阅读说明：本技术 多压电陶瓷反对称式微位移放大机构 (Multiple piezoelectric ceramic antisymmetric micro-displacement amplifying mechanism ) 是由 张腾 张士军 孟繁勋 于 2020-12-01 设计创作，主要内容包括：本发明公开了一种多压电陶瓷反对称式微位移放大机构,包括基座、非对称放大单元、运动平台,非对称放大单元用于微位移放大。第一级非对称放大机构在输入端分为左、右输入端,第一级非对称放大单元分别通过柔性铰链与第二级非对称放大机构串接,第二级放大机构上通过柔性铰链与输出端连接,两个相接处的基座反对称固定连接。本发明还公开了一种多压电陶瓷反对称式微位移放大机构微位移的放大方法。本发明能够实现多种放大倍数、误差小、精度高且结构紧凑的特点,同时有效地避免了传统轴对称方式中占用空间过大,单一机构放大倍数固定的缺陷。(The invention discloses a multi-piezoelectric ceramic antisymmetric micro-displacement amplification mechanism which comprises a base, an asymmetric amplification unit and a motion platform, wherein the asymmetric amplification unit is used for micro-displacement amplification. The first-stage asymmetric amplification mechanism is divided into a left input end and a right input end at the input end, the first-stage asymmetric amplification unit is connected with the second-stage asymmetric amplification mechanism in series through a flexible hinge, the second-stage asymmetric amplification mechanism is connected with the output end through the flexible hinge, and the two bases at the joint are fixedly connected in an anti-symmetric manner. The invention also discloses a method for amplifying the micro displacement of the multi-piezoelectric ceramic antisymmetric micro displacement amplification mechanism. The invention can realize the characteristics of multiple amplification factors, small error, high precision and compact structure, and effectively avoids the defects of overlarge occupied space and fixed amplification factor of a single mechanism in the traditional axial symmetry mode.)

1. A multi-piezoelectric ceramic antisymmetric micro-displacement amplification mechanism is characterized by comprising two groups of asymmetric amplification units, wherein the asymmetric amplification units are used for amplifying micro-displacement, each group of asymmetric amplification units respectively comprises two stages of amplification mechanisms, the first stage of amplification mechanism is divided into a left input end and a right input end at the input end, each input end corresponds to the left amplification mechanism and the right amplification mechanism, and the left amplification mechanism and the right amplification mechanism are respectively connected with a left end and a right end, the right amplification mechanism is respectively connected with the second-stage amplification mechanism in series through a flexible hinge, the input end is fixedly connected with the asymmetric amplification unit through the flexible hinge, the ejector rod and the push rod, the output end is fixedly connected with the asymmetric amplification unit through the flexible hinge, the input end inputs micro-displacement to the asymmetric amplification unit through piezoelectric ceramics, the output end motion platform is used for outputting the amplified displacement, the piezoelectric ceramics are fixed by a pre-tightening device, the two bases at the joint are in anti-symmetric fixed connection, and the motion platform is fixedly connected with the two output ends through the flexible hinge.

2. The multi-piezoceramic antisymmetric micro-displacement amplification mechanism of claim 1, wherein the asymmetric amplification unit comprises: the flexible hinge of base, left side input pole, right side input pole, the flexible hinge of left side input, the flexible hinge of right side input, the flexible hinge of left side stiff end, the flexible hinge of right side input pole upside, left side push rod, right side push rod, left side ejector pin, right side ejector pin, the flexible hinge of transition, the follower, the flexible hinge of follower input, the flexible hinge of follower stiff end, the flexible hinge of follower output end, motion platform, workstation.

3. The multi-piezoelectric ceramic antisymmetric micro-displacement amplification mechanism of claim 1, wherein the base is "U" -shaped, with a high left side and a low right side, the left input rod is fixedly connected to the upper left side of the "U" -shaped base by a left fixed end flexible hinge, the left fixed end flexible hinge is fixedly connected to the left input rod at a position close to the lower side of the left end portion, the left input end flexible hinge is arranged inside the left fixed end flexible hinge, the right input rod is fixedly connected to the upper right side of the "U" -shaped base by a right fixed end flexible hinge, the right input end flexible hinge is fixedly connected to the right input rod at a position close to the lower side of the left end portion, the right fixed end flexible hinge is arranged inside the right input end flexible hinge, the left input rod and the right input rod are arranged transversely, the left input rod is arranged on the upper side of the, the upper part of the left ejector rod is fixedly connected with the lower part of the left ejector rod, and the upper part of the right ejector rod is fixedly connected with the lower part of the flexible hinge at the right input end.

4. The multi-piezoelectric ceramic antisymmetric micro-displacement amplification mechanism of claim 1, wherein the output rod is located above the left input rod, the output rod input end flexible hinge is fixedly connected to the output rod at a position below the right end portion, the output rod fixed end flexible hinge is fixedly connected to the output rod at a position above the left output rod and inside the output rod input end flexible hinge, the output rod output end flexible hinge is fixedly connected to the output rod at a position above the left end portion, the input end flexible hinge is fixedly connected to the right push rod below, the right push rod is fixedly connected to the right input rod upper side flexible hinge, and the right input rod upper side flexible hinge is fixedly connected to the amplification input rod at a position above the right end portion.

5. The piezoceramic antisymmetric micro-displacement amplification mechanism of claim 1, wherein the input end has a left-side amplification mechanism and a right-side amplification mechanism.

6. The multi-piezoceramic antisymmetric micro-displacement amplification mechanism of claim 1, wherein different micro-displacement amplification ratios are obtained by adjusting the position of the flexible hinge at the input end or the output end.

7. The multi-piezoceramic antisymmetric micro-displacement amplification mechanism of claim 1, wherein when the left-hand piezoceramic is moved alone, a 16-fold amplification ratio is obtained; when the right piezoelectric ceramic moves independently, 6 times of magnification ratio can be obtained; when the left-side piezoelectric ceramic and the right-side piezoelectric ceramic move simultaneously, a 64-fold magnification ratio can be obtained.

8. The multi-piezoceramic antisymmetric micro-displacement amplification mechanism of claim 1, wherein the two sets of asymmetric amplification units are fixedly connected antisymmetrically at the "L" -shaped mounting groove of the base.

9. The multi-piezoceramic antisymmetric micro-displacement amplification mechanism of claim 1, wherein the method of amplifying the micro-displacement of the multi-piezoceramic antisymmetric micro-displacement amplification mechanism comprises: the two piezoelectric ceramics are respectively installed in a left groove and a right groove in the middle of a first U-shaped base, two piezoelectric ceramic output ends are respectively fixedly connected to a left push rod and a right push rod, the other ends of the piezoelectric ceramics are pre-tightened and fixed in the left groove and the right groove in the middle of the first U-shaped base through a third bolt and a fourth bolt, the input displacement of the left piezoelectric ceramics is transmitted to a left ejector rod, the left ejector rod transmits the displacement to a transition flexible hinge, the transition flexible hinge transmits the displacement to the left push rod, the left push rod transmits the displacement to a left input end flexible hinge, the left input end flexible hinge transmits the displacement to a left input rod, the input displacement of the right piezoelectric ceramics is transmitted to a right ejector rod, the right ejector rod transmits the displacement to a right input end flexible hinge, and the right input end flexible hinge transmits the displacement to a right; when left side piezoceramics worked alone: the left input rod deflects, the right end moves upwards, the left input rod transmits the displacement to the flexible hinge at the fixed end of the output rod, the output rod deflects, the left end moves upwards, the flexible hinge at the output end of the output rod transmits the upward displacement to the motion platform, and the motion platform moves upwards; when the right side piezoelectric ceramic works: the right input rod deflects, the right end moves downwards, the right input rod transmits displacement to the output rod input end flexible hinge, the output rod deflects, the left end moves upwards, the output rod output end flexible hinge transmits upward displacement to the motion platform, and the motion platform moves upwards; when left side piezoceramics and right side piezoceramics simultaneous working: the left side input rod takes place to deflect, right-hand member portion rebound, the right side input rod takes place to deflect, right-hand member portion rebound, the left side input rod transmits the displacement for the flexible hinge of output lever stiff end, the right side input rod transmits the displacement for the flexible hinge of output lever input, the output lever takes place to deflect, left end rebound, the flexible hinge of output lever output transmits ascending displacement for motion platform, motion platform rebound.

Technical Field

The invention relates to a micro-displacement amplifying device, in particular to a multi-piezoelectric ceramic antisymmetric micro-displacement amplifying device.

Background material

In recent years, with the development of microelectronic technology, piezoelectric ceramics have been widely used in micro-displacement driving and precision instrument positioning systems due to their advantages of high resolution, fast response speed and large output force. However, the output displacement of the piezoelectric ceramic is limited, ranging from several micrometers to tens of micrometers, and cannot meet the application requirements. In order to enable the piezoelectric ceramic to have larger motion driving stroke. Amplification mechanisms requiring displacement design the existing micro-displacement amplification mechanisms are mostly designed in an axisymmetric manner. However, the design of the structure only has a half of effective amplification structure, and the larger amplification ratio is realized, so that the size of the mechanism can be only enlarged, and the characteristics of small size and large displacement cannot be considered at the same time.

The flexible hinge has the characteristics of no friction, no clearance and high motion precision, and is a reversible elastic structure. The method is widely applied to the field of micro-displacement.

The invention content is as follows:

the invention aims to provide a two-stage micro-displacement amplification mechanism and an amplification method thereof, which have the advantages of large displacement, high precision, small occupied space and change of displacement amplification times.

The technical scheme is as follows:

a multi-piezoelectric ceramic antisymmetric micro-displacement amplifying mechanism comprises two groups of asymmetric amplifying units, wherein the asymmetric amplifying units are used for amplifying micro-displacement, each group of asymmetric amplifying units respectively comprises two stages of amplifying mechanisms, the input end of the first stage of amplifying mechanism is divided into a left input end and a right input end, each input end corresponds to the left amplifying mechanism and the right amplifying mechanism, and the left end of the first stage of amplifying mechanism is connected with the left end of the left amplifying mechanism, the right amplification mechanism is respectively connected with the second-stage amplification mechanism in series through a flexible hinge, the input end is fixedly connected with the asymmetric amplification unit through the flexible hinge, the ejector rod and the push rod, the output end is fixedly connected with the asymmetric amplification unit through the flexible hinge, the input end inputs micro-displacement to the asymmetric amplification unit through piezoelectric ceramics, the output end motion platform is used for outputting the amplified displacement, the piezoelectric ceramics are fixed by a pre-tightening device, the two bases at the joint are in anti-symmetric fixed connection, and the motion platform is fixedly connected with the two output ends through the flexible hinge.

Further, the asymmetric amplification unit includes: the flexible hinge of base, left side input pole, right side input pole, the flexible hinge of left side input, the flexible hinge of right side input, the flexible hinge of left side stiff end, the flexible hinge of right side input pole upside, left side push rod, right side push rod, left side ejector pin, right side ejector pin, the flexible hinge of transition, the follower, the flexible hinge of follower input, the flexible hinge of follower stiff end, the flexible hinge of follower output end, motion platform, workstation.

Further, the base is U-shaped, the left side is high and the right side is low, the left side input rod is fixedly connected above the left side of the U-shaped of the base through a left side fixed end flexible hinge, the left side fixed end flexible hinge is fixedly connected at the position of the left side input rod close to the lower part of the left side end part, the left side input end flexible hinge is fixedly connected at the inner side of the left side fixed end flexible hinge, the right side input rod is fixedly connected above the right side of the U-shaped of the base through a right side fixed end flexible hinge, the right side input end flexible hinge is fixedly connected at the lower part of the right side input rod close to the left side end part, the right side fixed end flexible hinge is arranged at the inner side of the right side input end flexible hinge, the left side input rod and the right side input rod are transversely arranged, the upper part of the right ejector rod is connected with the lower part of the flexible hinge at the right input end.

Further, the output lever is on left side input rod upside, output lever input end flexible hinge fixed connection is in the output lever near the position of right side tip below, output lever stiff end flexible hinge fixed connection is in the position that is close to left side tip left side output lever top and is located the inboard of output lever input end flexible hinge, output lever output end flexible hinge fixed connection is in the position that is close to left side tip output lever top, input end flexible hinge below fixed connection right side push rod, right side push rod and the flexible hinge fixed connection of right side input lever upside, the flexible hinge fixed connection of right side input lever upside is in the position that is close to right side tip amplification input lever top.

Furthermore, the input end is provided with a left amplification mechanism and a right amplification mechanism.

Furthermore, the output end of the piezoelectric ceramic is respectively connected with the left ejector rod and the right ejector rod.

Furthermore, the output end is provided with an output platform.

Further, different micro-displacement amplification ratios can be obtained by adjusting the position of the flexible hinge at the input end or the output end.

Further, when the left piezoelectric ceramics alone moves, a magnification ratio of 16 times can be obtained; when the right piezoelectric ceramic moves independently, 6 times of magnification ratio can be obtained; when the left-side piezoelectric ceramic and the right-side piezoelectric ceramic move simultaneously, a 64-fold magnification ratio can be obtained.

Further, the two groups of asymmetric amplifying units are fixedly connected in an anti-symmetric mode at the position of the L-shaped groove of the base.

Further, the piezoelectric ceramics need to be fixed by a fine thread bolt pre-tightening device.

The method for amplifying the micro displacement of the multi-piezoelectric ceramic antisymmetric micro displacement amplification mechanism comprises the following steps:

inside left side and right side inslot in the middle of base "U" type are installed respectively to two piezoceramics, two piezoceramics output difference zonulae occludens left side and right side push rod, two bolts pass through thin tooth screw hole and fix the piezoceramics other end pretension in left side and right side inslot in the middle of base "U" type, left side piezoceramics's input displacement transmits to the left side ejector pin, the flexible hinge of transition is passed to the displacement to the left side push rod with the displacement to the left side ejector pin of transition, the flexible hinge of left side input is transmitted the displacement to the flexible hinge of left side input with the displacement to the left side push rod of left side, the flexible hinge of left side input transmits the displacement to the right side ejector pin, the flexible hinge of right side input transmits the displacement to the flexible hinge of right side input.

When left side piezoceramics worked alone: the left input rod deflects, the right end moves upwards, the left input rod transmits the displacement to the flexible hinge at the fixed end of the output rod, the output rod deflects, the left end moves upwards, and the flexible hinge at the output end of the output rod transmits the upward displacement to the platform; when the right side piezoelectric ceramic works: the right input rod deflects, the right end moves downwards, the right input rod transmits the displacement to the output rod input end flexible hinge, the output rod deflects, the left end moves upwards, and the output rod output end flexible hinge transmits the upwards displacement to the platform; when left side piezoceramics and right side piezoceramics simultaneous working: the left input rod deflects, the right end moves upwards, the right input rod deflects, the right end moves downwards, the left input rod transmits displacement to the output rod fixed end flexible hinge, the right input rod transmits displacement to the output rod input end flexible hinge, the output rod deflects, the left end moves upwards, and the output rod output end flexible hinge transmits upwards displacement to the platform; the motion platform moves upward.

The invention has the technical effects that:

the invention adopts the way that two groups of asymmetric amplifying units are fixed and arranged in an antisymmetric way, a platform is arranged above two displacement output ends, and the transverse displacement is eliminated in a counteracting way.

The invention adopts an asymmetric amplification unit which comprises two stages of amplification mechanisms which are horizontally arranged up and down, thereby realizing larger amplification ratio and greatly reducing the volume of the mechanism.

The invention adopts four piezoelectric ceramics to drive, two piezoelectric ceramics are a group, and different amplification factors can be realized in the same micro-displacement mechanism.

The invention adopts four piezoelectric ceramic driving and two-stage amplifying mechanisms, wherein the left-side and right-side first-stage amplifying mechanisms have 4 times of amplifying ratios, and the second-stage amplifying mechanisms respectively have 1.5 times of amplifying ratios and 4 times of amplifying ratios; when the left piezoelectric ceramics of the two groups of asymmetric amplifying units move independently, only the left amplifying mechanism and the two-stage 4-time amplifying mechanism work, and 16-time amplifying ratio can be obtained; when the piezoelectric ceramics on the right sides of the two groups of asymmetric amplification units move independently, only the right-side amplification mechanism and the two-stage 1.5-time amplification mechanism work, and 6-time amplification ratio can be obtained; when the left piezoelectric ceramics and the right piezoelectric ceramics of the two groups of asymmetric amplifying units move simultaneously, the left amplifying mechanism and the right amplifying mechanism work, and the two-stage 4-time amplifying mechanism works, so that 64-time amplifying ratio can be obtained.

The pre-tightening nut of the pre-tightening device adopts the fine thread, the anti-loosening and anti-vibration effect is good due to the adoption of the fine thread, the pre-tightening force can be finely adjusted, and the movement error and the damage of the piezoelectric ceramic caused by the clearance in the installation process of the piezoelectric ceramic are avoided.

The invention adopts a flexible hinge mode for connection, the clearance and the friction force between the rod pieces are smaller, the error can be reduced, and the precision can be improved.

Drawings

FIG. 1 is a schematic structural diagram of a part of an asymmetric amplifying unit according to the present invention;

FIG. 2 is a schematic structural diagram of a second asymmetric amplifying unit according to the present invention;

FIG. 3 is a schematic perspective view of the overall mechanism of the present invention;

FIG. 4 is a front view of the overall mechanism of the present invention;

FIG. 5 is a partial schematic view of a base according to the present invention;

in the figure, 1, an asymmetric amplifying unit part I, 101, a base I, 1011, a base 'L' shaped groove, 102, a left piezoelectric ceramic, 103, a left ejector rod, 104, a transition flexible hinge, 105, a left push rod, 106, a left input end flexible hinge, 107, a left fixed end flexible hinge, 108, a left input rod, 109, an output rod, 110, an output rod output end flexible hinge, 111, an output rod fixed end flexible hinge, 112, an output rod input end flexible hinge, 113, a right push rod, 114, a right input rod upper side flexible hinge, 115, a right input rod, 116, a right input rod flexible hinge, 117, a right input end flexible hinge, 118, a right ejector rod, 119, a right piezoelectric ceramic, 120, a bolt III, 121 and a bolt IV; 2. the asymmetric amplifying unit comprises a second asymmetric amplifying unit part 201, a second base 202, a left piezoelectric ceramic 203, a left ejector rod 204, a transition flexible hinge 205, a left push rod 206, a left input end flexible hinge 207, a left fixed end flexible hinge 208, a left input rod 209, an output rod 210, an output rod output end flexible hinge 211, an output rod fixed end flexible hinge 212, an output rod input end flexible hinge 213, a right push rod 214, a right input rod upper side flexible hinge 215, a right input rod 216, a right input rod flexible hinge 217, a right input end flexible hinge 218, a right ejector rod 219, a right piezoelectric ceramic 220, a third bolt 221 and a fourth bolt; 3. motion platform, 4, workstation.

Detailed Description

Specific embodiments of the present invention are described below in conjunction with the appended drawings to enable those skilled in the art to practice and reproduce the present invention.

The invention relates to a two-stage micro-displacement amplification mechanism which comprises an asymmetric amplification unit part I1 and an asymmetric amplification unit part II 2, wherein the asymmetric amplification unit part I1 and the asymmetric amplification unit part II 2 are fixedly arranged on a workbench 4 in an anti-symmetric manner at a position of an L-shaped groove 1011 of a base.

The asymmetric amplification unit part 1 is a two-stage micro-displacement amplification mechanism, and the first-stage micro-displacement amplification mechanism comprises: base I101, left push rod 103, transition flexible hinge 104, left push rod 105, left input flexible hinge 106, left fixed end flexible hinge 107, left input rod 108, right input rod 115, right fixed end flexible hinge 116, right input flexible hinge 117, and right push rod 118.

The left input rod 108 is fixedly connected to the upper left side of the U-shaped base I101 through a left fixed end flexible hinge 107, the left fixed end flexible hinge 107 is fixedly connected with the position, close to the lower part of the left end part, of the left input rod 108, and the left input end flexible hinge 106 is fixedly connected to the lower part of the left input rod 108 and is located on the inner side of the left fixed end flexible hinge 107; the right input rod 115 is fixedly connected to the upper part of the U-shaped right side of the base 101 through a right fixed end flexible hinge 116, the right input end flexible hinge 117 is fixedly connected to the lower position of the right input rod 115 close to the left end, and the right fixed end flexible hinge 116 is arranged on the inner side of the right input end flexible hinge 117; the left input lever 108 and the right input lever 115 are arranged laterally. The left input rod 108 is arranged on the upper side of the right input rod 115, the left push rod 105 is fixedly connected below the left input end flexible hinge 106, and the upper side of the left push rod 103 is fixedly connected below the left push rod 105 through the transition flexible hinge 104.

By utilizing the lever principle, the left side push rod 103 plays a role in input displacement of the left side output rod 108 through the transition flexible hinge 104, the left side push rod 105 and the left side input end flexible hinge 106, the left side fixed end flexible hinge 107 plays a role in fixed support, the right side push rod 118 plays a role in input displacement of the right side output rod 115 through the right side input end flexible hinge 117, and the right side fixed end flexible hinge 116 plays a role in fixed support.

The asymmetric amplification unit part 1 is a two-stage micro-displacement amplification mechanism, and the second-stage micro-displacement amplification mechanism comprises: an output rod 109, an output rod output end flexible hinge 110, an output rod fixed end flexible hinge 111, an output rod input end flexible hinge 112, a right push rod 113 and a right input rod upper side flexible hinge 114.

The output rod 109 is on the upper side of the left input rod 108. An output rod input end flexible hinge 112 is fixedly connected to the position, close to the lower part of the right side end part, of the output rod 109, and an output rod fixed end flexible hinge 111 is fixedly connected to the inner side of the output rod input end flexible hinge 112; the output rod output end flexible hinge 110 is fixedly connected to a position close to the upper part of the output rod 109 at the left end part, the right push rod 113 is fixedly connected to the lower part of the output rod input end flexible hinge 112, and the right push rod 113 is fixedly connected with the upper side flexible hinge 114 of the right input rod; a right input rod upper flexible hinge 114 is fixedly attached proximate the right end above the right input rod 115 and an output rod fixed end flexible hinge 111 is fixedly attached proximate the left end above the left output rod 108.

By utilizing the lever principle, the right input rod 115 plays a role in input displacement of the output rod 109 through the right input rod upper flexible hinge 114, the right push rod 113 and the output rod input end flexible hinge 112, the output rod fixed end flexible hinge 111 plays a role in fixing and supporting, and the output rod fixed end flexible hinge 111 plays a role in fixing and moving through the left output rod 108.

The output rod output end flexible hinge 110 of the asymmetric amplification unit part I1 is fixedly connected to the platform 3, the output rod output end flexible hinge 210 of the asymmetric amplification unit part II 2 is fixedly connected to the platform 3, and the common platform 3 is arranged above the displacement output ends of the asymmetric amplification unit part I1 and the asymmetric amplification unit part II 2, so that the transverse displacement caused by the output rod 109 and the output rod 209 can be eliminated.

FIG. 3 is a schematic perspective view of the overall mechanism of the present invention; FIG. 4 is a schematic structural view of the entire mechanism of the present invention; fig. 5 is a schematic partial structure diagram of a first base 101 according to the present invention.

The invention relates to a two-stage micro-displacement amplification mechanism which comprises an asymmetric amplification unit part I1 and an asymmetric amplification unit part II 2, wherein the asymmetric amplification unit part I1 and the asymmetric amplification unit part II 2 are fixedly arranged on a workbench 4 in an anti-symmetric manner at a position of an L-shaped groove 1011 of a base.

The amplification method of the two-stage micro-displacement amplification mechanism comprises the following specific steps:

the method comprises the following steps: piezoelectric ceramics 102 and 119 are respectively installed in left and right grooves in the middle of the U-shaped base I101, the output ends of the piezoelectric ceramics 102 and 119 are respectively and fixedly connected to a left push rod 103 and a right push rod 118, and the other ends of the piezoelectric ceramics are pre-tightened and fixed in the left and right grooves in the middle of the U-shaped base I101 through fine thread holes by bolts 120 and 121; meanwhile, the piezoelectric ceramics 202 and the piezoelectric ceramics 219 are respectively arranged in the left side groove and the right side groove in the middle of the U-shaped base II 201, the output ends of the piezoelectric ceramics 202 and the piezoelectric ceramics 219 are respectively and tightly connected with the left side push rod 203 and the right side push rod 218, and the other ends of the piezoelectric ceramics are pre-tightened and fixed in the left side groove and the right side groove in the middle of the U-shaped base I201 through the fine thread holes by the bolts 220 and the bolts 221; the left top rod 103, the right top rod 118, the left top rod 203 and the right top rod 218 are respectively and tightly connected with the output ends of the piezoelectric ceramics 102, the piezoelectric ceramics 119, the piezoelectric ceramics 202 and the piezoelectric ceramics 219.

Step two: the left ejector rod 103 transmits displacement to the transition flexible hinge 104, the transition flexible hinge 104 transmits displacement to the left push rod 105, the left push rod 105 transmits displacement to the left input end flexible hinge 106, and the left input end flexible hinge 106 transmits displacement to the left output rod 108; meanwhile, the left ejector rod 203 transmits displacement to the transition flexible hinge 204, the transition flexible hinge 204 transmits displacement to the left push rod 205, the left push rod 205 transmits displacement to the left input end flexible hinge 206, and the left input end flexible hinge 206 transmits displacement to the left output rod 208.

The left top rod 103, the transition flexible hinge 104, the left push rod 105, the left top rod 203, the transition flexible hinge 204 and the left push rod 205 move upwards.

The right push rod 118 transmits the displacement to the right input end flexible hinge 117, and the right input end flexible hinge 117 transmits the displacement to the right input rod 115; meanwhile, the right push rod 218 transmits displacement to the right input end flexible hinge 217, and the right input end flexible hinge 217 transmits displacement to the right input rod 215;

the right push rod 118 moves upward.

The first base 101 and the second base 201 are fixed; by utilizing a lever principle, the left side of the first base 101 plays a role of pulling the left output rod 108 through the left fixed end flexible hinge 107, the left ejector rod 103 at the input end plays a role of jacking the left output rod 108 through the transition flexible hinge 104, the left push rod 105 and the left input end flexible hinge 106, the left input rod 108 deflects, and the right end moves upwards; meanwhile, the left side pair of the base 201 plays a role of pulling the left output rod 208 through the left fixed end flexible hinge 207, the input end left side push rod 203 plays a role of jacking the left output rod 208 through the transition flexible hinge 204, the left side push rod 205 and the left side input end flexible hinge 206, the left side input rod 208 deflects, and the left end moves upwards.

The first base 101 and the second base 201 are fixed; by utilizing the lever principle, the right side of the first base 101 plays a role of pulling the right output rod 108 through the right fixed end flexible hinge 116, the right side ejector rod 118 plays a role of jacking the right output rod 115 through the right input end flexible hinge 117, the right input rod 115 deflects, and the right end moves downwards; meanwhile, the right side of the base 201 plays a role in pulling the right output rod 208 through the right fixed end flexible hinge 216, the right push rod 218 plays a role in jacking the right output rod 215 through the right input end flexible hinge 217, the right input rod 215 deflects, and the right end moves downwards.

Step three: the output rod 109 is on the upper side of the left input rod 108. The left output rod 108 transmits the displacement to the output rod fixed end flexible hinge 111; meanwhile, the output rod 209 is located on the upper side of the left input rod 208. The left output rod 208 transmits the displacement to the output rod fixed end flexible hinge 211;

the right output rod 115 transmits the displacement to the right output rod upper flexible hinge 114, the right output rod upper flexible hinge 114 transmits the displacement to the right push rod 113, and the right push rod 113 transmits the displacement to the output rod input end flexible hinge 112; meanwhile, the right output rod 215 transmits the displacement to the right output rod upper flexible hinge 214, the right output rod upper flexible hinge 214 transmits the displacement to the right push rod 213, and the right push rod 213 transmits the displacement to the output rod input end flexible hinge 212.

The left output rod 108 and the output rod fixed end flexible hinge 111 do not generate the change of relative displacement, and the right input rod 115, the right input rod upper side flexible hinge 114, the right push rod 113 and the output rod input end flexible hinge 112 do not generate the change of relative displacement; meanwhile, the left output rod 208 and the output rod fixing end flexible hinge 211 do not change in relative displacement, and the right input rod 215, the right input rod upper side flexible hinge 214, the right push rod 213 and the output rod input end flexible hinge 212 do not change in relative displacement.

Step four: when piezoelectric ceramics 102, 202, 119, and 219 move simultaneously: the left output rod 108 plays a role of jacking the output rod 109 through the output rod fixed end flexible hinge 111; the right input rod 115 plays a role of pulling the output rod 109 through the right input rod upper side flexible hinge 114, the right push rod 113 and the output rod input end flexible hinge 112, the output rod 109 deflects, the right end moves upwards, and the right input rod upper side flexible hinge 114, the right push rod 113 and the output rod input end flexible hinge 112 move downwards; meanwhile, the left output rod 208 acts as a jack to the output rod 209 through the output rod fixed end flexible hinge 211; the right input rod 215 plays a role of pulling the output rod 209 through the right input rod upper side flexible hinge 214, the right push rod 213 and the output rod input end flexible hinge 212, the output rod 209 deflects, the right end moves upwards, the right input rod upper side flexible hinge 214, the right push rod 213 and the output rod input end flexible hinge 212 move downwards, and the magnification of 64 times can be obtained.

When piezoelectric ceramics 102 and 202 do not operate and piezoelectric ceramics 121 and 221 operate simultaneously: the left output rod 108 plays a role of jacking the output rod 109 through the output rod fixed end flexible hinge 111; the right input rod 115 plays a role of pulling the output rod 109 through the right input rod upper side flexible hinge 114, the right push rod 113 and the output rod input end flexible hinge 112, the output rod 109 deflects, and the right end moves upwards; meanwhile, the left output rod 208 acts as a jack to the output rod 209 through the output rod fixed end flexible hinge 211; the right input rod 215 pulls the output rod 209 through the right input rod upper flexible hinge 214, the right push rod 213 and the output rod input end flexible hinge 212, so that the output rod 209 deflects, and the right end moves upwards, thereby obtaining a 16-fold magnification.

When piezoelectric ceramics 120 and piezoelectric ceramics 220 operate simultaneously and when piezoelectric ceramics 121 and piezoelectric ceramics 221 do not operate: the left output rod 108 plays a role of pulling the output rod 109 through the output rod fixed end flexible hinge 111; the right input rod 115 plays a role in jacking the output rod 109 through the right input rod upper flexible hinge 114, the right push rod 113 and the output rod input end flexible hinge 112, the output rod 109 deflects, and the right end moves upwards; meanwhile, the left output rod 208 plays a role of pulling the output rod 209 through the output rod fixed end flexible hinge 211; the right input rod 215 acts on the output rod 209 through the right input rod upper flexible hinge 214, the right push rod 213 and the output rod input end flexible hinge 212, the output rod 209 deflects, and the right end moves upwards, so that the magnification of 6 times can be obtained.

The motion platform 3 is fixedly connected with the output rod 109 and the output rod 209 through the output rod output end flexible hinge 110 and the output rod output end flexible hinge 210, when the piezoelectric ceramics work, the left end of the output rod 109 moves upwards to transmit displacement to the output rod output end flexible hinge 110, and the output rod output end flexible hinge 110 moves upwards to the right; meanwhile, the left end of the output rod 209 moves upwards to transmit the displacement to the output end flexible hinge 210 of the output rod, and the output end flexible hinge 210 of the output rod moves towards the upper right; the output rod output end flexible hinge 110 and the output rod output end flexible hinge 210 transmit the upward displacement to the motion platform 3, and the rightward transverse displacement is offset by the output rod output end flexible hinge 110 and the output rod output end flexible hinge 210.

It will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in the embodiments described above without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims.