver and a preparation method thereof, wherein the textured piezoelectric ceramic laminated driver comprises the following steps: step 1, preparing a ceramic thick film through a fine-grain piezoelectric ceramic matrix and a sheet template, cutting the obtained ceramic thick film into a square sheet structure with a preset size, and brushing an electrode on one surface of the ceramic thick film with the square sheet structure to obtain the ceramic thick film with an inner electrode; step 2, stacking the obtained ceramic thick film brushed with the inner electrode according to an electrode staggering mode to obtain a ceramic piezoelectric stack; step 4, sequentially carrying out glue removal and sintering on the obtained ceramic piezoelectric stack to obtain a sintered ceramic piezoelectric stack; step 5, performing electrode treatment and polarization on two side surfaces of the obtained sintered ceramic piezoelectric stack in sequence to obtain a textured lead-based piezoelectric laminated driver; the invention obtains anisotropic ceramics by the directional growth of the fine-grain piezoelectric ceramic matrix around the sheet template, thereby greatly improving the piezoelectric performance of the ceramics.)

1. A method for preparing a textured piezoelectric ceramic laminated driver is characterized by comprising the following steps:

step 1, preparing a ceramic thick film through a fine-grain piezoelectric ceramic matrix and a sheet template, cutting the obtained ceramic thick film into a square sheet structure with a preset size, and brushing an electrode on one surface of the ceramic thick film with the square sheet structure to obtain the ceramic thick film with an inner electrode;

step 2, stacking the obtained ceramic thick film brushed with the inner electrode according to an electrode staggering mode to obtain a ceramic piezoelectric stack;

step 4, sequentially carrying out glue removal and sintering on the obtained ceramic piezoelectric stack to obtain a sintered ceramic piezoelectric stack;

and 5, sequentially performing electrode treatment and polarization on two side surfaces of the sintered ceramic piezoelectric stack to obtain the textured lead-based piezoelectric laminated driver.

2. The method for preparing the textured piezoelectric ceramic laminated driver according to claim 1, wherein in the step 1, the thick ceramic film is prepared by the fine-grained piezoelectric ceramic matrix and the sheet template, and the specific method is as follows:

fully mixing a fine-grain piezoelectric ceramic matrix, a flaky template, a sintering aid, a solvent, a dispersing agent, a binder and a plasticizer to obtain casting slurry; wherein the mass ratio of the fine-grain piezoelectric ceramic matrix, the sintering aid, the solvent, the dispersant, the binder and the plasticizer to the flaky template is (20-50), (0.1-4.5), (15-40), (0.5-3.5), (1-3) and (0.5-4);

and carrying out tape casting on the obtained tape casting slurry to obtain the ceramic thick film.

3. The method of claim 2, wherein the sintering aid is B₂O₃、CuO、ZnO、Li₂CO₃And Bi₂O₃One or more of the above; the solvent is one or more of ethanol, dimethylbenzene, ethanol, butanone and ethyl acetate; the dispersant is one or more of triolein, phosphate and menhaden oil; the binder is polyvinyl butyral; one or more of polyethylene glycol, polyalkylene glycol and dibutyl phthalate serving as plasticizer.

4. The method for preparing a textured piezoceramic stack actuator according to claim 1, wherein in step 1, the fine crystalline piezoceramic matrix is ABO₃The perovskite structure is a fine-grained piezoelectric ceramic matrix prepared by a solid-phase sintering method.

5. The method for manufacturing a textured piezoelectric ceramic laminated actuator according to claim 1, wherein in step 1, the lattices of the piezoelectric ceramic matrix and the sheet template are matched with each other.

6. The method for preparing the textured piezoelectric ceramic laminated driver according to claim 1, wherein in the step 4, before sequentially performing glue removal and sintering on the obtained ceramic piezoelectric stack, hot uniaxial pressure and warm water isostatic pressure treatment are performed, and then the ceramic piezoelectric stack is cut according to the size of the electrode.

7. The method for preparing the textured piezoelectric ceramic laminated driver according to claim 6, wherein the process parameters of hot uniaxial pressure and warm water isostatic pressure are as follows: keeping at 50-80 deg.C under 15-100MPa for 15-60 min.

8. The method for manufacturing the textured piezoelectric ceramic laminated driver according to claim 1, wherein in the step 4, the process parameters of glue discharging and sintering are as follows:

the glue discharging temperature is 500-800 ℃, and the heat preservation time is 2-10 h; the sintering temperature is 900-1500 ℃, and the heat preservation time is 1-60 h.

9. The method for manufacturing a textured piezoelectric ceramic stack actuator according to claim 1, wherein in step 5, the polarization process conditions are as follows: the temperature is 25-300 deg.C, the time is 30-60min, and the electric field is 1-5 kV/cm.

10. A textured piezoelectric ceramic laminated driver, which is prepared based on the preparation method of any one of claims 1 to 9, and comprises a ceramic piezoelectric stack, wherein two sides of the ceramic piezoelectric stack are provided with outer electrodes; the ceramic piezoelectric stack comprises a plurality of ceramic thick films provided with internal electrodes, and the plurality of ceramic thick films are stacked in an electrode staggered manner.

Technical Field

The invention belongs to the technical field of piezoelectric ceramic devices, and particularly relates to a textured piezoelectric ceramic laminated driver and a preparation method thereof.

Background

Piezoelectric ceramics are functional materials with piezoelectricity, can realize the interconversion of electric energy and mechanical energy, and are widely applied to sensors, transducers and drivers. The piezoelectric actuator has high response speed, large driving force and low power consumption, and is applied to multiple fields of machinery industry, precision appliances, biomedicine, optics, aerospace, robot technology and the like. In recent years, with the continuous development of scientific technology, the demand for piezoelectric drivers with small volume, large strain, large displacement and low driving voltage is very urgent. At present, lead zirconate titanate (PZT) based piezoelectric ceramics are the main piezoelectric materials for manufacturing laminated piezoelectric actuators, but the piezoelectric coefficients are low, and the output strain is less than 0.1%. It is an effective method to improve the performance of the piezoelectric actuator by improving the performance of the piezoelectric material or using a high performance dielectric material.

The relaxor ferroelectric single crystal has ultrahigh piezoelectric performance, and can meet the requirement of manufacturing a laminated driver, but the relaxor ferroelectric single crystal is difficult to reach the practical application level due to the factors of high manufacturing cost, long period, serious component segregation, difficult mechanical processing and the like. The textured ceramic is a ceramic formed by growing crystal grains in a certain direction by a certain technical means. The texture ceramic with higher quality has higher anisotropy degree, the performance is closer to single crystal, and the texture ceramic also has the advantages of uniform ceramic components, stable performance, easy processing, low cost, molding diversity and the like, so the texture ceramic has wide application prospect.

At present, most of laminated piezoelectric drivers are manufactured by two methods: one is to cut the block ceramics or single crystal into slices according to a certain size, then spray the electrode in the thickness direction and polarize under a certain condition, and then stack them together by epoxy resin (organic adhesive) according to the opposite polarity way, the driver made by this method has lower mechanical property, and the processing is difficult, the cost is higher, the adhesive layer has a certain influence on the performance; the other method is to adopt a tape casting mode, brush an inner electrode on the ceramic thick film, stack the ceramic thick film together along the thickness direction and then carry out integrated sintering, and the laminated driver manufactured by the mode has lower cost, higher mechanical property and easy processing. The second approach is more conducive to commercial deployment. However, the performance of the piezoelectric ceramics used for manufacturing the stack driver is generally low, and the performance of the piezoelectric ceramics needs to be further improved in order to meet the increasing application requirements.

Disclosure of Invention

The invention aims to provide a textured piezoelectric ceramic laminated driver and a preparation method thereof, and overcomes the defects of low piezoelectric performance, high driving voltage, low driving displacement and large strain hysteresis existing in the prior art of preparing the laminated driver by adopting piezoelectric ceramic.

In order to achieve the purpose, the invention adopts the technical scheme that:

the invention provides a preparation method of a textured piezoelectric ceramic laminated driver, which comprises the following steps:

step 1, preparing a ceramic thick film through a fine-grain piezoelectric ceramic matrix and a sheet template, cutting the obtained ceramic thick film into a square sheet structure with a preset size, and brushing an electrode on one surface of the ceramic thick film with the square sheet structure to obtain the ceramic thick film with an inner electrode;

step 2, stacking the obtained ceramic thick film brushed with the inner electrode according to an electrode staggering mode to obtain a ceramic piezoelectric stack;

step 4, sequentially carrying out glue removal and sintering on the obtained ceramic piezoelectric stack to obtain a sintered ceramic piezoelectric stack;

and 5, sequentially performing electrode treatment and polarization on two side surfaces of the sintered ceramic piezoelectric stack to obtain the textured lead-based piezoelectric laminated driver.

Preferably, in step 1, the ceramic thick film is prepared by the fine-grain piezoelectric ceramic matrix and the sheet template, and the specific method comprises the following steps:

fully mixing a fine-grain piezoelectric ceramic matrix, a flaky template, a sintering aid, a solvent, a dispersing agent, a binder and a plasticizer to obtain casting slurry; wherein the mass ratio of the fine-grain piezoelectric ceramic matrix, the sintering aid, the solvent, the dispersant, the binder and the plasticizer to the flaky template is (20-50), (0.1-4.5), (15-40), (0.5-3.5), (1-3) and (0.5-4);

and carrying out tape casting on the obtained tape casting slurry to obtain the ceramic thick film.

Preferably, the sintering aid is B₂O₃、CuO、ZnO、Li₂CO₃And Bi₂O₃One or more of the above; the solvent is one or more of ethanol, dimethylbenzene, ethanol, butanone and ethyl acetate; the dispersant is one or more of triolein, phosphate and menhaden oil; the binder is polyvinyl butyral; one or more of polyethylene glycol, polyalkylene glycol and dibutyl phthalate serving as plasticizer.

Preferably, in step 1, the fine-grained piezoelectric ceramic matrix is ABO₃The perovskite structure is a fine-grained piezoelectric ceramic matrix prepared by a solid-phase sintering method.

Preferably, in step 1, the lattice of the piezoelectric ceramic matrix and the lattice of the plate-like template are matched with each other.

Preferably, in step 4, before sequentially performing binder removal and sintering on the obtained ceramic piezoelectric stack, hot uniaxial pressing and warm water isostatic pressing treatment are performed, and then the ceramic piezoelectric stack is cut according to the size of the electrode.

Preferably, the process parameters of hot uniaxial pressing and warm water isostatic pressing are as follows: keeping at 50-80 deg.C under 15-100MPa for 15-60 min.

Preferably, in step 4, the process parameters of glue discharging and sintering are respectively as follows:

the glue discharging temperature is 500-800 ℃, and the heat preservation time is 2-10 h; the sintering temperature is 900-1500 ℃, and the heat preservation time is 1-60 h.

Preferably, in step 5, the process conditions for polarization are: the temperature is 25-300 deg.C, the time is 30-60min, and the electric field is 1-5 kV/cm.

A textured piezoelectric ceramic laminated driver is prepared based on the preparation method and comprises a ceramic piezoelectric stack, wherein two side faces of the ceramic piezoelectric stack are provided with outer electrodes; the ceramic piezoelectric stack comprises a plurality of ceramic thick films provided with internal electrodes, and the plurality of ceramic thick films are stacked in an electrode staggered manner.

Compared with the prior art, the invention has the beneficial effects that:

according to the preparation method of the textured piezoelectric ceramic laminated driver, anisotropic ceramic is obtained by directionally growing the fine-grain piezoelectric ceramic matrix around the sheet-shaped template, so that the piezoelectric performance of the ceramic is greatly improved; compared with the common piezoelectric ceramic stack driver, the piezoelectric ceramic stack driver has very low driving voltage, very high driving displacement and low strain hysteresis; and meanwhile, sintering the obtained ceramic piezoelectric stack to form a textured structure on the sintered ceramic piezoelectric stack.

The textured piezoelectric ceramic has the advantages of simple preparation process, low cost (similar to the existing common ceramic cost), stable performance close to single crystal, accurate and controllable components, short preparation period, molding diversity, easiness in mass production, ultrahigh cost performance and the like, is used for manufacturing a high-performance piezoelectric laminated driver, and can meet the increasing application requirements of the society on piezoelectric devices.

Furthermore, the invention adopts the co-fired ceramic process, improves the overall mechanical strength of the driver, eliminates the adverse effect of the epoxy resin on the performance of the driver, greatly reduces the processing difficulty, improves the working efficiency and can completely realize the mass production of the device.

Furthermore, in the preparation process of the casting slurry, the sintering aid is added, so that the sintering temperature is reduced, the combination between the inner electrode and the ceramic medium is tighter, the mutual permeation is reduced, the internal defects are reduced, and the texture degree of the textured ceramic can be improved

Furthermore, before glue discharging and sintering are sequentially carried out on the obtained ceramic piezoelectric stack, hot uniaxial pressure and warm water isostatic pressure treatment are firstly carried out, so that the peeling of the electrode and the ceramic in the sintering process can be avoided, the density can be improved, and the service life of the driver is further prolonged.

Furthermore, the sintering temperature is set to be 900-.

Drawings

FIG. 1 is a flow chart of the fabrication of a fabricated textured piezoelectric ceramic stack actuator;

FIG. 2 is a cross-sectional SEM image of a fabricated textured piezoelectric ceramic stack actuator;

FIG. 3 is an XRD pattern of the textured piezoelectric ceramic prepared;

FIG. 4 is a graph of applied voltage versus corresponding displacement for the fabricated textured piezoelectric ceramic stack actuator;

fig. 5 is a dielectric thermogram of the prepared textured piezoelectric ceramic.

Detailed Description

For a more detailed description of the invention, reference is made to the following further description, taken in conjunction with the accompanying drawings and specific examples, it being understood that the invention is not limited to the precise arrangements set forth.

The invention provides a preparation method of a textured piezoelectric ceramic laminated driver, which is characterized in that a tape casting process is used for preparing slurry into a ceramic thick film, an inner electrode is printed by a screen printing process, the ceramic thick film is laminated together in an interdigital electrode mode, an integrated ceramic is fired after hot pressing, and an outer electrode is printed on the side face to form the complete textured piezoelectric ceramic laminated driver. The invention combines the high-performance textured ceramic and the multilayer ceramic co-firing technology, and can effectively improve the comprehensive use performance of the laminated piezoelectric actuator.

The specific preparation process adopted by the invention is as follows:

step 1, preparing a pure-phase fine-grain piezoelectric ceramic matrix;

preparing a sheet template;

step 2, fully mixing the fine-grain piezoelectric ceramic matrix with a sheet template, a sintering aid, a solvent, a dispersing agent, a binder and a plasticizer to obtain casting slurry with certain viscosity; wherein the mass ratio of the fine-grain piezoelectric ceramic matrix, the sintering aid, the solvent, the dispersant, the binder and the plasticizer to the sheet template is (20-50), (0.1-4.5), (15-40), (0.5-3.5), (1-3) and (0.5-4).

The texture ceramic is mainly made of ABO₃A ceramic material of perovskite structure. Wherein A site can be one or more of Pb, Ba, Mg, Ca, Sr, K, etc., or A can be partially substituted by rare earth metal to form A_xR_1-xThe structure is shown in the specification, wherein R is Sm, Y, La, Ho, Dy and the like; the B site can be one or more of metal elements of Ti, Zr, Sn, Ni, Mn, Zn, Mg, In, Nb, Co, Sc and the like. According to whether the A site contains Pb element and the organic combination of the components, the textured ceramic material can be divided into two types: the lead-based piezoelectric ceramic material is a one-element, two-element, three-element or multi-element three-party solid solution lead-based piezoelectric system, such as a PT base, a PMN-PT base, a PIN-PMN-PT base and the like; and lead-free piezoelectric systems such as Barium Titanate (BT) base, bismuth sodium titanate (BNT) base, potassium sodium niobate (KNN) base, Barium Calcium Zirconate Titanate (BCZT) base and the like. Meanwhile, through element doping, multi-element solid solution and optimization and improvement of a preparation process, the performance of the textured ceramic makes a lot of breakthrough progress, and possibility is provided for meeting the increasing application requirements of the current society.

The sheet template must be lattice-matched with the piezoelectric ceramic matrix, for example, the sheet template may be BaTiO sheet₃NaNbO in sheet form₃Or lamellar SrTiO₃。

The sintering aid can be selected from B₂O₃、CuO、ZnO、Li₂CO₃And Bi₂O₃One or more of the above;

the solvent can be one or more of ethanol, xylene, ethanol, butanone and ethyl acetate;

the dispersant can be one or more of triolein, phosphate and molten herring oil;

the adhesive is polyvinyl butyral (PVB);

the plasticizer is one or more of polyethylene glycol, polyalkylene glycol and dibutyl phthalate.

And 3, carrying out vacuum defoaming treatment on the obtained casting slurry, and then obtaining a casting green sheet by a casting forming machine.

Cutting the casting green sheet into square sheets with certain size after drying, and brushing an electrode on one surface of the casting green sheet by a screen printing process;

step 4, after the internal electrodes are dried, stacking a certain number (10-1000 pieces) of cut ceramic thick films in an electrode staggering manner, cutting the ceramic thick films according to the size of the electrodes after hot uniaxial pressure and warm water isostatic pressure under certain conditions to obtain a multilayer square block containing the interdigital internal electrodes, and then carrying out binder removal and sintering, wherein the hot uniaxial pressure and the warm water isostatic pressure are kept at 50-80 ℃ for 15-60min under the pressure of 15-100 MPa; the glue discharging temperature is 500-800 ℃, and the heat preservation time is 2-10 h; the sintering temperature is 900-1500 ℃, and the heat preservation time is 1-60 h.

Step 5, grinding and polishing the side surface of the sintered metal plate after sintering, brushing an outer electrode to form a complete interdigital electrode structure, and then sintering, wherein the sintering temperature of the outer electrode is 550-900 ℃, and the heat preservation time is 10-300 min;

and 6, finally, carrying out polarization under certain conditions (the polarization conditions are that the temperature is 25-300 ℃, the time is 30-60min, and the electric field is 1-5kV/cm), and obtaining the textured lead-based piezoelectric laminated driver.

Preferably, the invention combines the preparation process of the high-performance textured piezoelectric ceramic with the multilayer ceramic co-firing technology to prepare the laminated piezoelectric actuator, thereby effectively improving the comprehensive performance of the device.

Firstly, the ceramic matrix and the sheet template must be matched with each other in terms of lattice; on the basis, with the enhancement of sintering conditions, the ceramic matrix grows around the template to obtain the same crystal orientation as that of the flaky template, so that the performance of the texture piezoelectric actuator is improved.

The following are more detailed embodiments for illustrating the invention, and the technical method and the preparation process used in the invention will be further explained.

Example 1

The lead-based ceramic base powder of PMN-30PT component selected in example 1 was prepared by a two-step solid phase synthesis process, in which MgO and Nb were first synthesized₂O₅Synthesis of MgNb₂O₆Then adding Pb₃O₄、MgNb₂O₆And TiO₂Fully mixing, pre-burning for 2h at 850 ℃, wherein the sintering aid is CuO. In the casting formula: the solvent is a binary azeotropic solvent of butanone and absolute ethyl alcohol, the adhesive is PVB, the dispersant is triolein, the plasticizer is polyethylene glycol and dibutyl phthalate, and the texture ceramic d is obtained by sintering₃₃Is 790 and 860 pC/N. The specific manufacturing steps are as follows:

step 1: weighing raw materials according to the chemical formula ratio, and performing ball milling, drying and presintering at 850 ℃ for 2 hours to obtain PMN-30PT ceramic powder; prepared and washed by a two-step Tubo chemical process to obtain pure<001>BaTiO₃(BT) a sheet template;

step 2: taking 30g of the ceramic matrix powder, and fully mixing with 1.14g of a BT template with a certain viscosity, 0.15g of CuO, 15g of azeotropic solvent of absolute ethyl alcohol and butanone, 0.6g of triolein, 2.7g of PVB, 0.9g of polyethylene glycol and 0.9g of dibutyl phthalate to obtain casting slurry with a certain viscosity;

and step 3: obtaining a ceramic thick film by a tape casting film forming process, cutting the dried ceramic thick film into square sheets with the size of 30 multiplied by 30mm, and then uniformly brushing inner electrodes on the cast sheets by screen printing;

and 4, step 4: and (3) overlapping the 30 layers of ceramic thick films according to the interdigital electrode mode, respectively keeping for 20min under the conditions of 20MPa and 30MPa, hot uniaxial pressure at the temperature of 75 ℃ and warm water isostatic pressure, then cutting according to the size of the electrode to obtain a multilayer square block containing the interdigital inner electrode, carrying out gel discharge for 2 hours at the temperature of 600 ℃ to obtain a blank, and carrying out sintering and heat preservation for 10 hours at the temperature of 1200 ℃ to obtain the multilayer ceramic block containing the interdigital electrode.

And 5: polishing two side surfaces of the sintered multilayer ceramic, brushing an external electrode, and sintering at 600 ℃ to obtain an integrated multilayer ceramic device;

step 6: and (3) polarizing the device in silicone oil at 120 ℃ with a polarizing electric field of 2kV/mm to obtain the textured lead-based piezoelectric laminated driver. When a voltage of 150v was applied, the output displacement was 3.6 μm.

Example 2

In example 2, lead-based PZT-15SKN was used as the dielectric material for the textured stacked piezoelectric actuator, and the formula was 0.85Pb (Zr)_0.52Ti_0.48-0.15Sr(K_0.25Nb_0.75)O₃In the process, a template grain growth Technology (TGG) is adopted to prepare textured piezoelectric ceramics, and Li is added₂CO₃As sintering aid, the casting formula comprises: the solvent is a binary azeotropic solvent of dimethylbenzene and absolute ethyl alcohol, the adhesive is PVB, the dispersant is phosphate, the plasticizer is polyethylene glycol and dibutyl phthalate, and the texture degree of the texture ceramic obtained by sintering is 97.1 percent at most. The method comprises the following specific steps:

step 1: preparing a fine-grain piezoelectric ceramic matrix by adopting a solid phase method: mixing PbO and TiO₂、SrCO₃、K₂CO₃Ball milling the mixture for 24h by using absolute ethyl alcohol as a medium, drying the mixture, and then calcining the dried mixture for 4h at 850 ℃.

Prepared and washed by a two-step Tubo chemical process to obtain pure<001>BaTiO₃(BT) a sheet template;

step 2: mixing the above ceramic matrix powder 40g and 1.75g<001>BT template, 0.25gLi₂CO₃13g of azeotropic solvent of absolute ethyl alcohol and xylene, 1g of phosphate, 2g of PVB, 0.75g of polyethylene glycol and 0.75g of dibutyl phthalate are fully mixed to obtain casting slurry with certain viscosity;

and step 3: obtaining a ceramic thick film by a tape casting film forming process, cutting the dried ceramic thick film into square sheets with the size of 30 multiplied by 30mm, and then uniformly brushing inner electrodes on the cast sheets by screen printing;

and 4, step 4: and (3) overlapping the 30 layers of ceramic thick films according to the interdigital electrode mode, respectively keeping for 30min under the conditions of 25MPa and 35MPa, 80 ℃ hot uniaxial pressure and warm water isostatic pressure, cutting according to the size of the electrode to obtain a multilayer square block containing the interdigital inner electrode, then carrying out glue discharge at 500 ℃ for 2 hours to obtain a blank, and carrying out sintering and heat preservation at 1100 ℃ for 10 hours to obtain the multilayer ceramic block containing the interdigital inner electrode. The internal electrode structure of the ceramic block of fig. 2 shows that the single layer textured ceramic has a thickness of about 30 μm and the electrode has a thickness of about 7 μm.

And 5: polishing two side surfaces of the sintered multilayer ceramic, brushing an external electrode, and sintering at 600 ℃ to obtain an integrated multilayer ceramic device;

step 6: and (3) polarizing the device in silicone oil at 120 ℃ with a polarizing electric field of 2.5kV/mm to obtain the textured lead-based piezoelectric laminated driver. The textured stack driver hysteresis was 12%.

Example 3

In example 3, the lead-based 17PIN-38PSN-45PT is used as the dielectric material of the textured laminated piezoelectric actuator, and the molecular formula is 0.17Pb (In)_1/2Nb_1/2)O₃-0.38Pb(Sc_1/2Nb_1/2)O₃-0.45PbTiO₃In the process, a template grain growth Technology (TGG) is adopted to prepare the textured piezoelectric ceramic, CuO is added as a sintering aid, and the tape casting formula comprises the following components: the solvent is binary azeotropic body of butanone and absolute ethyl alcohol, the adhesive is PVB, the dispersant is menhaden fish oil, the plastic agent is polyalkylene glycol and butyl benzyl phthalate, the texture degree of the texture ceramic obtained by sintering is up to 98.8%, the XRD spectrum is shown in figure 3, d₃₃Is 1000 pC/N. The specific manufacturing steps are as follows:

step 1: in this example, In was prepared according to the formula₂O₃And Nb₂O₅、Sc₂O₃And Nb₂O₅Respectively synthesizing pure-phase InNbO by solid-phase synthesis₄(IN)、ScNbO₄(SN) precursor powder, and then mixing the precursor powder with Pb₃O₄、TiO₂Putting the mixture into a ball milling tank, ball milling and mixing for 12 hours, drying, sintering at 850 ℃ and keeping the temperature for two hours to synthesize pure-phase piezoelectric ceramic matrix powder;

step 2: taking 25g of the ceramic matrix powder, and fully mixing with 1.8g of a BT template with a certain viscosity, 0.22g of CuO, 15g of azeotropic solvent of absolute ethyl alcohol and dimethylbenzene, 0.95g of menhaden oil, 1.9g of PVB, 1.05g of polyalkylene glycol and 1.05g of butyl benzyl phthalate to obtain casting slurry with a certain viscosity;

and step 3: obtaining a ceramic thick film by a tape casting film forming process, cutting the dried ceramic thick film into square sheets with the size of 30 multiplied by 30mm, and then uniformly brushing inner electrodes on the cast sheets by screen printing;

and 4, step 4: and (3) overlapping the 30 layers of ceramic thick films according to an interdigital electrode mode, respectively keeping for 20min under the conditions of 15MPa and 25MPa, hot uniaxial pressure at the temperature of 70 ℃ and warm water isostatic pressure, cutting according to the size of the electrode to obtain a multilayer square block containing the interdigital inner electrode, then carrying out gel discharge at 650 ℃ for 2 hours to obtain a blank, and carrying out sintering and heat preservation at 1300 ℃ for 10 hours to obtain the multilayer ceramic block containing the interdigital inner electrode.

And 5: polishing two side surfaces of the sintered multilayer ceramic, brushing an external electrode, and sintering at 600 ℃ to obtain an integrated multilayer ceramic device;

step 6: and (3) polarizing the device in silicone oil at 120 ℃ with a polarizing electric field of 2kV/mm to obtain the textured lead-based piezoelectric laminated driver.

Fig. 4 is a graph of applied voltage versus corresponding displacement for the fabricated textured piezoelectric ceramic stack actuator. As can be seen from the graph, when the applied voltage was 150v, the actuator displacement was 4.27 μm and the strain was 0.16%.

Example 4

In example 4, a textured laminated piezoelectric actuator was prepared using a lead-free Barium Calcium Zirconate Titanate (BCZT) -based piezoelectric ceramic of the formula (Ba)_0.85Ca_0.15)(Zr_0.05Ti_0.95)O₃In the process, a template grain growth Technology (TGG) is adopted to prepare the textured piezoelectric ceramic, CuO is added as a sintering aid, and the tape casting formula comprises the following components: the solvent is binary azeotropic body of dimethylbenzene and absolute ethyl alcohol, the adhesive is PVB, the dispersant is menhaden oil, the plastic agent is polyalkylene glycol and butyl benzyl phthalate, and the texture ceramic d is obtained by sintering₃₃Is 523-575 pC/N. The method comprises the following specific steps:

step 1: mixing TiO according to the element proportion of the chemical formula₂、ZrO₂、BaCO₃And CaCO₃Ball milling for 48h by using absolute ethyl alcohol as a medium, drying, and calcining for 5h at 1150 ℃ to obtain piezoelectric ceramic matrix powder; prepared and washed by a two-step Tubo chemical process to obtain pure<001>BaTiO₃(BT) a sheet template;

step 2: taking 50g of the ceramic matrix powder, and fully mixing with 1.8g of a BT template with a certain viscosity, 0.6g of CuO, 15g of azeotropic solvent of absolute ethyl alcohol and dimethylbenzene, 1.1g of menhaden oil, 1.6g of PVB, 1,5g of polyalkylene glycol and 1.5g of butyl benzyl phthalate to obtain casting slurry with a certain viscosity;

and step 3: obtaining a ceramic thick film by a tape casting film forming process, cutting the dried ceramic thick film into square sheets with the size of 30 multiplied by 30mm, and then uniformly brushing inner electrodes on the cast sheets by screen printing;

and 4, step 4: stacking the 30 layers of ceramic thick films together according to an interdigital electrode mode, respectively keeping the ceramic thick films for 30min under the conditions of 100MPa and 170MPa, and hot uniaxial pressure and warm water isostatic pressure at the temperature of 90 ℃, cutting according to the size of the electrode to obtain a multilayer square block containing the interdigital inner electrode, then carrying out glue discharge at 600 ℃ for 2 hours to obtain a blank, and carrying out sintering and heat preservation at 1150 ℃ for 2 hours to obtain a multilayer ceramic block containing the interdigital inner electrode;

and 5: polishing two side surfaces of the sintered multilayer ceramic, brushing an external electrode, and sintering at 600 ℃ to obtain an integrated multilayer ceramic device;

step 6: and (3) polarizing the device in silicone oil at 80 ℃ with a polarizing electric field of 10kV/mm to obtain the textured lead-based piezoelectric laminated driver.

When the applied voltage was 150v, the actuator displacement was 2.2 μm.

Example 5

Textured laminated piezoelectric actuators were prepared in example 5 using lead-free NBT-25BST piezoelectric ceramics having a matrix formula of 0.75 (Na)_0.5Bi_0.5)TiO₃-0.25(Ba_0.8Sr_0.2)TiO₃In the process, a template grain growth Technology (TGG) is adopted to prepare the textured piezoelectric ceramic, and in the casting formula: the solvent is a binary azeotropic body of dimethylbenzene and absolute ethyl alcohol, and the adhesive is PVBThe dispersant is menhaden fish oil, and the plastic agent is polyethylene glycol and dibutyl phthalate. The method comprises the following specific steps:

step 1: BiO is prepared by traditional solid phase synthesis method according to the element proportion of the chemical formula₂、TiO₂、Na₂CO₃、CaCO₃、BaTiO₃And SrTiO₃Synthesizing fine crystal ceramic collective powder; prepared by a two-step synthesis method and washed to obtain pure<001>SrTiO₃(ST) a sheet form;

step 2: taking 35g of the ceramic matrix powder, and fully mixing with 1.5g of a <001> ST template, 20g of an azeotropic solvent of absolute ethyl alcohol and xylene, 0.8g of menhaden fish oil, 0.9g of PVB, 1.6g of polyethylene glycol and 1.6g of dibutyl phthalate to obtain casting slurry with certain viscosity;

and step 3: obtaining a ceramic thick film through a tape casting film forming process, cutting the dried ceramic thick film into square sheets with the size of 30 multiplied by 30mm, and then uniformly brushing an inner electrode on the cast sheet by screen printing, wherein FIG. 5 is a curve of the dielectric constant and the dielectric loss of the textured ceramic along with the temperature, and Tc is about 143 ℃.

And 4, step 4: and (3) overlapping the 30 layers of ceramic thick films with the inner electrodes in an interdigital electrode mode, respectively keeping the layers of ceramic thick films under the conditions of 70MPa and 100MPa, 70 ℃ hot uniaxial pressure and warm water isostatic pressure for 60min, cutting the ceramic thick films according to the size of the electrodes to obtain a multilayer square block containing the interdigital inner electrodes, then carrying out glue discharge at 550 ℃ for 2 hours to obtain a green blank, and carrying out sintering and heat preservation at 900 ℃ for 5 hours to obtain the multilayer ceramic block containing the interdigital inner electrodes.

And 5: polishing two side surfaces of the sintered multilayer ceramic, observing side surface electrodes through a scanning electron microscope, wherein the sectional SEM image of the prepared textured piezoelectric ceramic laminated driver is shown in figure 5, brushing outer electrodes, and sintering at 600 ℃ to form an integrated multilayer ceramic device;

step 6: and (3) polarizing the device in silicon oil at 50 ℃ with a polarizing electric field of 4kV/mm to obtain the textured lead-based piezoelectric laminated driver.

And 7: removing the inner electrode of the brush, manufacturing a textured ceramic block according to the same steps of the step 1 to the step 4,brushing electrodes on the upper and lower surfaces, testing the dielectric piezoelectric performance after polarization, and showing that the component textured ceramic T is shown in FIG. 5, which is a dielectric thermogram of the component textured ceramic_CIs about 324 ℃, and is suitable for high-temperature environment.

Example 6

Textured laminated piezoelectric actuators were prepared in example 6 using a lead-free KNN-5LS piezoelectric ceramic having a matrix formula of 0.95 (K)_0.5Na_0.5)NbO₃-0.05LiSbO₃In the process, a template grain growth Technology (TGG) is adopted to prepare textured piezoelectric ceramics, and MnO is added₂As sintering aid, the casting formula comprises: the solvent is a binary azeotropic body of toluene and absolute ethyl alcohol, the adhesive is PVB, the dispersant is phosphate ester, and the plastic agent is polyethylene glycol and dibutyl phthalate. The method comprises the following specific steps:

step 1: according to the element proportion of the chemical formula, K is prepared by adopting the traditional solid phase synthesis method₂CO₃、Na₂CO₃、Nb₂O₅、Li₂CO₃And Sb₂O₅Synthesizing fine crystal ceramic collective powder; prepared by a lava method and washed to obtain pure<001>NaNbO₃A sheet form;

step 2: mixing 20g of the above ceramic matrix powder with 0.75g<001>NaNbO₃Template, 0.225gMnO₂Fully mixing 21g of azeotropic solvent of absolute ethyl alcohol and xylene, 0.6g of phosphate, 0.9g of PVB, 1.3g of polyethylene glycol and 1.3g of dibutyl phthalate to obtain casting slurry with certain viscosity;

and step 3: obtaining a ceramic thick film by a tape casting film forming process, cutting the dried ceramic thick film into square sheets with the size of 30 multiplied by 30mm, and then uniformly brushing inner electrodes on the cast sheets by screen printing;

and 4, step 4: and (3) overlapping the 30 layers of ceramic thick films according to the interdigital electrode mode, respectively keeping for 60min under the conditions of 35MPa and 60MPa, hot uniaxial pressure at the temperature of 70 ℃ and warm water isostatic pressure, cutting according to the size of the electrode to obtain a multilayer square block containing the interdigital inner electrode, then carrying out gel discharge at 550 ℃ for 2 hours to obtain a blank, and carrying out sintering and heat preservation at 1500 ℃ for 10 hours to obtain the multilayer ceramic block containing the interdigital inner electrode.

And 5: polishing two side surfaces of the sintered multilayer ceramic, brushing an external electrode, and sintering at 600 ℃ to obtain an integrated multilayer ceramic device;

step 6: and (3) polarizing the device in silicone oil at 120 ℃, wherein the polarizing electric field is 2.5kV/mm, and the polarizing time is 30min, so as to obtain the textured lead-based piezoelectric laminated driver.

The textured ceramic T_CIs about 355 ℃ and is suitable for high-temperature environment.