阅读说明：本技术 一种兼容多尺寸金属箔的真空吸附装置 (Vacuum adsorption device compatible with multi-size metal foils ) 是由 张树国 刘桐 苏博 于 2020-04-10 设计创作，主要内容包括：本发明公开了一种兼容多尺寸金属箔的真空吸附装置,包括阀板,阀板上设置有多个吸附模块,每个吸附模块包括多个阀芯腔,每个阀芯腔中皆设置有珠体；上板,其位于阀板上侧,上板与阀板之间形成多个真空分腔,真空分腔与吸附模块一一对应设置,单个真空分腔与对应的吸附模块中的阀芯腔上端部连通；下吸板,其位于阀板下侧,下吸板上竖直贯穿开设有多个吸附孔,吸附孔与阀芯腔一一对应设置；当吸附孔的下侧贴设有金属箔时,阀芯腔中珠体下落且吸附孔通过阀芯腔与真空分腔连通；当吸附孔下侧与大气连通时,阀芯腔中珠体上升以阻塞阀芯腔的上端部。其可实现金属箔的吸附,稳定性好,金属箔平整度好,方便检测,适用范围广。(The invention discloses a vacuum adsorption device compatible with multi-size metal foils, which comprises a valve plate, wherein a plurality of adsorption modules are arranged on the valve plate, each adsorption module comprises a plurality of valve core cavities, and a bead body is arranged in each valve core cavity; the upper plate is positioned on the upper side of the valve plate, a plurality of vacuum sub-cavities are formed between the upper plate and the valve plate, the vacuum sub-cavities are arranged in one-to-one correspondence with the adsorption modules, and the single vacuum sub-cavity is communicated with the upper end parts of the valve core cavities in the corresponding adsorption modules; the lower suction plate is positioned on the lower side of the valve plate, a plurality of adsorption holes are vertically formed in the lower suction plate in a penetrating mode, and the adsorption holes and the valve core cavities are arranged in a one-to-one correspondence mode; when the lower side of the adsorption hole is pasted with the metal foil, the bead body in the valve core cavity falls, and the adsorption hole is communicated with the vacuum sub-cavity through the valve core cavity; when the lower side of the adsorption hole is communicated with the atmosphere, the ball body in the valve core cavity rises to block the upper end part of the valve core cavity. The adsorption of the metal foil can be realized, the stability is good, the flatness of the metal foil is good, the detection is convenient, and the application range is wide.)

1. A vacuum adsorption device compatible with multi-size metal foils, comprising:

the valve comprises a valve plate, a valve core and a valve core cavity, wherein a plurality of adsorption modules are arranged on the valve plate, each adsorption module comprises a plurality of valve core cavities, and a bead body is arranged in each valve core cavity;

the upper plate is positioned on the upper side of the valve plate, a plurality of vacuum sub-cavities are formed between the upper plate and the valve plate, the vacuum sub-cavities and the adsorption modules are arranged in a one-to-one correspondence manner, and a single vacuum sub-cavity is communicated with the upper end parts of the valve core cavities in the corresponding adsorption modules;

the lower suction plate is positioned on the lower side of the valve plate, a plurality of adsorption holes are vertically formed in the lower suction plate in a penetrating mode, and the adsorption holes and the valve core cavities are arranged in a one-to-one correspondence mode;

when the lower side of the adsorption hole is attached with the metal foil, the bead body in the valve core cavity falls down, and the adsorption hole is communicated with the vacuum sub-cavity through the valve core cavity; when the lower side of the adsorption hole is communicated with the atmosphere, the ball body in the valve core cavity rises to block the upper end part of the valve core cavity.

2. The multi-sized metal foil compatible vacuum chuck according to claim 1, wherein the plurality of chucking holes are arranged in an array.

3. The multi-size metal foil compatible vacuum adsorption device of claim 1, wherein a plurality of the vacuum sub-chambers are separated by a sealing strip to form independent chambers.

4. The multi-sized metal foil compatible vacuum adsorption device of claim 1, wherein the number of vacuum sub-chambers is 2-6.

5. The multi-size metal foil compatible vacuum adsorption device according to claim 1, wherein the spool cavity comprises a conical cavity and a cylindrical cavity, the conical cavity is located on the upper side of the cylindrical cavity, the outer diameter of the bead is larger than that of the conical cavity, the outer diameter of the bead is smaller than that of the cylindrical cavity, and the inner diameter of the adsorption hole is smaller than that of the cylindrical cavity.

6. The vacuum adsorption device compatible with multi-size metal foils as claimed in claim 1, wherein a plurality of air blowing holes are formed in the upper plate, and the air blowing holes are communicated with the vacuum sub-cavities to blow air into the vacuum sub-cavities to break vacuum.

7. The multi-sized metal foil compatible vacuum chuck as claimed in claim 1, wherein the lower suction plate is provided with a light absorbing coating.

8. The multi-dimensional metal foil compatible vacuum adhesion apparatus of claim 7, wherein the light absorbing coating is a black teflon coating.

9. The multi-sized metal foil compatible vacuum chuck device according to claim 1, wherein the lower surface of the lower suction plate is provided with a sandblasted matte surface.

10. The vacuum adsorption device compatible with multi-size metal foils as claimed in claim 1, wherein a groove is formed in the lower surface of the upper plate, and the groove and the valve plate are matched to form a vacuum sub-cavity.

Technical Field

The invention relates to the technical field of vacuum adsorption, in particular to a vacuum adsorption device compatible with multi-size metal foils.

Background

In the production of metal foil for electronic components, it is necessary to carry out a process flow such as transportation and inspection of the metal foil for various purposes. Traditional transport mode is accomplished by the manual work, however because the metal foil itself has thin, soft, yielding and easily stained, artifical transport efficiency is lower, the high and fragile metal foil scheduling problem of limitation, the electronics factory realizes automaticly gradually afterwards, therefore also produced the automatic handling of metal foil and carried out the demand that optical inspection was carried out to it in handling, and because the characteristics of metal foil itself, automatic handling has many problem points, the sucking disc adsorption mode commonly used is difficult to avoid the metal foil deformation problem, and easily stained product, the transport mode is single to be difficult to satisfy not unidimensional, application demands such as the transport detection of different specification products.

The metal foil conveying process has a deformation problem, the adsorption mode in the product conveying process is greatly limited, and the lower surface detection in the conveying process is difficult to realize. At present, the metal foil surface needs to be detected on a flat platform to ensure that the upper surface of the metal foil is flat, if the reverse surface needs to be detected, the metal foil needs to be turned over manually, the efficiency is extremely low, in addition to the differences of the thickness, the weight, the size and the like of a product, the carrying with good compatibility is difficult to realize by using the traditional sucking disc adsorption carrying mode, and the problems of low efficiency, poor firmness of the adsorption effect and difficulty in meeting the complex application scene (such as appearance detection) exist.

Disclosure of Invention

The invention aims to provide a vacuum adsorption device compatible with multi-size metal foils, which can realize the adsorption of the metal foils, has good stability and flatness of the metal foils, is convenient to detect and has wide application range.

In order to solve the above technical problem, the present invention provides a vacuum adsorption device compatible with multi-size metal foils, comprising:

the valve comprises a valve plate, a valve core and a valve core cavity, wherein a plurality of adsorption modules are arranged on the valve plate, each adsorption module comprises a plurality of valve core cavities, and a bead body is arranged in each valve core cavity;

the upper plate is positioned on the upper side of the valve plate, a plurality of vacuum sub-cavities are formed between the upper plate and the valve plate, the vacuum sub-cavities and the adsorption modules are arranged in a one-to-one correspondence manner, and a single vacuum sub-cavity is communicated with the upper end parts of the valve core cavities in the corresponding adsorption modules;

the lower suction plate is positioned on the lower side of the valve plate, a plurality of adsorption holes are vertically formed in the lower suction plate in a penetrating mode, and the adsorption holes and the valve core cavities are arranged in a one-to-one correspondence mode;

when the lower side of the adsorption hole is attached with the metal foil, the bead body in the valve core cavity falls down, and the adsorption hole is communicated with the vacuum sub-cavity through the valve core cavity; when the lower side of the adsorption hole is communicated with the atmosphere, the ball body in the valve core cavity rises to block the upper end part of the valve core cavity.

Preferably, the plurality of adsorption holes are arranged in an array.

Preferably, a plurality of the vacuum subchambers are separated by sealing strips to form independent cavities.

Preferably, the number of the vacuum subchambers is 2-6.

Preferably, the spool cavity comprises a conical cavity and a cylindrical cavity, the conical cavity is located on the upper side of the cylindrical cavity, the outer diameter of the bead body is larger than that of the conical cavity, the outer diameter of the bead body is smaller than that of the cylindrical cavity, and the inner diameter of the adsorption hole is smaller than that of the cylindrical cavity.

Preferably, the upper plate is provided with a plurality of air blowing holes, and the air blowing holes are communicated with the vacuum sub-cavity to blow air into the vacuum sub-cavity to break vacuum.

Preferably, the lower suction plate is provided with a light absorption coating.

Preferably, the light absorption coating is a black teflon coating.

Preferably, the lower surface of the lower suction plate is provided with a sandblasting matte surface.

Preferably, the lower surface of the upper plate is provided with a groove body, and the groove body is matched with the valve plate to form a vacuum sub-cavity.

The invention has the beneficial effects that:

1. the metal foil adsorption device can realize the adsorption of the metal foil through the coordination of the valve plate, the upper plate and the lower suction plate, has good stability, can solve the deformation problem in the metal foil transportation process, ensures the flatness of the metal foil in the transfer process, avoids the contamination problem, is suitable for products with various specifications, greatly improves the efficiency, and can be applied to scenes such as piece-by-piece detection, transfer and the like.

2. After the lower suction plate is contacted with a product, an adsorption hole contacted with the product forms a closed space, the negative pressure in the valve core cavity is equal to the air pressure of the vacuum sub-cavity, the beads fall under the action of gravity, and at the moment, the adsorption hole adsorbs the product; and the bead body is still positioned at the upper end part of the valve core cavity so that the vacuum sub-cavity can not be decompressed, and the gas flow is saved.

3. In the invention, because the plurality of adsorption holes have negative pressure, the metal foil is flatly pressed on the lower adsorption plate by atmospheric pressure, so that the lower surface of the product is completely exposed, and the defect detection of the lower surface of the product is realized without turning over the product.

4. The vacuum degree balance control device is provided with a plurality of vacuum sub-cavities, so that the vacuum degree balance control device can be suitable for balance and independent control of the vacuum degrees of different areas of the lower suction plate with a large area, and the application range is wide.

Drawings

FIG. 1 is a first schematic structural diagram of the present invention;

FIG. 2 is a cross-sectional view of the present invention;

FIG. 3 is an enlarged view of a portion of FIG. 2 in area A;

FIG. 4 is a second schematic structural view of the present invention;

FIG. 5 is a schematic structural view of the sealing tape after the upper plate is removed.

The reference numbers in the figures illustrate: 10. an upper plate; 11. a gas blowing hole; 20. a valve plate; 21. a spool cavity; 22. a bead body; 30. a lower suction plate; 31. an adsorption hole; 32. a seal ring; 40. plating; 50. vacuum cavity division; 60. a sealing strip.

Detailed Description

The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.

Referring to fig. 1 to 5, the present invention discloses a vacuum adsorption device compatible with multi-sized metal foils, which includes a valve plate 20, an upper plate 10 and a lower suction plate 30.

The valve plate 20 is provided with a plurality of adsorption modules, each adsorption module comprises a plurality of valve core cavities 21, and each valve core cavity 21 is provided with a bead 22. The beads 22 may be steel balls.

The upper plate 10 is located the upside of valve plate 20, forms a plurality of vacuum subchambers 50 between upper plate 10 and the valve plate 20, and vacuum subchambers 50 and adsorption module one-to-one set up, and single vacuum subchambers 50 communicates with the valve core chamber 21 upper end in the adsorption module that corresponds. The upper plate 10 is provided with a vacuum connector connected to a suction pump so that a negative pressure is supplied to the vacuum subchamber 50 through the vacuum connector.

The lower suction plate 30 is located on the lower side of the valve plate 20, a plurality of adsorption holes 31 vertically penetrate through the lower suction plate 30, and the adsorption holes 31 are arranged in one-to-one correspondence with the valve core cavities 21. The single adsorption hole 31 communicates with the single spool chamber 21.

When the metal foil is adhered to the lower side of the adsorption hole 31, the bead 22 in the valve core cavity 21 falls and the adsorption hole 31 is communicated with the vacuum sub-cavity 50 through the valve core cavity 21, so that negative pressure is generated at the adsorption hole 31, and the metal foil can be adsorbed. When the lower side of the adsorption hole 31 is communicated with the atmosphere, the ball 22 in the spool chamber 21 rises to block the upper end portion of the spool chamber 21. The metal foil may be a metal foil with low hardness such as copper foil, aluminum foil, and silver foil.

Due to the arrangement of the plurality of vacuum sub-chambers 50, the balance and independent control of the vacuum degrees of different areas of the lower suction plate with a large area can be adapted. As shown in fig. 5, two sub-cavities are provided, so that the adsorption of the metal foils with two large types of sizes can be accommodated. When the size of the metal foil is small, only one vacuum sub-chamber 50 needs to generate negative pressure, so that the metal foil with the small size is adsorbed. When the size of the metal foil is large, in order to ensure the stability of the adsorption, the two vacuum sub-cavities 50 can generate negative pressure, so that the large-size metal foil can be conveniently and stably adsorbed.

The working principle of the invention is as follows: the moving mechanism (such as a three-axis manipulator) drives the device to move to the position above a product, after the device is contacted with the product, the adsorption hole 31 contacted with the product forms a closed space, the negative pressure in the valve core cavity 21 is equal to the air pressure of the vacuum sub-cavity 50, the bead body 22 falls under the action of gravity, and at the moment, the adsorption hole 31 adsorbs the product; and the adsorption hole 31 which is not covered by the product, the bead 22 is still positioned at the upper end part of the valve core cavity 21, so that the vacuum sub-cavity 50 is not decompressed, and the gas flow is saved. Due to the existence of negative pressure in the plurality of adsorption holes 31, the metal foil is flatly pressed on the lower adsorption plate 30 by atmospheric pressure, so that the lower surface of the product is completely exposed, and the defect detection of the lower surface of the product is realized without turning over the product.

The plurality of adsorption holes 31 are arranged in an array. For example, the plurality of adsorption holes 31 may be arranged in a square array. The hole pitch of the adjacent two adsorption holes 31 may be 15 mm.

The plurality of vacuum subchambers 50 are separated by seal bars 60 to form individual chambers. The sealing strip 60 may be a solid silicone strip.

The number of the vacuum subchambers 50 is 2-6. The number of vacuum subchambers 50 can be set as desired.

The spool cavity 21 includes a conical cavity and a cylindrical cavity, the conical cavity is located on the upper side of the cylindrical cavity, and the conical cavity and the cylindrical cavity are communicated. The outer diameter of the bead 22 is larger than that of the conical cavity, the outer diameter of the bead 22 is smaller than that of the cylindrical cavity, and the inner diameter of the adsorption hole 31 is smaller than that of the cylindrical cavity. For example, the outer diameter of the bead 22 is 2.8mm, the inner diameter of the adsorption hole 31 is 1.2mm, the inner diameter of the upper end of the tapered cavity is 1.8mm, and the inner diameter of the cylindrical cavity is 3.2 mm.

The upper plate 10 is provided with a plurality of air blowing holes 11, and the air blowing holes 11 are communicated with the vacuum sub-cavity 50 to blow air into the vacuum sub-cavity 50 to break vacuum. After the product adsorbed by the lower suction plate 30 is detected, the air blowing holes 11 blow air into the vacuum sub-cavity 50 to break vacuum, so that the product is separated from the vacuum suction plate.

The lower suction plate 30 is provided with a light-absorbing plating layer 40. The light absorbing plating 40 is a black teflon plating 40. Because the current defect detection is mostly optical detection, stray light can be reduced by using the light absorption coating 40, and the definition of a detected image is enhanced. The lower surface of the lower suction plate 30 is roughened by sand blasting with 150 mesh fine sand. Therefore, the roughness of the lower surface of the lower suction plate 30 can be enhanced, and the black Teflon coating 40 is plated on the sand blasting rough surface, so that the light absorption plate has better wear resistance and good light absorption effect.

The lower surface of upper plate 10 is seted up the cell body, and the cell body forms vacuum minute chamber 50 with valve plate 20 cooperation.

Be provided with a plurality of holding tanks at the upper surface of lower suction disc 30, the holding tank all is provided with sealing washer 32 around adsorbing the hole 31 setting in every holding tank, so, at valve plate 20 and the fixed back of lower suction disc 30 laminating, can have better sealing performance.

The valve plate 20, the upper plate 10 and the lower suction plate 30 may be fixed by bolts.

The invention is stable and applicable to various types of copper foil (CCL) products with the maximum 700x700(mm) and the minimum 458 x 358(mm) and the thickness of 0.052-2.54 mm; the invention can flatly adsorb the product below the suction plate, expose the lower surface of the product and meet the flatness and optical requirements required by optical detection.

The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. The equivalent substitution or change made by the technical personnel in the technical field on the basis of the invention is all within the protection scope of the invention. The protection scope of the invention is subject to the claims.