Device and method for accurately and quickly aligning rotary parts on machine
阅读说明：本技术 一种回转类零件在机精确快速找正装置及方法 (Device and method for accurately and quickly aligning rotary parts on machine ) 是由 康仁科 郭江 朱祥龙 焦振华 于 2020-06-02 设计创作，主要内容包括：一种回转类零件在机精确快速找正装置及方法,属于精密/超精密加工技术领域。找正装置包括主控制器、高精度位移检测装置和微纳米位移调整装置。首先,通过主控制器控制高精度位移检测装置对零件外圆跳动进行数据采集,采集数据低通滤波处理后进行最小二乘拟合；再计算零件最大偏移量及对应的偏移角度,通过主控制器控制机床主轴旋转定位到指定角度,采用微纳米位移调整装置对零件位移进行纳米至微米级范围的调整,调整完成后再对零件外圆进行检测；最后重复以上调整过程直至回转类零件外圆跳动满足精密/超精密加工要求。本发明具有精度高,可达亚微米级甚至纳米级,调整方便快捷,调整精度的可重复性好,对操作者技术依赖性低,易于实现自动化。(A device and a method for accurately and quickly aligning rotary parts on a machine belong to the technical field of precision/ultra-precision machining. The alignment device comprises a main controller, a high-precision displacement detection device and a micro-nano displacement adjusting device. Firstly, controlling a high-precision displacement detection device to carry out data acquisition on the excircle runout of a part through a main controller, and carrying out least square fitting after low-pass filtering processing on the acquired data; then calculating the maximum offset and the corresponding offset angle of the part, controlling the main shaft of the machine tool to rotate and position to a specified angle through a main controller, adjusting the displacement of the part by adopting a micro-nano displacement adjusting device in a range from nano to micron, and detecting the excircle of the part after the adjustment is finished; and finally, repeating the adjusting process until the excircle runout of the rotary part meets the precision/ultra-precision machining requirement. The invention has the advantages of high precision, submicron or even nanometer level, convenient and quick adjustment, good repeatability of the adjustment precision, low technical dependence on operators and easy realization of automation.)
1. A rotary part on-machine accurate and rapid alignment device is characterized by comprising a main control system, a high-precision displacement detection device (6) and a micro-nano displacement adjusting device (14);
the main control system is used for controlling the high-precision displacement detection device (6) to detect the excircle runout of the rotary part (11), analyzing and processing the detection result, controlling the machine tool spindle (3) to rotate to a specified angle according to the detection result, and controlling the micro-nano displacement adjusting device (14) to adjust the position of the rotary part (11), so that the coaxiality error between the rotary central line of the rotary part (11) and the rotary central line of the machine tool spindle (3) meets the design requirement;
the high-precision displacement detection device (6) comprises a high-precision displacement sensor (64), a displacement sensor controller, a displacement sensor mounting seat (62), a displacement sensor position fine adjustment device, a fixing support and a position fine adjustment device; the high-precision displacement sensor (64) is connected with the displacement sensor controller and is fixed on the displacement sensor mounting seat (62); the displacement sensor mounting seat (62) is fixedly connected with the displacement sensor position fine adjustment device; the displacement sensor position fine adjustment device is connected with the position fine adjustment device and a fixed support connecting seat (68), the position fine adjustment device and the fixed support connecting seat (68) are connected with a fixed support horizontal cross beam (7) through hole-shaft matching and are fixed through a positioning locking screw (69); the fixing support comprises a horizontal cross beam (7), a vertical column (10), a right-angle connector (8), a cross beam locking screw (9) and a supporting base (13), the horizontal cross beam (7) is connected with the vertical column (10) through the right-angle connector (8) and is positioned and locked through the cross beam locking screw (9), and the supporting base (13) is fixedly connected with a fixing bottom plate B (147);
the micro-nano displacement adjusting device (14) comprises a micro-nano displacement actuator (142), a micro-nano displacement controller, an actuator support, a differential lifting plate (143), a positioning locking nut (144), a micro-nano displacement actuator pressure head (145), a differential bolt (146), a fixed bottom plate B (147), a T-shaped nut (148) and a lifting plate locking screw (149); the micro-nano displacement actuator (142) is connected with the micro-nano displacement controller, the micro-nano displacement actuator (142) is arranged on the actuator support and the differential lifting plate (143) through threads, the threads can be used for roughly adjusting the upper position and the lower position of the micro-nano displacement actuator (142), and a positioning locking nut (144) is arranged at the upper end of the micro-nano displacement actuator (142); the actuator support and the differential lifting plate (143) are connected and guided through dovetail grooves and a fixed base plate B (147), the actuator support and the differential lifting plate (143) are driven to move precisely through a differential bolt (146), and a lifting plate locking screw (149) and a T-shaped nut (148) are used for locking the relative positions of the fixed base plate B (147) and the actuator support and the differential lifting plate (143); the pressure head (145) of the micro-nano displacement actuator is installed at the front end of the micro-nano displacement actuator (142) through threaded connection and used for adjusting the position of a rotary part (11).
2. The on-machine accurate and rapid alignment device for rotary parts according to claim 1, wherein the displacement sensor position fine adjustment device comprises a fine rack seat (66), a fine gear sliding table (66), an adjustment wheel (611) and a fixing plate A (612); the precise rack seat (66) and the precise gear sliding table (66) are installed, positioned and guided through a dovetail groove; the precision gear sliding table (66) slides on the precision rack seat (66) by rotating the adjusting wheel (611) and is used for adjusting the position of the high-precision displacement sensor (64); the fixed plate A (612) is fixedly connected with the precise rack seat (66), and the precise gear sliding table (66) is installed on the fixed plate A (612).
3. A method for accurately and quickly aligning a rotary part on machine based on the device of claim 1 or 2, which is characterized by comprising the following steps:
(1) installing and debugging the on-machine accurate alignment device:
sequentially installing and fixing a high-precision displacement detection device (6) and a micro-nano displacement adjusting device (14) on a machine tool (1); connecting a main controller with a displacement sensor controller, and connecting the displacement sensor controller with a high-precision displacement sensor (64) to form a high-precision displacement detection device; the micro-nano displacement adjusting device comprises a micro-nano displacement controller, a micro-nano displacement actuator, a main controller, a micro-nano displacement controller and a micro-nano displacement adjusting device, wherein the micro-nano displacement controller is connected with the micro-nano displacement controller; the main controller is connected with a machine tool control system, and the machine tool control system is connected with a machine tool to form a machine tool control loop; connecting all the components and debugging the components;
(2) positioning and mounting surfaces of a part clamp (5) are finely turned in place:
a main shaft (3) is arranged on a main shaft seat (4), and the main shaft seat (4) is arranged on an X shaft (2); mounting the part clamp (5) on a flange of a machine tool spindle (3), and performing in-place finish machining on a positioning mounting surface of the part clamp (5) by adopting a finish machining tool;
(3) clamping and roughly adjusting rotary parts:
installing a rotary part (11) on a part clamp (5), applying a small holding force on the rotary part (11) through the part clamp (5), keeping the rotary part (11) not to automatically slide under the action of no external force, and roughly adjusting the position of the rotary part (11);
(4) adjusting the position of the on-machine accurate alignment device:
firstly, the distance from a high-precision displacement sensor (64) to a rotary part (11) is within the measuring range of the high-precision displacement sensor (64) by adjusting the height of a rough-adjusting horizontal cross beam (7) and the height of a fine-adjusting high-precision displacement sensor (64); then, the distance from the micro-nano displacement actuator (142) to the excircle of the rotary part (11) is roughly adjusted by adjusting the thread screwing depth of the micro-nano displacement actuator (142), and the axes of the high-precision displacement sensor (64) and the micro-nano displacement actuator (142) are collinear by adjusting the swing angle of the horizontal beam (7) and the adjusting wheel (611) of the displacement sensor position fine adjustment device; the main controller controls a machine tool control system to enable the X-axis (2) and the Z-axis (16) to move, so that a connecting line of the high-precision displacement sensor (64) and the micro-nano displacement actuator (142) passes through the diameter of the rotary part (11), namely the high-precision displacement sensor (64) and the micro-nano displacement actuator (142) are respectively located at the highest point and the lowest point of the excircle of the rotary part (11); finally, the actuator support and the differential lifting plate (143) are precisely adjusted through the differential bolt (146) to drive the micro-nano displacement actuator (142) to move, so that the distance D0 from the micro-nano displacement actuator (142) to the excircle of the rotary part (11) is smaller than 1/5 of the measuring range L0;
(5) detecting the jumping of the part:
the main controller controls a machine tool control system to enable a machine tool spindle (3) to rotate in a C-axis mode to drive a rotary part (11) to rotate, a displacement sensor controller controls a high-precision displacement sensor (64) to perform jumping detection on the excircle of the rotary part (11), angle information theta of the part and a jumping value (R) of a corresponding angle are recorded in real time, and a measuring result is transmitted and stored on the main controller;
(6) analyzing and calculating the center position of the rotary part:
the main controller carries out filtering processing and fitting on the excircle beating data of the rotary part (11) collected by the high-precision displacement sensor (64), and calculates the maximum offset (Ri) of the center of the rotary part (11) and the offset angle position theta (i) corresponding to the maximum offset;
(7) adjusting the position of the part:
the main controller controls a machine tool main shaft to rotate in a C-axis 3 mode according to an excircle runout data analysis result of the rotary part (11) collected by the high-precision displacement sensor (64), a part clamp (5) drives the rotary part (11) to rotate to a specified angle theta (i), and meanwhile, the micro-nano displacement actuator (142) is controlled to move a distance D which is D0+ (Ri) through the micro-nano displacement controller, so that the position of the rotary part (11) is finely adjusted;
(8) and (5) repeating the steps (5), (6) and (7) until the maximum offset of the center of the rotary part (11) analyzed and calculated in the step (6) is less than or equal to the allowable error, and finishing the position adjustment of the rotary part (11).
4. An on-machine accurate and rapid alignment method for rotary parts according to claim 3, wherein in the step (3), the position of the rotary part (11) is coarsely adjusted in a conventional manner, so that the jitter range of the rotary part (11) is 5-30 μm.
5. The on-machine accurate and rapid alignment method for the rotary parts according to claim 3, wherein the analysis and calculation of the positions of the rotary parts in the step (6) comprises the following processes: and performing low-pass filtering processing on the data acquired by N cycles, fitting the data by adopting a least square method, calculating an average value of (Ri) when corresponding to each angle theta (i), and giving a maximum value _ Rmax and a minimum value _ Rmix which are positioned at all points and are away from the rotation center line of the machine tool spindle (3) and corresponding angles theta (i) _ max and theta (i) _ mix.
Technical Field
The invention belongs to the technical field of precision/ultra-precision machining, and particularly relates to a device and a method for accurately and quickly aligning rotary parts on a machine.
Background
High-precision rotary parts, for example: the ring, the shaft sleeve, the spherical or aspherical part, the housing and the like are widely applied to the fields of aerospace, military, medical treatment, precise instrument and instrument, precise physical experiments and the like, and in order to meet the high performance requirements of different fields, extremely high processing requirements are provided for the rotary parts, including roundness, cylindricity, profile tolerance error, wall thickness error and the like of the parts, the dimensional precision and form and position precision of the parts reach micron and submicron level, even nanometer level processing requirements, and at present, the parts are mainly processed by methods such as precise/ultra-precise turning or grinding.
At present, during precision/ultra-precision turning or grinding, the excircle of the rotary part is subjected to circular run-out detection by a technical operator through a dial indicator, a dial indicator and the like, then the excircle of the part is knocked by a tool made of softer materials such as copper, aluminum, plastic, rubber and the like, the position of the part is adjusted, the error of the contact ratio between the rotary central line of the part and the rotary central line of a machine tool spindle is ensured to be in a smaller range, the adjustment process belongs to alignment in the part clamping process and is also an important process in the part processing, the existing manual alignment mode is adopted, the alignment precision of the high-technology operator can reach the micron level in precision adjustment, although the difficulty is higher, and due to the limitation of the alignment precision, a larger processing allowance must be reserved for the subsequent processing process in the processing process, so that the material removal amount in the precision/ultra-precision processing stage is inevitably large, the machining time is long, the cost is high, in addition, due to the fact that the alignment precision is low, the part does eccentric motion when rotating, machining allowance is uneven, the actual cutting depth of a tool is changed, the cutting force is changed in the machining process, the quality of a machined surface is unstable, and the cutter is prone to being broken. In addition, for the parts which need to be processed inside and outside to ensure the profile tolerance error and the wall thickness error of the parts, when the parts are clamped for the second time after being turned over, the deviation of the actual rotation center line after the processing of the inner surface and the outer surface is large due to the influence of the alignment error and the deviation can not be eliminated by increasing the allowance, so that the wall thickness error of the parts can not reach the processing requirement, and the method becomes the key technical bottleneck for limiting the control of the high wall thickness error in the ultra-precision processing of the parts at present.
Therefore, the invention provides a novel part high-precision alignment device and method suitable for the precision/ultra-precision machining process, so as to meet the machining requirements of high profile tolerance and high wall thickness error of parts in the precision/ultra-precision machining process.
Disclosure of Invention
In order to solve the problems in the prior art, the invention designs and provides an on-machine accurate and quick alignment device and method for a rotary part, so as to meet the high-accuracy alignment requirement of the rotary part in the precise/ultra-precise machining process.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a rotary part on-machine accurate alignment device comprises a main control system, a high-precision displacement detection device 6 and a micro-nano displacement adjusting device 14.
The main control system is used for controlling the high-precision displacement detection device 6 to detect the excircle runout of the rotary part 11, analyzing and processing the detection result, controlling the machine tool spindle (C shaft) 3 to rotate to a specified angle according to the detection result, and controlling the micro-nano displacement adjusting device 14 to adjust the position of the rotary part 11, so that the coaxiality error of the rotary center line of the rotary part 11 and the rotary center line of the machine tool spindle (C shaft) 3 meets the design requirement, and accurate and automatic alignment is realized.
The high-precision displacement detection device 6 comprises a high-precision displacement sensor 64, a displacement sensor controller, a displacement sensor mounting seat 62, a displacement sensor position fine adjustment device, a fixed support, a position fine adjustment device, a fixed support connecting seat 68 and the like. The high-precision displacement sensor 64 is connected with a displacement sensor controller through a data line 67 and is fixed on the displacement sensor mounting seat 62 through a displacement sensor locking screw 63. The displacement sensor mounting base 62 is connected with a displacement sensor position fine adjustment device through a fixing screw A61. The displacement sensor position fine adjustment device is connected with the position fine adjustment device and the fixed support connecting seat 68 through a rack seat fixing screw 610, and the position fine adjustment device and the fixed support connecting seat 68 are connected with the fixed support horizontal cross beam 7 through hole-shaft matching and are fixed through a positioning locking screw 69. The fixing support comprises a horizontal cross beam 7, a vertical column 10, a right-angle connector 8, a cross beam locking screw 9, a support fixing screw 12 and a support base 13, wherein the horizontal cross beam 7 is connected with the vertical column 10 through the right-angle connector 8 and is positioned and locked through the cross beam locking screw 9, and the support base 13 is connected with a fixing bottom plate B147 through the support fixing screw 12.
The displacement sensor position fine adjustment device comprises a fine rack seat 66, a fine gear sliding table 65, an adjusting wheel 611, a fixing plate A612 and a fixing plate fixing screw 613; the precise rack seat 66 and the precise gear sliding table 65 are installed, positioned and guided through dovetail grooves; the precision gear sliding table 65 slides on the precision rack seat 66 by rotating the adjusting wheel 611, and is used for adjusting the position of the high-precision displacement sensor 64; the fixing plate a 612 is fixed on the precision rack seat 66 through a fixing plate fixing screw 613; the gear slide positioning locking screw 614 is used for fixing the precision gear slide 65 on the fixing plate a 612, that is, the precision gear slide 65 is kept relatively fixed with the precision rack seat 66 through the fixing plate a 612 and the fixing plate fixing screw 613.
The micro-nano displacement adjusting device 14 comprises a
A precise on-machine alignment method for rotary parts comprises the following steps:
(1) installing and debugging the on-machine accurate alignment device:
the high-precision displacement detection device 6 and the micro-nano displacement adjusting device 14 are sequentially installed and fixed on a B-axis cushion block 15 on the machine tool 1, a main controller is connected with a displacement sensor controller through a displacement sensor controller data line 17, and the displacement sensor controller is connected with a high-precision displacement sensor 64 through a displacement sensor data line 67 to form the high-precision displacement detection device; the main controller is connected with the micro-nano displacement controller through a micro-nano displacement controller data line 18, and the micro-nano displacement controller is connected with the micro-nano displacement actuator through a micro-nano displacement
(2) Positioning and mounting surfaces of the part clamp 5 are finely turned on the site:
the main shaft (C shaft) 3 is arranged on a main shaft seat 4, the main shaft seat 4 is arranged on an X shaft 2, a part clamp 5 for fixedly holding rotary parts is arranged on a flange of the main shaft (C shaft) 3 of the machine tool, a finish machining tool is adopted to carry out on-site finish machining on the positioning and mounting surface of the part clamp 5, and the mounting error of the part clamp 5 is reduced or eliminated.
(3) Clamping and roughly adjusting rotary parts:
the rotary part 11 is arranged on the part clamp 5, a small fixing force is exerted on the rotary part 11 through the part clamp 5, the rotary part 11 is kept not to automatically slide under the action of no external force, and the position of the rotary part 11 is roughly adjusted in a traditional mode, so that the jumping range of the rotary part 11 is 5-30 mu m.
(4) Adjusting the position of the on-machine accurate alignment device:
firstly, the distance from the high-precision displacement sensor 64 to the rotary part 11 is within the range of the high-precision displacement sensor 64 by roughly adjusting the height of the horizontal beam 7 and finely adjusting the height of the high-precision displacement sensor 64, then the distance from the
(5) Detecting the jumping of the part:
the main controller controls the machine tool control system to enable a machine tool main shaft (C shaft) 3 to rotate in a C shaft mode and drive the part clamp 5 to drive the rotary part 11 to rotate, and simultaneously controls the displacement sensor controller to control the high-precision displacement sensor 64 to detect the jump of the excircle of the rotary part 11, records the angle information theta of the part and the jump value (R) of the corresponding angle in real time, and transmits and stores the measurement result on the main controller.
(6) Analyzing and calculating the center position of the rotary part:
the main controller carries out filtering processing and fitting on the excircle runout data of the rotary part 11 collected by the high-precision displacement sensor 64, and calculates the maximum offset (Ri) of the center of the rotary part 11 and the corresponding offset angle position theta (i).
(7) Adjusting the position of the part:
the main controller controls a machine tool main shaft (C shaft) to rotate in a C shaft 3 mode and drive the part clamp 5 to drive the rotary part 11 to rotate to a specified angle theta (i) according to an analysis result of the excircle runout data of the rotary part 11 collected by the high-precision displacement sensor 64, and controls the micro-nano displacement controller to control the moving distance D of the
(8) And (5) repeating the steps 5, 6 and 7 until the maximum offset of the center of the rotary part 11 analyzed and calculated in the step (6) is less than or equal to the allowable error, and finishing the position adjustment of the rotary part 11.
Further, the analysis and calculation of the position of the rotary part in the step (6) mainly comprises the following processes:
and performing low-pass filtering processing on the data acquired in N cycles, fitting the data by adopting a least square method, calculating an average value of (Ri) when corresponding to each angle theta (i), and giving a maximum value _ Rmax and a minimum value _ Rmix of all points from a 3-revolution central line of a machine tool main shaft (C axis) and corresponding angles theta (i) _ max and theta (i) _ mix.
Compared with the prior art, the invention has the beneficial effects that:
(1) a rotary part on-machine accurate and rapid alignment device and a method thereof detect the excircle runout of the part by adopting a high-precision displacement detection device and precisely adjust the position of the part by adopting a micro-nano displacement adjustment device, compared with the prior art that the alignment device adopts a manual adjustment mode, the device has high measurement precision and high adjustment precision, and can realize the alignment precision of submicron or even nano level;
(2) a high-precision displacement detection device and a micro-nano displacement adjusting device are arranged on a Z-axis supporting plate of a machine tool and are vertically arranged, the optimal detection and adjustment position of a revolving body part can be found by means of X-axis and Z-axis movement of an ultra-precision machine tool, the deviation angle and deviation amount of the center of the part relative to the center of a C-axis can be accurately and quickly found by utilizing the C-axis positioning function of the ultra-precision machine tool, accurate and quick adjustment can be realized, the movement of any angular position can be realized by only one micro-nano displacement actuator in combination with C-axis rotation, the adjustment process is simple, convenient and quick, and automatic adjustment is easy to realize by the method;
(3) compared with the existing part alignment method, the on-machine accurate and rapid alignment device and method has the advantages of high alignment accuracy, good repeatability and low dependence on operator skill in the alignment process, and is suitable for precise/ultra-precise automatic machining.
Drawings
FIG. 1 is a schematic diagram of an on-machine precise and rapid alignment device and method for rotary parts according to the present invention.
FIG. 2 is an assembly schematic diagram of the general structure of the on-machine precise alignment device for the rotary parts of the invention.
FIG. 3 is a schematic structural diagram of an on-machine precise alignment device for a rotary part according to the present invention.
FIG. 4 is a schematic structural diagram of a high-precision displacement detection device of the on-machine precision alignment device for rotary parts of the present invention.
FIG. 5 is a schematic structural diagram of a locking mechanism of a high-precision displacement detection device of an on-machine precision alignment device for rotary parts according to the present invention.
Fig. 6 is a schematic structural diagram of a micro-nano displacement adjusting device of an on-machine precise alignment device for rotary parts according to the present invention.
FIG. 7 shows a method for precisely aligning a rotating part in a machine according to the present invention.
In the figure: 1 machine tool, 2X axis, 3 spindle (C axis), 4 spindle seat, 5 part clamp, 6 high precision displacement detection device, 7 horizontal beam, 8 right angle connector, 9 beam locking screw, 10 column, 11 rotary part, 12 support fixing screw, 13 support base, 14 micro nanometer displacement adjustment device, 15B axis cushion block, 16Z axis, 17 displacement sensor controller data line, 18 micro nanometer displacement controller data line, 19 micro nanometer displacement sensor data line, 20 machine tool control line, 61 fixing screw A, 62 displacement sensor mounting seat, 63 displacement sensor locking screw, 64 high precision displacement sensor, 65 precision gear sliding table, 66 precision rack seat, 67 displacement sensor data line, 68 position precision adjustment device and fixing support connecting seat, 69 positioning locking screw, 610 rack seat fixing screw, 611 adjusting wheel, 612A, 613 fixing plate fixing screws, 614 gear sliding table positioning locking screws, 141 micro-nano displacement actuator data lines, 142 micro-nano displacement actuators, 143 actuator supports and differential lifting plates, 144 positioning locking nuts, 145 micro-nano displacement actuator pressure heads, 146 differential bolts, 147 fixing bottom plates B, 148T-shaped nuts and 149 lifting plate locking screws.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention, and the specific embodiments described below are only for explaining the present invention and are not intended to limit the present invention.
As shown in fig. 1-7, an on-machine precise alignment device for rotary parts comprises three main parts, namely a main control system, a high-precision displacement detection device 6 and a micro-nano displacement adjustment device 14;
the main control system is used for controlling the high-precision displacement detection device 6 to detect the excircle runout of the rotary part 11, analyzing and processing the detection result, controlling the machine tool spindle (C shaft) 3 to rotate to a specified angle according to the detection result, and controlling the micro-nano displacement adjustment device 14 to adjust the position of the rotary part 11, so that the coaxiality error of the rotary central line of the rotary part 11 and the rotary central line of the machine tool spindle (C shaft) 3 meets the design requirement, and accurate and automatic alignment is realized; the spindle 3 is mounted on a spindle stock 4.
The high-precision displacement detection device 6 comprises a high-precision displacement sensor 64, a displacement sensor controller, a displacement sensor mounting seat 62, a displacement sensor position fine adjustment device, a fixed support, a position fine adjustment device, a fixed support connecting seat 68 and the like;
the high-precision displacement sensor 64 is connected with a displacement sensor controller through a data line 67 and is fixed on the displacement sensor mounting seat 62 through a displacement sensor locking screw 63;
the displacement sensor mounting base 62 is connected with a displacement sensor position fine adjustment device through a fixing screw A61;
the displacement sensor position fine adjustment device is connected with the fixed support connecting seat 68 through a rack seat fixing screw 610 and the position fine adjustment device, and the position fine adjustment device and the fixed support connecting seat 68 are connected with the fixed support horizontal cross beam 7 through hole-shaft matching and are fixed through a positioning locking screw 69;
the displacement sensor position fine adjustment device comprises a fine rack seat 66, a fine gear sliding table 65, an adjusting wheel 611, a fixing plate A612 and fixing plate fixing screws 613, wherein the fine rack seat 66 and the fine gear sliding table 65 are installed, positioned and guided through a dovetail groove, the fine gear sliding table 65 slides on the fine rack seat 66 through the rotation of the adjusting wheel 611 and is used for adjusting the position of the high-precision displacement sensor 64, the fixing plate A612 is fixed on the fine rack seat 66 through the fixing plate fixing screws 613, and the gear sliding table positioning locking screws 614 are used for fixing the fine gear sliding table 65 on the fixing plate A612, namely the fine gear sliding table 65 is kept relatively fixed with the fine rack seat 66 through the fixing plate A612 and the fixing plate fixing screws 613;
the fixing support comprises a horizontal cross beam 7, a vertical column 10, a right-angle connector 8, a cross beam locking screw 9, a support fixing screw 12 and a support base 13, wherein the horizontal cross beam 7 is connected with the vertical column 10 through the right-angle connector 8 and is positioned and locked through the cross beam locking screw 9; the supporting base 13 is connected with a fixed bottom plate B147 through a support fixing screw 12;
the micro-nano displacement adjusting device comprises a
the
a precise on-machine alignment method for rotary parts comprises the following steps:
(1) installing and debugging the on-machine accurate alignment device: the high-precision displacement detection device and the micro-nano displacement adjusting device are sequentially installed and fixed on the machine tool 1, the main controller is connected with the displacement sensor controller through a displacement sensor controller data line 17, and the displacement sensor controller is connected with the high-precision displacement sensor 64 through a displacement sensor data line 67 to form the high-precision displacement detection device; the main controller is connected with the micro-nano displacement controller through a micro-nano displacement controller data line 18, and the micro-nano displacement controller is connected with the micro-nano displacement actuator through a micro-nano displacement
(2) Clamping and roughly adjusting rotary parts: the method comprises the steps of finely turning a part fixture 5 on site to position a mounting surface, mounting a rotary part 11 on the part fixture 5, applying a small fixing force on the rotary part 11 through the part fixture 5, keeping the rotary part 11 not to automatically slide under the action of no external force, and roughly adjusting the position of the rotary part 11 in a traditional mode to enable the jumping range of the rotary part 11 to be 5-30 microns;
(3) adjusting the position of the on-machine accurate alignment device: firstly, the distance from the high-precision displacement sensor 64 to the rotary part 11 is within the range of the high-precision displacement sensor 64 by roughly adjusting the height of the horizontal beam 7 and finely adjusting the height of the high-precision displacement sensor 64, then the distance from the micro-nano displacement actuator 142 to the excircle of the rotary part 11 is roughly adjusted by adjusting the threaded screwing depth of the micro-nano displacement actuator 142, the axes of the high-precision displacement sensor 64 and the micro-nano displacement actuator 142 are collinear by adjusting the swing angle of the horizontal beam 7 and the adjusting wheel 611 of the fine adjustment device for the position of the displacement sensor, the X shaft 2 and the Z shaft 16 are moved by controlling a machine tool control system through a main controller, so that the connecting line of the high-precision displacement sensor 64 and the micro-nano displacement actuator 142 passes through the diameter of the rotary part 11, namely the high-precision displacement sensor 64 and the micro-nano displacement actuator 142 are respectively positioned at the highest point, then, the actuator support and the differential lifting plate 143 are precisely adjusted through the differential bolt 146 to drive the micro-nano displacement actuator 142 to move, so that the distance D0 from the micro-nano displacement actuator 142 to the excircle of the rotary part 11 is smaller than 1/5 of the measuring range L0;
(4) detecting the jumping of the part: the main controller controls a machine tool control system to enable a machine tool spindle (C shaft) 3 to rotate in a C shaft mode and drive a part clamp 5 to drive a rotary part 11 to rotate, and simultaneously controls a displacement sensor controller to control a high-precision displacement sensor 64 to perform jumping detection on the excircle of the rotary part 11, records angle information theta of the part and a jumping value (R) of a corresponding angle in real time, and transmits and stores a measurement result on the main controller;
(5) analyzing and calculating the central position of the part: the main controller carries out filtering processing and fitting on the excircle runout data of the rotary part 11 collected by the high-precision displacement sensor 64, and calculates the maximum offset (Ri) of the center of the part and the offset angle position theta (i) corresponding to the maximum offset (Ri);
(6) adjusting the position of the part: the main controller controls a machine tool main shaft (C shaft) 3 to rotate in a C shaft mode and drives a part clamp 5 to drive the rotary part 11 to rotate to a specified angle theta (i) according to an analysis result of the excircle runout data of the rotary part 11 collected by the high-precision displacement sensor 64, and simultaneously controls the micro-nano displacement controller to control the
(7) and (5) repeating the steps 5, 6 and 7 until the maximum offset of the center of the rotary part 11 analyzed and calculated in the step (6) is less than or equal to the allowable error, and finishing the position adjustment of the rotary part 11.
The part position analysis and calculation mainly comprises the following processes:
and performing low-pass filtering processing on the data acquired in N cycles, fitting the data by adopting a least square method, calculating an average value of (Ri) when corresponding to each angle theta (i), and giving a maximum value _ Rmax and a minimum value _ Rmix of all points from a 3-revolution central line of a machine tool main shaft (C axis) and corresponding angles theta (i) _ max and theta (i) _ mix.
The above-mentioned embodiments only express the embodiments of the present invention, but not should be understood as the limitation of the scope of the invention patent, it should be noted that, for those skilled in the art, many variations and modifications can be made without departing from the concept of the present invention, and these all fall into the protection scope of the present invention.
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