阅读说明：本技术 一种承载晶圆的防翘曲装置 (Anti-warping device for bearing wafer ) 是由 徐权锋 于 2020-06-23 设计创作，主要内容包括：本发明公开了一种承载晶圆的防翘曲装置,其结构包括晶圆盒、凹槽、放置槽、底板、通槽和调节定位装置,本发明通过将调节定位装置设置于通槽内侧中部,便可通过第一旋钮带动第一螺纹杆在螺纹座上进行转动,使得连接座上的固定夹沿着限位座进行前后滑动,实现对固定的直径距离进行调节,再对活动夹沿着横杆上的滑槽上进行左右滑动,并且通过第二旋钮带动第二螺纹杆进行螺纹固定,实现对固定的左右间距进行调节,便于调节,固定性强,通过横杆前端中部设置有限位槽,并且限位槽内径表面与活动夹进行滑动配合,便于进行限位滑动,保证滑动的稳定性。(The invention discloses a warping-proof device for bearing a wafer, which structurally comprises a wafer box, a groove, a placing groove, a bottom plate, a through groove and an adjusting and positioning device.)

1. A warping prevention device for bearing a wafer comprises a wafer box (1), a groove (2) and a placing groove (3), wherein the groove (2) is embedded in the middle of the top end of the wafer box (1);

the method is characterized in that: the adjusting and positioning device (6) is arranged in the middle of the inner side of the through groove (5), the adjusting and positioning device (6) comprises a first knob (61), a first threaded rod (62), a threaded seat (63), a limiting seat (64), a connecting seat (65), a cross rod (66), a fixing clamp (67), a sliding groove (68) and a fixing mechanism (69), the middle of the front end of the first knob (61) is connected with the first threaded rod (62), the outer diameter surface of the first threaded rod (62) is in threaded fit with the threaded seat (63), the threaded seat (63) is fixed with the rear end of the top of the limiting seat (64), the front end of the outer side of the first threaded rod (62) is in rotating fit with the connecting seat (65), the connecting seat (65) is tightly fixed with the middle of the rear end of the cross rod (66), the middle of the front end of the cross rod (66) is locked and fixed with the fixing clamp (67) through a bolt, the middle part of the inner sides of the left end and the right end of the cross rod (66) is provided with the sliding groove (68), and the middle part of the inner side of the sliding groove (68) is provided with the fixing mechanism (69).

2. The wafer lift apparatus of claim 1, wherein: the threaded seat (63) and the middle part of the inner side of the through groove (5) are fixed with each other.

3. The wafer lift apparatus of claim 2, wherein: the left end and the right end of the inner side of the groove (2) are embedded with placing grooves (3), and the middle part of the rear end of the wafer box (1) penetrates through the through groove (5).

4. The wafer lift apparatus of claim 2, wherein: the fixing mechanism (69) comprises a second knob (691), a second threaded rod (692) and a movable clamp (693), wherein the middle of the front end of the second knob (691) is connected with the second threaded rod (692), and the second threaded rod (692) is in threaded fit with the middle of the rear end of the movable clamp (693).

5. The wafer lift apparatus of claim 4, wherein: the second threaded rod (692) is slidably fitted along the inner diameter surface of the slide groove (68).

6. The wafer lift apparatus of claim 2, wherein: the first knob (61) is externally provided with a rubber sleeve, and the surface of the rubber sleeve is provided with anti-skid lines.

7. The wafer lift apparatus of claim 2, wherein: the sliding grooves (68) and the fixing mechanisms (69) are arranged in two groups and are distributed in parallel and opposite.

8. The wafer lift apparatus of claim 2, wherein: the middle part of the inner side of the fixing clamp (67) is provided with a clamping groove, and the inner diameter surface of the clamping groove is smooth.

9. The wafer lift apparatus of claim 2, wherein: the middle part of the front end of the cross rod (66) is provided with a limit groove, and the inner diameter surface of the limit groove is in sliding fit with the movable clamp (693).

10. The wafer lift apparatus of claim 5, wherein: the middle part of the inner side of the movable clamp (693) is provided with a clamp groove, and the inner diameter surface of the clamp groove is smooth.

Technical Field

The invention relates to the technical field of semiconductor equipment, in particular to a warping prevention device for bearing a wafer.

Background

After the wafer is ground, the thickness of the wafer is reduced, particularly the thickness of the edge of the wafer is very small, the wafer is placed in a wafer box, the wafer is warped, the wafer is easily damaged, and the wafer is prevented from being warped after being ground and placed through a warping prevention device for bearing the wafer.

Under the condition that needs use the warpage prevention device who bears the weight of the wafer, because the size is placed to current warpage prevention device internal diameter and is the fixed form, the wafer diameter size of different batches or different models is step-by-step the same to the wafer is difficult to closely laminate with inside standing groove and places, and the dislocation appears rocking easily in the removal process, leads to the wafer to collide with the wearing and tearing.

Disclosure of Invention

Technical problem to be solved

In order to overcome prior art not enough, the warp-proof device who bears wafer has now been proposed, has solved under the condition that needs use the warp-proof device who bears wafer, because the size is placed to current warp-proof device internal diameter is the fixed form, and the wafer diameter size step-by-step the same of different batches or different models to the wafer is difficult to closely the laminating with inside standing groove and places, and the removal in-process appears rocking the off-position easily, leads to the problem of wafer colliding with wearing and tearing.

(II) technical scheme

The invention is realized by the following technical scheme: the invention provides a wafer-bearing warping-preventing device, which comprises a wafer box, a groove, a placing groove and an adjusting and positioning device, wherein the groove is embedded in the middle of the top end of the wafer box, the adjusting and positioning device is arranged in the middle of the inner side of the through groove, the adjusting and positioning device comprises a first knob, a first threaded rod, a threaded seat, a limiting seat, a connecting seat, a cross rod, a fixing clamp, a sliding groove and a fixing mechanism, the middle part of the front end of the first knob is connected with the first threaded rod, the outer diameter surface of the first threaded rod is in threaded fit with the threaded seat, the threaded seat is mutually fixed with the rear end of the top of the limiting seat, the front end of the outer side of the first threaded rod is in rotating fit with the connecting seat, the connecting seat is tightly fixed with the middle part of the rear end of the cross rod, the middle part of the front end of the cross rod is locked with the fixing, the threaded seat is fixed with the middle part of the inner side of the through groove.

Furthermore, the left end and the right end of the inner side of the groove are embedded with placing grooves, and a through groove penetrates through the middle of the rear end of the wafer box.

Furthermore, fixed establishment includes second knob, second threaded rod and activity and presss from both sides, second knob front end middle part is connected with the second threaded rod, second threaded rod and activity press from both sides rear end middle part screw-thread fit, the second threaded rod is along spout internal diameter surface sliding fit.

Furthermore, a rubber sleeve is arranged outside the first knob, and anti-skid grains are arranged on the surface of the rubber sleeve.

Furthermore, the sliding grooves and the fixing mechanisms are arranged in two groups and are distributed in parallel and opposite.

Furthermore, a clamping groove is formed in the middle of the inner side of the fixing clamp, and the inner diameter surface of the clamping groove is smooth.

Furthermore, a limiting groove is formed in the middle of the front end of the cross rod, and the inner diameter surface of the limiting groove is in sliding fit with the movable clamp.

Furthermore, a clamping groove is formed in the middle of the inner side of the movable clamp, and the inner diameter surface of the clamping groove is smooth.

Furthermore, the bottom plate is made of PVC plastic.

Furthermore, the first threaded rod is made of stainless steel.

(III) advantageous effects

Compared with the prior art, the invention provides the warping prevention device for bearing the wafer, which has the following beneficial effects:

the method has the advantages that: through setting up adjusting positioning device in leading to inboard middle part of groove, alright drive first threaded rod through first knob and rotate on the screw thread seat for fixation clamp on the connecting seat slides around going on along spacing seat, realizes adjusting fixed diametral distance, slides from side to side on the spout on the horizontal pole is pressed from both sides along the activity again, and drives the second threaded rod through the second knob and carries out the thread tightening, realizes adjusting fixed controlling the interval, and the regulation of being convenient for, the fixity is strong.

The advantages are two: be provided with the spacing groove through horizontal pole front end middle part to spacing inslot diameter surface carries out sliding fit with the activity clamp, is convenient for carry out spacing slip, guarantees gliding stability.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the adjusting and positioning device of the present invention;

FIG. 3 is a schematic top view of the adjusting and positioning device of the present invention;

FIG. 4 is a schematic left-side view of the adjusting and positioning device of the present invention;

fig. 5 is a schematic structural diagram of the fixing mechanism of the present invention.

In the figure: the device comprises a wafer box-1, a groove-2, a placing groove-3, a bottom plate-4, a through groove-5, an adjusting and positioning device-6, a first knob-61, a first threaded rod-62, a threaded seat-63, a limiting seat-64, a connecting seat-65, a cross rod-66, a fixing clamp-67, a sliding groove-68, a fixing mechanism-69, a second knob-691, a second threaded rod-692 and a movable clamp-693.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

Referring to fig. 1, the present invention provides a warpage preventing apparatus for carrying a wafer: comprises a wafer box 1, a groove 2, a placing groove 3, a bottom plate 4, a through groove 5 and an adjusting and positioning device 6. The middle part of the top end of the wafer box 1 is embedded with a groove 2. Both ends embedding has standing groove 3 about 2 inboards, is convenient for assist and places. A through groove 5 penetrates through the middle part of the rear end of the wafer box 1. The adjusting and positioning device 6 is arranged in the middle of the inner side of the through groove 5.

Referring to fig. 2, the adjusting and positioning device 6 includes a first knob 61, a first threaded rod 62, a threaded seat 63, a limiting seat 64, a connecting seat 65, a cross bar 66, a fixing clip 67, a sliding slot 68, and a fixing mechanism 69. The middle part of the front end of the first knob 61 is connected with a first threaded rod 62, so that the first knob can be conveniently stressed and rotated. The outer diameter surface of the first threaded rod 62 is threadedly engaged with the threaded seat 63. The threaded seat 63 and the limiting seat 64 are mutually fixed at the top and the rear end, and the front end of the outer side of the first threaded rod 62 is in running fit with the connecting seat 65, so that the fixed rotation is facilitated. The connecting seat 65 is tightly fixed with the middle part of the rear end of the cross rod 66, and the middle part of the front end of the cross rod 66 is locked and fixed with the fixing clamp 67 through a bolt. The middle part of the left end and the right end of the cross rod 66 is provided with a sliding chute 68 in a penetrating way, and the middle part of the inner side of the sliding chute 68 is provided with a fixing mechanism 69 which is convenient for sliding adjustment.

Referring to fig. 1 and 2 in combination, the screw seat 63 is fixed to the middle inside the through slot 5.

Referring to fig. 2 and 3, the fixing mechanism 69 includes a second knob 691, a second threaded rod 692 and a movable clamp 693, the second knob 691 is connected to the second threaded rod 692 at a front middle portion thereof for rotation under force, the second threaded rod 692 is in threaded engagement with a rear middle portion of the movable clamp 693, and the second threaded rod 692 is in sliding engagement along an inner diameter surface of the slide groove 68.

Fig. 4 shows a schematic side view of the adjusting and positioning device 6, which shows the screw seat 63 and the rear end of the top of the limit seat 64 fixed to each other.

Wherein, the first knob 61 is externally provided with a rubber sleeve, and the surface of the rubber sleeve is provided with anti-slip lines (with corresponding grooves, as shown in fig. 2 to 5), so as to avoid the hand slip during use.

Wherein, the sliding groove 68 and the fixing mechanism 69 are provided in two sets and distributed in parallel and opposite shapes, so as to ensure the fixing range, as shown in fig. 2, and the two sets of sliding groove 68 and the fixing mechanism 69 are respectively arranged at two sides of the fixing clamp 67.

Wherein, the middle part of the inner side of the fixing clamp 67 is provided with a clamp groove (not marked, refer to fig. 2), and the inner diameter surface of the clamp groove is smooth, so as to be convenient for inserting and positioning.

Wherein, the middle part of the front end of the cross rod 66 is provided with a limit groove (not marked, refer to fig. 5), and the inner diameter surface of the limit groove is in sliding fit with the movable clamp 693, so that the limit sliding is convenient.

Wherein, the middle part of the inner side of the movable clamp 693 is provided with a clamp groove, and the inner diameter surface of the clamp groove is smooth, so that the insertion and the positioning are convenient.

The bottom plate 4 is made of PVC plastic, and is firm and durable, high in cost performance, corrosion-resistant and good in quality.

The first threaded rod 62 is made of stainless steel, and is high in corrosion resistance, low in cost and high in cost performance.

The patent states: the material of the bottom plate 4 is PVC plastic, the chemical field of the PVC plastic refers to compound PVC, the PVC material has nonflammability, high strength, weather resistance and excellent geometric stability, the PVC has strong resistance to oxidant, reducing agent and strong acid, but the PVC can be corroded by concentrated oxidizing acid such as concentrated sulfuric acid and concentrated nitric acid and is not suitable for occasions where the PVC contacts aromatic hydrocarbon and chlorinated hydrocarbon.

The working principle is as follows:

firstly, placing an anti-warping device for bearing a wafer at a proper position, and carrying out bottom support placement on a wafer box 1 through a bottom plate 4;

secondly, when the ground wafers are required to be stored and placed, because the inner diameter placing sizes of the existing anti-warping devices are fixed, the diameter sizes of wafers of different batches or different types are the same step by step, and the wafers are difficult to be tightly attached and placed with the inner placing groove 3, and the wafers are easy to shake and run during moving, so that the wafers are collided and abraded, the adjusting and positioning device 6 is arranged in the middle of the inner side of the through groove 5, then the first knob 61 is applied with force to rotate clockwise, the first threaded rod 62 can be driven by the first knob 61 to rotate on the threaded seat 63, so that the fixing clamp 67 on the connecting seat 65 slides back and forth along the limiting seat 64, the fixed diameter distance is adjusted, then the movable clamp 693 slides left and right along the sliding groove 68 on the cross rod 66, and the second knob 691 rotates clockwise, the second threaded rod 692 is driven by the second knob 691 to be in threaded fixation, so that the fixed left-right distance is adjusted, the adjustment is convenient, and the fixation is strong;

thirdly, after finishing adjusting, alright insert the standing groove 3 in wafer and the wafer box 1 that need place and place to carry out dual supplementary fixed through fixation clamp 67 and activity clamp 693, stability is strong, avoids damaging.

The basic principles and main features of the present invention and the advantages of the present invention have been shown and described, and the standard parts used in the present invention are all available on the market, the special-shaped parts can be customized according to the description and the accompanying drawings, the specific connection mode of each part adopts the conventional means of bolt and rivet, welding and the like mature in the prior art, the machinery, parts and equipment adopt the conventional type in the prior art, and the circuit connection adopts the conventional connection mode in the prior art, and the details are not described herein.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.