阅读说明：本技术 一种柔性可拉伸传感器及其制备方法和应用 (Flexible stretchable sensor and preparation method and application thereof ) 是由 丁建宁 周小双 袁宁一 徐江 徐修祝 程广贵 于 2019-09-09 设计创作，主要内容包括：本发明属于传感器技术领域,具体涉及一种柔性可拉伸传感器及其制备方法和应用。传感器包括介电层,以及与所述介电层两面紧密贴合的碳纳米管薄膜,两面所述碳纳米管薄膜分别与相应的导电膜相连,所述导电膜分别连接到测量线上；所述介电层,包括柔性基体,所述柔性基体两面均附有胶粘剂,所述介电层上下表面为波浪形结构。同时本发明还提供了该柔性可拉伸传感器的制备方法及其应用。本发明的一种柔性可拉伸传感器具有良好的柔性和可拉伸性能,制程简单,对外界刺激较为敏感,有良好的循环稳定性,可重复多次使用；一般用于柔性机器人或电子皮肤检测人体运动状态等。(The invention belongs to the technical field of sensors, and particularly relates to a flexible stretchable sensor and a preparation method and application thereof. The sensor comprises a dielectric layer and carbon nanotube films tightly attached to two sides of the dielectric layer, wherein the carbon nanotube films on the two sides are respectively connected with corresponding conductive films, and the conductive films are respectively connected to a measuring line; the dielectric layer comprises a flexible substrate, wherein the two surfaces of the flexible substrate are attached with adhesives, and the upper surface and the lower surface of the dielectric layer are of a wave-shaped structure. Meanwhile, the invention also provides a preparation method and application of the flexible stretchable sensor. The flexible stretchable sensor has good flexibility and stretchable performance, is simple in manufacturing process, is sensitive to external stimulation, has good circulation stability, and can be repeatedly used; the device is generally used for flexible robots or electronic skin detection of human motion states and the like.)

1. A flexible stretchable sensor characterized by: the flexible stretchable sensor comprises a dielectric layer and carbon nanotube films tightly attached to two sides of the dielectric layer, the carbon nanotube films on the two sides are respectively connected with corresponding conductive films, and the conductive films are respectively connected to a measuring line; the dielectric layer comprises a flexible substrate, wherein the two surfaces of the flexible substrate are attached with adhesives, and the upper surface and the lower surface of the dielectric layer are of a wave-shaped structure.

2. A flexible stretchable sensor according to claim 1, wherein: the dielectric layer is a VHB double-sided tape, and the carbon nanotube film is a multi-walled carbon nanotube film; the VHB double-sided adhesive tape is provided with an adhesive, and the carbon nanotube film is directly attached to the VHB double-sided adhesive tape.

3. A flexible stretchable sensor according to claim 1, wherein: the two measuring lines are respectively positioned on two surfaces of the dielectric layer, and the two measuring lines are positioned on the same side or two sides of the dielectric layer; or two measuring lines are positioned on the same surface of the dielectric layer, one measuring line is connected with the conductive film on the other surface of the dielectric layer through a conversion film and a plurality of conductor columns, the conductor columns penetrate through the dielectric layer, and the other measuring line is directly connected with the conductive film on the same surface of the measuring line; the two measuring lines are positioned at the same side or two sides of the dielectric layer, and when the two measuring lines are positioned at the same side of the dielectric layer, the conductive film, the conversion film and the conductor column on the surface of the dielectric layer where the two measuring lines are positioned at the same side of the carbon nanotube film; when the conductive film, the conversion film and the conductor columns are positioned on two sides of the carbon nanotube film, wherein the conductive film, the conversion film and the conductor columns are positioned on the surface of the dielectric layer where the two measuring lines are positioned; the conversion film and the conductor column are not in contact with the conductive film and the carbon nanotube film on the same surface of the dielectric layer.

4. A flexible stretchable sensor according to claim 3, wherein: the conductive film, the conversion film and the conductor post are all made of conductive silver paste.

5. A flexible stretchable sensor according to claim 1, wherein: the carbon nanotube film is characterized by further comprising an insulating protective film, wherein the insulating protective film covers the carbon nanotube film and the conductive film.

6. A method of making a flexible stretchable sensor according to claim 1 comprising the steps of:

step S1, washing the VHB double-sided tape, and drying;

step S2, stretching the dried VHB double-sided tape to 100% -800% strain, fixing two ends with a clamp, and keeping the VHB double-sided tape in a stretched state;

step S3, attaching the carbon nanotube film on a glass slide, and transferring the carbon nanotube film to one surface of a VHB double-sided adhesive tape through the glass slide;

step S4, repeating the operation of step S3, enabling the carbon nanotube film to be attached to the other side of the VHB double-sided tape, pressing to enable the carbon nanotube film to be in close contact with the VHB double-sided tape, loosening the clamp, and enabling the VHB double-sided tape and the carbon nanotube film to shrink naturally;

and step S5, one side of the carbon nanotube film on one side of the VHB double-sided tape is in contact connection with the conductive film, one end of the measuring wire is connected with the conductive film, the other end of the measuring wire is connected with an external circuit, and the carbon nanotube film on the other side of the VHB double-sided tape is connected out by the same connection method.

7. The method of claim 6, wherein: in step S5, the conductive film is a conductive silver paste, and the conductive silver paste is brushed on one side of the carbon nanotube film and dried.

8. The method of claim 6, wherein: in step S5, the conductive film is conductive silver paste, the conductive silver paste is brushed on one side of the carbon nanotube film and dried, one of the conductive films is provided with a plurality of through holes penetrating through the VHB double-sided tape, a conductor column is installed in each through hole, one end of each conductor column is connected with the conductive film, the other end of each conductor column is connected with a conversion film, and the conversion film is attached to the VHB double-sided tape and connected with a measurement line.

9. The method of claim 6, wherein: in step S5, the conductor pillar and the conversion film are both made of conductive silver paste, the conductive silver paste is coated on the other end of the through hole to serve as the conversion film, then the through hole is filled with the conductive silver paste to serve as the conductor pillar, and the conductor pillar is dried, and the measuring line is electrically connected to the conversion film.

10. Use of a flexible stretchable sensor according to any of claims 1-5 for flexible robotic or electronic skin detection of human motion state.

Technical Field

The invention belongs to the technical field of sensors, and particularly relates to a flexible stretchable sensor and a preparation method and application thereof.

Background

The flexible wearable electronic product is applied to wearable human health monitoring and nursing systems, has functions of monitoring human motion and preventing diseases, and is receiving more and more attention. Carbon nanotubes have the advantages of good electrical conductivity, extremely high aspect ratio, excellent flexibility, light weight, high chemical and thermal stability, etc., and along with their functionalization and mass production, they are promising candidates for flexible wearable electronics. In order to further improve the application effect of Carbon Nanotubes (CNTs) in wearable strain sensors, researchers have developed CNTs with various forms, such as ordered CNT arrays, CNT fibers, and CNT films.

The flexible stretchable sensor researched at present is insensitive to external stimulation, and the preparation process of the flexible sensor is complex, for example, a silicon-based semiconductor type capacitance pressure sensor is mostly based on the photoetching technology, and has the defects of poor flexibility, complex manufacturing process, strict requirements, higher cost and the like.

Disclosure of Invention

The invention aims to overcome the problems of poor flexibility and insensitivity to external stimulus in the prior art, provides a flexible stretchable sensor which has good flexibility and stretchability, is simple in manufacturing process and is sensitive to external stimulus, and also provides a preparation method and application of the sensor.

The technical scheme adopted by the invention for solving the technical problems is as follows:

a flexible stretchable sensor comprises a dielectric layer and carbon nanotube films tightly attached to two sides of the dielectric layer, wherein the carbon nanotube films on the two sides are respectively connected with corresponding conductive films which are respectively connected to a measuring line; the dielectric layer comprises a flexible substrate, wherein the two surfaces of the flexible substrate are attached with adhesives, and the upper surface and the lower surface of the dielectric layer are of a wave-shaped structure.

Preferably, the dielectric layer is a VHB double-sided tape, and the carbon nanotube film is a multiwalled carbon nanotube film. The VHB double-sided adhesive tape is provided with the adhesive, the carbon nanotube film is directly attached to the VHB double-sided adhesive tape, the manufacturing process is saved, the efficiency is improved, the multi-walled carbon nanotube film has a large specific surface area, good toughness and conductivity, and the process for preparing the multi-walled carbon nanotube film is simple.

Furthermore, the two measuring lines are positioned on the same surface of the dielectric layer, one of the measuring lines is connected with the conductive film on the other surface of the dielectric layer through a conversion film and a plurality of conductor columns, the conductor columns penetrate through the dielectric layer, and the other measuring line is directly connected with the conductive film on the same surface of the measuring line; the two measuring lines are positioned at the same side or two sides of the dielectric layer, and when the two measuring lines are positioned at the same side of the dielectric layer, the conductive film, the conversion film and the conductor column on the surface of the dielectric layer where the two measuring lines are positioned at the same side of the carbon nanotube film; when the conductive film, the conversion film and the conductor columns are positioned on two sides of the carbon nanotube film, wherein the conductive film, the conversion film and the conductor columns are positioned on the surface of the dielectric layer where the two measuring lines are positioned; the conversion film and the conductor column are not in contact with the conductive film and the carbon nanotube film on the same surface of the dielectric layer.

Furthermore, the two measuring lines are respectively positioned on two surfaces of the dielectric layer, and the two measuring lines are positioned on the same side or two sides of the dielectric layer.

The two measuring lines electrically connected with the two carbon nanotube films are arranged on the same side of the dielectric layer respectively, so that the measuring lines are prevented from influencing the measuring precision when the flexible stretchable sensor is pasted, and meanwhile, the two measuring lines are arranged on the same side of the dielectric layer, so that the connecting operation of the measuring lines and an external circuit is facilitated.

Preferably, the conductive film, the conversion film, and the conductor post are all made of conductive silver paste. The conductive silver paste has good conductivity and flexibility, and the conductive silver paste is made into a conductive film, a conversion film and a conductor column, so that the operation process is simple.

Further, the carbon nanotube film further comprises an insulating protection film, and the insulating protection film covers the carbon nanotube film and the conductive film. The insulating protective film is covered on the carbon nanotube film and the conductive film, so that the insulating protective film is used for protecting the carbon nanotube film and the conductive film and preventing damage on the one hand, and has an insulating effect on the other hand, and the insulating problem of moisture, water and the like on the carbon nanotube film and the conductive film is prevented.

A method of making a flexible, stretchable sensor, comprising the steps of:

step S1, washing the VHB double-sided tape, and drying;

step S2, stretching the dried VHB double-sided tape to 100% -800% strain, fixing two ends with a clamp, and keeping the VHB double-sided tape in a stretched state;

step S3, attaching the carbon nanotube film on a glass slide, and transferring the carbon nanotube film to one surface of a VHB double-sided adhesive tape through the glass slide;

step S4, repeating the operation of step S3, enabling the carbon nanotube film to be attached to the other side of the VHB double-sided tape, pressing to enable the carbon nanotube film to be in close contact with the VHB double-sided tape, loosening the clamp, and enabling the VHB double-sided tape and the carbon nanotube film to shrink naturally;

and step S5, one side of the carbon nanotube film on one side of the VHB double-sided tape is in contact connection with the conductive film, one end of the measuring wire is connected with the conductive film, the other end of the measuring wire is connected with an external circuit, and the carbon nanotube film on the other side of the VHB double-sided tape is connected out by the same connection method.

Preferably, in step S5, the conductive film is a conductive silver paste, and the conductive silver paste is brushed on one side of the carbon nanotube film and dried. The conductive silver paste used as the conductive film has the advantage of simple operation, can be directly attached to the dielectric layer in a coating or screen printing mode, and is easy to control the thickness of the conductive film.

Further, in step S5, the conductive film is conductive silver paste, the conductive silver paste is brushed on one side of the carbon nanotube film and dried, one of the conductive films is provided with a plurality of through holes penetrating through the VHB double-sided tape, a conductor column is installed in each through hole, one end of each conductor column is connected with the conductive film, the other end of each conductor column is connected with the conversion film, and the conversion film is attached to the VHB double-sided tape and connected with the measurement line.

Preferably, in step S5, the conductor pillar and the conversion film are both made of conductive silver paste, the conductive silver paste is coated on the other end of the through hole to serve as the conversion film, then the through hole is filled with the conductive silver paste to serve as the conductor pillar, and the conductor pillar is dried, and the measuring line is electrically connected to the conversion film.

A flexible stretchable sensor and use of a flexible stretchable sensor prepared by a method of preparing the flexible stretchable sensor, the flexible stretchable sensor measuring a tensile force and/or a pressure. The flexible stretchable sensor obtained by the invention is used for detecting the motion state of a human body by a flexible robot or an electronic skin.

The flexible stretchable sensor and the preparation method and application thereof have the beneficial effects that:

1. the flexible and stretchable corrugated structure has good flexibility and stretchability, is simple in manufacturing process and sensitive to external stimulation, has better flexibility and stretchability due to the corrugated structure, and is more sensitive to external stimulation;

2. according to the invention, the VHB double-sided adhesive tape is adopted to carry the adhesive, the carbon nanotube film is directly attached to the VHB double-sided adhesive tape, the manufacturing process is saved, the efficiency is improved, the preparation method is simple, the multi-walled carbon nanotube film has a large specific surface area, good toughness and conductivity, the preparation process for preparing the multi-walled carbon nanotube film is simple, the conductive film, the conversion film and the conductor column are all made of conductive silver paste, and the conductive silver paste has good conductivity, good flexibility, simple operation process, low manufacturing cost and good performance;

3. the two measuring lines electrically connected with the two carbon nanotube films are arranged on one side of the dielectric layer, so that the flexible stretchable sensor can be attached conveniently, the measuring lines are prevented from influencing the measuring precision when the flexible stretchable sensor is attached, and meanwhile, the two measuring lines are arranged on the same side of the dielectric layer, so that the connecting operation of the measuring lines and an external circuit is facilitated;

4. the flexible stretchable sensor obtained by the invention has the monitoring capability of being more sensitive to low voltage, has good circulation stability and can be repeatedly used for many times;

5. the flexible stretchable sensor obtained by the invention is used for detecting the motion state of a human body by a flexible robot or an electronic skin, and the like, and the sensor is attached to the finger joint, so that the function of monitoring the motion of the finger is realized, different motion states of the finger can be effectively monitored, and the detection of strain and stress can be realized.

Drawings

The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

FIG. 1 is a perspective view of a flexible, stretchable sensor of the present invention;

FIG. 2 is a front view of a flexible, stretchable sensor of the present invention;

fig. 3 is a partial enlarged view of the portion X in fig. 2;

FIG. 4 is a front view of a second structural embodiment of a flexible stretchable sensor of the present invention;

FIG. 5 is a perspective view of a third structural embodiment of a flexible, stretchable sensor of the present invention;

FIG. 6 is a front view of FIG. 5;

FIG. 7 is a perspective view of a fourth structural embodiment of a flexible, stretchable sensor of the present invention;

FIG. 8 is a stress-strain diagram of a VHB double-sided tape of the present invention;

FIG. 9 is a graph of pressure versus capacitance change for a flexible, stretchable sensor of the present invention;

FIG. 10 is a graph of the cycling performance of a flexible, stretchable sensor of the present invention against a fixed pressure;

FIG. 11 is a view of the monitoring of finger movement by a flexible stretchable sensor of the present invention.

Fig. 12 is a schematic diagram of the results of the pair of finger movements of fig. 11.

Wherein, 1, dielectric layer; 2. a carbon nanotube film; 3. a conductive film; 4. measuring a line; 5. an insulating protective film; 6. switching the film; 61. a conductor pillar.

Detailed Description

The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.

Fig. 1-3 show an embodiment of a flexible and stretchable sensor according to the present invention, which includes a dielectric layer 1, and carbon nanotube films 2 closely attached to two sides of the dielectric layer 1, wherein the carbon nanotube films 2 are respectively connected to corresponding conductive films 3, and the conductive films 3 are respectively connected to measurement lines 4; the dielectric layer 1 comprises a flexible substrate, adhesive is attached to two surfaces of the flexible substrate, and the upper surface and the lower surface of the dielectric layer 1 are of a wave-shaped structure. Preferably, the dielectric layer 1 is a VHB double-sided tape, the thickness is preferably 0.15-0.6 mm, the VHB double-sided tape has good flexibility and stretchability, the carbon nanotube film 2 is preferably a multiwall carbon nanotube film 2, further preferably an in-line multiwall carbon nanotube film 2, and the conductive film 3 is preferably made of conductive silver paste, and the thickness is preferably 0.05-0.2 mm.

FIG. 1 shows two measuring lines 4 on two sides of a dielectric layer 1 respectively led out from different directions along the dielectric layer 1; in a second structural embodiment, as shown in fig. 4, two measuring lines 4 on both sides of the dielectric layer 1 are respectively led out from the same direction along the dielectric layer 1.

For convenience of application, further, two measuring lines 4 are disposed on the same side of the dielectric layer 1, wherein one measuring line 4 is connected to the conductive film 3 on the other side of the dielectric layer 1 through the switching film 6 and a plurality of conductive posts 61, the conductive posts 61 penetrate through the dielectric layer 1, and the other measuring line 4 is directly connected to the conductive film 3 on the same side of the measuring line 4. In order to obtain better conductive connectivity and convenient handling, it is preferable that the conductive film 3, the conversion film 6, and the conductor post 61 are made of conductive silver paste. Fig. 5-6 show a third structure of the embodiment, in which the conductive film 3 on the lower surface of the dielectric layer 1 is connected to the conversion film 6 on the upper surface of the dielectric layer 1 through the conductive post 61, and the conversion film 6 is away from the carbon nanotube film 2 on the upper surface of the dielectric layer 1 and is opposite to the conductive film 3 on the upper surface of the dielectric layer 1. Fig. 7 shows a fourth structure of the embodiment, in which the conductive film 3 on the lower surface of the dielectric layer 1 is connected to the conversion film 6 on the upper surface of the dielectric layer 1 through the conductive post 61, the conversion film 6 and the conductive film 3 on the upper surface of the dielectric layer 1 are located on the same side of the carbon nanotube film 2 on the upper surface of the dielectric layer 1, and the conversion film 6 and the conductive film 3 on the upper surface of the dielectric layer 1 are provided with a gap, so that the two measurement lines 4 on the upper surface of the dielectric layer 1, which are respectively connected to the conversion film 6 and the conductive film 3, are located on the same side of the carbon nanotube film 2, and the measurement lines 4 have.

In order to obtain a flexible stretchable sensor with better moisture resistance, an insulating protective film 5 is applied to cover the carbon nanotube film 2 and the conductive film 3. Therefore, the moisture-proof effect and the good protection effect are achieved, the insulating protection film 5 is preferably made of flexible stretchable materials such as PDMS, SEBS and Eco-flex materials, and the thickness of the insulating protection film is preferably 5-200 um.

The following presents a general summary of the invention in conjunction with specific examples of the construction and method of making a flexible, stretchable sensor, but is not intended to limit the invention.

The specifications of the raw materials used in the experiment and the manufacturers are shown in the following table.

Instrument used in experiment

A method for preparing a flexible and stretchable sensor comprises the following steps

Step S1, washing a commercial VHB double-sided tape, model 4910, with ethanol and deionized water for 5 minutes to reduce its viscosity, and then drying in a 40 ℃ drying oven for 30 minutes. Then cutting the dried VHB double-sided tape into 3X 2cm²The rectangle of (a) serves as an intermediate dielectric layer.

Step S2, the cut VHB double-sided tape is stretched to 300% strain, and both ends are clamped by a jig to be fixed, and the VHB double-sided tape is held in this stretched state.

And step S3, transferring the carbon nanotube film 2 on the glass slide to the VHB double-sided adhesive tape, and adhering the carbon nanotube film 2 to the surface of the VHB double-sided adhesive tape from the glass slide by using the viscosity of the VHB double-sided adhesive tape.

And step S4, repeating the operation, so that the carbon nanotube films 2 are attached to the two sides of the VHB double-sided tape, and the two carbon nanotube films 2 are kept opposite. And lightly pressing the carbon nanotube film 2 with fingers to make the carbon nanotube film tightly contact with the VHB double-sided adhesive tape, and loosening the clamp to make the VHB double-sided adhesive tape naturally shrink.

Step S5, coating and drying one end of the carbon nanotube film 2 on both sides with conductive silver paste, and connecting the measuring line 4 to the conductive silver paste, where the measuring line 4 is a copper sheet in this embodiment.

To obtain the structure of fig. 5, in step S5, a conductive silver paste was brushed on one side of the carbon nanotube film 2 on one side of the VHB double-sided tape, and a conductive silver paste was brushed on the other side of the carbon nanotube film 2 on the other side of the VHB double-sided tape, and placed in a 60 ℃ drying oven to be dried for 2 hours. And three through holes penetrating through the VHB double-sided adhesive tape are formed in one conductive film, conductive silver paste is poured into one end, far away from the conductive film, of each through hole, the three through holes are connected through the conductive silver paste, the conductive silver paste is placed in a drying oven at the temperature of 60 ℃, drying is carried out for 2 hours, and the conversion film and the conductive film are led out through copper sheets or other wires, so that the conversion film and the conductive film are conveniently connected with an external circuit. In order to obtain the structure of fig. 7, in step S5, a conductive silver paste is brushed on one side of the carbon nanotube film 2 on one side of the VHB double-sided tape, and a conductive silver paste is brushed on the same side of the carbon nanotube film 2 on the other side of the VHB double-sided tape, wherein the conductive silver paste has an epitaxial size larger than that of the other side, so that a hole can be conveniently formed in the conductive silver paste without touching the conductive silver paste on the other side, and the conductive silver paste is dried in a drying oven at 60 ℃ for 2 hours. And three through holes penetrating through the VHB double-sided adhesive tape are formed in the conductive film with large epitaxial size, conductive silver paste is filled at one end, far away from the conductive film, of each through hole, the three through holes are connected by the conductive silver paste, the conductive silver paste is placed in a drying oven at 60 ℃, drying is carried out for 2 hours, and the conversion film and the conductive film are led out by copper sheets or other wires so as to be conveniently connected with an external circuit. In order to obtain better insulation, a layer of PDMS can be coated on the surfaces of the carbon nanotube film 2 and the conductive film, and the thickness of the PDMS is 5-20 um.

The strain of the flexible stretchable sensor is accurately controlled through a self-made motor module; measuring capacitance by a precise LCR instrument; obtaining SEM images from a scanning electron microscope; a universal testing machine is used for testing the tensile property, and the tensile rate is 50 mm/min; the device was tested for pressure sensitivity using weights of different weights.

Referring to fig. 8, fig. 8 is a stress-strain diagram of VHB double-sided tape, model 4910, with a thickness of 0.4mm, which is commercially available from 3M company, usa, and has excellent mechanical properties, can be stretched to 950%, and has a breaking stress as high as 800kPa, and its own adhesion makes it particularly strong to bond with the carbon nanotube film 2, making it simpler to manufacture a flexible and stretchable sensor, and having a lower cost.

Referring to fig. 9-10, fig. 9 is a graph of the relationship between the pressure and the capacitance change of the flexible and stretchable sensor of the present invention, the capacitance change is larger and larger with the increase of the pressure, and it can be seen from the graph that the capacitance change of the device is larger under the condition of the small pressure being loaded at the early stage, and the capacitance change is smaller and smaller with the increase of the pressure at the later stage. Through linear fitting, a curve is fitted to have two sections of sensitivity coefficients, the sensitivity of the device is 3.6 under a small pressure range of 400Pa, the sensitivity is reduced when the pressure is over 400Pa and is only 0.2, and the phenomena show that the flexible stretchable sensor has better low-pressure sensitivity. The dielectric layer 1 has a large compressible space, so that large deformation can be generated under the action of small pressure, and the capacitance change is large; the compressible space then becomes smaller and eventually reaches saturation as the pressure continues to increase, failing to thin further, resulting in reduced sensitivity to capacitance changes. Fig. 10 is a graph of the cycle performance of the flexible stretchable sensor under a fixed pressure, the cycle graph of the flexible stretchable sensor under the action of a pressure of 400Pa is obtained, a weight of 20g is continuously and repeatedly placed on the sensor to test the stability performance of the sensor to the pressure, it can be seen that the device can show the change of capacitance when the pressure is applied, the device can be recovered to the original state after the force disappears, the repeatability performance is good, the capacitance error when the same weight is loaded is not more than 0.05PF, and the recovery is completely recovered to the original state.

Referring to fig. 11, fig. 11 is a diagram illustrating the monitoring of finger movement by the flexible stretchable sensor according to the present invention. The sensor is attached to the finger joint, when the finger is bent to different angles, the sensor is stretched to different strains, so that the facing area of the carbon nanotube film 2 is increased, the thickness of a dielectric layer of the capacitor is reduced, and the change of the capacitor is generated. When the finger returns to the initial state, the capacitance of the sensor can still be well restored to the original value and maintain a stable value; see fig. 12. This excellent recovery performance is mainly attributed to the strong adhesion of the VHB double-sided tape, which makes the carbon nanotube film 2 very well adhered to the VHB double-sided tape less susceptible to the external environment.

A flexible stretchable sensor and use of a flexible stretchable sensor prepared by a method of preparing the flexible stretchable sensor, the flexible stretchable sensor measuring a tensile force and/or a pressure. The flexible stretchable sensor obtained by the invention is used for detecting the motion state of a human body by a flexible robot or an electronic skin, and can realize the monitoring of the motion of fingers as shown in fig. 11.

It should be understood that the above-described specific embodiments are merely illustrative of the present invention and are not intended to limit the present invention. Obvious variations or modifications which are within the spirit of the invention are possible within the scope of the invention.