阅读说明：本技术 一种微型光谱仪及光谱检测方法 (Micro spectrometer and spectrum detection method ) 是由 朱亮 于 2019-09-20 设计创作，主要内容包括：本发明适用于光谱仪技术领域,提供一种微型光谱仪及光谱检测方法。本发明实施例通过提供一种由滤光片阵列、光探测器和处理器组成的微型光谱仪,通过设置于待测光束的传播光路的滤光片阵列对待测光束进行滤光,得到N束待测子光束；通过设置于滤光片阵列的出射光路的光探测器,探测N束待测子光束的光强度；通过与光探测器电连接的处理器根据N束待测子光束的光强度得到光谱响应函数的N个不相关的线性方程组,并根据N个不相关的线性方程组得到N束待测子光束的光谱值,完成对待测光束的光谱检测,结构简单、体积小且方便携带。(The invention is applicable to the technical field of spectrometers, and provides a micro spectrometer and a spectrum detection method. The embodiment of the invention provides a micro spectrometer consisting of an optical filter array, an optical detector and a processor, wherein optical filters are arranged on the optical filter array of a propagation light path of a light beam to be measured to filter the light beam to be measured, so that N sub light beams to be measured are obtained; detecting the light intensity of the N sub-beams to be detected through a light detector arranged on an emergent light path of the optical filter array; the optical detector is electrically connected with the processor, N irrelevant linear equation sets of the spectral response function are obtained according to the light intensity of the N sub-beams to be detected, the spectral values of the N sub-beams to be detected are obtained according to the N irrelevant linear equation sets, the spectral detection of the light beams to be detected is completed, and the optical detector is simple in structure, small in size and convenient to carry.)

1. A micro spectrometer, comprising:

the optical filter array is arranged on a propagation light path of the light beam to be detected and used for filtering the light beam to be detected to obtain N sub-light beams to be detected, and the optical filter array comprises at least one electrochromic optical filter or at least one photochromic optical filter;

the optical detector is arranged on an emergent light path of the optical filter array and used for detecting the light intensity of the N sub beams to be detected;

the processor is electrically connected with the optical detector and is used for obtaining N irrelevant linear equation sets of a spectral response function according to the light intensity of the N beams of sub-beams to be detected, obtaining the spectral value of the N beams of sub-beams to be detected according to the N irrelevant linear equation sets and finishing the spectral detection of the beams to be detected;

wherein N is not less than 1 and N is an integer.

2. The micro spectrometer of claim 1, wherein the filter array comprises:

the n electrochromic optical filters are sequentially arranged along the propagation light path of the light beam to be detected, each of the n electrochromic optical filters comprises a first working mode and a second working mode which can be switched with each other, the transmittances of the n electrochromic optical filters in the first working mode are different from each other, and the n electrochromic optical filters are used for realizing 2ⁿCombining different working modes, filtering the light beam to be measured to obtain the light beam to be measured and the light beam to be measured 2ⁿCombining N beams of sub-beams to be detected corresponding to different working modes;

the first electronic switches are used for connecting the corresponding electrochromic optical filter with a preset voltage signal when being closed, so that the corresponding electrochromic optical filter is in a first working mode; the first electronic switch is also used for disconnecting the electric connection between the corresponding electrochromic optical filter and a preset voltage signal when the corresponding electrochromic optical filter is disconnected, so that the corresponding electrochromic optical filter is in a second working mode;

therein, 2ⁿN is equal to or greater than 1 and N is an integer.

3. The micro spectrometer of claim 2, wherein the n electrochromic filters are connected in parallel and switched in a same first preset voltage signal and/or a same second preset voltage signal;

or the n electrochromic optical filters are respectively connected to different first preset voltage signals and/or different second preset voltage signals.

4. The micro spectrometer of claim 1, wherein the filter array comprises:

n photochromic filters arranged in sequence along the propagation light path of the light beam to be detected, wherein each photochromic filter comprises a first working mode and a second working mode which can be switched mutuallyThe n photochromic filters have different transmittances in the first working mode, and are used for realizing the step 2ⁿCombining different working modes, filtering the light beam to be measured to obtain the light beam to be measured and the light beam to be measured 2ⁿCombining N beams of sub-beams to be detected corresponding to different working modes;

each light source module corresponds to one photochromic optical filter, and the light source modules are used for emitting light with preset power when being connected with a preset power supply signal so as to enable the corresponding photochromic optical filters to be in a first working mode; the light source module is also used for enabling the corresponding photochromic optical filter to be in a second working mode when the light emitting is stopped;

the light source module comprises n first electronic switches, wherein each first electronic switch is correspondingly and electrically connected with one light source module, and when the first electronic switches are closed, the corresponding light source modules are connected with a preset power supply signal and emit light at preset power; the first electronic switch is also used for stopping the corresponding light source module from emitting light when the light source module is disconnected;

therein, 2ⁿN is equal to or greater than 1 and N is an integer.

5. The micro spectrometer of claim 4, wherein the n first electronic switches are closed for accessing the same predetermined power signal;

or the n first electronic switches are closed and used for respectively accessing different preset power signals.

6. The micro spectrometer of any of claims 2-5, wherein the expression of the N uncorrelated sets of linear equations is as follows:

T_ki(λ)＝T_k1(i＝1),T_ki(λ)＝1(i＝0)；

wherein, I_sequenceSequence table showing the light intensity of the sub-beams to be measuredShowing the combination of the working modes, S (lambda) showing the spectral value of the sub-beam to be measured with a wavelength of lambda, T_ki(λ) represents a transmittance function of the first filter, i represents an operation mode of the first filter, 1 represents the first operation mode, 0 represents the second operation mode, 1 > T_k1＞0。

7. The micro spectrometer of any of claims 1-5, wherein the filter array further comprises at least one broadband filter, and different broadband filters are used for filtering out stray light in different bandwidth ranges in the light beam to be detected when the different broadband filters are located in the incident light path of the at least one electrochromic filter or the at least one photochromic filter.

8. The micro spectrometer of claim 7, wherein the filter array further comprises:

the second electronic switch is electrically connected with the processor and is used for being switched on or switched off under the control of the processor;

the motor is mechanically connected with the at least one broadband optical filter, is electrically connected with the second electronic switch, is electrically connected with the processor when the second electronic switch is switched off, moves under the control of the processor, and switches one of the at least one broadband optical filter to the incident light path of the at least one electrochromic optical filter or the at least one photochromic optical filter; the second motor is also used for disconnecting the electric connection with the processor and stopping moving when the second electronic switch is disconnected;

or, the optical filter array further includes a mechanical switch, where the mechanical switch is mechanically connected to the at least one broadband optical filter, and is used for a user to manually control the mechanical switch to switch one of the at least one broadband optical filter to an incident light path of the at least one electrochromic optical filter or the at least one photochromic optical filter.

9. The micro spectrometer of claim 1, further comprising a beam expanding and collimating device disposed in a propagation path of the light beam to be measured and located in an incident path of the filter array, and configured to expand and collimate the light beam to be measured and emit the expanded and collimated light beam to the filter array.

10. A method for detecting a spectrum, which is implemented based on the micro spectrometer of any one of claims 1 to 9, the method for detecting a spectrum comprising:

filtering the light beam to be detected to obtain N sub light beams to be detected;

detecting the light intensity of the N sub light beams to be detected;

obtaining N irrelevant linear equations of the spectral response function according to the light intensity of the N sub-beams to be detected;

obtaining the spectrum values of the N beams of sub-beams to be detected according to the N unrelated linear equation sets, and completing the spectrum detection of the beams to be detected;

wherein N is not less than 1 and N is an integer.

Technical Field

The invention belongs to the technical field of spectrometers, and particularly relates to a micro spectrometer and a spectrum detection method.

Background

A spectrometer is a device for measuring the intensity of light at different wavelength positions of light, and generally consists of an entrance slit, a dispersion system, an imaging system and one or more exit slits. The method is widely applied to the fields of environment detection, thin film industry, semiconductor industry, component detection, biomedical application, fluorescence measurement, gem component detection, oxygen concentration sensor, thin film thickness measurement, color measurement and the like.

At present, the grating elements, the prism elements, the tunable optical filter and other dispersion elements forming a dispersion system are generally large in size, and the size of the dispersion element determines the size of the spectrometer to a great extent, so that the spectrometer is large in size, inconvenient to carry, not beneficial to integration with an imaging system, and severely limited in application field of the spectrometer.

Disclosure of Invention

In view of this, embodiments of the present invention provide a micro spectrometer and a spectrum detection method, so as to solve the problems that in the prior art, the size of a dispersion element, such as a grating element, a prism element, a tunable filter, and the like, which form a dispersion system, is usually large, and the size of the dispersion element determines the size of the spectrometer to a great extent, so that the spectrometer is large in size, inconvenient to carry, not conducive to integration with an imaging system, and severely limits the application field of the spectrometer.

A first aspect of an embodiment of the present invention provides a micro spectrometer, including:

the optical filter array is arranged on a propagation light path of the light beam to be detected and used for filtering the light beam to be detected to obtain N sub-light beams to be detected, and the optical filter array comprises at least one electrochromic optical filter or at least one photochromic optical filter;

the optical detector is arranged on an emergent light path of the optical filter array and used for detecting the light intensity of the N sub beams to be detected;

the processor is electrically connected with the optical detector and is used for obtaining N irrelevant linear equation sets of a spectral response function according to the light intensity of the N beams of sub-beams to be detected, obtaining the spectral value of the N beams of sub-beams to be detected according to the N irrelevant linear equation sets and finishing the spectral detection of the beams to be detected;

wherein N is not less than 1 and N is an integer.

In one embodiment, the filter array comprises:

the n electrochromic optical filters are sequentially arranged along the propagation light path of the light beam to be detected, each of the n electrochromic optical filters comprises a first working mode and a second working mode which can be switched with each other, the transmittances of the n electrochromic optical filters in the first working mode are different from each other, and the n electrochromic optical filters are used for realizing 2ⁿCombining different working modes, filtering the light beam to be measured to obtain the light beam to be measured and the light beam to be measured 2ⁿCombining N beams of sub-beams to be detected corresponding to different working modes;

the first electronic switches are used for connecting the corresponding electrochromic optical filter with a preset voltage signal when being closed, so that the corresponding electrochromic optical filter is in a first working mode; the first electronic switch is also used for disconnecting the electric connection between the corresponding electrochromic optical filter and a preset voltage signal when the corresponding electrochromic optical filter is disconnected, so that the corresponding electrochromic optical filter is in a second working mode;

therein, 2ⁿN is equal to or greater than 1 and N is an integer.

In one embodiment, the n electrochromic filters are connected in parallel and are connected with a same first preset voltage signal and/or a same second preset voltage signal;

or the n electrochromic optical filters are respectively connected to different first preset voltage signals and/or different second preset voltage signals.

In one embodiment, the filter array comprises:

the n photochromic optical filters are sequentially arranged along the propagation light path of the light beam to be detected, each photochromic optical filter comprises a first working mode and a second working mode which can be mutually switched, the transmittances of the n photochromic optical filters in the first working mode are different, and the n photochromic optical filters are used for realizing 2ⁿCombining different working modes, filtering the light beam to be measured to obtain the light beam to be measured and the light beam to be measured 2ⁿCombining N beams of sub-beams to be detected corresponding to different working modes;

each light source module corresponds to one photochromic optical filter, and the light source modules are used for emitting light with preset power when being connected with a preset power supply signal so as to enable the corresponding photochromic optical filters to be in a first working mode; the light source module is also used for enabling the corresponding photochromic optical filter to be in a second working mode when the light emitting is stopped;

the light source module comprises n first electronic switches, wherein each first electronic switch is correspondingly and electrically connected with one light source module, and when the first electronic switches are closed, the corresponding light source modules are connected with a preset power supply signal and emit light at preset power; the first electronic switch is also used for stopping the corresponding light source module from emitting light when the light source module is disconnected;

therein, 2ⁿN is equal to or greater than 1 and N is an integer.

In one embodiment, the n first electronic switches are closed to access the same preset power signal;

or the n first electronic switches are closed and used for respectively accessing different preset power signals.

In one embodiment, the expression of the N uncorrelated sets of linear equations is as follows:

sequence＝(0,0,0,…,0)～(1,1,1,…,1)；

T_ki(λ)＝T_k1(i＝1),T_ki(λ)＝1(i＝0)；

wherein, I_sequenceExpressing the light intensity of the sub-beam to be measured, sequence expressing the combination of the working modes, S (lambda) expressing the spectral value of the sub-beam to be measured with the wavelength lambda, T_ki(λ) represents a transmittance function of the first filter, i represents an operation mode of the first filter, 1 represents the first operation mode, 0 represents the second operation mode, 1 > T_k1＞0。

In an embodiment, the filter array further includes at least one broadband filter, and different broadband filters are used for filtering stray light in different bandwidth ranges in the to-be-detected light beam when located in an incident light path of the at least one electrochromic filter or the at least one photochromic filter.

In one embodiment, the filter array further comprises:

the second electronic switch is electrically connected with the processor and is used for being switched on or switched off under the control of the processor;

the motor is mechanically connected with the at least one broadband optical filter, is electrically connected with the second electronic switch, is electrically connected with the processor when the second electronic switch is switched off, moves under the control of the processor, and switches one of the at least one broadband optical filter to an incident light path of the at least one electrochromic optical filter or the at least one photochromic optical filter; the second motor is also used for disconnecting the electric connection with the processor and stopping moving when the second electronic switch is disconnected;

or, the optical filter array further includes a mechanical switch, where the mechanical switch is mechanically connected to the at least one broadband optical filter, and is used for a user to manually control the mechanical switch to switch one of the at least one broadband optical filter to an incident light path of the at least one electrochromic optical filter or the at least one photochromic optical filter.

In an embodiment, the micro spectrometer further includes a beam expanding and collimating device, which is disposed in the propagation light path of the light beam to be measured and located in the incident light path of the optical filter array, and is configured to expand and collimate the light beam to be measured and then emit the light beam to the optical filter array.

A second aspect of the embodiments of the present invention provides a spectrum detection method, which is implemented based on the micro spectrometer provided in the first aspect of the embodiments of the present invention, and the spectrum detection method includes:

filtering the light beam to be detected to obtain N sub light beams to be detected;

detecting the light intensity of the N sub light beams to be detected;

obtaining N irrelevant linear equations of the spectral response function according to the light intensity of the N sub-beams to be detected;

obtaining the spectrum values of the N beams of sub-beams to be detected according to the N unrelated linear equation sets, and completing the spectrum detection of the beams to be detected;

wherein N is not less than 1 and N is an integer.

The embodiment of the invention provides a micro spectrometer consisting of an optical filter array, an optical detector and a processor, wherein optical filters are arranged on the optical filter array of a propagation light path of a light beam to be measured to filter the light beam to be measured, so that N sub light beams to be measured are obtained; detecting the light intensity of the N sub-beams to be detected through a light detector arranged on an emergent light path of the optical filter array; the optical detector is electrically connected with the processor, N irrelevant linear equation sets of the spectral response function are obtained according to the light intensity of the N sub-beams to be detected, the spectral values of the N sub-beams to be detected are obtained according to the N irrelevant linear equation sets, the spectral detection of the light beams to be detected is completed, and the optical detector is simple in structure, small in size and convenient to carry.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed for the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic diagram of a first structure of a micro spectrometer provided by an embodiment of the present invention;

FIG. 2 is a schematic diagram of a second structure of a micro spectrometer provided by an embodiment of the invention;

FIG. 3 is a schematic diagram of a third structure of a micro spectrometer provided by an embodiment of the present invention;

FIG. 4 is a schematic diagram of a fourth structure of a micro spectrometer provided by an embodiment of the present invention;

FIG. 5 is a schematic diagram of a fifth configuration of a micro spectrometer according to an embodiment of the present invention;

FIG. 6 is a schematic diagram of a sixth configuration of a micro spectrometer according to an embodiment of the present invention;

FIG. 7 is a schematic flow chart of a spectral detection method provided by an embodiment of the present invention;

FIG. 8 is a diagram illustrating a seventh structure of a micro spectrometer according to an embodiment of the present invention.

Detailed Description

In order to make the technical solutions of the present invention better understood by those skilled in the art, the technical solutions in the embodiments of the present invention will be clearly described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.