Piezoelectric composite material, piezoelectric composite film, preparation method and application of piezoelectric composite film and piezoelectric device
阅读说明：本技术 压电复合材料、压电复合薄膜及其制备方法、应用和压电器件 (Piezoelectric composite material, piezoelectric composite film, preparation method and application of piezoelectric composite film and piezoelectric device ) 是由 李宋楚 于 2020-06-29 设计创作，主要内容包括：本发明涉及一种压电复合材料、压电复合薄膜及其制备方法、应用和压电器件。该一种压电复合材料包括如下组分：有机材料、无机压电陶瓷材料及铅纳米线,所述铅纳米线和所述无机压电陶瓷材料分布于所述有机材料中。上述压电复合材料在无机压电陶瓷材料和有机材料中掺杂铅纳米线作为导电相,以提高有机材料的介电常数,缩小了有机基体材料和无机压电陶瓷材料之间的介电常数差异,平衡了有机材料和无机压电陶瓷材料的极化程度,故而制得的上述压电复合材料能够同时具有较高的压电性能和可弯折性。(The invention relates to a piezoelectric composite material, a piezoelectric composite film, a preparation method and application thereof and a piezoelectric device. The piezoelectric composite material comprises the following components: the lead-based piezoelectric ceramic material comprises an organic material, an inorganic piezoelectric ceramic material and lead nanowires, wherein the lead nanowires and the inorganic piezoelectric ceramic material are distributed in the organic material. The piezoelectric composite material is prepared by doping lead nanowires in an inorganic piezoelectric ceramic material and an organic material to serve as a conductive phase, so that the dielectric constant of the organic material is improved, the dielectric constant difference between the organic base material and the inorganic piezoelectric ceramic material is reduced, and the polarization degree of the organic material and the inorganic piezoelectric ceramic material is balanced, so that the prepared piezoelectric composite material can have high piezoelectric performance and flexibility.)
1. A piezoelectric composite comprising the following components: the lead-based piezoelectric ceramic material comprises an organic material, an inorganic piezoelectric ceramic material and lead nanowires, wherein the lead nanowires and the inorganic piezoelectric ceramic material are distributed in the organic material.
2. The piezoelectric composite material according to claim 1, wherein the mass content of the inorganic piezoelectric ceramic material in the total amount of the inorganic piezoelectric ceramic material and the organic material is 50% to 90%;
The mass content of the lead nanowire in the total amount of the organic material, the inorganic piezoelectric ceramic material and the lead nanowire is 0.5-10%.
3. The piezoelectric composite material according to claim 1, wherein the mass content of the inorganic piezoelectric ceramic material in the total amount of the inorganic piezoelectric ceramic material and the organic material is 75% to 85%;
the mass content of the lead nanowire in the total amount of the organic material, the inorganic piezoelectric ceramic material and the lead nanowire is 0.5-3%.
4. A piezoelectric composite material according to any one of claims 1 to 3, wherein the inorganic piezoelectric ceramic material is at least one selected from the group consisting of lead zirconate titanate, lead titanate, and barium titanate.
5. The piezoelectric composite material according to any one of claims 1 to 3, wherein the organic material is at least one selected from the group consisting of polyvinylidene fluoride-trifluoroethylene copolymer, polyvinylidene fluoride, polymethyl methacrylate, and polydimethylsiloxane.
6. The piezoelectric composite material according to any one of claims 1 to 3, wherein the inorganic piezoelectric ceramic material is at least one selected from the group consisting of lead zirconate titanate and lead titanate, and the organic material is selected from the group consisting of polyvinylidene fluoride-trifluoroethylene copolymer.
7. A method of making a piezoelectric composite as claimed in any one of claims 1 to 6, comprising the steps of:
mixing organic material, inorganic piezoelectric ceramic material and lead nanometer line.
8. The method for preparing a piezoelectric composite material according to claim 7, wherein the step of uniformly mixing the organic material, the inorganic piezoelectric ceramic material and the lead nanowires further comprises a step of adding an organic solvent and mixing to prepare a slurry.
9. The method of manufacturing a piezoelectric composite material according to claim 8, further comprising a step of drying and shaping the slurry.
10. A method of preparing a piezoelectric composite material as claimed in claim 8 or 9,
the step of preparing the slurry comprises the following steps:
mixing the organic material with the organic solvent to obtain an organic material solution, wherein the mass content of the organic material in the organic material solution is 5-30%;
and adding the inorganic piezoelectric ceramic material into the organic material solution, uniformly mixing, adding the lead nanowires, and uniformly mixing.
11. A piezoelectric composite film, which is obtained by polarizing the piezoelectric composite material according to any one of claims 1 to 6.
12. Use of a piezoelectric composite material as claimed in any one of claims 1 to 6, or a piezoelectric composite thin film as claimed in claim 11, in the manufacture of an electronic device.
13. A piezoelectric device comprising the piezoelectric composite film according to claim 11.
Technical Field
The invention relates to the technical field of piezoelectric materials, in particular to a piezoelectric composite material, a piezoelectric composite film, a preparation method and application thereof and a piezoelectric device.
Background
With the development of current VR, artificial skin, wrappable sensors and other tactile feedback devices, the requirements for piezoelectric materials are increasing day by day. In particular, piezoelectric materials having both good piezoelectric properties and flexibility have become a hot research point in the industry.
The current piezoelectric materials mainly include: inorganic piezoelectric ceramic materials, piezoelectric polymers and piezoelectric composites. Among them, the inorganic piezoelectric ceramic material has a high D33 (piezoelectric constant, which is a constant for measuring piezoelectric properties) and excellent piezoelectric properties, but has the disadvantages of hardness and brittleness, no flexibility, difficulty in film formation, and the like, and is generally used for manufacturing rigid piezoelectric devices. Piezoelectric polymers have good ductility and bendability, but their voltage performance is lacking, D33 is very low, and its D33 is only 1/10, or even lower, of inorganic piezoelectric ceramic materials. The piezoelectric composite material is generally compounded by an inorganic piezoelectric ceramic material and a piezoelectric polymer or an organic matrix material, and the idea is that the compounded material is expected to have both the high piezoelectric performance of the inorganic piezoelectric material and the flexibility of the piezoelectric polymer or the organic matrix material, but according to the research of the existing documents, the piezoelectric performance of the composite material after polarization in actual production is very low, even lower than that of the piezoelectric polymer.
Disclosure of Invention
In view of the above, there is a need for a piezoelectric composite material, a piezoelectric composite thin film, a method for manufacturing the same, applications thereof, and a piezoelectric device, which can improve bendability on the basis of higher piezoelectric performance.
In one aspect of the present invention, there is provided a piezoelectric composite material comprising the following components: the lead-based piezoelectric ceramic material comprises an organic material, an inorganic piezoelectric ceramic material and lead nanowires, wherein the lead nanowires and the inorganic piezoelectric ceramic material are distributed in the organic material.
The piezoelectric composite material is prepared by doping lead nanowires in an inorganic piezoelectric ceramic material and an organic material to serve as a conductive phase, so that the dielectric constant of the organic material is improved, the dielectric constant difference between the organic base material and the inorganic piezoelectric ceramic material is reduced, and the polarization degree of the inorganic piezoelectric ceramic material is improved. Specifically, the lead nanowires have the following advantages as a conductive phase: 1) the conductivity is moderate, if the conductivity is too strong, the dielectric loss of the piezoelectric composite material can be obviously increased, and the thin film breakdown is easy to occur due to large leakage current during polarization; if the conductivity is too weak, the piezoelectric composite material cannot have good conductivity, and even the mechanical property of the piezoelectric composite material is influenced; 2) the specific shape of the lead nanowires enables the lead nanowires to be doped in inorganic piezoelectric ceramic materials and organic materials to form a network structure, and mutual curling and lapping among the lead nanowires can play a role in transferring an electric field, so that the deep inorganic piezoelectric ceramic materials can be fully polarized; 3) the contact surface of the lead nanowire and the inorganic piezoelectric ceramic material is oxidized in the processes of film preparation and drying, and can be incorporated into the crystal lattice of the inorganic piezoelectric ceramic material, so that an electric field can be more effectively transferred to the inorganic piezoelectric ceramic material, and the inorganic piezoelectric ceramic material is promoted to be fully polarized. Therefore, the polarization degree of the inorganic piezoelectric ceramic material in the piezoelectric composite material can be improved, and the polarization degrees of the organic material and the inorganic piezoelectric ceramic material are balanced, so that the prepared piezoelectric composite material can have high piezoelectric performance and flexibility at the same time.
In some of the embodiments, the mass content of the inorganic piezoelectric ceramic material in the total amount of the inorganic piezoelectric ceramic material and the organic material is 50% to 90%;
the mass content of the lead nanowire in the total amount of the organic material, the inorganic piezoelectric ceramic material and the lead nanowire is 0.5-10%. The lead nanowires have moderate conductivity, the polarization degree of the inorganic piezoelectric ceramic material can be greatly influenced when the doping proportion is less than 10 wt%, and the mechanical property of the film can be influenced when the doping proportion is too high; by controlling the proportion of each component, the prepared piezoelectric composite material has better piezoelectric property and flexibility.
In some of the embodiments, the mass content of the inorganic piezoceramic material in the total amount of the inorganic piezoceramic material and the organic material is 75-85%;
the mass content of the lead nanowire in the total amount of the organic material, the inorganic piezoelectric ceramic material and the lead nanowire is 0.5-3%. The preferred proportion of each component is controlled, so that the prepared piezoelectric composite material has more excellent piezoelectric performance and flexibility.
In some of these embodiments, the inorganic piezoelectric ceramic material is selected from at least one of lead zirconate titanate, lead titanate, and barium titanate. It is understood that the kind of the inorganic piezoelectric ceramic material includes, but is not limited to, this.
In some of these embodiments, the organic material is selected from at least one of polyvinylidene fluoride-trifluoroethylene copolymer, polyvinylidene fluoride, polymethyl methacrylate, and polydimethylsiloxane. It is understood that the kind of the organic material includes, but is not limited to, this.
In some of these embodiments, the inorganic piezoelectric ceramic material is selected from at least one of lead zirconate titanate and lead titanate, and the organic material is selected from polyvinylidene fluoride-trifluoroethylene copolymer. The inorganic piezoelectric ceramic material preferably contains at least one of lead zirconate titanate and lead titanate containing lead, and the inorganic piezoelectric ceramic material contains the same lead element as the lead nanowire, so that the contact surface of the lead nanowire and the inorganic piezoelectric ceramic material is oxidized in the processes of film preparation and drying, the lead nanowire can be better incorporated into the crystal lattice of the inorganic piezoelectric ceramic material, and the lead nanowire can compensate the loss of the lead element in the sintering process of the inorganic piezoelectric ceramic material, so that an electric field can be more effectively transmitted to the inorganic piezoelectric ceramic material, and the full polarization of the inorganic piezoelectric ceramic material is promoted.
In another aspect of the present invention, a method for preparing any one of the above piezoelectric composites is provided, which includes the following steps:
Mixing organic material, inorganic piezoelectric ceramic material and lead nanometer line.
According to the preparation method of the piezoelectric composite material, the organic material, the inorganic piezoelectric ceramic material and the lead nanowires are used as raw materials, the lead nanowires are doped in the inorganic piezoelectric ceramic material and the organic material to serve as conductive phases, the dielectric constant of the organic material is improved, the dielectric constant difference between the organic base material and the inorganic piezoelectric ceramic material is reduced, the polarization degree of the inorganic piezoelectric ceramic material is further improved, and the polarization degrees of the organic material and the inorganic piezoelectric ceramic material are balanced, so that the prepared piezoelectric composite material can have high piezoelectric performance and flexibility.
In some embodiments, the step of uniformly mixing the organic material, the inorganic piezoelectric ceramic material and the lead nanowires further comprises the step of adding an organic solvent to mix to prepare a slurry. It can be understood that the piezoelectric composite material prepared by the above preparation method is in a slurry form.
In some of the embodiments, the method for preparing the piezoelectric composite material further comprises the step of drying and shaping the slurry. The piezoelectric composite material thus obtained is a dried molded material.
In some of these embodiments, the step of preparing the slurry comprises the steps of:
mixing the organic material with the organic solvent to obtain an organic material solution, wherein the mass content of the organic material in the organic material solution is 5-30%;
and adding the inorganic piezoelectric ceramic material into the organic material solution, uniformly mixing, adding the lead nanowires, and uniformly mixing. So that the three components are mixed more fully.
In still another aspect of the present invention, there is provided a piezoelectric composite film, which is obtained by poling a piezoelectric composite material as described in any one of the above.
The piezoelectric composite film is polarized by adopting the piezoelectric composite material, the polarization degree of the inorganic piezoelectric ceramic material is improved, and the polarization degrees of the organic material and the inorganic piezoelectric ceramic material are balanced, so that the prepared piezoelectric composite film has high piezoelectric performance and flexibility.
In a further aspect of the present invention, there is provided a use of the piezoelectric composite material described in any one of the above or the piezoelectric composite thin film described above for manufacturing an electronic device.
The piezoelectric composite material or the piezoelectric composite film has high piezoelectric performance and flexibility, and can be widely applied to touch feedback devices such as VR, artificial skin and flexible sensors and other electronic devices.
In still another aspect of the present invention, there is provided a piezoelectric device comprising the above piezoelectric composite film.
The piezoelectric device applies the piezoelectric composite film, and can meet the requirements on piezoelectric performance and bending performance at the same time.
In some embodiments, the piezoelectric device further includes a first electrode and a second electrode, and the first electrode and the second electrode are electrically connected to two sides of the piezoelectric composite film, respectively. The piezoelectric device may be a piezoelectric thin film sensor.
In still another aspect of the present invention, there is provided a method for manufacturing a piezoelectric device, including the steps of:
mixing an organic material, an inorganic piezoelectric ceramic material, a lead nanowire and an organic solvent to obtain slurry;
preparing a film on a substrate by adopting the slurry, drying, and removing the substrate to obtain an unpolarized piezoelectric composite film;
and electrically connecting a first electrode and a second electrode to two sides of the unpolarized piezoelectric composite film respectively, and polarizing to obtain the piezoelectric device.
The preparation method of the piezoelectric device is characterized in that a slurry method is adopted to prepare the membrane, an unpolarized piezoelectric composite film is formed on a substrate, and then the membrane is combined with two electrodes and polarized, so that the piezoelectric device with high piezoelectric performance and flexibility can be prepared.
Drawings
Fig. 1 is a schematic structural view of a piezoelectric device according to an embodiment;
fig. 2 is a schematic structural view showing a flow state of a doctor blade method employed in a method of manufacturing a piezoelectric device according to an embodiment;
FIG. 3 is a cross-sectional view of the schematic structure shown in FIG. 2;
FIG. 4 is a graph showing a comparison of piezoelectric properties of examples 1 to 5 and comparative examples 1 to 2.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The researchers of the present invention found through a lot of researches that, because the dielectric constants of the organic base material and the inorganic piezoelectric ceramic material are significantly different (the dielectric constant of the inorganic piezoelectric ceramic material is much larger than that of the organic base material), when the piezoelectric composite material prepared by compounding the inorganic piezoelectric ceramic material with the piezoelectric polymer or the organic base material is polarized, the electric field loaded by the polarization is mainly loaded on the organic base material, so that the electric field intensity actually loaded on the inorganic piezoelectric ceramic material is weak, which is not enough to completely polarize the inorganic piezoelectric ceramic material as a ceramic phase in the piezoelectric composite material, and further, the piezoelectric property of the composite material after polarization in actual production is very low, and the problem that the piezoelectric property of the composite material after polarization is difficult to improve needs to be solved urgently.
Based on this, an embodiment of the present invention provides a piezoelectric composite material, including the following components: the lead nanowire and the inorganic piezoelectric ceramic material are distributed in the organic material.
It can be understood that the piezoelectric composite material takes an organic material as a continuous phase, and the lead nanowires and the inorganic piezoelectric ceramic material are distributed in the organic material.
The piezoelectric composite material is prepared by doping lead nanowires in an inorganic piezoelectric ceramic material and an organic material to serve as a conductive phase, so that the dielectric constant of the organic material is improved, the dielectric constant difference between the organic base material and the inorganic piezoelectric ceramic material is reduced, and the polarization degree of the inorganic piezoelectric ceramic material is improved. Specifically, the lead nanowires have the following advantages as a conductive phase: 1) the conductivity is moderate, if the conductivity is too strong, the dielectric loss of the piezoelectric composite material can be obviously increased, and the thin film breakdown is easy to occur due to large leakage current during polarization; if the conductivity is too weak, the piezoelectric composite material cannot have good conductivity, and even the mechanical property of the piezoelectric composite material is influenced; 2) the specific shape of the lead nanowires enables the lead nanowires to be doped in inorganic piezoelectric ceramic materials and organic materials to form a network structure, and mutual curling and lapping among the lead nanowires can play a role in transferring an electric field, so that the deep inorganic piezoelectric ceramic materials can be fully polarized; 3) the boundary between the lead nanowire and the inorganic piezoelectric ceramic material is oxidized in the processes of film preparation and drying, and can be incorporated into the crystal lattice of the inorganic piezoelectric ceramic material, so that an electric field can be more effectively transferred to the inorganic piezoelectric ceramic material, and the inorganic piezoelectric ceramic material is promoted to be fully polarized. Therefore, the polarization degree of the inorganic piezoelectric ceramic material in the piezoelectric composite material can be improved, and the polarization degrees of the organic material and the inorganic piezoelectric ceramic material are balanced, so that the prepared piezoelectric composite material can have high piezoelectric performance and flexibility at the same time.
In addition, researches show that the piezoelectric performance of the lead nanowire used as the conductive phase is obviously superior to that of the carbon nano powder used as the conductive phase.
In some embodiments, the inorganic piezoelectric ceramic material can be added in powder form; furthermore, the powder particle size of the inorganic piezoelectric ceramic material is 0.5-3 μm.
In some embodiments, the inorganic piezoelectric ceramic material is 50 to 90% by mass of the total amount of the inorganic piezoelectric ceramic material and the organic material;
the mass content of the lead nanowire in the total amount of the organic material, the inorganic piezoelectric ceramic material and the lead nanowire is 0.5-10%. The lead nanowires have moderate conductivity, the polarization degree of the inorganic piezoelectric ceramic material can be greatly influenced when the doping proportion is less than 10 wt%, and the mechanical property of the film can be influenced when the doping proportion is too high; by controlling the proportion of each component, the prepared piezoelectric composite material has better piezoelectric property and flexibility.
In some embodiments, the inorganic piezoelectric ceramic material is 75-85% by mass of the total amount of the inorganic piezoelectric ceramic material and the organic material; the mass content of the lead nanowire in the total amount of the organic material, the inorganic piezoelectric ceramic material and the lead nanowire is 0.5-3%. The preferred proportion of each component is controlled, so that the prepared piezoelectric composite material has more excellent piezoelectric performance and flexibility.
In some of these embodiments, the inorganic piezoelectric ceramic material is selected from the group consisting of lead zirconate titanate (PZT), lead titanate (PbTiO)3PT) and barium titanate (BaTiO)3BT). It is understood that the kind of the inorganic piezoelectric ceramic material includes, but is not limited to, this.
In some of these embodiments, the organic material is selected from at least one of a piezoelectric polymer and an organic matrix material that does not have piezoelectric properties. It is understood that the piezoelectric polymer and the organic matrix material having no piezoelectric property both function as the organic matrix material in the piezoelectric composite material. The piezoelectric polymer includes, but is not limited to, polyvinylidene fluoride-trifluoroethylene copolymer and polyvinylidene fluoride, and the organic matrix material having no piezoelectric property includes, but is not limited to, polymethyl methacrylate and polydimethylsiloxane.
In some of these embodiments, the organic material is selected from at least one of polyvinylidene fluoride-trifluoroethylene copolymer (PVDF-Trfe), polyvinylidene fluoride (PVDF), polymethyl methacrylate (PMMA), and Polydimethylsiloxane (PDMS).
In some of these embodiments, the inorganic piezoelectric ceramic material is selected from at least one of lead zirconate titanate and lead titanate, and the organic material is selected from polyvinylidene fluoride-trifluoroethylene copolymer. The inorganic piezoelectric ceramic material preferably contains at least one of lead zirconate titanate and lead titanate containing lead, and the inorganic piezoelectric ceramic material contains the same lead element as the lead nanowire, so that the boundary of the lead nanowire and the inorganic piezoelectric ceramic material is oxidized in the processes of film preparation and drying, the lead nanowire can be better incorporated into the crystal lattice of the inorganic piezoelectric ceramic material, and the lead nanowire can compensate the loss of the lead element in the sintering process of the inorganic piezoelectric ceramic material, so that an electric field can be more effectively transmitted to the inorganic piezoelectric ceramic material, and the inorganic piezoelectric ceramic material is promoted to be fully polarized.
Further, the inorganic piezoelectric ceramic material is selected from lead zirconate titanate, and the organic material is selected from polyvinylidene fluoride-trifluoroethylene copolymer.
An embodiment of the present invention further provides a method for preparing any one of the above piezoelectric composite materials, including the steps of: mixing organic material, inorganic piezoelectric ceramic material and lead nanometer line.
According to the preparation method of the piezoelectric composite material, the organic material, the inorganic piezoelectric ceramic material and the lead nanowires are used as raw materials, the lead nanowires are doped in the inorganic piezoelectric ceramic material and the organic material to serve as conductive phases, the dielectric constant of the organic material is improved, the dielectric constant difference between the organic base material and the inorganic piezoelectric ceramic material is reduced, the polarization degree of the inorganic piezoelectric ceramic material is further improved, and the polarization degrees of the organic material and the inorganic piezoelectric ceramic material are balanced, so that the prepared piezoelectric composite material can have high piezoelectric performance and flexibility.
It is understood that in some examples, the organic material, the inorganic piezoelectric ceramic material and the lead nanowires may be directly mixed uniformly by a solid phase method.
In some embodiments, the step of mixing the organic material, the inorganic piezoelectric ceramic material and the lead nanowires further comprises the step of adding an organic solvent to mix to prepare a slurry. It is understood that the piezoelectric composite material prepared by the above preparation method may be in the form of a slurry.
Further, the preparation method of the piezoelectric composite material also comprises the step of drying and shaping the slurry. The piezoelectric composite material thus obtained is a dried molded material.
In some embodiments, the step of preparing the paste by mixing the organic material, the inorganic piezoelectric ceramic material, the lead nanowire and the organic solvent includes the following steps S12 to S14, so that the three are mixed more sufficiently.
Step S12: mixing an organic material with an organic solvent to obtain an organic material solution;
further, the solid content of the organic material solution is 5 wt% to 30 wt% so that the organic material can be sufficiently mixed with the organic material. The addition amount of the inorganic piezoelectric ceramic material is as follows: the content of the inorganic piezoelectric ceramic material in the total amount of the inorganic piezoelectric ceramic material and the organic material is controlled to be 50 wt% -90 wt%.
Further, the organic solvent is at least one selected from Dimethylformamide (DMF), Methyl Ethyl Ketone (MEK), Propylene Glycol Methyl Ether Acetate (PGMEA), and Dimethylacetamide (DMAC).
Step S14: adding the inorganic piezoelectric ceramic material into the organic material solution, uniformly mixing, adding the lead nanowires, and uniformly mixing to obtain the slurry.
Further, the mixing step in step S14 is ball milling.
Furthermore, the adding amount of the lead nanowires is controlled to be 0.5 wt% -10 wt% in the solid mass (namely the total mass of the organic material, the inorganic piezoelectric ceramic material and the lead nanowires) of the slurry.
Referring to fig. 1, an embodiment of the present invention further provides a piezoelectric
The piezoelectric
The piezoelectric
In some embodiments, the piezoelectric composite material of any one of the above embodiments can be formed into a film by a slurry method, and specifically, the slurry can be formed into a film by a blade method and a spin coating method.
An embodiment of the present invention further provides an application of the piezoelectric composite material or the piezoelectric composite thin film in preparing an electronic device.
The piezoelectric composite material or the piezoelectric composite film has high piezoelectric performance and flexibility, and can be widely applied to touch feedback devices such as VR, artificial skin and flexible sensors and other electronic devices.
It is understood that the electronic devices include, but are not limited to, transducers, sensors, drivers, frequency discriminators, piezoelectric oscillators, transformers, filters, and the like.
Referring to fig. 1, a piezoelectric device including the piezoelectric
The piezoelectric device employs the piezoelectric
In some embodiments, the piezoelectric device further includes a
In some of these embodiments, the
An embodiment of the present invention further provides a method for manufacturing a piezoelectric device, including the following steps S10 to S30.
Step S10: mixing an organic material, an inorganic piezoelectric ceramic material, a lead nanowire and an organic solvent to obtain slurry.
In some embodiments, step S10 includes steps S12-S14 described above. Details are not repeated.
Step S20: and (3) adopting the slurry to prepare a film on the substrate, drying and removing the substrate to obtain the unpolarized piezoelectric composite film.
In step S20, a film is formed by a slurry method. Further, the slurry can be formed into a film by a doctor blade method and a spin coating method.
Referring to fig. 2 and 3, in some examples, the step of forming the slurry into a film by using a doctor blade method includes the following steps: the method comprises the steps of cleaning a
In some examples, the slurry is formed into a film by using a spin coating method, which comprises the following steps: the substrate is arranged on a rotary platform of a spin coating instrument, the slurry is dripped on the substrate in the process that the rotary platform drives the substrate to rotate, and the substrate is uniformly distributed by utilizing the rotation speed of the substrate.
In some of these embodiments, the conditions of drying are: drying for 1-15 h at 30-150 ℃ to obtain a flat and uniform film.
Step S30: and electrically connecting the first electrode and the second electrode to two sides of the unpolarized piezoelectric composite film respectively, and polarizing to obtain the piezoelectric device.
The preparation method of the piezoelectric device is characterized in that a slurry method is adopted to prepare the membrane, an unpolarized piezoelectric composite film is formed on the substrate and then is combined with the two electrodes and polarized, so that the influence on the conductivity of the electrodes in the drying process is avoided, and the piezoelectric device with high piezoelectric performance and flexibility can be prepared.
In some of these embodiments, the first electrode and the second electrode may each be independently selected from electrodes of copper foil, silver foil, aluminum foil, and the like.
In some of these embodiments, the polarization conditions are: the direct current voltage is 300-1000V, the thermal polarization temperature is 70-110 ℃, and the polarization time is 2-5 h.
Specifically, the step of polarizing comprises the steps of:
putting the piezoelectric composite film attached with the lead, the first electrode and the second electrode into dimethyl silicone oil, and heating the piezoelectric composite film to 90-110 ℃ in an oil bath; then, applying 300V-1000V direct current voltage to two ends of the piezoelectric composite film, keeping for 4h, and then closing heating and naturally cooling; and maintaining the voltage in the process of cooling to 70 ℃ until the temperature is reduced to below 70 ℃, removing the loaded voltage, and finishing the film polarization.
Further, the step of applying 300V-1000V direct current voltage to the two ends of the piezoelectric composite film is divided into multiple times of pressurization, the pressurization is stopped when the monitoring current exceeds 20 muA, the pressurization is continued when the current is lower than 10 muA, and the process is circulated until the target voltage is reached.
The following are specific examples.
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