阅读说明：本技术 二氧化硅（SiO2）化学镀膜后处理的工艺技术方法 (Silicon dioxide (SiO)2) Process technology method for chemical coating post-treatment ) 是由 王东明 于 2020-03-31 设计创作，主要内容包括：本发明公开一种二氧化硅化学镀膜后处理工艺技术方法,专用于化学镀膜后处理工序(采用专利申请号201910902177.3配方制备的浆液),对镀完SiO2膜的工件按本发明工艺技术方法进行处理,可得到硬度高、耐磨性好、绝缘性好、致密度高、光透过率高、附着力强、形状任意的二氧化硅覆膜产品；处理后的SiO2膜获得的优异理化特性,在新型半导体器件、量子器件研发、超导薄膜应用、燃料电池堆体制造、生物工程、等高新技术领域有广泛用途。(The invention discloses a technical method for post-treatment of silicon dioxide chemical coating, which is specially used for the post-treatment process of chemical coating (slurry prepared by adopting the formula of patent application No. 201910902177.3), and a silicon dioxide coated product with high hardness, good wear resistance, good insulativity, high density, high light transmittance, strong adhesive force and any shape can be obtained by treating a workpiece coated with a SiO2 film according to the technical method; the excellent physical and chemical properties of the treated SiO2 film can be widely applied to the high and new technical fields of novel semiconductor devices, quantum device research and development, superconducting thin film application, fuel cell stack body manufacturing, bioengineering, and the like.)

1. Silicon dioxide (SiO)₂) The preparation method of the chemical coating slurry is characterized by comprising the following steps: comprises the following process steps

(1) Preparing various chemical raw materials, wherein the required raw materials comprise: ethyl acetate, ethanol, methanol, acetic anhydride, acetone, n-amyl alcohol, acetylacetone, silicate ester, phosphoric acid and pure water.

(2) The required container: 2 plastic barrels with 200 KG. One platform scale, a measuring cylinder, a beaker and a stirrer.

(3) The working environment for preparing the slurry is that the indoor temperature is 20-22 ℃. An explosion-proof electrical switch is used indoors and air circulation is kept.

(4) The components of the raw materials are as follows: ethyl acetate: 31KG, 24KG ethanol, 28KG methanol, 3300ML acetic anhydride, 33.9KG acetone, 2470ML n-pentanol, 1500ML acetylacetone, 30KG silicate, 75ML phosphoric acid and 5800ML pure water.

(5) Adding ethyl acetate: 31KG, 24KG ethanol, 28KG methanol, 3300ML acetic anhydride, 33.9KG acetone and 2470ML n-pentanol are placed in a 200KG vat and stirred for 5 minutes.

(6) Then, 1500ML of acetylacetone, 30KG of silicate, 75ML of phosphoric acid and 5800ML of pure water were added, and the mixture was stirred for 30 minutes.

(7) The barrel was sealed and allowed to stand for 7 days before the slurry preparation was complete.

2. A Silica (SiO) according to claim 1₂) The preparation method of the chemical coating slurry is characterized in that the required raw materials comprise: ethyl acetate, ethanol, methanol, acetic anhydride, acetone, n-amyl alcohol, acetylacetone, silicate ester, phosphoric acid and pure water.

3. A Silica (SiO) according to claim 1₂) The preparation method of the chemical coating slurry is characterized in that the working environment for preparing the slurry is that the indoor temperature is 21-22 ℃, and indoor explosion prevention and ventilation are realized.

4. A Silica (SiO) according to claim 1₂) The preparation method of the chemical coating slurry is characterized by comprising the following raw materials: ethyl acetate: 31KG, 24KG ethanol, 28KG methanol, 3300ML acetic anhydride, 33.9KG acetone, 2470ML n-pentanol, 1500ML acetylacetone, 30KG silicate, 75ML phosphoric acid and 5800ML pure water.

5. A Silica (SiO) according to claim 1₂) The preparation method of the chemical coating slurry is characterized in that ethyl acetate: 31KG, 24KG ethanol, 28KG methanol, 3300ML acetic anhydride, 33.9KG acetone and 2470ML n-pentanol are placed in a 200KG vat and stirred for 5 minutes.

6. A Silica (SiO) according to claim 1₂) The preparation method of the chemical coating slurry is characterized in that the preparation method comprises the steps of injecting 1500ML acetylacetone, 30KG silicate, 75ML phosphoric acid and 5800ML pure water, and stirring for 30 minutes.

7. A Silica (SiO) according to claim 1₂) Chemical coating slurryThe preparation method is characterized in that the total weight percentage of the raw materials is as follows: ethyl acetate: 19.394%, ethanol 15.014%, methanol 17.517%, acetic anhydride 2.229%, acetone 21.208%, n-amyl alcohol 1.236%, acetylacetone 0.914%, silicate 18.768%, phosphoric acid 0.087%, pure water 3.628%, and the error range is +/-30%.

8. A Silica (SiO) according to claim 1₂) The preparation method of the chemical coating slurry is characterized in that the slurry just produced needs to be stored in a sealed manner and can be used after being kept stand for 7 days.