Preparation method of green environment-friendly semiconductor-grade propylene glycol methyl ether (PM)
阅读说明：本技术 一种绿色环保型半导体级丙二醇甲醚（pm）的制备方法 (Preparation method of green environment-friendly semiconductor-grade propylene glycol methyl ether (PM) ) 是由 王金城 隋希之 乔正收 于 2021-07-22 设计创作，主要内容包括：本发明公开了一种绿色环保型半导体级丙二醇甲醚(PM)的制备方法,包括以下步骤：原材料的配制、制备材料的混合、丙二醇甲醚的制备、低碳醇的回收、丙二醇甲醚的纯化、电子级丙二醇甲醚的制备、电子级丙二醇甲醚的纯化、半导体级丙二醇甲醚溶液的存储。该绿色环保型半导体级丙二醇甲醚(PM)的制备方法,防止其扩散至空气和水中,使该生产工艺更加绿色环保,收集的甲醛可以再次的用于丙二醇甲醚的酯化反应,节约原材料成本。经本发明方法获得丙二醇甲醚(PM)主体含量达99.9％,水含量、阳离子含量及阴离子含量均符合国际半导体设备和材料组织制定的化学材料12级标准,可用于半导体、大规模集成电路装配和加工过程中的清洗、干燥等方面。(The invention discloses a preparation method of green environment-friendly semiconductor-grade propylene glycol methyl ether (PM), which comprises the following steps: the method comprises the following steps of raw material preparation, preparation material mixing, propylene glycol methyl ether preparation, low-carbon alcohol recovery, propylene glycol methyl ether purification, electronic grade propylene glycol methyl ether preparation, electronic grade propylene glycol methyl ether purification and semiconductor grade propylene glycol methyl ether solution storage. The preparation method of the green and environment-friendly semiconductor-grade propylene glycol methyl ether (PM) prevents the PM from diffusing into air and water, so that the production process is more green and environment-friendly, the collected formaldehyde can be used for esterification of propylene glycol methyl ether again, and the raw material cost is saved. The content of the propylene glycol methyl ether (PM) obtained by the method reaches 99.9 percent, and the water content, the cation content and the anion content all accord with the 12-grade standard of chemical materials established by international semiconductor equipment and material organizations, and can be used for cleaning, drying and the like in the assembling and processing processes of semiconductors and large-scale integrated circuits.)
1. A preparation method of green environment-friendly semiconductor-grade propylene glycol methyl ether (PM) is characterized by comprising the following steps:
(1) preparation of raw materials: adding the catalyst into a glass container, adding a proper amount of methanol, and mixing to prepare a basic reaction solution.
(2) Mixing the preparation materials: and (2) adding the basic reaction liquid obtained in the step (1) into a mixer, adding a certain amount of propylene oxide into the mixer, uniformly mixing, preheating by a preheater, and then feeding into the reactor.
(3) Preparation of propylene glycol methyl ether: and (3) raising the temperature of the reactor in the step (2) to enable methanol and propylene oxide in the reactor to carry out series-parallel connection reaction under the action of a catalyst to prepare propylene glycol methyl ether mixed solution.
(4) Recovery of lower alcohol: and (4) adding the propylene glycol methyl ether mixed solution obtained in the step (3) into a methanol rectifying tower, removing redundant methanol in the propylene glycol methyl ether mixed solution through the separation effect of the methanol rectifying tower to prepare a propylene glycol methyl ether stock solution, and recycling the separated methanol.
(5) Purification of propylene glycol methyl ether: and (4) sequentially passing the propylene glycol methyl ether stock solution in the step (4) through a light component removal tower, a heavy component removal tower and a dehydration tower, and purifying the propylene glycol methyl ether stock solution to prepare the high-purity propylene glycol methyl ether.
(6) Preparation of electronic grade propylene glycol methyl ether: and (5) adding the high-purity propylene glycol methyl ether in the step (5) into an ion exchange resin bed to remove metal ions in the propylene glycol methyl ether, so as to prepare the electronic-grade propylene glycol methyl ether solution.
(7) Purification of electronic grade propylene glycol methyl ether: and (4) adding the electronic grade propylene glycol methyl ether solution obtained in the step (6) into an ultrafilter for ultrafiltration to prepare a semiconductor grade propylene glycol methyl ether solution.
(8) Storage of semiconductor grade propylene glycol methyl ether solution: and (4) placing the semiconductor-grade propylene glycol methyl ether solution in the step (7) into a metal bucket for storage.
2. The method for preparing green environmental-friendly semiconductor-grade propylene glycol methyl ether (PM) according to claim 1, characterized in that: the catalyst in the step (1) is sodium methoxide, alkali metal hydroxide or alkoxide, the ratio of the catalyst to methanol is 1:10, and the catalyst and the methanol are mixed at normal temperature.
3. The method for preparing green environmental-friendly semiconductor-grade propylene glycol methyl ether (PM) according to claim 1, characterized in that: the ratio of the propylene oxide to the methanol in the step (2) is 1:3, the type of the preheater is a reaction liquid preheater F ═ 35 square meters and fixed tube sheet type, and the preheating temperature is 50-60 ℃.
4. The method for preparing green environmental-friendly semiconductor-grade propylene glycol methyl ether (PM) according to claim 1, characterized in that: the reactor for the series-parallel reaction in the step (3) is a tubular reactor, the reaction temperature is 70-120 ℃, and the reaction time is 1-2 h.
5. The method for preparing green environmental-friendly semiconductor-grade propylene glycol methyl ether (PM) according to claim 1, characterized in that: and (3) the methanol rectifying tower in the step (4) is a formaldehyde recovery tower, and the formaldehyde separated and rectified by a rectifying system of the formaldehyde recovery tower is used for preparing the basic reaction liquid in the step (1) again.
6. The method for preparing green environmental-friendly semiconductor-grade propylene glycol methyl ether (PM) according to claim 1, characterized in that: and (3) in the step (5), the model of the light component removal tower is T-5102, the model of the heavy component removal tower is CY-700, and the model of the dehydration tower is DN2400 x 50000300.
7. The method for preparing green environmental-friendly semiconductor-grade propylene glycol methyl ether (PM) according to claim 1, characterized in that: and (3) the ion exchange resin bed in the step (6) is strong acid type cation exchange resin, and the strong acid type cation exchange resin is in a gel type.
8. The method for preparing green environmental-friendly semiconductor-grade propylene glycol methyl ether (PM) according to claim 1, characterized in that: the ultrafilter in the step (7) controls dust particles with the particle size of more than 0.6 mu m in the propylene glycol monomethyl ether after ultrafiltration within 6 pcs/ml.
9. The method for preparing green environmental-friendly semiconductor-grade propylene glycol methyl ether (PM) according to claim 1, characterized in that: and (4) the metal barrels in the step (8) are in a mutually connected and grounded state and are placed in a shady, dry and ventilated place to avoid direct sunlight.
Technical Field
The invention relates to the technical field of fine chemicals preparation, in particular to a preparation method of green and environment-friendly semiconductor-grade propylene glycol methyl ether (PM).
Background
Propylene glycol methyl ether belongs to low toxicity ether, and has weak ether smell but no strong pungent smell, so that the application of the propylene glycol methyl ether is wider and safer. The molecular structure of the phenolic aldehyde modified nitrile-butadiene rubber has ether group and hydroxyl group, so that the phenolic aldehyde modified nitrile-butadiene rubber has the characteristics of excellent solubility, proper volatilization rate, reaction activity and the like, and can be widely applied, mainly used as excellent solvents of nitrocellulose, alkyd resin and cis-anhydride modified phenolic resin, and used as additives of jet fuel antifreeze and brake fluid and the like; the methanol-methanol composite propylene glycol methyl ether is mainly used as a solvent, a dispersant and a diluent, and also used as an antifreeze agent, an extractant and the like of fuel, and methanol is mostly adopted as an alcohol raw material in the existing preparation method of propylene glycol methyl ether, and the excessive use of methanol can be caused in the reproduction process, so that the environmental pollution of formaldehyde is easily caused, and the production process does not accord with the concept of green environmental protection.
Therefore, we propose a method for preparing green and environment-friendly semiconductor grade propylene glycol methyl ether (PM) so as to solve the problems proposed in the above.
Disclosure of Invention
The invention aims to provide a preparation method of green and environment-friendly semiconductor-grade propylene glycol methyl ether (PM), which aims to solve the problems that methanol is mostly adopted as an alcohol raw material in the existing preparation method of propylene glycol methyl ether in the market in the background technology, and excessive use of methanol is caused in the reproduction process, so that the environmental pollution of formaldehyde is easily caused, and the production process does not conform to the concept of green and environment protection.
In order to achieve the purpose, the invention provides the following technical scheme: a preparation method of green environment-friendly semiconductor-grade propylene glycol methyl ether (PM) comprises the following steps:
(1) preparation of raw materials: adding the catalyst into a glass container, adding a proper amount of methanol, and mixing to prepare a basic reaction solution.
(2) Mixing the preparation materials: and (2) adding the basic reaction liquid obtained in the step (1) into a mixer, adding a certain amount of propylene oxide into the mixer, uniformly mixing, preheating by a preheater, and then feeding into the reactor.
(3) Preparation of propylene glycol methyl ether: and (3) raising the temperature of the reactor in the step (2) to enable methanol and propylene oxide in the reactor to carry out series-parallel connection reaction under the action of a catalyst to prepare propylene glycol methyl ether mixed solution.
(4) Recovery of lower alcohol: and (4) adding the propylene glycol methyl ether mixed solution obtained in the step (3) into a methanol rectifying tower, removing redundant methanol in the propylene glycol methyl ether mixed solution through the separation effect of the methanol rectifying tower to prepare a propylene glycol methyl ether stock solution, and recycling the separated methanol.
(5) Purification of propylene glycol methyl ether: and (4) sequentially passing the propylene glycol methyl ether stock solution in the step (4) through a light component removal tower, a heavy component removal tower and a dehydration tower, and purifying the propylene glycol methyl ether stock solution to prepare the high-purity propylene glycol methyl ether.
(6) Preparation of electronic grade propylene glycol methyl ether: and (5) adding the high-purity propylene glycol methyl ether in the step (5) into an ion exchange resin bed to remove metal ions in the propylene glycol methyl ether, so as to prepare the electronic-grade propylene glycol methyl ether solution.
(7) Purification of electronic grade propylene glycol methyl ether: and (4) adding the electronic grade propylene glycol methyl ether solution obtained in the step (6) into an ultrafilter for ultrafiltration to prepare a semiconductor grade propylene glycol methyl ether solution.
(8) Storage of semiconductor grade propylene glycol methyl ether solution: and (4) placing the semiconductor-grade propylene glycol methyl ether solution in the step (7) into a metal bucket for storage.
Preferably, the catalyst in the step (1) is sodium methoxide, alkali metal hydroxide or alkoxide, the ratio of the catalyst to methanol is 1:10, and the mixing is performed at normal temperature.
Preferably, the ratio of the propylene oxide to the methanol in the step (2) is 1:3, the type of the preheater is a reaction liquid preheater F ═ 35 square meters and fixed tube sheet type, and the preheating temperature is 50-60 ℃.
Preferably, the reactor for the series-parallel reaction in the step (3) is a tubular reactor, the reaction temperature is 70-120 ℃, and the reaction time is 1-2 h.
Preferably, the methanol rectifying tower in the step (4) is a formaldehyde recovery tower, and the formaldehyde separated and rectified by the rectifying system of the formaldehyde recovery tower is used for preparing the basic reaction liquid in the step (1) again.
Preferably, the model of the light component removal tower in the step (5) is T-5102, the model of the heavy component removal tower is CY-700, and the model of the dehydration tower is DN2400 x 50000300.
Preferably, the ion exchange resin bed in the step (6) is a strong acid type cation exchange resin, and the strong acid type cation exchange resin is a gel type.
Preferably, the ultrafilter in the step (7) controls dust particles with the particle size of more than 0.6 μm in the propylene glycol methyl ether after ultrafiltration within 6 pcs/ml.
Preferably, the metal barrels in the step (8) are in a mutually connected and grounded state and are placed in a cool, dry and ventilated place to avoid direct sunlight.
Compared with the prior art, the invention has the beneficial effects that: the preparation method of the green environment-friendly semiconductor-grade propylene glycol monomethyl ether (PM),
(1) the methanol rectifying tower is arranged, in the esterification reaction of propylene oxide and methanol, excessive methanol can be added to improve the reaction rate of propylene oxide, the conversion rate of propylene glycol methyl ether is ensured, the methanol rectifying tower can effectively remove formaldehyde in reaction liquid, the content of propylene glycol methyl ether in the reaction liquid is improved, the production efficiency of propylene glycol methyl ether is improved, and the methanol rectifying tower is convenient for collecting formaldehyde in the reaction liquid, so that the formaldehyde is prevented from being diffused to air and water, the pollution of the formaldehyde to the surrounding environment is prevented, the production process is more green and environment-friendly, the collected formaldehyde can be used for the esterification reaction of propylene glycol methyl ether again, the raw material cost is saved, and the yield of the process is improved.
(2) The ion exchange resin bed and the ultrafilter are arranged, metal ions and larger dust particles in the propylene glycol methyl ether solution can be effectively removed through the ion exchange resin bed and the ultrafilter, the purity of the propylene glycol methyl ether solution is improved, the propylene glycol methyl ether solution can meet the requirements of semiconductor processing, and the quality of green and environment-friendly semiconductor-grade propylene glycol methyl ether produced by the device is improved.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a technical scheme that: a method for preparing green environment-friendly semiconductor-grade propylene glycol monomethyl ether (PM).
Example one
(1) Preparation of raw materials: adding a sodium methoxide catalyst into a glass container, adding a proper amount of methanol, mixing, wherein the ratio of the catalyst to the methanol is 1:10, and mixing at normal temperature to prepare a basic reaction solution.
(2) Mixing the preparation materials: adding the basic reaction liquid obtained in the step (1) into a mixer, adding quantitative propylene oxide into the mixer, wherein the ratio of the propylene oxide to methanol is 1:3, uniformly mixing, preheating by a fixed tube plate type preheater, and then feeding into a reactor, wherein the preheating temperature is 50 ℃.
(3) Preparation of propylene glycol methyl ether: and (3) raising the temperature of the reactor in the step (2), wherein the reaction temperature is 110 ℃, so that the methanol and the propylene oxide in the reactor are subjected to series-parallel connection reaction under the action of the catalyst, and the reaction time is 1h, so as to prepare the propylene glycol methyl ether mixed solution.
(4) Recovery of lower alcohol: and (3) adding the propylene glycol methyl ether mixed solution in the step (3) into a methanol rectifying tower, removing redundant methanol in the propylene glycol methyl ether mixed solution through the separation action of the methanol rectifying tower to prepare a propylene glycol methyl ether stock solution, recycling the separated methanol, and reusing formaldehyde for preparing the basic reaction solution in the step (1).
(5) Purification of propylene glycol methyl ether: and (3) sequentially passing the propylene glycol methyl ether stock solution in the step (4) through a light component removal tower T-5102, a heavy component removal tower CY-700 and a dehydration tower DN2400 x 50000300, and purifying the propylene glycol methyl ether stock solution to prepare the high-purity propylene glycol methyl ether.
(6) Preparation of electronic grade propylene glycol methyl ether: and (3) adding the high-purity propylene glycol methyl ether obtained in the step (5) into a gel type strong acid type cation exchange resin bed, and removing metal ions in the propylene glycol methyl ether to prepare an electronic-grade propylene glycol methyl ether solution.
(7) Purification of electronic grade propylene glycol methyl ether: and (4) adding the electronic-grade propylene glycol methyl ether solution obtained in the step (6) into an ultrafilter for ultrafiltration, and controlling dust particles with the particle size of more than 0.6 mu m in the ultrafiltered propylene glycol methyl ether within 6pcs/ml to prepare the semiconductor-grade propylene glycol methyl ether solution.
(8) Storage of semiconductor grade propylene glycol methyl ether solution: and (4) placing the semiconductor-grade propylene glycol methyl ether solution in the step (7) into a metal barrel for storage, wherein the metal barrels are in a mutually connected and grounded state and are placed in a cool, dry and ventilated place to avoid direct sunlight.
Example two
(1) Preparation of raw materials: adding an alkali metal hydroxide catalyst into a glass container, adding a proper amount of methanol, mixing, wherein the ratio of the catalyst to the methanol is 1:10, and mixing at normal temperature to prepare a basic reaction solution.
(2) Mixing the preparation materials: adding the basic reaction liquid obtained in the step (1) into a mixer, adding quantitative propylene oxide into the mixer, wherein the ratio of the propylene oxide to methanol is 1:3, uniformly mixing, preheating by a fixed tube plate type preheater, and then feeding into a reactor, wherein the preheating temperature is 60 ℃.
(3) Preparation of propylene glycol methyl ether: and (3) raising the temperature of the reactor in the step (2), wherein the reaction temperature is 100 ℃, so that the methanol and the propylene oxide in the reactor are subjected to series-parallel connection reaction under the action of the catalyst, and the reaction time is 1.5h, so as to prepare the propylene glycol methyl ether mixed solution.
(4) Recovery of lower alcohol: and (3) adding the propylene glycol methyl ether mixed solution in the step (3) into a methanol rectifying tower, removing redundant methanol in the propylene glycol methyl ether mixed solution through the separation action of the methanol rectifying tower to prepare a propylene glycol methyl ether stock solution, recycling the separated methanol, and reusing formaldehyde for preparing the basic reaction solution in the step (1).
(5) Purification of propylene glycol methyl ether: and (3) sequentially passing the propylene glycol methyl ether stock solution in the step (4) through a light component removal tower T-5102, a heavy component removal tower CY-700 and a dehydration tower DN2400 x 50000300, and purifying the propylene glycol methyl ether stock solution to prepare the high-purity propylene glycol methyl ether.
(6) Preparation of electronic grade propylene glycol methyl ether: and (3) adding the high-purity propylene glycol methyl ether obtained in the step (5) into a gel type strong acid type cation exchange resin bed, and removing metal ions in the propylene glycol methyl ether to prepare an electronic-grade propylene glycol methyl ether solution.
(7) Purification of electronic grade propylene glycol methyl ether: and (4) adding the electronic-grade propylene glycol methyl ether solution obtained in the step (6) into an ultrafilter for ultrafiltration, and controlling dust particles with the particle size of more than 0.6 mu m in the ultrafiltered propylene glycol methyl ether within 6pcs/ml to prepare the semiconductor-grade propylene glycol methyl ether solution.
(8) Storage of semiconductor grade propylene glycol methyl ether solution: and (4) placing the semiconductor-grade propylene glycol methyl ether solution in the step (7) into a metal barrel for storage, wherein the metal barrels are in a mutually connected and grounded state and are placed in a cool, dry and ventilated place to avoid direct sunlight.
EXAMPLE III
(1) Preparation of raw materials: adding an alkali metal hydroxide catalyst into a glass container, adding a proper amount of methanol, mixing, wherein the ratio of the catalyst to the methanol is 1:10, and mixing at normal temperature to prepare a basic reaction solution.
(2) Mixing the preparation materials: adding the basic reaction liquid obtained in the step (1) into a mixer, adding quantitative propylene oxide into the mixer, wherein the ratio of the propylene oxide to methanol is 1:3, uniformly mixing, preheating by a fixed tube plate type preheater, and then feeding into a reactor, wherein the preheating temperature is 55 ℃.
(3) Preparation of propylene glycol methyl ether: and (3) raising the temperature of the reactor in the step (2), wherein the reaction temperature is 120 ℃, so that the methanol and the propylene oxide in the reactor are subjected to series-parallel connection reaction under the action of the catalyst, and the reaction time is 2 hours, so as to prepare the propylene glycol methyl ether mixed solution.
(4) Recovery of lower alcohol: and (3) adding the propylene glycol methyl ether mixed solution in the step (3) into a methanol rectifying tower, removing redundant methanol in the propylene glycol methyl ether mixed solution through the separation action of the methanol rectifying tower to prepare a propylene glycol methyl ether stock solution, recycling the separated methanol, and reusing formaldehyde for preparing the basic reaction solution in the step (1).
(5) Purification of propylene glycol methyl ether: and (3) sequentially passing the propylene glycol methyl ether stock solution in the step (4) through a light component removal tower T-5102, a heavy component removal tower CY-700 and a dehydration tower DN2400 x 50000300, and purifying the propylene glycol methyl ether stock solution to prepare the high-purity propylene glycol methyl ether.
(6) Preparation of electronic grade propylene glycol methyl ether: and (3) adding the high-purity propylene glycol methyl ether obtained in the step (5) into a gel type strong acid type cation exchange resin bed, and removing metal ions in the propylene glycol methyl ether to prepare an electronic-grade propylene glycol methyl ether solution.
(7) Purification of electronic grade propylene glycol methyl ether: and (4) adding the electronic-grade propylene glycol methyl ether solution obtained in the step (6) into an ultrafilter for ultrafiltration, and controlling dust particles with the particle size of more than 0.6 mu m in the ultrafiltered propylene glycol methyl ether within 6pcs/ml to prepare the semiconductor-grade propylene glycol methyl ether solution.
(8) Storage of semiconductor grade propylene glycol methyl ether solution: and (4) placing the semiconductor-grade propylene glycol methyl ether solution in the step (7) into a metal barrel for storage, wherein the metal barrels are in a mutually connected and grounded state and are placed in a cool, dry and ventilated place to avoid direct sunlight.
Example four
(1) Preparation of raw materials: adding an alkoxide catalyst into a glass container, adding a proper amount of methanol for mixing, wherein the ratio of the catalyst to the methanol is 1:10, and mixing at normal temperature to prepare a basic reaction solution.
(2) Mixing the preparation materials: adding the basic reaction liquid obtained in the step (1) into a mixer, adding quantitative propylene oxide into the mixer, wherein the ratio of the propylene oxide to methanol is 1:3, uniformly mixing, preheating by a fixed tube plate type preheater, and then feeding into a reactor, wherein the preheating temperature is 57 ℃.
(3) Preparation of propylene glycol methyl ether: and (3) raising the temperature of the reactor in the step (2), wherein the reaction temperature is 70 ℃, so that the methanol and the propylene oxide in the reactor are subjected to series-parallel connection reaction under the action of the catalyst, and the reaction time is 1h, so as to prepare the propylene glycol methyl ether mixed solution.
(4) Recovery of lower alcohol: and (3) adding the propylene glycol methyl ether mixed solution in the step (3) into a methanol rectifying tower, removing redundant methanol in the propylene glycol methyl ether mixed solution through the separation action of the methanol rectifying tower to prepare a propylene glycol methyl ether stock solution, recycling the separated methanol, and reusing formaldehyde for preparing the basic reaction solution in the step (1).
(5) Purification of propylene glycol methyl ether: and (3) sequentially passing the propylene glycol methyl ether stock solution in the step (4) through a light component removal tower T-5102, a heavy component removal tower CY-700 and a dehydration tower DN2400 x 50000300, and purifying the propylene glycol methyl ether stock solution to prepare the high-purity propylene glycol methyl ether.
(6) Preparation of electronic grade propylene glycol methyl ether: and (3) adding the high-purity propylene glycol methyl ether obtained in the step (5) into a gel type strong acid type cation exchange resin bed, and removing metal ions in the propylene glycol methyl ether to prepare an electronic-grade propylene glycol methyl ether solution.
(7) Purification of electronic grade propylene glycol methyl ether: and (4) adding the electronic-grade propylene glycol methyl ether solution obtained in the step (6) into an ultrafilter for ultrafiltration, and controlling dust particles with the particle size of more than 0.6 mu m in the ultrafiltered propylene glycol methyl ether within 6pcs/ml to prepare the semiconductor-grade propylene glycol methyl ether solution.
(8) Storage of semiconductor grade propylene glycol methyl ether solution: and (4) placing the semiconductor-grade propylene glycol methyl ether solution in the step (7) into a metal-lined HDPE barrel for storage, wherein the metal barrels are in a mutually connected and grounded state and are placed in a cool, dry and ventilated place to avoid direct sunlight.
Those not described in detail in this specification are well within the skill of the art.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.
The purity of the product was checked according to the method of implementation and the results are shown in Table 1
TABLE 1
Item
Unit of
SEMI C12 Standard
Examples
Color intensity
APHA
10
1
Content of principal component
％
＞99.9
99.99
Water content
ppm
＜50
45
Evaporation of residue
ppm
＜1
0.3
Chloride (CL)
ppb
＜50
5
Nitrate (NO3)
ppb
＜50
15
Phosphate (PO4)
ppb
＜50
20
Sulfate (SO4)
ppb
＜50
20
Aluminum (Al)
ppb
＜0.1
0.031
Lithium (Li)
ppb
＜0.1
0.052
Sodium ((Na)
ppb
＜0.1
0.061
Magnesium (Mg)
ppb
＜0.1
0.055
Aluminum (Al)
ppb
＜0.1
0.035
Potassium (K)
ppb
＜0.1
0.042
Calcium (Ca)
ppb
＜0.1
0.080
Chromium (Cr)
ppb
＜0.1
0.054
Manganese (Mn)
ppb
＜0.1
0.030
Iron (Fe)
ppb
＜0.1
0.080
Nickel (Ni)
ppb
＜0.1
0.015
Cobalt (Co)
ppb
＜0.1
0.017
Copper (Cu)
ppb
＜0.1
0.018
Zinc (Zn)
ppb
＜0.1
0.037
Molybdenum (Mo)
ppb
＜0.1
0.026
Cadmium (Cd)
ppb
＜0.1
0.025
Lead ((Pb)
ppb
＜0.1
0.043
Silver (Ag)
ppb
＜0.1
0.021
Granules
＞0.2μm
50 pieces/ml
5
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