阅读说明：本技术 射流构件以及具有这种射流构件的超声测量设备和超声测量设备的应用 (Fluidic component, ultrasonic measuring device having such a fluidic component, and use of an ultrasonic measuring device ) 是由 贝恩哈德·博布施 奥利佛·克鲁格 延斯·赫尔曼·温特林 于 2018-12-20 设计创作，主要内容包括：本发明涉及一种用于产生超声信号的射流构件(112),所述射流构件具有流动室(1001),所述流动室可由流体流穿流,所述流体流穿过所述流动室(1001)的入流口(10011)进入所述流动室(1001)中,并且通过所述流动室(1001)的出流口(10012)从所述流动室(1001)流出,其中所述射流构件(112)具有至少一个用于在所述出流口(10012)处构成流体流的振动的机构(10014a、10014b),其中所述振动在振动平面中进行。分离设备(2000)构成用于,从所述进行振动的流体流中分离出一部分,其中所述分离设备(2000)具有入流口(20011)和至少一个第一出流口(20012)以及至少一个第二出流口(20013),所述进行振动的流体流穿过所述入流口进入所述分离装置(2000)中,所述进行振动的流体流的一部分分别穿过所述第一出流口和第二出流口流出,其中在所述分离设备(2000)的至少一个第一出流口(20012)和所述分离设备(2000)的至少一个第二出流口(20013)之间设有分流器(20014),所述分流器使所述进行振动的流体流轮流地转向到所述分离设备(2000)的至少一个第一和至少一个第二出流口(20012、20013)中,其中所述分离设备(2000)构成为,使得所述进行振动的流体流的转向到所述分离设备(2000)的至少一个第一出流口(20012)中的部分和所述进行振动的流体流的转向到所述分离设备(2000)的至少一个第二出流口(20013)中的部分不会在所述分流器(20014)的下游再次汇合。(The invention relates to a fluidic component (112) for generating an ultrasonic signal, comprising a flow chamber (1001) through which a fluid flow can flow, said fluid flow entering the flow chamber (1001) through an inflow opening (10011) of the flow chamber (1001) and exiting the flow chamber (1001) through an outflow opening (10012) of the flow chamber (1001), wherein the fluidic component (112) comprises at least one means (10014a, 10014b) for generating a vibration of the fluid flow at the outflow opening (10012), wherein the vibration takes place in a vibration plane. A separating device (2000) is designed to separate a portion from the oscillating fluid flow, wherein the separating device (2000) has an inlet opening (20011) through which the oscillating fluid flow enters the separating device (2000) and at least one first outlet opening (20012) through which a portion of the oscillating fluid flow exits and at least one second outlet opening (20013) through which the oscillating fluid flow exits, wherein a flow divider (20014) is provided between the at least one first outlet opening (20012) of the separating device (2000) and the at least one second outlet opening (20013) of the separating device (2000), which flow divider alternately diverts the oscillating fluid flow into the at least one first and at least one second outlet opening (20012, 20013) of the separating device (2000), wherein the separating device (2000) is designed such that, such that the portion of the oscillating fluid flow diverted into the at least one first outlet opening (20012) of the separating device (2000) and the portion of the oscillating fluid flow diverted into the at least one second outlet opening (20013) of the separating device (2000) do not merge again downstream of the flow divider (20014).)

1. A fluidic member (112) for generating an ultrasonic signal, having a flow chamber (1001) which can be traversed by a fluid flow, which enters the flow chamber (1001) through an inflow opening (10011) of the flow chamber (1001) and exits the flow chamber (1001) through an outflow opening (10012) of the flow chamber (1001), wherein the fluidic member (112) has at least one mechanism (10014a, 10014b, 10020) for generating a vibration of the fluid flow at the outflow opening (10012), wherein the vibration takes place in a vibration plane,

it is characterized in that the preparation method is characterized in that,

a separating device (2000) is provided, which is designed to separate a portion of a vibrating fluid flow, wherein the separating device (2000) has an inlet opening (20011) through which the vibrating fluid flow enters the separating device (2000) and at least one first outlet opening (20012) through which a portion of the vibrating fluid flow exits and at least one second outlet opening (20013) through which the vibrating fluid flow exits, wherein a flow divider (20014) is provided between the at least one first outlet opening (20012) of the separating device (2000) and the at least one second outlet opening (20013) of the separating device (2000), which flow divider alternately diverts the vibrating fluid flow to the at least one first outlet opening and the at least one second outlet opening (20012) of the separating device (2000), 20013) Wherein the separation device (2000) is configured such that the portion of the oscillating fluid flow diverted into the at least one first outlet opening (20012) of the separation device (2000) and the portion of the oscillating fluid flow diverted into the at least one second outlet opening (20013) of the separation device (2000) do not merge again downstream of the flow divider (20014).

2. The fluidic member (112) according to claim 1, characterized in that the separation device (2000) is configured such that the portion of the fluid flow flowing out of the at least one first outlet opening (20012) of the separation device (2000) and the portion of the fluid flow flowing out of the at least one second outlet opening (20013) of the separation device (2000) are along an axis (R), respectively₁、R₂) Orientation, wherein the axis (R)₁、R₂) Diverging in the direction of fluid flow.

3. The fluidic member (112) according to claim 1 or 2, characterized in that the at least one first outlet opening (20012) of the separating device (2000) and the inlet opening (20011) of the separating device (2000) each have an extension in the plane of oscillation and transverse to the direction of fluid flow, wherein the extension of the at least one first outlet opening (20012) of the separating device (2000) is less than or equal to 150% of the extension of the inlet opening (20011) of the separating device (2000), preferably less than or equal to 150% of the extension of the inlet opening (20011) of the separating device (2000), particularly preferably less than or equal to 75% of the extension of the inlet opening (20011) of the separating device (2000).

4. The fluidic member (112) according to any one of the preceding claims, wherein at least one first outlet (20012) of the separation device (2000) has a smaller cross-section transverse to the fluid flow direction than an inlet (20011) of the separation device (2000).

5. The fluidic member (112) according to any one of the preceding claims, wherein at least one first outflow (20012) of the separation device (2000) and at least one second outflow (20013) of the separation device (2000) have an extension of different magnitude in the oscillation plane and transverse to the fluid flow direction.

6. The fluidic member (112) according to any of the preceding claims, wherein the separation device (2000) is arranged downstream of the outflow (10012) of the flow chamber (1001), in particular the outflow (20012) of the separation device (2000) corresponds to the inflow (20011) of the separation device (2000).

7. The fluidic member (112) according to any one of the preceding claims, wherein the flow diverter (20014) comprises at least one curved wall that is outwardly curved as seen in the direction of fluid flow.

8. Fluidic member (112) according to any one of the preceding claims, characterized in that the flow splitter (20014) and a wall adjoining the flow splitter bounding the at least one first outflow opening (20012) of the separation device (2000) enclose an angle (ξ) which is smaller than 95 °, preferably smaller than 70 °, particularly preferably smaller than 45 °.

9. The fluidic member (112) according to any one of the preceding claims, wherein the flow chamber (1001) has an extension perpendicular to the oscillation plane, wherein the extension is variable.

10. The fluidic member (112) according to any of the preceding claims, wherein the position, shape and/or size of the at least one first outflow opening (20012) of the separation device (2000) is variable.

11. The fluidic member (112) according to any one of the preceding claims, wherein the means (10014a, 10014b) for constituting vibrations comprise at least two bypass channels (10014a, 10014b) in fluid communication with the main flow channel (10013) of the flow chamber (1001) via an inlet (10014a1, 10014b1) and an outlet (10014a2, 10014b2), respectively, and extending between a respective inlet (10014a1, 10014b1) and a respective outlet (10014a2, 10014b2), respectively, wherein at least two of the bypass channels (10014a, 10014b) have different lengths.

12. The fluidic member (112) according to claim 11, wherein the length of a first of at least two of the bypass channels (10014a, 10014b) can be at least twice, preferably at least five times, the length of a second of at least two of the bypass channels (10014a, 10014 b).

13. The fluidic member (112) according to any one of the preceding claims, wherein at least one first outflow (20012) of the separation device (2000) is provided for outputting a portion of the oscillating fluid flow as an ultrasonic signal, and at least one second outflow (20013) of the separation device (2000) is provided for discharging the remaining fluid flow.

14. The jet member (112) according to any one of the preceding claims, wherein means for dampening sound are provided in the area of at least one second outflow opening (20013) of the separating device (2000).

15. The fluidic member (112) according to one of the preceding claims, characterized in that the fluidic member (112) is configured for generating an ultrasonic signal comprising pulses which have a temporal pulse spacing (T) from one another and each have a half-value width (b), wherein the pulse spacing (T) is greater than or equal to twice the half-value width (b), in particular greater than or equal to ten times the half-value width (b), particularly preferably greater than or equal to one hundred times the half-value width (b).

16. The fluidic member (112) according to any of claims 1 to 10 and 13 to 15, characterized in that the mechanism (10020) for constituting the vibration of the fluid flow comprises a device (10022) for providing a secondary fluid flow and at least one transfer line (10021) in fluid communication with the device (10022) on the one hand and with a flow chamber (1001) of the fluidic member (112) on the other hand for transferring the secondary fluid flow to the flow chamber (1001), wherein at least one transfer line (10021) is arranged with respect to the flow chamber (1001) such that the secondary fluid flow enters the flow chamber (1001) at an angle different from 0 ° with respect to the fluid flow from the inlet port (10011) to the outlet port (10012) and is provided by the device (10022) as a secondary fluid flow which is subjected to vibration, causing at least one of the delivery lines (10021) to deliver the secondary fluid flow to a flow chamber (1001) of the fluidic member (112) in a time-variable manner.

17. The fluidic member (112) of claim 16, wherein the apparatus (10022) for providing a secondary fluid flow comprises a second fluidic member (112 ') comprising a flow chamber (1001 ') traversable by the secondary fluid flow, the secondary fluid flow entering the flow chamber (1001 ') through an inlet (10011 ') of the flow chamber (1001 ') and exiting the flow chamber (1001 ') through an outlet (10012 ') of the flow chamber (1001 '), wherein the second fluidic member (112 ') has at least one mechanism (10014a, 10014b) for constituting vibrations of the secondary fluid flow at the outlet (10012 '), wherein the vibrations are performed in a vibration plane, wherein the at least one mechanism (10014a ', 10014b) for constituting vibrations of the secondary fluid flow, 10014b ') comprises, inter alia, a bypass channel (10014a ', 10014b ') in fluid communication with the main flow channel (10013 ') of the flow chamber (1001 ') via an inlet (10014a1 ', 10014b1 ') and an outlet (10014a2 ', 10014b2 ') and extending between the inlet (10014a1 ', 10014b1 ') and the outlet (10014a2 ', 10014b2 ').

18. The fluidic member (112) according to claim 16 or 17, characterized in that the means (10020) for constituting the oscillation of the fluid flow comprise two delivery lines (10021) in fluid communication with the flow chamber (1001) of the fluidic member (112) on opposite sides of the flow chamber (1001), respectively.

19. The fluidic member (112) according to claim 18, characterized in that downstream of said device (10022) for providing a secondary fluid flow there is a second diverter (10023) which diverts the secondary fluid flow exiting from said device (10022) in turns into the two delivery lines (10021).

20. The fluidic member (112) according to claim 18 or 19, wherein the two delivery lines (10021) are crossed by the secondary fluid flow with a temporal offset.

21. The fluidic member (112) of any one of the preceding claims, wherein the separation device (2000) comprises at least one first outlet (20012), at least one second outlet (20013) and at least one third outlet (20015), through which a portion of the vibrating fluid flow exits respectively, wherein a flow diverter (20014) is provided between the at least one first outlet (20012) of the separation device (2000), the at least one second outlet (20013) of the separation device (2000) and the at least one third outlet (20015) of the separation device (2000), which diverts the vibrating fluid flow in turn to the at least one first outlet, to the at least one first outlet (20012) of the separation device (2000), to the at least one second outlet (20013) of the separation device (2000) and to the at least one third outlet (20015) of the separation device (2000), Of a second and a third outflow opening (20012, 20013, 20015), wherein one of the outflow openings (20012) is located on an axis extending substantially centrally between the maximum deflections of the vibrating fluid flow and having a smaller cross section than the remaining outflow openings (20013, 20015) of the separating apparatus (2000).

22. An apparatus (11) for generating an ultrasonic signal (S), characterized in that the apparatus (11) comprises a fluidic member (112) for generating an ultrasonic signal (S) according to any one of the preceding claims and a fluid flow source (111) for providing a fluid flow, wherein the fluid flow source (111) is in fluid communication with the inlet opening (10011) of the flow chamber (1101) of the fluidic member (112).

23. An apparatus (11) for generating an ultrasonic signal (S), characterized in that the apparatus (11) comprises a fluidic member (112) for generating an ultrasonic signal (S) according to any one of claims 17 to 21 and a fluid flow source (111) and a secondary fluid flow source (111 ') for providing a fluid flow or a secondary fluid flow, wherein the fluid flow source (111) is in fluid communication with the inlet opening (10011) of the flow chamber (1101) of the fluidic member (112) and the secondary fluid flow source (111') is in fluid communication with the inlet opening (10011 ') of the flow chamber (1001') of the apparatus (10022) for providing a secondary fluid flow source.

24. The apparatus (11) according to claim 22 or 23, characterized in that the fluid flow source (111) and/or the auxiliary fluid flow source (111 ') comprises a valve in order to set the pressure of the fluid flow or auxiliary fluid flow flowing out of the fluid flow source (111) or auxiliary fluid flow source (111').

25. The apparatus (11) according to any one of claims 22 to 24, wherein the fluid flow source (111) and the auxiliary fluid flow source (111') are each a gas flow source.

26. An ultrasonic measuring device (1) having a device (11) for generating an ultrasonic signal (S), a device (12) for receiving an ultrasonic signal (S, S '), and a signal processing unit (13) for processing the received ultrasonic signal (S, S'),

characterized in that the device (11) for generating an ultrasonic signal (S) comprises a fluidic member (112) according to any one of claims 1 to 21.

27. The ultrasonic measuring device (1) according to claim 26, characterized in that the device (12) for receiving an ultrasonic signal (S, S ') is configured for receiving an ultrasonic signal (S') emitted by the device (11) for generating an ultrasonic signal (S) and reflected outside the ultrasonic measuring device and a reference signal, wherein the reference signal is provided by a fluid flow flowing out of at least one second outflow opening (20013) of the separating device (2000).

28. A method for contactless examination of an object or body (2) by means of an ultrasonic measuring device (1),

it is characterized in that the preparation method is characterized in that,

the ultrasonic measuring device (1) for generating an ultrasonic signal (S) comprises a fluidic member (112) according to any one of claims 1 to 21.

29. A method for determining the distance of an object (2) from one or more other objects by means of an ultrasonic measuring device (1),

characterized in that the ultrasonic measuring device (1) for generating an ultrasonic signal (S) comprises a fluidic member (112) according to any one of claims 1 to 21.

30. A method for contactless cleaning of an object (2) by means of a device (11) for generating an ultrasonic signal (S),

characterized in that the device (11) for generating an ultrasonic signal (S) comprises a fluidic member (112) according to any one of claims 1 to 21.

Technical Field

The present invention relates to an ultrasonic measuring device and various applications of the ultrasonic measuring device.

Background

Ultrasonic measuring devices (or also ultrasonic sensors, ultrasonic probes) can be used for a range of applications. In medical technology, ultrasonic measuring devices are used for non-invasive examination of organs of the human/animal body. Other applications are for example non-destructive material testing, spacing determination or object positioning.

The known ultrasonic measuring device has a device (transmitter) for generating an ultrasonic signal, a device (receiver) for receiving the ultrasonic signal and a signal processing unit for processing the received ultrasonic signal.

The device for generating an ultrasound signal generates an ultrasound pulse. The pulses are directed to the body/object where the ultrasound pulses interact with the body/object. A portion of the generated pulses is back-thrown and recorded by the device for receiving ultrasonic signals. By means of the signal processing unit, the characteristics/condition or position of the body/object can be deduced based on the received pulses.

For generating the ultrasound signal, different methods and devices are known from the prior art. In one method, a pulsed electrical signal is converted into an ultrasonic signal, for example by means of a piezoelectric ceramic. It is also known to use vibrating diaphragms or thermoacoustic transducers for generating the ultrasonic signals.

For transmitting the ultrasound signal from the device for generating the ultrasound signal to the body/object, a coupling medium in a solid, gel-like or liquid state is usually used. In the so-called ejector technique, therefore, ultrasonic pulses are input into the body/object via a waterjet coupling. However, it is generally not desirable, permissible or technically feasible to couple the input ultrasound pulses by means of a liquid medium. Therefore, an ultrasound measuring device is desired in which ultrasound pulses can be coupled in (and also coupled out again) via an air path into the body/object.

However, the following problems exist in air-coupled ultrasound transmission: in the known ultrasound probes, the generated ultrasound signals are already mostly reflected at the limiting interface between the ultrasound probe and the surrounding air and only reach the body/object to be examined in an attenuated manner. Thus, only a very small portion of the ultrasound signal leaves the ultrasound probe and is available for actual measurement. The reason for this is the large difference in the acoustic characteristic impedance of the probe material and the coupling medium, i.e. air. High losses are therefore produced by reflection when passing through the boundary surface between the probe material and the surrounding air. There are at least four limiting interfaces to overcome in air-coupled ultrasonic measurements: first, for the generated ultrasound signal, the limited interface between the solid-ultrasound actuator (transmitter, e.g. piezoelectric transducer) of the ultrasound probe and the surrounding air has to be overcome, and then the limited interface between the air and the body/object to be examined has to be overcome. For reflected ultrasound signals, the limiting interface between the body/object to be examined and the surrounding air has to be overcome, and finally the limiting interface between the surrounding air and the measurement probe (receiver) has to be overcome. Accordingly, a strong signal attenuation is generally produced for the measurement. In this connection, a boundary surface is understood to be the contact region between the coupling medium (air, gas or gas mixture) and the solid material. The solid material can be, for example, a body/object to be examined or an ultrasound actuator (transmitter) or a measurement probe (receiver). Furthermore, reflections at the limiting surfaces also make the evaluation of the ultrasound signal returning from the body/object difficult due to superposition (interference). Furthermore, both the angular resolution and the range of action are relatively small. It is therefore very difficult to actually use air-coupled ultrasound.

Disclosure of Invention

The object on which the invention is based is to create a component for an ultrasonic measuring device, which enables the transmission of ultrasonic signals from a device for generating ultrasonic signals via a gaseous coupling medium onto a body/object to be examined, wherein the above-mentioned disadvantages, however, do not occur or occur to a significantly reduced extent.

According to the invention, this object is achieved by a fluidic component for generating an ultrasonic signal having the features of claim 1. The invention is characterized in that the invention is set forth in the dependent claims.

Accordingly, the fluidic component for generating an ultrasonic signal has a flow chamber which can be traversed by a fluid flow which enters the flow chamber through an inlet opening of the flow chamber and exits the flow chamber through an outlet opening of the flow chamber. The fluidic component has at least one means for generating vibrations of the fluid flow at the outlet opening of the flow chamber, the vibrations being generated in a vibration plane having a vibration frequency. Hereby, at the outflow opening of the flow chamber, a fluid flow is generated which moves back and forth in a vibration plane with a vibration frequency between two maximum deflections, which enclose a vibration angle. The means for generating vibrations can be, for example, at least one bypass channel. Alternatively, other means for generating vibrations of the fluid flow, such as turbulators or impinging fluid jets, can also be provided. The fluidic component does not comprise, in particular, movable parts, which are required for generating the oscillating fluid flow. Thus, the fluidic member has no or little wear phenomena and is correspondingly robust.

The fluidic component according to the invention is characterized in that it has a separating device which is designed to separate a portion from the oscillating fluid flow in order to generate a fluid flow pulse. The separating apparatus has an inlet through which the oscillating fluid stream enters the separating apparatus. The separating apparatus also has at least one first outlet and at least one second outlet through which a portion of the oscillating fluid stream exits, respectively. A flow divider is provided between the at least one first outflow opening of the separating device and the at least one second outflow opening of the separating device, which flow divider alternately diverts the oscillating fluid flow into the at least one first and at least one second outflow opening of the separating device. The separating device is designed such that the portion of the oscillating fluid flow diverted into the at least one first outlet opening of the separating device and the portion of the oscillating fluid flow diverted into the at least one second outlet opening of the separating device do not merge again downstream of the flow divider.

That is, the separation device downstream of the flow splitter does not have a diversion device (e.g., in the form of a channel) that is shaped such that it deflects a portion of the fluid flow such that the portions rejoin or meet downstream of the flow splitter within or outside of the device.

It is thus possible to cut out at least two (temporally and spatially limited) portions from the oscillation profile of the fluid flow by means of the flow divider, which portions are diverted as pulse sequences into at least one first and at least one second outflow opening of the separating device, respectively, wherein the pulse sequences are phase-shifted. Due to the design of the separating device, at least one of the pulse trains can be removed from the fluidic component and used as an ultrasonic signal, the frequency of which is dependent in particular on the oscillation frequency of the oscillating fluid flow. Interference with another pulse sequence can be avoided.

In particular, it can be provided that the separating device is designed such that the part of the fluid flow which emerges from at least one first outflow opening of the separating device and the part of the fluid flow which emerges from at least one second outflow opening of the separating device are each oriented along an axis, wherein the axes are remote from one another in the direction of the fluid flow. This can prevent: the portions intersect and interfere downstream of the flow splitter. In order to avoid: the superposition of the portions of the fluid flow issuing from the at least one first and at least one second outflow opening of the separating apparatus can provide that the cross sections of the at least one first and at least one second outflow opening of the separating apparatus (respectively transverse to the respective fluid flow direction) are at an angle to one another which lies between 30 ° and 150 °, for example substantially 90 °. The expression "transverse" is always understood as "perpendicular".

Alternatively, the axes can be parallel to each other. However, the spacing between the at least one first outflow opening and the at least one second outflow opening of the separating apparatus should be selected sufficiently large so that interference between the parts of the fluid flow flowing out of these outflow openings is avoided.

The at least one first outflow opening and the at least one second outflow opening of the separating apparatus can be arranged in a plane which lies in or is parallel to the plane of oscillation of the oscillating fluid flow flowing out of the flow chamber. In particular, the at least one first outflow opening and the at least one second outflow opening of the separating device can be spaced apart from one another such that they are alternately traversed by the reciprocally vibrating fluid flow, which flows out of the flow chamber.

According to one embodiment, the at least one first outflow opening of the separating device and the inflow opening of the separating device each have an extent (width) in the plane of oscillation and transverse to the direction of the fluid flow, wherein the extent (width) of the at least one first outflow opening of the separating device is less than or equal to 150%, preferably less than or equal to 150%, and particularly preferably less than or equal to 75% of the extent of the inflow opening of the separating device.

Due to the dimensional ratios of the widths mentioned, temporally separate fluid flow pulses can be generated, which have a pulse width that is as small as possible. Pulse width is understood here to mean the half-value width, i.e. the width of the pulse at half the height of the pulse or the width at half the height of the maximum value of the pulse. The inlet opening of the separating device and the at least one first outlet opening and the at least one second outlet opening of the separating device are each defined here at a point of the separating device having a respective smallest cross section transverse to the direction of the fluid flow, through which the fluid flow passes if it enters the separating device or exits the flow dividing device. In this connection, it should be mentioned that the inflow opening of the flow chamber and the outflow opening of the flow chamber are defined as follows: at the point, the flow chamber has a smallest cross section transverse to the flow direction, through which the fluid flow passes when entering the flow chamber or when exiting the flow chamber again.

The fluidic component can thus generate temporally separate fluid flow pulses (with a small pulse width) which leave the fluidic component through the at least one first outflow opening of the separating device and can be used as ultrasonic pulses for an ultrasonic measuring device. In order to set the frequency of the fluid flow pulses, i.e. the pulse intervals between the fluid flow pulses that follow one another, for example, the oscillation frequency of the oscillating fluid flow can be set. The pulse interval is the interval between the maximum value of a fluid flow pulse and the maximum value of the following fluid flow pulse. Further possibilities to influence the pulse width and the pulse interval will be elucidated later in the description.

By means of the fluidic member, ultrasonic pulses are generated directly in the fluid flowing through the fluidic member. The fluid can be chosen arbitrarily. Thus, for example, a gaseous fluid, in particular air, can be used. However, the fluid can also be a liquid fluid. If the fluid is air, the fluidic member therefore does not require any coupling medium, or in other words, generates ultrasonic pulses in the coupling medium. If the fluid is a gas different from air and the coupling medium is air, then the difference in acoustic characteristic impedance between the gas and the air is at least so small that no large reflections occur at the limiting interface between the fluid and the coupling medium. The disadvantageous consequences of the reflections mentioned at the outset are thus reduced. In particular, a significant portion of the generated ultrasonic signal is now actually provided.

Furthermore, movable parts for generating the oscillating fluid flow can be dispensed with, so that no costs and expenditure are incurred thereby. Furthermore, by eliminating movable parts, fluidic member vibration and noise generation according to the present invention is relatively small.

According to another embodiment, the at least one first outflow opening and the at least one second outflow opening of the separating device have different extensions (widths) in the oscillation plane and transversely to the fluid flow direction. Thus, for example, a particularly small extension (compared to the inlet opening of the separating device) in the plane of oscillation and transversely to the direction of the fluid flow can be selected for the at least one first outlet opening of the separating device in order to set a desired pulse width of the fluid flow pulses which flow out of the at least one first outlet opening of the separating device without an undesired pressure rise occurring in the separating device. Thus, the at least one first outflow opening of the separating apparatus can be arranged for outputting a part of the vibrating fluid flow as an ultrasonic signal, while the at least one second outflow opening of the separating apparatus can be arranged for outputting the remaining fluid flow. Accordingly, the at least one first outflow opening of the separating device can be designed according to the desired fluid flow pulse characteristics, while the at least one second outflow opening of the separating device can be designed arbitrarily within a range, in which case the fluid flow pulses flowing out of the at least one first outflow opening of the separating device are not impaired. In particular, therefore, the width (extension in the vibration plane and transverse to the fluid flow direction) of the at least one first outflow opening (which outputs the ultrasonic signal) can be smaller by 50% than the width of the at least one second outflow opening, wherein the height (extension transverse to the vibration plane) is respectively identical. In the case of different heights of the at least one first outflow opening and the at least one second outflow opening, the resulting cross section of the outflow openings is taken into account. Advantageously, the cross section of the at least one first outflow opening corresponds to 1/5 (or less) of the cross section of the at least one second outflow opening (at the same height and at different heights), and particularly advantageously the cross section of the at least one first outflow opening corresponds to 1/10 (or less) of the cross section of the at least one second outflow opening. The cross section of the at least one first outflow opening can even correspond to only 1/20 (or less) of the cross section of the at least one second outflow opening.

According to one embodiment, it can be provided that the separating device is arranged downstream of the outlet opening of the flow chamber. The flow chamber and the separating device can thus form two units, which can be formed together in one piece, for example. Alternatively, the two units can be constructed from two (or more) elements. In particular, the outflow opening of the flow chamber can correspond to an inflow opening of the separation device. Alternatively, the separation device can protrude into the flow chamber (through an outlet opening of the flow chamber).

A flow divider is provided between the at least one first outflow opening of the separating device and the at least one second outflow opening end of the separating device, said flow divider alternately diverting the oscillating fluid flow into the at least one first and at least one second outflow opening of the separating device. The flow splitter can have different shapes. Thus, the flow splitter can comprise a flat wall. Alternatively, the flow divider can comprise at least one curved wall, wherein a cross section of the at least one curved wall describes a curved arc in the vibration plane, which curves outwardly (concavely) as viewed in the direction of the fluid flow. By means of this embodiment of the flow divider, a binary or digital flow pattern of the fluid flowing out of the at least one first outflow opening of the separating device can be achieved. In order to further assist in the formation of the binary or digital flow pattern, it can be provided that the splitter and the wall adjoining the splitter and bounding the at least one first outflow opening of the separating device form an angle (viewed in the vibration plane) of less than 95 °, preferably less than 70 °, particularly preferably less than 45 °.

It is also conceivable that the splitter is formed wedge-shaped with two (flat or curved) faces and an edge, wherein the edge and the two faces extend at an angle (for example, substantially 90 °) to the plane of oscillation, and the two faces are angled in the plane of oscillation at an angle of less than 95 °, preferably less than 70 °, particularly preferably less than 45 °. The wedge extends into the separating device counter to the direction of the fluid flow.

The flow cell can have an extension perpendicular to the vibration plane, said extension being defined as the depth. The flow chamber is delimited in depth by a front wall and a rear wall opposite the front wall. The front wall and the rear wall can be oriented substantially parallel and coincident. In particular, the depth of the flow chamber (the spacing between the front wall and the rear wall) can be variable. For this purpose, the at least one delimiting wall (front wall and/or rear wall) which delimits the depth of the flow chamber can be made of a deformable (elastic) material. By applying an external force to the front and/or rear wall from outside the wall, the front and/or rear wall is deformed to reduce the depth of the flow chamber and is moved (in sections) into the flow chamber. It is also conceivable that the depth of the flow chamber is variable by a plunger-like displacement of at least one limiting wall (front wall and/or rear wall) which limits the depth of the flow chamber. Accordingly, the limiting wall of the flow chamber, which extends substantially perpendicularly to the vibration plane, likewise has to be variable, for example telescopically embodied.

According to another embodiment, the at least one first outflow opening of the separating apparatus is variable in its position, shape and/or size. It is to be noted here that the at least one outflow opening of the separating apparatus (and also the at least one second outflow opening of the separating apparatus) can be formed as a hole in a delimiting wall of the separating apparatus or as a channel. In this latter embodiment variant, the size of the flow opening is then defined at the point of the channel where the channel has the smallest cross section perpendicular to the direction of the fluid flow. In order to set a desired pulse width of the fluid flow pulse, the extent (width) of the fluid flow direction in the oscillation plane and transversely to the at least one first outflow opening can be varied. In order to set a desired pulse width of the fluid flow pulses, the extension (depth) of the vibration plane perpendicular to the at least one first outflow opening can also be varied. The smaller the width and depth of the at least one first outflow opening, the smaller the pulse width of the achieved fluid flow pulse.

The means for constituting the vibrations can, for example, comprise at least two bypass flow channels which are in fluid connection with the main flow channel of the flow chamber via an inlet and an outlet, respectively, and which extend between the respective inlet and the respective outlet, respectively. The at least two bypass flow channels (and the main flow channel) can be located in the vibration plane and thus in one plane. Alternatively, it is also possible for only one of the at least two bypass flow channels to lie in the oscillation plane. The oscillation profile of the generated oscillating fluid flow can be influenced by the specific design of the at least two bypass flow channels, for example by the length of the at least two bypass flow channels. The length of the path through which the fluid passes between the inlet of the bypass flow bypass channel and the outlet of the bypass flow bypass channel corresponds to the length of the bypass flow bypass channel. In particular, it can be provided that the at least two bypass flow channels have different lengths. In particular, it is thus possible to achieve: the fluid flow oscillating in the oscillation plane between two maximum deflections remains longer in the region of one maximum deflection than in the other maximum deflection. The greater the difference between the lengths of the at least two bypass flow channels, the greater the pulse spacing between two fluid flow pulses following each other. Thus, the length of a first of the at least two side flow bypass channels can be at least twice, preferably at least five times, as long as the length of a second of the at least two side flow bypass channels. However, significantly larger size differences, for example 2000 times or more, are also contemplated. Depending on, inter alia, the desired pulse spacing.

In order to increase the length of the bypass flow duct without changing the outer installation space of the bypass flow duct, a meandering extension can be provided in order to increase the path length of the fluid flowing through the bypass flow duct. An alternative to the meandering development can be provided by additional resistors, turbulators or swirl chambers in the bypass flow bypass duct.

The relative extension (width) in the oscillation plane and transversely to the flow direction of the at least two bypass flow channels and the relative extension (depth) of the oscillation plane perpendicular to the at least two bypass flow channels, as described above, can have a great influence on the oscillation profile of the oscillating fluid flow and thus on the pulse spacing. The parameters, i.e. the relative width, the relative depth and the relative length of the at least two bypass flow channels, can also be combined at will in order to shape the oscillation profile in a targeted manner.

At least one first outflow opening of the separating device can be provided in order to emit a part of the vibrating fluid flow as an ultrasonic signal, for example for measurement. In contrast, at least one second outlet opening of the separating device can be provided in order to discharge the remaining fluid flow and to guide it out of the fluidic component in order to avoid (undesired) pressure buildup in the separating device and the flow chamber. In order to avoid that the fluid flowing out of the at least one second outflow opening of the separating apparatus superimposes the pulses of the fluid flow exiting from the at least one first outflow opening of the separating apparatus, thereby disturbing the measurement of the pulses of the fluid flow for which the at least one first outflow opening is used, it can be provided that: in the region of the at least one second outflow opening of the separating device, a device for sound damping (for example, by means of an active or passive element) is provided, which absorbs or dampens the fluid flow pulses exiting through the at least one second outflow opening.

As already mentioned, temporally separate fluid flow pulses can be generated by the fluidic component. In particular, the fluidic component can be designed to generate an ultrasonic signal comprising pulses which have a temporal pulse spacing from one another and in each case have a half-value width, wherein the pulse spacing is greater than or equal to twice the half-value width, in particular greater than or equal to ten times the half-value width, particularly preferably greater than or equal to one hundred times the half-value width. Such an ultrasound signal has temporally well-separated ultrasound pulses which are suitable for ultrasound measurements. In principle, a large pulse interval is advantageous. The larger the pulse interval, the deeper the measurement can be made into the material to be examined. With the fluidic component according to the invention, it is also possible to generate ultrasonic pulses with a pulse interval that is greater than five thousand times the pulse width. In order to set the desired ratio of pulse intervals to pulse widths, the extension of the at least one first outflow opening of the separating device transversely to the fluid flow direction (in the outflow opening) and in the oscillation plane is selected to be particularly small (in particular smaller than a ratio of 1: 1) compared to the corresponding extension of the at least one second (third) outflow opening of the separating device, or the cross section of the at least one first outflow opening of the separating device is selected to be particularly small (in particular smaller than a ratio of 1: 1) compared to the cross section of the at least one second (third) outflow opening of the separating device.

A further embodiment provides that the means for generating vibrations of the fluid flow comprise means for providing a vibrating auxiliary fluid flow and at least one feed line which is in fluid communication on the one hand with the device and on the other hand with the flow chamber of the fluidic component in order to feed the auxiliary fluid flow to the flow chamber. In this case, the at least one supply line is arranged with respect to the flow chamber such that the auxiliary fluid flow flows into the flow chamber at an angle which is different from 0 ° to the fluid flow from the inlet opening to the outlet opening. Since the auxiliary fluid flow is provided by the device as an oscillating auxiliary fluid flow, the at least one delivery line delivers the auxiliary fluid flow to the flow chamber of the fluidic member in a temporally variable manner. By "variable in time" is meant here that at different points in time the amount of the auxiliary fluid flow delivered is different, since the delivery line conducts only a part of the auxiliary fluid flow which is subjected to vibration.

By means of this embodiment, which is in principle a coupling between two fluidic components, the oscillation frequency of the oscillating fluid flow can be decoupled from its volume flow (mass flow). For ultrasonic measurements, an ultrasonic signal is desired which has pulses which are clearly separated in time and have a small pulse width on the one hand, and which have the same intensity on the other hand, even when the spacing between the pulses following one another changes. The pulse interval is substantially related to the vibration frequency of the vibrating fluid flow, from which a portion is separated by means of a separating device to generate the pulses. The pulse intensity is related to the volume flow or inlet pressure. (the flow velocity in the component can be influenced by the inlet pressure or by the volume flow). If the pulse interval is to be changed, a change in the vibration frequency can be caused. However, this usually causes a change in the volume flow and thus also a change in the signal strength. This embodiment is suitable for decoupling the oscillation frequency of the oscillating fluid flow from its volume flow (mass flow) by coupling two fluidic components in such a way that: one fluidic member determines the volumetric flow (mass flow) and the other fluidic member (hereinafter referred to as the second fluidic member) determines the vibration frequency. Thus, pulse spacing and signal strength can be decoupled.

It is conceivable that the device for providing an auxiliary fluid flow comprises a second fluidic member comprising a flow chamber which is flowable by the auxiliary fluid flow, the auxiliary fluid flow entering the flow chamber through an inflow opening of the flow chamber and exiting the flow chamber through an outflow opening of the flow chamber. The second fluidic component can be designed such that it has at least one means for producing a vibration of the secondary fluid flow at the outlet opening (flow chamber of the second fluidic component), wherein the vibration can be carried out, for example, in a vibration plane. In particular, the at least one mechanism for constituting vibrations of the secondary fluid flow can comprise a bypass flow bypass channel in fluid communication with and extending between the main flow channel of the flow chamber (of the second fluidic member) via the inlet and the outlet. The second fluidic component can thus provide an auxiliary fluid flow oscillating in the oscillation plane, which is fed to the flow chamber of the fluidic component via the at least one feed line.

In order to be able to utilize the oscillating movement more effectively, the means for generating the oscillation of the fluid flow can comprise two supply lines which are in each case in fluid communication with the flow chamber on opposite sides of the flow chamber of the fluidic component. The auxiliary fluid flow can thus be guided from the sides opposite one another into the flow chamber of the jet member and act on the fluid flow flowing there from the inlet to the outlet and deflect it laterally from a substantially straight fluid flow direction (alternately in opposite directions).

In order to divert the oscillating secondary fluid flow, which flows out of the device for providing a secondary fluid flow (in particular from the second fluidic component), alternately into the two conveying lines, a second flow splitter (as part of the mechanism for constituting the oscillation of the fluid flow) can be provided downstream of the device. The second flow divider is designed and arranged in particular in relation to the device for providing the auxiliary fluid flow such that it separates a portion of the oscillating fluid flow at different times. For this purpose, the second flow divider has in particular a branching element which forms two branches, wherein the two branches are preferably arranged in the oscillation plane of the auxiliary fluid flow and are each in fluid communication with one of the two supply lines. The two supply lines are therefore flowed through by the auxiliary fluid flow in a time-staggered manner. The portion of the secondary fluid flow flowing from one side into the flow chamber of the fluidic member thus acts on the fluid flow flowing in the flow chamber of the fluidic member at a different point in time than the portion of the secondary fluid flow flowing from the opposite side into the flow chamber of the fluidic member. Thus, the fluid flow can be alternately deflected from the one or the other part of the secondary fluid flow and excited to vibrate (in one plane). In this embodiment, the fluidic component can also be referred to as a bistable coanda amplifier.

The pulse spacing of the fluid flow pulses exiting from the separation device can be influenced by the geometry of the mechanism for constituting the vibrations of the fluid flow, the shape of the flow splitter of the separation device and the relative cross-sectional dimensions of the associated outflow opening of the separation device, and the pulse width is additionally influenced by the shape of the fluidic member itself. The relevant outflow opening is the outflow opening of the separating device through which the fluid flow is applied as part of the useful signal. The pulse intensity can be substantially influenced by the inlet pressure at the inflow opening of the fluidic member.

The pulse width and the intensity of the useful signal exiting from the at least one first outflow opening of the separating device can be influenced by the so-called switching time of the fluid flow in the flow chamber of the fluidic component. The switching time is understood to be the duration of the time during which the fluid flow needs to flow from one side wall of the flow chamber, via which opening the flow chamber is in fluid communication with the conveying line, to the opposite side wall, which can likewise have such an opening. The switching time can be in the range below 10ms in order to obtain as small a pulse width as possible within 100 mus. For ultrasonic examination of concrete, pulse widths in the range between 50 and 5 μ s are of interest in particular.

As already mentioned, the frequency of the oscillation of the fluid flow emerging from the fluidic component determines, in particular, the pulse spacing. The vibration frequency is preset by the vibration frequency of the secondary fluid flow of the second fluidic member. The desired pulse spacing and thus the required vibration frequency can be varied. The speed of the measuring technique used is particularly decisive. Thus, in ultrasonic inspection of concrete, the pulse interval must be greater than the time required for the pulse to travel from the excitation system until the receiver system passes through the component to be inspected. Empirically, the pulse interval is at least 250 μ s and at most 10 ms. The fluidic member can be operated at a vibration frequency of 50Hz to 2000Hz if a portion is separated by means of a separation device from the vibrating fluid flow exiting the fluidic member approximately centrally between the maximum deflections of the vibrating fluid flow to generate the pulses. It is particularly preferred that the vibration frequency of the fluidic member lies between 100Hz and 1200Hz (corresponding to a pulse interval of about 416 mus to 5 ms).

According to a further embodiment, the separating device arranged downstream of the outflow openings of the fluidic component comprises at least one first outflow opening, at least one second outflow opening and at least one third outflow opening, through which the respective part of the oscillating fluid flow exits. In this case, a flow divider is provided between the at least one first outlet opening of the separating device, the at least one second outlet opening of the separating device and the at least one third outlet opening of the separating device, which flow divider alternately diverts the oscillating fluid flow into the at least one first, second and third outlet opening of the separating device. Preferably, a (first) outflow opening of the separating apparatus is located on an axis which extends substantially centrally between the maximum deflections of the oscillating fluid flow. Thus, the (first) outflow opening receives a portion of the vibrating fluid flow, which portion is located centrally between the maximum deflections of the vibrating fluid flow. Therefore, the time interval (and thus the pulse interval) at the point in time when a portion of the oscillating fluid flow enters the (first) outflow opening is substantially always the same size. In this case, the (first) outflow opening preferably has a smaller cross section than the remaining outflow openings of the separating apparatus. For example, the (first) outflow opening of the separating apparatus can be located on an axis interconnecting the inflow opening and the outflow opening of the fluidic member. However, the (first) outlet opening of the separating apparatus can also be located outside said axis. For applications where a constant pulse interval is not required, the (first) outflow can lie on an axis which extends between the maximum deflections of the oscillating fluid flow, arbitrarily (outside the central position), as follows: the fluid flow can flow into the (first) outflow opening. Here, the axis interconnecting the inlet and outlet of the fluidic member and the axis on which the (first) outlet is located can intersect at a point upstream of the (first) outlet. In this case, the pulse sequence has two alternating pulse intervals of different sizes.

The invention also relates to a device for generating an ultrasound signal. The device comprises on the one hand a fluid flow source for providing a fluid flow and on the other hand a fluidic member according to the invention for generating an ultrasonic signal. Here, a fluid flow source is in fluid communication with the inlet opening of the flow chamber of the fluidic component and provides a fluid flow through the fluidic component. Further, the fluid flow source can comprise a secondary fluid flow source for providing a secondary fluid flow, the secondary fluid flow source being in fluid communication with the inlet port of the flow chamber of the apparatus for providing a secondary fluid flow. The connection between the fluid flow source (secondary fluid flow source) and the fluidic member (device for providing a secondary fluid flow) can be designed to be disengageable. The fluid flow source (auxiliary fluid flow source) is capable of providing a fluid flow (auxiliary fluid flow) with an overpressure (compared to ambient pressure) of, for example, 0.025 bar. The fluid flow source (secondary fluid flow source) can in particular comprise a (controllable) valve or another regulating device in order to set the pressure of the fluid flow (secondary fluid flow) flowing out of the fluid flow source (secondary fluid flow source). The frequency of the fluid flow pulses generated can be adjusted by varying the inlet pressure.

The fluid flow source can in particular be a gas flow source which provides gas as the fluid for the fluidic member. The ultrasonic signal generated by the fluidic member can thus be generated in the gas and coupled into the body/object via the air gap without substantial losses due to reflections at the limited interface between the device for generating the ultrasonic signal and the surrounding air.

The fluid flow source can be diverse and vary depending on the particular application. It can be a pressure reservoir in which a fluid having a pressure higher than the ambient pressure is stored. The pressure reservoir can be mobile, for example a compressed gas cylinder or a compressed air cylinder. Alternatively, the fluid flow source can comprise an electrically or mechanically operated compressor, such as a diaphragm compressor, a screw or a gear compressor. It is also conceivable to branch off excess pressure (compared to the ambient pressure) from the entire machine, for example a subsystem of a vehicle.

The invention also relates to an ultrasonic measuring device having a device for generating an ultrasonic signal, a device for receiving an ultrasonic signal, and a signal processing unit for processing the received ultrasonic signal. Here, the device for generating an ultrasonic signal comprises a fluidic member according to the invention.

The ultrasonic measuring device can be operated by means of a gas as fluid. The degree of reflection of the generated ultrasonic signal at the limiting interface of the ultrasonic measuring device and the surrounding air can thus be significantly reduced. The disadvantageous consequences of the reflections mentioned at the outset are thus reduced. In particular, a large part of the generated ultrasound signals is now actually available for measurement. A higher measurement accuracy can be achieved by a higher intensity of the ultrasound signal leaving the ultrasound measuring device. A larger range of action can be covered. The improved measurement accuracy and range of action can be used, for example, in autonomous vehicle systems to detect the surroundings when the vehicle is parked or during driving, the driving speed of which is sometimes high.

The fluidic member according to the invention thus enables the transmission of ultrasound pulses to the body/object in an air-coupled manner. This effectively means: an ultrasonic measuring device comprising such a fluidic member does not need to contact the body/object. That is, in medical technology and material detection, an examination can be performed from a distance. This can be advantageous for hygiene, in particular in medical technology.

According to one embodiment, the device for receiving ultrasonic signals is designed to receive ultrasonic signals emitted by the device for generating ultrasonic signals and reflected outside the ultrasonic measuring device and a reference signal, wherein the reference signal is provided by the part of the fluid flow flowing out of the at least one second outflow opening of the separating device. The reference signal can be used as a trigger signal for the signal processing unit. For this purpose, the ultrasonic measuring device can have a device which is designed and designed to divert the part of the fluid flow flowing out of the at least one second outflow opening of the separating device or a part of this part to the device for receiving ultrasonic signals.

The invention also relates to a series of methods of operating an ultrasonic measuring device comprising a fluidic member according to the invention to generate an ultrasonic signal. The method is a method for contactless examination of an object or body by means of an ultrasonic measuring device and a method for determining the distance of an object from one or more other objects by means of an ultrasonic measuring device. The method for contactless examination of an object or body comprises: a method for examining material properties of a body in a measurement test; methods for non-invasive examination of the body in medical technology; and a method for controlling persons and objects in security technology, which can be used, for example, at airports. The invention also relates to a method for contactless cleaning of an object by means of a device for generating an ultrasonic signal, wherein the device for generating an ultrasonic signal comprises a jet member according to the invention.

Drawings

The invention is explained in detail below with the aid of embodiments with reference to the drawings.

The figures show:

fig. 1 shows a schematic illustration of an ultrasonic measuring device according to an embodiment of the invention and an object to be examined;

FIG. 2 shows a cross-sectional view through a fluidic member according to an embodiment of the present invention;

FIG. 3 shows a cross-sectional view through the fluidic member in FIG. 2 along line A' -A ";

FIG. 4 shows a cross-sectional view through a fluid chamber of a fluidic member according to another embodiment of the present invention;

FIG. 5 shows a cross-sectional view through a fluidic component according to another embodiment of the invention;

FIG. 6 shows a cross-sectional view through a fluidic member according to another embodiment of the present invention;

FIG. 7 shows a cross-sectional view through a fluidic member according to another embodiment of the present invention;

FIG. 8 shows a cross-sectional view through a fluidic member according to another embodiment of the present invention;

FIG. 9 shows a sectional view through a fluidic component according to a further embodiment of the invention

FIG. 10 shows a sectional view through a fluidic component according to a further embodiment of the invention

Fig. 11 shows a sectional view through a fluidic component according to a further embodiment of the invention.

Detailed Description

In fig. 1 an ultrasonic measuring device 1 and an object 2 to be examined are schematically shown. With the ultrasonic measuring device 1, on the one hand the position of the object 2 in space can be determined, and on the other hand the state of the object 2 (for example with respect to the discontinuity 21) can be checked. Fig. 1 also shows diagrammatically a method for contactless examination of an object (or body) 2 by means of an ultrasonic measuring device 1, and a method for determining a distance of a first object from a further object 2 by means of an ultrasonic measuring device 1. In the latter method, the distance of the ultrasonic measuring device 1 from the first object is known, for example because the ultrasonic measuring device 1 is arranged on the first object.

The ultrasonic measuring device 1 comprises a device 11 (transmitter) for generating an ultrasonic signal S, a device 12 (receiver) for receiving an ultrasonic signal S ', and a signal processing unit 13 for processing the received ultrasonic signal S'. The generated ultrasonic signal S is shown by a dashed line, and the ultrasonic signal S' to be received is shown by a dashed-dotted line. The ultrasonic measuring device 1 is oriented with respect to the object 2 such that the ultrasonic signal S generated by the transmitter 11 is directed towards the object 2. The ultrasonic signal S' to be received is the part of the generated ultrasonic signal S which is thrown (reflected) back from the object 2. In the embodiment of fig. 1, the transmitter 11, the receiver 12 and the signal processing unit 13 are accommodated in a housing 14. The housing 14 has a corresponding opening in order to emit the ultrasonic signal S generated by the device 11 for generating the ultrasonic signal S into the environment and in order to release the receiver 12 for the (reflected) ultrasonic signal S' to be received.

According to another embodiment, the receiver 12 can be located outside the housing 14. The receiver 12 can be arranged, for example, in the vicinity of the object 2 to be examined or directly on the object 2 to be examined. Exemplary locations are shown by dotted boxes in fig. 1. It is also possible to provide a plurality of receivers 12, which are spatially distributed so as to be able to receive different reflections.

The amplitude a of the generated ultrasonic signal S is also shown in the lower part of fig. 1 as a function of time t. This function can be interpreted as a deflection of the sound or sound pressure. At a maximum amplitude A_maxAnd a minimum amplitude A_minThe difference between corresponds to the intensity of the ultrasound signal S. The ultrasound signal S comprises pulses having a pulse width b and being separated in time. The pulse width b is the half-value width of the pulse. At the maximum amplitude A of a pulse_maxAnd the minimum amplitude A of the immediately following pulse_minThe time interval between is called the pulse interval T. Furthermore, the amplitude of the ultrasonic signal S' reflected by the object 2 is shown as a function of the time t. The reflected ultrasonic signal S' is staggered in time with respect to the generated ultrasonic signal S and has in contrast an increased half-value width b.

In order to generate temporally separated ultrasonic pulses, the apparatus 11 is used to generate an ultrasonic signal S, said apparatus comprising a fluid flow source 111 and a fluidic member 112 in fluid communication with each other. The ultrasonic signal S is generated directly in the fluid provided by the fluid flow source 111 and flowing through the fluidic member 112. The ultrasonic signal is a series of fluid flow pulses. The fluid flow source 111 is here a source of compressed gas, in particular compressed air. In the embodiment of fig. 1, the fluid flow source 111 is arranged in the housing 14 of the ultrasonic measuring device 1. Alternatively, the fluid flow source 111 can be disposed outside the housing 14 of the ultrasonic measuring device 1. The fluid stream source 111 is also releasably connectable to the fluidic member 112. The fluidic member 112 is adapted to generate ultrasonic pulses following each other with a pulse interval T corresponding to at least twice the pulse width b, preferably at least ten times the pulse width b, and particularly preferably at least 100 times the pulse width b. In order to obtain as high a resolution as possible in the ultrasound measurement, a small pulse width b is required. By means of the fluidic component 112, a small pulse width b can be set specifically for the desired field of application.

The fluidic member 112 is adapted to generate a sequence of fluid flow pulses having a frequency above 1 kHz. In order to determine the orientation of an object in space (i.e. with respect to at least one further object), a frequency range of up to 200kHz above 40kHz is suitable. For non-destructive material inspection of objects, frequencies up to 100MHz above 20MHz are suitable. For non-invasive examinations in medical technology, frequencies of 200kHz up to more than 1MHz are used. In this case, the mentioned frequency represents the reciprocal value of the pulse width b. In this case, a frequency higher than 20kHz, for example, indicates a pulse width b smaller than 1/20000 s.

Fig. 2 and 3 show an embodiment of a fluidic component 112 according to the invention. Here, fig. 2 is a sectional view through the fluidic member 112 parallel to the vibration plane of the fluidic member 112. Fig. 3 shows a cross-sectional view through the fluidic member in fig. 2 along line a-a' perpendicular to the plane of vibration.

The fluidic member 112 includes two subsystems 1000 and 2000, which are disposed in series along the direction of fluid flow and are in fluid communication with each other. Subsystems 1000 and 2000 can be formed in one piece or as individual elements. The subsystems 1000 and 2000 are virtually separated from each other in fig. 2 and 3 by a plane shown as a dotted line B. The first subsystem 1000 generates a fluid flow oscillating in an oscillation plane, and the second subsystem 2000 is constructed and arranged to separate a portion from the oscillating fluid flow generated by the first subsystem 1000 so as to generate temporally separated fluid pulses of defined pulse width b and having a defined pulse interval T from the oscillating fluid flow.

The first subsystem 1000 of the fluidic component 112 includes a flow chamber 1001 that can be traversed by a fluid flow. As already mentioned, the fluid flow is provided by a fluid flow source 111. The flow cell 1001 is also known as an interaction cell.

The flow cell 1001 includes: an inflow port 10011 through which a fluid flow enters the flow chamber 1001; and an outflow port 10012 through which fluid flows out of the outflow chamber 1001. The inlet 10011 and outlet 10012 are disposed between the front wall 1121 and the rear wall 1122 on two (fluidly) opposing sides of the fluidic member 1001. The front wall 1121 and the rear wall 1122 are substantially parallel to each other and oriented toward the vibration plane. The fluid flow is substantially along in the flow chamber 1001The longitudinal axis a of the subsystem 1000 of the fluidic member 112, which interconnects the inlet 10011 and the outlet 10012, moves from the inlet 10011 to the outlet 10012. Here, when the fluid flow enters the flow chamber 1001 or flows out of the flow chamber 1001 again, an inlet 10011 and an outlet 10012 are defined at a point of the flow chamber 1001 which has a smallest cross section transverse to the flow direction through which the fluid flow passes. The inflow opening 10011 has an inflow width b₁₀₀₁₁And the tap 10012 has a tap width b₁₀₀₁₂. The width is defined in the plane of vibration as being substantially perpendicular to the direction of fluid flow, i.e. perpendicular to the longitudinal axis a.

The distance along longitudinal axis a between inlet 10011 and outlet 10012 is the length l of flow chamber 1001₁₀₀₁. Width b of flow cell 1001₁₀₀₁Is the maximum extension of the flow cell 1001 in the plane of vibration transverse to the longitudinal axis a. Depth t of the flow cell 1001₁₀₀₁(fig. 3) is the extension of the flow cell 1001 transverse to the vibration plane and transverse to the longitudinal axis a. Said width b₁₀₀₁Can be in the range between 0.001mm and 200 mm. In a preferred variant embodiment, the width b₁₀₀₁Between 0.02mm and 10 mm. According to width b₁₀₀₁Length l is counted₁₀₀₁Preferably in the following ranges: 1/3 b₁₀₀₁≤l₁₀₀₁≤7*b₁₀₀₁。

Width of inflow b₁₀₀₁₁Is the width b of flow cell 1001₁₀₀₁1/3 to 1/30, preferably 1/5 to 1/15. Width b of outflow₁₀₀₁₂Is the width b of flow cell 1001₁₀₀₁1/3 to 1/50, preferably 1/3 to 1/20. Width b of outflow₁₀₀₁₂With volume flow, depth t of flow chamber 1001₁₀₀₁The inlet velocity or inlet pressure of the fluid and the desired vibration frequency of the outgoing fluid flow are selected in relation to each other. The preferred vibration frequency range is between 10kHz and 1000 kHz. Depth t of flow cell 1001₁₀₀₁Can be variable. By means of variable depth t₁₀₀₁The frequency of the generated ultrasonic signal can be set. Depth t of flow cell 1001₁₀₀₁For example, by plunger-type movement of the front wall 1121 and/or the rear wall 1122And (6) changing. Alternatively, the front wall 1121 and/or the rear wall 1122 can be designed to be resilient such that they move into the flow chamber 1001 due to an external force.

The flow chamber 1001 includes a primary flow channel 10013 that extends centrally through the flow chamber 1001 of the fluidic member 112. The main flow channel 10013 extends substantially straight along the longitudinal axis a such that the fluid flow in the main flow channel 10013 flows substantially along the longitudinal axis a of the subsystem 1000 of the fluidic member 112.

The main flow channel 10013 merges at its downstream end into an outlet channel 10017 which tapers downstream, as viewed in the plane of oscillation, and terminates in an outflow 10012.

In order to create a vibration of the fluid flow at the outlet 10012 of the flow chamber 1001, the flow chamber 1001 illustratively includes two bypass channels 10014a, 10014 b. In this case, the main flow channel 10013 (viewed in the plane of oscillation and transversely to the longitudinal axis a) is arranged between the two bypass channels 10014a, 10014 b. The flow chamber 1001 is divided directly downstream of the inlet 10011 of the flow chamber 1001 into a main flow channel 10013 and two bypass channels 10014a, 10014b, which then converge directly upstream of the outlet 10012 of the flow chamber 1001. The two bypass channels 10014a, 10014b are here illustratively identically shaped and symmetrically arranged about the longitudinal axis a. Alternatively, the bypass channel can be asymmetrically shaped, as explained later in connection with fig. 4.

Starting from the inflow opening 10011 of the flow chamber 1001, in the first section, the bypass channels 10014a, 10014b each extend first in opposite directions at an angle of substantially 90 ° to the longitudinal axis a. Subsequently, the bypass channels 10014a, 10014b are bent such that they each extend substantially parallel to the longitudinal axis a (toward the outlet 10012 of the flow chamber 1001) (second section). In order to converge the bypass channels 10014a, 10014b and the main flow channel 10013 again, the bypass channels 10014a, 10014b change their direction again at the end of the second section such that they are each directed substantially toward the longitudinal axis a (third section). In the embodiment of fig. 2, the direction of the bypass channels 10014a, 10014b changes at an angle of approximately 120 ° when transitioning from the second segment to the third segment. However, to change the direction between the two sections (and between the first and second sections) of the bypass channels 10014a, 10014b, angles other than those mentioned herein can also be selected.

The bypass channels 10014a, 10014b are means for influencing the direction of the fluid flow through the flow chamber 1001 and, ultimately, for creating vibrations of the fluid flow at the outlet 10012 of the flow chamber 1001. To this end, the bypass channels 10014a, 10014b each have an inlet 10014a1, 10014b1 formed through the end of the bypass channel 10014a, 10014b facing the outlet 10012 and an outlet 10014a2, 10014b2 formed through the end of the bypass channel 10014a, 10014b facing the inlet 10011. Through the inlets 10014a1, 10014b1, a small portion of the fluid flow, i.e., the bypass flow, flows into the bypass channels 10014a, 10014 b. The remainder of the fluid flow (the so-called primary flow) exits the first subsystem 1000 of the fluidic member 112 via the outlet 10012 of the flow chamber 1001. The bypass flow exits the bypass channels 10014a, 10014b at the outlets 10014a2, 10014b2 where it can impart a lateral (transverse to the longitudinal axis a) pulse to the fluid flow entering through the inlet 10011 of the flow chamber 1001. In this case, the direction of the fluid flow is influenced in such a way that the main flow emerging at the outlet 10012 of the flow chamber 1001 oscillates in space and/or time. The vibrations occur in one plane, the so-called vibration plane. The oscillating fluid flow moves in the oscillation plane between two maximum deflections, which form the so-called oscillation angle.

In the embodiment of fig. 2, the main flow channel 10013 and the bypass channels 10014a, 10014b are arranged in the plane of oscillation. However, the bypass channel can also be arranged outside the vibration plane. The bypass channel can be realized, for example, by means of a hose outside the vibration plane or by a channel running at an angle to the vibration plane. Furthermore, one or more additional bypass channels can be provided, which are arranged in such a way that they form a direct connection of the fluid flow source 111 or the inflow opening 10011 surrounding the flow chamber 1001 to the region of the inflow openings 10014a1, 10014b1 of the bypass channels 10014a, 10014b (or to the region surrounding the inlets 10014a1 or 10014b1) in order to thus generate a counter pressure inside there. The pulse interval T can be adjusted by this measure.

The bypass channels 10014a, 10014b in the embodiment variants shown here each have a cross section (transverse to the fluid flow direction of the fluid flowing through them) which is approximately constant over the total length of the bypass channels 10014a, 10014b (from the respective inlet 10014a1, 10014b1 to the respective outlet 10014a2, 10014b 2). However, the cross section can also be non-constant. The effect of the non-constant cross-section will be described later. In contrast, the size of the cross section of the main flow channel 10013 increases substantially continuously in the flow direction of the main flow (i.e., the direction from the inlet 10011 to the outlet 10012).

The main flow channel 10013 is separated from each bypass channel 10014a, 10014b by an internal block 10016a, 10016 b. In the embodiment of fig. 2, the two blocks 10016a, 10016b are identical in shape and size and are arranged symmetrically to the longitudinal axis a. In principle, however, they can also be designed differently and/or oriented asymmetrically. An example of this is shown in figure 4. When the blocks 10016a, 10016b are asymmetrically oriented, the shape of the main flow channel 103 is also asymmetrical with respect to the longitudinal axis a.

The shape of the blocks 10016a, 10016b illustrated in fig. 2 is merely exemplary and can vary. The blocks 10016a, 10016b of fig. 2 have rounded edges. Thus, the pieces 10016a, 10016b have radii 10019a, 10019b at their ends facing the inflow opening 10011 and the main flow channel 10013 of the flow chamber 1001, respectively. The edge can also be not rounded or have a radius of approximately zero. Downstream, the spacing of the two inner blocks 10016a, 10016b from each other is along the width b of the flow chamber 1001₁₀₀₁The enlargement continues so that they enclose (viewed in the vibration plane) the wedge-shaped main flow channel 10013. The minimum distance between the two inner blocks 10016a, 10016b is in principle at the upstream end of the inner blocks 10016a, 10016 b. Due to the radii 10019a, 10019b, the minimum spacing is slightly downstreamAnd (4) moving. The width of the main flow channel 10013 at its narrowest point (between the blocks 10016a, 10016 b) is greater than the width b of the inflow opening 10011 of the flow chamber 1001₁₀₀₁₁。

The shape of the main flow channel 10013 is formed in particular by the inwardly directed faces of the blocks 10016a, 10016b (towards the main flow channel 10013), which faces extend substantially perpendicular to the plane of vibration. The inwardly directed face can have a (slight) curvature or can be formed by one or more radii, a polynomial fit and/or one or more flat faces or a mixture thereof.

At the inlets 10014a1, 10014b1 of the bypass channels 10014a, 10014b, separators 10015a, 10015b are provided in the form of notches (which project into the flow chamber). From a flow perspective, the separator is convex. In this case, at the inlet 10014a1, 10014b1 of each bypass channel 10014a, 10014b, a respective recess 10015a, 10015b projects into the respective bypass channel 10014a, 10014b via a section of the circumferential edge of the bypass channel 10014a, 10014b and changes its cross-sectional shape at this point in order to reduce the cross-section. In the embodiment of fig. 2, the section of the circumferential edge is selected such that each recess 10015a, 10015b (in particular also) points toward the inflow opening 10011 of the flow chamber 1001 (oriented substantially parallel to the longitudinal axis a). Depending on the application, the separators 10015a, 10015b can be oriented differently or can also be omitted entirely. The separators 10015a, 10015b can also be provided on only one of the bypass flow conduits 10014a, 10014 b. The pulse interval T and the pulse width b can be set. The separation of the side stream from the main stream is influenced and controlled by the separators 10015a, 10015 b. The shape, size, and orientation of the separators 10015a, 10015b can affect the amount of fluid flowing into the bypass channels 10014a, 10014b and the direction of the bypass flow. This in turn affects the outflow angle (and thus the vibration angle) of the main flow at the outlet 10012 of the flow chamber 1001 (i.e., the first subsystem 1000 of the fluidic member 112) and affects the frequency at which the main flow vibrates at the outlet 10012. By selecting the size, orientation and/or shape of the separators 10015a, 10015b, the profile of the fluid flow exiting at the outlet 10012 of the flow chamber 1001, and thus the pulse width b of the subsequently generated fluid flow pulses, can be specifically influenced. It is particularly advantageous if the separators 10015a, 10015b (viewed along the longitudinal axis a) are arranged downstream of the point at which the main flow separates from the inner masses 10016a, 10016b and a part of the fluid flow flows into the bypass channels 10014a, 10014 b.

The bypass channel is just one example of a mechanism for constituting the vibration of the outgoing fluid flow. Other means known in the prior art for generating vibrations of the outgoing fluid flow can also be used, for example means which generate vibrations by means of impinging fluid jets or by interacting vortices or recirculation zones, or other means for generating vibrations of the fluid flow without bypass channels. In particular, the fluidic member can be a so-called feedback-free vibrator. A fluidic component having a bypass channel as a means for generating vibrations of the outgoing fluid flow has the following advantages: a vibrating fluid flow with a vibration frequency higher than 20kHz can be reliably generated.

Upstream of inflow opening 10011 of flow chamber 1001, a funnel-shaped cuff 10018 is connected, which tapers (in the plane of oscillation) toward inflow opening 10011 (downstream). The bounding walls of the funnel shaped cuff 10018 that extend substantially perpendicular to the plane of vibration are angled. The flow chamber 1001 is also tapered upstream (in the plane of vibration) of the tap 10012. The taper is formed by the already mentioned outflow channel 10017, which extends between the inlet 10014a1, 10014b1 of the bypass channel 10014a, 10014b and the outflow 10012 of the flow chamber 1001. In fig. 2, the inlets 10014a1, 10014b1 of the bypass channels 10014a, 10014b are preset by the separators 10015a, 10015 b. The bounding walls of the outflow channel 10017, which extend substantially perpendicularly to the vibration plane, enclose an angle.

According to fig. 2, the funnel-shaped cuff 10018 and the outflow channel 10017 are tapered such that only their width, i.e. their extension perpendicular to the longitudinal axis a in the plane of oscillation, respectively decreases downstream. Additionally, the funnel-shaped cuff 10018 and the outflow channel 10017 can also follow the depth t of the flow chamber 1001 downstream₁₀₀₁Tapered, i.e. perpendicular to the plane of vibration and perpendicular to the longitudinal axis a. Furthermore, only the cuff 10018 canCan be tapered in width or depth while the outflow channel 10017 is tapered in width and depth, and vice versa. The degree of taper of the outlet channel 10017 affects the directional characteristics of the fluid flow exiting the outlet 10012 of the flow chamber 1001. The shape of the funnel-shaped cuff 10018 and the outflow channel 10017 is only shown by way of example in fig. 2. In this case, the width thereof decreases linearly downstream in each case. Other shapes of the taper are also possible.

The outlet 10012 of the flow chamber 1001 is rounded by a radius 10019. The radius 10019 is not equal to 0. In other embodiments, the radius 10019 can be equal to 0, so that the outlet 10012 is sharp.

Inlet 10011 and outlet 10012 each have a rectangular cross-section (transverse to longitudinal axis a). The inlet and outlet are respectively provided with the same depth t₁₀₀₁(i.e., the depth of flow cell 1001), but at its width b₁₀₀₁₁，b₁₀₀₁₂The aspects are different. Alternatively, non-rectangular cross-sections of the inlet 10011 and outlet 10012, such as circular cross-sections, are also contemplated.

With the aid of the first subsystem 1000, a vibrating fluid flow is generated at the outlet 10012 of the flow chamber 1001, which fluid flow vibrates at a specific vibration frequency in the vibration plane between two maximum deflections with a vibration angle. The vibration frequency has a large influence on the pulse interval T between fluid flow pulses generated by means of the second subsystem 2000.

The second subsystem 2000 is disposed downstream of the first subsystem 1000. The second subsystem 2000 of the fluidic member 112 can also be referred to as a separation device. The separation device 2000 comprises a separation chamber 2001 having an inlet 20011, a first outlet 20012 and a second outlet 20013. In principle, the separating chamber 2001 can also have more than two outflow openings. The outlet 10012 of the flow chamber 1001 corresponds here to the inlet 20011 of the separation chamber 2001. The first and second outflow openings 20012, 20013 are formed as outflow channels extending from the separation chamber 2001.

The vibrating fluid flow enters the separation chamber 2001 through an inlet 20011. A portion of the fluid flow exits the separation device 2000 through a first outflow 20012 and a second outflow 20013, respectively. Between the first and second outflow 20012, 20013 a flow divider 20014 is provided, which alternately (alternately) diverts the oscillating fluid flow into the first and second outflow 20012, 20013 of the separating device 2000. Because the flow splitter 20014 splits the oscillating fluid flow into two spatially separated outlets 20012, 20013, a pulse of fluid flow is generated, respectively. Preferably, the velocity of the fluid flow in the outflow 20012, 20013 is periodically briefly approximated to 0 or it is strongly reduced (for example by 75% of the maximum velocity). It is particularly advantageous if the direction of flow of the fluid changes briefly periodically, i.e. the sign of the velocity field changes briefly periodically along the direction of flow of the fluid.

Thus, the part of the fluid flow that can be used for example for measurement flows out of the first outflow 20012 in the form of an ultrasonic signal. The remaining signals, which are not necessarily used for measurements, escape from the second outflow 20013. In the second outflow channel 20013, e.g. on its inner surface, sound attenuating material or an attenuating system is provided in order to attenuate the remaining signal and improve the quality of the measurement for which the ultrasonic signal from the first outflow 20012 can be provided.

In the embodiment shown in fig. 2, approximately half of the fluid flow flowing into the separation chamber 2001 via the inflow opening 20011 flows through the first outflow opening 20012. The remainder of the fluid flow exits the separator device 2000 through a second outflow 20013. However, the remaining signals exiting from the second tap can also be used. The fluid flow pulse exiting from the second outflow 20013 can be used, for example, as a trigger signal and be diverted toward the receiver 12 of the ultrasonic measuring device 1. The detected trigger signal can be used by the signal processing unit 13. Another possibility of intercepting the trigger signal, which indicates when an ultrasonic signal is emitted through the first outflow 20012, can be achieved by a measuring device, which is arranged, for example, in the flow chamber 1001 of the first subsystem 1000, for example, in one of the bypass channels 10014a, 10014 b. However, the remaining signals exiting from the second tap 20013 can also be used for measurements, in particular along another spatial direction.

The first outlet channel 20012 and the second outlet channel 20013 are shaped such that the part of the fluid flow flowing out of the first outlet channel 20012 and the part of the fluid flow flowing out of the second outlet channel 20013 of the separation device are along the axis R, respectively₁、R₂Orientation of axis R₁、R₂Diverging in the direction of fluid flow. In the embodiment of fig. 2, two axes R₁、R₂Forming an angle of substantially 90 with each other. Other angles are also possible.

In this embodiment variant, the separation chamber 2001 is shaped divergently in the direction of the fluid flow. The separation chamber 2001 can be designed in such a way that a vortex flow is generated in the separation chamber 2001 in order to set the pulse width b and the pulse interval T of the fluid flow pulses, which exit from the separation chamber 2001 via the first outflow opening 20012, in a targeted manner. The design of the separating chamber 2001 suitable for generating a vortex flow will be discussed later. The vortex can be generated solely by the shape of the separation chamber 2001 or in cooperation with the diverter 20014. The vortex assists in the velocity reduction or velocity reversal of the fluid flow in the outlets 20012, 20013. It is thus possible to assist in the formation of a binary flow pattern in the outflow openings 20012, 20013, and thus to generate a fluid flow pulse sequence with pulses having as steep a pulse rise as possible and a small pulse width b.

In order to set a desired pulse width b of the fluid flow pulse exiting the separation chamber 2001 through the first outflow opening 20012, the width of the first outflow opening 20012 (extension in the plane of oscillation and transverse to the direction of fluid flow) and the depth of the first outflow opening 20012 (extension transverse to the plane of oscillation) can be varied. The width and depth of the first outflow opening 20012 are defined here at the point of the channel-like outflow opening 20012 where the cross section of the channel transverse to the flow direction is smallest. To set the pulse width, the width and depth of the channel at its downstream end can also be varied. The smaller the width and depth mentioned are chosen, the smaller the pulse width b.

Pulse interval T and pulseThe punch width b is determined in part by the position of the diverter 20014. Thus, the spacing l between the inflow opening 20011 and the flow diverter 20014 of the separation chamber 2001₂₀₀₁Can be varied (along the longitudinal axis a) in order to adjust the pulse width b. Here, the flow diverter 20014 is able to move, i.e. change its position, in the plane of vibration relative to the inlet 20011. The displacement can be carried out only along the longitudinal axis a, only transversely to the longitudinal axis a, or both. Furthermore, the flow diverter 20014 can be rotated by an angle κ about an axis extending perpendicular to the plane of vibration and located in the center of the inflow opening 20011 of the separation chamber 2001. This rotation and movement in the plane of vibration of the shunt 20014 is shown in figure 2 by dotted lines. The distance l between the inflow opening 20011 of the separation chamber 2001 and the flow diverter 20014₂₀₀₁By rotating the shunt 20014 through the angle k, while remaining unchanged, the pulse interval T is increased and typically the pulse width b is decreased, and vice versa, depending on the temporal vibration characteristics of the fluidic member 112. Here, how the pulse width b varies in particular depends on the vibration of the fluid flow flowing out at the outflow port 10012/flowing in at the inflow port 20011.

The shunt 20014 can be configured differently. The embodiment of the flow splitter 20014 shown in fig. 2 produces a substantially binary or digital flow pattern. Here, the fluid diverter 20014 has a face or wall that curves outwardly in the direction of fluid flow. Alternatively, the flow diverter 20014 can have a wedge with (sharp or rounded) edges, which projects into the separating chamber 2001 counter to the direction of the fluid flow.

Fig. 4 shows a sectional view of a first subsystem 1000 according to a further embodiment. The subsystem 1000 can be used in combination with a second subsystem 2000 (e.g., the second subsystem 2000 in fig. 2) as a fluidic member to generate ultrasonic signals for the ultrasonic measurement device 1. In this embodiment, the preferred vibration frequency range lies between 10Hz and 2000 Hz. In combination with the subsystem 2000, a high frequency excitation signal can be generated from the vibrating fluid flow having a low vibration frequency. The first subsystem 1000 in fig. 4 differs from the first subsystem 1000 in fig. 2 in particular by the flow chamber 1001Asymmetrical about the longitudinal axis a. Thus, the bypass conduit 10014b (shown on the right in fig. 4) is longer than the other bypass conduit 10014a (shown on the left in fig. 4). To achieve this, the inner blocks 10016a, 10016b are shaped differently. In particular, one inner block 10016b (shown on the right in fig. 4) is larger than the other inner block 10016a (shown on the left in fig. 4). Regular, complex vibrations are generated at the outlet 10012 of the flow chamber 1001 in fig. 4. In the course of time, the fluid flow oscillates unevenly. Rather, the fluid flow is only momentarily located in the one (maximum) deflection (e.g. on the right side), while it is located in the other (maximum) deflection (e.g. on the left side) for a relatively longer time. The position of the vibrating fluid flow between these two maximum deflections (+ and-) in relation to the time t is schematically shown in the diagram in fig. 4. The ratio X of the dwell time duration in the further (maximum) deflection to the dwell time duration in the one (maximum) deflection_TThe pulse interval T is substantially determined. At pulse interval T and factor X_TThere is an approximately proportional relationship between them.

Factor X_TAre influenced by various geometric parameters of the flow chamber 1001, in particular by the length (the extent in the direction of fluid flow between the inlet 10014a1, 10014b1 and the outlet 10014a2, 10014b2), the width (the extent in the plane of oscillation and transversely to the direction of fluid flow) and the depth (the extent transversely to the plane of oscillation), the shape of the bypass channel 10014a, 10014b or the inwardly (towards the main flow channel 10013) directed faces of the inner mass 10016a, 10016 b. Factor X_T(and thus the pulse interval T) is here proportional to the length ratio of the two bypass channels 10014a, 10014 b.

Different pulse intervals T are required depending on the field of application. In order to increase the length ratio of the two bypass channels 10014a, 10014b, the structural space outside the bypass channels 10014a, 10014b or the width b of the flow chamber 1001 is not greatly changed here₁₀₀₁One of the two bypass channels 10014a, 10014b can be designed to be tortuous in order to increase the path length of the fluid flowing through. In addition, can increaseFactor X_TThe method comprises the following steps: an additional resistor or turbulator or swirl chamber is formed in one of the two bypass channels 10014a, 10014 b.

In order to be able to use the ultrasonic signal generated by means of the fluidic component for determining the spacing, it is advantageous if the length ratio of the two bypass channels 10014a, 10014b is at least 2, and in particular at least 5. However, the length ratio of the two bypass channels 10014a, 10014b can also be much greater than 2000. It should be noted here that the pulse width b and the pulse interval T are also relevant for the design of the second subsystem 2000.

Further, the pulse interval T and pulse width b can be set by connecting the first subsystem 1000 and/or fluidic member 112 in series. In this case, the outflow 10012(20012) of the first subsystem 1000 (of the fluidic member 112) can be in fluid communication with the inflow 10011 of another first subsystem 1000 or fluidic member 112, etc.

Furthermore, the pulse interval T can be set by a movement of the outflow 10012 in the oscillation plane and transversely to the direction of fluid flow (transversely to the longitudinal axis a), for example to the left. Therefore, the temporal vibration characteristics of the fluid flow can be changed so that the aforementioned regular complex vibration can be generated.

Fig. 5 shows a sectional view through a fluidic component 112 according to another embodiment. The fluidic component 112 in fig. 5 differs from the fluidic component 112 in fig. 2 in particular in that the second subsystem 2000 projects into the first subsystem 1000. Specifically, the flow splitter 20014 of the second subsystem 2000 extends into the flow chamber 1001 of the first subsystem 1000. The inlets 10014a1, 10014b1 of the bypass channels 10014a, 10014b do not branch off from the main flow channel 10013 of the flow chamber 1001, but from the separation chamber 2001.

The diverter 20014 can have a different shape than the design in fig. 5, which can be constructed, for example, like the diverter 20014 in fig. 2. The bypass channels 10014a, 10014b have different lengths, as in the embodiment of fig. 4. The embodiment in connection with fig. 4 is applicable to the bypass channels 10014a, 10014b of fig. 5 accordingly.

Separation chamber 20The first outlet 20012 and the second outlet 20013 of 01 are each formed as a channel. Here, the two channels 20012, 20013 are shaped and oriented such that the part of the fluid flow flowing out of the first outflow 20012 of the separating device 2000 and the part of the fluid flow flowing out of the second outflow 20013 of the separating device 2000 are along the axis R, respectively₁、R₂Orientation wherein the axis R₁、R₂Forming an angle exceeding 90 deg..

The embodiment in fig. 6 substantially corresponds to the embodiment in fig. 5 and differs from the latter only in the axis R₁、R₂In the orientation of (c). Thus, in the embodiment of fig. 6, the axis R₁、R₂Forming an angle of less than 90 deg. (between 0 deg. and 90 deg.).

Fig. 7 shows a sectional view through a further embodiment of the fluidic component 112. In this embodiment, a preferred vibration frequency range lies between 10Hz and 2000 Hz. The fluidic component 112 can also be designed as a settable fluidic component 112. The fluidic member 112 basically includes a first subsystem 1000 and a second subsystem 2000. The second subsystem 2000 differs from the second subsystem of fig. 2, 5 and 6 in particular in that the separation chamber 2001 has more than two outflow openings, in this case in particular four outflow openings 20012a, 20012b, 20013. Any number of outflow openings other than four is also possible.

Here, the vibrating fluid flow also flows from the outlet 10012 of the flow chamber 1001 of the first subsystem 1000 into the separation chamber 2001 of the second subsystem 2000 (of the separation apparatus). The outlet 10012 of the flow chamber 1001 corresponds to the inlet 20011 of the separation chamber 2001. The separating chamber 2001 is delimited by delimiting walls 20017 and 20018, which each extend substantially perpendicularly to the plane of oscillation. Optionally, the separating chamber 2001 can also be delimited by a lower and/or upper delimiting wall which extends substantially parallel to the plane of oscillation. In this case, the separating chamber 2001 can also be designed such that a bypass flow in the form of a vortex is produced in a targeted manner there. The vortices can be generated by cavities or projections in the bounding walls 20017 and/or 20018. Another possibility for the targeted generation of vortices is the use of so-called turbulators which are arranged at the bounding walls 20017 and/or 20018.

The inflow opening 20011 of the separating chamber 2001 is designed as a discontinuity in the first delimiting wall 20018. A second limiting wall 20017, which is arranged at a distance from the inflow opening 20011 of the separation chamber 2001 (and is concavely curved from the point of view of the fluid), also forms a flow divider in this case. In the second limiting wall 20017, a cutout is formed which opens into the channel-like first outflow opening 20012 a. A portion of the oscillating fluid flow is diverted into the channel-like first outflow opening 20012a, where it forms an ultrasonic signal with a defined pulse width b and a defined pulse interval T. The generated ultrasonic signal exits the separating device 2000 through the channel-shaped first outflow opening 20012a and can be provided, for example, for measurement or also for providing a trigger signal. The interruption in the second limiting wall 20017 is arranged at a distance l from the inflow opening 20011 of the separating chamber 2001₂₀₀₁(not here along the longitudinal axis). Furthermore, the interruption is displaced from the longitudinal axis a such that the distance l₂₀₀₁At an angle k to the longitudinal axis a. By changing the position of the channel-like first outflow opening 20012a, i.e. by changing the angle k and the spacing l₂₀₀₁The pulse interval T can be basically set while the first subsystem 1000 is held. A radius 20019 can be formed at the upstream end of the channel-shaped first outflow 20012 a. The shape of the ultrasound pulse (i.e. the time-dependent intensity of the pulse) can be influenced by the size of the radius 20019. The smaller the radius 20019, the faster the intensity of the pulse increases, i.e. the steeper the rise of the pulse. Accordingly, the pulse width b decreases.

The channel-like first outflow opening 20012a has a width (extension in the vibration plane and transverse to the direction of the fluid flow) and a depth (extension transverse to the vibration plane). The channel-like first outflow opening 20012a and its cross section can be formed arbitrarily. Thus, the cross section can be rectangular, for example. A substantially circular cross section is advantageous, in particular also at the downstream end of the channel-like first outflow 20012 a. In general, for all embodiments of the separating device 2000, a circular cross section is advantageous at least for the first outflow 20012 of the separating chamber 2001, through which first outflow 20012 the useful signal exits. By varying the width and depth of the channel-shaped first outflow opening 20012a, in particular the pulse width b of the fluid flow through the channel-shaped first outflow opening 20012a can be set. The width of the channel-like first outflow opening 20012a should in particular be less than or equal to 150% of the width of the inflow opening 20011 of the separation chamber 2001, preferably less than or equal to the width of the inflow opening 20011 of the separation chamber 2001, and particularly preferably less than or equal to 75% of the width of the inflow opening 20011 of the separation chamber 2001. Here, the width of the channel-like first outflow opening 20011a is defined at the location having the smallest cross-section through which the fluid flows when flowing through the channel-like first outflow opening 20012 a.

According to one embodiment, the position of the channel-like first outflow opening 20012a is settable, so that the pulse interval T for the desired field of application can be set. According to a further embodiment, the cross-sectional shape and the cross-sectional size of the channel-like first outflow 20012a (in general at the downstream end or at the upstream end) are settable, so that a desired pulse width b can be set.

In the embodiment variant shown here, a further channel-shaped first outflow opening 20012b branches off from the channel-shaped first outflow opening 20012 a. By means of a further channel-like first outflow opening 20012b, a part of the useful signal can be diverted in a direction different from the direction defined by the channel-like first outflow opening 20012 a. The useful signal leaving there can therefore be used for different measurement directions. The width and depth of this further channel-like first outflow opening 20012b can also differ from the channel-like first outflow opening 20012a, so that the useful signal leaving there has a (slightly) different pulse interval T and a (slightly) different pulse width b. Alternatively, a further channel-like first outflow opening 20012b can be used to provide the trigger signal.

Furthermore, the separating chamber 2001 has two second outflow openings 20013, through which the remaining signals can escape along the longitudinal axis a in each case in the opposite direction to the direction of the fluid flow present in the flow chamber 1001.

It is also conceivable that the separation chamber 2001 has a plurality of (channel-like) first outflow openings 20012, which can each be used for different measuring directions, in order to generate ultrasonic signals with different pulse intervals T and/or pulse widths b and to emit trigger signals. The directional characteristic can be influenced by the number and direction of the channel-like first outflow openings 20012.

The first subsystem 1000 has differently shaped inner blocks 10016a, 10016b than the first subsystem 1000 of fig. 2-6, whereby the shape of the main flow channel 10013 is also changed. Furthermore, the first subsystem 1000 in fig. 7 (as compared to the first subsystem 1000 in fig. 2) does not have a splitter. The first subsystem 1000 in fig. 7 may be replaced by another embodiment of the first subsystem 1000.

Fig. 8 shows a sectional view of a fluidic component 112 according to another embodiment. The fluidic member 112 comprises a first subsystem 1000 which differs from the embodiment of the previous figures. In the first subsystem 1000 in fig. 8, the mechanism for creating the vibrations is formed by two bypass channels 10014a, 10014b, which are directly connected to the inflow opening 10011 and are separated from one another by an internal mass 10016. The bypass channels 10014a, 10014b generate two separate fluid jets which are oriented by the shape of the bypass channels 10014a, 10014b such that they converge in the flow chamber 1001 and there generate an oscillating fluid jet which exits the flow chamber 1001 at the outlet 10012 of the flow chamber 1001. In principle, different first subsystems 1000 of different embodiments are interchangeable.

The second sub-system 2000 is similar to the second sub-system 2000 in fig. 7, and differs from the latter in particular in that the second limiting wall 20017 (which also forms a flow divider) does not have a continuous interruption (for forming the channel-like first outflow opening 20012), but rather the second limiting wall 20017 has two curved surfaces which each curve outward (from the fluid flow) and between which the channel-like first outflow opening 20012 is formed. The channel-like first outflow opening 20012 at its upstream end encloses an angle ξ, which in this embodiment is very sharp, with the curved surface of the second limiting wall 20017. At the upstream end of the channel-like first outflow opening 20012, sharp edges 20019 are thus formed with the curved surfaces of the second limiting walls 20017. As already explained in connection with fig. 7, the rising of the pulse is influenced on the one hand and the pulse width b on the other hand by the edge 20019. The angle ξ defined by the channel-like first outflow opening 20012 and the second bounding wall 20017 should therefore be less than 95 °, preferably less than 70 °, particularly preferably less than 45 °. The land 20019 forms a shunt 20014.

Fig. 9 shows a further embodiment of the fluidic component 112 again in a sectional view. Here, the fluid flow is divided by a plurality of flow splitters 20014 which project into the flow chamber 1001 of the first subsystem 1000. Here, different arrangements and shapes of the shunt 20014 are possible, as exemplarily shown by the dashed lines in fig. 9.

In the respective fig. 1 to 9, different embodiments of the first subsystem 1000 and of the second subsystem 2000 are shown in specific combinations. However, the first subsystem 1000 and the second subsystem 2000 can be interchanged, such that any combination of the first subsystem 1000 and the second subsystem is possible. The shape of the first subsystem shown in fig. 1-9 is merely exemplary. Alternatively, a fluidic vibrator can also be used, which generates vibrations by means of impinging fluid jets or interacting turbulence or recirculation regions, or has another mechanism for forming vibrations of the fluid flow than the bypass channel (fluidic component without feedback).

Fig. 10 shows a sectional view through a fluidic component 112 according to another embodiment. The fluidic component 112 in fig. 10 differs from the fluidic component 112 in fig. 2 in particular in the design of the means for generating the oscillation of the fluid flow. Whereas in the embodiment of fig. 2 two bypass channels 10014a, 10014b are provided, which are in fluid communication with the main flow channel 10013 of the flow chamber 1001, in the embodiment of fig. 10 the mechanism 10020 for constituting the oscillations of the fluid flow comprises a device 10022 for providing an auxiliary fluid flow and two delivery lines 10021, which fluidly connect the device 10022 and the flow chamber 1001 of the fluidic member 112 to each other, wherein the device 10022 is arranged upstream of the flow chamber 1001 of the fluidic member 112.

The device 10022 for providing a secondary fluid flow comprises a second fluidic member 112' substantially corresponding in structure and function to the fluidic member 112 in fig. 2. The second fluidic component 112 ' has a flow chamber 1001 ', through which the secondary fluid flow can flow, the secondary fluid flow entering the flow chamber 1001 through the inlet 10011 ' of the flow chamber 1001 ' and exiting the flow chamber 1001 ' through the outlet 10012 ' of the flow chamber 1001 '. The flow chamber 1001 ' widens downstream (in the plane of oscillation) and transitions into a tapered outlet channel 10017 ' that terminates at outlet 10012 '. The second fluidic member 112 'also has two bypass channels 10014 a', 10014b ', which are in fluid communication with the main flow channel 10013' of the flow chamber 1001 'via the inlets 10014a 1', 10014b1 'and outlets 10014a 2', 10014b2 ', respectively, and which extend between the respective inlets 10014a 1', 10014b1 'and the respective outlets 10014a 2', 10014b2 ', respectively, as means 10014 a', 10014b 'for constituting the vibration of the secondary fluid flow at the outflow 10012'. The shape of the inner blocks 10016a ', 10016b ' separating the bypass channels 10014a ', 10014b ' from the main channel 10013 ' is only illustrated in fig. 10 by way of example (in a vibration plane with a triangular cross section) and can be designed arbitrarily, for example, differently than that illustrated in fig. 2, 4-9.

At the outlet 10012 ' of the second fluidic component 112 ', a vibrating auxiliary fluid flow emerges, which impinges on a second flow divider 10023 of the second separation chamber 10024, which is arranged downstream of this outlet 10012 '. Said second separation chamber 10024 is part of the mechanism 10020 for constituting the oscillation of the fluid flow. The second flow diverter 10023 diverts the oscillating secondary fluid flow exiting from the outlet 10012 'of the second fluidic member 112' and entering the second separation chamber 10024 into the two delivery lines 10021. The feed line (particularly at its upstream end) is arranged in the plane of oscillation of the secondary fluid flow on the side and on the side of the second flow divider 10023. Thus, the secondary fluid flow alternately flows into one or the other transfer line 10021. Thus, the delivery line 10021 is capable of providing a secondary fluid flow to the flow chamber 1001 of the fluidic member 112 with a phase shift. The second flow splitter 10023 has a concave shape as viewed in the direction of fluid flow. Other shapes are also possible.

The feed lines 10021 extend downstream from the second flow splitters 10023 first in the direction of divergence (first section) and then in each case toward the flow chamber 1001 of the jet component 112 (second section). The first portion (in particular the upstream end thereof) is here arranged in the oscillation plane of the oscillating secondary fluid flow issuing from the second fluidic member 112'. Between the first section and the second section, further sections can be provided. The flow chamber 1001 of the fluidic member 112 is disposed between the downstream ends 100212 of the delivery line 10021. Between the inlet 10011, through which the fluid stream enters the flow chamber 1001, and the outlet 10012, through which the oscillating fluid exits the flow chamber 1001, the flow chamber 1001 of the fluidic member 112 has a lateral opening through which the flow chamber 1001 is in fluid communication with the downstream end 100212 of the delivery line 10021. In the embodiment of fig. 10, the downstream ends 100212 of the feed lines 10021 are at the same level, as viewed in the direction of fluid flow. Alternatively, they can be at different heights. Furthermore, the second section of the feed line 10021 extends in a plane which corresponds to the plane of oscillation of the secondary fluid flow or to the plane of extension of the first section. Alternatively, the second section of the feed line 10021 can extend in a different plane and/or in a different plane than the plane of extension of the first section. Furthermore, the second sections of the feed lines 10021 extend directly towards each other such that they each form an angle of substantially 90 ° with the direction of the fluid flow in the flow chamber 1001 of the fluidic component 112. Alternatively, the angle can be greater than 0 ° and less than 180 °. In this case, the angle formed by the second section of one feed line 10021 with the direction of the fluid flow in the flow chamber 1001 of the fluidic component 112 can be different from the angle formed by the second section of the other feed line 10021 with the direction of the fluid flow in the flow chamber 1001 of the fluidic component 112, so that said second sections of the feed lines do not necessarily have to extend directly towards one another. In any case, the secondary fluid flow having a lateral component encounters the fluid flow flowing in the flow chamber 1001 of the fluidic member, such that the secondary fluid flow deflects the fluid flow laterally. Since the secondary fluid flow alternately exits from one or the other transfer line 10021, the lateral deflection alternately occurs from one side or the other, so that the fluid flow performs a vibrating movement. The oscillating movement is performed in a plane predetermined by the second section of the feed line 10021. By means of the oscillating movement, the fluid flow is applied in turn to opposite side walls 1016a, 1016b of the flow chamber 1001, in each of which an opening is provided, via which the flow chamber 1001 is in fluid communication with the feed line 10021. The flow chamber 1001 widens downstream, i.e., its extent transversely to the fluid flow direction and in the plane of oscillation increases (e.g., continuously) from the inflow opening 10011 toward the outflow opening 10012.

As already described for the embodiment of fig. 2, the oscillating fluid flow exits from the outlet 10012 of the fluidic component 112 and enters the separation chamber 2001 of the separation device. The flow divider 20014 distributes the oscillating fluid flow in time-staggered fashion to the three outlet openings 20012, 20013, 20015 of the separating chamber 2001. The flow diverter 20014 has a concave arcuate shape as viewed in the direction of fluid flow. The separating apparatus is configured such that the portion of the vibrating fluid flow diverted into the first outlet 20012 of the separating chamber 2001, the portion of the vibrating fluid flow diverted into the second outlet 20013 of the separating chamber 2001, and the portion of the vibrating fluid flow diverted into the third outlet 20015 of the separating chamber 2001 no longer converge downstream of the diverter 20014. Alternatively, it is sufficient that the portion of the vibrating fluid stream diverted into the first tap 20012 of the separation chamber 2001 does not converge downstream of the diverter 20014 with the remaining fluid stream diverted into the two other taps 20013, 20015. A first outflow opening 20012 has a smaller cross section transverse to the fluid flow direction than the two other outflow openings 20013, 20015 and has a smaller extension, in particular in the vibration plane and transverse to the fluid flow direction (in the respective outflow opening). The first outlet 20012 of the separation chamber 2001 lies (substantially) on an axis interconnecting the inlet 10011 and outlet 10012 of the fluidic member 112. The axis can, for example, be located centrally between the maximum deflections of the vibrating fluid flow. The portion of the oscillating fluid flow that exits the first outflow 20012 of the separation chamber 2001 corresponds to a useful signal. By means of the shape of the separation chamber 2001, in particular of the flow divider 20014, and by means of the relative cross-sectional dimensions of the first outflow opening 20012 transversely to the direction of fluid flow (with respect to the respective dimensions of the inflow opening 10011, the second outflow opening 20013 and the third outflow opening 20015), the temporal profile of the useful signal (pulse interval T, pulse width T) can be influenced. The number of outflow openings 20012, 20013, 20015 of the separation chamber 2001 is exemplary in fig. 10 and can be different from 3.

The pulse interval T of the fluid flow pulses exiting from the separation device 2000 as useful signal can be influenced via the vibration frequency of the second fluidic member 112 ', wherein the vibration frequency of the second fluidic member 112' also presets the vibration frequency of the fluidic member 112, while the signal strength thereof can be controlled via the inlet pressure at the inlet opening 10011 of the fluidic member 112. Thus, variations in the vibration frequency/pulse interval T have no decisive influence on the signal strength.

The secondary fluid flow into the inlet 10011 'of the second fluidic member 112' is provided by a secondary fluid flow source, and the fluid flow into the inlet 10011 of the fluidic member 112 is provided by a fluid flow source. The fluid flow source and the secondary fluid flow source can be different sources from each other. Alternatively, they can be from a common source. In particular, the fluid flow source and the secondary fluid flow source are capable of providing flows having different outlet pressures, flow rates. The fluid flow source and the secondary fluid flow source are each capable of providing a gas as the fluid.

Fig. 11 shows a sectional view through a fluidic component 112 according to another embodiment. The fluidic component 112 in fig. 11 differs from the fluidic component 112 in fig. 10 in particular in the design of the flow splitter 20014 of the separation chamber 2001 downstream of the outflow 10012 of the fluidic component 112. In this embodiment, the flow diverter 20014 extends acutely into the separation chamber 2001. The inlet geometry through the sharp edges of the first outflow opening 20012 (i.e. the shape in the region of the first outflow opening 20012 through the diverter 20014) affects the leading and trailing edges of the pulses and thus the pulse width b of the useful signal. If the inlet geometry of the first tap 20012 does not induce a bypass effect, the sharper the edge of the inlet geometry of the first tap 20012, the steeper the edge of the pulse of the useful signal.