阅读说明：本技术 一种制备均匀薄膜的复合涂布装置及方法 (Composite coating device and method for preparing uniform film ) 是由 张成鹏 季金 梁允豪 杨少华 辛宜荣 窦建淇 邹斌 王继来 史振宇 赵国庆 于 2020-12-01 设计创作，主要内容包括：本公开提供一种制备均匀薄膜的复合涂布装置及方法,涉及涂布设备领域,包括相对设置的旋转台和刮平件,刮平件中部通过弹性件悬吊在机架上,刮平件远离旋转台的一侧的两端分别抵接有调节机构,用于改变刮平件与旋转台的间距,旋转台转动安装在机架上,并连接驱动机构,用于带动旋转台相对于刮刀转动,通过旋转台和刮平件的配置,使刮涂旋涂一体化,通过刮涂保证湿膜的大面积扩散,利用离心力原理,使样品表面形成一层均匀、稳定的大面积膜层,提高了成品质量。(The utility model provides a compound coating unit and method of preparation even film, relate to the coating equipment field, including the relative revolving stage that sets up and strickle the piece, strickle the piece middle part and suspend in midair in the frame through the elastic component, it has adjustment mechanism to strickle the both ends of keeping away from one side of revolving stage to have the butt respectively, a distance for changing strickle the piece and the revolving stage, the revolving stage rotates and installs in the frame, and connect actuating mechanism, a configuration for driving the revolving stage and rotate for the scraper, through revolving stage and strickle the piece, make the integration of knife coating spin coating, guarantee the large tracts of land diffusion of wet film through knife coating, utilize the centrifugal force principle, it is even to make the sample surface form the one deck, stable large tracts of.)

1. The utility model provides a compound coating unit of even film of preparation, its characterized in that, including the relative revolving stage that sets up with strickle the piece, strickle a middle part and suspend in midair in the frame through the elastic component, it has adjustment mechanism to strickle the both ends of keeping away from one side of revolving stage of piece respectively the butt for the interval of piece and revolving stage of strickleing is changed, the revolving stage rotates and installs in the frame, and connect actuating mechanism, be used for driving the revolving stage and rotate for the scraper.

2. A composite coating apparatus for forming a uniform film according to claim 1, wherein the frame is provided with a feeding mechanism, the feeding mechanism includes a feeding cylinder and a guide tube, one end of the guide tube is connected to the feeding cylinder, and the other end of the guide tube is directed toward the rotary table as an output end.

3. A composite coating apparatus for forming a uniform film according to claim 1, wherein the frame is provided with a working chamber, and the stage and the leveling member are disposed in the working chamber.

4. The composite coating apparatus for preparing a uniform film according to claim 1, wherein the rotary table has a table facing the leveling member, and the table has a temperature control mechanism on a side away from the leveling member and a leveling member on the other side for supporting the substrate.

5. The composite coating apparatus for preparing a uniform film according to claim 4, wherein the worktable is connected with an adsorption mechanism, the adsorption mechanism comprises a gas source and a suction pipe, one end of the suction pipe is communicated with the gas source, and the other end of the suction pipe is connected with the worktable for adsorbing the substrate.

6. A composite coating apparatus for forming a uniform film according to claim 1, wherein the adjusting mechanisms are mounted on the frame at intervals, the output end of one of the adjusting mechanisms abuts against one end of the leveling member, the output end of the other of the adjusting mechanisms abuts against the other end of the leveling member, and the adjusting mechanisms are capable of changing the distance between the output ends thereof and the frame by telescoping.

7. The composite coating apparatus for preparing a uniform film according to claim 1, wherein the elastic member comprises at least two tension springs, all of which are sequentially spaced along the axial direction of the leveling member and are arranged with their axes parallel.

8. A coating method using the composite coating apparatus for preparing a uniform thin film according to any one of claims 1 to 7, comprising the steps of:

feeding the substrate between the leveling member and the rotating table, and fixing the substrate on the rotating table;

adjusting the distance between the scraping piece and the rotating platform, and conveying the coating to the substrate;

the rotating table is started to rotate, and the coating is uniformly coated on the substrate by the centrifugal force and the action of the leveling piece.

9. A coating method according to claim 8, wherein after fixing the substrate, the position of the output end of the adjusting mechanism is changed after the adjusting mechanism is zeroed, thereby adjusting the distance between the leveling member and the rotary table.

10. A coating process according to claim 8, wherein the coating work area is temperature regulated prior to delivering the coating material to the substrate and maintained during coating application.

Technical Field

The disclosure relates to the field of coating equipment, in particular to a composite coating device and a method for preparing a uniform film.

Background

The statements in this section merely provide background information related to the present disclosure and may not necessarily constitute prior art.

Spin coating and blade coating are common coating applications. The spin coater is also called a spin coater, or a vacuum coater. The glue homogenizing machine is suitable for the processes of microelectronics, semiconductors, plate making, new energy, biomaterials, optics, surface coating and the like, is mainly applied to the film manufacture in a sol-gel experiment, has the working principle that a substrate is rotated at a high speed, glue solution dripped on the substrate is uniformly coated on the substrate by utilizing centrifugal force, has different thickness according to the viscosity coefficients between different glue solutions and the substrate, is also related to the rotating speed and time, and can be used for production, scientific research and teaching in units such as industrial and mining enterprises, scientific research, education and the like; blade coaters, also known as blade coaters, refer to machines that apply a coating to a substrate in one or more coats to form a solid continuous film.

The inventor finds that the spin coating method has the advantages of accurate and controllable film thickness, high cost performance, energy conservation, low pollution and the like, but due to the action of surface tension, the edge of the film prepared by the spin coating method is not uniform, and the coffee ring effect can occur. Meanwhile, due to the limitation of the spin coating method, a large-area uniform film is difficult to prepare; the blade coating method can accurately control the thickness of the wet film, can be used for preparing the film in a large area, but has poor film uniformity; it is difficult to meet the coating requirement of large-area uniform thin films.

Disclosure of Invention

The purpose of the disclosure is to provide a composite coating device and method for preparing a uniform film, which aims to overcome the defects in the prior art, and the composite coating device and method for preparing the uniform film integrate blade coating and spin coating through the configuration of a rotating table and a leveling piece, ensure the large-area diffusion of a wet film through blade coating, and form a uniform and stable large-area film layer on the surface of a sample by utilizing the centrifugal force principle, thereby improving the quality of a finished product.

The first purpose of this disclosure is to provide a composite coating device for preparing uniform film, adopt the following technical scheme:

including the revolving stage that sets up relatively with strickle the piece, strickle a middle part and suspend in midair in the frame through the elastic component, it has adjustment mechanism to strickle the both ends of one side of keeping away from the revolving stage of piece and have the butt respectively for the change is strickleed the interval of piece and revolving stage, and the revolving stage rotates and installs in the frame, and connect actuating mechanism for drive the revolving stage and rotate for the scraper.

Further, install feeding mechanism in the frame, feeding mechanism includes feed jar and pipe, and pipe one end intercommunication feed jar, the other end is as the output towards the revolving stage.

Furthermore, a working cavity is arranged on the machine frame, and the workbench and the leveling piece are both positioned in the working cavity.

Furthermore, the revolving stage is equipped with the workstation towards the piece of strickleing off, and one side that the piece was strickleed off is kept away from to the workstation is equipped with temperature control mechanism, and the opposite side is strickleed off towards for bear the weight of the basement.

Further, the workstation is connected with adsorption device, and adsorption device includes air supply and straw, and straw one end intercommunication air supply, the workstation is connected to the other end for adsorb the basement.

Furthermore, adjustment mechanism installs in the frame at the interval, and an adjustment mechanism's output butt is strickleed off a piece one end, and another adjustment mechanism's output butt is strickleed off a piece other end, and adjustment mechanism can change the interval of its output and frame through flexible.

Furthermore, the elastic part comprises at least two tension springs, and all the tension springs are sequentially arranged at intervals along the axial direction of the scraping part and are arranged in parallel along the axial line.

A second object of the present disclosure is to provide a coating method using the composite coating apparatus for preparing a uniform thin film as described above, comprising the steps of:

feeding the substrate between the leveling member and the rotating table, and fixing the substrate on the rotating table;

adjusting the distance between the scraping piece and the rotating platform, and conveying the coating to the substrate;

the rotating table is started to rotate, and the coating is uniformly coated on the substrate by the centrifugal force and the action of the leveling piece.

Further, after the base is fixed and the adjusting mechanism is zeroed, the position of the output end of the adjusting mechanism is changed, and therefore the distance between the strickle and the rotating table is adjusted.

Further, the coating work area is temperature regulated before delivering the coating material to the substrate, and the temperature is maintained during coating material application.

Compared with the prior art, the utility model has the advantages and positive effects that:

(1) the scraping and spin-coating are integrated by the configuration of the rotating table and the scraping piece, the large-area diffusion of a wet film is ensured by the scraping, and a uniform and stable large-area film layer is formed on the surface of a sample by utilizing the centrifugal force principle, so that the quality of a finished product is improved;

(2) the position of the scraping piece is adjusted by combining the adjusting mechanism abutting against the scraping piece with the elastic piece, the output end of the scraping piece can be accurately adjusted by the adjusting mechanism, so that the aim of accurately adjusting the position of the scraping piece is fulfilled, the scraping piece can be tightly abutted against the scraping piece to be stable by matching with the elastic piece suspending the scraping piece, and the position adjusting accuracy of the scraping piece is improved;

(3) a temperature control mechanism is configured to control the temperature in the coating working space, so that the coating is in a proper temperature, the coating is in an optimal coating state, and the coating uniformity is further ensured;

(4) the feeding mechanism above the rotary table can stably feed materials to the workbench, so that the coatings can be stably released, the adsorption mechanism below the rotary table can ensure that the substrate is tightly attached to the workbench, the stability of the substrate in the coating process is improved, the position change caused by the rotating centrifugal force of the workbench and the thrust applied by the leveling piece is avoided, and the problem of affecting the coating precision is avoided.

Drawings

The accompanying drawings, which are included to provide a further understanding of the disclosure, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure and are not to limit the disclosure.

Fig. 1 is a schematic view of the overall structure of a coating apparatus in embodiments 1 and 2 of the present disclosure;

FIG. 2 is a schematic top view of a coating apparatus according to embodiments 1 and 2 of the present disclosure;

FIG. 3 is a schematic structural diagram of an adjusting mechanism matched with a strickle in embodiments 1 and 2 of the disclosure;

in the figure, 100-supply cylinder; 200-a tool holder; 210-a micrometer screw; 220-a spring; 300-a scraper; 400-rotating table; 500-temperature control device; 600-a motor; 700-working chamber.

Detailed Description

It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present disclosure. As used herein, the singular forms "a", "an", and/or "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof;

for convenience of description, the words "up", "down", "left" and "right" in this disclosure, if any, merely indicate that the directions of movement are consistent with those of the figures themselves, and are not limiting in structure, but merely facilitate the description of the invention and simplify the description, rather than indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present disclosure.

As introduced in the background art, the spin coating and blade coating methods in the prior art have disadvantages when coating a coating on a substrate, and are difficult to meet the requirements; in order to solve the problems, the present disclosure provides a composite coating apparatus and a method for preparing a uniform thin film.

Example 1

In an exemplary embodiment of the present disclosure, as shown in fig. 1 to 3, a composite coating apparatus for preparing a uniform thin film is provided.

The device mainly comprises a rotating table, a strickling piece, an adjusting mechanism and a frame, wherein the rotating table and the strickling piece are oppositely arranged and are respectively used as a driving mechanism of a spin coating method and an acting element of a blade coating method;

the middle part of the scraping piece is suspended on the frame through the elastic piece, and the two ends of one side of the scraping piece, which is far away from the rotating table, are respectively abutted with an adjusting mechanism for changing the distance between the scraping piece and the rotating table, and the rotating table is rotatably installed on the frame and connected with a driving mechanism for driving the rotating table to rotate relative to the scraper.

For the frame, as an integral supporting element, the top part of the frame is matched with an adjusting mechanism through an elastic part to adjust the distance between the scraping part and the rotating table;

to adjustment mechanism, two adjustment mechanism interval installations are in the frame, and an adjustment mechanism's output butt is strickleed off a piece one end, and another adjustment mechanism's output butt is strickled off a piece other end, and adjustment mechanism can change the interval of its output and frame through flexible.

Specifically, in the implementation, the adjusting mechanism is a micrometer caliper, the elastic part adopts a tension spring to realize height adjustment of the leveling part, and zero setting can be manually carried out to determine the height of the required coating;

the principle of helical magnification is used to measure and adjust the distance to a substrate placed on a rotating table.

Utilize the butt to strike off the adjustment mechanism of piece and combine the elastic component, adjust the position of striking off the piece, adjustment mechanism can be accurate adjusts its output to reach the purpose of accurate adjustment striking off the piece position, the cooperation suspends the elastic component of striking off the piece in midair, can make the inseparable butt of piece of striking off realize firm on striking off the piece, improve the accurate nature of striking off a position control.

The scraping piece can adopt a replaceable scraper or a replaceable wire rod, the scraper or the replaceable wire rod has a replaceable function, the scraper or the replaceable wire rod can be freely exchanged according to requirements, so that the specification of the scraper or the replaceable wire rod is changed, the action area of the scraping piece is adjusted through adjusting the specification, and the coating action area is increased or reduced.

The feeding mechanism is arranged on the rack and comprises a feeding cylinder and a conduit, one end of the conduit is communicated with the feeding cylinder, and the other end of the conduit is used as an output end and faces the rotating table;

the pipe adopts the hose, and its output is connected on the piece of strickleing, but does not influence the effect of strickleing of the piece of strickleing, and the piece of strickleing only is as the supplementary fixed knot structure of pipe output.

For the rotating platform, the rotating platform is provided with a working platform facing the leveling part, one side of the working platform, which is far away from the leveling part, is provided with a temperature control mechanism, and the other side of the working platform, which faces the leveling part, is used for bearing a substrate;

the workbench is connected with an adsorption mechanism, the adsorption mechanism comprises an air source and a suction pipe, one end of the suction pipe is communicated with the air source, and the other end of the suction pipe is connected with the workbench and used for adsorbing a substrate;

in this embodiment, the air supply be vacuum adsorption device, can choose for use the vacuum pump, the trachea can be chosen for use to the straw, vacuum pump is connected to trachea one end, the other end forms the negative pressure and is used for adsorbing fixed base.

The actuating mechanism of revolving stage chooses the motor for use, and the output shaft is vertical to be placed, butt joint revolving stage center to with the coaxial setting of revolving stage, make revolving stage top end face as the working face, can rotate around the axis, and drive the basement and rotate and realize the spin coating.

In order to facilitate the isolation of the working position and the outside, a working chamber is arranged on the machine frame and is formed by splicing transparent plates, the working table and the scraping piece are both positioned in the working chamber, and the working chamber can shield and recycle the splashed coating.

Furthermore, in order to facilitate the recovery of the coating, the coating recovery structure is also arranged and distributed in the circumferential direction of the rotating table, so that the redundant coating is convenient to recover and the machine is prevented from being polluted;

in this embodiment, the coating recovery structure can select the structure of negative pressure source cooperation accumulator for use, temporarily store the recovery after absorbing unnecessary coating.

The temperature control mechanism comprises a heating device and a temperature sensor, and can realize blade coating and spin coating at any temperature within a limited range;

the heating device can be an electric heating wire or other electric heating elements, and the temperature can be changed and controllably adjusted.

The temperature control mechanism is configured to control the temperature in the coating working space, so that the coating is in a proper temperature, the coating is in an optimal coating state, and the coating uniformity is further ensured.

Through the configuration of revolving stage and strickle the piece, make the knife coating spin-coat integration, guarantee the large tracts of land diffusion of wet film through the knife coating, utilize the centrifugal force principle, make sample surface form the even, stable large tracts of land rete of one deck, improved finished product quality.

In order to conveniently control the working process of the composite coating device, the composite coating device is also provided with a control console, and a control element inside the control console is connected with a motor of the driving mechanism, a micrometer screw of the adjusting mechanism and a temperature control mechanism to adjust the control mechanism, so that the working temperature, the rotating speed and the blade coating thickness of the composite coating device are adjusted.

Example 2

In another exemplary embodiment of the present disclosure, as shown in fig. 1 to 3, a coating method using the composite coating apparatus for preparing a uniform thin film as described in example 1 is proposed.

In this embodiment, the composite coating apparatus includes a feeding cylinder 100, a tool post 200, a doctor blade 300, a rotary table 400, a temperature control device 500, a motor 600, and a working chamber 700.

In the tool holder 200, the spring 220 tensions the blade or bar 300 to make it closely contact with the micrometer screw 210, and the height of the blade 300 can be adjusted by adjusting the micrometer screw 210.

The method comprises the following steps:

in the first step, the substrate material is fed through an openable aperture into a doctor blade spin coater and placed on a turntable 400.

And secondly, turning on a vacuum pump to adsorb and fix the substrate material.

Third, the height of the spring 220 is adjusted to bring the blade 300 into contact with the substrate material, and the micrometer caliper 210 is manually zeroed to adjust the blade height to the proper position.

And fourthly, opening the temperature control device through the console, and adjusting the temperature in the device to a proper temperature.

In the fifth step, the material supply cylinder 100 is opened, and an appropriate amount of coating material is added to the substrate.

In the sixth step, the motor 600 is turned on to rotate the rotating table 400 at a constant speed for a predetermined time.

And step seven, turning off the motor, turning off the vacuum adsorption device, turning off the temperature control device, and taking out the finished product.

During the coating, a blade was applied to a thickness of 50 μm at room temperature and a rotation speed of 500 rpm.

Example 3

In another exemplary embodiment of the present disclosure, a coating method is provided, which is different from example 2 in that: micrometer screw 210 was adjusted and the height of the drawdown was 30 μm.

Example 4

In another exemplary embodiment of the present disclosure, a coating method is provided, which is different from example 2 in that: the scraper of the scraping piece is replaced by a wire rod.

Example 5

In another exemplary embodiment of the present disclosure, a coating method is provided, which is different from example 2 in that: the operating temperature was controlled to 50 ℃ by adjusting the temperature control device 500.

Example 6

In another exemplary embodiment of the present disclosure, a coating method is provided, which is different from example 2 in that: the rotation speed of the turntable 400 was controlled to 1500 rpm.

The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure, and various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.